WO2015072481A1 - 金属皮膜の成膜装置およびその成膜方法 - Google Patents
金属皮膜の成膜装置およびその成膜方法 Download PDFInfo
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- WO2015072481A1 WO2015072481A1 PCT/JP2014/079953 JP2014079953W WO2015072481A1 WO 2015072481 A1 WO2015072481 A1 WO 2015072481A1 JP 2014079953 W JP2014079953 W JP 2014079953W WO 2015072481 A1 WO2015072481 A1 WO 2015072481A1
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- base material
- solid electrolyte
- electrolyte membrane
- film
- suction
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/04—Electroplating with moving electrodes
- C25D5/06—Brush or pad plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/005—Contacting devices
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/14—Electrodes, e.g. composition, counter electrode for pad-plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/002—Cell separation, e.g. membranes, diaphragms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
Definitions
- a metal film is suitably formed by applying a voltage between the anode and the base material to deposit metal on the surface of the base material from metal ions contained in the solid electrolyte membrane.
- the present invention relates to an apparatus for forming a metal film and a method for forming the metal film.
- a nickel film is formed on the surface of the substrate to form a nickel circuit pattern.
- a metal film is formed on the surface of a semiconductor substrate such as Si by a plating process such as an electroless plating process, or a metal film is formed by a PVD method such as sputtering.
- a film forming technique for forming a film has been proposed.
- a metal film forming apparatus 9 including a film 93 and a power supply unit 94 for applying a voltage between the anode 91 and the base material B has been proposed (see, for example, Patent Document 1).
- the anode 91 of the film forming apparatus 9 described above is made of a porous material that can transmit metal ions.
- the solution L containing metal ions can be transmitted through the anode 91 during film formation and can be constantly supplied to the solid electrolyte membrane 93.
- the solid electrolyte membrane 93 can be pressed onto the base material B through the anode 91. In this way, a metal film made of metal deposited via the solid electrolyte film 93 can be formed on the surface of the base material B placed on the mounting table 92.
- the metal since the metal is initially deposited according to the position of the hole 91b of the anode 91 in a pressurized state, the deposited metal acts as a nucleus, and a metal crystal grows in the thickness direction of the metal film F. As a result, the metal crystal does not spread in the in-plane direction of the metal film F, but becomes columnar crystals grown in the thickness direction as shown in FIG. 7B, which causes film formation unevenness. Such a phenomenon becomes prominent when a porous body is used, but may also occur, for example, when there are fine irregularities on the surface of the anode.
- the present invention has been made in view of these points, and the object of the present invention is to stably form a uniform metal film having a uniform film thickness regardless of the surface state of the anode.
- An object of the present invention is to provide a film forming apparatus for forming a metal film and a film forming method therefor.
- the inventors have found that when the anode is excessively pressed against the solid electrolyte membrane when the solid electrolyte membrane is made to follow the surface of the substrate during film formation, the surface state of the anode is changed. It was thought to depend on the metal film to be formed. Therefore, it was thought that if the solid electrolyte membrane was sucked from the substrate side and the solid electrolyte membrane was made to follow the surface of the substrate, the above-described pressurization of the anode to the solid electrolyte membrane could be eliminated or reduced. .
- a metal film forming apparatus is a solid electrolyte membrane disposed between an anode and a base material serving as the anode and the cathode. And a power supply unit that applies a voltage between the anode and the base material, the solid electrolyte membrane is brought into contact with the surface of the base material, and between the anode and the base material.
- a metal film forming apparatus for forming a metal film made of the metal by applying a voltage to deposit metal on the surface of the substrate from metal ions contained in the solid electrolyte film.
- the solid electrolyte membrane is in close contact with the surface of the base placed on the placement base when placing the base on which the base is placed and forming the metal film.
- the solid electrolyte membrane when forming a metal film, can be sucked from the substrate side so that the solid electrolyte membrane is in close contact with the surface of the substrate.
- the solid electrolyte membrane sucked by the suction part is uniformly pressed on the surface of the substrate. be able to.
- the pressure unevenness caused by the surface state of the anode generated between the solid electrolyte membrane and the anode is eliminated or reduced, and a uniform metal film having a uniform film thickness that hardly depends on the surface state of the anode is obtained. It is possible to form a film stably.
- the solid electrolyte membrane is sucked from the substrate side during film formation, even if the substrate has a surface shape with irregularities, a curved shape, etc., the solid electrolyte membrane is pressed following the surface of the substrate. be able to. Thus, even if the surface of the substrate has the shape described above, a uniform metal film having a uniform film thickness can be formed on the surface.
- the solid electrolyte membrane and the anode are in contact with each other. Any state of a contact state may be sufficient.
- a solution containing a solution containing the metal ions while the solution containing the metal ions is in contact with the anode and the solid electrolyte membrane between the anode and the solid electrolyte membrane.
- a housing portion is formed.
- the solution containing portion contains a solution containing metal ions
- the metal ions can always be supplied to the solid electrolyte membrane.
- the solution storage portion it is possible to dispose the anode and the solid electrolyte membrane separately (to be in a non-contact state). Since the solid electrolyte membrane and the anode are in a non-contact state, the solid electrolyte membrane is not pressurized by the anode during film formation, and the surface of the substrate is pressurized by the solid electrolyte membrane by suction of the suction portion. As a result, the metal film to be formed is less affected by the surface condition of the anode. Even when an electrode made of a porous body is used, the anode and the solid electrolyte membrane are sufficiently separated from each other, so that a metal film depending on the shape of the pores in the porous body is difficult to form.
- the film forming apparatus further includes a circulation mechanism for circulating the solution containing the metal ions in the solution storage unit.
- the metal film can be formed while the solution containing the metal ions accommodated between the anode and the solid electrolyte membrane is circulated by the circulation mechanism.
- the metal film can be stably formed while controlling the concentration of metal ions in the solution.
- the above-described circulation mechanism is used to apply a constant hydraulic pressure. Is difficult.
- the solid electrolyte membrane is pressurized to the base material by suction of the solid electrolyte membrane, so that the above-described circulation mechanism can be easily provided in the film forming apparatus.
- the structure of the suction part is not particularly limited as long as the above-described suction part can uniformly pressurize the solid electrolyte membrane on the surface of the base material.
- the suction part has a plurality of membrane suction ports for sucking the solid electrolyte membrane on the surface of the mounting table, and the plurality of film suction ports are arranged on the mounting table. It is formed along the peripheral edge of the base material placed on the substrate. According to this aspect, it is possible to suction along the peripheral edge of the base material and generate negative pressure in the surrounding space. Thereby, the solid electrolyte membrane which contacts the peripheral part of a base material can be attracted
- the film suction port is formed such that the peripheral portion of the base material covers a part of each film suction port in a state where the base material is placed on the mounting table.
- the solid electrolyte membrane in contact with the vicinity of the peripheral edge of the base material , Stronger suction force can be applied. Thereby, the whole film-forming area
- the suction unit has a base material suction port on the surface of the mounting table for sucking the base material placed on the mounting table to the mounting table, and the base material suction port includes the base It is formed toward the center of the surface of the base material facing the mounting table in a state where the material is mounted on the mounting table, and the suction unit selects suction or non-suction by the film suction port.
- a membrane suction port opening / closing valve connected to the membrane suction port to perform and a base material suction port opening / closing connected to the substrate suction port to select and perform suction and non-suction by the substrate suction port And a valve.
- the base material suction port on-off valve is opened and suction by the base material suction port is selected, and the central portion of the surface of the base material facing the mounting table Therefore, the substrate can be sucked into the mounting table by the substrate suction port.
- the membrane suction port on-off valve is opened, suction by the membrane suction port is selected, and the solid electrolyte membrane is opened at the membrane suction port from the position along the peripheral edge of the substrate with respect to the substrate sucked by the mounting table. Can be aspirated. In this way, air between the mounting table and the base material can be discharged from the center of the surface of the base material facing the mounting table toward the peripheral edge thereof.
- a plurality of the membrane suction port on-off valves are provided so that the plurality of membrane suction ports can suck the solid electrolyte membrane at different timings.
- the solid electrolyte membrane can be sucked by changing the timing of sucking the solid electrolyte membrane at different positions along the peripheral edge of the substrate.
- the solid electrolyte membrane is not sucked at the periphery of the substrate at the same time, so that the air remaining between the solid electrolyte membrane and the substrate can be suppressed, and the air on the surface of the substrate can be suitably discharged. it can.
- the shape of the mounting table is not particularly limited as long as the solid electrolyte membrane can be brought into close contact with the surface of the base material by the suction part during film formation.
- the mounting table is formed with an accommodating recess for accommodating the base material when the metal film is formed on the surface of the base material.
- the suction part can efficiently generate a negative pressure between the solid electrolyte membrane and the base material, thereby bringing them into close contact with each other.
- the present application further discloses a film forming method capable of suitably forming a metal film.
- a solid electrolyte membrane is disposed between an anode and a base material serving as a cathode, the solid electrolyte membrane is brought into contact with the base material, and the anode and the base material
- a metal film made of the metal is formed on the surface of the base material by applying a voltage between the metal electrolyte and depositing metal on the surface of the base material from metal ions contained in the solid electrolyte membrane.
- a method of forming a metal film wherein when forming the metal film, the solid electrolyte film is sucked from the substrate side so that the solid electrolyte film is in close contact with the surface of the substrate.
- the solid electrolyte membrane and the anode are brought into a non-contact state and a metal film is formed, the solid electrolyte membrane is sucked from the substrate side so that the solid electrolyte membrane is in close contact with the surface of the substrate. Therefore, even if the solid electrolyte membrane is not directly pressurized with the anode (or the pressure is reduced more than before), the solid electrolyte membrane can be uniformly pressed on the surface of the substrate. This makes it possible to stably form a uniform metal film having a uniform film thickness that hardly depends on the surface state of the anode.
- the solid electrolyte membrane is sucked from the substrate side during the film formation, the solid electrolyte membrane can be pressurized following the surface of the substrate even if the surface of the substrate has a shape other than a flat surface. In this way, a uniform metal film having a uniform film thickness can be formed on the surface of the substrate.
- the solid electrolyte membrane and the anode are in contact with each other. Any state of a contact state may be sufficient.
- the solution containing the metal ions while containing the solution containing the metal ions so that the solution containing the metal ions is in contact with the anode and the solid electrolyte membrane between the anode and the solid electrolyte membrane, The metal film is formed.
- the metal ions can be constantly supplied to the solid electrolyte membrane.
- the anode and the solid electrolyte membrane can be disposed apart (to be in a non-contact state). Since the solid electrolyte membrane and the anode are in a non-contact state, the solid electrolyte membrane is not pressurized by the anode during film formation, and the surface of the substrate is pressurized by the solid electrolyte membrane by suction of the suction portion. As a result, the metal film to be formed is more difficult to be affected by the surface state of the anode.
- the metal film is formed while circulating a solution containing metal ions accommodated between the anode and the solid electrolyte membrane. According to this aspect, since the metal film is formed while circulating the solution containing the metal ions accommodated between the anode and the solid electrolyte film, the metal film is controlled while controlling the concentration of the metal ions in the solution. Can be formed stably.
- the solid electrolyte membrane is sucked from a position along the peripheral edge of the substrate.
- a negative pressure is generated along the peripheral edge of the base material, so that the solid electrolyte membrane that contacts the peripheral edge of the base material can be more efficiently sucked and uniformly applied to the surface of the base material. it can.
- the film forming method forms the metal film in a state where the substrate is placed on a mounting table, and the peripheral portion of the substrate together with the suction of the solid electrolyte membrane Is sucked toward the mounting table.
- a stronger suction force can be applied to the solid electrolyte membrane in contact with the vicinity of the peripheral edge of the substrate.
- region of a base material can be pressurized more uniformly.
- the substrate is sucked into the mounting table from the center of the surface of the substrate facing the mounting table in a state where the substrate is mounted on the mounting table. Then, the solid electrolyte membrane is sucked with respect to the substrate sucked by the mounting table.
- the suction sequentially, air between the mounting table and the base material can be discharged from the central portion of the base material facing the mounting table toward the peripheral edge thereof. Thereby, it can suppress that an air pocket is formed between a mounting base and a base material at the time of film-forming, and can make a base material adsorb
- the surface on which the metal film is formed on the substrate follows the surface of the mounting table, so that the solid electrolyte membrane can be more uniformly brought into contact with the substrate.
- the solid electrolyte membrane is sucked at different positions along the peripheral edge of the base material, changing the timing of sucking the solid electrolyte membrane. According to this aspect, since the solid electrolyte membrane is not sucked at the periphery of the substrate at the same time, the air remaining between the solid electrolyte membrane and the substrate is suppressed, and the air on the surface of the substrate is suitably discharged. can do.
- the mounting table has an accommodation recess for accommodating the base material, and the metal film is formed on the surface of the base material in a state where the base material is accommodated in the accommodation recess.
- the suction part can efficiently generate a negative pressure between the solid electrolyte membrane and the base material, thereby bringing them into close contact with each other.
- a uniform metal film having a uniform film thickness can be stably formed regardless of the surface state of the anode.
- FIG. 3 is a schematic perspective sectional view for explaining a state around a film suction port of the film forming apparatus shown in FIG. 2 during film formation.
- FIG. 2 is a plan view showing the positional relationship between the solid electrolyte membrane of the film forming apparatus shown in FIG. 1, the membrane suction port of the suction unit, the substrate suction port, and the substrate.
- FIG. 1 is a schematic conceptual view of a metal film deposition apparatus according to a first embodiment of the present invention, and (a) is a schematic cross-sectional view for explaining a state before deposition of the film deposition apparatus.
- FIG. 6B is a schematic cross-sectional view for explaining the state of the film formation apparatus during film formation.
- FIG. 2 is a plan view showing the positional relationship between the solid electrolyte membrane of the film forming apparatus shown in FIG. 1, the membrane suction port of the suction portion, and the substrate.
- FIG. 3 is a schematic perspective sectional view for explaining a state around the film suction port of the film forming apparatus shown in FIG. 2 during film formation.
- a film forming apparatus 1A is an apparatus for depositing a metal from metal ions and depositing a metal film made of the deposited metal on the surface of a substrate B.
- the base material B uses a base material made of a metal material such as aluminum, or a base material on which a metal underlayer is formed on the treated surface of a resin or silicon base material.
- the film forming apparatus 1A includes a metal anode 11, a solid electrolyte film 13 disposed between the anode 11 and a base material B serving as a cathode, and a power source that applies a voltage between the anode 11 and the base material B. And at least a portion 14. Although not shown in detail in FIG. 1, the anode 11 and the base material B serving as the cathode are electrically connected to the power supply unit 14.
- the solid electrolyte membrane 13 and the anode 11 are spaced apart and disposed in the casing 15, and the solid electrolyte membrane 13 and the anode 11 are in a non-contact state.
- a solution storage portion 15a that stores a solution (hereinafter referred to as a metal solution) L containing metal ions is formed between the solid electrolyte membrane 13 and the anode 11.
- the solution storage unit 15 a has a structure in which the stored metal solution L is in direct contact with the anode 11 and the solid electrolyte membrane 13.
- the casing 15 is made of a metal material that is insoluble in the metal solution L, and the anode 11 is electrically connected to the positive electrode of the power supply unit 14 through the casing 15.
- the anode 11 may be directly connected to the positive electrode of the power supply unit 11.
- the anode 11 has a shape corresponding to the film formation region of the substrate B.
- a water decomposition reaction (2H 2 O ⁇ O 2 + 2H + -2e ⁇ ) at the anode 11. That is, further progress of this reaction at the anode greatly contributes to the deposition rate of the metal film on the surface of the base material B that is the cathode.
- the anode 11 As a material of the anode 11 having such conductivity that the reaction proceeds smoothly and can act as an anode, for example, ruthenium oxide, platinum, titanium, or a metal solution that is insoluble in the metal solution. Examples thereof include a soluble anode made of a metal.
- the anode 11 may be a porous body, but is more preferably a nonporous body. By using the nonporous anode 11, the metal film F formed on the base material B becomes difficult to receive the surface state of the anode 11.
- the metal solution L examples include an aqueous solution containing ions of copper, nickel, silver and the like.
- a solution containing nickel nitrate, nickel sulfate, nickel sulfamate, and the like can be given.
- the solid electrolyte membrane 13 can mention the film
- the solid electrolyte membrane 13 can be impregnated with metal ions by bringing it into contact with the metal solution L described above, and a metal derived from metal ions may be deposited on the surface of the base material B when a voltage is applied. If possible, it is not particularly limited.
- the material of the solid electrolyte membrane include ion exchange such as fluorine resin such as Nafion (registered trademark) manufactured by DuPont, hydrocarbon resin, polyamic acid resin, and selemion (CMV, CMD, CMF series) manufactured by Asahi Glass.
- fluorine resin such as Nafion (registered trademark) manufactured by DuPont
- hydrocarbon resin such as Nafion (registered trademark) manufactured by DuPont
- CMV, CMD, CMF series selemion
- the film forming apparatus 1A further includes a circulation mechanism (not shown) for circulating the metal solution L in the solution storage unit 15a.
- a circulation mechanism for circulating the metal solution L in the solution storage unit 15a.
- the metal solution L in which the concentration of metal ions is adjusted to a predetermined concentration is supplied from the supply port 15b to the solution storage unit 15a, and the metal solution used at the time of film formation in the solution storage unit 15a L can be discharged from the discharge port 15c.
- the film forming apparatus 1A according to the present embodiment has a fixed structure in a structure in which a liquid pressure is applied to a solution containing metal ions in the solution storage unit 15a to press the solid electrolyte membrane against the substrate. Since the hydraulic pressure is applied, it is difficult to employ the above-described circulation mechanism.
- the solid electrolyte membrane 13 is pressurized to the base material B by suction of the solid electrolyte membrane 13 by the suction portion 22, so that the circulation mechanism described above is used in the film forming apparatus. It can be easily provided.
- the film forming apparatus 1 ⁇ / b> A forms the base 21 on which the base B is mounted and the metal film F
- the solid electrolyte membrane 13 is in close contact with the surface of the base B placed on the base 21.
- the suction unit 22 has a membrane suction passage 23 and a suction pump 24 connected to one end of the membrane suction passage 23.
- the suction pump 24 is installed separately from the mounting table 21.
- the suction pump may be provided on the mounting table, and the suction pump and the membrane suction passage may be combined to form a suction unit.
- any device other than the suction pump may be used as long as the solid electrolyte membrane 13 can be sucked from the substrate B side through the membrane suction passage 23.
- an accommodation recess 26 for accommodating the base material B is formed on the mounting table 21, and a plurality of bottom surfaces (surfaces of the mounting table 21) of the accommodation recess 26 are formed. .. Are formed.
- the plurality of membrane suction ports 23a, 23a... Are suction ports for sucking the solid electrolyte membrane 13, and are formed at the other end of the membrane suction passage 23 and constitute a part thereof.
- the film suction port 23a will be described later.
- the depth of the accommodating recess 26 matches the thickness of the base material B.
- the plurality of film suction ports 23 a, 23 a,... are equidistant along the peripheral edge b ⁇ b> 1 of the base material B placed on the placement table 21. Is formed.
- Each film suction port 23a is formed so that the peripheral edge of the base material B covers a part of each film suction port 23a in a state where the base material B is placed (placed) in the accommodation recess 26 of the mounting table 21. ing.
- an annular groove R is formed between the housing recess 26 and the base material B so as to go around the base material B.
- an O-ring 19 is disposed in the casing 15 so as to surround the solid electrolyte membrane 13.
- the O-ring 19 acts as a sealing member for forming a sealed space between the solid electrolyte membrane 13 and the mounting table 21 including the base material B during film formation.
- the air in the sealed space is sucked by the suction portion, so that the solid electrolyte membrane 13 can be efficiently pressurized (adhered) to the surface of the base material B.
- the base material B is placed in the housing recess 26 of the mounting table 21.
- a plurality of film suction ports 23 a, 23 a... are arranged along the peripheral edge b ⁇ b> 1 of the base material B placed on the placement table 21, and each film suction port is arranged.
- a part of 23a is closed by the peripheral edge b1 of the base material B.
- the casing 15 is arranged above the base material B, and the solid electrolyte membrane 13 is brought into contact with the base material B. If the solid electrolyte membrane 13 can be sucked by the suction portion 22 described later and the solid electrolyte membrane 13 can be brought into close contact with the surface of the substrate B, the solid electrolyte membrane 13 and the substrate B are not necessarily brought into contact at this stage. You don't have to. In such a state, the anode 11 and the base material B which is a cathode are electrically connected to the power supply unit 14.
- the suction pump 24 is driven so that the solid electrolyte film 13 is in close contact with the surface of the base material B.
- the solid electrolyte membrane 13 is sucked from the base material side through the suction ports 23a, 23a, and the peripheral edge of the base material B is sucked to the mounting table side.
- the air in the annular groove R covered (sealed) with the solid electrolyte membrane 13 is degassed from the membrane suction port 23a as indicated by the broken line arrow, and is solid on the surface of the substrate.
- the electrolyte membrane 13 is pressed (adhered).
- a plurality of film suction ports 23a are arranged along the peripheral edge b1 of the base material B, and a part of each film suction port 23a not covered by the peripheral edge b1 is a peripheral edge of the base material B. Since it is adjacent to b1, a stronger suction force can be applied to the solid electrolyte membrane 13 in contact with the vicinity of the peripheral edge of the base material B. Thereby, the whole film-forming area
- a metal film can be formed on the surface of the substrate B.
- the anode 11 and the solid electrolyte membrane 13 can be arranged separately. Since the solid electrolyte membrane and the anode are in a non-contact state, the solid electrolyte membrane 13 is not pressurized by the anode 11 at the time of film formation, and the surface of the substrate B is added by the solid electrolyte membrane 13 by suction of the suction portion 22. Pressed. As a result, the metal film to be formed is less affected by the surface condition of the anode. Even when an anode made of a porous material is used, the anode 11 and the solid electrolyte membrane 13 are sufficiently separated from each other, so that a metal film depending on the shape of the pores of the porous material is formed. hard.
- the metal solution L accommodated between the anode 11 and the solid electrolyte film 13 is circulated by a circulation mechanism.
- the metal film can be stably formed while controlling the concentration of metal ions in the solution.
- the metal solution L can be supplied at any time, the metal film F having a desired film thickness is formed on the surfaces of the plurality of base materials B without being limited by the amount of metal that can be deposited. be able to.
- the solid electrolyte membrane 13 when forming the metal film F, the solid electrolyte membrane 13 can be sucked from the substrate side so that the solid electrolyte membrane 13 is in close contact with the surface of the substrate B.
- the solid electrolyte membrane 13 sucked by the suction portion 22 is removed from the surface of the substrate B.
- the pressure unevenness caused by the surface state of the anode 11 generated between the solid electrolyte membrane 13 and the anode 11 is eliminated or reduced, and the film thickness has a uniform thickness that hardly depends on the surface state of the anode 11.
- a homogeneous metal film F can be stably formed.
- FIG. 4 is a schematic conceptual diagram of a metal film deposition apparatus according to a second embodiment of the present invention
- FIG. 4A is a schematic sectional view for explaining a state before deposition of the film deposition apparatus
- FIG. 4B is a plan view showing the positional relationship among the solid electrolyte membrane, the membrane suction port of the suction unit, the substrate suction port, and the substrate of the film forming apparatus shown in FIG. 1.
- the metal film deposition apparatus 1B according to the second embodiment is different from the first embodiment in the structure of the suction unit 22. Accordingly, the other portions are denoted by the same reference numerals as those of the film forming apparatus 1A according to the first embodiment, and detailed description thereof is omitted.
- the suction unit 22 of the film forming apparatus 1 ⁇ / b> B is configured so that the solid electrolyte film 13 is in close contact with the surface of the base material B placed on the mounting table 21 when the metal film F is formed.
- a film suction passage 23 for sucking the film 13 and a base material suction passage 27 for sucking the base material B placed on the placement table 21 to the placement table 21 are provided.
- One end of the membrane suction passage 23 is connected to the suction pump 24 via membrane suction port on-off valves (open / close switches) 28-1 and 28-2.
- a plurality of membrane suction ports 23 a, 23 a... Are formed at the other end of the membrane suction passage 23.
- a plurality of membrane suction port opening / closing valves 28-1 and 28-2 are provided so that the plurality of membrane suction ports 23a, 23a... Can suck the solid electrolyte membrane 13 at different timings.
- the plurality of film suction ports 23a, 23a... are divided into two groups, and suction and non-suction by the film suction ports 23a, 23a.
- Two membrane suction opening / closing valves 28-1 and 28-2 are provided according to the two groups.
- a group of the film suction ports 23a, 23a,... Located on one side (specifically, located on the right side of the center line C in FIG. 4B) is a group of the film suction ports 23a, 23a,.
- the membrane suction port on / off valve 28-1 are connected to the membrane suction port on / off valve 28-1.
- the group of membrane suction ports 23a, 23a ... located on the other side is The passages connected to these are integrated and connected to the membrane suction opening / closing valve 28-2.
- the plurality of membrane suction ports 23a, 23a,... are divided into two groups, and the plurality of membrane suction ports 23a, 23a,. 2 connected.
- the number of the membrane suction port on / off valves may be three or more as long as it can be individually suctioned by the plurality of membrane suction ports 23a, 23a,.
- two membrane suction opening / closing valves are provided, but one membrane suction connected to all the membrane suction openings 23a, 23a... Only the mouth opening / closing valve may be used.
- the plurality of film suction ports 23a, 23a... are arranged on the bottom surface of the housing recess 26 of the mounting table 21 as in the first embodiment. Are formed at equal intervals.
- Each film suction port 23a is formed so that the peripheral edge of the base material B covers a part of each film suction port 23a in a state where the base material B is placed in the housing recess 26 of the mounting table 21.
- one end of the base material suction passage 27 is connected to the suction pump 24 via a base material suction port on / off valve (open / close switch) 29.
- a base material suction port 27a is formed at the other end of the base material suction passage 27 (see FIG. 4A).
- the suction pump 24 can perform suction from the base material suction port 27a of the base material suction passage 27.
- the suction pump By switching the on / off valve 29 to the closed state, the suction pump The suction from the base material suction port 27a of the base material suction passage 27 by 24 can be stopped. In this way, suction and non-suction by the base material suction port 27a can be selected and performed by opening and closing the base material suction port opening / closing valve 29 connected to the base material suction port 27a.
- the base material suction port 27a is a suction port for sucking the base material B placed on the placement table 21 to the placement table 21, and as shown in FIG. It is formed at the center of the bottom surface (the surface of the mounting table 21). More specifically, the base material suction port 27a is a surface of the base material B facing the mounting table 21 (that is, the base material) in a state where the base material B is mounted on the mounting table 21 so as to be stored in the storage recess 26. Is formed toward the center of the back surface of the substrate. That is, in the state where the base material B is placed on the placement table 21, the base material suction port 27 a is covered and blocked by the surface of the base material B.
- the membrane suction passage opening / closing valves 28-1 and 28-2 and the substrate suction port opening / closing valve 29 are provided separately for the membrane suction passage 23 and the substrate suction passage 27, respectively.
- the plurality of film suction ports 23a, 23a,... By the suction port opening / closing valves 28-1, 28-2 are individually sucked for each group, and further, the substrate suction port 27a is sucked by the substrate suction port opening / closing valve 29. Can be done individually.
- FIG. 5 is a view for explaining a film forming method using the metal film forming apparatus according to the second embodiment of the present invention.
- FIG. 5A shows a state in which the base material is sucked before film formation. It is typical sectional drawing for demonstrating, (b) is typical sectional drawing for demonstrating the state at the time of film-forming of the film-forming apparatus.
- the base material B is placed in the accommodation recess 26 of the placement table 21.
- a plurality of film suction ports 23a, 23a,... are arranged along the peripheral edge b1 of the base material B placed on the placement table 21, and each film A part of the suction port 23a is blocked by the peripheral edge b1 of the base material B.
- the base material suction port 27a is covered and closed by the surface of the base material B at the center portion.
- the casing 15 is disposed above the base material B, and the solid electrolyte membrane 13 is brought into contact with the base material B. If the base material B can be sucked to the mounting table 21 by the base material suction port 27a of the suction unit 22 to be described later, and the base material B can be brought into close contact with the mounting table 21, the solid electrolyte membrane 13 and the substrate are formed at this stage. The material B may not necessarily be brought into contact.
- the membrane suction port on / off valves 28-1 and 28-2 are closed, the base material suction port on / off valve 29 is opened, and the suction pump 24 is turned on. Drive.
- the suction by the base material suction port 27a can be selected, and the base material B can be sucked to the mounting table 21 by the base material suction port 27a from the central portion of the surface of the base material B facing the mounting table 21.
- the membrane suction port on / off valve 28-1 and the membrane suction port on / off valve 28-2 are successively opened, and the on / off valve 29 is kept open and the suction pump 24 is continuously driven.
- the suction by the membrane suction port 23a is selected, and the solid electrolyte membrane 13 is sucked by the membrane suction port 23a from the position along the peripheral edge of the base material B with respect to the base material B sucked by the mounting table 21. be able to.
- the timing of sucking the solid electrolyte membrane 13 at different positions along the peripheral edge of the base material B is changed, and the solid electrolyte membrane 13 is changed. 13 suctions can be performed.
- the solid electrolyte membrane 13 after the solid electrolyte membrane 13 is sucked from one side, the solid electrolyte membrane 13 can be sucked from the other side.
- the remaining air between the solid electrolyte membrane 13 and the base material B is suppressed, and the air on the surface of the base material B is preferably used. Can be discharged. In this way, air between the mounting table 21 and the base material B can be discharged from the center portion of the surface of the base material B facing the mounting table 21 toward the peripheral edge thereof.
- the base material B can be uniformly adsorbed to the mounting table 21.
- the surface on which the metal film is formed on the substrate B follows the surface of the mounting table 21, so that the solid electrolyte film 13 can be brought into more uniform contact with the surface on which the film is formed.
- a plurality of film suction ports 23a are arranged along the peripheral edge of the base material B, and a part of each film suction port 23a that is not covered by the peripheral edge of the base material B. Is adjacent to the peripheral edge b1 of the base material B, so that the entire film formation region of the base material B can be more uniformly pressurized.
- the solid electrolyte membrane 13 can be made to follow the surface (film formation region) of the base material B uniformly.
- the surface on which the metal film F is formed on the base material B is further planarized following the surface of the mounting table 21, and the solid electrolyte membrane 13 can be more uniformly brought into contact with this surface.
- the suction by the film suction port 23a is performed while maintaining the suction by the substrate suction port 27a.
- the air between the mounting table 21 and the substrate B can be discharged.
- the suction by the substrate suction port 27a may be stopped, and then the suction by the film suction port 23a may be performed.
- a voltage is applied between the anode 11 and the base material B serving as the cathode using the power supply unit 14 in the same manner as in the first embodiment, and contained in the solid electrolyte membrane 13.
- a metal is deposited on the surface of the base material B from the formed metal ions, and a metal film F is formed on the surface of the base material B.
- the surface of the anode 11 generated between the anode 11 and the solid electrolyte membrane 13 can be made to follow the base material B more uniformly. It becomes possible to eliminate or reduce the pressure unevenness due to the state. Thereby, it is possible to stably form a uniform metal film F having a uniform film thickness that does not depend on the surface state of the anode 11.
- Example 1 Prepare a pure aluminum substrate (50 mm x 50 mm x thickness 1 mm) as the substrate for film formation on the surface, form a nickel plating film on this surface, and further form a gold plating film on the surface of the nickel plating film This was washed with running water with pure water.
- a nickel film was formed as a metal film on the surface of the substrate using the film forming apparatus shown in FIG.
- the suction pump was driven to suck the solid electrolyte membrane to the substrate side at the suction portion, and the solid electrolyte membrane was brought into close contact with the substrate, and the current density was 5 mA / cm 2 and the metal solution A nickel film was formed at a flow rate of 10 ml / min and a film formation time of 10 minutes.
- Example 1 The same base material as in Example 1 was prepared, and a nickel film was formed on the surface of the base material under the same film forming conditions as in Example 1 using the film forming apparatus shown in FIG.
- the difference from Example 1 is that a porous body (made by Mitsubishi Materials) made of expanded titanium coated with platinum is used for the anode, and the solid electrolyte membrane is formed by the anode at a pressure of 0.3 MPa at the time of film formation. This is a point where a nickel film was formed while pressing.
- Example 1 since the solid electrolyte membrane was sucked by the suction portion and the surface of the substrate was pressed by the sucked solid electrolyte membrane, the nickel film to be formed was the anode Less susceptible to surface conditions.
- Example 2 The same base material as in Example 2 was prepared, and a metal film (copper film) was formed on the surface of the base material using the film forming apparatus shown in FIG.
- the difference from Example 1 is that a 1.0 mol / L copper sulfate aqueous solution is used for the metal solution (electrolyte), and first, as shown in FIG. Thereafter, this suction state is maintained, and as shown in FIG. 5 (b), the solid electrolyte membrane is sucked by the membrane suction port, and a copper film is formed on the substrate in the suction state of the child.
- the copper film was formed at a current density of 5 mA / cm 2 , a metal solution flow rate of 15 ml / min, and a film formation time of 10 minutes.
- Example 3 The same base material as in Example 2 was prepared, and a metal film (nickel film) was formed on the surface of the base material under the same film forming conditions as in the Example using the film forming apparatus shown in FIG. .
- the difference from the example was that a nickel film was formed using a 1.0 mol / L nickel sulfate aqueous solution and a 0.5 mol / L acetic acid-sodium acetate buffer solution as a metal solution (electrolytic solution). .
- Example 2 The same base material as in Example 2 was prepared, and a copper film was formed on the surface of the base material using the film forming apparatus shown in FIG.
- the difference from Example 2 is that a porous body made of expanded titanium coated with platinum is used as the anode (manufactured by Mitsubishi Materials), and at the time of film formation, the solid electrolyte membrane is formed by the anode at a pressure of 0.3 MPa. This is a point where a copper film was formed while pressing.
- a substrate having a flat substrate surface is used as a substrate on which a metal film is formed.
- the substrate is not limited to this shape.
- a plurality of protrusions are formed on the surface of the substrate. Even when a film is formed on the surface of the convex portion, the solid electrolyte membrane is sucked from the substrate side during the film formation, so that the solid electrolyte membrane is made to follow the substrate surface. Can be pressurized.
- the membrane suction port on / off valves 28-1 and 28-2 and the base material suction port on / off valve 29 are not opened / closed using the control device. 28-2.
- An electromagnetic valve may be used for the base material suction opening / closing valve 29, and the opening / closing thereof may be controlled by the control device. That is, after the opening / closing valve 29 is opened to perform suction through the substrate suction port using the control device, the membrane suction port on / off valves 28-1 and 28-2 are opened to perform suction through the membrane suction port.
- the metal film may be deposited while the film suction port on / off valves 28-1 and 28-2 and the base material suction port on / off valve 29 are controlled by the control device so as to be sequentially performed.
- the base material suction port on / off valve 29 is provided, but the base material suction port on / off valve 29 is omitted and the film suction port on / off valves 28-1 and 28-2 are provided.
- the solid electrolyte membrane 13 may be sucked individually at different positions along the peripheral edge of the base material B.
- 1A, 1B Film formation apparatus
- 11 Anode
- 13 Solid electrolyte membrane
- 14 Power supply unit
- 15 Casing
- 15a Solution storage unit
- 15b Supply port
- 15c Discharge port
- 19 O-ring
- 21 Mounting table
- 22 suction part
- 23a membrane suction port
- 24 suction pump
- 27 base material suction passage
- 27a base material suction port
- 28-1, 28-2 membrane suction port On-off valve
- 29 Substrate suction port on-off valve
- 26 Housing recess
- B Substrate (cathode)
- b1 Peripheral part
- F Metal film
- L Metal solution
- R Groove part
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Abstract
Description
図1は、本発明の第1実施形態に係る金属皮膜の成膜装置の模式的概念図であり、(a)は、成膜装置の成膜前状態を説明するための模式的断面図であり、(b)は、成膜装置の成膜時の状態を説明するための模式的断面図である。
図4は、本発明の第2実施形態に係る金属皮膜の成膜装置の模式的概念図であり、(a)は、成膜装置の成膜前状態を説明するための模式的断面図であり、(b)は、図1に示す成膜装置の固体電解質膜、吸引部の膜吸引口、基材吸引口、および基材の位置関係を示した平面図である。
[実施例1]
表面に成膜する基材して、純アルミニウム基材(50mm×50mm×厚さ1mm)を準備し、この表面にニッケルめっき皮膜を形成し、さらにニッケルめっき皮膜の表面に、金めっき皮膜を形成し、これを純水で流水洗浄した。
実施例1と同じ基材を準備して、図6(a)に示す成膜装置を用いて、実施例1と同じ成膜条件で、基材の表面にニッケル皮膜を成膜した。実施例1と相違する点は、陽極に、白金が被覆された発泡チタンからなる多孔質体(三菱マテリアル製)を用い、成膜時には、陽極により固体電解質膜を0.3MPaの圧力で基材に押圧しながらニッケル皮膜を成膜した点である。
実施例1および比較例1に係るニッケル皮膜の表面の被覆率とピンホールを評価した。この結果を表1に示す。
表1から、実施例1では、比較例1に比べてニッケル皮膜の被覆率が高く、ピンホールもなかった。また、比較例に係るニッケル皮膜は、上述した図7(a)で示した如きムラがニッケル皮膜に発生していた。
実施例2と同じ基材を準備して、図4(a)に示す成膜装置を用いて、基材の表面に金属皮膜(銅皮膜)を成膜した。実施例1と相違する点は、金属溶液(電解液)に、1.0mol/Lの硫酸銅水溶液を用い、まず、図5(a)に示すように、基材吸引口で基材を吸引後、この吸引状態を維持し、図5(b)に示すように、膜吸引口で固体電解質膜を吸引し、子の吸引状態で基材に銅皮膜を成膜した点である。なお、電流密度5mA/cm2、金属溶液の流量を15ml/分、成膜時間10分間で、銅皮膜の成膜を行った。
実施例2と同じ基材を準備して、図4(a)に示す成膜装置を用いて、実施例と同じ成膜条件で、基材の表面に金属皮膜(ニッケル皮膜)を成膜した。実施例と相違する点は、金属溶液(電解液)に、1.0mol/Lの硫酸ニッケル水溶液と0.5mol/Lの酢酸-酢酸ナトリウム緩衝液を用いて、ニッケル皮膜の成膜を行った。
実施例2と同じ基材を準備して、図6(a)に示す成膜装置を用いて、基材の表面に銅皮膜を成膜した。実施例2と相違する点は、陽極に、白金が被覆された発泡チタンからなる多孔質体(三菱マテリアル製)を用い、成膜時には、陽極により固体電解質膜を0.3MPaの圧力で基材に押圧しながら銅皮膜を成膜した点である。
実施例2、3および比較例2に係る金属皮膜の表面の被覆率とピンホールを評価した。この結果を表2に示す。
表2から、実施例2、3では、比較例2に比べて金属皮膜の被覆率が高く、ピンホールもなかった。また、比較例2に係る金属皮膜は、比較例1と同様に上述した図7(a)で示した如きムラが金属皮膜に発生していた。
Claims (16)
- 陽極と、前記陽極と陰極となる基材との間に配置された固体電解質膜と、前記陽極と前記基材との間に電圧を印加する電源部と、を備えており、前記固体電解質膜を前記基材の表面に接触させると共に、前記陽極と前記基材との間に電圧を印加して、該固体電解質膜の内部に含有された金属イオンから金属を前記基材の表面に析出させることにより、前記金属からなる金属皮膜を成膜する金属皮膜の成膜装置であって、
前記成膜装置は、前記基材を載置する載置台と、前記金属皮膜を成膜する際に、前記載置台に載置された前記基材の表面に前記固体電解質膜が密着するように前記基材側から該固体電解質膜を吸引する吸引部と、を備えることを特徴とする金属皮膜の成膜装置。 - 前記陽極と前記固体電解質膜との間には、前記金属イオンを含む溶液が前記陽極と前記固体電解質膜とに接触するように前記金属イオンを含む溶液を収容する溶液収容部が形成されていることを特徴とする請求項1に記載の金属皮膜の成膜装置。
- 前記成膜装置は、前記溶液収容部内に前記金属イオンを含む溶液を循環させるための循環機構をさらに備えることを特徴とする請求項2に記載の金属皮膜の成膜装置。
- 前記吸引部は、前記固体電解質膜を吸引するための複数の膜吸引口を前記載置台の表面に有しており、該複数の膜吸引口は、前記載置台に載置された前記基材の周縁部に沿って形成されていることを特徴とする請求項1~3のいずれかに記載の金属皮膜の成膜装置。
- 前記載置台に前記基材を載置した状態で前記基材の周縁部が前記各膜吸引口の一部を覆うように、前記膜吸引口が形成されていることを特徴とする請求項4に記載の金属皮膜の成膜装置。
- 前記吸引部は、前記載置台に載置された前記基材を前記載置台に吸引するための基材吸引口を前記載置台の表面に有しており、
前記基材吸引口は、前記基材を載置台に載置した状態で、前記載置台に対向した前記基材の表面の中央部に向かって形成されており、
前記吸引部は、前記膜吸引口による吸引および非吸引を選択して行うように前記膜吸引口に接続された膜吸引口開閉弁と、前記基材吸引口による吸引および非吸引を選択して行うように前記基材吸引口に接続された基材吸引口開閉弁とをさらに備えることを特徴とする請求項4または5に記載の金属皮膜の成膜装置。 - 前記複数の膜吸引口が異なるタイミングで前記固体電解質膜を吸引可能なように、前記膜吸引口開閉弁が複数設けられていることを特徴する請求項6に記載の金属皮膜の成膜装置。
- 前記載置台には、前記基材の表面に前記金属皮膜を成膜する際に、前記基材を収容するための収容凹部が形成されていることを特徴とする請求項1~7のいずれかに記載の金属皮膜の成膜装置。
- 陽極と、陰極となる基材との間に固体電解質膜を配置し、前記固体電解質膜を基材に接触させると共に、前記陽極と前記基材との間に電圧を印加し、該固体電解質膜の内部に含有された金属イオンから金属を前記基材の表面に析出することにより、前記金属からなる金属皮膜を前記基材の表面に成膜する金属皮膜の成膜方法であって、
前記金属皮膜を成膜する際に、前記基材の表面に前記固体電解質膜が密着するように前記基材側から前記固体電解質膜を吸引することを特徴とする金属皮膜の成膜方法。 - 前記陽極と前記固体電解質膜との間において、前記金属イオンを含む溶液を前記陽極と前記固体電解質膜とに接触するように金属イオンを含む溶液を収容しながら、前記金属皮膜の成膜を行うことを特徴とする請求項9に記載の金属皮膜の成膜方法。
- 前記陽極と前記固体電解質膜との間に収容された金属イオンを含む溶液を循環させながら、前記金属皮膜の成膜を行うことを特徴とする請求項9に記載の金属皮膜の成膜方法。
- 前記固体電解質膜の吸引を前記基材の周縁部に沿った位置から行うことを特徴とする請求項9~11のいずれかに記載の金属皮膜の成膜方法。
- 前記成膜方法は、前記基材を載置台に載置した状態で、前記金属皮膜を成膜するものであり、前記固体電解質膜の吸引と共に、前記基材の周縁部を前記載置台側に吸引することを特徴とする請求項12に記載の金属皮膜の成膜方法。
- 前記成膜方法は、前記基材を載置台に載置した状態で、前記載置台に対向した前記基材の表面の中央部から、前記基材を前記載置台に吸引し、
該載置台に吸引された基材に対して、前記固体電解質膜の吸引を行うことを特徴とする請求項12または13に記載の金属皮膜の成膜方法。 - 前記基材の周縁部に沿った異なる位置で、前記固体電解質膜を吸引するタイミングを変えて、前記固体電解質膜の吸引を行うことを特徴とする請求項14に記載の金属皮膜の成膜方法。
- 前記載置台には、前記基材を収容するための収容凹部が形成されており、
前記基材を前記収容凹部に収容した状態で、前記基材の表面に前記金属皮膜を成膜することを特徴とする請求項13~15のいずれかに記載の金属皮膜の成膜方法。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017088918A (ja) * | 2015-11-04 | 2017-05-25 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
EP3249081A1 (en) * | 2016-05-23 | 2017-11-29 | Toyota Jidosha Kabushiki Kaisha | Film forming method for metal film and film forming apparatus therefor |
JP7484865B2 (ja) | 2021-10-14 | 2024-05-16 | トヨタ自動車株式会社 | 金属皮膜の成膜装置および金属皮膜の成膜方法 |
Families Citing this family (4)
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---|---|---|---|---|
JP6819531B2 (ja) * | 2017-09-28 | 2021-01-27 | トヨタ自動車株式会社 | 金属皮膜の成膜方法および金属皮膜の成膜装置 |
JP2020097764A (ja) * | 2018-12-18 | 2020-06-25 | トヨタ自動車株式会社 | 成膜装置、及びそれを用いた金属膜の形成方法 |
JP7306337B2 (ja) * | 2020-06-25 | 2023-07-11 | トヨタ自動車株式会社 | 配線基板の製造方法 |
JP2022184365A (ja) * | 2021-06-01 | 2022-12-13 | トヨタ自動車株式会社 | 金属皮膜の成膜方法および金属皮膜の成膜装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07216585A (ja) * | 1994-01-28 | 1995-08-15 | Casio Comput Co Ltd | メッキ装置 |
JPH11191550A (ja) * | 1997-12-25 | 1999-07-13 | Denso Corp | 表面加工装置 |
JP2000064087A (ja) * | 1998-08-17 | 2000-02-29 | Dainippon Screen Mfg Co Ltd | 基板メッキ方法及び基板メッキ装置 |
WO2013125643A1 (ja) | 2012-02-23 | 2013-08-29 | トヨタ自動車株式会社 | 金属被膜の成膜装置および成膜方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH634881A5 (de) * | 1978-04-14 | 1983-02-28 | Bbc Brown Boveri & Cie | Verfahren zum elektrolytischen abscheiden von metallen. |
JPH01165786A (ja) * | 1987-12-22 | 1989-06-29 | Hitachi Cable Ltd | 固相めっき方法 |
US6277261B1 (en) * | 1998-05-08 | 2001-08-21 | Forschungszentrum Jülich GmbH | Method of producing electrolyte units by electrolytic deposition of a catalyst |
US6610190B2 (en) * | 2000-11-03 | 2003-08-26 | Nutool, Inc. | Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate |
FR2885913B1 (fr) * | 2005-05-18 | 2007-08-10 | Centre Nat Rech Scient | Element composite comprenant un substrat conducteur et un revetement metallique nanostructure. |
DE102006043163B4 (de) * | 2006-09-14 | 2016-03-31 | Infineon Technologies Ag | Halbleiterschaltungsanordnungen |
JP5708182B2 (ja) * | 2011-04-13 | 2015-04-30 | トヨタ自動車株式会社 | 固体電解質膜を用いた金属膜形成方法 |
US9890464B2 (en) * | 2012-01-12 | 2018-02-13 | Oceanit Laboratories, Inc. | Solid electrolyte/electrode assembly for electrochemical surface finishing applications |
JP5995906B2 (ja) * | 2014-05-19 | 2016-09-21 | 株式会社豊田中央研究所 | 隔膜の製造方法、及び金属被膜の製造方法 |
-
2014
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07216585A (ja) * | 1994-01-28 | 1995-08-15 | Casio Comput Co Ltd | メッキ装置 |
JPH11191550A (ja) * | 1997-12-25 | 1999-07-13 | Denso Corp | 表面加工装置 |
JP2000064087A (ja) * | 1998-08-17 | 2000-02-29 | Dainippon Screen Mfg Co Ltd | 基板メッキ方法及び基板メッキ装置 |
WO2013125643A1 (ja) | 2012-02-23 | 2013-08-29 | トヨタ自動車株式会社 | 金属被膜の成膜装置および成膜方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3070191A4 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017088918A (ja) * | 2015-11-04 | 2017-05-25 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
EP3249081A1 (en) * | 2016-05-23 | 2017-11-29 | Toyota Jidosha Kabushiki Kaisha | Film forming method for metal film and film forming apparatus therefor |
US10337116B2 (en) | 2016-05-23 | 2019-07-02 | Toyota Jidosha Kabushiki Kaisha | Film forming method for metal film and film forming apparatus therefor |
US10760172B2 (en) | 2016-05-23 | 2020-09-01 | Toyota Jidosha Kabushiki Kaisha | Film forming method for metal film and film forming apparatus therefor |
JP7484865B2 (ja) | 2021-10-14 | 2024-05-16 | トヨタ自動車株式会社 | 金属皮膜の成膜装置および金属皮膜の成膜方法 |
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CN105637125A (zh) | 2016-06-01 |
BR112016009844B1 (pt) | 2022-02-22 |
EP3070191B1 (en) | 2017-08-16 |
CN105637125B (zh) | 2017-10-13 |
EP3070191A1 (en) | 2016-09-21 |
JP6056987B2 (ja) | 2017-01-11 |
US20160265129A1 (en) | 2016-09-15 |
EP3070191A4 (en) | 2016-11-09 |
KR20160065193A (ko) | 2016-06-08 |
JPWO2015072481A1 (ja) | 2017-03-16 |
US9752246B2 (en) | 2017-09-05 |
KR101799710B1 (ko) | 2017-11-20 |
BR112016009844A2 (ja) | 2017-08-01 |
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