WO2015019661A1 - 研磨装置および研磨方法 - Google Patents
研磨装置および研磨方法 Download PDFInfo
- Publication number
- WO2015019661A1 WO2015019661A1 PCT/JP2014/058508 JP2014058508W WO2015019661A1 WO 2015019661 A1 WO2015019661 A1 WO 2015019661A1 JP 2014058508 W JP2014058508 W JP 2014058508W WO 2015019661 A1 WO2015019661 A1 WO 2015019661A1
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- WIPO (PCT)
- Prior art keywords
- abrasive
- workpiece
- processing container
- unit
- polishing
- Prior art date
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- 238000005498 polishing Methods 0.000 title claims abstract description 159
- 238000000034 method Methods 0.000 title claims description 52
- 238000012545 processing Methods 0.000 claims abstract description 237
- 239000003082 abrasive agent Substances 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 35
- 230000032258 transport Effects 0.000 claims description 28
- 238000005243 fluidization Methods 0.000 claims description 18
- 238000003860 storage Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000011084 recovery Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 4
- 239000003985 ceramic capacitor Substances 0.000 claims description 3
- 230000001483 mobilizing effect Effects 0.000 abstract 1
- 238000011156 evaluation Methods 0.000 description 41
- 239000000428 dust Substances 0.000 description 39
- 230000008569 process Effects 0.000 description 20
- 239000002245 particle Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 239000000919 ceramic Substances 0.000 description 11
- 230000005484 gravity Effects 0.000 description 10
- 238000003756 stirring Methods 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 238000005422 blasting Methods 0.000 description 7
- 238000000227 grinding Methods 0.000 description 7
- 239000010419 fine particle Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 230000033228 biological regulation Effects 0.000 description 5
- 229910003465 moissanite Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000005514 two-phase flow Effects 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000011158 quantitative evaluation Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- YIWGJFPJRAEKMK-UHFFFAOYSA-N 1-(2H-benzotriazol-5-yl)-3-methyl-8-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carbonyl]-1,3,8-triazaspiro[4.5]decane-2,4-dione Chemical compound CN1C(=O)N(c2ccc3n[nH]nc3c2)C2(CCN(CC2)C(=O)c2cnc(NCc3cccc(OC(F)(F)F)c3)nc2)C1=O YIWGJFPJRAEKMK-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- 241000872198 Serjania polyphylla Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
- B24B31/16—Means for separating the workpiece from the abrasive medium at the end of operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/02—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/06—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
- B24C3/06—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other movable; portable
- B24C3/065—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other movable; portable with suction means for the abrasive and the waste material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/18—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions
- B24C3/26—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions the work being supported by barrel cages, i.e. tumblers; Gimbal mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0092—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed by mechanical means, e.g. by screw conveyors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
Definitions
- the present invention relates to a polishing apparatus and a polishing method for polishing a workpiece.
- the present invention relates to a material that can be used for a small workpiece.
- the air blasting device sprays abrasives with compressed air from a nozzle and collides with the workpiece, thereby deburring the surface of the workpiece, adjusting the surface roughness, rounding (R-bending), surface layer It is an apparatus which performs polishing processing, such as removal.
- the size of the workpiece is not particularly limited, but recently there has been an increasing demand for polishing a small workpiece.
- the workpiece is an electronic component
- the demand for polishing a smaller workpiece is increasing due to the widespread use of smartphones or tablet terminals.
- Patent Document 1 An apparatus and a polishing method for polishing a small workpiece are disclosed in Patent Document 1.
- Patent Document 1 As shown in FIG. 11, at the time of polishing, blasting is performed by inserting an auxiliary tumbler in which a workpiece is inserted into a tumbler of a tumbler type blasting apparatus that is commercially available for general use. By doing so, it becomes possible to perform polishing efficiently.
- an auxiliary tumbler is used, the amount of work piece that can be processed with respect to the volume of the tumbler is small. Therefore, a polishing apparatus with higher productivity is required.
- a polishing apparatus is a polishing apparatus that polishes the surface of a workpiece, and has a bottom portion through which an abrasive can pass and a processing container that retains the workpiece on the bottom portion.
- a fluidizing unit for flowing the workpiece in the processing container; an abrasive feeding unit for feeding an abrasive toward the workpiece in the processing container; and an abrasive passing through the processing container.
- a suction unit that generates an airflow in a direction and sucks and collects the abrasive.
- an air flow toward the suction unit is generated in the vicinity of the processing container and in the processing container.
- a plurality of workpieces are charged in the processing container, and the abrasive material introduced from the abrasive material input unit toward the work material charged in the processing container is supplied to the suction unit by this air flow. Head.
- the surface of the workpiece is polished by the flow of the abrasive.
- the workpiece charged in the processing container is agitated by flowing in the processing container by the fluidizing unit. For this reason, since the surface of the workpiece loaded in the processing container faces an arbitrary direction, the entire surface of all the workpieces can be uniformly polished.
- the suction unit may include a suction member that is disposed with a gap between the processing container.
- injection of abrasive means that the abrasive is not sprayed onto the workpiece in the processing container as in the air blasting apparatus, but is simply input into the workpiece.
- the abrasive charging unit is arranged above the processing container, the abrasive may be simply dropped naturally toward the processing container.
- the abrasive may be supplied toward the processing container with a weak wind force that does not cause the abrasive to scatter around.
- the fluidizing unit may be a vibrating unit that vibrates the processing container or a rotating unit that rotates the processing container about the center of the bottom surface thereof. According to this embodiment, the workpiece can be efficiently fluidized with a simple structure.
- the fluidization unit may further include a flow control unit that changes a flow state.
- the flow state of the workpiece can be changed according to the shape, mass, etc. of the workpiece. For this reason, any workpiece can be polished.
- the fluidizing unit may be the rotating unit, and the processing container may be supported by the rotating unit so as to be inclined with respect to a horizontal plane.
- the workpiece can be fluidized satisfactorily by appropriately selecting the rotation speed and the inclination angle of the processing container in accordance with the properties of the workpiece. Further, when the inclination angle of the processing container is selected from a range of 30 ° or more and 70 ° or less with respect to the horizontal plane, the workpiece can be fluidized more uniformly.
- an opening may be provided on the bottom surface of the processing container.
- the opening allows only the abrasive to pass through the bottom surface of the processing container by the suction force of the suction unit. That is, only the abrasive in the processing container can be selectively sucked by the suction unit.
- the opening is configured in a mesh shape, and the opening of the opening may be in the range of 70 ⁇ m to 1100 ⁇ m.
- the mesh-shaped opening has a high opening ratio, an air flow toward the suction unit can be efficiently generated in the vicinity of the processing container and in the processing container.
- the opening of the opening it is possible to pass the abrasive without passing the workpiece.
- abrasives suction part by which an abrasive passes the said processing container and is attracted
- the abrasive suction portion is formed on the entire surface of the processing container, the flow of the workpiece may be hindered.
- the area of the abrasive suction portion can be set to 1/8 or more and 1/4 or less of the area of the bottom surface portion.
- the suction speed passing through the abrasive suction portion may be 5 m / sec or more and less than 100 m / sec.
- the center of the abrasive suction part is positioned at a predetermined angle away from the center of the bottom surface of the processing container toward the rotation direction of the processing container with respect to the lower end of the peripheral part. Good.
- an airflow control member that controls the flow of airflow for the abrasive to pass through the processing container may be disposed at the center of the bottom surface of the processing container. When the vicinity of the center of the bottom surface portion of the processing container is sucked, the flow of the workpiece may be hindered. In this embodiment, by disposing the airflow control member at the center of the bottom surface portion of the processing container, it is possible to prevent the flow of the workpiece due to suction from being hindered.
- the abrasive charging unit includes a storage tank that stores an abrasive, an abrasive charging port that inputs the abrasive toward the workpiece, and an abrasive supplied from the storage tank.
- a transport unit that transports the material toward the material discharge port.
- the transport unit includes a transport screw having a spiral blade provided on a rotation shaft, and the transport screw.
- the abrasive material inlet is opened at the lower part (front) of the tip, and the upper surface (rear) of the rear part.
- a trough having an abrasive supply port connected to the storage tank, and the space in the trough is positioned in front of the transport screw and the space formed by the trough and the transport screw.
- a space including the abrasive material inlet, and a crushing portion through which the abrasive can pass is provided between the tip (front end) of the conveying screw and the abrasive material inlet.
- a restriction plate (opened) may be arranged.
- the abrasive charging unit can degas by pressing the abrasive sent from the abrasive conveying unit. At this time, the abrasives solidify. The solidified abrasive continues to advance further and passes through the regulation plate. When passing through the crushing section provided on the regulation plate, it is unraveled and conveyed to the supply port in a fixed amount. For this reason, the fluctuation
- the workpiece may be formed of a hard and brittle material.
- the above-described polishing apparatus may be used as a workpiece for a metal product such as a cast product, a forged product, or a machined product, and a non-metal product such as rubber or plastic.
- a metal product such as a cast product, a forged product, or a machined product
- a non-metal product such as rubber or plastic.
- it may be used for polishing a workpiece formed of a hard and brittle material having hard and brittle properties such as ceramics, silicon, ferrite, and crystal material.
- a component used as a small electronic component such as a multilayer ceramic capacitor or an inductor component.
- polishing method using a polishing apparatus comprising: an abrasive input unit that performs the above-described operation, and a suction unit that sucks and recovers the abrasive.
- each step may be performed in order, or two or more steps may be performed simultaneously.
- a polishing method using a polishing apparatus comprising: a fluidizing unit for causing the polishing material; an abrasive input unit for supplying the abrasive to the workpiece in the processing container; and a suction unit for sucking and collecting the abrasive.
- each step may be performed in order, or two or more steps may be performed simultaneously.
- the passing speed at which the abrasive passes between the workpieces charged in the processing container can be 5 m / sec or more and less than 100 m / sec.
- the fluidizing unit is a rotating unit that rotates the processing container around the center of the bottom surface thereof, and in the fluidizing step, the rotating container causes the processing container to move to 5% of the critical rotational speed.
- the rotation may be performed at 50% or less.
- the workpiece can be efficiently fluidized at the time of polishing, so that there is no unevenness in the finished accuracy of each workpiece, and uniform polishing can be realized.
- the abrasive is not injected into the workpiece as a solid-gas two-phase flow with compressed air, so that the workpiece is scattered out of the processing vessel by the solid-gas two-phase flow. There is no. Therefore, there is no decrease in product yield due to scattering of workpieces. Further, since the abrasive does not scatter around, there is no deterioration of the working environment due to the scatter of the abrasive.
- FIG. 3A is a side view showing a case where the side wall is formed by a part of a spherical shape.
- FIG. 3B is a bottom view showing a case where the bottom surface portion is a polygon.
- FIG. 3C is a cross-sectional view showing a case where a collar is provided at the upper end.
- FIG. 7A is a schematic diagram showing the entire polishing apparatus
- FIG. 7B is a schematic diagram for explaining the positional relationship between the first weight and the second weight. It is a schematic diagram which shows the flow of the to-be-processed object in the processing container in 2nd embodiment.
- FIG. 7A is a schematic diagram showing the entire polishing apparatus
- FIG. 7B is a schematic diagram for explaining the positional relationship between the first weight and the second weight.
- FIG. 8A is a schematic diagram from a plane
- FIG. 8B is a schematic diagram in a longitudinal section. It is a top view which shows typically the structure of the grinding
- FIG. 10 is a cross-sectional view taken along line XX in FIG. 9. It is a schematic diagram for demonstrating the conventional grinding
- the polishing apparatus 1 As shown in FIG. 1, the polishing apparatus 1 according to the present embodiment includes a processing container 10, a fluidizing unit, an abrasive charging unit 30, and a suction unit 40.
- the rotation unit 20 is provided as a fluidization unit.
- the processing container 10 includes a wall portion 11 and a bottom surface portion 12 as shown in FIG.
- the wall portion 11 has a cylindrical shape, for example, and extends in a direction intersecting the bottom surface portion 12 from the edge of the bottom surface portion 12. That is, the wall portion 11 defines a space on the bottom surface portion 12 from the side.
- An opening 13 is provided in the bottom surface portion 12.
- the opening 13 may be configured to be partially opened like a punching metal, or may be configured to be entirely opened like a mesh.
- the bottom surface portion 12 is configured to have an opening portion 13 using a mesh-like member.
- the opening 13 needs to have such a size that the abrasive can pass through but the workpiece cannot pass through.
- the diameter of the opening 13 or the size of the opening when the opening 13 is meshed may be in the range of 70 ⁇ m to 1100 ⁇ m, or in the range of 70 ⁇ m to 500 ⁇ m.
- the shape of the processing container 10 does not have to be rectangular in the longitudinal section as shown in FIG.
- the spherical shape here includes not only a simple spherical shape but also an ellipsoid.
- FIG.3 (B) it is good also as the box shape in which the bottom face part 12 has a polygonal planar shape.
- a flange 14 may be provided at the upper end as shown in FIG. 3C so that the workpiece W does not spill out of the processing container 10.
- the flange portion 14 extends from the upper end portion of the wall portion 11 so as to be inclined inward of the processing container 10 with respect to the extending direction of the wall portion 11.
- the angle formed by the wall portion 11 and the flange portion 14 can be in the range of 90 degrees to 150 degrees, and more specifically in the range of 90 degrees to 120 degrees. If the angle formed by the wall 11 and the flange 14 is too small, the workpiece W may be caught in the space formed by the wall 11 and the flange 14, and if the angle is too large, the flange 14 is The provided effect cannot be obtained.
- the rotation unit 20 includes a holder 21, a motor 22, and a rotation transmission member 23 as shown in FIG.
- the holder 21 has, for example, a cylindrical shape, and fixes the processing container 10 so as to concentrically surround the wall portion 11 of the processing container 10 from the outside.
- the motor 22 includes a rotating shaft that rotates by driving the motor 22.
- the rotation transmission member 23 has, for example, a cylindrical or columnar shape, and is fixed to the tip of the rotation shaft of the motor 22 so that the center axis direction coincides with the rotation axis direction of the motor 22.
- a cylindrical member having a large friction coefficient such as rubber can be used.
- the outer peripheral surface of the rotation transmitting member 23 is in contact with the holder 21 and transmits the rotational force of the motor 22 to the holder 21.
- the holder 21 is supported by a gantry (not shown) so as to be rotatable about a rotation axis T orthogonal to the center of the circular cross section.
- the rotation of the motor 22 is transmitted to the holder 21 via the rotation transmission member 23. Since the holder 21 is rotatably supported by the gantry, the holder 21 and the processing container 10 fixed to the holder 21 rotate about the rotation axis T, that is, the center of the bottom surface portion 12.
- the method of rotating the processing container 10 is not limited to the said structure.
- teeth may be provided on the outer peripheral surface of the holder 21, and a gear that can mesh with the teeth may be fixed to the rotating shaft of the motor 22, or the outer peripheral surface of the holder 21 and the rotating shaft of the motor 22 may be fixed.
- the pulleys may be fixed to each other and the pulleys may be connected by a belt, or other known configurations may be used as appropriate.
- the holder 21, that is, the processing container 10 can be supported by the rotating unit 20 so as to be inclined at a predetermined angle ⁇ with respect to the horizontal plane.
- fluidization of the workpiece W can be promoted by the rotation of the processing container 10 and the action of gravity.
- the workpiece W charged in the processing container 10 moves along the wall portion 11 of the processing container 10 by centrifugal force. Since the influence of gravity increases, the workpiece W falls downward.
- the inclination angle ⁇ with respect to the horizontal plane of the processing vessel 10 can be set to 30 ° to 70 °, and more specifically, set to 40 ° to 60 °. Can do. If the inclination angle ⁇ is too small, the effect of promoting fluidization due to gravity is small, and if it is too large, the gravity becomes too large against the centrifugal force, so that the rotational speed of the processing container 10 must be increased.
- the rotation speed of the processing vessel 10 may be 5% or more and 50% or less of the critical rotation number, and more specifically 10% or more and 30% or less.
- the critical rotational speed means that the centrifugal force applied to the workpiece W loaded in the processing vessel 10 exceeds the gravity when the rotational speed of the processing vessel 10 is increased, and the workpiece W is It refers to the rotational speed at which the wall portion 11 stops falling. If the rotational speed is too slow, the influence of gravity on the centrifugal force is too great, so that the workpiece W does not move sufficiently along the wall portion 11 of the processing container 10, and as a result, the flow due to dropping is sufficient. Not done. When the rotational speed is too high, the gravity is too small with respect to the centrifugal force, so that there is a workpiece W that does not fall while being pressed against the wall 11 of the processing container 10, and the flow is not sufficiently performed. .
- the workpiece W passes near the center of the bottom surface portion 12 when falling. Since the flow of the workpiece W, that is, stirring, is performed by dropping, it is not preferable that the falling flow is disturbed.
- the airflow control member 50 may be provided in the case where the suction force described later is generated at this point and the flow of the fall is disturbed to disturb the stirring.
- a disk-shaped member is attached to the back surface of the bottom surface portion 12 as the airflow control member 50, so that suction force is not generated near the center of the bottom surface portion 12 of the processing container 10.
- the diameter of the airflow control member 50 can be in the range of 10% to 40% with respect to the diameter of the bottom surface portion 12.
- the abrasive charging unit 30 includes a storage tank 31 and a transport unit 32 as shown in FIG.
- the transport unit 32 includes a cylindrical trough 32a whose both end surfaces are closed, a transport screw 32f included in the trough 32a, and a transport motor 32i connected to the transport screw 32f.
- the transport screw 32f includes a transport shaft 32g and a transport blade 32h.
- the conveying blade 32h is fixed to the outer peripheral surface of the conveying shaft 32g in a spiral shape so that adjacent blades are arranged at a predetermined interval.
- an abrasive supply port 32b is opened on the upper surface of the rear part (left side of the figure), and an abrasive discharge port 32e is opened on the lower part of the tip (right side of the figure).
- the space inside the trough 32a includes an abrasive material conveying part 32c formed by the trough 32a and the conveying screw 32f, and an abrasive material discharging part 32d that is located in front of the conveying screw 32f and includes the abrasive material discharge port 32e. It is divided.
- the storage tank 31 is a container for temporarily storing abrasives, and is connected to a straight body portion having the same cross-sectional shape downward and a lower end of the straight body portion, and crosses downward. And a reduction unit that reduces the area of the surface.
- the shape of the cross section of the straight body portion may be circular or polygonal. In this embodiment, it is a quadrangle.
- the lower end of the reduced portion is connected to the abrasive supply port 32b from which the base of the transport unit 32 is exposed.
- the rear end of the transport shaft 32g passes through the rear end of the trough 32a and is connected to a transport motor 32i that can rotate at an arbitrary speed.
- a transport motor 32i that can rotate at an arbitrary speed.
- the transport screw 32f rotates.
- the abrasive material inserted into the trough 32a from the abrasive material supply port 32b advances at a constant speed in the right direction in FIG. 5 by the rotation of the conveying screw 32f. That is, the target amount of abrasive can be advanced at a constant speed.
- the abrasive material that has passed through the abrasive material conveying unit 32c enters the abrasive material discharging unit 32d and continues to advance further.
- a regulating plate 32j is disposed at the tip of the conveying screw 32f.
- the restriction plate 32j may be fixed to the tip of the conveyance shaft 32g, or the peripheral edge of the restriction plate 32j may be fixed to the inner wall of the trough 32a. Further, the restriction plate 32j is provided with a crushing portion (not shown) through which the abrasive passes. Since the abrasive is compressed by the restriction plate 32j, the air between the abrasives is degassed and the bulk specific gravity is increased.
- the crushing portion is opened in the regulation plate 32j, the abrasive that has reached a predetermined density in front of the regulation plate 32j and becomes a large lump is crushed when passing through the crushing portion, and advances. Continue. Then, it is discharged from the abrasive discharge port 32e to the outside of the abrasive charging unit 30.
- the action of the regulating plate 32j is not affected by fluctuations in bulk specific gravity due to gas mixture between abrasives in the storage tank 31, and is also affected by unevenness in the feeding speed of the transport screw 32f.
- the abrasive can be sent to the abrasive discharge port 32e by a certain amount.
- the “crushing part” only needs to be able to pass through a large lump of abrasive material.
- a hole having an arbitrary shape may be provided on the surface of the restriction plate 32j, or a groove may be formed in the peripheral part of the restriction plate 32j. May be provided.
- the crushing part may be a gap formed by a regulating plate 32j fixed to the tip of the conveying shaft 32g and an inner wall of the trough 32a.
- the abrasive that has reached a predetermined density in front of the regulation plate 32j and becomes a large lump is crushed when passing through the gap, which is a crushing portion, and continues to advance. Then, it is discharged from the abrasive discharge port 32e to the outside of the abrasive charging unit 30.
- the crushing portion may be formed by combining the above-described surface hole or peripheral groove provided in the restriction plate 32j and the gap between the restriction plate 32j and the inner wall of the trough 32a.
- abrasive discharged from the abrasive discharge port 32e falls toward the workpiece W inserted in the processing container 10.
- a hollow structure abrasive member 33 having both ends opened may be connected to the abrasive outlet 32e.
- the abrasive is advanced by the rotation of the conveying screw 32f.
- the abrasive may be advanced by the rotation of a belt stretched back and forth.
- the structure which advances an abrasives may be sufficient.
- the suction unit 40 includes a suction member 41 disposed so that one end surface thereof is spaced from the bottom surface portion 12 of the processing container 10, a dust collector 42 that generates a suction force, a suction member 41, and a dust collector 42.
- Hose 43 connecting the two.
- the suction member 41 is open at both ends, and is continuously connected to the cylindrical rectifying portion 41a having the same cross section, and one end surface of the rectifying portion 41a, and the cone whose cross-sectional area decreases as the distance from the rectifying portion 41a increases.
- a suction part 41b having a shape.
- a hose 43 is connected to the reduced diameter end of the suction part 41b, and the other end of the hose 43 is connected to a dust collector 42 that can suck and collect the abrasive. Thereby, the suction member 41 and the dust collector 42 are connected.
- the suction unit 40 generates an air flow in the direction in which the abrasive passes through the bottom surface portion 12 of the processing container 10, that is, from the abrasive charging member 33 toward the suction member 41.
- the rectifying unit 41a of the suction member 41 has a function of rectifying the airflow so that the airflow generated when suctioning flows toward the dust collector 42 without flowing backward toward the outside.
- the suction part 41b plays a role of accelerating the airflow so that the airflow that has passed through the rectifying part 41a flows to the dust collector 42 efficiently. Note that the rectifying unit 41 a may not be provided as long as the abrasive can be sucked only by the suction unit 41 b without being scattered outside the suction member 41.
- the suction member 41 may be configured such that the size of the opening end (the other end side of the reduced diameter end) is slightly larger than the bottom surface portion 12 of the processing container 10 and can be sucked from the entire bottom surface portion 12. It is good also as a structure which can be made smaller than 12 and can be attracted
- the opening end of the suction member 41 may be disposed so as to provide a gap between the bottom end portion 12 of the processing container 10.
- the size of the opening end of the suction member 41 is made smaller than the bottom surface portion 12 of the processing container so that the suction can be sucked from a part of the bottom surface portion 12 so that the abrasive can be put in a position facing the opening end.
- a polishing material throwing unit 30 is arranged on the surface. Note that the suction member 41 does not have to be provided as long as the abrasive can be sucked only by the hose 43 without being scattered outside.
- the polishing material passes through the bottom surface portion 12 and is sucked by the suction member 41 at the position facing the opening end of the suction member 41 in the bottom surface portion 12 as shown in FIG.
- a material suction part B is formed. That is, the abrasive suction part B is an area through which the abrasive passes at the bottom surface part 12.
- the area of the abrasive suction part B may be 10% or more and 40% or less of the area of the bottom surface part 12 of the processing container 10. In one embodiment, the area of the abrasive suction part B may be 1/8 or more and 1/4 or less of the area of the bottom part 12.
- the shape of the abrasive suction part B is circular, but the shape of the abrasive suction part B is not limited to a circle.
- the shape of the abrasive suction portion B may be a polygonal shape, a belt shape along the edge of the bottom surface portion 12, or a fan shape where a part of the outer periphery extends along the edge of the bottom surface portion 12.
- the shape of the abrasive suction part B can be changed to a desired shape by changing the planar shape of the opening end of the suction member 41.
- the suction speed passing through the abrasive suction part B may be 5 m / sec or more and less than 100 m / sec, may be 5 m / sec or more and less than 50 m / sec, or 5 m / sec or more and less than 30 m / sec. It is good. If the suction speed is too slow, the abrasive that has been put in from the abrasive throwing unit 30 is weak in the suction unit 40, so that the abrasive cannot be sucked sufficiently. If the suction speed is too high, the workpiece W charged in the processing container 10 is fixed to the bottom surface portion 12 by the suction force of the dust collecting device 42, so that the flow of the workpiece W is hindered.
- the passing speed at which the abrasive passes between the workpieces W charged in the processing container 10 is 5 m / sec or more and less than 100 m / sec.
- This passage speed may be 5 m / sec or more and less than 50 m / sec, and more specifically 5 m / sec or more and less than 30 m / sec. If the passing speed is too slow, the abrasive W will not be able to polish the workpiece W because the force with which the abrasive collides with or contacts the workpiece W is weak. If the passing speed is too high, the abrasive will have a strong force to collide with and contact the workpiece W, so that the workpiece W is likely to be cracked or chipped during polishing.
- the method of adjusting the passing speed may be adjusted by adjusting the distance between the abrasive charging unit 30 and the processing container 10, or may be adjusted by adjusting the suction force of the dust collecting device 42.
- the position of the abrasive suction part B is as shown by the “x” mark in FIG. 6, in the bottom edge part 12 of the bottom face part 12 of the processing container 10 (virtual line in the bottom direction in the figure, that is, the bottom face part 12.
- the center of the abrasive suction part B is located at a position separated by a predetermined angle ⁇ on the rotational direction side of the processing container 10 with respect to a virtual line L) extending along the direction in which the bottom surface part 12 is inclined from the center of May be set. This is because when the processing container 10 rotates, the workpiece W moves in the rotation direction following the rotation as shown by the dotted line in the figure.
- the angle ⁇ may be selected from 0 ° to 45 °. If the angle ⁇ is too large, the workpiece W cannot be efficiently stirred.
- the abrasive suction part B is formed only on a part of the bottom surface part 12 of the processing container 10
- a plate material provided with an opening such as a slit on the back surface side of the bottom surface part 12 is provided with a gap with the bottom surface part 12.
- An arrangement may be adopted.
- the size of the opening end of the suction member 41 can be made slightly larger than the bottom surface portion 12 of the processing container 10.
- the inside of the suction member 41 is sucked through the hose 43, so that the abrasive that has passed through the processing container 10 is sucked toward the suction member 41.
- an air flow from the outside to the inside is generated, so that the abrasive that has passed through the processing container 10 does not scatter to the outside of the suction member 41.
- the gap between the processing container 10 and the opening end of the suction member 41 is too small, the outside air cannot be sufficiently sucked, so that no airflow from the outside to the inside of the suction member 41 is generated.
- the clearance between the processing container 10 and the suction member 41 when the processing container 10 is closest to the suction member 41 may be in the range of 1 mm to 25 mm, and more specifically 5 mm to 15 mm.
- the abrasives collected by the dust collector 42 are also reduced in size due to the occurrence of cracks and chips caused by contact with the workpieces W. Also included are fine particles such as abrasive debris.
- a classification unit may be further provided in order to collect a reusable abrasive from the abrasive and fine particles. By the classification unit, the abrasive that can be reused and the fine particles are separated, and the abrasive that can be reused can be returned to the storage tank 31.
- the classification unit may be provided in the middle of the path from the suction member 41 to the dust collector 42, or may be provided by another path.
- the classification unit can include a known device such as an airflow classification device or a sieve.
- a flow control unit (not shown) for controlling (changing) the flow state of the workpiece W in the processing container 10 may be further used.
- the flow control unit include a unit for arbitrarily changing the inclination angle ⁇ of the processing container 10 and a unit for arbitrarily changing the rotation speed of the motor 22.
- the flow state of the workpiece W can be changed by changing the angle and the speed. Thereby, it can flow on the conditions suitable for the property etc. of all the workpieces W. Furthermore, when the workpiece W is likely to generate chipping and cracks, the chipping and cracking of the workpiece W at the start of flow can be prevented.
- polishing conditions are input to a control unit (not shown) that is provided at an arbitrary position of the polishing apparatus 1 and controls the motor 22, the transport motor 32i, and the dust collector 42.
- the “polishing conditions” refer to polishing time, operating conditions of the motor 22, polishing material input speed (input amount per unit time), operation pattern, and the like.
- Abrasives are appropriately selected from various types of particles such as metal or non-metal shots, grids, cut wires, ceramic particles, plant particles, resin particles, etc. according to the material and shape of the workpiece and the processing purpose. it can. For example, when a large rounding is performed on the workpiece or when strong burrs are removed, alumina-based particles, silicon carbide-based particles, zirconia-based particles, and the like, which are high hardness particles, can be selected. In addition, when it is not desired that foreign matters derived from polishing adhere to the workpiece, particles of the same material as the workpiece may be used as the abrasive.
- a foreign material adheres to the surface of the workpiece after polishing by using a magnetic material of the same material as the workpiece as an abrasive. There is no. Thereby, the fall of the performance of the electronic component by a foreign material can be prevented.
- the shape of the abrasive is not particularly limited, such as a spherical shape, a cylindrical shape, a rectangular parallelepiped shape, an anisotropic shape, and the like, and can be appropriately selected according to the material and shape of the workpiece and the purpose of polishing.
- the particle size of the abrasive can be appropriately selected according to the material and shape of the workpiece and the purpose of polishing.
- the particle size defined by JIS (Japan Industrial Standards) B6001 can be appropriately selected from the range of F220 or # 240 to # 1000.
- anisotropic shaped alumina-based particles having a particle size of # 800 were used.
- the rotation speed of the processing container 10 can be 5% or more and 50% or less of the critical rotation speed, and more specifically, 10% or more and 30% or less.
- the polishing apparatus of this embodiment does not spray the abrasive material onto the workpiece W as a solid-gas two-phase flow together with compressed air unlike the air blast device, the processing container can be used even if the workpiece W is small and light. It can polish without scattering from.
- the abrasive in the suction member 41 passes through the hose 43 and is collected by the dust collector 42.
- the workpiece W can be polished.
- the abrasive charging unit 30 is automatically stopped and the polishing material is stopped.
- the motor 22 and the dust collector 42 continue to operate, the abrasive remaining in the processing container 10 is collected by the dust collector 42.
- the motor 22 stops, and then the dust collector 42 stops.
- the processing container 10 is removed from the holder 21, the workpiece W is collected, and polishing is completed.
- the workpiece W could be rounded (R-attached).
- polishing was performed for the purpose of rounding corners of the workpiece, and evaluation of fluidization (fluid state), evaluation of the workpiece after polishing, and evaluation of the environment after polishing were performed.
- the workpiece W was a ceramic raw material (a material before sintering) composed of a mixture of SiC and Al 2 O 3 .
- the dimension of the workpiece W was set to 0.5 mm ⁇ 0.5 mm ⁇ 1.0 mm.
- Half of the workpiece W was painted black with an oil paint.
- the workpiece W is charged into the processing container 10 so that the volume of the processing container 10 is about 1/5.
- the workpiece W was charged so that the unpainted product and the painted product were 1: 1.
- Table 1 shows the following contents. Inclination angle (deg.); Inclination angle ⁇ with respect to the horizontal plane of the processing vessel 10 Rotational speed (%); rotational speed of processing vessel 10 / critical rotational speed ⁇ 100 Area: Area of abrasive material suction part B / area of bottom surface part 12 of processing container 10 Suction speed (mm / s); Wind speed position of suction in abrasive material suction part B (deg.); Bottom surface part 12 to bottom surface part 12 Phase angle ⁇ from the virtual line to the rotation direction of the processing container 10 with reference to the virtual line toward the lower edge of the peripheral edge Presence / absence of the air flow control member 50; whether or not the air flow control member 50 of 1/3 of the diameter of the bottom surface portion is disposed on the back surface of the bottom surface portion 12 of the processing container 10.
- the operations of the processing container 10 and the dust collector 42 are stopped. After the operation was stopped, 100 workpieces W were sampled at each of the aforementioned phase angles of 0 °, ⁇ 10 °, and 10 °, and the number of unpainted products was counted. This operation was performed three times, and the flow state of the workpiece W was evaluated by calculating an average value of the three locations ⁇ 3 times.
- the evaluation criteria are as follows.
- the number of unpainted products is 45 to 55 ⁇ ⁇ ⁇ ⁇ ⁇ The number of unpainted products is 40 to 44 or 56 to 60 ⁇ ⁇ ⁇ ⁇ The number of unpainted products is 30 to 39 or 61 to 61 70 ⁇ ⁇ 29 or less or 71 or more unpainted products
- Example 1 The evaluation of fluidization is summarized in Table 1.
- the workpiece W was agitated without the airflow control member 50 being disposed.
- the evaluation was “ ⁇ ” or “ ⁇ ” under any condition.
- the level of occurrence of unevenness in actual polishing is a level that does not cause a problem as an actual product and that there is no problem in practical use. Yes.
- by optimizing other conditions it is at a level that is evaluated as “ ⁇ ”. Therefore, it was confirmed that the workpiece W can be satisfactorily stirred under the conditions shown in Table 1.
- Example 1-4 was evaluated as “ ⁇ ” in the qualitative evaluation, it was slightly inferior to Example 1-3 in quantitative evaluation.
- Example 1-9 was slightly inferior in quantitative evaluation compared with Example 1-10.
- the evaluation was “ ⁇ ”, and it was confirmed that stirring was evenly performed.
- Work A ceramic raw material composed of a mixture of SiC and Al 2 O 3 (dimensions: 0.5 mm ⁇ 0.5 mm ⁇ 1.0 mm)
- Work B ceramic raw material composed of a mixture of SiC and Al 2 O 3 (dimensions: 0.15 mm ⁇ 0.15 mm ⁇ 0.20 mm)
- Workpiece C ceramic raw material composed of a mixture of SiC and Al 2 O 3 (size: 1.0 mm ⁇ 1.0 mm ⁇ 1.5 mm)
- Workpiece D Ferrite (Dimensions: 0.5mm x 0.5mm x 1.0mm)
- Workpiece E Glass (Dimensions: 0.5 mm x 0.5 mm x 1.0 mm)
- Workpiece F Copper (Dimensions: 0.5mm x 0.5mm x 1.0mm)
- the workpiece is charged into the processing container 10 so that the volume of the processing container 10 is about 1/5. Then, after the dust collector 42 is operated, the processing container 10 is rotated for 30 minutes to fluidize the workpiece.
- the conditions for fluidization were as shown in Table 2. Regarding each evaluation condition in Table 2, the inclination angle, the number of rotations, the area, the position, and the presence or absence of the airflow control member are the same as the contents of the evaluation conditions described in the evaluation of fluidization. It describes below about the passage speed which is an evaluation condition different from the evaluation of fluidization. Passing speed (mm / s): Speed at which the abrasive passes between the workpieces charged in the processing container 10.
- the passing velocity was evaluated by measuring the fluid velocity of the abrasive with a flow velocity measuring system (Flowtech Research, Inc .; PIV system). Specifically, the speed of the portion immediately before the abrasive put in from the abrasive throwing unit 30 contacts the workpiece W was measured, and this value was taken as the passing speed.
- a flow velocity measuring system Flowtech Research, Inc .; PIV system.
- alumina abrasive grains (WA # 800; manufactured by Shinto Kogyo Co., Ltd.) are charged into the storage tank 31, and the conveying motor 32i is operated so as to charge the abrasive at a rate of 20 g / min. did. Polishing was performed for 30 minutes by operating the processing vessel 10 and the dust collector 42.
- processing accuracy “processing accuracy”, “surface condition”, and “residue of abrasive” were evaluated.
- Each evaluation method and evaluation criteria are as follows. ⁇ Machining accuracy> Ten workpieces polished under each condition were collected and observed with a microscope (VHX-2000 manufactured by Keyence) to evaluate rounding of the corners. The evaluation criteria for machining accuracy are as follows. ⁇ : All workpieces are rounded. ⁇ : There are 1 to 3 workpieces that have not been rounded. X: There are four or more workpieces that are not rounded.
- ⁇ Surface condition> Collect 10 workpieces W polished under each condition and observe them with a microscope (Keyence VHX-2000) to check the surface condition of the workpiece (cracks, chipping, scratches) ) Was evaluated.
- the evaluation criteria for the surface condition are as follows. ⁇ : No cracking or chipping is observed in all the workpieces. ⁇ : There are 1 to 3 workpieces with cracks or chipping. X: There are 4 or more workpieces with cracks or chipping.
- ⁇ Abrasive residue> With respect to the polished workpiece subjected to polishing under the respective conditions, the polished workpiece and the deposit attached to the workpiece are separated by sieving using an ultrasonic vibration sieve.
- the opening (mesh diameter) of the sieve used for sieving is set so that only the adhering material is allowed to pass through the polished workpiece. Thereafter, the weight of the workpiece and the deposit after removing the deposit is measured. Then, the residual ratio of the abrasive was calculated by calculating “(weight of deposit) / (weight of workpiece after removal of deposit) ⁇ 100 (%)”.
- the evaluation criteria for “residue of abrasive” are as follows. A: The residual rate of the abrasive is less than 1%. ⁇ : The residual ratio of the abrasive is 1% or more and less than 3%. X: The residual ratio of the abrasive is 3% or more.
- evaluation methods and evaluation criteria are as follows. ⁇ Spattering of abrasives> After polishing under the respective conditions, evaluation of “abrasion of abrasives” was performed on the periphery of the polishing apparatus 1 after the polishing to investigate the degree of abrasives scattered during the polishing process. The evaluation criteria of “abrasion of abrasive” are as follows. O: After polishing, no abrasive is visually observed outside the processing container 10. ⁇ : After polishing, an abrasive is visually observed outside the processing container 10.
- Table 2 summarizes the evaluation of the workpiece after polishing and the evaluation of the environment after polishing.
- Example 2-1 to Example 2-21 the workpiece A was polished.
- the evaluation was “ ⁇ ” or “ ⁇ ” under any condition.
- the quality of the workpiece evaluated as “ ⁇ ” is a quality that does not cause a problem as a product.
- the quality is such that it is evaluated as “ ⁇ ” by optimizing other conditions. It can be confirmed that there is a difference in the results of processing accuracy, surface condition, and residual abrasives for each example. However, although there is a difference in the results, there is no problem with the quality of the workpiece under any of the conditions of Example 2-1 to Example 2-21. Therefore, it was confirmed that the workpiece A can be polished well in the examples of Table 2.
- Example 2-22 and Example 2-23 the dimensions of the workpiece were changed, and the workpiece was evaluated under the same evaluation conditions as in Example 2-21. As a result of this evaluation, it was confirmed that polishing could be satisfactorily performed regardless of the size of the workpiece.
- Example 2-24 to 2-26 the workpiece was evaluated under the same evaluation conditions as in Example 2-21 by changing the material of the workpiece. As a result of this evaluation, it was confirmed that any material of ferrite, glass, and metal (copper) could be polished well.
- Examples 2-1 to 2-26 the evaluation of the scattering of the abrasive was performed together with the evaluation of the workpiece. Since no conspicuous scattering of the abrasive material could be confirmed, the abrasive material introduced from the abrasive material introduction unit 30 was used for any of the working examples after polishing the workpiece in the processing vessel 10. It was confirmed that the dust was collected by the dust collector 42 without scattering outside.
- the polishing apparatus 101 of this embodiment includes a processing container 110, a vibration unit 120 that is a fluidizing unit, an abrasive charging unit 130, and a suction unit 140.
- the processing container 110 has the same configuration as the processing container 10 described in the first embodiment.
- the vibration unit 120 includes a holder 121 that holds the processing container 110, a vibration force generation unit 122, and a mount 123.
- the holder 121 has a cylindrical shape with a bottom surface closed and a flange portion provided at the bottom. The bottom is provided with an opening into which a later-described suction member 141 can be inserted.
- the vibration force generation unit 122 includes a rotating shaft 122a that is rotatably held at the center of the bottom of the holder 121, a first weight 122b and a second weight 122c that are held on the rotating shaft 122a, and a motor 122d that is fixed to the pedestal 123. And a rotation transmitting member 122e that transmits the rotation of the motor 122d to the rotating shaft 122a, and a connecting member 122f that connects the holder 121 to the mount 123 so as to be able to vibrate.
- the first weight 122b and the second weight 122c are rectangular or fan-shaped members, and an opening in which the rotating shaft 122a can be fitted is formed in the vicinity of one end side, and the bolt with the rotating shaft 122a inserted into the opening. It is fixed by etc. Since the rotating shaft 122a is decentered by the first weight 122b and the second weight 122c, vibration is applied to the holder 121, that is, the processing container 110, when the rotating shaft 122a rotates. At this time, the flow state of the workpiece W can be adjusted by adjusting the phase difference ⁇ of the second weight 122c with respect to the first weight 122b shown in FIG. 7B. When the workpiece W is fluidized by the vibration unit 120, as shown in FIG.
- a flow Y directed in the circumferential direction, a flow X moving along the circumference, and a flow Z moving in the vertical direction are combined. It becomes the flow that was done.
- the phase difference ⁇ is small, the flow Y directed in the circumferential direction is linearly directed in the circumferential direction.
- the phase difference ⁇ is too large, the flow Y in the circumferential direction becomes a flow toward the center of the bottom.
- the phase difference ⁇ can be set to 30 ° to 75 °, preferably 45 ° to 60 °.
- the rotation transmission member 122e includes a pulley fixed to the rotation shaft 122a and the rotation shaft of the motor 122d, and a belt spanned between the pulleys. With this configuration, the rotation of the motor 122d can be transmitted to the rotating shaft 122a.
- the holder 121 to which the vibration force generating unit 122 is connected is connected to the upper side of the gantry 123 through a connecting member 122f.
- the connecting member 122f only needs to be able to connect the holder 121 so as to be able to vibrate.
- a spring, rubber, or the like can be used.
- a spring is used.
- a plurality of projections (eight in this embodiment) that can fix one end of the spring are provided at equal positions on the flange portion of the holder 121 and the base 123, respectively, and the holder 121 is connected to the base 123 so as to vibrate by the spring. Has been.
- a stirring promoting member (not shown) may be inserted between the bottom surface portion 112 of the processing container 110 and the holder 121.
- a stirring promoting member For example, by inserting a plurality of spheres made of rubber as a stirring promoting member, when the holder 121 vibrates, the stirring promoting member strikes the back surface of the bottom surface portion 112 of the processing container 110 in the vertical direction. The moving Z direction flow is promoted.
- the abrasive material input unit 130 has the same configuration as the abrasive material input unit 30 described in the first embodiment.
- the suction unit 140 includes a suction member 141 disposed so that one end surface thereof is spaced from the bottom surface portion 112 of the processing container 110, a dust collector 142 that generates a suction force, a suction member 141, and a dust collector 142.
- Hose 143 connecting the two.
- the suction member 141 is open at both ends, and is continuously connected to the cylindrical rectification unit 141a having the same cross section, and one end surface of the rectification unit 141a, and the cone whose cross-sectional area decreases as the distance from the rectification unit 141a increases.
- a suction part 141b having a shape.
- a hose 143 is connected to the reduced diameter end of the suction part 141b, and the other end of the hose 143 is connected to a dust collector 142 that can suck and collect the abrasive. Thereby, the suction member 141 and the dust collector 142 are connected.
- the rectifying unit 141a of the suction member 141 has a function of rectifying the airflow so that the airflow generated during suction flows toward the dust collector 142 without flowing back toward the opening end of the rectifying unit 141a.
- the suction unit 141b plays a role of accelerating the airflow so that the airflow that has passed through the rectifying unit 141a flows efficiently to the dust collector 142. Note that the rectifying unit 141a may not be provided as long as the abrasive can be sucked only by the suction unit 141b without being scattered outside the suction member 141.
- the suction member 141 may be configured such that the size of the opening end (the other end side of the reduced diameter end) is slightly larger than the bottom surface portion 112 of the processing container 110 and can be sucked from the entire bottom surface portion 112. It is good also as a structure which can be made smaller than 112 and can be attracted
- the size of the opening end is made smaller than the bottom surface portion 112 of the processing container and can be sucked from a part of the bottom surface portion 112, and the abrasive material is introduced so that the abrasive material can be introduced at a position opposite to the opening end.
- Unit 130 is arranged. Note that the suction member 141 may not be provided as long as the abrasive can be sucked only by the hose 143 without being scattered outside.
- an abrasive suction portion B through which the abrasive passes and is sucked is formed at a position facing the opening end of the suction member 141 of the bottom surface portion 112.
- the size of the abrasive suction part B can be 10% or more and 40% or less of the area of the bottom part 112 of the processing container 110. If the area of the abrasive suction portion B is too large, the workpiece W more than necessary is fixed to the bottom surface portion 12, so that the workpiece W is not sufficiently stirred, and if it is too small, the abrasive is sufficiently sucked. I can't.
- the clearance between the processing container 110 and the suction member 141 when the processing container 110 is closest to the suction member 141 can be in the range of 1 mm to 25 mm, and more specifically 5 mm to 15 mm. Can do.
- the abrasives collected by the dust collector 142 are reduced in size due to the occurrence of cracks and chips due to contact with the workpieces W. Also included are fine particles such as abrasive debris.
- a classification unit may be further provided in order to collect a reusable abrasive from the abrasive and fine particles. The classifying unit separates the abrasive and fine particles that can be reused, and the abrasive that can be reused can be returned to the storage tank 131.
- the classification unit may be provided in the middle of a path from the suction member 141 toward the dust collecting device 142, or may be provided by another path.
- the classification unit can include a known device such as an airflow classification device or a sieve.
- a flow control unit (not shown) for controlling the flow state of the workpiece W in the processing container 110 may be further used.
- An example of the flow control unit is a unit that arbitrarily changes the rotational speed of the motor 122d. As the polishing proceeds, the flow state of the workpiece W can be changed by changing the angle and the speed. Thereby, it can flow on the conditions suitable for the property etc. of all the workpieces W. Furthermore, when the workpiece W is likely to generate chipping and cracks, the chipping and cracking of the workpiece W at the start of flow can be prevented.
- polishing apparatus and a polishing method according to the third embodiment continuously polish a workpiece.
- changes to the polishing apparatus and the polishing method of the first embodiment will be mainly described.
- FIG. 9 and 10 show a polishing apparatus 201 according to a third embodiment.
- FIG. 9 is a plan view of the polishing apparatus 201
- FIG. 10 is a cross-sectional view of the polishing apparatus 201 shown in FIG.
- the width direction of the processing container 210 is described as the x direction
- the length direction of the processing container 210 is described as the y direction
- the direction orthogonal to the x direction and the y direction is described as the z direction.
- the polishing apparatus 201 includes a processing container 210, a vibration advance unit 220, a connecting member 222, and a gantry 223.
- the processing container 210 has a substantially box shape in which a planar shape forms a substantially rectangular shape that is longer in the y direction than in the x direction.
- the processing container 210 has a bottom surface portion 212 and a wall portion 211.
- the bottom surface portion 212 includes wires arranged in a mesh shape, and a region surrounded by the wires constitutes an opening 213.
- the width of the opening 213 is larger than the grain size of the abrasive and smaller than the width of the workpiece W.
- the bottom surface portion 212 allows the abrasive to pass therethrough and retains the work piece thereon.
- the wall portion 211 is erected along the edge of the bottom surface portion 212 and defines a space on the bottom surface portion 212 from the side.
- a discharge portion 214 not provided with a wall portion 211 is formed on one end side of the processing container 210 in the y direction (the right edge portion in FIG. 9). The discharge unit 214 is used to discharge the workpiece W in the processing container 210 to the outside.
- the processing container 210 is supported on the gantry 223 via a connecting member 222 so as to be able to vibrate.
- the connecting member 222 can be configured by, for example, a spring, rubber, or the like.
- the vibration advance unit 220 is provided on the back surface of the bottom surface portion 212, that is, on the lower side.
- the vibration advancing unit 220 fluidizes the workpiece W in the processing container 210 by applying vibration to the processing container 210, and supplies the workpiece W charged in the processing container 210 to the discharge unit 214. Move forward.
- an eccentric motor can be used as the vibration advance unit 220.
- a workpiece charging unit 260 is provided above the other end side (left side in FIG. 9) of the processing container 210 in the y direction.
- the workpiece charging unit 260 charges the workpiece W into the processing container 210 continuously or intermittently.
- continuously charging the workpiece W means that a predetermined amount of the workpiece W is continuously charged into the processing container 210.
- intermittently charging means that a predetermined amount of the workpiece W is charged into the processing container 210 at intervals.
- a known mechanism such as a vibration feeder, a belt conveyor, or a bucket conveyor can be used as the workpiece charging unit 260.
- the polishing apparatus 201 further includes an abrasive charging unit and a suction unit.
- an abrasive charging unit and a suction unit In FIGS. 9 and 10, for convenience of explanation, the illustration of the abrasive charging unit and the suction unit is omitted.
- the abrasive charging unit and the suction unit those having the same configuration as the abrasive charging unit 30 and the suction unit 40 shown in FIG. 1 can be used.
- the suction member of the suction unit is disposed on the back surface side of the bottom surface portion 212, that is, on the lower side.
- the abrasive charging unit is disposed on the surface side of the bottom surface portion 212, that is, on the upper side.
- polishing method according to the third embodiment will be described.
- the vibration advance unit 220, the suction unit, and the abrasive charging unit are operated.
- the workpiece W is charged continuously or intermittently into the processing container 210 by the workpiece charging unit 260 (workpiece charging step).
- the workpiece W charged in the processing container 210 flows in the processing container 210 due to the vibration of the processing container 210.
- the workpiece W in the processing container 210 moves, that is, moves forward from the other end side of the processing container 210 on the y-direction side to the discharge unit 214 (fluidization advance process).
- the abrasive is thrown from the abrasive throwing unit toward the workpiece W in the processing vessel 210 (abrasive throwing step). Further, an air flow is generated by the suction unit in the direction passing through the processing container 210, that is, from the front surface side to the back surface side of the bottom surface portion 212 (air flow generation step). Thereby, an abrasive suction part B as shown in FIG. 6 is formed on the surface of the bottom surface part 212. The workpiece W in the processing container 210 passes over the abrasive suction part B in the process of moving forward toward the discharge part 214.
- the abrasive material supplied from the abrasive material input unit rides on the airflow and passes between the workpieces W and rubs against the workpiece W, whereby the workpiece W is polished (polishing). Process).
- the polishing amount of the workpiece W can be adjusted by adjusting the magnitude of vibration applied by the vibration advance unit 220 and changing the speed at which the workpiece W passes through the abrasive suction part B.
- the polished workpiece W that has passed through the abrasive suction portion B continues to move forward, and is discharged from the discharge portion 214 to the outside of the processing container 210 and recovered (workpiece recovery step).
- the abrasive that has passed through the bottom surface portion 212 is recovered by the suction unit (abrasive recovery process).
- the workpiece W can be continuously polished.
- the type of workpiece and the machining purpose of the workpiece are not limited to this.
- the workpiece can satisfactorily polish not only hard and brittle materials having hard and brittle properties such as ceramics, silicon, ferrite and crystal materials, but also various composite materials such as resins.
- the processing purpose can be adjustment of the surface roughness of the workpiece, deburring, removal of the surface layer, and the like. For example, when the above polishing method is applied to the removal process of the ceramic surface layer, the adhesion to the film is improved when a film such as a plating is formed in the subsequent process by removing the surface layer. Can do.
- the polishing apparatus can be particularly suitably used for polishing small parts.
- the workpiece is a component such as a multilayer ceramic capacitor or inductor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Power Engineering (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
Description
なお、ここでいう「研磨材の投入」とは、エアブラスト装置のように研磨材を加工容器内にある被加工物に吹き付けるのではなく、単に研磨材を被加工物に投入する意味である。例えば、研磨材投入ユニットが加工容器の上方に配置されている場合は、加工容器に向けて研磨材を自然落下させるだけでもよい。また、研磨材を吸引ユニットで吸引することにより、加工容器内に供給してもよい。さらに、研磨材が周りに飛散しない程度の弱い風力で、研磨材を加工容器に向けて供給してもよい。
本実施形態の研磨装置1は図1に示すように加工容器10と、流動化ユニットと、研磨材投入ユニット30と、吸引ユニット40と、を備えている。本実施形態では、流動化ユニットとして回転ユニット20を備えている。
トラフ32aは後部位(同図左側)の上面に研磨材供給口32bが、先端(同図右側)の下部に研磨材排出口32eが、それぞれ開口されている。さらにトラフ32aの内部の空間は、トラフ32aおよび搬送スクリュ32fで形成される研磨材搬送部32cと、搬送スクリュ32fの前方に位置し、研磨材排出口32eを含む研磨材排出部32dと、に分割されている。
予め、図1で示す貯留タンク31に研磨材を装入しておく。この際装入する研磨材の大きさは、加工容器10の開口部13の径、若しくは開口部13が網目状の場合、目開きよりも小さい。研磨時に、加工容器10に備えられている開口部13から研磨材が通過可能にするためである。また、研磨装置1の任意の位置に備えられており、モータ22と、搬送モータ32iと、集塵装置42と、を制御する制御部(図示せず)に研磨条件を入力しておく。なお、ここでいう「研磨条件」とは、研磨時間、モータ22の運転条件、研磨材の投入速度(単位時間当たりの投入量)、運転パターン、等のことをいう。
研磨材の形状は球形、円柱形状、直方体、異方形状、等特に限定されず、被加工物の材質や形状、および研磨目的に合わせて適宜選択できる。
研磨材の粒子径も同様に、被加工物の材質や形状、および研磨目的に合わせて適宜選択できる。例えば、セラミックス系粒子を研磨材とした場合、JIS(Japanese Industrial Standards) B6001で規定される粒度がF220または#240以上#1000以下の範囲より適宜選択することができる。
本実施形態の研磨材は、粒度が#800である、異方形状のアルミナ系の粒子を用いた。
次に、被加工物Wを加工容器10内に装入する。その後、加工容器10を、ボルト等でホルダ21に固定する。
次に、制御部に備えられている作動スイッチ(図示せず)を入れると、集塵装置42が作動し、研磨材吸引部B近傍において吸引部材41に向かって吸引する気流が発生する。ここで、集塵装置42は研磨材が加工容器10内に装入した被加工物W同士を通過する通過速度を前述範囲内となるよう、集塵装置42による吸引力を調整し得る。併せて、加工容器10と研磨材投入ユニット30との距離を調整し得る。
また、モータ22が作動しホルダ21、即ち加工容器10が回転することで、加工容器10内の被加工物Wが図4に示すように流動し、撹拌される。ここで、加工容器10の回転速度は前述したように、臨界回転数の5%以上50%以下とすることができ、より詳細には10%以上30%以下とすることができる。
次いで、研磨材投入ユニット30の搬送モータ32iが作動し、研磨材が一定速度で、研磨材排出口32eから加工容器10内に装入した被加工物Wに向けて投入(落下)する。
加工容器10内では、流動している被加工物W同士の隙間にも吸引部材41に向かって吸引する気流が発生している。加工容器10に向かって投入された研磨材は、この気流により被加工物W同士の隙間を通過し、吸引部材41に向かう。この際、研磨材と被加工物Wとが擦れあうため、被加工物Wが研磨される。また、被加工物Wは加工容器10内を図4のように流動しているため、全ての被加工物W毎の仕上がり精度にムラがなく、いずれの被加工物Wも均一に研磨することができる。本実施形態の研磨装置は、エアブラスト装置のように、研磨材を圧縮空気と共に固気二相流として被加工物Wに吹き付けないため、被加工物Wが小型軽量であっても、加工容器から飛散することなく研磨することができる。
加工容器10を通過した研磨材は、集塵装置42に向かって吸引する気流により、吸引部材41に向かう。加工容器10と吸引部材41との間には小さな隙間が形成されているので、外気を吸引して吸引部材41の外から内側に向かう気流が発生する。そのため、加工容器10を通過した研磨材は外部に飛散することなく、全て吸引部材41に向かう。
まず、流動化の評価について記載する。被加工物Wは、SiCとAl2O3との混合物で構成されるセラミックスの生材(焼結前の物)とした。この被加工物Wの寸法は、0.5mm×0.5mm×1.0mmとした。この被加工物Wの半数を、油性塗料で黒色に塗装した。
傾斜角度(deg.) ;加工容器10の水平面に対する傾斜角度θ
回転数(%) ;加工容器10の回転数/臨界回転数×100
面積 ;研磨材吸引部Bの面積/加工容器10の底面部12の面積
吸引速度(mm/s) ;研磨材吸引部Bにおける吸引の風速
位置(deg.) ;底面部12中心から底面部12の周縁部下端に向けた仮想線を基準とし、当該仮想線から加工容器10の回転方向への位相角度α
気流制御部材50の有無;加工容器10の底面部12裏面に、当該底面部の径の1/3の気流制御部材50を配置したか否か
◎・・・未塗装品の個数が45~55個
○・・・未塗装品の個数が40~44個または56~60個
△・・・未塗装品の個数が30~39個または61~70個
×・・・未塗装品の個数が29個以下または71個以上
また、加工容器10の底面部12裏面に気流制御部材50を配置した場合(実施例1-20)、評価は「◎」となっており、より均等に攪拌できていることが確認された。
次に、研磨後の被加工物の評価及び研磨後の環境の評価について記載する。アルミナ質の砥粒(WA#800;新東工業株式会社製)を、研磨材投入ユニット30より20g/分の投入速度で投入して被加工物を研磨時間30分で研磨した結果について説明する。本実施評価では、6種類の被加工物で評価を行った。以下に被加工物の詳細を示す。
被加工物A;SiCとAl2O3との混合物で構成されるセラミックスの生材(寸法;0.5mm×0.5mm×1.0mm)
被加工物B;SiCとAl2O3との混合物で構成されるセラミックスの生材(寸法;0.15mm×0.15mm×0.20mm)
被加工物C;SiCとAl2O3との混合物で構成されるセラミックスの生材(寸法;1.0mm×1.0mm×1.5mm)
被加工物D;フェライト(寸法;0.5mm×0.5mm×1.0mm)
被加工物E;ガラス(寸法;0.5mm×0.5mm×1.0mm)
被加工物F;銅(寸法;0.5mm×0.5mm×1.0mm)
通過速度(mm/s);研磨材が加工容器10内に装入した被加工物同士の間を通過する速度。
通過速度は、流速計測システム(株式会社フローテック・リサーチ;PIVシステム)にて研磨材の流体速度を測定することで評価した。具体的には、研磨材投入ユニット30から投入された研磨材が、被加工物Wに接触する直前の部分の速度を測定し、この値を通過速度とした。
<加工精度>
それぞれの条件で研磨を行った被加工物を10個ずつ採取し、マイクロスコープ(キーエンス製VHX-2000)にて観察を行い、角部の丸み付け加工を評価した。加工精度の評価基準は以下の通りである。
○・・・全ての被加工物において、丸み付け加工が行われている。
△・・・丸み付け加工が行われていない被加工物が1個~3個ある。
×・・・丸み付け加工が行われていない被加工物が4個以上ある。
<表面状態>
それぞれの条件で研磨を行った被加工物Wを、それぞれ10個ずつ採取し、マイクロスコープ(キーエンス製VHX-2000)にて観察を行い、被加工物の表面状態(クラック・チッピング・傷の有無)を評価した。表面状態の評価基準は以下の通りである。
○・・・全ての被加工物において、クラック又はチッピングが観察されない。
△・・・クラック又はチッピングが存在する被加工物が1個~3個ある。
×・・・クラック又はチッピングが存在する被加工物が4個以上ある。
<研磨材の残留>
それぞれの条件で研磨を行った研磨後の被加工物について、超音波振動篩を用いて、研磨後の被加工物と被加工物に付着していた付着物を篩分けにより分別する。篩分けに用いる篩の目開き(メッシュ径)は研磨後の被加工物を通さず付着物のみを通すように設定している。その後、付着物除去後の被加工物と付着物の重量をそれぞれ測定する。そして、研磨材の残留率を「(付着物の重量)/(付着物除去後の被加工物の重量)×100(%)」で算出して、研磨材の残留を評価した。「研磨材の残留」の評価基準は以下の通りである。
○・・・研磨材の残留率が1%未満である。
△・・・研磨材の残留率が1%以上3%未満である。
×・・・研磨材の残留率が3%以上である。
<研磨材の飛散>
それぞれの条件で研磨を行った後、研磨が終了した研磨装置1周辺について、研磨工程の際に飛散した研磨材の程度を調査するために「研磨材の飛散」の評価を行った。「研磨材の飛散」の評価基準は以下の通りである。
○・・・研磨を行った後、目視で加工容器10の外に研磨材が観察されない。
×・・・研磨を行った後、目視で加工容器10の外に研磨材が観察される。
次に別の形態の研磨装置の一例として、流動化ユニットとして振動ユニットを備える研磨装置を第二実施形態として説明する。なお、以下の説明では第一実施形態との変更点のみ説明する。
次に、第三実施形態に係る研磨装置及び研磨方法について説明する。本実施形態に係る研磨装置及び研磨方法は、被加工物を連続して研磨する。なお、以下の説明では主に第一実施形態の研磨装置および研磨方法に対する変更点について説明する。
Claims (19)
- 被加工物の表面を研磨する研磨装置であって、
研磨材が通過可能な底面部を有すると共に、前記被加工物を前記底面部上に滞留させる加工容器と、
前記加工容器内において前記被加工物を流動させる流動化ユニットと、
前記研磨材を前記加工容器内の前記被加工物に向けて投入する研磨材投入ユニットと、
前記研磨材が前記加工容器を通過する方向に向かう気流を発生させると共に前記研磨材を吸引して回収する吸引ユニットと、
を備える、研磨装置。 - 前記流動化ユニットは、前記加工容器を振動させる振動ユニットまたは前記加工容器をその底面部の中心を軸心として回転させる回転ユニットである、請求項1に記載の研磨装置。
- 前記流動化ユニットは、流動状態を変化させる流動制御ユニットを更に備えている、請求項2に記載の研磨装置。
- 前記流動化ユニットは前記回転ユニットであり、
前記加工容器は、水平面に対して傾斜するように前記回転ユニットに支持されている、請求項2に記載の研磨装置。 - 前記加工容器の傾斜角度は水平面に対して30°以上70°以下である、請求項4に記載の研磨装置。
- 前記加工容器の底面部には、開口部が設けられている、請求項1に記載の研磨装置。
- 前記開口部は網目状に構成されており、当該開口部の目開きが70μm以上1100μm以下である、請求項6に記載の研磨装置。
- 前記吸引ユニットによる吸引時に、前記加工容器の底面部の一部には、前記研磨材が当該加工容器を通過して前記吸引ユニットに吸引される研磨材吸引部が形成される、請求項1に記載の研磨装置。
- 前記研磨材吸引部の面積は、前記加工容器の底面部の面積の1/8以上1/4以下である、請求項8に記載の研磨装置。
- 前記研磨材吸引部を通過する吸引速度は、5m/sec以上100m/sec未満である、請求項8に記載の研磨装置。
- 前記研磨材吸引部の中心が、前記加工容器の底面部中心から周縁部下端の方向に対して当該加工容器の回転方向側に所定の角度離れて位置する、請求項10に記載の研磨装置。
- 前記加工容器の底面部中心には、前記研磨材が当該加工容器を通過するための気流の流れを制御する気流制御部材が配置されている、請求項2に記載の研磨装置。
- 前記研磨材投入ユニットは、
前記研磨材を貯留する貯留タンクと、
前記研磨材を前記被加工物へ向けて投入する研磨材排出口と、
前記貯留タンクから供給された前記研磨材を前記研磨材排出口へ向けて搬送する搬送ユニットと、を備え、
前記搬送ユニットは、回転軸に螺旋状の羽根が設けられた搬送スクリュと、前記搬送スクリュを内包し、先端の下部に前記研磨材排出口が開口され、後部位の上面には前記貯留タンクと連結される研磨材供給口が開口されたトラフと、を備え、
前記トラフ内の空間は、前記搬送スクリュ及び前記トラフで形成される空間と、前記搬送スクリュの前方に位置し、前記研磨材排出口を含む空間と、に分割されており、
前記搬送スクリュの先端と前記研磨材排出口との間には、前記研磨材が通過できる解砕部を設けた規制板が配置されている、請求項1に記載の研磨装置。 - 前記被加工物は硬脆材料で形成される、請求項1に記載の研磨装置。
- 前記被加工物は、積層セラミックスコンデンサー又はインダクタの部品である、請求項14に記載の研磨装置。
- 研磨材を通過させ、被加工物をその上に滞留させる底面部を有する加工容器と、当該被加工物を流動化させるための流動化ユニットと、前記研磨材を前記加工容器内の当該被加工物に投入する研磨材投入ユニットと、前記研磨材を吸引して回収する吸引ユニットと、を備える研磨装置を用いる研磨方法であって、
前記被加工物を前記加工容器に装入する被加工物装入工程と、
前記吸引ユニットにより前記研磨材が前記加工容器を通過する方向に向かう気流を発生させる気流発生工程と、
前記流動化ユニットにより前記加工容器内に装入した前記被加工物を流動化する流動化工程と、
前記研磨材を前記研磨材投入ユニットから前記加工容器内の前記被加工物へ向けて投入する研磨材投入工程と、
前記研磨材を前記加工容器内に装入した前記被加工物同士の間を通過させて前記被加工物を研磨する研磨工程と、
前記吸引ユニットにより前記研磨材を回収する研磨材回収工程と、
を有する、研磨方法。 - 研磨材を通過させ、被加工物をその上に滞留させる底面部、及び被加工物を外部に排出する排出部を有する加工容器と、前記被加工物を流動化させるための流動化ユニットと、前記研磨材を前記加工容器内の当該被加工物に投入する研磨材投入ユニットと、前記研磨材を吸引して回収する吸引ユニットと、を備える研磨装置を用いる研磨方法であって、
前記被加工物を前記加工容器に連続的又は断続的に装入する被加工物装入工程と、
前記吸引ユニットにより前記研磨材が前記加工容器を通過する方向に向かう気流を発生させる気流発生工程と、
前記流動化ユニットにより前記加工容器内の前記被加工物を流動化させると共に、前記被加工物装入工程において装入された前記被加工物を前記排出部に向けて前進させる流動化前進工程と、
前記研磨材を、前記研磨材投入ユニットから前記加工容器内の前記被加工物へ向けて投入する研磨材投入工程と、
前記研磨材を、前記加工容器内の前記被加工物同士の間を通過させて前記被加工物を研磨する研磨工程と、
前記吸引ユニットにより前記研磨材を回収する研磨材回収工程と、
前記排出部から排出された前記被加工物を回収する被加工物回収工程と、
を有する、研磨方法。 - 前記研磨材が前記加工容器内に装入した前記被加工物同士の間を通過する通過速度が、5m/sec以上100m/sec未満である、請求項16又は17に記載の研磨方法。
- 前記流動化ユニットは、前記加工容器をその底面部の中心を軸心に回転させる回転ユニットであり、
前記流動化工程では、前記回転ユニットによって前記加工容器を臨界回転数の5%以上50%以下で回転させる、請求項16に記載の研磨方法。
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US20160176008A1 (en) | 2016-06-23 |
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