WO2015063921A1 - 共振型高周波電源装置 - Google Patents
共振型高周波電源装置 Download PDFInfo
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- WO2015063921A1 WO2015063921A1 PCT/JP2013/079552 JP2013079552W WO2015063921A1 WO 2015063921 A1 WO2015063921 A1 WO 2015063921A1 JP 2013079552 W JP2013079552 W JP 2013079552W WO 2015063921 A1 WO2015063921 A1 WO 2015063921A1
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- WIPO (PCT)
- Prior art keywords
- resonance
- high frequency
- power supply
- supply device
- frequency power
- Prior art date
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5383—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a self-oscillating arrangement
- H02M7/53832—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a self-oscillating arrangement in a push-pull arrangement
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/533—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using discharge tubes only
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
- H02J50/10—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling
- H02J50/12—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling of the resonant type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0048—Circuits or arrangements for reducing losses
- H02M1/0054—Transistor switching losses
- H02M1/0058—Transistor switching losses by employing soft switching techniques, i.e. commutation of transistors when applied voltage is zero or when current flow is zero
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4815—Resonant converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4815—Resonant converters
- H02M7/4818—Resonant converters with means for adaptation of resonance frequency, e.g. by modification of capacitance or inductance of resonance circuits
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
- H02J50/05—Circuit arrangements or systems for wireless supply or distribution of electric power using capacitive coupling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Definitions
- the present invention relates to a resonance type high frequency power supply device that performs power transmission at a high frequency.
- the present invention has been made to solve the above-described problems, and can maintain a resonant switching condition with respect to a load impedance variation and perform waveform control of an output voltage.
- An object of the present invention is to provide a resonance type high frequency power supply device capable of operating at a frequency.
- a resonance type high frequency power supply apparatus is a resonance type high frequency power supply apparatus including a power element that performs a switching operation at a high frequency exceeding 2 MHz, and performs resonance control for controlling the switching voltage of the power element and the output voltage of the apparatus.
- a matched filter is provided.
- the present invention since it is configured as described above, it is possible to maintain the resonant switching condition against the impedance fluctuation of the load and to control the waveform of the output voltage, and to operate at a high frequency exceeding 2 MHz. It becomes.
- FIG. 1 is a diagram showing a configuration of a resonance type high frequency power supply device according to Embodiment 1 of the present invention.
- FIG. 1 shows a circuit when the power element Q1 has a single configuration.
- the resonance type high frequency power supply device includes a power element Q1, a resonance circuit element (capacitors C1, C2 and an inductor L2), an inductor L1, a high frequency pulse drive circuit 1, a variable pulse signal generation circuit 2, and a bias circuit.
- the power supply circuit 3 and the resonance matching filter 4 are configured.
- the resonant transmitting antenna (power transmitting transmitting antenna) 10 is a power transmitting resonant antenna having LC resonance characteristics (not limited to a non-contact type).
- the resonant transmission antenna 10 may be any of a magnetic field resonance type, an electric field resonance type, and an electromagnetic induction type.
- the power element Q1 is a switching element that performs a switching operation in order to convert the input DC voltage Vin into AC.
- the power element Q1 is not limited to an RF FET, and for example, an element such as Si-MOSFET, SiC-MOSFET, or GaN-FET can be used.
- the resonant circuit elements are elements for resonant switching of the switching operation of the power element Q1. Resonance conditions can be matched with the resonant transmission antenna 10 by the resonant circuit element including the capacitors C1 and C2 and the inductor L2.
- the inductor L1 functions to temporarily hold the energy of the input DC voltage Vin for each switching operation of the power element Q1.
- the high-frequency pulse drive circuit 1 is a circuit for driving the power element Q1 by sending a high-frequency pulsed voltage signal exceeding 2 MHz to the G terminal of the power element Q1.
- the high-frequency pulse drive circuit 1 is a circuit configured so that a high-speed ON / OFF output can be performed by using an FET element or the like as an output portion and a totem pole circuit configuration.
- the variable pulse signal generation circuit 2 is a circuit that drives the high-frequency pulse drive circuit 1 by sending a high-frequency pulsed voltage signal exceeding 2 MHz, such as a logic signal, to the high-frequency pulse drive circuit 1.
- the variable pulse signal generation circuit 2 includes a frequency setting oscillator and a logic IC such as a flip-flop or an inverter, and has functions such as a pulse width change and an inverted pulse output.
- the bias power supply circuit 3 supplies drive power to the variable pulse signal generation circuit 2 and the high-frequency pulse drive circuit 1.
- the resonance matching filter 4 performs waveform control of the switching voltage Vds of the power element Q1 and the output voltage Vout of the resonance type high frequency power supply device.
- the output impedance of the resonant circuit elements can be matched with the input impedance of the resonant transmission antenna 10 on the load side.
- the input DC voltage Vin is applied to the D terminal of the power element Q1 through the inductor L1.
- the power element Q1 converts the voltage into a positive AC voltage by an ON / OFF switching operation.
- the inductor L1 temporarily holds energy to assist in converting power from direct current to alternating current.
- the switching operation of the power element Q1 is a resonance circuit element including capacitors C1 and C2 and an inductor L2 so that ZVS (zero voltage switching) is established so that the switching loss due to the Ids current and the Vds voltage product is minimized.
- Resonant switching conditions are set.
- the resonance switching condition of the internal circuit is not changed by the impedance fluctuation on the load side.
- the constants of the resonant matched filter 4 are set so that the voltage waveforms of Vds and Vout meet the conditions as shown in FIG. In FIG. 2A, ON-Duty operates within a range of 30 to 80%.
- the power element Q1 is driven by inputting a pulsed voltage signal output from the high-frequency pulse drive circuit 1 that receives an arbitrary pulsed voltage signal from the variable pulse signal generation circuit 2 to the G terminal of the power element Q1. Is going on. At this time, the drive frequency of the power element Q1 becomes the operating frequency of the resonance type high frequency power supply device and is determined by the setting of the oscillator circuit in the variable pulse signal generation circuit 2.
- the resonance matching filter 4 that controls the waveforms of the switching voltage Vds and the output voltage Vout of the power element Q1 is provided. Therefore, in operation at a high frequency exceeding 2 MHz. In addition, it is possible to maintain the resonant switching condition against the load impedance fluctuation (without destroying the resonant switching condition by 50% or more) and to control the waveform of the output voltage Vout. As a result, even if an impedance element with resonance conditions such as an antenna for wireless power transmission is approached or moved away as a load, heat is not generated due to a sudden power loss, and heat is exhausted from a heat sink for heat generation protection. There is no need to overdesign. Therefore, cost reduction, small size, light weight, and high efficiency can be achieved.
- FIG. 1 shows the case where the resonance matching filter 4 including the capacitors C3 and C4 is used
- the present invention is not limited to this.
- the resonance matching filter 4 having a configuration as shown in FIGS. .
- FIG. 1 shows the case where the high-frequency pulse drive circuit 1, the variable pulse signal generation circuit 2, and the bias power supply circuit 3 are used to drive the power element Q1, but the present invention is not limited to this.
- a type drive circuit, an RF power amplifier circuit, and a multi-output type power supply circuit may be used.
- the present invention shows a circuit in the case where the power element Q1 has a single configuration, but the present invention is not limited to this.
- the present invention also applies to a case where the power element Q1 has a push-pull configuration. Is applicable.
- the resonance condition variable type for varying the resonance condition by the resonance circuit element.
- the resonance matching filter 5 may be used.
- a resonance condition variable circuit 6 that varies the resonance condition by the resonance circuit elements (capacitors C1, C2 and inductor L2) may be provided separately.
- the present invention can be modified with any component of the embodiment or omitted with any component of the embodiment.
- the resonance type high frequency power supply device can maintain the condition of resonance switching with respect to the impedance fluctuation of the load, can control the waveform of the output voltage, and can operate at a high frequency exceeding 2 MHz. It is suitable for use in a resonance type high frequency power supply device that performs power transmission at a frequency.
- High frequency pulse drive circuit 2. Variable pulse signal generation circuit, 3. Power supply circuit for bias, 4. Resonance matching filter, 5. Resonance condition variable resonance matching filter, 6. Resonance condition variable circuit, 10. Resonance transmission antenna (Transmission for power transmission) antenna).
Abstract
Description
実施の形態1.
図1はこの発明の実施の形態1に係る共振型高周波電源装置の構成を示す図である。なお図1では、パワー素子Q1がシングル構成の場合の回路を示している。
共振型高周波電源装置は、図1に示すように、パワー素子Q1、共振回路素子(コンデンサC1,C2及びインダクタL2)、インダクタL1、高周波パルスドライブ回路1、可変型パルス信号発生回路2、バイアス用電源回路3及び共振整合フィルタ4から構成されている。
なお、共振型送信アンテナ(電力伝送用送信アンテナ)10は、LC共振特性を持つ電力伝送用の共振型アンテナである(非接触型のみに限定されない)。この共振型送信アンテナ10は、磁界共鳴型、電界共鳴型、電磁誘導型のいずれであってもよい。
まず、入力の直流電圧VinはインダクタL1を通してパワー素子Q1のD端子に印加される。そして、パワー素子Q1は、その電圧をON/OFFのスイッチング動作により正電圧の交流状電圧へ変換する。この変換動作のときに、インダクタL1は一時的にエネルギーを保持する働きをして、直流を交流へ電力変換する手助けを行う。
その結果、負荷としてワイヤレス電力伝送用のアンテナなど、共振条件を持つインピーダンス素子が近づいたり、遠ざかったりしても、急激な電力損失による発熱を起こすことはなく、発熱保護用のヒートシンクなどの排熱設計を過剰に行う必要はない。そのため、コストの削減、小型、軽量化及び高効率化を図ることができる。
Claims (12)
- 2MHzを超える高周波数のスイッチング動作を行うパワー素子を備えた共振型高周波電源装置であって、
前記パワー素子のスイッチング電圧及び装置出力電圧の波形制御を行う共振整合フィルタを備えた
ことを特徴とする共振型高周波電源装置。 - 前記パワー素子は、RF(Radio Frequency)用のFET(Field Effect Transistor)以外のFETである
ことを特徴とする請求項1記載の共振型高周波電源装置。 - 前記パワー素子は、プッシュプル構成又はシングル構成である
ことを特徴とする請求項1記載の共振型高周波電源装置。 - 磁界共鳴による電力伝送用送信アンテナとの間で共振条件を合わせるコンデンサ及びインダクタからなる共振回路素子を備えた
ことを特徴とする請求項1記載の共振型高周波電源装置。 - 電界共鳴による電力伝送用送信アンテナとの間で共振条件を合わせるコンデンサ及びインダクタからなる共振回路素子を備えた
ことを特徴とする請求項1記載の共振型高周波電源装置。 - 電磁誘導による電力伝送用送信アンテナとの間で共振条件を合わせるコンデンサ及びインダクタからなる共振回路素子を備えた
ことを特徴とする請求項1記載の共振型高周波電源装置。 - 前記共振整合フィルタは、前記共振回路素子の共振条件を可変とする
ことを特徴とする請求項4記載の共振型高周波電源装置。 - 前記共振整合フィルタは、前記共振回路素子の共振条件を可変とする
ことを特徴とする請求項5記載の共振型高周波電源装置。 - 前記共振整合フィルタは、前記共振回路素子の共振条件を可変とする
ことを特徴とする請求項6記載の共振型高周波電源装置。 - 前記共振回路素子の共振条件を可変とする共振条件可変回路を備えた
ことを特徴とする請求項4記載の共振型高周波電源装置。 - 前記共振回路素子の共振条件を可変とする共振条件可変回路を備えた
ことを特徴とする請求項5記載の共振型高周波電源装置。 - 前記共振回路素子の共振条件を可変とする共振条件可変回路を備えた
ことを特徴とする請求項6記載の共振型高周波電源装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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CN201380080637.XA CN105684292B (zh) | 2013-10-31 | 2013-10-31 | 谐振型高频电源装置 |
JP2014558349A JP5832672B2 (ja) | 2013-10-31 | 2013-10-31 | 共振型高周波電源装置 |
US15/024,564 US20160241159A1 (en) | 2013-10-31 | 2013-10-31 | Resonant type high frequency power supply device |
KR1020167014462A KR20160077196A (ko) | 2013-10-31 | 2013-10-31 | 공진형 고주파 전원 장치 |
DE112013007554.7T DE112013007554T5 (de) | 2013-10-31 | 2013-10-31 | Resonanztyp-Hochfrequenz-Stromversorgungsvorrichtung |
PCT/JP2013/079552 WO2015063921A1 (ja) | 2013-10-31 | 2013-10-31 | 共振型高周波電源装置 |
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PCT/JP2013/079552 WO2015063921A1 (ja) | 2013-10-31 | 2013-10-31 | 共振型高周波電源装置 |
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US (1) | US20160241159A1 (ja) |
JP (1) | JP5832672B2 (ja) |
KR (1) | KR20160077196A (ja) |
CN (1) | CN105684292B (ja) |
DE (1) | DE112013007554T5 (ja) |
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JP2021500701A (ja) * | 2017-10-18 | 2021-01-07 | ラム リサーチ コーポレーションLam Research Corporation | 半導体ウエハ製造のためのマッチレスプラズマ源 |
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- 2013-10-31 KR KR1020167014462A patent/KR20160077196A/ko not_active Application Discontinuation
- 2013-10-31 DE DE112013007554.7T patent/DE112013007554T5/de active Pending
- 2013-10-31 CN CN201380080637.XA patent/CN105684292B/zh not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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CN105684292B (zh) | 2018-07-17 |
KR20160077196A (ko) | 2016-07-01 |
JPWO2015063921A1 (ja) | 2017-03-09 |
JP5832672B2 (ja) | 2015-12-16 |
DE112013007554T5 (de) | 2016-07-21 |
CN105684292A (zh) | 2016-06-15 |
US20160241159A1 (en) | 2016-08-18 |
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