WO2015079716A1 - 振動アクチュエータ - Google Patents
振動アクチュエータ Download PDFInfo
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- WO2015079716A1 WO2015079716A1 PCT/JP2014/053969 JP2014053969W WO2015079716A1 WO 2015079716 A1 WO2015079716 A1 WO 2015079716A1 JP 2014053969 W JP2014053969 W JP 2014053969W WO 2015079716 A1 WO2015079716 A1 WO 2015079716A1
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- WIPO (PCT)
- Prior art keywords
- output shaft
- vibration
- electrodes
- vibrator
- vibration actuator
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- 230000002093 peripheral effect Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 230000033001 locomotion Effects 0.000 abstract description 19
- 239000013307 optical fiber Substances 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 8
- 238000012634 optical imaging Methods 0.000 description 8
- 239000000523 sample Substances 0.000 description 7
- 238000012014 optical coherence tomography Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
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- 230000000750 progressive effect Effects 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
Definitions
- the present invention relates to a vibration actuator that rotates and linearly moves by giving a vibration wave to an output shaft by vibration of a vibrator (including a piezoelectric element and an electrostrictive element).
- a male screw shaft (120) is slidably inserted into a female threaded nut member (110), and a clearance (697b) is provided between the nut member (110) and the male screw shaft (120). Then, a voltage is sequentially applied to the piezoelectric elements (132a to 132d) attached to the four surfaces of the nut member (110), and rotational vibration is applied to the nut member (110), thereby rotating the male screw shaft (120).
- a linear motor system (100) for parallel translation in the axial direction is shown.
- the male screw shaft is slidably combined with the nut member with the female screw, and the clearance is provided between the nut member and the male screw shaft.
- the transmission efficiency was low and sufficient driving force could not be obtained.
- vibration was absorbed by the tube, and a sufficient driving force could not be obtained for the male screw shaft.
- the piezoelectric element (2, 3, 4, 5) is directly attached to the rectangular cylindrical elastic body 1, and the driver (7) is attached to the inner peripheral surface of the rectangular cylindrical elastic body (1).
- Ultrasonic linear that is pressed by the spring (8), a voltage is applied to the piezoelectric element (2, 3, 4, 5), and the shaft and the shaft are displaced in the axial direction when the rectangular cylindrical elastic body vibrates.
- a motor is shown.
- a shaft-like actuator (12) is inserted into a hole in a prismatic stator (11), and voltage is sequentially applied to a plurality of piezoelectric elements (13) attached to the stator (11).
- An ultrasonic scanning device is shown in which an axial actuator is rotated or moved in the axial direction by applying a vibration wave when applied.
- the present invention has been made in view of the above-described conventional circumstances, and the problem to be solved is that it is small in size and has sufficient driving force, and vibration waves are not absorbed or inhibited even when incorporated in a tube such as an endoscope.
- An object of the present invention is to provide a vibration actuator capable of obtaining stable performance.
- One means for solving the above problem is that in a vibration actuator in which an output shaft moves due to vibration, a hole is provided on a substantially central axis of a substantially polygonal columnar vibrator, and a radial force is generated to generate a spring force in the hole. An extending slit is provided, and the output shaft is inserted through the hole. Then, the first and second vibrators having patterned electrodes are attached to one surface of the outer periphery of the vibration element parallel to the output shaft of the vibration element and the opposite surface, and electrode patterns of these pattern electrodes A progressive wave is generated in the vibration element by sequentially applying a voltage to the output shaft, and rotation and axial displacement are applied to the output shaft.
- a compact vibration actuator that can be used for both linear motion and rotational motion is obtained, and even if incorporated in a cylindrical tube for an endoscope, vibration is not hindered, so that a stable output can be obtained.
- the first feature of the vibration actuator according to the present embodiment is that the substantially polygonal column-shaped vibrating element has a hole on the substantially central axis, has a slit portion extending radially in the hole, and the output shaft in the hole. Is inserted, and the first vibrator is attached to at least one of the outer peripheral surfaces of the vibration element in parallel with the output shaft, and the first vibrator is attached.
- a second vibrator is affixed to a surface opposite to the first face, and each of the first vibrator and the second vibrator has a pattern electrode. By sequentially applying a voltage to the electrode pattern, a traveling wave is generated in the vibration element, and a displacement that gives rotation and axial displacement is applied to the output shaft. With this configuration, it is possible to obtain a vibration actuator that can generate a stable force by allowing the traveling wave generated by the vibration element to rotate and linearly move to the output shaft and perform the rotation and linear motion.
- a third vibrator having a pattern electrode is attached to a side surface of the vibration element having the hole, and the first vibrator, the second vibrator, and the By sequentially applying a voltage to the electrode pattern of the pattern electrode of the third vibrator, a traveling wave is generated in the vibration element, and rotation and axial displacement are applied to the output shaft. According to this configuration, a large traveling wave can be generated by the compact vibration element, and stable rotation and linear motion can be given to the output shaft.
- the vibrator is a piezoelectric element or an electrostrictive element. According to this configuration, a large traveling wave can be generated by a compact vibrator due to the piezoelectric effect or the electrostrictive effect, and a stable rotation and linear motion can be given to the output shaft with a large force.
- FIG. 1 is a perspective view of a vibration actuator according to an embodiment of the present invention.
- the substantially polygonal column-shaped vibrating element 8 (a quadrangular column in FIG. 1) has a sliding hole 8a penetrating on the substantially central axis thereof, and the sliding hole 8a has a slit portion 8b extending radially, and this sliding
- the output shaft 3 is inserted into the moving hole 8a, and at least one surface 8c on the outer periphery of the vibrating element 8 parallel to the output shaft 8a and the first and second electrodes 10 having pattern electrodes 10 on the opposing surface 8d.
- the piezoelectric element 9 is affixed. Each piezoelectric element 9 is provided with a patterned electrode 10 by a noble metal sputtering method or a conductive ink printing method.
- N electrodes A1 to An and N electrodes B1 to Bn are arranged in the axial direction.
- N electrodes C1 to Cn are similarly arranged in the axial direction.
- N electrodes from D1 to Dn and N electrodes from E1 to En are arranged on the opposing outer peripheral surface 8d.
- N electrodes F1 to Fn are similarly arranged in the axial direction.
- the slit portion 8a is provided substantially radially from the output shaft 3 or at a plurality of locations (two locations in FIG. 1), generates a spring property in the vibrating element 8, and is stable between the output shaft 3 and the sliding hole 8a.
- a frictional force (for example, a force of about 1 Newton) is generated.
- a hole 3a is formed in the approximate center of the output shaft 3, and an optical fiber or an operation wire for an endoscope is inserted into the hole 3a as necessary.
- a substantially sinusoidal voltage is sequentially applied to the pattern-like electrode 10 in FIG. 1 through the electric wires 11a and 11b in FIG. 5.
- the output shaft 3 moves in the linear motion direction (arrow in the figure). M) or in the direction of rotation (arrow P in the figure).
- the voltage is firstly set to D1 (not shown) at a position facing the electrodes A1, B1, C1, and C1, and at a position facing B1.
- E1 (not shown) and F1 (not shown) at positions facing A1 are applied to a total of six electrodes.
- D2 (not shown) at a position facing the electrodes A2, B2, C2, and C2, E2 (not shown) at a position facing the B2, and F2 (not shown) at a position facing the A2. Applied to a total of 6 electrodes.
- D3 at a position facing the electrodes A3, B3, C3, and C3, E3 (not shown) at a position facing the B3, and F3 (not shown) at a position facing the A3. Applied to a total of 6 electrodes.
- the fourth is applied to a total of six electrodes A4, B4, C4, D4, E4, and F4.
- it is applied again to a total of six electrodes A1, B1, C1, D1, E1, and F1 applied first, and this is repeated.
- the output shaft 3 slides in the direction of arrow M.
- the vibration actuator 12 of the present invention has a simple structure, it is possible to provide the thickness and volume of the piezoelectric element 9 much larger than the general weight as compared with the weight and volume of the vibration element 8. A greater force can be generated.
- the thickness of the piezoelectric element 9 in FIG. 1 is t1
- the thickness of the re-thinned portion near the output shaft 3 of the vibration element 8 is t2
- the maximum output is obtained under the condition of t1 ⁇ t2. I was able to.
- the vibration part 8 Since the vibration part 8 is provided with the slit portion 8b, the spring force is generated and the output shaft is pressed with a stable force. Therefore, the generated force of the output 3 is stable with little change.
- 5 to 7 are application examples of the vibration actuator according to the first embodiment of the present invention, and are diagrams of an optical imaging probe of the OCT endoscope apparatus.
- the output shaft 3 is supported by two bearings 7a and 7b so as to be rotatable and slidable.
- the vibration actuator 12 is weakly supported in the tube 6 by a leaf spring, soft rubber or the like as necessary, and is fixed so that the vibration of the vibration actuator 12 is not hindered.
- near-infrared rays emitted from an endoscope apparatus main body are guided to the optical fiber 1 shown in FIG. 5, emitted forward from the condenser lens 2, and substantially perpendicular to the optical path changing means 4a.
- the radiation angle is converted to.
- the optical path changing means 4 is rotated by the vibration actuator 12, the light beam is radiated in the entire 360 direction including the direction 13a in the figure.
- the light beam passes through the translucent part 16 and is irradiated to a non-specimen such as an affected part of the human body, and the reflected light from the non-specimen is in a direction opposite to the direction in which the light beam is guided, in the optical path changing means 4 and the condenser lens. 2.
- the vibration actuator 12 continues to operate as follows to start capturing a three-dimensional image.
- FIG. 6 shows the range of light rays emitted from the optical path changing means 4.
- d2 means a range in which near-infrared rays are transmitted, but it has a diameter of about 4 to 20 mm (millimeters).
- d1 means the outer diameter of the tube 6, and the diameter is about 2 mm (millimeter).
- Ls is the travel distance of the output shaft 3 but is about 2 to 10 mm (millimeters), and the light beam 13a in FIG. 1 is slightly refracted by the translucent part 16 and spreads and radiates at an angle of ⁇ 1 and ⁇ 2.
- three-dimensional observation of the OCT endoscope is performed within a range indicated by La in FIG.
- FIG. 7 shows a timing chart of the optical imaging probe of the present invention.
- the upper waveform shows ON-OFF when the voltage is applied to the pattern electrode 10 in the direction in which the output shaft 3 rotates, and the middle waveform applies voltage in the direction in which the output shaft 3 moves linearly.
- the ON-OFF state is shown, and the positive displacement is expressed as positive, and the reverse displacement is expressed as negative.
- the lower waveform is an output waveform of the fixed sensors 14a and 14b shown in FIG.
- the endoscope apparatus When the user (doctor or the like) of the endoscope apparatus operates the switch by operation, the endoscope apparatus is caused to generate a start pulse.
- the output shaft 3 is first shown in FIG. Rotation is started at a slow speed of about 60 to 120 [rotation / min] in the direction indicated by the arrow P, and secondly, a pulse is emitted from the rotation detection sensor 14d until the output shaft 3 rotates once.
- the power supply is temporarily stopped, the rotation of the vibration actuator is stopped, and thirdly, the output shaft 3 slides in the positive direction within a certain period of time (for example, 0.01 [seconds]). Move 20 ⁇ m (micrometer).
- the output shaft 3 rotates again in the direction indicated by the arrow P in FIG. 3 at a speed of about 60 to 120 [rotations / minute], and the first, second, and third operations are repeated in this way.
- the output shaft 3 reverses at high speed
- the start position output is detected from the fixed side sensor 14b, the reverse movement is terminated, the energization is stopped, and the output shaft stops both rotation and linear motion.
- the stop position of the output shaft 3 is a standby position, waiting for the next start pulse.
- the optical imaging probe using the vibration actuator can change the direction of light emission to the direction of rotation and linear motion, scan three-dimensionally, and receive, for example, near infrared rays reflected from the affected part of the human body.
- the configuration of the present invention there is no uneven rotation speed of the vibration actuator 12 and the optical path conversion means 4 built in the vicinity of the tip of the tube 6, and the light reflected from the subject such as a human body and incident on the tip side is optical path conversion means.
- a high spatial resolution of 10 ⁇ m can be obtained.
- FIG. 2 is a perspective view of a vibration actuator according to the second embodiment of the present invention.
- the substantially polygonal column-shaped vibrating element 18 has a sliding hole 18a penetrating on the substantially central axis thereof, the sliding hole 18a has a radially extending slit portion 18b, and the output shaft 3 is placed in the sliding hole 18a.
- a total of four piezoelectric elements 9 having patterned electrodes 10 are attached to the outer peripheral surfaces 18c, 18d, 18e, and 18f of the vibration element 18 that are inserted or lightly press-fitted and parallel to the output shaft 3. .
- Each piezoelectric element 9 is provided with a pattern-like electrode 10 such as a grid.
- N electrodes A1 to An and N electrodes B1 to Bn are attached to the surface of the piezoelectric element 9 attached to the outer peripheral surface 18c of the vibration element 18 in the axial direction.
- the adjacent outer peripheral surface 8d is provided with N electrodes C1 to Cn and N electrodes D1 to Dn arranged in an array.
- the piezoelectric element 9 having electrodes E1 to En and F1 to Fn is attached to the outer peripheral face 18e, and the piezoelectric element 9 having electrodes G1 to Gn and H1 to Hn attached to the outer peripheral face 18f. Attached.
- the slit portion 18a is provided at least at one location (two locations in FIG. 2) substantially radially from the output shaft 3, and generates a spring property in the vibrating element 18, so that stable friction is generated between the output shaft 3 and the sliding hole 8a. Generate power.
- the voltage generated in a substantially sinusoidal shape is sequentially applied to the electrode 10 having the pattern shape.
- the output shaft 3 moves in the linear direction (arrow M in the figure and the opposite direction thereof), or It can operate in the direction of rotation (arrow P in the figure and its reverse direction).
- a voltage is first applied to a total of four electrodes A1, B1, C1, and D1, and second, an electrode A2 , B2, C2, D2 applied to a total of four electrodes, the third applied to a total of four electrodes A3, B3, C3, D3, and the fourth applied to electrodes A4, B4, Applied to a total of four electrodes, C4 and D4.
- the voltage is again applied to a total of four electrodes A2, B2, C2, and D2 applied first, and this is repeated.
- a traveling wave in the linear motion direction is generated in the direction of the arrow M on the vibration element 18, and this traveling wave slides the output shaft 3 in the direction of the arrow M.
- the voltage is first applied to a total of eight electrodes A1 to A4 and E1 to E4, and secondly, the electrodes B1 to B4 and F1 are applied.
- F4 a total of 8 electrodes C1 to C4 and G1 to G4, and a fourth to electrodes C1 to C4 and G1 to G4.
- traveling waves are generated in the vibration element 8 in the directions of arrows N and O in the figure, and the output shaft 3 rotates in the direction of arrow P by these two traveling waves.
- the piezoelectric element 9 is attached to all the outer peripheral surfaces of the vibration element 8, and a strong traveling wave can be generated by a large number of piezoelectric elements.
- thick piezoelectric elements are difficult to apply due to the construction, and therefore, a large operating force is generated by applying a large number of thin piezoelectric elements.
- the force of the traveling wave generated from the piezoelectric element 9 is proportional to the number or area of the pasted piezoelectric elements 9 and is also proportional to the thickness of the piezoelectric elements 9, and this principle is taken into consideration.
- the shape and size of the piezoelectric element 9 and the design of the electrode pattern 10 are performed. However, if the piezoelectric element 9 is designed to be thick, the voltage to be applied must be increased in proportion to the thickness. Therefore, the piezoelectric element 9 has design limitations in both thickness and area.
- a compact vibration actuator that performs rotation and linear motion on the output shaft by a single unit can be obtained, and a stable thrust can be generated.
- FIG. 3 is a perspective view of a vibration actuator according to the third embodiment of the present invention.
- the substantially polygonal column-shaped vibration element 28 has a sliding hole 28a on a substantially central axis thereof.
- the sliding hole 28a has slits 28b extending radially, and the output shaft 3 is inserted into the sliding hole 28a.
- the spring 28 is made springy, and a stable frictional force is generated between the output shaft 3 and the sliding hole 28a.
- a total of four piezoelectric elements 9 having patterned electrodes 10 are attached to the outer peripheral surfaces 28c, 28d, 28e, 28f of the vibration element 28 parallel to the output shaft 3, and the sliding holes 28a
- the piezoelectric element 9 having the pattern electrode 10 is also attached to the two side surfaces 28g and 28h having the same.
- An electrode indicated by symbol B2 in the figure is provided on the outer peripheral surface 28c of the vibration element 28, electrodes C2 and D2 are provided on the outer peripheral surface 28d, electrodes indicated by E2 are provided on the outer peripheral surface 28e, and F2 and A2 are provided on the outer peripheral surface 28f. Electrodes are formed on the surface of each piezoelectric element 9. Further, B1 and E1 electrodes are formed on the side surface 28g, and B3 and E3 electrodes are formed on the surface of each piezoelectric element 9 on the side surface 28h, and all these electrodes are combined to form a set of electrode patterns. Yes.
- a voltage generated in a substantially sine wave shape is sequentially applied to the electrode 10 having the pattern shape.
- the output shaft 3 moves in the linear motion direction (arrow M in the figure and the opposite direction), Or it can operate in the direction of rotation (arrow P in the figure and its reverse direction).
- the piezoelectric elements 9 are attached to all the outer peripheral surfaces and side surfaces of the vibration element 8, and a strong traveling wave can be generated by a large number of piezoelectric elements.
- the vibration transmission efficiency is high, and even if incorporated in a cylindrical tube for an endoscope, the vibration is not inhibited and a stable output can be obtained.
- the diameter of the hole 3a of the output shaft 3 is 0.2 to 0.5 mm (millimeters), which is sufficiently larger than the diameter of the optical fiber 1, so that the optical fiber 1 does not contact the hole 3a, but is lightly contacted. However, it is not so much that abrasion powder is generated. Further, there is no problem that the rotational friction torque varies.
- the output shaft 3 shown in FIG. 1 is made of metal or ceramics, and is formed into a hollow shape by drawing molten metal with a mold or extruding ceramic material before firing with a mold, and polishing after hardening treatment. Finished by the method of processing.
- the vibration element 8 since it is desired that the vibration element 8 has a spring property and that the difference in linear expansion coefficient from the piezoelectric element 9 is not large, it is processed by stainless steel, zirconia ceramics, or the like.
- the vibrating element 8 having the slit portion 8b does not necessarily have an integral structure, and may be configured by laminating a large number of thin steel plates, for example.
- the actuator since one vibration actuator performs rotation and linear motion, the actuator is compact and the generated force can be stabilized.
- the optical fiber does not rotate relative to the catheter of an endoscope apparatus or the like, there is no friction and there is no rotation transmission delay or torque fluctuation, and a good three-dimensional image of the endoscope can be obtained.
- the vibration actuator of the present invention is small in size and can sufficiently obtain operating force in the rotational and linear motion directions in a three-dimensional scanning optical imaging probe or the like used in an OCT endoscope system that has rapidly advanced in recent years. .
- vibrations are not absorbed or inhibited, so that stable performance can be provided.
- it can be incorporated in an industrial microrobot hand or the like to obtain a small and large driving force.
- Optical fiber 2 Condensing lens 3 Output shaft 3a Hole 4a, 4b, 4c, 4d optical path changing means 5a, 5b Optical fiber clamp 6 Tube (catheter) 7a, 7b Bearing 8, 18 Vibrator 8a Sliding hole 8b, 18a Slit DESCRIPTION OF SYMBOLS 9 Piezoelectric element 10 Pattern electrode 11a, 11b Electric wire 12 Actuator 13a, 13b Light beam 14a, 14b Fixed side sensor 14c Movement side sensor 16 Translucent part
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Abstract
Description
この構成により、可振子発生した進行波が前記出力軸に、回転および、直動運動を与え、回転及び直動が行え、安定した力を発生する振動アクチュエータを得ることができる。
この構成によれば、コンパクトな可振子により大きな進行波を発生し、前記出力軸に、安定した回転および直動運動を与えることができる。
この構成によれば、圧電効果又は電歪効果によって、コンパクトな可振子により大きな進行波を発生し、大きな力で、前記出力軸に安定した回転および直動運動を与えることができる。
図1は本発明の実施形態に係わる振動アクチュエータの斜視図である。
略多角柱状の可振子8(図1では四角柱)はその略中心軸上に貫通する摺動穴8aを有し、この摺動穴8aには放射状に伸びるスリット部8bを有し、この摺動穴8aに出力軸3が挿通され、少なくともこの出力軸8aに平行な前記可振子8の外周の1つの面8cと、その対向面8dに、パターン状の電極10を有する第1および第2の圧電素子9を貼り付けている。圧電素子9には1枚毎にそれぞれパターン状の電極10が貴金属のスパッタリング法や、導電性インクの印刷工法により設けられている。
その次に再び第1に印加したA1、B1、C1、D1、E1、F1の計6個の電極に印加し、これを繰り返す。これにより出力軸3は矢印M方向に摺動する。
図3は本発明第3の実施形態に係わる振動アクチュエータの斜視図である。
略正弦波状に発生した電圧が、前記パターン状の電極10に順次印加されるが、印加される順序を変えることにより、出力軸3は直動方向(図中矢印Mおよびその逆方向)に、または回転方向(図中矢印P及びその逆回転方向)に動作することができる。
2 集光レンズ
3 出力軸
3a 穴
4a、4b、4c、4d 光路変換手段
5a、5b 光ファイバークランプ
6 チューブ(カテーテル)
7a、7b 軸受
8、18 可振子
8a 摺動穴
8b、18a スリット部
9 圧電素子
10 パターン電極
11a、11b 電線
12 アクチュエータ
13a、13b 光線
14a、14b 固定側センサー
14c 移動側センサー
16 透光部
Claims (3)
- 振動により出力軸が運動する振動アクチュエータにおいて、
略多角柱状の可振子はその略中心軸上に穴を有し、
前記穴に放射状に伸びるスリット部を有し、
前記穴に前記出力軸が挿通され、
前記可振子の外周面のなかで、前記出力軸と平行な面の少なくとも1つの面に、第1の振動子が貼り付けられており、
前記第1の振動子が貼り付けられている面の対向面に、第2の振動子が貼り付けられており、
前記第1の振動子と、前記第2の振動子とは、各々パターン電極を有しており、
前記パターン電極の電極パターンに順次電圧を印加する事で可振子に進行波を発生し、前記出力軸に、回転および軸方向の変位を与えることを特徴とする振動アクチュエータ。
- 前記可振子の前記穴の有る側面に、パターン電極を有する第3の振動子が貼り付けられており、前記第1の振動子及び前記第2の振動子及び前記第3の振動子の前記パターン電極の電極パターンに順次電圧を印加する事で可振子に進行波を発生し、前記出力軸に、回転および軸方向の変位を与えることを特徴とする請求項1記載の振動アクチュエータ。
- 前記振動子は、圧電素子又は電歪素子であることを特徴とする請求項1又は請求項2記載の振動アクチュエータ。
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JP2015550575A JP6351620B2 (ja) | 2013-11-26 | 2014-02-20 | 振動アクチュエータ |
US14/373,009 US20160380178A1 (en) | 2013-11-26 | 2014-02-20 | Vibration actuator |
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US (1) | US20160380178A1 (ja) |
JP (1) | JP6351620B2 (ja) |
WO (1) | WO2015079716A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019009880A (ja) * | 2017-06-22 | 2019-01-17 | 国立大学法人東京農工大学 | 超音波モータ、ロボットアーム、およびメッシュロボット |
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JP2000253681A (ja) * | 1999-02-26 | 2000-09-14 | Honda Electronic Co Ltd | 超音波モータ |
JP2009219281A (ja) * | 2008-03-11 | 2009-09-24 | Fukoku Co Ltd | 圧電アクチュエータ |
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JP3038585B2 (ja) * | 1991-08-21 | 2000-05-08 | 日本ピストンリング株式会社 | カルダン形自在軸継手 |
US5718667A (en) * | 1993-05-27 | 1998-02-17 | Sunstar Kabushikigaisha | Oral hygiene instrument |
JP2000316268A (ja) * | 1999-03-03 | 2000-11-14 | Tokin Corp | 振動アクチュエータ |
US7170214B2 (en) * | 2003-09-08 | 2007-01-30 | New Scale Technologies, Inc. | Mechanism comprised of ultrasonic lead screw motor |
US7309943B2 (en) * | 2003-09-08 | 2007-12-18 | New Scale Technologies, Inc. | Mechanism comprised of ultrasonic lead screw motor |
US6940209B2 (en) * | 2003-09-08 | 2005-09-06 | New Scale Technologies | Ultrasonic lead screw motor |
KR100704990B1 (ko) * | 2005-08-08 | 2007-04-10 | 삼성전기주식회사 | 고정자 및 이를 이용한 세라믹스 튜브형 초음파 모터 |
CN100438307C (zh) * | 2005-11-18 | 2008-11-26 | 清华大学 | 螺纹驱动多面体超声电机 |
WO2008038817A1 (en) * | 2006-09-25 | 2008-04-03 | National University Corporation Tokyo University Of Agriculture And Technology | Ultrasonic operation device and microtube inside system |
JP2009226573A (ja) * | 2008-03-21 | 2009-10-08 | Kazumasa Onishi | 超音波ローラーを用いた超音波ワイヤソー装置 |
US20100019621A1 (en) * | 2008-07-14 | 2010-01-28 | Olympus Corporation | Ultrasonic motor and ultrasonic motor apparatus retaining the same |
US8217553B2 (en) * | 2008-08-18 | 2012-07-10 | New Scale Technologies | Reduced-voltage, linear motor systems and methods thereof |
US8698374B2 (en) * | 2009-05-15 | 2014-04-15 | New Scale Technologies | Automated drive frequency control for resonant actuator systems and methods thereof |
JP2011061894A (ja) * | 2009-09-07 | 2011-03-24 | Olympus Corp | 超音波モータ |
JP5914355B2 (ja) * | 2010-11-30 | 2016-05-11 | オリンパス株式会社 | 圧電アクチュエータ |
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2014
- 2014-02-20 US US14/373,009 patent/US20160380178A1/en not_active Abandoned
- 2014-02-20 JP JP2015550575A patent/JP6351620B2/ja not_active Expired - Fee Related
- 2014-02-20 WO PCT/JP2014/053969 patent/WO2015079716A1/ja active Application Filing
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JP2000253681A (ja) * | 1999-02-26 | 2000-09-14 | Honda Electronic Co Ltd | 超音波モータ |
JP2009219281A (ja) * | 2008-03-11 | 2009-09-24 | Fukoku Co Ltd | 圧電アクチュエータ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019009880A (ja) * | 2017-06-22 | 2019-01-17 | 国立大学法人東京農工大学 | 超音波モータ、ロボットアーム、およびメッシュロボット |
Also Published As
Publication number | Publication date |
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US20160380178A1 (en) | 2016-12-29 |
JP6351620B2 (ja) | 2018-07-04 |
JPWO2015079716A1 (ja) | 2017-03-16 |
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