WO2015140028A1 - Réacteur et procédé de production de polysilicium granulaire - Google Patents

Réacteur et procédé de production de polysilicium granulaire Download PDF

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Publication number
WO2015140028A1
WO2015140028A1 PCT/EP2015/055143 EP2015055143W WO2015140028A1 WO 2015140028 A1 WO2015140028 A1 WO 2015140028A1 EP 2015055143 W EP2015055143 W EP 2015055143W WO 2015140028 A1 WO2015140028 A1 WO 2015140028A1
Authority
WO
WIPO (PCT)
Prior art keywords
reactor
component
silicon
heating
fluidized bed
Prior art date
Application number
PCT/EP2015/055143
Other languages
German (de)
English (en)
Inventor
Dirk Weckesser
Original Assignee
Wacker Chemie Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie Ag filed Critical Wacker Chemie Ag
Priority to US15/126,921 priority Critical patent/US10258951B2/en
Priority to CA2941326A priority patent/CA2941326C/fr
Priority to ES15709911.0T priority patent/ES2666171T3/es
Priority to CN201580013982.0A priority patent/CN106132530B/zh
Priority to JP2016557936A priority patent/JP6328788B2/ja
Priority to KR1020167024734A priority patent/KR101850830B1/ko
Priority to EP15709911.0A priority patent/EP3119511B1/fr
Publication of WO2015140028A1 publication Critical patent/WO2015140028A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/1836—Heating and cooling the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
    • B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
    • B01J8/42—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique with fluidised bed subjected to electric current or to radiations this sub-group includes the fluidised bed subjected to electric or magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00389—Controlling the temperature using electric heating or cooling elements
    • B01J2208/00415—Controlling the temperature using electric heating or cooling elements electric resistance heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00796—Details of the reactor or of the particulate material
    • B01J2208/00893—Feeding means for the reactants
    • B01J2208/00902—Nozzle-type feeding elements

Definitions

  • the invention relates to a reactor, in particular a fluidized bed reactor, and a method for producing granular polysilicon.
  • Fluidized bed reactors are used, for example, to produce trichlorosilane (TCS) by the reaction of metallurgical silicon with HCl at 350-400 ° C.
  • Fluidized bed reactors are also used to produce polycrystalline silicon granules. This is done by fluidization of silicon particles by means of a gas flow in a fluidized bed, which is heated by a heater to high temperatures. By adding a silicon-containing reaction gas, a pyrolysis reaction takes place on the hot particle surface. Here, elemental silicon is deposited on the silicon particles and the individual particles grow in diameter. By the regular withdrawal of grown particles and addition of smaller silicon particles as seed particles, the process can be operated continuously with all the associated advantages.
  • silicon-containing educt gas there are described silicon-halogen compounds (eg chlorosilanes or bromosilanes), monosilane (S1H4), and mixtures of these gases with hydrogen. Such deposition methods and devices for this purpose are known, for example, from US Pat. No. 4,784,477.
  • US 5382412 A discloses a process for the production of polycrystalline silicon in a fluidized bed reactor wherein silicon feedstocks are fed to the reactor to form a bed of silicon particles; the reactor bed into a reaction zone in which a gaseous or vaporous silicon source as silicon metal is deposited on the silicon particles at a reaction temperature and subdivided into a heating zone in which a fraction of the silicon particles is heated above the reaction temperature; a reaction gas having the silicon source is introduced into the reaction zone, thereby fluidizing the silicon particles in the reaction zone; a carrier gas is introduced into the heating zone, thereby fluidizing the silicon particles in the heating zone; the silicon particles in the heating zone are heated by introducing microwave energy into the heating zone; the silicon particles in an upper region of the heating zone are coated with silicon particles of the reaction zone.
  • US 7029632 B2 discloses a fluidized bed reactor having a pressure-bearing shell, an inner reactor tube that transmits heat radiation, a silicon particle inlet, a tubular inlet for supplying a reaction gas dividing the fluidized bed into a heating zone and an overlying reaction zone, a gas distribution device for supplying a Fluidizing gas in the heating zone, an outlet for unreacted reaction gas, fluidizing gas and the gas or vapor products of the reaction, an outlet for the product, a heater and a power supply for the heater, wherein it is proposed that the heating device is a radiation source for thermal radiation which is arranged outside of the inner reactor tube and without direct contact to this ring around the heating zone and is designed such that it heats the silicon particles in the heating zone to such a temperature by means of thermal radiation since the reaction temperature is set in the reaction zone.
  • the heating device is a radiation source for thermal radiation which is arranged outside of the inner reactor tube and without direct contact to this ring around the heating zone and is designed such that it heats the silicon particles
  • heating zone and reaction zone are vertically separated. This makes it possible to heat the fluidized bed with other heating methods than with microwaves, since there can be no wall deposition in the heating zone, because there is no silicon-containing gas there. It is provided a heat radiation heating with planar heater elements, which introduces the heat evenly over the circumference of the fluidized bed and locally defined.
  • the silicon particles in the fluidized bed can be heated directly over the circumference of the heating zone. Only a small portion of the heat radiation is absorbed by the reactor tube and heats this.
  • the heating device is, for example, heating elements made of doped silicon or graphite or silicon carbide, quartz tube radiators, ceramic radiators or metal wire radiators. Particularly preferably, the heating device is a meander-shaped slotted tube made of graphite with SiC surface coating, which is arranged in the reactor standing or hanging on the electrode terminals.
  • an inert gas such as H 2 , N 2 , Ar, He or a mixture of said gases. Subsequently, the cooled silicon particles are removed, the reactor dismantled, the reactor tube replaced by a new one, the reactor reassembled and filled silicon particles in the reactor tube.
  • WO 2008/018760 A1 discloses protective tubes for heating devices in a fluidized bed reactor, wherein the heating devices are located inside the protective tube.
  • the protective tubes serve to prevent or minimize contamination of silicon particles by the heaters.
  • WO 93/20933 A1 describes a susceptor which is mounted between the reactor wall and an inductor.
  • the reactor wall is heated by radiant heating.
  • the susceptor is electrically conductive and is heated by induction. In this way, a uniform temperature distribution of the reactor wall can be achieved.
  • the susceptor consists of high-temperature-resistant, heat-conducting material, preferably of graphite.
  • this susceptor acts like a radiation shield and makes the process uneconomical.
  • a reactor for the production of granular polysilicon by deposition of polycrystalline silicon on silicon seed particles comprising a reactor vessel, an inner reactor tube for a fluidized bed with granular polysilicon and a reactor bottom within the reactor vessel, a heater for heating the Fluidized bed in the inner reactor tube, at least one bottom gas nozzle for supplying fluidizing gas and at least one reaction gas nozzle for supplying reaction gas, a supply device to supply silicon seed particles and a granular polysilicon discharge line and a device for removing reactor exhaust gas from the reactor vessel in that there is a cylindrical component between inner reactor tube and heating device which has openings on its lateral surface, at least 5% and at most 95% of the outer surface being open.
  • this ratio is 40-70%, more preferably 45-60%.
  • the openings may be slots, cutouts, meshes, holes, etc.
  • the component may for example have the form of a cylindrical grid. Upwards or downwards or in both directions (base and top surface of the cylinder), the component is preferably opened. This facilitates the dismantling of the reactor.
  • the heating device may be a meander-shaped heater or a plurality of heating elements or heating strips.
  • the heater consists of several concentrically arranged around the inner reactor tube heating elements.
  • the component which is likewise arranged concentrically around the inner reactor tube is preferably located between the heating elements and the inner reactor tube.
  • the component consists of a good heat-conducting material.
  • the heat energy is transmitted to the component by heat radiation and heat conduction and causes it to glow.
  • the heating elements are in openings of the lateral surface of the component.
  • the openings may be cutouts in which the heating strips are located.
  • the component comprises a material selected from the group consisting of graphite, CFC, silicon, SiC and quartz glass.
  • the component may consist of one or more of the materials mentioned.
  • the component may be coated with one or more of said materials.
  • the fluidized bed reactor consists of a reactor vessel into which an inner reactor tube is inserted. Inside the reactor tube is the fluidized bed with the polysilicon granules, the fluidized bed is heated by the heater. As an addition to the reactor, the fluidizing gas and the reaction gas mixture are fed. The gas supply takes place specifically via nozzles. The fluidizing gas is supplied via a bottom gas nozzle and the reaction gas mixture via so-called secondary gas nozzles (reaction gas nozzles). The height of the secondary gas nozzles may differ from the height of the bottom gas nozzles. In the reactor, a bubble-forming fluidized bed with additional vertical Sekundärgaseindüsung formed by the arrangement of the nozzles. About a feeder be the Reactor fed to silicon seed particles.
  • the polysilicon granules product is removed via a sampling line at the bottom of the reactor. Via a device for removing reactor exhaust gas, the reactor exhaust gas is withdrawn. It has surprisingly been found that the use of a previously mentioned component between the heating device and the reactor tube in addition to a homogenization of the temperature is also suitable to protect the heater during the extension of the reactor, In the prior art came due to the breakup of the reactor tube to damage the heating elements. This can be avoided by the present invention. The component is insensitive to refracting parts of the reactor tube and can be reused. In addition, unlike the prior art, there is no radiation shield since the component has openings and thus the energy input into the fluidized bed takes place in a more economical manner.
  • Fig. 1 shows in two views schematically how the component between heaters and reactor tube is arranged.
  • Fig. 2 shows a first embodiment of the component.
  • Fig. 3 shows a second embodiment of the component. List of references used 101 Heaters
  • 104 fluidized bed fluidized bed 104 is located in the inner reactor tube 103.
  • component 102 Between the heater 101 and inner reactor tube 103 is the component 102.
  • heater 101 and component 102 are arranged concentrically around inner reactor tube 103.
  • 2 and 3 show two embodiments of components that can be used, but should not limit the general inventive concept in any way. 2, a component is shown in which 55% of the lateral surface are open. The openings have a rectangular shape (slots in the longitudinal direction of the cylinder) and are evenly distributed on the lateral surface of the cylindrical member. This embodiment is particularly well suited to arrange heating elements in the openings.
  • the invention also relates to a process for the production of granular polysilicon using a reactor according to the invention, comprising fluidizing silicon seed particles by means of a gas flow in a fluidized bed, which is heated by means of a heater, wherein by addition of a silicon-containing reaction gas by means of pyrolysis polycrystalline silicon to the hot Seed particle surfaces is deposited, whereby the granular polysilicon is formed.
  • the process is operated continuously by removing particles grown by deposition in the diameter of the reactor and added fresh seed particles are added.
  • the temperature of the fluidized bed in the reaction region is preferably 850-1 100 ° C, more preferably 900-1050 ° C, most preferably 920-970 ° C.
  • the fluidizing gas is preferably hydrogen.
  • the reaction gas is injected via one or more nozzles in the fluidized bed.
  • the local gas velocities at the outlet of the nozzles are preferably 0.5 to 200 m / s.
  • the concentration of the silicon-containing reaction gas is preferably 10 mol% to 50 mol%, particularly preferably 15 mol% to 40 mol%, based on the total amount of gas flowing through the fluidized bed.
  • the concentration of the silicon-containing reaction gas in the reaction gas nozzles is preferably 20 mol% to 80 mol%, particularly preferably 30 mol% to 60 mol%, based on the total amount of gas flowing through the reaction gas nozzles.
  • the silicon-containing reaction gas is preferably trichlorosilane.
  • the reactor pressure ranges from 0 to 7 barü, preferably in the range 0.5 to 4.5 barü.
  • the mass flow of trichlorosilane is preferably 200 to 400 kg / h.
  • the hydrogen volume flow is preferably 100 to 300 Nm 3 / h.
  • higher amounts of TCS and H 2 are preferred. It will be understood by those skilled in the art that some process parameters are ideally selected depending on the reactor size. Reactor heating power, seed particle dosing rate and bed weight are also important for larger reactors.
  • the specific mass flow of trichlorosilane is preferably 1600-5500 kg / (h * m 2 ).
  • the specific hydrogen volume flow is preferably 800-4000
  • the specific bed weight is preferably 800-2000 kg / m 2 .
  • the specific seed particle dosing rate is preferably 8-25 kg / (h * m 2 ).
  • the specific reactor heating power is preferably 800-3000 kW / m 2 .
  • the average diameter of the silicon particles (seed particles) is preferably at least 400 ⁇ .
  • the granular polysilicon preferably has particle sizes of 150-0000 ⁇ m, a mass-related median value of a particle size distribution being 850-2000 ⁇ m.
  • the residence time of the reaction gas in the fluidized bed is preferably 0.1 to 10 s, more preferably 0.2 to 5 s,

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)

Abstract

L'invention concerne un réacteur servant à la production de polysilicium granulaire par dépôt de silicium polycristallin sur des particules de germes de silicium, comprenant une cuve de réacteur, un tube de réacteur intérieur destiné à un lit fluidisé de polysilicium granulaire et une partie inférieure de réacteur à l'intérieur de la cuve de réacteur, un dispositif de chauffage servant à chauffer le lit fluidisé à l'intérieur du tube de réacteur, une ou plusieurs buses de gaz de fond servant à amener un gaz de fluidisation et une ou plusieurs buses de gaz de réaction servant à amener un gaz de réaction, un dispositif d'alimentation servant à amener des particules de germes de silicium et un conduit d'évacuation du polysilicium granulaire, et un moyen d'évacuation de gaz de sortie de réacteur de la cuve de réacteur. L'invention est caractérisée en ce qu'entre le tube de réacteur intérieur et le dispositif de chauffage est disposé un composant cylindrique qui comporte des orifices sur sa surface d'enveloppe, 5% au moins et 95% au plus de la surface d'enveloppe étant ouvertes.
PCT/EP2015/055143 2014-03-18 2015-03-12 Réacteur et procédé de production de polysilicium granulaire WO2015140028A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
US15/126,921 US10258951B2 (en) 2014-03-18 2015-03-12 Reactor and process for preparing granular polysilicon
CA2941326A CA2941326C (fr) 2014-03-18 2015-03-12 Reacteur et procede de production de polysilicium granulaire
ES15709911.0T ES2666171T3 (es) 2014-03-18 2015-03-12 Reactor y procedimiento para la producción de polisilicio granulado
CN201580013982.0A CN106132530B (zh) 2014-03-18 2015-03-12 制备粒状多晶硅的反应器及方法
JP2016557936A JP6328788B2 (ja) 2014-03-18 2015-03-12 粒状ポリシリコンを製造するための反応器および方法
KR1020167024734A KR101850830B1 (ko) 2014-03-18 2015-03-12 입상 폴리실리콘 제조용 반응기 및 제조 방법
EP15709911.0A EP3119511B1 (fr) 2014-03-18 2015-03-12 Réacteur et procédé de production de polysilicium granulaire

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014205025.1 2014-03-18
DE102014205025.1A DE102014205025A1 (de) 2014-03-18 2014-03-18 Reaktor und Verfahren zur Herstellung von granularem Polysilicium

Publications (1)

Publication Number Publication Date
WO2015140028A1 true WO2015140028A1 (fr) 2015-09-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2015/055143 WO2015140028A1 (fr) 2014-03-18 2015-03-12 Réacteur et procédé de production de polysilicium granulaire

Country Status (11)

Country Link
US (1) US10258951B2 (fr)
EP (1) EP3119511B1 (fr)
JP (1) JP6328788B2 (fr)
KR (1) KR101850830B1 (fr)
CN (1) CN106132530B (fr)
CA (1) CA2941326C (fr)
DE (1) DE102014205025A1 (fr)
ES (1) ES2666171T3 (fr)
SA (1) SA516371842B1 (fr)
TW (1) TWI579419B (fr)
WO (1) WO2015140028A1 (fr)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
DE102016204651A1 (de) 2016-03-21 2017-09-21 Wacker Chemie Ag Quetschmanschetten für die Herstellung von Polysilicium-Granulat
WO2019068335A1 (fr) * 2017-10-05 2019-04-11 Wacker Chemie Ag Procede de preparation de chlorosilanes

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KR20150015920A (ko) * 2013-08-02 2015-02-11 삼성전자주식회사 자기 메모리 장치 및 그 제조 방법
KR101876870B1 (ko) * 2017-04-20 2018-07-12 한국생산기술연구원 고온 부식 방지를 위한 액체금속의 유동장치 및 이의 작동방법

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WO2007130613A2 (fr) * 2006-05-04 2007-11-15 Sri International Système de réacteur à lit mobile et à décharge de plusieurs arcs

Cited By (6)

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Publication number Priority date Publication date Assignee Title
DE102016204651A1 (de) 2016-03-21 2017-09-21 Wacker Chemie Ag Quetschmanschetten für die Herstellung von Polysilicium-Granulat
WO2017162414A1 (fr) 2016-03-21 2017-09-28 Wacker Chemie Ag Réacteur à lit fluidisé à garnitures à pincement pour la production de silicium polycristallin granulaire et procédé et utilisation associés
US10512887B2 (en) 2016-03-21 2019-12-24 Wacker Chemie Ag Fluidized bed reactor with pinching fittings for producing polysilicon granulate, and method and use for same
WO2019068335A1 (fr) * 2017-10-05 2019-04-11 Wacker Chemie Ag Procede de preparation de chlorosilanes
EP3858788A1 (fr) * 2017-10-05 2021-08-04 Wacker Chemie AG Procédé de préparation de chlorosilanes
US11643330B2 (en) 2017-10-05 2023-05-09 Wacker Chemie Ag Method for producing chlorosilanes

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KR20160119203A (ko) 2016-10-12
CA2941326A1 (fr) 2015-09-24
KR101850830B1 (ko) 2018-04-20
EP3119511A1 (fr) 2017-01-25
US20170120210A1 (en) 2017-05-04
EP3119511B1 (fr) 2018-02-28
US10258951B2 (en) 2019-04-16
JP2017513790A (ja) 2017-06-01
TWI579419B (zh) 2017-04-21
ES2666171T3 (es) 2018-05-03
TW201536968A (zh) 2015-10-01
SA516371842B1 (ar) 2019-12-15
CN106132530B (zh) 2019-12-20
CA2941326C (fr) 2018-04-10
CN106132530A (zh) 2016-11-16
JP6328788B2 (ja) 2018-05-23
DE102014205025A1 (de) 2015-09-24

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