WO2015100823A1 - 配向膜涂布方法及装置 - Google Patents

配向膜涂布方法及装置 Download PDF

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Publication number
WO2015100823A1
WO2015100823A1 PCT/CN2014/071165 CN2014071165W WO2015100823A1 WO 2015100823 A1 WO2015100823 A1 WO 2015100823A1 CN 2014071165 W CN2014071165 W CN 2014071165W WO 2015100823 A1 WO2015100823 A1 WO 2015100823A1
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WIPO (PCT)
Prior art keywords
alignment
substrate
alignment film
supply pipe
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2014/071165
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English (en)
French (fr)
Inventor
陈杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
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Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US14/348,853 priority Critical patent/US9375733B2/en
Publication of WO2015100823A1 publication Critical patent/WO2015100823A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/002—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour incorporating means for heating or cooling, e.g. the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723—Polyimide, polyamide-imide

Definitions

  • Liquid crystal displays have many advantages such as thin body, power saving, and no radiation, and have been widely used.
  • liquid crystal displays are passive light-emitting devices, and liquid crystal materials do not emit light by themselves, because most of the liquid crystal displays on the market today are backlight-type liquid crystal displays, which include a liquid crystal display panel and a backlight module.
  • a liquid crystal display panel comprises a color filter (CF) substrate, a thin film transistor (TFT) array substrate, and a liquid crystal sandwiched between the color filter film substrate and the thin film transistor array substrate (Liquid Crystal, LC).
  • the sealant composition, the molding process generally includes:
  • the front-end array (Array) process mainly forms a thin film transistor substrate to control the movement of liquid crystal molecules; the middle-stage cell (Cell) process is mainly in a thin film transistor array substrate and a color filter film.
  • the thin film transistor array substrate and the color filter film substrate; the rear module assembly process is mainly the integration of the driving circuit and the printed circuit board, thereby driving the liquid crystal display image
  • an alignment film (PI, ie, polyimide) is usually formed on a thin film transistor (TFT) array substrate and a color filter film (CF) substrate, and then Thin film transistor The thin film transistor array substrate and the color filter film substrate are bonded together under the crystal vacuum state, and finally the sealing frame glue is cured by ultraviolet irradiation, and the sealing of the thin film transistor array substrate and the color filter film substrate is completed as shown in FIG.
  • the alignment film coating technology usually adopts inkjet printing (iiiJ ⁇ jet) technology, and the specific operation steps are as follows: first, the alignment liquid is placed in a pressurized tank 100, and then the pump is connected through the pressure tank 100 and the supply tank 200.
  • the 300 delivers the alignment liquid into the supply tank 200, and then The alignment liquid in the supply tank 200 is sent to the alignment liquid discharge head 500 through the supply pipe 400, and the alignment liquid discharge head 500 finally applies the alignment liquid to the substrate 700 placed on the table 600 which can be moved back and forth, left and right, and the like, thereby realizing the alignment. Film coating.
  • the main components of the alignment liquid are polyimide, N-methylpyrrolidinium (NMP), ethylene glycol butyl ether (BC), etc., and the viscosity thereof is high.
  • NMP N-methylpyrrolidinium
  • BC ethylene glycol butyl ether
  • the viscosity thereof is high.
  • existing ink jet printing techniques do not effectively eject them, and the uniformity of the alignment film surface is not guaranteed.
  • an object of the present invention to provide an alignment film coating method which can maintain a high viscosity alignment liquid in a supply pipe by heating a supply pipe and maintaining a temperature in the supply pipe through a heat insulating material supplied to the outer surface of the pipe. Successfully ejected, improving the uniformity of the surface of the alignment film, thereby ensuring product quality and improving product yield.
  • Another object of the present invention is to provide an alignment film coating device which has a simple structure, can heat the supply pipe when conveying the alignment liquid, and maintain the temperature in the supply pipe through the heat insulating material on the outer surface of the supply pipe, so as to be supplied into the pipe.
  • the high-viscosity alignment liquid can be smoothly ejected, which improves the uniformity of the surface of the alignment film, thereby ensuring product quality and improving product yield.
  • the present invention provides an alignment film coating method comprising the following steps: Step 1. Providing a substrate to be coated with an alignment film, and placing the substrate to be coated with the alignment film in a front, back, left, and right direction Moving on the workbench;
  • Step 2 providing a pressurized tank, and placing a certain amount of the alignment liquid in the pressurized tank;
  • Step 3 providing a supply tank, and conveying the alignment liquid in the pressurized tank to the pump through a pump In the supply tank;
  • Step 4 Connect the supply tank and the alignment liquid nozzle through a supply pipe, and heat the supply pipe to reduce the viscosity of the alignment liquid, so that the alignment liquid smoothly enters the alignment liquid nozzle;
  • Step 5 Applying a low-viscosity alignment liquid to the base plate of the alignment film to be coated by the alignment liquid nozzle, and moving the work table back and forth as needed during the coating process, so that the alignment liquid is uniformly applied to the substrate. On the substrate, the coating of the alignment film is completed.
  • the substrate to be coated with the alignment film is a thin film transistor array substrate or a color filter film substrate.
  • the heating pipe is heated in an electric heating mode or a water heating mode.
  • step 4 after heating the supply pipe to 30-60 Torr, the heating is stopped, and the temperature in the supply pipe is maintained within the temperature range.
  • the outer surface of the supply pipe has a layer of insulating material.
  • the invention also provides an alignment film coating device, comprising a pressure tank for placing an alignment liquid, a supply tank for supplying an alignment liquid, a liquid pump for connecting the pressure tank and the supply tank, an alignment liquid nozzle for spraying the alignment liquid, a supply line for connecting the supply tank and the alignment liquid nozzle, a substrate to which the alignment film is to be coated, and a table for placing a substrate to be coated with an alignment film for transporting an alignment liquid from the pressurizing tank into the supply tank, the supply conduit for using an alignment liquid from the The supply tank is delivered to the alignment liquid nozzle, and the drying conduit is a heatable supply conduit.
  • the worktable can be moved back and forth, left and right, and the substrate to be coated with the alignment film is a thin film transistor array substrate or a color filter film substrate.
  • the heating mode of the supply pipe is an electric heating method or a water heating method.
  • the temperature in the supply conduit was 30 60 Torr when the alignment liquid was delivered.
  • the outer surface of the baking pipe has a layer of heat insulating material.
  • the present invention also provides an alignment film coating apparatus comprising a pressure tank for placing an alignment liquid, a supply tank for supplying an alignment liquid, a liquid pump for connecting the pressure tank and the supply tank, and a spray liquid for spraying the alignment liquid.
  • the working table can be moved back and forth, left and right; the substrate to be coated with the alignment film is a thin film transistor column substrate or a color film, and the temperature of the plate in the supply pipe is 30-601 when the alignment liquid is delivered: .
  • the outer surface of the supply pipe has a layer of insulating material.
  • the alignment film coating method and apparatus of the present invention can smoothly spray a high-viscosity alignment liquid in a supply pipe by heating a supply pipe and maintaining a temperature in the supply pipe through a heat insulating material supplied to the outer surface of the pipe.
  • the uniform coating of the high-viscosity alignment liquid is ensured, and the uniformity of the surface of the alignment film is improved, thereby ensuring product quality and improving product yield.
  • FIG. 1 is a schematic structural view of an alignment film coating device in the prior art
  • ⁇ 3 is the structure of the film coating device of the present invention.
  • Figure 4 is a bottom plan view of the alignment liquid nozzle of Figure 3. detailed description
  • the present invention provides an alignment film coating method, comprising the following steps: Step 1. Providing a substrate to be coated with an alignment film, and placing the substrate to be coated with the alignment film in a front, back, left, and right direction Moving on the workbench.
  • the substrate to be coated with the alignment film is a thin film transistor array substrate or a color filter film substrate.
  • the worktable can be controlled to move back and forth, left and right, and left and right by a control device.
  • Step 2 providing a pressurized tank, and placing a certain amount of the alignment liquid in the pressurized tank.
  • the main components of the alignment liquid are polyimide, N-methylpyrrolidone (NMP), ethylene glycol Ether (BC) and the like.
  • Step 3 A supply tank is provided, and the alignment liquid in the pressurized tank is sent to the supply tank through a pump.
  • the supply tank, the suction pump, and the pressurizing tank are conventional apparatuses, and their connection methods are also existing connection methods.
  • Step 4 Connect the supply tank and the alignment liquid nozzle through a supply pipe, and heat the supply pipe to reduce the viscosity of the alignment liquid, so that the alignment liquid smoothly enters the alignment liquid nozzle.
  • the heating means may be heated by electric heating or ice heating.
  • the outer surface of the supply pipe has a layer of insulating material. After heating the supply pipe to 30-60 ⁇ :, stop heating and maintain the temperature in the supply pipe within this temperature range, so as to avoid excessive temperature and partial components in the alignment liquid in the supply pipe. Volatilization can reduce the viscosity of the alignment liquid, so that the alignment liquid can smoothly enter the alignment liquid nozzle, ensuring the smooth discharge of the alignment liquid, and ensuring the uniformity of the surface of the alignment film.
  • Step 5 Applying a low-viscosity alignment liquid to the substrate of the alignment film to be coated by the alignment liquid nozzle, and moving the table back and forth as needed during the coating process, so that the alignment liquid is uniformly applied to the substrate. Then, the coating of the alignment film is completed.
  • the present invention further provides an alignment film coating apparatus comprising a pressure tank 20 for placing an alignment liquid, a supply tank 22 for supplying an alignment liquid, a connection pressure tank 20 and a supply tank.
  • the supply tank 22 is delivered to the alignment liquid discharge head 26, which is a heatable supply conduit 28.
  • the table 32 can be controlled to move back and forth, left and right, and left and right by a control device 34.
  • the substrate 30 to be coated with the alignment film is a thin film transistor array substrate or a color filter film substrate.
  • the main components of the alignment liquid are polyimide, N-mercaptopyrrolidone (NMP), ethylene glycol butyl ether (BC), and the like.
  • connection mode of the supply tank 22, the pumping pump 24, and the pressurizing tank 20 is also a conventional connection method.
  • the alignment liquid nozzle 26 has a rectangular parallelepiped shape and has an accommodating space therein.
  • the top of the alignment liquid nozzle 26 is connected to the supply pipe 28, so that the alignment liquid in the supply pipe 28 flows into the accommodating space, and the bottom portion thereof has a small circle. And a hole for ejecting the alignment liquid in the accommodating space onto the substrate 30 of the alignment film to be coated.
  • the supply pipe 28 needs to be heated when conveying the alignment liquid, and the heating mode of the supply pipe 28 is an electric heating method or a water heating method.
  • the temperature in the supply line 28 when transporting the alignment liquid is 30 60 ° C. This can be stopped by heating the supply line 28 to 30-60 Torr, and the temperature of the supply line 28 is maintained at this temperature range.
  • the internal solution can avoid the excessive temperature and volatilize some components in the alignment liquid in the supply pipe 28, and can reduce the viscosity of the alignment liquid, so that the alignment liquid can smoothly enter the alignment liquid nozzle 26, and the alignment liquid is ensured smoothly.
  • the spray is sprayed to ensure the uniformity of the surface of the alignment film.
  • the outer surface of the supply pipe 28 has a layer of insulating material 29, which ensures that the temperature in the supply pipe 28 is maintained within a desired temperature range, which facilitates the circulation of the alignment liquid.
  • the alignment film coating method and apparatus of the present invention can smoothly spray the high viscosity alignment liquid in the supply pipe by heating the supply pipe and maintaining the temperature in the supply pipe through the heat insulating material supplied to the outer surface of the pipe.
  • the uniform coating of the high viscosity alignment liquid is ensured, and the uniformity of the surface of the alignment film is improved, thereby ensuring the product quality and improving the product yield.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

提供了一种配向膜涂布方法及装置。配向膜涂布方法包括：步骤一（1）、提供一待涂布配向膜的基板（30），并将基板（30）置于一能前后左右来回移动的工作台（32）上；步骤二（2）、提供一加压槽（20）,并将一定量的配向液置于加压槽（20）内；步骤三（3）、提供一供给槽（22），并通过一抽液泵（24）将加压槽（20）内的配向液输送至供给槽（22）内；步骤四（4）、通过一供给管道（28）连接配向液喷头（26），并对供给管道（28）进行加热，降低配向液的粘度，使配向液顺利进入配向液喷头（26）内；步骤五（5）、通过配向液喷头（26）将低粘度的配向液涂布于待涂布配向膜的基板（30）上，并在涂布过程中根据需要来回移动工作台（32），使配向液均匀地涂布于基板（30）上，进而完成配向膜的涂布，因此，提高了配向膜表面的均一性，进而保证了产品质量，提高了产品良率。

Description

配向膜涂布方法及装
晶显示制造技术， #' '方法及;
背景;
液晶显示器（Liquid Crystal Display, LCD )具有机身薄、 省电、 无辐 射等众多优点， 得到了广泛的应用。 但众所周知， 液晶显示器为被动发光 器件， 液晶材料本身不发光， 因,¾现有市场上的液晶显示器大部分为背光 型液晶显示器， 其包括液晶显示面板及背光模组（ backlight module ) 。
液晶显示面板的工作原理是在两片平行的玻璃基板当中放置液晶分 子， 通过在两片玻璃基板上施加驱动电压来控制液晶分子改变方向， 将背 光模组的光线折射出来产生画面。 通常液晶显示面板由彩色滤光膜（Color Filter, CF )基板、 薄膜晶体管 ( Thin Film Transistor, TFT ) 阵列基板、 夹于彩色滤光膜基板与薄膜晶体管阵列基板之间的液晶 （Liquid Crystal, LC ) 及密封胶框 （ Sealant ) 组成， 其成型工艺一般包括： 前段阵列
( Array )制程.（薄膜。 黄光。 蚀刻及剥膜） 、 中段成盒（ Cdi )制程 （薄 膜晶体管基板与彩色滤光膜基板贴合）及后段模组组装制程 （驱动电路
( IC ) 与印刷电路板压合） 。 其中， 前段阵列 （Array )制程主要是形成薄 膜晶体管基板， 以便于控制液晶分子的运动； 中段成盒（Cell ) 制程主要 是在薄膜晶体管阵列基板与彩色滤光膜
Figure imgf000003_0001
薄膜晶体管阵列基板与彩色滤光膜基板之间； 后段模组组装制程主要是驱 动电路压合与印刷电路板的整合， 进而驱动液晶 显示图像
目前， 在液晶显示面板的中段成盒制程中， 通常会先在薄膜晶体管 ( TFT ) 阵列基板和彩色滤光膜 （CF )基板上制作一层配向膜（PI, 即聚 酰亚胺） ， 然后在薄膜晶体管
Figure imgf000003_0002
晶 真空状态下将薄膜晶体管阵列基板和彩色滤光膜基板贴合， 最后经过紫外 线照射将密封框胶固化， 完成薄膜晶体管阵列基板和彩色滤光膜基板的封 如图 1 所示， 现有的配向膜涂布技术通常采用喷墨印刷 （iiiJ<jet )技 术， 具体操作步骤为： 先将配向液放置于一加压槽 100 内， 然后通过连接 加压槽 100和供给槽 200的抽液泵 300将配向液输送至供给槽 200内， 再 通过供给管道 400将供给槽 200 内的配向液输送至配向液喷头 500， 配向 液喷头 500 最后将配向液涂布于放置在可以前后左右来回移动的工作台 600上的基板 700上， 进而实现配向膜涂布。
但， 配向液的主要成分是聚酰亚胺、 N-甲基吡咯烷嗣 ( NMP ) 、 乙二 醇丁醚（BC )等， 其粘度较高。 对于高粘度的配向液， 现有的喷墨印刷技 术无法有效将其喷出， 配向膜表面的均一性无法保证。
' 因此， 本发明的目的在于提供一种配向膜涂布方法， 通过对供给管道 加热， 并通过供给管道外表面的保温材料维持供给管道内的温度， 使供给 管道内的高粘度的配向液能顺利喷出， 提高了配向膜表面的均一性， 进而 保证了产品质量， 提高了产品良率。
本发明的又一目的在于提供一种配向膜涂布装置， 结构简单， 在输送 配向液时可对供给管道加热， 并通过供给管道外表面的保温材料维持供给 管道内的温度， 使供给管道内的高粘度的配向液能顺利喷出， 提高了配向 膜表面的均一性， 进而保证了产品质量， 提高了产品良率。
为实现上述目的， 本发明提供一种配向膜涂布方法， 包括以下步骤： 步骤 1、 提供一待涂布配向膜的基板， 并将该待涂布配向膜的基板置 于一能前后左右来回移动的工作台上；
步骤 2、 提供一加压槽， 并将一定量的配向液置于该加压槽内； 步骤 3、 提供一供给槽， 并通过一抽液泵将所述加压槽内的配向液输 送至该供给槽内；
步骤 4、 通过一供给管道连接供给槽与配向液喷头， 并对供给管道进 行加热， 降低配向液的粘度， 使配向液顺利进入配向液喷头内；
步骤 5、 通过配向液喷头将低粘度的配向液涂布于待涂布配向膜的基- 板上， 并在涂布过程中根据需要来回移动工作台， 使配向液均勾地涂布于 所述基板上， 进而完成配向膜的涂布。
所述待涂布配向膜的基板为薄膜晶体管阵列基板或彩色滤光膜基板。 所述步骤 4 中， 对供给管道进行加热的方式为电加热方式或水加热方 式。
所述步骤 4 中， 将供给管道.加热至 30- 60Ό后， 停止加热， 并使供给 管道内的温度维持在该温度范围内。
所述供给管道外表面具有一层保温材料。
本发明还提供一种配向膜涂布装置， 包括用于放置配向液的加压槽、 用于供给配向液的供给槽、 连接加压槽与供给槽的抽液泵， 用于喷涂配向 液的配向液喷头、 连接供给槽与配向液喷头的供给管道、 待涂布配向膜的 基板及用于放置待涂布配向膜的基板的工作台， 所述抽液泵用于将配向液 从所述加压槽输送至所述供给槽内， 所述供给管道用于将配向液从所述供 给槽输送至所述配向液喷头， 所述烘给管道为可加热供给管道。
所述工作台能前后左右来回移动； 所述待涂布配向膜的基板为薄膜晶 体管阵列基板或彩色滤光膜基板。
所述供给管道的加热方式为电加热方式或水加热方式。
在输送配向液时所述供给管道内的温度为 30 60Ό。
所述烘给管道外表面具有一层保温材料。
本发明还提供一种配向膜涂布装置， 包括用于放置配向液的加压槽、 用于供给配向液的供给槽、 连接加压槽与供给槽的抽液泵、 用于喷涂配向 液的配向液喷头、 连接供给槽与配向液喷头的供给管道、 待涂布配向膜的 基板及用于放置待涂布配向膜的基板的工作台， 所述抽液泵用于将配向液 从所述加压槽输送至所述供给槽内， 所述供给管道用于将配向液从所述供 给槽输送至所述配向液喷头， 所述供给管道为可加热供给管道；
其中， 所述工作台能前后左右来回移动； 所述待涂布配向膜的基板为 薄膜晶体管 列基板或 色，光膜，板 在输送配向液时所述供给管道内的温度为 30- 601：。
所述供给管道外表面具有一层保温材料。
本发明有益效果： 本发明配向膜涂布方法及装置， 通过对供给管道加 热， 并通过供给管道外表面的保温材料维持供给管道内的温度， 使供给管 道内的高粘度的配向液能顺利喷出， 保证了高粘度的配向液均匀涂布， 提 高了配向膜表面的均一性， 进而保证了产品质量， 提高了产品良率。 附图说明
下面结合附图， 通过对本发明的具体实施方式详细描述， 将使本发明 的技术方案及其他有益效果显而易见。
附图中，
图 1为现有技术中配向膜涂布装置的结构示意图；
^ 3为本发明 膜涂布装置 结构 意图；
图 4为图 3中配向液喷头的底部俯视图。 具体实施方式
请参阅图 2， 本发明提供一种配向膜涂布方法， 包括以下步骤： 步骤 1、 提供一待涂布配向膜的基板， 并将该待涂布配向膜的基板置 于一能前后左右来回移动的工作台上。
所述待涂布配向膜的基板为薄膜晶体管阵列基板或彩色滤光膜基板。 所述工作台可通过一控制装置控制其前后左右来回移动。
步骤 2、 提供一加压槽， 并将一定量的配向液置于该加压槽内„ 所述配向液的主要成分是聚酰亚胺、 N-甲基吡咯烷酮 （NMP ) 、 乙二 醇丁醚（BC )等。
步骤 3、 提供一供给槽， 并通过一抽液泵将所述加压槽内的配向液输 送至该供给槽内。
该供给槽、 抽液泵及加压槽为现有的装置， 它们的连接方式也为现有 的连接方式。
步骤 4、 通过一供给管道连接供给槽与配向液喷头， 并对供给管道进 行加热， 降低配向液的粘度， 使配向液顺利进入配向液喷头内。
该步骤中， 对供给管道进行加热的方式可以为电加热方式或氷加热方 式。 所述供给管道外表面具有一层保温材料。 在将供给管道加热至 30-60 τ:后， 停止对其加热， 并使供给管道内的温度维持在该温度范围内， 这样 既可以避免温度过高使供给管道内的配向液中的部分成分挥发， 又可以降 低配向液的粘度， 使配向液能顺利进入配向液喷头内， 保证了配向液顺利 喷出， 进 保证了配向膜表面的均一性。
步骤 5、 通过配向液喷头将低粘度的配向液涂布于待涂布配向膜的基 板上， 并在涂布过程中根据需要来回移动工作台， 使配向液均勾地涂布于 所述基板上， 进而完成配向膜的涂布。
请参阅图 3 至图 4， 本发明还提供一种配向膜涂布装置， 包括用于放 置配向液的加压槽 20、 用于供给配向液的供给槽 22、 连接加压槽 20与供 给槽 22 的抽液泵 24、 用于喷涂配向液的配向液喷头 26、 连接 4: 给槽 2.2 与配向液喷头 26的供给管道 28、 待涂布配向膜的基板 30及用于放置待涂 布配向膜的基板 30的工作台 32， 所述抽液泵 24用于将配向液从所述加压 槽 20输送至所述供给槽 22 内， 所述供给管道 28用于将配向液.从所述供 给槽 22输送至所述配向液喷头 26， 所述供给管道 28 为可加热供给管道 28。
所述工作台 32可通过一控制装置 34控制其前后左右来回移动。 所述待涂布配向膜的基板 30 为薄膜晶体管阵列基板或彩色滤光膜基 板。 所述配向液的主要成分是聚酰亚胺、 N-曱基吡咯烷酮 ( NMP ) 、 乙二 醇丁醚（BC )等。
所述供给槽 22、 抽液泵 24及加压槽 20的连接方式也为现有的连接方 式。
所述配向液喷头 26 为长方体状， 其内部有一容置空间， 其顶部与所 述供给管道 28连接， 进而使供给管道 28内的配向液流入该容置空间内， 其底部具有一圓形小孔， 用于将所述容置空间内的配向液喷出至所述待涂 布配向膜的.基板 30上。
所述供给管道 28在输送配向液时需要被加热， 所述供给管道 28的加 热方式为电加热方式或水加热方式。 在输送配向液时所述供给管道 28 内 的温度为 30 60°C， 这可以通过将所述供给管道 28加热至 30- 60Ό后， 停 止加热， 并使供给管道 28 的温度维持在该温度范围内实现， 这祥既可以 避免温度过高使供给管道 28 内的配向液中的部分成分挥发， 又可以降低 配向液的粘度， 使配向液能顺利进入配向液喷头 26 内， 保证了配向液顺 利喷出， 进而保证了配向膜表面的均一性。
所述供给管道 28外表面具有一层保温材料 29, 可以保证所述供给管 道 28内的温度保持在所需的温度范围内， 有利于配向液的流通。
综上所述， 本发明配向膜涂布方法及装置， 通过对供给管道加热， 并 通过供给管道外表面的保温材料维持供给管道内的温度， 使供给管道内的 高粘度的配向液能顺利喷出， 保证了高粘度的配向液均匀涂布， 提高了配 向膜表面的均一性， 进而保证了产品.质量， 提高了产品良率。
以上所述， 对于本领域的普通技术人员来说， 可以根据本发明的技术 方案和技术构思作出其他各种相应的改变和变形， 而所有这些改变和变形 都应属于本发明后附的权利要求的保护范围。

Claims

权 利 要 求 一种配向膜涂布方法， 包括以下步骤：
一待涂布配向膜的基板， 并将该待涂布配向膜的基板置
Figure imgf000008_0001
步骤 2、 提供一加压槽， 并将一定量的配向液置于该加压槽内； 步骤 3、 提供一供给槽， 并通过一抽液泵将所述加压槽内的配向液输 送至该供给槽内；
步骤 4、 通过一供给管道连接供给槽与配向液喷头， 并对供给管道进 行加热， 降低配向液的粘度, 使配向液顺利进入配向液喷头内；
步骤 5、 通过配向液喷头将低粘度的配向液涂布于待涂布配向膜的基 板上， 并在涂布过程中根据需要来回移动工作台， 使配向液均匀地涂布于 所述基板上， 进而完成配向膜的涂布。
2、 如权利要求 1 所述的配向膜涂布方法， 其中， 所述待涂布配向膜 的基板为薄膜晶体管阵列基板或彩色滤光膜基板。
3、 如权利要求 1 所述的配向膜涂布方法， 其中， 所述步骤 4 中， 对 供给管道进行加热的方式为电加热方式或水加热方式。
4、 如权利要求 3 所述的配向膜涂布方法， 其中， 所述步驟 4 中， 将 供给管道加热至 30- 60Ό后， 停止加热， 并使供给管道内的温度维持在该 温度范围内。
5、 如权利要求 4 所述的配向膜涂布方法， 其中， 所述供给管道外表 面具有一层保温材料。
6、 一种配向膜涂布装置， 包括用于放置配向液的加压槽、 用于供给 配向液的供给槽、 连接加压槽与供给槽的抽液泵、 用于喷涂配向液的配向 液喷头、 连接供给槽与配向液喷头的供给管道、 待涂布配向膜的基板及用 于放置待涂布配向膜的基板的工作台， 所述抽液泵用于将配向液从所述加 压槽输送至所述供给槽内， 所述供给管道用于将配向液从所述供给槽输送 至所述配向液喷头， 所述供给管道为可加热供给管道。
1、 如权利要求 6 所述的配向膜涂布装置， 其中， 所述工作台能前后 左右来回移动； 所述待涂布配向膜的基板为薄膜晶体管阵列基板或彩色滤 光膜基板。
8、 如权利要求 6 所述的配向膜涂布装置， 其中， 所述供给管道的加 热方式为电力口热方式或水力 B热方式
9 , 如权利要求 8 所述的配向膜涂布装置， 其中， 在输送配向液时所 述供给管道内的温度为 30 60Ό。
10、 如权利要求 9所述的配向膜涂布装置， 其中， 所述供给管道外表 面具有一层保温材料。
11、 一种配向膜涂布装置， 包括用于放置配向液的加压槽、 用于供给 配向液的供给槽、 连接加压槽与供给槽的抽液泵、 用于喷涂配向液的配向 液喷头、 连接供给槽与配向液喷头的供给管道、 待涂布配向膜的基板及用 于放置待涂布配向膜的基板的工作台， 所述抽液泵用于将配向液从所述加 压槽输送至所述供给槽内， 所述供给管道用于将配向液从所述供给槽输送 至所述配向液喷头， 所述烘给管道为可加热供给管道；
其中， 所述工作台能前后左右来回移动； 所述待涂布配向膜的基板为 薄膜晶体管阵列基板或彩色滤光膜基板。
12、 如权利要求 11 所述的配向膜涂布装置， 其中， 所述供给管道的 加热方式为电加热方式或水加热方式。
13、 如权利要求 12 所述的配向膜涂布装置， 其中， 在输送配向液时 所述供给管道内的温度为 30- 60°C。
14、 如权利要求 13 所述的配向膜涂布装置， 其中， 所述供给管道外 表面具有一层保温材料 '。
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