WO2014190578A1 - 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法 - Google Patents

涂布喷头、具有该涂布喷头的涂布装置及其涂布方法 Download PDF

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Publication number
WO2014190578A1
WO2014190578A1 PCT/CN2013/078197 CN2013078197W WO2014190578A1 WO 2014190578 A1 WO2014190578 A1 WO 2014190578A1 CN 2013078197 W CN2013078197 W CN 2013078197W WO 2014190578 A1 WO2014190578 A1 WO 2014190578A1
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WIPO (PCT)
Prior art keywords
coating
nozzle
liquid
sub
half body
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/078197
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English (en)
French (fr)
Inventor
陈晖�
张志豪
王文华
林祺哲
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US13/980,937 priority Critical patent/US9375743B2/en
Publication of WO2014190578A1 publication Critical patent/WO2014190578A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1044—Apparatus or installations for supplying liquid or other fluent material to several applying apparatus or several dispensing outlets, e.g. to several extrusion nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated

Definitions

  • the present invention relates to a coating head which is coated with a photoresist or other coating liquid on the surface of a glass substrate or other object to be processed, and a coating apparatus having the coating head and a coating method therefor.
  • FIGS. 1a and 1b are perspective views of a conventional coating head.
  • the conventional coating nozzle 100 is composed of left and right half bodies 110 and 120.
  • the abutting surface 121 of the half body 120 is planar, and the photoresist input hole 190 is disposed at an intermediate position of the half body 120.
  • an accumulating groove 130 extending in the longitudinal direction is formed at an intermediate position of the half body 110, and a portion 140 above the accumulating groove 130 forms a joint surface 141 joined to the half body 120, and a portion 150 below the accumulating groove 130 is higher than the upper portion
  • the 140 is further ground and retracted, and a gap is formed between the mating face 121 of the half body 120, the gap becomes the width dimension of the slit type discharge port 160 of the coating head 100, and then, the coating head 100 is Both side ends are closed in a liquid-tight manner by the side plates 170, 180.
  • Figure 2 is a coating apparatus having a coating head shown in Figure la.
  • the coating nozzle 100 is fixed on the hanger 210, and the hanger 210 moves in the horizontal X direction through the traveling shaft 211 carried by the hanger 210, and drives the coating nozzle 100 to perform horizontal X direction. motion. While the coating nozzle 100 is moving, the liquid feeding pump 220 fixed to the hanging frame 210 extracts the photoresist into the coating nozzle 100, and the ejection port 160 of the coating nozzle 100 ejects the photoresist to be placed on the carrying platform 230. The upper glass substrate is coated.
  • the conventional coating head 100 shown in FIG. 1 has a large lateral dimension, and the photoresist input hole 190 is disposed at an intermediate position of the half body 120.
  • the coating nozzle 100 When the coating nozzle 100 is accelerated or decelerated, due to the input from the photoresist.
  • the amount of photoresist that is output to the intermediate position and the both end positions of the accumulating groove 130 is different, and the uniformity of the photoresist from the intermediate position and the both end positions of the discharge port 160 is inferior.
  • the cost of glass substrates accounts for CF glass substrates (in glass) 60% or more of the total cost of the black matrix, the three primary color sub-pixels, and the like are formed on the glass substrate. If the glass substrate is cut by a single size, it is bound to leave more blank portions that cannot be cut into the single size. In recent years, the glass substrate is cut by a multi-model glass, that is, after the large-size cutting of the glass substrate, the remaining blank portion is cut in a small size to improve the utilization of the glass substrate, as shown in FIG. A large piece of glass substrate 300 produces a 43 inch product 310, and a remaining 23 inch product 320 is produced using the remaining trim.
  • the film thickness of the photoresist coated on the entire glass substrate is the same, the photoresist film on different sizes of products must be produced when the same glass substrate is used to produce different sizes of products.
  • the thick design is the same.
  • the larger the film thickness of the photoresist on the CF glass substrate the more pure the corresponding color (the color gamut value of the CF glass substrate changes as the film thickness of the photoresist changes).
  • an increase in the film thickness of the photoresist generally causes a decrease in the light transmittance, so that the selection of the backlight module that supplies the display light source to the CF glass substrate is also affected.
  • the film thickness of the photoresist coated thereon is difficult to design the same due to differences in design of size, drive, and backlight module.
  • the film thickness of the coated photoresist is different, so the existing coating nozzle and coating method bring great inconvenience to the production design.
  • the present invention provides a coating nozzle which is formed by combining left and right halves, and a slit is formed on the abutting surface of at least one of the left and right halves.
  • a recess having a width dimension of the discharge port, and a side plate is disposed at both ends of the coating head, the side plate closing a side opening formed by the recess, and abutting surface of the half body formed with the recess is fixed
  • N barriers are provided, the N barriers separating the concave portions to separate the coating nozzle into N+1 independent sub-coating nozzles, wherein N is a positive integer.
  • the abutting faces of the half body formed with the recesses are provided with N mounting grooves, each of the blocking bodies is mounted in the corresponding mounting groove, and the connecting surface of each blocking body closely fits the opposite half of the body The abutting faces, and the bottom of each barrier body is flush with the bottom edge of the half body in which the recess is formed.
  • the N barrier bodies are integrally formed with the half body in which the recessed portion is formed.
  • Another object of the present invention is to provide a coating apparatus comprising: a carrying platform that carries a processed object; a coating head that sprays a coating liquid onto the object to be processed; a hanging frame that supports the coating head, and Driving the coating nozzle horizontally and vertically; feeding a pump, extracting the coating liquid and conveying the coating liquid to the coating nozzle; controlling the system, controlling the movement of the hanger and adjusting the liquid feeding a pumping rate of the pump; wherein the coating nozzle is formed by combining left and right halves, at least one of the left and right halves a recessed portion defining a width dimension of the slit-shaped discharge port is formed on the abutting surface of the half body, and a side plate is formed at both ends of the coating head, the side plate closing a side opening formed by the recessed portion, wherein N blocking bodies are fixed on the abutting surface of the half body on which the concave portion is formed, and the N blocking bodies separate the concave portion to separate the coating nozzle into N
  • Still another object of the present invention is to provide a coating method for coating a workpiece using the above-described coating apparatus, comprising the steps of: placing a workpiece to be coated on a stage; The barrier body is aligned with the boundary zone of the coating area on the object to be treated; determining the liquid discharge rate of the liquid feeding pump; controlling the movement of the hanging frame to drive the coating nozzle to move in the horizontal direction to achieve the Coating of the treated object.
  • the abutting faces of the half body formed with the recesses are provided with N mounting grooves, each of the blocking bodies is mounted in the corresponding mounting groove, and the connecting surface of each blocking body closely fits the opposite half of the body The abutting faces, and the bottom of each barrier body is flush with the bottom edge of the half body in which the recess is formed.
  • the N barrier bodies are integrally formed with the half body in which the recessed portion is formed. Further, the number of the liquid feeding pumps is N+1, and each liquid feeding pump draws the coating liquid and discharges the coating liquid into the corresponding sub-coating nozzle.
  • the coating device further includes: N+1 flow meters, wherein the flow meter is used to measure the flow rate of the corresponding sub-coating nozzle; N+1 regulating valves, wherein the adjusting The valve adjusts the inlet flow rate of the corresponding sub-coating nozzle; the flow control module controls the corresponding regulating valve of the flow meter according to the inlet flow rate fed back by the flow meter, so that the corresponding regulating valve adjusts its corresponding The flow rate of the sub-coating nozzle.
  • the coating nozzle of the present invention divides a coating nozzle having a large lateral size into a plurality of sub-coating nozzles having a small lateral dimension.
  • each sub-coating nozzle is from a respective one.
  • the uniformity of the spray coating liquid at the intermediate position and the both end positions of the discharge port is good.
  • the flow rates of the coating liquids into the respective sub-coating nozzles can be separately controlled, thereby controlling the ejection outlets of the respective sub-coating nozzles.
  • Figure la is a perspective view of a conventional coating nozzle.
  • Figure lb is an exploded perspective view of a prior art coating nozzle.
  • Figure 2 is a coating apparatus having a coating head shown in Figure la.
  • Fig. 3 is a schematic view showing a conventional method of cutting a glass substrate in a mixed arrangement mode.
  • 4 is an exploded perspective view of a coating nozzle in accordance with an embodiment of the present invention.
  • Figure 5 is a side elevational view of a coating applicator in accordance with an embodiment of the present invention.
  • Fig. 6a is a schematic view of a coating apparatus having the coating head shown in Fig. 4.
  • Fig. 6b is a schematic view of coating the object to be treated using the coating head shown in Fig. 4.
  • Figure 7 is a schematic diagram of a control system using a liquid delivery pump.
  • FIG. 4 is an exploded perspective view of a coating nozzle in accordance with an embodiment of the present invention.
  • Figure 5 is a side elevational view of a coating applicator in accordance with an embodiment of the present invention. As shown in FIG. 4 and FIG.
  • the coating nozzle 400 is composed of left and right half bodies 410 and 420.
  • the abutting surface 423 of one half body 420 is planar, and two coating liquid input holes 421 are provided. 422 are respectively disposed at intermediate positions of the half body 420, and at the same time, an accumulation groove 430 extending in the longitudinal direction is formed at an intermediate position of the other half body 410, and a portion 440 above the accumulation groove 430 is formed to engage with the half body 420.
  • the surface 441, the portion 450 below the accumulation groove 430 is more ground and retracted than the upper portion 440, and a gap is formed between the abutting surface 423 of the half body 420, which becomes a slit spray of the coating head 400.
  • the two side plates 470, 480 may be made of a hydrophobic material such as a resin, or a hydrophobic layer may be applied to the inner side surfaces of the joined sides of the two side plates 470, 480.
  • the two side plates 470, 480 can be respectively fixed to the front and rear sides by screws or adhesives.
  • a mounting groove 411 is defined in the joint surface 441 of the half body 410.
  • the blocking body 490 which completely fills the mounting groove 411 can be fixedly mounted in the mounting groove 411 by screws or adhesives, and the connecting surface 491 of the blocking body 490 is closely fitted.
  • the opposing faces 423 of the opposing halves 420, and the bottom 492 of the barrier body 490 are flush with the bottom edge 412 of the half 410 to separate the applicator head 400 into two separate sub-coating nozzles. In this way, a coating nozzle 400 having a large lateral size can be divided into two sub-coating nozzles having a small lateral dimension.
  • each of the sub-coating nozzles is discharged from the respective nozzles.
  • the uniformity of the spray coating liquid at the intermediate position and the both end positions is good.
  • the flow rates of the coating liquids into the respective sub-coating nozzles can be separately controlled, thereby controlling the ejection outlets of the respective sub-coating nozzles.
  • the speed of the coating liquid will be specifically described below; or, when different types of coating liquid film layers are simultaneously coated on the surfaces of different objects to be treated, different kinds of coating liquids may be separately introduced into different sub-coating layers.
  • the nozzles of the different sub-coating nozzles are further ejected.
  • the position of the mounting groove 411 on the joint surface 441 of the half body 410 may be adjusted according to the requirement of the lateral dimension of the sub-coating head; or the barrier body 490 may be
  • the half body 410 is integrally formed, which simplifies assembly.
  • the number of the mounting grooves 411 provided on the joint surface 441 of the half body 410 is not limited to that shown in FIG. 4, and the number of the mounting grooves 411 can be increased according to actual needs, and the coating head 400 can be further applied. Separate into a plurality of coating nozzles to form a multi-stage coating nozzle.
  • the abutting surface 423 of the half body 420 is also designed to have the same structure as the joint surface 441 of the half body 410. This structure can make the half body structure uniform, saves the manufacturing cost, and the docking of the half body 420.
  • the mounting groove on the face 423 can be offset from the mounting groove 411 on the engagement face 441 of the half 410.
  • Figure 6a is a schematic view of a coating apparatus having the coating nozzle of Figure 4. As shown in FIG.
  • the coating device 500 includes: a loading platform 510 for carrying a workpiece; a coating nozzle 400 for spraying a coating liquid onto the workpiece; a hanger 520 supporting the coating nozzle 400, and passing through itself
  • the traveling shaft 521 is moved in the horizontal X direction, thereby driving the coating nozzle 400 to move in the horizontal X direction;
  • the liquid feeding pump 531 extracts the coating liquid and discharges the coating liquid to a sub-coating nozzle of the coating nozzle 400.
  • the liquid feeding pump 532 extracts the coating liquid and discharges the coating liquid into another sub-coating nozzle of the coating head 400; a control system (not shown) controls the movement of the hanger 520 and adjusts the liquid feeding pump.
  • the discharge rate of 531, 532 (i.e., the rate at which the liquid feeding pump discharges the coating liquid to its corresponding sub-coating nozzle, that is, the flow rate of the above-mentioned coating liquid into the sub-coating head).
  • the number of liquid delivery pumps can be kept consistent with the number of sub-coating nozzles into which the coating nozzle 400 is divided, that is, one liquid feeding pump discharges the coating liquid to its corresponding one of the sub-coating nozzles; It is also possible to discharge the coating liquid to each of the sub-coating heads into which the coating head 400 is divided by a liquid feeding pump, which will be specifically described below.
  • Fig. 6b is a schematic view of coating the object to be treated using the coating head shown in Fig.
  • the hanging frame 520 is omitted in Fig. 6b.
  • the object to be coated 540 is placed on the stage 510, and then the barrier body 490 of the coating head 400 is aligned with the boundary band 543 of the coated area on the object to be processed 540, and is determined to be sent.
  • the liquid pump 531 discharges the discharge rate of the coating liquid into the sub-coating head 401, and determines the discharge rate of the coating liquid discharged from the liquid supply pump 532 to the sub-coating head 402; and the coating head 400 is horizontally X.
  • the directional movement causes the sub-coating heads 401 and 402 to apply the coated regions 541 and 542 of the workpiece 540, respectively, and form a uniform film on the coating regions 541 and 542, respectively.
  • FIG. 7 is a schematic diagram of a control system using a liquid delivery pump.
  • the coating device when a liquid feeding pump 600 is used, the coating device further includes: flow meters 611, 612, wherein the flow meter 611 measures the flow rate of the sub-coating nozzle 401, and the flow meter 612 measures The flow rate of the coating nozzle 402; the regulating valve 621, 622, wherein the regulating valve 621 adjusts the flow rate of the sub-coating nozzle 401, and the regulating valve 622 adjusts the inflow rate of the sub-coating nozzle 402; the flow control module 630, The regulating valve 621 and the regulating valve 622 are respectively controlled according to the flow rate of the flow fed back by the flow meter 611 and the flow meter 612, so that the regulating valve 621 adjusts the flow rate of the inlet of the
  • Inlet flow rate It should be understood that when there are multiple sub-coating nozzles, the number of regulating valves and flow meters is the same as the number of the plurality of sub-coating nozzles.
  • the liquid discharge rate of the liquid feeding pump 600 is determined by the formula (2).
  • P (HlxLl + H2xL2) V (2)
  • P represents the discharge rate of the liquid supply pump 600
  • HI represents the predetermined thickness of the film formed by the application of the sub-coating head 401 to the corresponding coating area
  • H2 represents The predetermined thickness of the film formed by coating the coating head 402 to its corresponding coating area
  • L1 represents the width of the sub-coating head 401
  • L2 represents the width of the sub-coating head 402
  • V represents the coating head at the level X.
  • the coating head of the present invention can be used to apply a photoresist or other suitable coating liquid to the surface of a glass substrate, a semiconductor wafer or other processed object.

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Abstract

本发明公开一种涂布喷头，其由左右半体结合而成，在左右半体中的至少一个半体的对接面上形成决定狭缝状喷出口的宽度尺寸的凹部，并且在涂布喷头的两端装有侧板，侧板封闭凹部形成的侧面开口，其特征在于，形成有凹部的半体的对接面上固定设有N个阻隔体，N个阻隔体将凹部分隔，以将涂布喷头分隔为N+1个独立的子涂布喷头，其中，N为正整数。本发明的涂布喷头是将一个横向尺寸较大的涂布喷头分隔成为多个横向尺寸较小的子涂布喷头，当涂布喷头在加速或者减速运动时，每个子涂布喷头从其喷出口的中间位置和两端位置喷出涂布液的均一性较好。本发明还公开一种具有该涂布喷头的涂布装置及其涂布方法。

Description

涂布喷头、 具有该涂布喷头的涂布装置及其涂布方法 技术领域
本发明涉及一种在玻璃基板或者其它被处理物的表面上涂布如光阻或者 其它涂布液的涂布喷头， 以及具有该涂布喷头的涂布装置及其涂布方法。
背景技术 目前， 在平板显示器的制作过程中， 采用具有狭缝式喷嘴的涂布喷头在大 尺寸玻璃基板上进行光阻涂布。 光阻由狭缝式喷嘴吐出， 形成均匀的光阻膜于 玻璃基板表面上。 图 la是现有的涂布喷头的立体图， 图 lb是现有的涂布喷头 的立体分解图。 如图 la、 lb所示， 现有的涂布喷头 100由左右半体 110、 120 构成， 半体 120的对接面 121设为平面， 光阻输入孔 190设于半体 120的中间 位置上， 同时， 在半体 110的中间位置上形成沿长度方向延伸的蓄积槽 130， 在蓄积槽 130上方的部分 140形成与半体 120接合的接合面 141，在蓄积槽 130 下方的部分 150比上方部分 140被更多地研磨而退进， 在与半体 120的对接面 121之间形成间隙，该间隙成为涂布喷头 100的狭缝式喷出口 160的宽度尺寸， 然后， 该涂布喷头 100的两侧端通过侧板 170、 180被不透液地封闭。 图 2是具有图 la所示涂布喷头的涂布装置。 同时结合图 1、 图 2， 涂布喷 头 100固定在吊挂架 210上， 吊挂架 210通过自身所带的行走轴 211进行水平 X方向的运动， 并带动涂布喷头 100做水平 X方向的运动。 在涂布喷头 100 运动的同时， 固定于吊挂架 210上的送液泵 220抽取光阻到涂布喷头 100中， 涂布喷头 100的喷出口 160喷出光阻， 对放置在承载台 230上的玻璃基板进行 涂布。 然而， 图 1所示现有的涂布喷头 100横向尺寸较大， 光阻输入孔 190设于 半体 120的中间位置上， 在涂布喷头 100加速或者减速运动时， 由于从光阻输 入孔 190输出到蓄积槽 130的中间位置和两端位置的光阻的量不同， 进而使得 光阻从喷出口 160的中间位置和两端位置喷出光阻的均一性较差。
另外， 在平板显示器制造领域， 玻璃基板的成本占到 CF玻璃基板 （在玻 璃基板上形成有黑色矩阵、 三原色子像素等）总成本的 60%以上。 若对玻璃基 板采用单一尺寸切割， 势必会剩余较多的空白部分无法切割成该单一尺寸。 近 年来对玻璃基板采用混合排列模式 （Multi-Model Glass) 进行切割， 即对玻璃 基板进行大尺寸切割后， 剩余的空白部分进行小尺寸切割， 以提高玻璃基板的 利用率， 如图 3所示， 一整块大的玻璃基板 300生产 43寸的产品 310， 再利用 剩余的边角料生产尺寸较小的 23寸产品 320。但由于现有的涂布喷头在整块玻 璃基板上涂布的光阻的膜厚相同， 因此以同一块玻璃基板生产不同尺寸的产品 时， 必须将在不同尺寸的产品上的光阻的膜厚设计为相同。 CF 玻璃基板上的 光阻的膜厚越大， 相应的颜色也越纯 （CF 玻璃基板的色域值随光阻的膜厚变 化而变化）。 但是， 光阻的膜厚增加通常会导致光线透过率的下降， 故向 CF 玻璃基板提供显示光源的背光模组的选用也会由此而受到影响。 因此对于不同 规格的产品， 由于尺寸、 驱动、 背光模组等设计的差异， 在其上涂布的光阻的 膜厚难以设计为相同。 尤其对于小尺寸和大尺寸的产品， 涂布的光阻的膜厚各 不相同， 因此现有的涂布喷头及涂布方法给生产设计带来了极大的不便。
发明内容 为了解决上述现有技术存在的问题， 本发明提供了一种涂布喷头， 由左右 半体结合而成，在所述左右半体中的至少一个半体的对接面上形成决定狭缝状 喷出口的宽度尺寸的凹部， 并且在所述涂布喷头的两端装有侧板， 所述侧板封 闭所述凹部形成的侧面开口，形成有所述凹部的半体的对接面上固定设有 N个 阻隔体， 所述 N个阻隔体将所述凹部分隔， 以将所述涂布喷头分隔为 N+1个 独立的子涂布喷头， 其中， N为正整数。 此外，所述形成有凹部的半体的对接面上设有 N个安装槽， 每个阻隔体安 装于其对应的安装槽中， 每个阻隔体的连接面紧密贴合其相对的半体的对接 面， 并且每个阻隔体的底部与所述形成有凹部的半体的底缘平齐。 此外， 所述 N个阻隔体与所述形成有凹部的半体一体成型。 本发明的另一目的还在于提供一种涂布装置， 包括： 承载台， 承载被处理 物； 涂布喷头， 向被处理物喷涂涂布液； 吊挂架， 支持所述涂布喷头， 并且带 动所述涂布喷头水平运动和垂直运动； 送液泵， 抽取涂布液并将涂布液输送到 所述涂布喷头； 控制系统， 控制所述吊挂架的运动以及调节所述送液泵的吐液 速率； 其中， 所述涂布喷头由左右半体结合而成， 在所述左右半体中的至少一 个半体的对接面上形成决定狭缝状喷出口的宽度尺寸的凹部， 并且在所述涂布 喷头的两端装有侧板， 所述侧板封闭所述凹部形成的侧面开口， 其中， 形成有 所述凹部的半体的对接面上固定设有 N个阻隔体， 所述 N个阻隔体将所述凹 部分隔， 以将所述涂布喷头分隔为 N+1个独立的子涂布喷头， 其中， N为正整 数。 本发明的又一目的还在于提供一种使用上述的涂布装置对被处理物进行 涂布的涂布方法， 包括歩骤： 将待涂布的被处理物置于承载台上； 将涂布喷头 的阻隔体与被处理物上的涂布区域的分界带对齐； 确定送液泵的吐液速率； 控 制吊挂架运动， 从而带动所述涂布喷头沿着水平方向运动， 以实现对所述被处 理物的涂布。 此外，所述形成有凹部的半体的对接面上设有 N个安装槽， 每个阻隔体安 装于其对应的安装槽中， 每个阻隔体的连接面紧密贴合其相对的半体的对接 面， 并且每个阻隔体的底部与所述形成有凹部的半体的底缘平齐。 此外， 所述 N个阻隔体与所述形成有凹部的半体一体成型。 此外，所述送液泵的数量为 N+1个，每个送液泵抽取涂布液并将涂布液吐 出到对应的子涂布喷头中。 此外， 所述送液泵的数量为一个， 该一个送液泵抽取涂布液并将涂布液吐 出到每个子涂布喷头中。 此外， 所述涂布装置还包括： N+1个流量计， 其中， 所述流量计用于测量 其对应的子涂布喷头的进液流量； N+1个调节阀， 其中， 所述调节阀调节其对 应的子涂布喷头的进液流量； 流量控制模块， 根据所述流量计反馈的进液流量 来控制所述流量计对应的调节阀， 以使该对应的调节阀调节其对应的子涂布喷 头的进液流量。
本发明的涂布喷头是将一个横向尺寸较大的涂布喷头分隔成为多个横向 尺寸较小的子涂布喷头， 当涂布喷头在加速或者减速运动时， 每个子涂布喷头 从各自的喷出口的中间位置和两端位置喷出涂布液的均一性较好。 另外， 在对 不同被处理物表面上同时涂布不同厚度的涂布液膜层时， 可分别控制涂布液进 入各个子涂布喷头的流速， 进而控制各个子涂布喷头的喷出口喷出涂布液的速 度， 而且在对不同被处理物表面上同时涂布不同种类的涂布液膜层时， 可使不 同种类的涂布液分别进入不同的子涂布喷头中，进而由不同的子涂布喷头的喷 出口喷出。
附图说明
图 la是现有的涂布喷头的立体图。 图 lb是现有的涂布喷头的立体分解图。 图 2是具有图 la所示涂布喷头的涂布装置。 图 3是现有的采用混合排列模式切割玻璃基板的示意图。 图 4是根据本发明的实施例的涂布喷头的立体分解图。 图 5是根据本发明的实施例的涂布喷头的侧视图。 图 6a是具有图 4所示涂布喷头的涂布装置示意图。 图 6b是使用图 4所示涂布喷头涂布被处理物的示意图。
图 7是使用一个送液泵的控制系统示意图。
具体实施方式 现在对本发明的实施例进行详细的描述， 其示例表示在附图中， 其中， 相 同的标号始终表示相同部件。下面通过参照附图对实施例进行描述以解释本发 明。 在附图中， 为了清晰起见， 可以夸大层和区域的厚度。 在下面的描述中， 为了避免公知结构和 /或功能的不必要的详细描述所导致的本发明构思的混淆， 可省略公知结构和 /或功能的不必要的详细描述。 图 4是根据本发明的实施例的涂布喷头的立体分解图。 图 5是根据本发明 的实施例的涂布喷头的侧视图。 如图 4、 图 5所示， 根据本发明的实施例的涂布喷头 400由左右半体 410、 420构成， 一个半体 420的对接面 423设为平面， 两个涂布液输入孔 421、 422 分别设于半体 420的中间位置上， 同时， 在另一个半体 410的中间位置上形成 沿长度方向延伸的蓄积槽 430， 在蓄积槽 430上方的部分 440形成与半体 420 接合的接合面 441， 在蓄积槽 430下方的部分 450比上方部分 440被更多地研 磨而退进，在与半体 420的对接面 423之间形成间隙，该间隙成为涂布喷头 400 的狭缝式喷出口 460的宽度尺寸。 此外， 在左右半体 410、 420接合的状态下， 在前后侧面上， 蓄积槽 430 和狭缝式喷出口 460的侧端部都有开口， 因此， 用两个侧板 470、 480分别不 透液地封闭所述开口。 在本发明中， 两个侧板 470、 480可由树脂等疏水性材 料构成， 或者在于两个侧板 470、 480接合的内侧面上涂覆疏水层。 另外， 两 个侧板 470、 480可通过螺丝或者黏结剂分别固定在前后侧面上。 在半体 410的接合面 441上设有一安装槽 411， 将安装槽 411完全填满的 阻隔体 490可通过螺丝或者黏结剂固定安装于安装槽 411中， 阻隔体 490的连 接面 491紧密贴合其相对的半体 420的对接面 423，并且阻隔体 490的底部 492 与半体 410的底缘 412平齐，以将涂布喷头 400分隔为两个独立的子涂布喷头。 这样， 可将一个横向尺寸较大的涂布喷头 400分隔成为两个横向尺寸较小的子 涂布喷头， 当涂布喷头 400在加速或者减速运动时， 每个子涂布喷头从各自的 喷出口的中间位置和两端位置喷出涂布液的均一性较好。 另外， 在对不同被处 理物表面上同时涂布不同厚度的涂布液膜层时， 可分别控制涂布液进入各个子 涂布喷头的流速， 进而控制各个子涂布喷头的喷出口喷出涂布液的速度， 具体 将在下文描述； 或者， 在对不同被处理物表面上同时涂布不同种类的涂布液膜 层时， 可使不同种类的涂布液分别进入不同的子涂布喷头中， 进而由不同的子 涂布喷头的喷出口喷出。 应当理解， 在本发明中， 可根据对子涂布喷头的横向尺寸的要求， 来调整 安装槽 411在半体 410的接合面 441上的位置； 也可通过模具的设计， 使得阻 隔体 490与半体 410—体成型，进而简化了组装。另外，在本发明中，半体 410 的接合面 441上设置的安装槽 411的数量并不以图 4中所示为限， 可根据实际 需求增加安装槽 411的数量， 进而将涂布喷头 400分隔成更多个子涂布喷头， 形成多段式涂布喷头。 而且， 在本发明中， 半体 420的对接面 423也设计成为 与半体 410的接合面 441同样的结构， 这种结构可以使得半体结构的统一， 节 省制作成本，并且半体 420的对接面 423上的安装槽可与半体 410的接合面 441 上的安装槽 411错开。 以下文中， 将对具有图 4所示涂布喷头的涂布装置进行详细说明。 图 6a是具有图 4所示涂布喷头的涂布装置示意图。 如图 6a所示， 涂布装置 500包括： 承载台 510， 承载被处理物； 涂布喷头 400， 向被处理物喷涂涂布液； 吊挂架 520， 支持涂布喷头 400， 并且通过自身 所带的行走轴 521进行水平 X方向运动， 进而带动涂布喷头 400沿着水平 X 方向运动； 送液泵 531抽取涂布液并将涂布液吐出到涂布喷头 400的一个子涂 布喷头中， 送液泵 532抽取涂布液并将涂布液吐出到涂布喷头 400的另一个子 涂布喷头中；控制系统（未示出），控制吊挂架 520的运动以及调节送液泵 531、 532的吐液速率 （即送液泵向其对应的子涂布喷头吐出涂布液的速率， 也就是 上述的涂布液进入子涂布喷头的流速）。 在本发明的中， 送液泵的数量可与涂布喷头 400被分隔成的子涂布喷头的 数量保持一致， 即一个送液泵向其对应的一个子涂布喷头吐出涂布液； 但是也 可用一个送液泵向涂布喷头 400被分隔成的各个子涂布喷头吐出涂布液， 具体 将在下文描述。 图 6b是使用图 4所示涂布喷头涂布被处理物的示意图。 其中， 为了方便 参照图中所示， 图 6b中省去了吊挂架 520。 如图 6b所示， 将待涂布的被处理物 540置于承载台 510上， 而后将涂布 喷头 400的阻隔体 490与被处理物 540上的涂布区域的分界带 543对齐， 确定 送液泵 531向子涂布喷头 401中吐出涂布液的吐液速率， 以及确定送液泵 532 向子涂布喷头 402中吐出涂布液的吐液速率；使涂布喷头 400沿着水平 X方向 运动，进而使得子涂布喷头 401、 402分别对被处理物 540的涂布区域 541、 542 进行涂布， 并在涂布区域 541、 542上分别形成均匀的薄膜。 送液泵向其对应的子涂布喷头中吐出涂布液的吐液速率被式（1 )所确定， P=HxLxV ( 1 ) 其中 P表示送液泵的吐液速率， H表示子涂布喷头向其对应的涂布区域进 行涂布后形成的薄膜的预定厚度， L表示子涂布喷头的宽度， V表示涂布喷头 400在水平 X方向上的运动速度， 通常该运动速度为 100mm/sec〜300mm/sec。 当然， 如前所述， 也可用一个送液泵向子涂布喷头 401、 402中分别吐出 涂布液， 如下描述。 图 7是使用一个送液泵的控制系统示意图。 如图 7所示， 当使用一个送液泵 600时， 涂布装置还包括： 流量计 611、 612， 其中， 流量计 611测量子涂布喷头 401的进液流量， 流量计 612测量子 涂布喷头 402的进液流量； 调节阀 621、 622， 其中， 调节阀 621调节子涂布喷 头 401的进液流量， 调节阀 622调节子涂布喷头 402的进液流量； 流量控制模 块 630， 根据流量计 611、 流量计 612反馈的进液流量来分别控制调节阀 621、 调节阀 622， 以使调节阀 621调节子涂布喷头 401的进液流量， 调节阀 622调 节子涂布喷头 402的进液流量。 应当理解， 当有多个子涂布喷头时， 相应地调节阀和流量计的数量均与该 多个子涂布喷头的数量相同。 送液泵 600的吐液速率被式 （2) 所确定，
P= (HlxLl+ H2xL2) V (2) 其中 P表示送液泵 600的吐液速率， HI表示子涂布喷头 401向其对应的 涂布区域进行涂布后形成的薄膜的预定厚度， H2表示子涂布喷头 402向其对 应的涂布区域进行涂布后形成的薄膜的预定厚度， L1表示子涂布喷头 401 的 宽度， L2表示子涂布喷头 402的宽度， V表示涂布喷头在水平 X方向上的运 动速度。 本发明的涂布喷头可用于对玻璃基板、半导体晶片或者其他被处理物的表 面上涂布光阻或者其他适合的涂布液。
尽管已经参照其示例性实施例具体显示和描述了本发明，但是本领域的技 术人员应该理解， 在不脱离权利要求所限定的本发明的精神和范围的情况下， 可以对其进行形式和细节上的各种改变。

Claims

权利要求书
1、 一种涂布喷头， 由左右半体结合而成， 在所述左右半体中的至少一个 半体的对接面上形成决定狭缝状喷出口的宽度尺寸的凹部， 并且在所述涂布喷 头的两端装有侧板， 所述侧板封闭所述凹部形成的侧面开口， 其中， 形成有所 述凹部的半体的接合面上固定设有 N个阻隔体， 所述 N个阻隔体将所述凹部 分隔，以将所述涂布喷头分隔为 N+1个独立的子涂布喷头，其中， N为正整数。
2、 根据权利要求 1所述的涂布喷头， 其中， 所述形成有凹部的半体的对 接面上设有 N个安装槽， 每个阻隔体安装于其对应的安装槽中， 每个阻隔体的 连接面紧密贴合其相对的半体的对接面， 并且每个阻隔体的底部与所述形成有 凹部的半体的底缘平齐。
3、 根据权利要求 1所述的涂布喷头， 其中， 所述 N个阻隔体与所述形成 有凹部的半体一体成型。
4、 根据权利要求 2所述的涂布喷头， 其中， 所述 N个阻隔体与所述形成 有凹部的半体一体成型。
5、 一种涂布装置， 其中， 包括： 承载台， 承载被处理物； 涂布喷头， 向被处理物喷涂涂布液； 吊挂架， 支持所述涂布喷头， 并且带动所述涂布喷头水平运动； 送液泵， 抽取涂布液并将涂布液吐出到所述涂布喷头中； 控制系统， 控制所述吊挂架的运动以及调节所述送液泵的吐液速率； 其中， 所述涂布喷头由左右半体结合而成， 在所述左右半体中的至少一个 半体的对接面上形成决定狭缝状喷出口的宽度尺寸的凹部， 并且在所述涂布喷 头的两端装有侧板， 所述侧板封闭所述凹部形成的侧面开口， 其中， 形成有所 述凹部的半体的对接面上固定设有 N个阻隔体， 所述 N个阻隔体将所述凹部 分隔，以将所述涂布喷头分隔为 N+1个独立的子涂布喷头，其中， N为正整数。
6、 根据权利要求 5所述的涂布装置， 其中， 所述形成有凹部的半体的对 接面上设有 N个安装槽， 每个阻隔体安装于其对应的安装槽中， 每个阻隔体的 连接面紧密贴合其相对的半体的对接面， 并且每个阻隔体的底部与所述形成有 凹部的半体的底缘平齐。
7、 根据权利要求 5所述的涂布装置， 其中， 所述 N个阻隔体与所述形成 有所述凹部的半体一体成型。
8、 根据权利要求 6所述的涂布装置， 其中， 所述 N个阻隔体与所述形成 有所述凹部的半体一体成型。
9、根据权利要求 5所述的涂布装置， 其中， 所述送液泵的数量为 N+1个， 每个送液泵抽取涂布液并将涂布液吐出到对应的子涂布喷头中。
10、 根据权利要求 5所述的涂布装置， 其中， 所述送液泵的数量为一个， 该一个送液泵抽取涂布液并将涂布液吐出到每个子涂布喷头中。
11、 根据权利要求 10所述的涂布装置， 其中， 所述涂布装置还包括： N+1个流量计， 其中， 所述流量计用于测量其对应的子涂布喷头的进液流
N+1个调节阀， 其中， 所述调节阀调节其对应的子涂布喷头的进液流量； 流量控制模块， 根据所述流量计反馈的进液流量来控制所述流量计对应的 调节阀， 以使该对应的调节阀调节其对应的子涂布喷头的进液流量。
12、一种使用权利要求 5所述的涂布装置对被处理物进行涂布的涂布方法， 其中， 包括歩骤： 将待涂布的被处理物置于承载台上； 将涂布喷头的阻隔体与被处理物上的涂布区域的分界带对齐； 确定送液泵的吐液速率；
控制吊挂架运动， 从而带动所述涂布喷头沿着水平方向运动， 以实现对所 述被处理物的涂布。
13、 根据权利要求 12所述的涂布方法， 其中， 所述形成有凹部的半体的 对接面上设有 N个安装槽， 每个阻隔体安装于其对应的安装槽中， 每个阻隔体 的连接面紧密贴合其相对的半体的对接面， 并且每个阻隔体的底部与所述形成 有凹部的半体的底缘平齐。
14、 根据权利要求 12所述的涂布方法， 其中， 所述 N个阻隔体与所述形 成有所述凹部的半体一体成型。
15、 根据权利要求 13所述的涂布方法， 其中， 所述 N个阻隔体与所述形 成有所述凹部的半体一体成型。
16、 根据权利要求 12所述的涂布方法， 其中， 所述送液泵的数量为 N+1 个， 每个送液泵抽取涂布液并将涂布液吐出到对应的子涂布喷头中。
17、 根据权利要求 12所述的涂布方法， 其中， 所述送液泵的数量为一个， 该一个送液泵抽取涂布液并将涂布液吐出到每个子涂布喷头中。
18、 根据权利要求 17所述的涂布方法， 其中， 所述涂布装置还包括： N+1个流量计， 其中， 所述流量计用于测量其对应的子涂布喷头的进液流
N+1个调节阀， 其中， 所述调节阀调节其对应的子涂布喷头的进液流量； 流量控制模块， 根据所述流量计反馈的进液流量来控制所述流量计对应的 调节阀， 以使该对应的调节阀调节其对应的子涂布喷头的进液流量。
PCT/CN2013/078197 2013-05-30 2013-06-27 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法 Ceased WO2014190578A1 (zh)

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