WO2014190712A1 - 阵列基板及其制作方法,显示装置 - Google Patents
阵列基板及其制作方法,显示装置 Download PDFInfo
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- WO2014190712A1 WO2014190712A1 PCT/CN2013/088826 CN2013088826W WO2014190712A1 WO 2014190712 A1 WO2014190712 A1 WO 2014190712A1 CN 2013088826 W CN2013088826 W CN 2013088826W WO 2014190712 A1 WO2014190712 A1 WO 2014190712A1
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- thin film
- film transistor
- pattern
- active layer
- array substrate
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- 239000000758 substrate Substances 0.000 title claims abstract description 85
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 239000010409 thin film Substances 0.000 claims abstract description 161
- 239000010408 film Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 42
- 125000006850 spacer group Chemical group 0.000 claims description 23
- 238000000059 patterning Methods 0.000 claims description 21
- 229910044991 metal oxide Inorganic materials 0.000 claims description 19
- 150000004706 metal oxides Chemical class 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 19
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 12
- 229920005591 polysilicon Polymers 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 230000000717 retained effect Effects 0.000 claims description 3
- 238000002425 crystallisation Methods 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005224 laser annealing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1251—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
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- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
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Definitions
- Embodiments of the present invention relate to an array substrate and a method of fabricating the same, and a display device. Background technique
- CMOS Complementary Metal Oxide Semiconductor
- PMOS Positive Channel Metal Oxide Semiconductor
- NMOS Negative channel-Metal-Oxide- Semiconductor
- the semiconductor layers of the PMOS region and the NMOS region in the CMOS circuit are generally prepared by low temperature poly-silicon (LTPS) technology.
- the array substrate is The first order includes: a substrate 101, an active layer (a PMOS active layer 102 and an NMOS active layer 102'), a gate insulating layer 103, a gate (a gate 104 of the PMOS transistor, and a gate 104' of the NMOS transistor).
- Insulating spacer layer 105 (including vias thereon), source and drain electrodes (source drain 106 of PMOS transistor and source drain 106' of NMOS transistor), passivation layer 107, flat layer 108, pixel electrode 109, and pixel The electrode defines a layer 110.
- the fabrication of the array substrate by the low-temperature polysilicon process requires more than five coating processes and 11 masks. The steps of the 11 photomasks are as follows:
- the embodiment of the invention provides a method for fabricating an array substrate, comprising the step S1: forming a pattern of an active layer of a switching thin film transistor and a corresponding pixel electrode on a substrate.
- the step S1 is performed to include: forming a metal oxide semiconductor film, patterning the metal oxide semiconductor film to form a pattern of an active layer and a pixel electrode of the switching thin film transistor.
- the step S1 is performed to: form a transparent conductive film, and pattern the transparent conductive film to form a pattern of the pixel electrode; and form a metal oxide semiconductor film, and pattern the metal oxide semiconductor film A transistor forms a pattern of an active layer of the switching thin film transistor.
- the step S1 further includes forming a pattern of the active layer that drives the thin film transistor on the same level.
- the pattern of forming an active layer of the driving thin film transistor on the same level includes forming an amorphous silicon film, and crystallizing the amorphous silicon film to form a polysilicon film; Forming a pattern of an active layer of the driving thin film transistor by a patterning process;
- the metal oxide semiconductor thin film is an IGZO, ZnO, IZO, ITZO or tantalum film.
- the method for fabricating the array substrate further includes:
- Step S2 forming a pattern of a gate insulating layer, a pattern of driving a gate of the thin film transistor, and a pattern of a gate of the switching thin film transistor on the substrate of the step S1;
- Step S3 doping the active layer of the driving thin film transistor on the substrate of the step S2;
- Step S4 forming a pattern including an insulating spacer layer, a via hole on the insulating spacer layer, and a pixel electrode recess on the base substrate completing the step S3, wherein the pixel electrode recess exposes a portion of the pixel electrode pattern ;
- Step S5 forming a pattern including a source and a drain of the driving thin film transistor, and a pattern of a source and a drain of the switching thin film transistor on the substrate of the step S4, and connecting the drain of the driving thin film transistor to the pixel electrode;
- Step S6 forming a pattern including the pixel electrode defining layer on the base substrate on which the step S5 is completed.
- the step S2 includes:
- Forming a first metal thin film on the gate insulating layer, and patterning the first metal thin film to form the driving thin film transistor respectively in a region corresponding to an active layer pattern of the driving thin film transistor and an active layer pattern of the switching thin film transistor The pattern of the gate and the pattern of the gate of the switching thin film transistor.
- the step S3 includes:
- Coating the photoresist exposing and developing the photoresist through the mask, leaving the active layer pattern region of the switching thin film transistor and the photoresist of the pixel electrode pattern region, and developing the active layer pattern of the driving thin film transistor a photoresist of the region exposing an active layer pattern of the driving thin film transistor; and doping the active layer of the driving thin film transistor, and stripping the remaining photoresist after the doping is completed.
- the step S4 includes: forming a second insulating film as the insulating spacer layer; and forming an active layer pattern that passes through the insulating spacer layer and the gate insulating layer to the driving thin film transistor by a patterning process a via hole and a second via hole, a third via hole and a fourth via hole passing through the insulating spacer layer and the gate insulating layer to the active layer pattern of the switching transistor device, and through the insulating spacer layer and a gate insulating layer reaching a pixel electrode recess of the pattern of the pixel electrode, wherein the first via and the second via correspond to a source and drain region of a driving thin film transistor to be formed; the third via And the fourth via corresponds to the source and drain regions of the switching thin film transistor to be formed.
- the step S5 includes: forming a second metal thin film, patterning the second metal thin film to form a pattern of a source and a drain of the driving thin film transistor, and patterning a source and a drain of the switching thin film transistor, And connecting the drain of the driving thin film transistor to the pixel electrode.
- the step S6 includes: forming a third insulating film, patterning the third insulating film such that only a portion of the pixel electrode pattern underneath is retained to form a pattern of the pixel electrode defining layer.
- Another embodiment of the present invention provides an array substrate, including: a driving thin film transistor, a switching thin film transistor, and a pixel electrode on a substrate, wherein a drain of the switching thin film transistor is connected to the driving A source of the thin film transistor, a drain of the driving thin film transistor is connected to the pixel electrode, wherein the pixel electrode and the active layer of the switching thin film transistor are both at the same level.
- the active layer of the driving thin film transistor is located at the same level.
- the driving thin film transistor is a polysilicon thin film transistor.
- the switching thin film transistor is a metal oxide thin film transistor.
- the pixel electrode is made of the same material as the active layer of the switching thin film transistor.
- a further embodiment of the invention provides a display device comprising the array substrate of any of the above.
- FIG. 1 is a schematic structural view of an array substrate in the prior art
- FIG. 2 is a schematic structural view showing an active layer of a driving thin film transistor formed on a base substrate in an array substrate manufacturing method according to an embodiment of the present invention
- FIG. 3 is a schematic structural diagram of forming an active layer of a driving thin film transistor, an active layer of a switching thin film transistor, and a pixel electrode pattern on a substrate substrate in the method for fabricating an array substrate according to an embodiment of the present invention
- FIG. 4 is a schematic diagram of an embodiment of the present invention. A schematic structural view of forming a gate insulating layer and a gate pattern on a substrate in an array substrate manufacturing method;
- FIG. 5 is a schematic diagram of doping an active layer of a driving thin film transistor in an array substrate manufacturing method according to an embodiment of the present invention
- FIG. 6 is a schematic structural view showing a pattern of forming an insulating spacer layer, a via hole, and a pixel electrode recess on a base substrate in the method for fabricating an array substrate according to an embodiment of the invention
- FIG. 7 is a schematic structural view showing a pattern of forming a source and a drain of a driving thin film transistor and a source and a drain of a switching thin film transistor on a substrate in the method of fabricating an array substrate according to an embodiment of the present invention
- FIG. 8 is a schematic structural view of an array substrate fabricated by the method for fabricating an array substrate according to an embodiment of the present invention. detailed description
- One of the technical problems to be solved by the embodiments of the present invention is how to form an array substrate in a single-sheet process.
- the method of fabricating the array substrate according to the embodiment of the present invention includes, for example, the following steps S1 to S6.
- Step S1 forming an active layer including a driving thin film transistor on the same level on the base substrate 201
- a pattern of an active layer and a pixel electrode of a switching thin film transistor is a pattern of an active layer and a pixel electrode of a switching thin film transistor.
- This step S1 is performed, for example, as follows: As shown in Fig. 2, an amorphous silicon (a-Si) film is formed on the base substrate 201 and the a-Si film is crystallized to form a polysilicon film.
- the amorphous silicon film can be formed by various methods such as deposition, coating, sputtering, and the like.
- the crystallization process may be carried out by using u-crystallization, laser annealing, metal induced crystallization (MIC), metal induced lateral crystallization or continuous granular silicon.
- a pattern of the active layer 202 of the driving thin film transistor is formed by a patterning process on the polysilicon film.
- the patterning process includes, for example, a process of photoresist coating, exposure, development, etching, photoresist stripping, and the like.
- the driving thin film transistor active layer 202 thus formed is a polysilicon material.
- the drive film transistor can be a PMOS transistor.
- the active layer 203 and the corresponding pixel electrode 204 of the corresponding switching thin film transistor are next formed at the same level of the active layer 202 of the driving thin film transistor.
- the active layer 203 and the pixel electrode 204 forming the thin film transistor can be formed in two ways:
- Method 1 A transparent conductive film is formed, and a pattern of the pixel electrode 204 is formed by a patterning process.
- a metal oxide semiconductor thin film is formed, a pattern of the active layer 203 of the switching thin film transistor is formed by a patterning process, and the active layer 202 of the driving thin film transistor, the active layer 203 of the switching thin film transistor, and the pixel electrode 204 are located at the same level.
- Method 2 forming a metal oxide semiconductor film (for example, IGZO, ZnO, IZO, ITZO, and germanium film), forming a pattern of the active layer 203 and the pixel electrode 204 of the switching thin film transistor by a patterning process, that is, the pixel electrode 204 and the switching film
- the active layer 203 of the transistor is made of the same material Material production.
- the active layer 202 of the driving thin film transistor, the active layer 203 of the switching thin film transistor, and the pixel electrode 204 are located at the same level.
- Mode 2 can reduce the use of Mask once compared to Mode 1, which saves the process.
- the switching thin film transistor can be an NMOS transistor.
- Step S2 As shown in Fig. 4, a pattern including a gate insulating layer 205, a gate electrode 206 for driving the thin film transistor, and a gate 207 of the switching thin film transistor is formed on the base substrate shown in Fig. 3.
- This step S2 can be performed, for example, as follows:
- a gate insulating film is formed as the gate insulating layer 205. Forming a gate metal film on the gate insulating layer 205, and forming a gate electrode 206 and a switching thin film transistor of the driving thin film transistor in a region corresponding to the active layer 202 pattern of the driving thin film transistor and the active layer 203 pattern of the switching thin film transistor by a patterning process, respectively The pattern of the gate 207.
- Step S3 Doping the active layer 202 of the driving thin film transistor shown in FIG. This step S3 is performed, for example, as follows:
- the photoresist 300 is coated, the photoresist 300 is exposed and developed through the mask, the pattern region of the active layer 203 of the switching thin film transistor and the photoresist region 300 of the pattern region of the pixel electrode 204 are retained, and the driving thin film transistor is developed.
- the photoresist 300 of the pattern region of the active layer 202 exposes a pattern of the active layer 202 of the driving thin film transistor.
- the photoresist 300 is used to block the active layer 203 pattern region of the switching thin film transistor and the pattern region of the pixel electrode 204, and the gate 206 above the active layer 202 blocks a portion of the active layer 202.
- the region is doped to the region of the active layer 202 that drives the thin film transistor that is not blocked by the gate 206.
- the remaining photoresist 300 is stripped after the doping is completed.
- An active layer 202 of the doped driving thin film transistor is formed.
- the driving thin film transistor is, for example, a PMOS transistor.
- the above doping process is, for example, a P+ doping process.
- Step S4 forming a pattern including an insulating spacer layer 208, a via hole on the insulating spacer layer 208, and a pixel electrode recess 800, and the pixel electrode recess 800 exposes a portion of the pattern of the pixel electrode 204.
- the substrate after the completion of the processing in this step is as shown in FIG. 6.
- Step S4 is performed, for example, as follows: An insulating film is formed as an insulating spacer layer 208 on the substrate shown in FIG. 5.
- a third via 600 that passes through the insulating spacer layer 208 and the gate insulating layer 205 to the pattern of the active layer 203 of the switching thin film transistor should be formed in a region of the source of the switching thin film transistor to be formed; corresponding to the switch to be formed
- a drain-connected region of the thin film transistor forms a fourth via 700 through the insulating spacer layer 208 and the gate insulating layer 205 to reach a pattern of the active layer 203 of the switching thin film transistor; in a region corresponding to
- Step S5 forming a pattern of the source 209, the drain 209' of the driving thin film transistor, and a pattern of the source 210 and the drain 210' of the switching thin film transistor.
- the drain 209' of the driving thin film transistor is connected, for example, to the pixel electrode 204, and the drain of the switching thin film transistor is connected, for example, to the source of the driving thin film transistor.
- a source/drain metal film is formed, and a pattern of the source 209 and the drain 209' of the driving thin film transistor, and a pattern of the source 210 and the drain 210' of the switching thin film transistor are formed by a patterning process, and driven.
- a drain electrode 209' of the thin film transistor is formed to be connected to the pixel electrode 204.
- Step S6 forming a pattern including the pixel electrode defining layer 211.
- This step is performed, for example, as an insulating film forming a resin material, and as shown in FIG. 8, a pattern of the pixel electrode defining layer 211 is formed by a patterning process so as to cover the pattern area A of the pixel electrode 204 except the exposed above the substrate substrate. All other areas except.
- the exposed pixel electrode 204 can serve as the anode of the subsequently formed OLED.
- the pixel electrode is formed at the same level as the active layer of the driving thin film crystal and the switching thin film transistor, thereby reducing the number of mask processes required, for example, only 8 times.
- Mask process the pixel electrode can be made of the same material as the active layer of the switching thin film transistor and can be simultaneously fabricated, which can further reduce the number of mask processes required, for example, only 7 mask processes are required. This reduces the Mask process in the manufacturing process, saving process and manufacturing costs.
- the present application employs an oxide thin film transistor for switching a thin film transistor without using low-temperature polysilicon technology, the Tact Time can be reduced during crystallization, and the life of the laser tube can be prolonged. It has the effect of reducing manufacturing costs.
- a gate drive shift register (GOA), and a thin film transistor in a peripheral region can utilize low temperature polysilicon (LTPS).
- LTPS low temperature polysilicon
- the driving thin film transistor formed by the LTPS process exists only in the peripheral region. Therefore, the laser annealing process used to prepare the driving thin film transistor only needs to crystallize the gate drive shift register (GOA) region and the peripheral region instead of the entire region of the array substrate, thereby reducing crystallization.
- the process tact time can extend the life of the laser tube, thereby reducing the manufacturing cost.
- An embodiment of the present invention further provides an array substrate fabricated by the above method.
- the bottom to top includes: a substrate 201, a driving thin film transistor active layer 202, a switching thin film transistor active layer 203, and a pixel electrode. 204, a gate insulating layer 205, a gate (a gate 206 of the driving thin film transistor and a gate 207 of the switching thin film transistor), an insulating spacer layer 208 (including a via hole thereon), and a source/drain electrode (a source of the driving thin film transistor) 209, the drain 209' and the source 210 of the switching thin film transistor, the drain 210') and the pixel electrode defining layer 211.
- the drain 210' of the switching thin film transistor is connected to the source 209 of the driving thin film transistor, and the drain 209' of the driving thin film transistor is connected to the pixel electrode 204.
- the pixel electrode 204 is located in the same layer as the active layer 202 of the driving thin film transistor and the active layer 203 of the switching thin film transistor.
- the driving thin film transistor is, for example, an LTPS thin film transistor
- the switching thin film transistor is, for example, an oxide thin film transistor.
- the pixel electrode 204 and the active layer of the oxide thin film transistor are made of, for example, the same material.
- An embodiment of the present invention also provides a display device comprising the array substrate of any of the above.
- An example of the display device is a liquid crystal display device in which a TFT array substrate and an opposite substrate are opposed to each other to form a liquid crystal cell in which a liquid crystal material is filled.
- the opposite substrate is, for example, a color filter substrate.
- the pixel electrode of each pixel unit of the TFT array substrate is used to apply an electric field to control the degree of rotation of the liquid crystal material to perform a display operation.
- the liquid crystal display further includes a backlight that provides backlighting for the array substrate.
- Another example of the display device is an organic electroluminescence display device in which a TFT array is subjected to a display operation.
- the display device can be, for example, an electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like, or any product or component having a display function.
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
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Abstract
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CN2013102066140A CN103295962A (zh) | 2013-05-29 | 2013-05-29 | 阵列基板及其制作方法,显示装置 |
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US11107870B2 (en) | 2014-08-29 | 2021-08-31 | Lg Display Co., Ltd | Thin film transistor substrate having two different types of thin film transistors on the same substrate and display using the same |
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