WO2015001634A1 - Dispositif d'imagerie et équipement de production - Google Patents

Dispositif d'imagerie et équipement de production Download PDF

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Publication number
WO2015001634A1
WO2015001634A1 PCT/JP2013/068272 JP2013068272W WO2015001634A1 WO 2015001634 A1 WO2015001634 A1 WO 2015001634A1 JP 2013068272 W JP2013068272 W JP 2013068272W WO 2015001634 A1 WO2015001634 A1 WO 2015001634A1
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WO
WIPO (PCT)
Prior art keywords
imaging
lens
voltage
variable focus
focus lens
Prior art date
Application number
PCT/JP2013/068272
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English (en)
Japanese (ja)
Inventor
神藤　高広
Original Assignee
富士機械製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 富士機械製造株式会社 filed Critical 富士機械製造株式会社
Priority to PCT/JP2013/068272 priority Critical patent/WO2015001634A1/fr
Priority to JP2015524952A priority patent/JP6334528B2/ja
Publication of WO2015001634A1 publication Critical patent/WO2015001634A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Definitions

  • the present invention relates to an imaging apparatus that images a target object, and a production facility that controls production processing based on image data obtained by the imaging apparatus.
  • Patent Document 1 discloses a configuration in which a component camera or a board camera is applied to a component mounter that is a production facility used for production of various products in the industrial field. Has been. In this component mounter, the accuracy of the mounting control is improved by reflecting the state of the electronic component or the like recognized based on the image data captured by the imaging device in the mounting control. The external dimensions and installation location of an imaging apparatus may be restricted due to a request for downsizing of a component mounter, for example. Therefore, Patent Document 2 discloses an imaging apparatus that employs a variable focus lens in an optical system. Since the focal length of the variable focus lens can be changed according to the applied voltage, the number of parts of the optical system can be reduced and the imaging apparatus can be downsized.
  • a method using image processing such as edge processing is known as a focusing method in an imaging apparatus including a variable focus lens.
  • this method since the applied voltage is adjusted based on image processing, a certain amount of time is required for focusing. Therefore, when the distance to the object to be imaged is recognized in advance, the object to be imaged is obtained by using a certain correlation between the voltage applied to the variable focus lens and the focal length. Accordingly, there is a method in which a predetermined voltage is applied to the variable focus lens (see paragraph [0032] of Patent Document 2). This eliminates the need for image processing and adjustment of the applied voltage at the time of imaging, thereby improving the efficiency of the imaging process.
  • variable focus lens is affected by the imaging environment such as the ambient temperature, and the focal length fluctuates with a change in the temperature of the variable focus lens, for example, even when a constant voltage is applied.
  • the method of focusing by applying a predetermined voltage to the variable focal length lens regardless of image processing an error occurs between the target focal length and the actual focal length, and the focus shifts depending on the imaging environment. There is a risk that.
  • a temperature sensor there are concerns about an increase in cost due to the addition of the temperature sensor, an increase in the load of the imaging process, and the like.
  • the present invention has been made in view of such circumstances, and provides an imaging apparatus that can reliably focus on an object to be imaged according to the imaging environment, and a production facility including the imaging apparatus. With the goal.
  • An imaging apparatus includes a variable focus lens capable of changing a focal length according to an applied voltage, an image sensor that converts light transmitted through the variable focus lens into an electric signal, and an object to be imaged when an object is imaged.
  • An imaging control unit that applies a voltage according to a distance to an object to the variable focus lens, and a standard point provided at a specified distance from the imaging element as an imaging target, based on the electrical signal of the imaging element
  • a focus control unit that adjusts the voltage applied to the variable focus lens to focus the variable focus lens, and applies the voltage and focal length to the variable focus lens using the standard point as an imaging target.
  • a standard applied voltage to the variable focus lens calculated based on a prescribed lens characteristic indicating the relationship between the variable focus lens and the variable focus lens when the focus control unit performs focusing on the standard point.
  • a correction voltage calculation unit that calculates a difference from the current applied voltage as a correction voltage, and the imaging control unit, when imaging the target, based on the distance to the target and the specified lens characteristics
  • a target voltage obtained by adding the correction voltage to the voltage calculated in this manner is applied to the variable focus lens.
  • the imaging apparatus on the assumption that the imaging apparatus recognizes in advance the approximate distance from the imaging device to the object to be imaged, a focusing method for applying a predetermined voltage according to the distance is used. Adopted. Therefore, since the imaging apparatus does not require adjustment of the applied voltage based on image processing at the time of imaging, it is possible to improve the efficiency of the imaging processing.
  • the target voltage applied to the variable focus lens when imaging the object includes a correction voltage that reflects the current imaging environment. Thereby, even when the imaging environment such as the ambient temperature changes, a voltage adapted to the imaging environment can be applied to the variable focus lens. Therefore, it is possible to reliably focus on the object to be imaged according to the imaging environment.
  • the correction voltage calculation unit calculates the correction voltage reflecting the imaging environment by using the predetermined lens characteristics stored in advance. Therefore, the correction voltage can be calculated by performing actual focusing at least once. Further, unlike the conventional temperature correction, it is surely adapted to the current imaging environment, so that the correction accuracy is high, and since no temperature sensor is required, an increase in manufacturing cost can be prevented.
  • An imaging apparatus includes a variable focus lens capable of changing a focal length according to an applied voltage, an image sensor that converts light transmitted through the variable focus lens into an electric signal, and an object to be imaged when an object is imaged.
  • An imaging control unit that applies a voltage according to a distance to an object to the variable focus lens, and a plurality of standard points that are provided at different prescribed distances from the imaging element as imaging objects, respectively.
  • a focus control unit that adjusts a voltage applied to the variable focus lens based on the electrical signal and performs focusing of the variable focus lens for each of the plurality of standard points, and the focus control unit includes the plurality of standard points.
  • a focusing method for applying a predetermined voltage according to the distance is used on the assumption that the imaging apparatus recognizes in advance the approximate distance from the imaging device to the object to be imaged. Adopted. Therefore, since the imaging apparatus does not require adjustment of the applied voltage based on image processing at the time of imaging, it is possible to improve the efficiency of the imaging processing.
  • the target voltage applied to the variable focus lens when imaging the object is calculated based on the current lens characteristics set to reflect the current imaging environment. Thereby, even when the imaging environment such as the ambient temperature changes, a voltage adapted to the imaging environment can be applied to the variable focus lens. Therefore, it is possible to reliably focus on the object to be imaged according to the imaging environment.
  • the lens characteristic setting unit sets the current lens characteristic reflecting the imaging environment using the result of actual focusing on a plurality of standard points, the current lens adapted to the current imaging environment The characteristics can be set with higher accuracy. Further, unlike the conventional temperature correction, it is surely adapted to the current imaging environment, so that the correction accuracy is high, and since no temperature sensor is required, an increase in manufacturing cost can be prevented.
  • An imaging apparatus includes a variable focus lens capable of changing a focal length according to an applied voltage, an image sensor that converts light transmitted through the variable focus lens into an electric signal, and an object to be imaged when an object is imaged.
  • An imaging control unit that applies a voltage according to a distance to an object to the variable focus lens, and a standard point provided at a specified distance from the imaging element as an imaging target, based on the electrical signal of the imaging element Adjusting a voltage applied to the variable focus lens to perform focusing of the variable focus lens, a ratio of a change in focal length with respect to the voltage applied to the variable focus lens stored in advance, Based on the current applied voltage to the variable focus lens when the focus control unit performs focusing on the standard point, the relationship between the applied voltage to the variable focus lens and the focal length is shown.
  • a target voltage calculated based on the distance to the target object and the current lens characteristic when imaging the target object. Is applied to the variable focus lens.
  • a focusing method for applying a predetermined voltage according to the distance is used on the assumption that the imaging apparatus recognizes in advance the approximate distance from the imaging device to the object to be imaged. Adopted. Therefore, since the imaging apparatus does not require adjustment of the applied voltage based on image processing at the time of imaging, it is possible to improve the efficiency of the imaging processing.
  • the target voltage applied to the variable focus lens when imaging the object is calculated based on the current lens characteristics set to reflect the current imaging environment. Thereby, even when the imaging environment such as the ambient temperature changes, a voltage adapted to the imaging environment can be applied to the variable focus lens. Therefore, it is possible to reliably focus on the object to be imaged according to the imaging environment.
  • the lens characteristic setting unit sets the current lens characteristic reflecting the imaging environment by using the ratio of the change in the focal length with respect to the voltage applied to the variable focus lens stored in advance, so that the actual focusing is performed at least.
  • the current lens characteristics can be set by performing this once. Further, unlike the conventional temperature correction, it is surely adapted to the current imaging environment, so that the correction accuracy is high, and since no temperature sensor is required, an increase in manufacturing cost can be prevented.
  • FIG. 1 is an overall view showing a component mounter in a first embodiment. It is a block diagram which shows the control apparatus and component camera of a component mounting machine. It is a side view which shows the component camera in FIG. It is a figure which shows the relationship between protective glass and a camera visual field. It is a flowchart which shows the mounting process by a component mounting machine. It is a flowchart which shows the calculation process of a correction voltage. It is a graph which shows a regular lens characteristic and a correction voltage. It is a flowchart which shows the imaging process using a correction voltage. It is a block diagram which shows the control apparatus and component camera in 2nd embodiment. It is a flowchart which shows the setting process of the present lens characteristic. It is a graph which shows the present lens characteristic.
  • the production facility targets a circuit board product produced by mounting electronic components on a circuit board, and constitutes a production line for this circuit board product.
  • the structure whose production equipment is a component mounting machine is illustrated.
  • the component mounter is a device that mounts a plurality of electronic components on a circuit board, for example, in an integrated circuit manufacturing process.
  • This circuit board is coated with cream solder at an electronic component mounting position by, for example, a screen printing machine, and is sequentially transported through a plurality of component mounting machines to mount the electronic component. Thereafter, the circuit board on which the electronic component is mounted is transported to a reflow furnace and soldered to constitute an integrated circuit as a circuit board product.
  • the component mounter 1 includes a substrate transfer device 10, a component supply device 20, a component transfer device 30, a component camera 50, a substrate camera 60, and a control device 70.
  • the devices 10, 20, 30 and the cameras 50, 60 are provided on the base 2 of the component mounter 1 and are controlled by the control device 70.
  • the horizontal direction of the component mounter 1 (direction from the upper left to the lower right in FIG. 1) is the X-axis direction
  • the horizontal longitudinal direction of the component mounter 1 from the upper right to the lower left in FIG. 1).
  • the direction of heading is the Y-axis direction
  • the vertical height direction vertical direction in FIG. 1) is the Z-axis direction.
  • the board transfer device 10 transfers the circuit board B in the X-axis direction and positions the circuit board B at a predetermined position.
  • substrate conveyance apparatus 10 is a double conveyor type comprised by the 1st conveyance mechanism 11 and the 2nd conveyance mechanism 12 which were arranged in parallel by the Y-axis direction.
  • the first transport mechanism 11 includes a pair of guide rails 11a and 11b and a conveyor belt (not shown).
  • the pair of guide rails 11a and 11b are arranged in the upper part of the base 2 in parallel with the X-axis direction, and guide the circuit board B which is placed on the conveyor belt and conveyed.
  • the circuit board B transported to a predetermined position is clamped by being pushed up from the base 2 side by a clamping device (not shown). Since the second transport mechanism 12 is configured in the same manner as the first transport mechanism 11, detailed description thereof is omitted.
  • the component supply device 20 is a device that supplies electronic components mounted on the circuit board B.
  • the component supply device 20 is disposed on the front side in the Y-axis direction of the component mounter 1 (the left front side in FIG. 1).
  • the component supply apparatus 20 is a feeder system that uses a plurality of cassette-type feeders 21.
  • the feeder 21 includes a feeder main body portion 21a that is detachably attached to the base 2, and a reel housing portion 21b that is provided on the rear end side of the feeder main body portion 21a.
  • the feeder 21 holds a supply reel 22 around which a component packaging tape is wound by a reel accommodating portion 21b.
  • the above-described component packaging tape includes a carrier tape in which electronic components are stored at a predetermined pitch, and a top tape that is bonded to the upper surface of the carrier tape and covers the electronic components.
  • the feeder 21 pitch feeds the component packaging tape drawn from the supply reel 22 by a pitch feed mechanism (not shown).
  • the feeder 21 peels the top tape from the carrier tape to expose the electronic component. Thereby, the feeder 21 supplies the electronic component so that the component transfer device 30 can suck the electronic component at the component supply position Pl located on the front end side of the feeder main body 21a.
  • the component transfer device 30 is a device that transfers electronic components from the component supply position Pl to the mounting position of the circuit board B.
  • the component transfer device 30 is an orthogonal coordinate type disposed above the substrate transfer device 10 and the component supply device 20.
  • a Y-axis moving table 32 is provided on a pair of Y-axis rails 31 extending in the Y-axis direction so as to be movable in the Y-axis direction.
  • the Y-axis moving table 32 is controlled by the operation of the Y-axis motor 33 via a ball screw mechanism.
  • the Y-axis moving table 32 is provided with an X-axis moving table 34 that can move in the X-axis direction.
  • the X-axis moving table 34 is controlled by the operation of the X-axis motor 35 via a ball screw mechanism (not shown).
  • a component mounting head 40 is attached to the X-axis moving table 34.
  • the component mounting head 40 supports a plurality of suction nozzles 42 so as to be movable up and down by a nozzle holder 41 that can rotate around an R axis parallel to the Z axis.
  • the frame 43 is fixed to the X-axis moving table 34.
  • the nozzle holder 41 is connected to the output shaft of the R-axis motor 44 and is configured to be rotationally controlled by the R-axis motor 44.
  • the suction nozzle 42 is controlled to move in the Z-axis direction by an elevating mechanism including a Z-axis motor 45 and the like, and the rotation angle is controlled by a rotational drive of a ⁇ -axis motor (not shown). Further, the suction nozzle 42 constitutes a suction mechanism in the component mounting head 40, and can suck the electronic component by the negative pressure of the controlled air pressure.
  • the component camera 50 and the substrate camera 60 are digital imaging devices having imaging elements such as CCD (Charge Coupled Device) and CMOS (Complementary Metal Oxide Semiconductor).
  • the component camera 50 and the board camera 60 capture an image within a range that can be accommodated in the camera field of view based on a control signal from the control device 70 that is communicably connected, and send the image data acquired by the imaging to the control device 70.
  • the “camera field of view” of the component camera 50 and the board camera 60 refers to a range that can be imaged determined by the lens unit or the image sensor of each camera 50, 60.
  • the component camera 50 is fixed to the base 2 so that the optical axis is in the Z-axis direction, and is configured to be able to image an electronic component that is sucked by the suction nozzle 42.
  • the control device 70 that has acquired the image data from the component camera 50 recognizes the suction state of the electronic component by the suction nozzle 42 by image processing. Thus, by correcting the position and angle of the suction nozzle 42 in accordance with the suction state of the electronic component, it is possible to improve the accuracy of mounting control. Details of the configuration of the component camera 50 will be described later.
  • the board camera 60 is fixed to the X-axis moving base 34 so that the optical axis is in the Z-axis direction, and is configured to be able to image the circuit board B.
  • the control device 70 that has acquired the image data from the substrate camera 60 recognizes the positioning state of the circuit board B by the substrate transfer device 10 by recognizing, for example, a substrate mark attached to the substrate by image processing. Then, the control device 70 corrects the positions of the Y-axis moving table 32 and the X-axis moving table 34 in accordance with the positioning state of the circuit board B, and controls so as to mount the electronic component. As described above, by using the image data obtained by the board camera 60, it is possible to improve the accuracy of the mounting control.
  • the control device 70 is mainly composed of a CPU, various memories, and a control circuit, and controls the operation of the component mounting head 40 based on image data acquired by imaging of the component camera 50 and the board camera 60.
  • an input / output interface 74 is connected to a mounting control unit 71, an image processing unit 72, and a storage unit 73 via a bus.
  • a motor control circuit 75 and an imaging control circuit 76 are connected to the input / output interface 74.
  • the mounting control unit 71 controls the position of the component mounting head 40 and the operation of the suction mechanism via the motor control circuit 75. More specifically, the mounting control unit 71 inputs information output from various sensors provided in the component mounting machine 1 and results of various recognition processes. The mounting control unit 71 then sends a control signal to the motor control circuit 75 based on the control program stored in the storage unit 73, information from various sensors, and the results of image processing and recognition processing.
  • the image processing unit 72 acquires image data acquired by the component camera 50 and the board camera 60 via the imaging control circuit 76, and executes image processing according to the application. This image processing includes, for example, processing such as binarization of image data, filtering, and hue extraction.
  • the storage unit 73 is configured by an optical drive device such as a hard disk device or a flash memory.
  • the storage unit 73 includes a control program for operating the component mounting machine 1, image data transferred from the component camera 50 and the board camera 60 to the control device 70 via a bus or a communication cable, and processing performed by the image processing unit 72. Temporary data and the like are stored.
  • the input / output interface 74 is interposed between the CPU and storage unit 73 and the control circuits 75 and 76, and adjusts data format conversion and signal strength.
  • the motor control circuit 75 controls the Y-axis motor 33, the X-axis motor 35, the R-axis motor 44, the Z-axis motor 45, and the ⁇ -axis motor based on a control signal from the mounting control unit 71.
  • the component mounting head 40 is positioned in each axial direction, and the suction nozzle 42 is controlled to have a predetermined angle.
  • the imaging control circuit 76 controls imaging by the component camera 50 and the board camera 60 based on imaging control signals by the CPU of the control device 70 and the like. Further, the imaging control circuit 76 acquires image data obtained by imaging of the component camera 50 and the board camera 60 and stores the acquired image data in the storage unit 73 via the input / output interface 74.
  • the component camera 50 mainly includes a lens unit Nl that constitutes an optical system, and a main body Nb that supports the lens unit Nl.
  • the lens unit Nl of the component camera 50 includes a fixed lens 51, a liquid lens 52 (corresponding to the “variable focus lens” of the present invention), a protective glass 53, and the like.
  • the main body portion Nb of the component camera 50 includes an image sensor 54, a CPU (not shown), various memories, and the like.
  • the fixed lens 51 and the liquid lens 52 are arranged so as to be coaxial with the optical axis of the image sensor 54.
  • the fixed lens 61 is an objective lens set to a predetermined focal length.
  • the liquid lens 52 is a variable focus lens capable of changing the focal length according to the applied voltage.
  • a liquid lens in which a plurality of different fluids are arranged between two electrodes is employed as the variable focus lens.
  • the liquid lens 52 forms a lens surface, for example, at the boundary surface between the aqueous solution and the oil.
  • the aqueous solution and the oil flow to deform the boundary surface into a curved surface and act as a lens.
  • the liquid lens 52 has a smaller curvature of the lens surface and a shorter focal length as the applied voltage to the electrode increases. Therefore, the focal length of the liquid lens 52 can be controlled by controlling the voltage applied to the liquid lens 52.
  • the protective glass 53 is disposed between the object to be imaged (electronic component) and the liquid lens 52 at the outermost part of the lens unit Nl, and prevents foreign matter from entering the inside of the unit.
  • the protective glass 53 is a transmissive member that can transmit incident light from the object to be imaged to the component camera 50, and is formed of a glass material in the present embodiment.
  • the protective glass 53 is fixed so as to have a specified distance Ls from the image sensor 54 by connecting the lens unit Nl to the main body Nb.
  • the protective glass 53 is provided with a standard mark Ms (corresponding to the “standard point” of the present invention).
  • the standard mark Ms is used for calculating a correction voltage ⁇ Vr, which will be described later.
  • the standard mark Ms is configured by arranging four line segments at equal intervals, and is an outer peripheral edge at a predetermined phase of the protective glass 53 and is attached to the inner surface of the protective glass 53. .
  • the standard mark Ms is positioned outside the main range of the camera field of view Fv so that the electronic camera does not interfere with the imaging of the electronic component when the electronic component is to be imaged by the component camera 50 as the original purpose. It is configured.
  • the imaging element 54 is a CCD, a CMOS, or the like as described above, and is arranged in the main body portion Nb of the component camera 50 so that the optical axis of the lens unit Nl is orthogonal to the imaging surface.
  • the image sensor 54 converts the light transmitted through the protective glass 53, the fixed lens 51, and the liquid lens 52 into an electrical signal that is generated according to the intensity of the light imaged on the imaging surface.
  • the CPU of the main body portion Nb of the component camera 50 includes an imaging control unit 55, a focus control unit 56, and a correction voltage calculation unit 57.
  • the imaging control unit 55 applies a predetermined voltage to the liquid lens 52 based on a control signal input from the outside, a set value stored in the memory, and the like, and converts the electrical signal converted by the imaging element 54 into a digital signal. The object is imaged by converting to. Then, the imaging control unit 55 transfers the image data acquired by imaging to the control device 70.
  • the imaging process by the imaging control unit 55 will be described in the mounting process of the component mounter 1 described later.
  • the focus control unit 56 uses the standard mark Ms as an object to be imaged, adjusts the voltage applied to the liquid lens 52 based on the electrical signal from the image sensor 54, and focuses the liquid lens 52. Specifically, the focus control unit 56 performs image processing on the digital signal converted by the imaging control unit 55 and determines whether or not the lens unit Nl including the liquid lens 52 is in focus. Then, when the lens unit Nl is not in focus, the focus control unit 56 adjusts the applied voltage, which is a control value for the operation control of the liquid lens 52, to vary the focal length of the liquid lens 52. Focus.
  • the focus control unit 56 employs a contrast detection method in the above image processing. That is, the focus control unit 56 determines whether or not the image is in focus based on the contrast value calculated for the predetermined area in the image data. Further, as shown in FIG. 4, the focus control unit 56 sets a partial region including the standard mark Ms in the imaging region (that is, the camera field of view Fv) that can be captured by the component camera 50 as the effective region Ff. The focus control unit 56 adjusts the voltage applied to the liquid lens 52 based on the electrical signal of the imaging element 54 for the effective region Ff when the liquid lens 52 is focused on the standard mark Ms. .
  • the correction voltage calculation unit 57 calculates the correction voltage ⁇ Vr required for generating the target voltage that the imaging control unit 55 applies to the liquid lens 52 during imaging. This correction voltage ⁇ Vr is used for correcting the operation of the liquid lens 52, which is a variable focus lens, in consideration of the influence of the imaging environment such as the ambient temperature.
  • the correction voltage calculation unit 57 calculates the correction voltage ⁇ Vr based on the lens characteristics and the applied voltage when actual focusing is performed.
  • the lens characteristics indicate the relationship between the voltage applied to the liquid lens 52 and the focal length.
  • the focal length of the liquid lens 52 has a correlation with the focal length of the entire lens unit Nl including the liquid lens 52 and the distance from the component camera 50 to the object to be imaged. Therefore, as the lens characteristics, the relationship between the voltage applied to the liquid lens 52 and the distance between the object-part camera 50 and the relationship between the applied voltage and the focal length may be indirectly indicated. Good.
  • the calculation process of the correction voltage ⁇ Vr by the correction voltage calculation unit 57 will be described in the mounting process of the component mounting machine 1 described later.
  • the depth of field of the lens unit Nl is determined according to the focal length of the fixed lens 51 and the liquid lens 52, the distance to the object to be imaged, and the like.
  • the depth of field of the lens unit Nl is preferably as deep as possible from the viewpoint of acquiring sharp image data. However, if the depth of field is excessively deep, the cost may increase. Therefore, it is desirable that the depth of field of the lens unit Nl is set to an extent that does not become excessive while ensuring a range according to the application.
  • the component camera 50 is intended to image the electronic component sucked by the suction nozzle 42.
  • the distance from the component camera 50 to the electronic component that is the object can be considered to be substantially constant, although it is affected by the height of the electronic component and the position error of the operation. That is, the depth of field of the lens unit Nl depends on the focal length of the lens unit Nl by the fixed lens 51 and the liquid lens 52.
  • the component camera 50 performs the correction process of the operation of the liquid lens 52 in consideration of the influence of the imaging environment as described above. Since this correction processing is executed based on an actual measurement value (applied voltage when focusing is performed) in order to adapt to the current imaging environment, there is a possibility that the correction includes an error. However, it has been found that this correction error is generally within a predetermined range.
  • an error in the applied voltage that occurs when the focus control unit 56 performs the focusing of the liquid lens 52 a plurality of times on an object at the same distance is acquired.
  • the depth of field of the lens unit Nl including the liquid lens 52 is set to a range that allows an error in the acquired applied voltage. This prevents the depth of field of the lens unit Nl from becoming excessive and suppresses an increase in cost while ensuring sufficient performance.
  • step 11 (hereinafter, “step” is expressed as “S”)
  • suction processing S12
  • imaging process S13
  • mounting process S14
  • the control device 70 recognizes the suction state of the electronic component by each suction nozzle 42 by performing image processing on the image data acquired by the imaging process (S13).
  • the component camera 50 of the present embodiment since the component camera 50 of the present embodiment includes the liquid lens 52 that is a variable focus lens, even when the distance to the object to be imaged varies, it is possible to perform focusing each time. It has become a structure. However, focusing of the component camera 50 requires a certain amount of time because image processing such as a contrast detection method and adjustment processing of applied voltage are executed as described above. On the other hand, in the imaging process (S13), for the purpose of shortening the cycle time in the mounting control of the electronic components, the focusing by the image process is omitted for the imaging target.
  • a predetermined voltage corresponding to the distance is obtained.
  • a method is adopted in which focusing is performed by applying.
  • the imaging process (S13) the adjustment process of the applied voltage based on the image process is not required, so that the process can be made more efficient.
  • this method unless the influence of the operation of the liquid lens 52 due to the imaging environment is taken into consideration, there is a possibility that the lens unit Nl is not focused on the object to be imaged even if a predetermined voltage is applied.
  • the correction voltage ⁇ Vr is calculated prior to the imaging process (S13) in order to perform imaging suitable for the current imaging environment in the preparation process (S11). Then, by using this correction voltage ⁇ Vr, the focal length of the lens unit Nl is changed to increase the focusing speed and prevent defocusing.
  • the calculation of the correction voltage ⁇ Vr is appropriately performed, for example, when the component mounting machine 1 is turned on or when the production process is shifted.
  • the focus control unit 56 adjusts the voltage applied to the liquid lens 52 that can change the focal length, thereby bringing the lens unit Nl as a whole into a state in which the standard mark Ms is focused. At this time, the focus control unit 56 performs image processing on the effective region Ff including the standard mark Ms in the camera field of view Fv, and adjusts the applied voltage based on the processing result. In this way, the focus control unit 56 excludes the outside of the effective area Ff from being subject to image processing, and aims to speed up the focusing on the effective area Ff and reduce the processing load.
  • the current applied voltage Vc to the liquid lens 52 when the focus control unit 56 performs focusing of the lens unit Nl including the liquid lens 52 using the standard mark Ms as an imaging target is acquired (S112). .
  • This “current applied voltage Vc” is applied to the liquid lens 52 when focusing on the standard mark Ms at a specified distance Ls from the image sensor 54 in the current imaging environment including the ambient temperature and the like. Voltage. That is, the current applied voltage Vc is a voltage adapted to the current imaging environment.
  • the correction voltage calculation unit 57 sets the standard point to the liquid lens 52 based on the prescribed lens characteristic LCp indicating the relationship between the applied voltage to the liquid lens 52 and the focal length with the standard point as an imaging target.
  • the applied voltage Vb is calculated (S113).
  • the prescribed lens characteristic LCp is shown as a solid line in FIG. 7, and is generated based on an actual measurement value in a standard imaging environment, for example, and stored in advance in the memory of the component camera 50.
  • the focal length LFs of the liquid lens 52 corresponds to a prescribed distance Ls to the standard mark Ms. That is, when the liquid lens 52 is applied with a predetermined voltage to reach the focal length LFs, the lens unit Nl is in focus on the standard mark Ms at the specified distance Ls.
  • the correction voltage calculation unit 57 calculates the difference (Vc ⁇ Vb) between the current application voltage Vc acquired in S112 and the standard application voltage Vb calculated in S113 as the correction voltage ⁇ Vr (S114).
  • the liquid lens 52 has a focal length LFs corresponding to the specified distance Ls, which requires a standard applied voltage Vb in a standard imaging environment, and is present in the current imaging environment. The applied voltage Vc is required.
  • the liquid lens 52 requires adjustment of the applied voltage when the imaging environment including the ambient temperature changes, but it has been found that the amount of adjustment is the same at any focal length. That is, the current lens characteristic is in a state where the specified lens characteristic LCp is shifted by the correction voltage ⁇ Vr, as indicated by the broken line in FIG. Therefore, the correction voltage ⁇ Vr calculated as described above can be said to be a correction amount adapted to the current imaging environment at any focal length in the specified lens characteristic LCp.
  • the imaging control unit 55 of the component camera 50 first calculates the basic voltage Vx based on the distance to the target object and the specified lens characteristic LCp, with the electronic component sucked by the suction nozzle 42 as the target of imaging (see FIG. S131).
  • the “distance to the object” corresponds to the distance from the image sensor 54 to the tip of the suction nozzle 42 and is recognized in advance based on the installation position and dimensions of the component mounting head 40 and the component camera 50. Yes.
  • the calculated basic voltage Vx means that the liquid lens 52 has a focal length LFx1 when the voltage of the liquid lens 52 is applied in a standard imaging environment, and the electronic component sucked by the suction nozzle 42 has a lens. This is the voltage at which the unit Nl is in focus.
  • the basic voltage Vx is applied to the liquid lens 52, the lens unit Nl is not in focus on the electronic component.
  • the imaging control unit 55 adds the correction voltage ⁇ Vr calculated in advance in S114 to the basic voltage Vx calculated in S131 (Vx + ⁇ Vr) to calculate the target voltage Vt1 (S132). Further, the imaging control unit 55 acquires the dimension information of the electronic component included in the control program in order to prevent the defocusing more reliably, and when imaging the electronic component as a target object, the component camera in the electronic component Based on the length in the optical axis direction of 50, the target voltage Vt1 is corrected.
  • the imaging control unit 55 first acquires, for example, a part number as dimension information of the electronic part included in the control program. Then, the imaging control unit 55 acquires the dimension Hp in the optical axis direction (Z-axis direction) of the component camera 50 from the component table in which the dimension of the electronic component is recorded corresponding to the component number. Subsequently, the imaging control unit 55 calculates, as the adjustment voltage ⁇ Vf, the amount of change in the voltage applied to the liquid lens 52 when the focal length of the lens unit Nl is shortened by the dimension Hp based on the specified lens characteristic LCp. (S133).
  • the imaging control unit 55 adds the adjustment voltage ⁇ Vf calculated in S133 to the target voltage Vt1 calculated in S132 (Vt1 + ⁇ Vf), and calculates the corrected target voltage Vt2 (S134).
  • the corrected target voltage Vt2 is applied to the liquid lens 52, the liquid lens 52 becomes the focal length LFx2, and in the current imaging environment, the focal point of the lens unit Nl is applied to the lower surface of the electronic component sucked by the suction nozzle 42. It will be in the right state.
  • the imaging control unit 55 performs imaging in a range that falls within the camera field of view Fv in this state (S135). Thereafter, the image data acquired by the component camera 50 by imaging is sent to the control device 70, and the imaging process is terminated.
  • the correction voltage ⁇ Vr is used to calculate the corrected target voltage Vt2, and the current applied voltage Vc is used to calculate the correction voltage ⁇ Vr. Then, since the current applied voltage Vc is acquired by adjusting the applied voltage based on image processing, an error in a predetermined range may occur in the correction voltage ⁇ Vr.
  • the depth of field of the lens unit Nl of the component camera 50 is set to a range that allows an error in the target voltage Vt2 including the correction voltage ⁇ Vr.
  • the depth of field of the lens unit Nl It allows for errors and makes it possible to focus on the object.
  • the imaging control unit 55 does not perform an applied voltage adjustment process based on image processing when imaging an imaging target (electronic component).
  • the lens unit Nl can be focused on the object.
  • the component camera 50 can improve the efficiency of the imaging process.
  • the target voltage Vt2 applied to the liquid lens 52 includes a correction voltage ⁇ Vr that reflects the current imaging environment. Thereby, even when the imaging environment such as the ambient temperature changes, a voltage adapted to the imaging environment can be applied to the liquid lens 52. Therefore, it is possible to reliably focus on the object to be imaged according to the imaging environment.
  • the correction voltage calculation unit 57 calculates the correction voltage ⁇ Vr reflecting the imaging environment by using a predetermined lens characteristic LCp stored in advance, so that the correction voltage is obtained by performing focusing based on image processing at least once. ⁇ Vr can be calculated. Further, unlike the conventional temperature correction, it is surely adapted to the current imaging environment, so that the correction accuracy is high, and since no temperature sensor is required, an increase in manufacturing cost can be prevented.
  • the standard point (standard mark Ms) arranged at the specified distance Ls from the image sensor is configured to be attached to the protective glass 53 that can transmit the incident light to the lens unit Nl.
  • the standard mark Ms can be integrated as the component camera 50, and therefore, when the component camera 50 is installed in the component mounter 1 or the like, it is not necessary to adjust the distance from the image sensor 54 to the standard mark Ms. Therefore, the installation of the component camera 50 can be facilitated. Therefore, the prescribed distance Ls can be reliably maintained between the image sensor 54 and the standard mark Ms.
  • the focus control unit 56 When focusing on the standard mark Ms to the lens unit Nl (S111), the focus control unit 56 performs image processing on the effective area Ff including the standard mark Ms in the camera field of view Fv, and based on the processing result. The applied voltage is adjusted. As a result, the focus control unit 56 can exclude the outside of the effective area Ff from being subject to image processing, speed up the effective area Ff focusing, and reduce the focusing processing load.
  • the depth of field of the lens unit Nl of the component camera 50 is set to a range that allows an error of the target voltage Vt2 including the correction voltage ⁇ Vr.
  • the depth of field of the lens unit Nl It can tolerate errors and focus on the object. Therefore, the component camera 50 can more reliably prevent the focus from deviating while adapting to the current imaging environment in the imaging process (S13).
  • the outer dimensions of the lens unit Nl can be set relatively small.
  • the component camera 50 is configured to employ the liquid lens 52 as the variable focus lens.
  • the variable focus lens a liquid lens and a liquid crystal lens can be considered.
  • the liquid lens can reduce the manufacturing cost as compared with the liquid crystal lens, but is easily affected by the imaging environment such as the ambient temperature. Therefore, by applying the present invention to a configuration in which a liquid lens is adopted as the variable focus lens, it is possible to perform imaging suitable for the imaging environment while receiving the advantage of reducing the manufacturing cost by the liquid lens.
  • the production facility is a component mounter 1 that forms a production line for circuit board products and mounts electronic components on the circuit board.
  • a component mounter 1 is desired to be miniaturized in a target product and to be highly accurate in production processing, and application of the component camera 50 having the above-described configuration to the component mounter 1 is particularly useful.
  • the component mounter 1 includes the component camera 50 having the above-described configuration.
  • the component mounter 1 can obtain image data from the component camera 50 that performs imaging in accordance with the current imaging environment, so that sharp image data with no defocusing can be obtained at high speed. Therefore, the control device 70 can perform highly accurate processing using sharp image data in the image processing for recognizing the suction state of the electronic component. Therefore, it is possible to improve the mounting control accuracy of the component mounting machine 1.
  • the imaging control unit 55 is configured to acquire the dimension information of the electronic component included in the control program and further correct the target voltage Vt1 based on the information (S133, S134).
  • the component camera 50 generally recognizes the distance to the object to be imaged.
  • the distance to the image sensor 54 changes by the amount of change. That is, even if the electronic component is sucked by the same suction nozzle 42, the focal length may be adjusted due to the difference in the dimensions of the electronic component.
  • the focal point of the lens unit Nl is more focused on the object. It can be adjusted reliably.
  • ⁇ Second embodiment> A component mounter and an imaging apparatus according to the second embodiment will be described with reference to FIGS.
  • the configuration of the second embodiment is mainly different from the first embodiment in the target voltage calculation method. Since other common configurations are substantially the same as those in the first embodiment, detailed description thereof is omitted. Only the differences will be described below.
  • the CPU of the main body Nb of the component camera 150 includes an imaging control unit 155, a focus control unit 156, and a lens characteristic setting unit 158.
  • the imaging control unit 155 corresponds to the imaging control unit 55 in the component camera 50 of the first embodiment. Details of the imaging process by the imaging control unit 155 will be described later.
  • the focus control unit 156 adjusts the voltage applied to the liquid lens 52 based on the electrical signal of the image sensor 54 with each of a plurality of standard points provided at different prescribed distances from the image sensor 54 as objects to be imaged.
  • the liquid lens 52 is focused for each of the plurality of standard points.
  • the “plurality of standard points” refers to two or more standard marks arranged at different positions in the optical axis direction of the lens unit Nl. Therefore, the plurality of standard points may be applied to the component mounting head 40 or the like in addition to the protective glass 53 as in the first embodiment.
  • the lens characteristic setting unit 158 sets the current lens characteristic necessary for calculating the target voltage applied to the liquid lens 52 when the imaging control unit 155 performs imaging. This current lens characteristic is used to correct the operation of the liquid lens 52, which is a variable focus lens, in consideration of the influence of the imaging environment such as the ambient temperature.
  • the lens characteristic setting unit 158 sets the current lens characteristic based on each of the current applied voltages when focusing is actually performed on a plurality of standard points.
  • the current lens characteristic setting processing by the lens characteristic setting unit 158 will be described with reference to FIGS.
  • the current lens characteristic LCc is set as appropriate prior to the imaging process (S13 in FIG. 5), such as a preparation process (S11 in FIG. 5) in the electronic component mounting process, for example, as in the first embodiment. .
  • the focus control unit 156 of the component camera 150 performs focusing of the lens unit Nl using the standard points Ps1 to Ps3 attached to the protective glass 53 and the like as objects to be imaged (S211).
  • the lens characteristic setting unit 158 acquires current applied voltages Vc1 to Vc3 to the liquid lens 52 when the focus control unit 156 performs focusing on the plurality of standard points Ps1 to Ps3 in S211 (S212). ). Then, the lens characteristic setting unit 158 sets the current lens characteristic LCc indicating the relationship between the applied voltage to the liquid lens 52 and the focal length based on each of the current applied voltages Vc1 to Vc3 (S213).
  • the current setting method of the lens characteristic LCc is to set two straight lines passing through each point on the focal length-applied voltage plane using two kinds of applied voltages when focusing on two standard points. Also good.
  • three types of applied voltages Vc1 to Vc3 when focusing is performed on the three standard points Ps1 to Ps3 are set as straight lines approximating each point on the focal length-applied voltage plane. The method to be adopted is adopted.
  • the lens characteristic setting unit 158 first calculates the focal length LFs1 of the liquid lens 52 based on the fact that the lens unit Nl is focused on a specified distance to the standard point Ps1. . Similarly, the focal lengths LFs2 and LFs3 of the liquid lens 52 are calculated for the standard points Ps2 and Ps3. Then, as shown by the solid line in FIG. 11, the lens characteristic setting unit 158 approximates the three applied voltages Vc1 to Vc3 with respect to the focal lengths LFs1 to LFs3 on the focal length-applied voltage plane by the least square method or the like. A straight line is set as the current lens characteristic LCc.
  • the imaging control unit 155 calculates a target voltage calculated based on the distance to the object and the current lens characteristic LCc when imaging the object. Then, the imaging control unit 155 applies the target voltage to the liquid lens 52 so that the lens unit Nl is focused on the object. Then, the imaging control unit 155 performs imaging in a range that falls within the camera field of view Fv in this state. Thereafter, the image data acquired by the component camera 150 by imaging is sent to the control device 70, and the imaging process is terminated.
  • the imaging control unit 155 may be configured to further correct the target voltage with the adjustment voltage ⁇ Vf, as in the first embodiment.
  • the target voltage applied to the liquid lens 52 is set based on the current lens characteristics LCc. Therefore, even when the imaging environment such as the ambient temperature changes, a voltage adapted to the imaging environment can be applied to the liquid lens 52. Therefore, it is possible to reliably focus on the object to be imaged according to the imaging environment.
  • the lens characteristic setting unit 158 is configured to set the current lens characteristic LCc reflecting the imaging environment using the result of actual focusing on the three standard points Ps1 to Ps3. Thereby, the lens characteristic setting unit 158 can set the current lens characteristic LCc adapted to the current imaging environment with higher accuracy. Further, unlike the conventional temperature correction, it is surely adapted to the current imaging environment, so that the correction accuracy is high, and since no temperature sensor is required, an increase in manufacturing cost can be prevented.
  • the lens characteristic setting unit 158 is based on each of the current applied voltages Vc1 to Vc3 to the liquid lens 52 when the focus control unit 156 performs focusing on the plurality of standard points Ps1 to Ps3.
  • the current lens characteristic LCc is set.
  • the lens characteristic setting unit 158 may be configured to set the current lens characteristic LCc based on the rate of change in focal length with respect to the voltage applied to the variable focus lens stored in advance.
  • the lens characteristic indicating the relationship between the applied voltage to the variable focus lens and the focal length has a linear change rate as shown in FIG.
  • the lens characteristics change so as to move in parallel on the focal length-applied voltage plane as the imaging environment changes. That is, it has been found that the inclinations A1 and A2 of the lens characteristics before and after the change in the imaging environment are substantially equal. Therefore, the rate of change corresponding to the inclination of this lens characteristic is stored in advance in the memory.
  • the lens characteristic setting unit 158 can set the current lens characteristic LCc based on, for example, the applied voltage when focusing is performed on only one standard point and the rate of change of the lens characteristic.
  • the lens characteristic setting unit 158 can set the current lens characteristic LCc when the focus control unit 156 performs actual focusing at least once. Therefore, the component camera 50 can shorten the time required for the preparation process for setting the current lens characteristic LCc. Moreover, also in such a structure, there exists the same effect by the structure similar to 2nd embodiment.
  • the correction voltage ⁇ Vr is calculated in the first embodiment, and the current lens characteristic LCc is set in the second embodiment.
  • the correction voltage ⁇ Vr and the current lens characteristic LCc are appropriately performed when the component mounting machine 1 is turned on or when the production process is shifted, such as a preparation process (S11) in the electronic component mounting process.
  • the imaging environment includes ambient temperature and the like, it is conceivable that the imaging environment also changes with the passage of time. Then, even if the preparation process (S11) is adapted to the imaging environment at that time, the focus of the lens unit Nl may be shifted in the imaging process depending on the magnitude of the change in the imaging environment. Therefore, it is necessary to appropriately update the correction voltage ⁇ Vr and the current lens characteristic LCc in order to follow changes in the imaging environment.
  • the timing for updating the correction voltage ⁇ Vr and the like may be automatically performed when a predetermined time has elapsed since the previous calculation.
  • the imaging control units 55 and 155 respectively capture the same object at different times, and compare a plurality of frequency components constituting the spatial frequency of each image data obtained by imaging, thereby correcting the correction voltage ⁇ Vr and the current voltage. It may be determined whether or not the lens characteristic LCc needs to be updated.
  • the imaging control units 55 and 155 first perform frequency analysis on the image data acquired in the imaging process (S13) after shifting from the preparation process (S11) to the electronic component mounting control.
  • this frequency analysis for example, a frequency having a maximum luminance value is recorded among a plurality of frequency components constituting the spatial frequency of the image data.
  • the plurality of frequency components can be acquired from the intermediate data when the discrete cosine transform of the compression process is performed. .
  • the imaging control parts 55 and 155 acquire the frequency from which a luminance value becomes the maximum among several frequency components for every imaging process.
  • the imaging control units 55 and 155 compare the stored initial frequency with the frequency acquired each time the imaging process is performed. If these frequencies match, it is determined that the correction voltage ⁇ Vr or the like need not be updated, and if these frequencies do not match, it is determined that the correction voltage ⁇ Vr or the like needs to be updated.
  • a liquid crystal lens may be employed in addition to the liquid lens exemplified in the first and second embodiments.
  • the component camera 50 used for the component mounting machine 1 was illustrated and demonstrated as an imaging device.
  • the imaging device may be the board camera 60 of the component mounter 1.
  • the object to be imaged is the circuit board B and can be used for recognition of the cream solder printing state, the electronic component mounting state, the component supply state by the component supply device 20, etc., and these are reflected in the mounting control.
  • the accuracy of mounting control can be improved.
  • the imaging device applies a predetermined voltage to the variable focus lens on the assumption that the approximate distance from the imaging element 54 to the object to be imaged is recognized in advance. If it is the structure which performs focusing by doing, you may make it use as another production equipment or an imaging device single-piece
  • the imaging device can also be applied to other printing machines and inspection machines that constitute a production line for circuit board products.
  • the imaging device can also be applied to production equipment such as machine tools and general-purpose assembly machines that produce products other than circuit board products. Even in such a configuration, the same effects as in the embodiment can be obtained, and the application to a production facility where miniaturization and high accuracy of a product are desired is particularly useful.
  • an imaging control unit is added to the control device on the production facility side, assuming that a part of the control device connected to be communicable constitutes a part of the imaging device.
  • 55, 155, focus control units 56, 156, correction voltage calculation unit 57, or lens characteristic setting unit 158 may be arranged.

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Abstract

L'objet de la présente invention est de fournir les éléments suivants : un dispositif d'imagerie pouvant établir de manière fiable une mise au point sur un sujet d'imagerie en prenant en compte l'environnement d'imagerie ; et un équipement de production fourni avec ledit dispositif d'imagerie. Ce dispositif d'imagerie est muni des éléments suivants : une lentille à focale variable ; un élément d'imagerie ; une unité de commande d'imagerie qui applique, à la lentille à focale variable, une tension qui dépend de la distance au sujet ; une unité de commande de mise au point qui effectue la mise au point de la lentille à focale variable ; et une unité de calcul de tension de correction qui calcule une tension de correction. Pendant l'imagerie du sujet, l'unité de commande d'imagerie applique, à la lentille à focale variable, une tension cible qui consiste en la tension de correction ajoutée à une tension calculée sur la base de la distance au sujet et des caractéristiques prédéfinies de la lentille.
PCT/JP2013/068272 2013-07-03 2013-07-03 Dispositif d'imagerie et équipement de production WO2015001634A1 (fr)

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JP2009210705A (ja) * 2008-03-03 2009-09-17 Citizen Holdings Co Ltd 投影型表示装置
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EP3250020A4 (fr) * 2015-01-20 2018-01-03 Fuji Machine Mfg. Co., Ltd. Dispositif d'aide à l'inspection et procédé d'aide à l'inspection
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WO2023042248A1 (fr) 2021-09-14 2023-03-23 日本電気株式会社 Système de traitement d'informations, dispositif de traitement d'informations, procédé de traitement d'informations et support d'enregistrement

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