WO2014103588A1 - アルミニウム化合物、薄膜形成用原料及び薄膜の製造方法 - Google Patents
アルミニウム化合物、薄膜形成用原料及び薄膜の製造方法 Download PDFInfo
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- WO2014103588A1 WO2014103588A1 PCT/JP2013/081711 JP2013081711W WO2014103588A1 WO 2014103588 A1 WO2014103588 A1 WO 2014103588A1 JP 2013081711 W JP2013081711 W JP 2013081711W WO 2014103588 A1 WO2014103588 A1 WO 2014103588A1
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- WIPO (PCT)
- Prior art keywords
- thin film
- raw material
- compound
- aluminum
- aluminum compound
- Prior art date
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- -1 Aluminum compound Chemical class 0.000 title claims abstract description 98
- 239000010409 thin film Substances 0.000 title claims abstract description 96
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 75
- 239000002994 raw material Substances 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 17
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 15
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims abstract description 14
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 10
- 239000010408 film Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 20
- 230000008016 vaporization Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 abstract description 45
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 27
- 230000008018 melting Effects 0.000 abstract description 5
- 238000002844 melting Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 52
- 239000002243 precursor Substances 0.000 description 41
- 239000007789 gas Substances 0.000 description 35
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 29
- 229910052719 titanium Inorganic materials 0.000 description 29
- 239000010936 titanium Substances 0.000 description 29
- 238000006243 chemical reaction Methods 0.000 description 21
- 239000007788 liquid Substances 0.000 description 19
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 18
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000000151 deposition Methods 0.000 description 16
- 238000000231 atomic layer deposition Methods 0.000 description 14
- 230000008021 deposition Effects 0.000 description 14
- 239000000203 mixture Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 12
- 238000005755 formation reaction Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 8
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 8
- 238000009834 vaporization Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical class C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 230000001590 oxidative effect Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 5
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 5
- 229910052735 hafnium Inorganic materials 0.000 description 5
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000012434 nucleophilic reagent Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 5
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 5
- 238000010926 purge Methods 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- 238000005160 1H NMR spectroscopy Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- MZRVEZGGRBJDDB-UHFFFAOYSA-N N-Butyllithium Chemical compound [Li]CCCC MZRVEZGGRBJDDB-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 4
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 229940125782 compound 2 Drugs 0.000 description 4
- 238000000921 elemental analysis Methods 0.000 description 4
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- TXGJTWACJNYNOJ-UHFFFAOYSA-N hexane-2,4-diol Chemical compound CCC(O)CC(C)O TXGJTWACJNYNOJ-UHFFFAOYSA-N 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- JDQLUYWHCUWSJE-UHFFFAOYSA-N methanolate;titanium(3+) Chemical compound [Ti+3].[O-]C.[O-]C.[O-]C JDQLUYWHCUWSJE-UHFFFAOYSA-N 0.000 description 4
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 3
- 0 CN(C)CCN(*)[Al](N(C)*)N(C)* Chemical compound CN(C)CCN(*)[Al](N(C)*)N(C)* 0.000 description 3
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000007983 Tris buffer Substances 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 3
- 125000005265 dialkylamine group Chemical group 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 125000005843 halogen group Chemical group 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 3
- 235000015067 sauces Nutrition 0.000 description 3
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003852 thin film production method Methods 0.000 description 3
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 2
- QEGNUYASOUJEHD-UHFFFAOYSA-N 1,1-dimethylcyclohexane Chemical compound CC1(C)CCCCC1 QEGNUYASOUJEHD-UHFFFAOYSA-N 0.000 description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 2
- 229940035437 1,3-propanediol Drugs 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- FTFYDDRPCCMKBT-UHFFFAOYSA-N 1-butylcyclopenta-1,3-diene Chemical compound CCCCC1=CC=CC1 FTFYDDRPCCMKBT-UHFFFAOYSA-N 0.000 description 2
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- AKPLTHZVVWBOPT-UHFFFAOYSA-N 2,2-diethylbutane-1,3-diol Chemical compound CCC(CC)(CO)C(C)O AKPLTHZVVWBOPT-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 2
- VVALZQWOQKHDIM-UHFFFAOYSA-N 2-methylheptane-3,5-dione Chemical compound CCC(=O)CC(=O)C(C)C VVALZQWOQKHDIM-UHFFFAOYSA-N 0.000 description 2
- 125000003229 2-methylhexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- KDSNLYIMUZNERS-UHFFFAOYSA-N 2-methylpropanamine Chemical compound CC(C)CN KDSNLYIMUZNERS-UHFFFAOYSA-N 0.000 description 2
- QWGRWMMWNDWRQN-UHFFFAOYSA-N 2-methylpropane-1,3-diol Chemical compound OCC(C)CO QWGRWMMWNDWRQN-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052689 Holmium Inorganic materials 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- 229910052773 Promethium Inorganic materials 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- DHXVGJBLRPWPCS-UHFFFAOYSA-N Tetrahydropyran Chemical compound C1CCOCC1 DHXVGJBLRPWPCS-UHFFFAOYSA-N 0.000 description 2
- 229910052775 Thulium Inorganic materials 0.000 description 2
- 229910010038 TiAl Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000000560 X-ray reflectometry Methods 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 229910007880 ZrAl Inorganic materials 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000002947 alkylene group Chemical group 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 2
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 2
- IIEWJVIFRVWJOD-UHFFFAOYSA-N ethylcyclohexane Chemical compound CCC1CCCCC1 IIEWJVIFRVWJOD-UHFFFAOYSA-N 0.000 description 2
- LIWAQLJGPBVORC-UHFFFAOYSA-N ethylmethylamine Chemical compound CCNC LIWAQLJGPBVORC-UHFFFAOYSA-N 0.000 description 2
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 2
- 239000000706 filtrate Substances 0.000 description 2
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- ILPNRWUGFSPGAA-UHFFFAOYSA-N heptane-2,4-dione Chemical compound CCCC(=O)CC(C)=O ILPNRWUGFSPGAA-UHFFFAOYSA-N 0.000 description 2
- DGCTVLNZTFDPDJ-UHFFFAOYSA-N heptane-3,5-dione Chemical compound CCC(=O)CC(=O)CC DGCTVLNZTFDPDJ-UHFFFAOYSA-N 0.000 description 2
- NDOGLIPWGGRQCO-UHFFFAOYSA-N hexane-2,4-dione Chemical compound CCC(=O)CC(C)=O NDOGLIPWGGRQCO-UHFFFAOYSA-N 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 2
- PHTQWCKDNZKARW-UHFFFAOYSA-N isoamylol Chemical compound CC(C)CCO PHTQWCKDNZKARW-UHFFFAOYSA-N 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
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- BBGKDYHZQOSNMU-UHFFFAOYSA-N dicyclohexano-18-crown-6 Chemical compound O1CCOCCOC2CCCCC2OCCOCCOC2CCCCC21 BBGKDYHZQOSNMU-UHFFFAOYSA-N 0.000 description 1
- QMLGNDFKJAFKGZ-UHFFFAOYSA-N dicyclohexano-24-crown-8 Chemical compound O1CCOCCOCCOC2CCCCC2OCCOCCOCCOC2CCCCC21 QMLGNDFKJAFKGZ-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- NNUZNYLOAGGAIU-UHFFFAOYSA-N diethylazanide titanium(3+) Chemical compound CCN(CC)[Ti](N(CC)CC)N(CC)CC NNUZNYLOAGGAIU-UHFFFAOYSA-N 0.000 description 1
- 229940043279 diisopropylamine Drugs 0.000 description 1
- CRGGFGFWZPSXPP-UHFFFAOYSA-N dimethylazanide;titanium(3+) Chemical compound [Ti+3].C[N-]C.C[N-]C.C[N-]C CRGGFGFWZPSXPP-UHFFFAOYSA-N 0.000 description 1
- HPYNZHMRTTWQTB-UHFFFAOYSA-N dimethylpyridine Natural products CC1=CC=CN=C1C HPYNZHMRTTWQTB-UHFFFAOYSA-N 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- ZTOMUSMDRMJOTH-UHFFFAOYSA-N glutaronitrile Chemical compound N#CCCCC#N ZTOMUSMDRMJOTH-UHFFFAOYSA-N 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 1
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- QAMFBRUWYYMMGJ-UHFFFAOYSA-N hexafluoroacetylacetone Chemical compound FC(F)(F)C(=O)CC(=O)C(F)(F)F QAMFBRUWYYMMGJ-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229940035429 isobutyl alcohol Drugs 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- NFWSQSCIDYBUOU-UHFFFAOYSA-N methylcyclopentadiene Chemical compound CC1=CC=CC1 NFWSQSCIDYBUOU-UHFFFAOYSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- DWFKOMDBEKIATP-UHFFFAOYSA-N n'-[2-[2-(dimethylamino)ethyl-methylamino]ethyl]-n,n,n'-trimethylethane-1,2-diamine Chemical compound CN(C)CCN(C)CCN(C)CCN(C)C DWFKOMDBEKIATP-UHFFFAOYSA-N 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- GVWISOJSERXQBM-UHFFFAOYSA-N n-methylpropan-1-amine Chemical compound CCCNC GVWISOJSERXQBM-UHFFFAOYSA-N 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- WSGCRAOTEDLMFQ-UHFFFAOYSA-N nonan-5-one Chemical compound CCCCC(=O)CCCC WSGCRAOTEDLMFQ-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- BTNXBLUGMAMSSH-UHFFFAOYSA-N octanedinitrile Chemical compound N#CCCCCCCC#N BTNXBLUGMAMSSH-UHFFFAOYSA-N 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- OOFGXDQWDNJDIS-UHFFFAOYSA-N oxathiolane Chemical compound C1COSC1 OOFGXDQWDNJDIS-UHFFFAOYSA-N 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- UKODFQOELJFMII-UHFFFAOYSA-N pentamethyldiethylenetriamine Chemical compound CN(C)CCN(C)CCN(C)C UKODFQOELJFMII-UHFFFAOYSA-N 0.000 description 1
- AQIXEPGDORPWBJ-UHFFFAOYSA-N pentan-3-ol Chemical compound CCC(O)CC AQIXEPGDORPWBJ-UHFFFAOYSA-N 0.000 description 1
- 125000005005 perfluorohexyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- BHRZNVHARXXAHW-UHFFFAOYSA-N sec-butylamine Chemical compound CCC(C)N BHRZNVHARXXAHW-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 1
- 125000005270 trialkylamine group Chemical group 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/06—Aluminium compounds
- C07F5/069—Aluminium compounds without C-aluminium linkages
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
- C23C16/12—Deposition of aluminium only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
Definitions
- the present invention relates to a novel aluminum compound having a specific structure, a raw material for forming a thin film containing the compound, and a method for producing a thin film for forming a thin film containing aluminum using the raw material.
- Thin film materials containing aluminum elements exhibit specific electrical and optical properties and are applied in various applications.
- aluminum and aluminum alloy thin films are used as LSI wiring materials because of their high conductivity and electromigration resistance.
- Aluminum oxide thin films are hard coating films for machine parts and tools; semiconductor memory insulating films and gates. Insulating films, dielectric films; electronic components such as MR heads for hard disks; optical glass for optical communication circuits and the like.
- Examples of the method for producing the thin film include a sputtering method, an ion plating method, a MOD method such as a coating pyrolysis method and a sol-gel method, a chemical vapor deposition method, etc., but has excellent composition controllability and step coverage. Since it has many advantages such as being suitable for mass production and being capable of hybrid integration, chemical vapor deposition (hereinafter sometimes simply referred to as CVD) method including ALD (Atomic Layer Deposition) method Is the optimal manufacturing process.
- CVD chemical vapor deposition
- ALD Atomic Layer Deposition
- Patent Document 1 discloses an alkoxyalane represented by trimethylaluminum or a dimethylaluminum alkoxide compound as a raw material for forming a thin film, but does not describe the aluminum compound of the present invention.
- AlMe 2 (O i Pr) has been reported as the most preferable raw material for forming a thin film among alkoxyalanes.
- AlMe 2 (O i Pr) has low thermal stability and is not a compound that can be satisfactorily satisfied as a raw material for chemical vapor deposition.
- Non-Patent Document 1 discloses (Me 2 NCH 2 CH 2 NMe) Al (NMe 2 ) 2 as an aluminum amide compound, but does not describe the aluminum compound of the present invention.
- the properties required of a compound (precursor) suitable for a raw material for vaporizing a compound such as a CVD method to form a thin film are that the melting point is low and that it can be transported in a liquid state, the liquid has a low viscosity, and the vapor pressure is low. It is easy to vaporize greatly and has high thermal stability.
- a precursor that has become a gas phase by heating is transported to the substrate without being thermally decomposed, adsorbed to the substrate heated to a high temperature without being thermally decomposed, and then reacted with the reactive gas introduced. Therefore, in order to carry out the process of forming a thin film, the high thermal stability of the precursor is important. There are no conventional aluminum compounds that are sufficiently satisfactory in these respects.
- the present invention provides an aluminum compound represented by the following general formula (I).
- R 1 and R 2 each independently represents a linear or branched alkyl group having 2 to 5 carbon atoms, and R 3 represents a methyl group or an ethyl group.
- this invention provides the raw material for thin film formation formed by containing the aluminum compound represented by the said general formula (I). Also, the present invention introduces a vapor containing the aluminum compound obtained by vaporizing the raw material for forming the thin film into a film forming chamber provided with a substrate to decompose and / or chemically react the aluminum compound. The present invention also provides a method for producing a thin film in which a thin film containing aluminum is formed on the surface of the substrate.
- an aluminum compound having a low melting point, sufficient volatility and high thermal stability can be provided.
- the compound is suitable as a raw material for forming a thin film by a CVD method.
- FIG. 1 is a schematic view showing an example of an apparatus for chemical vapor deposition used in the method for producing a thin film containing aluminum according to the present invention.
- FIG. 2 is a schematic view showing another example of the chemical vapor deposition apparatus used in the method for producing a thin film containing aluminum according to the present invention.
- FIG. 3 is a schematic diagram showing another example of an apparatus for chemical vapor deposition used in the method for producing a thin film containing aluminum according to the present invention.
- FIG. 4 is a schematic diagram showing another example of an apparatus for chemical vapor deposition used in the method for producing a thin film containing aluminum according to the present invention.
- the aluminum compound of the present invention is represented by the above general formula (I) and is suitable as a precursor for a thin film production method having a vaporization step such as a CVD method.
- the compound since the compound has high thermal stability, it is particularly suitable as a precursor used in the ALD method.
- the linear or branched alkyl group having 2 to 5 carbon atoms represented by R 1 and R 2 includes ethyl, propyl, isopropyl, butyl, sec-butyl, Examples include tributyl, isobutyl, pentyl, secondary pentyl, tertiary pentyl, isopentyl, and neopentyl.
- R 3 represents a methyl group or an ethyl group.
- R 1 , R 2 and R 3 are preferably in a liquid state at a normal temperature and a normal pressure and a high vapor pressure when used in a method for producing a thin film having a step of vaporizing a compound. .
- the viscosity in the liquid state is low, it is particularly preferable because transportation is easy.
- R 1 and R 2 are an ethyl group or an isopropyl group, it is preferable because it is in a liquid state at normal temperature and has high thermal stability, and in particular, R 1 and R 2 are ethyl groups.
- R 1 and R 2 are an ethyl group and R 3 is a methyl group are particularly preferred because the viscosity in the liquid state is low.
- R 1 , R 2 and R 3 can be arbitrarily selected depending on the solubility in the solvent used, the thin film formation reaction, and the like.
- Preferred examples of the aluminum compound of the present invention include, for example, the following compound No. 1-No. 8 is mentioned.
- the aluminum compound of the present invention is not limited to these specific examples.
- the aluminum compound of the present invention is not particularly limited by its production method, and is produced by applying a known reaction.
- a production method for example, aluminum hydride is reacted with a dialkylamine having a structure corresponding to the compound to be produced and a diamine compound having a corresponding structure, or aluminum chloride is reacted with a dialkylamine having a corresponding structure and a corresponding structure. It can be obtained by reacting a diamine compound.
- the thin film forming raw material of the present invention is a thin film precursor made of the above-described aluminum compound of the present invention, and its form varies depending on the manufacturing process to which the thin film forming raw material is applied.
- the raw material for forming a thin film of the present invention does not contain a metal compound and a semimetal compound other than the aluminum compound of the present invention.
- the raw material for forming a thin film of the present invention includes a compound containing a metal other than aluminum and / or the aluminum compound of the present invention.
- the raw material for forming a thin film of the present invention contains another precursor
- the content of the other precursor is preferably 0.01 mol to 10 mol, more preferably 1 mol with respect to 1 mol of the aluminum compound of the present invention. Is 0.1 to 5 mol.
- the thin film forming raw material of the present invention may further contain an organic solvent and / or a nucleophilic reagent.
- the thin film forming raw material of the present invention is suitable for the chemical vapor deposition raw material (hereinafter referred to as the CVD raw material) because the physical properties of the aluminum compound as the precursor are suitable for the CVD method and the ALD method. ) Is useful.
- the raw material for forming a thin film of the present invention is a raw material for chemical vapor deposition
- the form is appropriately selected depending on the method such as the transport and supply method of the CVD method used.
- the CVD raw material is vaporized by heating and / or decompressing in the raw material container, and the substrate is installed together with a carrier gas such as argon, nitrogen, helium or the like used as necessary.
- the gas transport method introduced into the film formation chamber (hereinafter also referred to as a deposition reaction section), the CVD raw material is transported to the vaporization chamber in a liquid or solution state, heated in the vaporization chamber, and / or There is a liquid transport method in which vaporization is performed by reducing the pressure and the gas is introduced into a film formation chamber.
- the aluminum compound itself represented by the above general formula (I) is a CVD raw material.
- the aluminum compound itself represented by the above general formula (I) or the compound is organically used. A solution dissolved in a solvent becomes a raw material for CVD.
- the CVD raw material is vaporized and supplied independently for each component (hereinafter sometimes referred to as a single source method), and the multi-component raw material is mixed in advance with a desired composition.
- a method of vaporizing and supplying a mixed raw material hereinafter, sometimes referred to as a cocktail sauce method.
- a cocktail sauce method a mixture or mixed solution of only the aluminum compound of the present invention, or a mixture or mixed solution of the aluminum compound of the present invention and another precursor is a raw material for CVD.
- the organic solvent is not particularly limited and a well-known general organic solvent can be used.
- the organic solvent include acetates such as ethyl acetate, butyl acetate and methoxyethyl acetate; ethers such as tetrahydrofuran, tetrahydropyran, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, triethylene glycol dimethyl ether, dibutyl ether and dioxane; Ketones such as butyl ketone, methyl isobutyl ketone, ethyl butyl ketone, dipropyl ketone, diisobutyl ketone, methyl amyl ketone, cyclohexanone, methylcyclohexanone; hexane, cyclohexane, methylcyclohexane, dimethylcyclohexane, ethylcyclohexane, heptane, oc
- Examples of the other precursor include one or more selected from the group consisting of compounds used as organic ligands such as alcohol compounds, glycol compounds, ⁇ -diketone compounds, cyclopentadiene compounds, and organic amine compounds.
- organic ligands such as alcohol compounds, glycol compounds, ⁇ -diketone compounds, cyclopentadiene compounds, and organic amine compounds.
- a compound with silicon or metal (except aluminum) can be used.
- the precursor metal species include magnesium, calcium, strontium, barium, titanium, zirconium, hafnium, vanadium, niobium, tantalum, manganese, iron, ruthenium, cobalt, rhodium, iridium, nickel, palladium, platinum, copper, silver , Gold, zinc, gallium, indium, germanium, tin, lead, antimony, bismuth, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium It is done.
- Examples of the alcohol compound used as the organic ligand of the other precursor include methanol, ethanol, propanol, isopropyl alcohol, butanol, secondary butyl alcohol, isobutyl alcohol, tertiary butyl alcohol, pentyl alcohol, isopentyl alcohol, Alkyl alcohols such as 3-pentyl alcohol; 2-methoxyethanol, 2-ethoxyethanol, 2-butoxyethanol, 2- (2-methoxyethoxy) ethanol, 2-methoxy-1-methylethanol, 2-methoxy-1,1 -Dimethylethanol, 2-ethoxy-1,1-dimethylethanol, 2-isopropoxy-1,1-dimethylethanol, 2-butoxy-1,1-dimethylethanol, 2- (2-methoxyethoxy) -1,1 Dimethylethanolamine, 2-propoxy-1,1-diethylethanolamine, 2-s-butoxy-1,1-diethyl ethanol, ether alcohols such as 3-methoxy-1,1-dimethyl propanol.
- glycol compound examples include 1,2-ethanediol, 1,2-propanediol, 1,3-propanediol, 2,4-hexanediol, 2,2-dimethyl-1,3-propanediol, 2,2 -Diethyl-1,3-propanediol, 1,3-butanediol, 2,4-butanediol, 2,2-diethyl-1,3-butanediol, 2-ethyl-2-butyl-1,3-propane Diol, 2,4-pentanediol, 2-methyl-1,3-propanediol, 2-methyl-2,4-pentanediol, 2,4-hexanediol, 2,4-dimethyl-2,4-pentanediol Etc.
- ⁇ -diketone compound examples include acetylacetone, hexane-2,4-dione, 5-methylhexane-2,4-dione, heptane-2,4-dione, 2-methylheptane-3,5-dione, Alkyl-substituted ⁇ -diketones such as 2,6-dimethylheptane-3,5-dione; 1,1,1-trifluoropentane-2,4-dione, 1,1,1-trifluoro-5,5- Fluorine substitution such as dimethylhexane-2,4-dione, 1,1,1,5,5,5-hexafluoropentane-2,4-dione, 1,3-diperfluorohexylpropane-1,3-dione Alkyl ⁇ -diketones; 1,1,5,5-tetramethyl-1-methoxyhexane-2,4-dione, 2,2,6,6-tetramethyl-1-meth
- cyclopentadiene compound examples include cyclopentadiene, methylcyclopentadiene, ethylcyclopentadiene, propylcyclopentadiene, isopropylcyclopentadiene, butylcyclopentadiene, second butylcyclopentadiene, isobutylcyclopentadiene, tert-butylcyclopentadiene, dimethylcyclopentadiene.
- organic amine compound examples include methylamine, ethylamine, propylamine, isopropylamine, butylamine, secondary butylamine, tertiary butylamine, isobutylamine, dimethylamine, diethylamine, and dipropylamine. , Diisopropylamine, ethylmethylamine, propylmethylamine, isopropylmethylamine And the like.
- the other precursor is preferably a compound having similar thermal and / or oxidative decomposition behavior to the aluminum compound of the present invention, and in the case of the cocktail source method, the aluminum compound of the present invention.
- the similar behavior of heat and / or oxidative decomposition those that do not undergo alteration due to chemical reaction during mixing are preferred.
- examples of the precursor containing titanium, zirconium or hafnium include compounds represented by the following general formulas (II-1) to (II-5).
- M 1 represents titanium, zirconium or hafnium, and R a and R b each independently may be substituted with a halogen atom, and may contain an oxygen atom in the chain.
- R c represents an alkyl group having 1 to 8 carbon atoms
- R d represents an optionally branched alkylene group having 2 to 18 carbon atoms
- R e and R f are each independently R 1 represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms
- R g , R h , R k and R j each independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms
- p is 0 to 4
- Q represents 0 or 2
- r represents an integer of 0 to 3
- s represents an integer of 0 to 4
- t represents an integer of 1 to 4.
- alkyl group examples include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, sec-butyl, isobutyl, amyl, isoamyl, sec-amyl, sec-amyl, hexyl, cyclohexyl, 1-methylcyclohexyl, heptyl, 3- Heptyl, isoheptyl, tertiary heptyl, n-octyl, isooctyl, tertiary octyl, 2-ethylhexyl, trifluoromethyl, perfluorohexyl, 2-methoxyethyl, 2-ethoxyethyl, 2-
- alkyl group having 1 to 8 carbon atoms represented by R c examples include methyl, ethyl, propyl, isopropyl, butyl, secondary butyl, tertiary butyl, isobutyl, amyl, isoamyl, secondary amyl, tertiary amyl. Hexyl, 1-ethylpentyl, cyclohexyl, 1-methylcyclohexyl, heptyl, isoheptyl, tertiary heptyl, n-octyl, isooctyl, tertiary octyl, 2-ethylhexyl and the like.
- the alkylene group having 2 to 18 carbon atoms which may be branched and represented by R d is a group given by glycol, and examples of the glycol include 1,2-ethanediol, 1,2- Propanediol, 1,3-propanediol, 1,3-butanediol, 2,4-hexanediol, 2,2-dimethyl-1,3-propanediol, 2,2-diethyl-1,3-propanediol, 2,2-diethyl-1,3-butanediol, 2-ethyl-2-butyl-1,3-propanediol, 2,4-pentanediol, 2-methyl-1,3-propanediol, 1-methyl- 2,4-pentanediol and the like can be mentioned.
- Examples of the alkyl group having 1 to 3 carbon atoms represented by R e and R f include methyl, ethyl, propyl, and 2-propyl, and are represented by R g , R h , R j, and R k.
- Examples of the alkyl group having 1 to 4 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, secondary butyl, tertiary butyl, and isobutyl.
- Examples of the precursor containing rare earth elements include compounds represented by the following general formulas (III-1) to (III-3).
- R a and R b each independently represents an alkyl group having 1 to 20 carbon atoms which may be substituted with a halogen atom and may contain an oxygen atom in the chain
- R c represents an alkyl group having 1 to 8 carbon atoms
- R e and R f each independently represents a hydrogen atom or an alkyl group having 1 to 3 carbon atoms
- R g and R j each represents Independently, it represents an alkyl group having 1 to 4 carbon atoms
- p ′ represents an integer of 0 to 3
- r ′ represents an integer of 0 to 2.
- the rare earth atom represented by M 2 includes scandium, yttrium, lanthanum, cerium, praseodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium , Erbium, thulium, ytterbium, and lutetium, and the groups represented by R a , R b , R c , R e , R f , R g, and R j are groups exemplified for the precursor containing titanium. Is mentioned.
- the raw material for forming a thin film of the present invention may contain a nucleophilic reagent as needed to impart stability of the aluminum compound of the present invention and other precursors.
- the nucleophilic reagent include ethylene glycol ethers such as glyme, diglyme, triglyme and tetraglyme, 18-crown-6, dicyclohexyl-18-crown-6, 24-crown-8, dicyclohexyl-24-crown-8.
- Crown ethers such as dibenzo-24-crown-8, ethylenediamine, N, N′-tetramethylethylenediamine, diethylenetriamine, triethylenetetramine, tetraethylenepentamine, pentaethylenehexamine, 1,1,4,7,7- Polyamines such as pentamethyldiethylenetriamine, 1,1,4,7,10,10-hexamethyltriethylenetetramine and triethoxytriethyleneamine, cyclic polyamines such as cyclam and cyclen, pyridine, pyrrolidine and pipette Heterocyclic compounds such as gin, morpholine, N-methylpyrrolidine, N-methylpiperidine, N-methylmorpholine, tetrahydrofuran, tetrahydropyran, 1,4-dioxane, oxazole, thiazole, oxathiolane, methyl acetoacetate, ethyl acetoacetate, ⁇ -ketoest
- the raw material for forming a thin film according to the present invention should contain as little impurities metal elements as possible, impurities halogen such as impurity chlorine, and impurities organic components as much as possible.
- the impurity metal element content is preferably 100 ppb or less for each element, more preferably 10 ppb or less, and the total amount is preferably 1 ppm or less, more preferably 100 ppb or less.
- the content of alkali metal elements, alkaline earth metal elements, and related elements that affect the electrical characteristics of the resulting thin film may be reduced. is necessary.
- the impurity halogen content is preferably 100 ppm or less, more preferably 10 ppm or less, and still more preferably 1 ppm or less.
- the total amount of impurity organic components is preferably 500 ppm or less, more preferably 50 ppm or less, and still more preferably 10 ppm or less.
- each of the precursor, organic solvent, and nucleophilic reagent reduces the water content. Therefore, it is better to remove moisture as much as possible before use.
- the moisture content of each of the precursor, the organic solvent, and the nucleophilic reagent is preferably 10 ppm or less, and more preferably 1 ppm or less.
- the raw material for forming a thin film of the present invention contains as few particles as possible in order to reduce or prevent particle contamination of the formed thin film.
- the number of particles larger than 0.3 ⁇ m is preferably 100 or less in 1 ml of the liquid phase, and larger than 0.2 ⁇ m.
- the number of particles is more preferably 1000 or less in 1 ml of the liquid phase, and the number of particles larger than 0.2 ⁇ m is further preferably 100 or less in 1 ml of the liquid phase.
- the thin film production method of the present invention for producing a thin film using the thin film forming raw material of the present invention includes vapors obtained by vaporizing the aluminum compound of the present invention and other precursors used as necessary, and if necessary.
- the reactive gas used is introduced by a CVD method in which a reactive gas to be used is introduced into a film forming chamber in which the substrate is installed, and then a precursor is decomposed and / or chemically reacted on the substrate to grow and deposit a thin film on the substrate surface. .
- CVD method in which a reactive gas to be used is introduced into a film forming chamber in which the substrate is installed, and then a precursor is decomposed and / or chemically reacted on the substrate to grow and deposit a thin film on the substrate surface.
- Examples of the reactive gas used as necessary include oxygen, ozone, nitrogen dioxide, nitric oxide, water vapor, hydrogen peroxide, formic acid, acetic acid, acetic anhydride, etc.
- Examples of reducing substances include hydrogen, and examples of nitrides that can be used include organic amine compounds such as monoalkylamines, dialkylamines, trialkylamines, and alkylenediamines, hydrazine, and ammonia. Can be used alone or in combination of two or more.
- examples of the transport and supply method include the gas transport method, the liquid transport method, the single source method, and the cocktail sauce method described above.
- the above deposition methods include thermal CVD in which a raw material gas or a raw material gas and a reactive gas are reacted only by heat to deposit a thin film, plasma CVD using heat and plasma, photo CVD using heat and light, heat In addition, optical plasma CVD using light and plasma, and ALD in which the deposition reaction of CVD is divided into elementary processes and deposition is performed stepwise at the molecular level.
- Examples of the material of the substrate include silicon; ceramics such as silicon nitride, titanium nitride, tantalum nitride, titanium oxide, titanium nitride, ruthenium oxide, zirconium oxide, hafnium oxide, and lanthanum oxide; glass; metals such as metal ruthenium.
- Examples of the shape of the substrate include a plate shape, a spherical shape, a fiber shape, and a scale shape, and the surface of the substrate may be a flat surface or a three-dimensional structure such as a trench structure.
- reaction temperature base
- reaction pressure a deposition rate, etc.
- the reaction temperature is preferably 100 ° C. or higher, more preferably 150 ° C. to 400 ° C., which is the temperature at which the aluminum compound of the present invention sufficiently reacts.
- the reaction pressure is preferably from atmospheric pressure to 10 Pa in the case of thermal CVD and photo CVD, and is preferably 2000 Pa to 10 Pa in the case of using plasma.
- the deposition rate can be controlled by the raw material supply conditions (vaporization temperature, vaporization pressure), reaction temperature, and reaction pressure. When the deposition rate is large, the properties of the obtained thin film may be deteriorated. When the deposition rate is small, productivity may be problematic. Therefore, 0.01 to 100 nm / min is preferable, and 1 to 50 nm / min is more preferable. In the case of the ALD method, the number of cycles is controlled so as to obtain a desired film thickness.
- a raw material introduction step is performed in which the thin film forming raw material is vaporized into vapor by the above-described transport supply method, and the vapor is introduced into the deposition chamber.
- a precursor thin film is formed on the surface of the substrate by the aluminum compound introduced into the deposition reaction part (precursor thin film forming step).
- heat may be applied by heating the substrate or heating the deposition reaction part.
- the precursor thin film formed in this step is an aluminum oxide thin film or a thin film formed by decomposition and / or reaction of a part of the aluminum compound, and has a composition different from that of the target aluminum oxide thin film.
- the substrate temperature when this step is performed is preferably room temperature to 500 ° C.
- unreacted aluminum compound gas and by-product gas are exhausted from the deposition reaction part (exhaust process).
- the unreacted aluminum compound gas or by-product gas is completely exhausted from the deposition reaction part, but it is not necessarily exhausted completely.
- the exhaust method include a method of purging the system with an inert gas such as nitrogen, helium, and argon, a method of exhausting the system by depressurizing the system, a method combining these, and the like.
- the degree of pressure reduction is preferably 0.01 to 300 Pa, more preferably 0.01 to 100 Pa.
- an oxidizing gas is introduced into the deposition reaction portion, and an aluminum oxide thin film is formed from the precursor thin film obtained in the precursor thin film forming step by the action of the oxidizing gas or the oxidizing gas and heat ( Aluminum oxide thin film forming step).
- the temperature when heat is applied in this step is preferably room temperature to 500 ° C, more preferably 150 to 500 ° C.
- the aluminum compound of the present invention has good reactivity with an oxidizing gas, and an aluminum oxide thin film can be obtained.
- the thin film deposition is performed by a series of operations including the raw material introduction step, the precursor thin film formation step, the exhaust step, and the aluminum oxide thin film formation step. May be repeated one or more times until a thin film having a required film thickness is obtained.
- the next cycle is performed after exhausting unreacted aluminum compound gas and oxidizing gas, and further by-produced gas from the deposition reaction portion in the same manner as the exhaust process. preferable.
- energy such as plasma, light, or voltage may be applied.
- the timing for applying these energies is not particularly limited. For example, when introducing an aluminum compound gas in the raw material introduction step, heating in the precursor thin film formation step or aluminum oxide thin film formation step, It may be at the time of exhausting, at the time of introducing an oxidizing gas in the aluminum oxide thin film forming step, or between the above steps.
- annealing may be performed in an inert atmosphere, an oxidizing atmosphere, or a reducing atmosphere in order to obtain better electrical characteristics.
- a reflow process may be provided.
- the temperature in this case is usually 200 to 1000 ° C., preferably 250 to 500 ° C.
- a well-known chemical vapor deposition apparatus can be used as a device for producing a thin film using the raw material for forming a thin film of the present invention.
- the apparatus include an apparatus capable of supplying a precursor as shown in FIG. 1 by bubbling supply, an apparatus having a vaporization chamber as shown in FIG. 2, and a reactive gas as shown in FIG. 3 or FIG. And an apparatus capable of performing plasma treatment.
- the present invention is not limited to the single wafer type apparatus as shown in FIGS. 1, 2, 3 and 4, and an apparatus capable of simultaneously processing a large number of sheets using a batch furnace can also be used.
- a thin film manufactured using the raw material for forming a thin film of the present invention can be selected from other precursors, reactive gases, and manufacturing conditions as appropriate, so that a desired type of metal, oxide ceramics, nitride ceramics, glass, etc. It can be a thin film.
- the composition of the thin film to be manufactured include an aluminum thin film, an aluminum nitride thin film, an aluminum oxide thin film, and an aluminum-containing composite oxide thin film.
- the aluminum-containing composite oxide thin film include composite oxide thin films represented by AlSi x O y , ZrAl x SiO y , TiAl x SiO y , and HfAl x SiO y .
- x and y are not particularly limited, and a desired value can be selected. Examples thereof include AlSi 0.8 to 1.2 O 3.1 to 3.9 , ZrAl 2 SiO 7 , TiAl 2 SiO 7 , and HfAl 2 SiO 7 . . These thin films are LSI wiring materials, hard coating films for machine parts and tools, semiconductor memory insulating films, gate insulating films, dielectric films, hard disk MR heads and other electronic parts, optical communication circuits and other optical components. Widely used in the production of glass, catalysts, etc.
- Example 1 Compound No. 1 Production of 1 Under an argon gas atmosphere, 15.2 g of aluminum (III) chloride and 38.6 g of dehydrated hexane were charged into a reaction flask and stirred in a water-cooled bath. Thereto, 25.3 g of ethylmethylamine was added dropwise and stirred for 2 hours. Thereafter, the mixture was cooled to 15 ° C. with an ice-cooled bath, and 150.2 g of n-butyllithium hexane solution (concentration: 1.6 mol / L) was added dropwise. After completion of dropping, the temperature was returned to room temperature and stirred for about 16 hours.
- aluminum (III) chloride and 38.6 g of dehydrated hexane were charged into a reaction flask and stirred in a water-cooled bath. Thereto, 25.3 g of ethylmethylamine was added dropwise and stirred for 2 hours. Thereafter, the mixture was cooled to 15 ° C. with an ice
- Example 2 Compound No. Production of 2 Under an argon gas atmosphere, 5.3 g of aluminum (III) chloride, 10.1 g of dehydrated hexane, and 14.2 g of tetrahydrofuran were charged in a reaction flask and stirred in a water-cooled bath. There, 12.2 g of isopropylmethylamine was dropped and stirred for 1 hour. Thereafter, the mixture was cooled to 5 ° C. with an ice-cooled bath, and 52.5 g of n-butyllithium hexane solution (concentration: 1.6 mol / L) was added dropwise. After completion of the dropping, the temperature was returned to room temperature and stirred for about 2 hours.
- aluminum (III) chloride 10.1 g of dehydrated hexane
- 14.2 g of tetrahydrofuran were charged in a reaction flask and stirred in a water-cooled bath. There, 12.2 g of isopropylmethylamine was dropped and stirred for
- Comparative Compound 1 exhibited ignitability in the atmosphere.
- a compound exhibiting ignitability is difficult to handle as a raw material for chemical vapor deposition from the viewpoint of safety.
- the aluminum compound No. 1 of the present invention It was found that 1 and 2 and comparative compounds 2 and 3 did not show ignitability and could be used safely in the atmosphere.
- the aluminum compound No. 1 of the present invention was obtained. 1 and no. 2 was found to exhibit a thermal stability of about 30 ° C. higher than that of Comparative Compound 2. In addition, the aluminum compound No. 1 of the present invention. 1 and no. 2 was found to exhibit a thermal stability of about 140 ° C. higher than that of Comparative Compound 3.
- a compound having high thermal stability is advantageous because when it is used as a raw material for chemical vapor deposition, film formation can be performed at a high temperature and a high-quality thin film can be obtained.
- the comparative compound 2 is a solid compound under the condition of 10 ° C. 1 and no. 2 was found to be a low melting point compound that was liquid under conditions of 10 ° C.
- the aluminum compound No. 1 of the present invention. 1 was also found to have a lower viscosity at 25 ° C. than Comparative Compound 2.
- a compound with a low melting point is advantageous because it can be stably transported in a liquid state when used as a raw material for chemical vapor deposition, and a compound with a low viscosity is particularly excellent because it is easy to transport. ing.
- Example 3 Production of aluminum oxide thin film by ALD method An aluminum oxide thin film was produced on a silicon wafer as a substrate by the ALD method under the following conditions using the apparatus shown in FIG. About the obtained thin film, when the film thickness measurement by X-ray reflectivity method, the thin film structure and the thin film composition were confirmed by X-ray diffraction method and X-ray photoelectron spectroscopy, the film thickness was 4.1 nm. Was aluminum oxide (Al 2 O 3 ), and the carbon content was less than the detection lower limit of 0.1 atom%. The film thickness obtained per cycle was 0.08 to 0.09 nm.
- a reactive gas is introduced into the film forming chamber and reacted with the deposit (i) at a system pressure of 80 Pa for 10 seconds.
- the unreacted raw material is removed from the film forming chamber by argon purging for 5 seconds.
- Example 4 Production of aluminum oxide thin film by ALD method An aluminum oxide thin film was produced on a silicon wafer as a substrate by the ALD method under the following conditions using the apparatus shown in FIG. About the obtained thin film, when the film thickness measurement by X-ray reflectivity method and the thin film structure and thin film composition were confirmed by X-ray photoelectron spectroscopy, the film thickness was 3.1 nm, and the film composition was aluminum oxide (Al 2 O 3 ) and the carbon content was 0.2 atom%. The film thickness obtained per cycle was 0.06 nm.
- Reaction temperature (substrate temperature): 260 to 420 ° C., reactive gas: ozone gas
- Process A series of steps consisting of the following (1) to (4) was set as one cycle and repeated 50 cycles.
- Raw material container temperature 45 ° C.
- vapor of a chemical vapor deposition raw material vaporized under the conditions of a raw material container pressure of 80 Pa is introduced into the film forming chamber and deposited on the substrate surface at a system pressure of 80 Pa for 10 seconds. .
- the unreacted raw material is removed from the film forming chamber by argon purging for 15 seconds.
- a reactive gas is introduced into the film forming chamber and reacted with the deposit of (1) at a system pressure of 80 Pa for 10 seconds.
- the unreacted raw material is removed from the film forming chamber by argon purging for 15 seconds.
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Abstract
Description
また本発明は、上記薄膜形成用原料を気化させて得た、上記アルミニウム化合物を含有する蒸気を、基体が設置された成膜チャンバー内に導入し、該アルミニウム化合物を分解及び/又は化学反応させて該基体の表面にアルミニウムを含有する薄膜を形成する薄膜の製造方法を提供するものである。
本発明のアルミニウム化合物は、上記一般式(I)で表されるものであり、CVD法等の気化工程を有する薄膜製造方法のプレカーサとして好適なものである。また、該化合物は、熱安定性が高いことから特にALD法に用いられるプレカーサとして好適なものである。
本発明の薄膜形成用原料は、上記説明のとおり、プレカーサであるアルミニウム化合物の物性がCVD法、ALD法に好適であるので、特に化学気相成長用原料(以下、CVD用原料ということもある)として有用である。
また、堆積速度は、原料の供給条件(気化温度、気化圧力)、反応温度、反応圧力によりコントロールすることが出来る。堆積速度は、大きいと得られる薄膜の特性が悪化する場合があり、小さいと生産性に問題を生じる場合があるので、0.01~100nm/分が好ましく、1~50nm/分がより好ましい。また、ALD法の場合は、所望の膜厚が得られるようにサイクルの回数でコントロールされる。
アルゴンガス雰囲気下で、反応フラスコに塩化アルミニウム(III)15.2gと、脱水処理したヘキサン38.6gとを仕込み水冷バスにて攪拌した。そこに、エチルメチルアミン25.3gを滴下し、2時間攪拌した。その後、氷冷バスにて15℃まで冷却させ、n-ブチルリチウムヘキサン溶液(濃度:1.6mol/L)150.2gを滴下した。滴下終了後、室温に戻して約16時間撹拌させた。続いて、N,N,N'-トリメチルエチレンジアミン11.9gを滴下し、約20時間攪拌させ、ろ過を行った。得られたろ液からヘキサンを除去し、液体残渣を得た。その液体残渣を、40Paの減圧下、バス105℃で蒸留し、塔頂温度65℃にて留出した化合物を得た。この精製による回収率は57%であった。得られた化合物は淡黄色の液体であった。元素分析及び1H-NMR分析の結果、得られた化合物は、化合物No.1と同定された。これらの分析結果を以下に示す。以下には、TG-DTAの結果も併せて示す。
(1)元素分析(金属分析:ICP-AES)
アルミニウム:11.1質量%(理論値;11.04質量%)、C:50.17質量%、H:11.45質量% 、N:22.61質量%(理論値;C:54.07質量%、H:11.96質量%、N:22.93質量%)
(2)1H-NMR(溶媒:重ベンゼン)(ケミカルシフト:多重度:H数)
(1.239ppm:t:6)、(1.778ppm:s:6)、(2.161ppm:t:2)、(2.704ppm:t:2)、(2.796ppm:s:6)、(2.832ppm:s:3)、(3.029ppm:m:2)、(3.182ppm:m:2)
(3)TG-DTA
TG-DTA(Ar 100ml/min、 10℃/min昇温、サンプル量 9.543mg)
50質量%減少温度 170℃
アルゴンガス雰囲気下で、反応フラスコに塩化アルミニウム(III)を5.3g、脱水処理したヘキサン10.1gと、テトラヒドロフラン14.2gとを仕込み水冷バスにて攪拌した。そこに、イソプロピルメチルアミン12.2g滴下し、1時間攪拌した。その後、氷冷バスにて5℃まで冷却させ、n-ブチルリチウムヘキサン溶液(濃度:1.6mol/L)52.5gを滴下した。滴下終了後、室温に戻して約2時間撹拌させた。続いて、N,N,N'-トリメチルエチレンジアミン4.2gを滴下し、約13時間攪拌させ、ろ過を行った。得られたろ液からヘキサンおよびテトラヒドロフランを除去し、液体残渣を得た。その液体残渣を、40Paの減圧下、バス115℃で蒸留し、塔頂温度75℃にて留出した化合物を得た。この精製による回収率は45%であった。得られた化合物は淡黄色の液体であった。元素分析及び1H-NMR分析の結果、得られた化合物は、化合物No.2と同定された。これらの分析結果を以下に示す。以下には、TG-DTAの結果も併せて示す。
(1)元素分析(金属分析:ICP-AES)
アルミニウム:9.98質量%(理論値;9.90質量%)、C:54.82質量%、H:11.59質量% 、N:20.24質量%(理論値;C:57.32質量%、H:12.21質量%、N:20.57質量%)
(2)1H-NMR(溶媒:重ベンゼン)(ケミカルシフト:多重度:H数)
(1.299ppm:d:6)、(1.306ppm:d:6)、(1.817ppm:s:6)、(2.200ppm:t:2)(2.658ppm:s:6)、(2.698ppm:t:2)、(2.817ppm:s:3)、(3.478ppm:m:2)
(3)TG-DTA
TG-DTA(Ar 100ml/min、 10℃/min昇温、サンプル量 9.903mg)
50質量%減少温度 180℃
本発明のアルミニウム化合物No.1及びNo.2並びに以下に示す比較化合物1~3について、大気中に放置することで自然発火性の有無を確認した。具体的には、これらの化合物を大気中に放置してから、1時間経過後までに発火したものを自然発火性あり、1時間経過しても発火しなかったものを自然発火性なしと評価した。結果を表1に示す。
本発明のアルミニウム化合物No.1及び2並びに比較化合物2及び3について、DSC測定装置を用いて熱分解が発生する温度を測定することで、各化合物の熱安定性を確認した。結果を表2に示す。
本発明のアルミニウム化合物No.1及び2並びに比較化合物2について、目視によって常圧10℃における化合物の状態を観察した。また、AMVn自動マイクロ粘度計(Anton Paar社製)を用いて常圧25℃での各化合物の粘度を測定した。結果を表3に示す。
化合物No.1を化学気相成長用原料とし、図1に示す装置を用いて以下の条件のALD法により、基体であるシリコンウエハ上に酸化アルミニウム薄膜を製造した。得られた薄膜について、X線反射率法による膜厚測定、X線回折法及びX線光電子分光法による薄膜構造及び薄膜組成の確認を行ったところ、膜厚は4.1nmであり、膜組成は酸化アルミニウム(Al2O3)であり、炭素含有量は検出下限である0.1atom%よりも少なかった。1サイクル当たりに得られる膜厚は、0.08~0.09nmであった。
(条件)
反応温度(基体温度):260~420℃、反応性ガス:オゾンガス
(工程)
下記(i)~(iv)からなる一連の工程を1サイクルとして、50サイクル繰り返した。
(i)原料容器温度:室温(23℃)、原料容器内圧力80Paの条件で気化させた化学気相成長用原料の蒸気を成膜チャンバー内に導入し、系圧 80Paで10秒間、基体表面に堆積させる。
(ii)15秒間のアルゴンパージにより、未反応原料を成膜チャンバー内から除去する。
(iii)反応性ガスを成膜チャンバー内に導入し、系圧力80Paで10秒間、(i)の堆積物と反応させる。
(iv)5秒間のアルゴンパージにより、未反応原料を成膜チャンバー内から除去する。
化合物No.2を化学気相成長用原料とし、図1に示す装置を用いて以下の条件のALD法により、基体であるシリコンウエハ上に酸化アルミニウム薄膜を製造した。得られた薄膜について、X線反射率法による膜厚測定、X線光電子分光法による薄膜構造及び薄膜組成の確認を行ったところ、膜厚は3.1nmであり、膜組成は酸化アルミニウム(Al2O3)であり、炭素含有量は0.2atom%であった。また1サイクル当たりに得られる膜厚は、0.06nmであった。
(条件)
反応温度(基体温度):260~420℃、反応性ガス:オゾンガス
(工程)
下記(1)~(4)からなる一連の工程を1サイクルとして、50サイクル繰り返した。(1)原料容器温度:45℃、原料容器内圧力80Paの条件で気化させた化学気相成長用原料の蒸気を成膜チャンバー内に導入し、系圧80Paで10秒間、基体表面に堆積させる。
(2)15秒間のアルゴンパージにより、未反応原料を成膜チャンバー内から除去する。
(3)反応性ガスを成膜チャンバー内に導入し、系圧力80Paで10秒間、(1)の堆積物と反応させる。
(4)15秒間のアルゴンパージにより、未反応原料を成膜チャンバー内から除去する。
Claims (5)
- 上記一般式(I)において、R1及びR2がエチル基である請求項1に記載のアルミニウム化合物。
- 上記一般式(I)において、R3がメチル基である請求項1及び2のいずれか一項に記載のアルミニウム化合物。
- 請求項1~3のいずれか一項に記載のアルミニウム化合物を含有してなる薄膜形成用原料。
- 請求項4に記載の薄膜形成用原料を気化させて得た、上記アルミニウム化合物を含有する蒸気を、基体が設置された成膜チャンバー内に導入し、該アルミニウム化合物を分解及び/又は化学反応させて該基体の表面にアルミニウムを含有する薄膜を形成する薄膜の製造方法。
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