WO2014103494A1 - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
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- WO2014103494A1 WO2014103494A1 PCT/JP2013/078968 JP2013078968W WO2014103494A1 WO 2014103494 A1 WO2014103494 A1 WO 2014103494A1 JP 2013078968 W JP2013078968 W JP 2013078968W WO 2014103494 A1 WO2014103494 A1 WO 2014103494A1
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- polishing
- acid
- polishing composition
- metal substrate
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- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- 229960002898 threonine Drugs 0.000 description 1
- 229940034208 thyroxine Drugs 0.000 description 1
- XUIIKFGFIJCVMT-UHFFFAOYSA-N thyroxine-binding globulin Natural products IC1=CC(CC([NH3+])C([O-])=O)=CC(I)=C1OC1=CC(I)=C(O)C(I)=C1 XUIIKFGFIJCVMT-UHFFFAOYSA-N 0.000 description 1
- UAXOELSVPTZZQG-UHFFFAOYSA-N tiglic acid Natural products CC(C)=C(C)C(O)=O UAXOELSVPTZZQG-UHFFFAOYSA-N 0.000 description 1
- 125000001425 triazolyl group Chemical group 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- XVZMLSWFBPLMEA-UHFFFAOYSA-N trimethoxy(2-pyridin-2-ylethyl)silane Chemical compound CO[Si](OC)(OC)CCC1=CC=CC=N1 XVZMLSWFBPLMEA-UHFFFAOYSA-N 0.000 description 1
- FTDRQHXSYGDMNJ-UHFFFAOYSA-N trimethoxy(3-pyrrol-1-ylpropyl)silane Chemical compound CO[Si](OC)(OC)CCCN1C=CC=C1 FTDRQHXSYGDMNJ-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- AQLJVWUFPCUVLO-UHFFFAOYSA-N urea hydrogen peroxide Chemical compound OO.NC(N)=O AQLJVWUFPCUVLO-UHFFFAOYSA-N 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 239000004474 valine Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1436—Composite particles, e.g. coated particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
Definitions
- the present invention relates to a polishing composition.
- CMP Chemical mechanical polishing
- a barrier layer and a conductive material layer are sequentially formed on an insulating film having a trench. Then, by chemical mechanical polishing (CMP), at least a portion of the conductive material layer located outside the trench (an outer portion of the conductive material layer) and a portion of the barrier layer located outside the trench (the outer portion of the barrier layer) Remove.
- CMP chemical mechanical polishing
- the polishing for removing at least the outer portion of the conductive material layer and the outer portion of the barrier layer is usually performed in a first polishing step and a second polishing step.
- the first polishing step a part of the outer portion of the conductive material layer is removed to expose the upper surface of the barrier layer.
- the subsequent second polishing step at least the remaining portion of the outer portion of the conductive material layer and the outer portion of the barrier layer are removed in order to expose the insulating film and obtain a flat surface.
- CMP for forming the wiring of such a semiconductor device
- a polishing composition containing a polishing accelerator such as an acid and an oxidizing agent it is common to use a polishing composition containing a polishing accelerator such as an acid and an oxidizing agent, and further containing abrasive grains as necessary. is there.
- a polishing composition to which a metal anticorrosive is further added in order to improve the flatness of the polished object after polishing, that is, to suppress dishing in which the wiring portion is overpolished.
- JP-A-8-83780 discloses a polishing composition containing aminoacetic acid and / or amidosulfuric acid, an oxidizing agent, benzotriazole and water.
- an object of the present invention is to provide a polishing composition capable of suppressing scratches on the surface of a metal substrate while suppressing dishing of the metal substrate that is an object to be polished.
- the present inventor has conducted earnest research. As a result, it includes a surface modifying group having a functional group at one end that suppresses dissolution of the metal substrate by adsorbing to the metal substrate, and metal oxide particles on which the surface modifying group is immobilized. It has been found that the above problems can be solved by a polishing composition containing novel abrasive grains. And based on the said knowledge, it came to complete this invention.
- the present invention comprises a surface modifying group having a functional group at one end that suppresses dissolution of the metal substrate by adsorbing to the metal substrate, and metal oxide particles on which the surface modifying group is immobilized,
- the present invention includes a surface modification group having a functional group at one end that suppresses dissolution of the metal substrate by adsorbing to the metal substrate, and metal oxide particles on which the surface modification group is immobilized.
- a polishing composition comprising functional abrasive grains and water. By setting it as such a structure, it becomes the polishing composition which can suppress the scratch on the surface of a metal substrate, suppressing the dishing of the metal substrate which is a grinding
- the functional group in the surface modification group is a metal substrate. It is considered that the metal substrate is adsorbed and the dissolution of the metal from the metal substrate is suppressed, and as a result, the dishing of the metal substrate can be suppressed.
- scratches it is considered that the dispersibility of functional abrasive grains is improved by surface modification of metal oxide particles, and there is an effect of suppressing scratches on the metal substrate surface caused by aggregated abrasive grains. It is done.
- the said mechanism is based on estimation and this invention is not limited to the said mechanism at all.
- the metal substrate to be a polishing object of the present invention preferably has a conductive material layer, and optionally has a barrier layer and an insulating film.
- the material contained in the conductive material layer is not particularly limited, and examples thereof include metals such as copper, aluminum, hafnium, cobalt, nickel, titanium, and tungsten.
- the metal may be contained in the conductive material layer in the form of an alloy or a metal compound. Copper or copper alloy is preferable. These materials may be used alone or in combination of two or more.
- the material contained in the barrier layer is not particularly limited, and examples thereof include noble metals such as tantalum, titanium, tungsten, cobalt, gold, silver, platinum, palladium, rhodium, ruthenium, iridium and osmium. These metals may be contained in the barrier layer in the form of an alloy or a metal compound. These metals may be used alone or in combination of two or more.
- Examples of the material contained in the insulating film include materials containing Si such as TEOS (tetraethoxysilane).
- the functional abrasive contained in the polishing composition of the present invention has an action of mechanically polishing a metal substrate and suppresses dishing of the metal substrate.
- the functional abrasive has a good dispersibility since the metal oxide particles are surface-modified. Therefore, it also has an effect of suppressing scratches on the surface of the metal substrate caused by the aggregated abrasive grains.
- the functional abrasive includes a surface modifying group having a functional group at one end that suppresses dissolution of the metal substrate by adsorbing to the metal substrate, and a metal oxide particle on which the surface modifying group is immobilized. And including.
- the form of immobilization is not particularly limited, but a form in which the surface modifying group is chemically bonded to the metal oxide particles is preferable.
- Metal oxide particles Specific examples of the metal oxide particles include silica, alumina, ceria, titania and the like.
- the metal oxide particles may be used alone or in combination of two or more.
- the abrasive grains may be commercially available products or synthetic products.
- silica is preferable, and colloidal silica is particularly preferable.
- the surface modification group according to the present invention has a functional group (hereinafter also simply referred to as a functional group) that suppresses dissolution of the metal substrate by adsorbing to the metal substrate at one end. Furthermore, it is preferable to have a divalent linking group (hereinafter also simply referred to as a linking group) for linking the functional group and the metal oxide particles.
- Examples of functional groups include, for example, acyl groups, acetyl groups, aldehyde groups, epoxy groups, carboxyl groups, sulfo groups, mercapto groups, nitro groups, phosphate groups, amide groups, amino groups, cyano groups, carbonyl groups, imino groups.
- the functional abrasive according to the present invention may have only one kind of these functional groups or a plurality of kinds. Further, these functional groups may or may not have a substituent.
- substituents include, for example, alkyl group, cycloalkyl group, aralkyl group, alkoxy group, aryl group, aryloxy group, halogen atom (Cl, Br, F), alkoxycarbonyl group, alkylthio group, arylthio group, amino group.
- At least one selected from the group consisting of a mercapto group, a cyano group, a phenyl group, a dihydroimidazolyl group, a benzotriazolyl group, and a tetrazolyl group is preferable from the viewpoint of suppressing dishing.
- linking group examples include a divalent hydrocarbon group which may have a substituent, a divalent linking group containing a hetero atom, and an alkylenesiloxy group.
- the term “having a substituent” for the hydrocarbon group means that part or all of the hydrogen atoms in the hydrocarbon group are substituted with groups or atoms other than hydrogen atoms.
- the hydrocarbon group is preferably an aliphatic hydrocarbon group.
- An aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity.
- the aliphatic hydrocarbon group may be saturated or unsaturated, and is usually preferably saturated.
- aliphatic hydrocarbon group in the divalent hydrocarbon group examples include a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group containing a ring in the structure, and the like. It is done.
- the linear or branched aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 8, more preferably 1 to 5.
- a linear alkylene group is preferable. Specifically, a methylene group (—CH 2 —), an ethylene group (— (CH 2 ) 2 —), a trimethylene group ( Propylene group) (— (CH 2 ) 3 —), tetramethylene group (butylene group) (— (CH 2 ) 4 —), pentamethylene group (pentylene group) (— (CH 2 ) 5 —) and the like. .
- the branched aliphatic hydrocarbon group is preferably a branched alkylene group, specifically, —CH (CH 3 ) —, —CH (CH 2 CH 3 ) —, —C (CH 3 ).
- Alkylmethylene groups such as 2- , —C (CH 3 ) (CH 2 CH 3 ) —, —C (CH 3 ) (CH 2 CH 2 CH 3 ) —, —C (CH 2 CH 3 ) 2 —; CH (CH 3 ) CH 2 —, —CH (CH 3 ) CH (CH 3 ) —, —C (CH 3 ) 2 CH 2 —, —CH (CH 2 CH 3 ) CH 2 —, —C (CH 2 Alkylethylene groups such as CH 3 ) 2 —CH 2 —; alkyl trimethylene groups such as —CH (CH 3 ) CH 2 CH 2 —, —CH 2 CH (CH 3 ) CH 2 —; —CH (CH 3 ) CH 2 CH
- the chain-like aliphatic hydrocarbon group may or may not have a substituent.
- substituents include an oxygen atom ( ⁇ O).
- Examples of the aliphatic hydrocarbon group including a ring in the structure include a cyclic aliphatic hydrocarbon group (a group obtained by removing two hydrogen atoms from an aliphatic hydrocarbon ring), and the cyclic aliphatic hydrocarbon group includes the chain described above. And a group that is bonded to the terminal of the chain-like aliphatic hydrocarbon group or intervenes in the middle of the chain-like aliphatic hydrocarbon group.
- the cyclic aliphatic hydrocarbon group preferably has 3 to 20 carbon atoms, and more preferably 3 to 12 carbon atoms.
- the cyclic aliphatic hydrocarbon group may be a polycyclic group or a monocyclic group.
- the monocyclic group is preferably a group in which two hydrogen atoms are removed from a monocycloalkane having 3 to 6 carbon atoms, and examples of the monocycloalkane include cyclopentane and cyclohexane.
- the polycyclic group a group in which two hydrogen atoms are removed from a polycycloalkane having 7 to 12 carbon atoms is preferable.
- Specific examples of the polycycloalkane include adamantane, norbornane, isobornane, tricyclodecane, tetra And cyclododecane.
- the cyclic aliphatic hydrocarbon group may or may not have a substituent.
- substituents include an alkyl group having 1 to 5 carbon atoms and an oxygen atom ( ⁇ O).
- the linking group is a divalent linking group containing a hetero atom
- examples of the divalent linking group containing a hetero atom include —O—, —C ( ⁇ O) —O—, —C ( ⁇ O) —, —O—C ( ⁇ O) —O—, —C ( ⁇ O) —NH—, —NH— (H may be substituted with a substituent such as an alkyl group or an acyl group), —S—.
- the divalent hydrocarbon group which may have a substituent include those similar to the hydrocarbon group which may have a substituent described above, and may have a straight chain, branched chain, or structure An aliphatic hydrocarbon group containing a ring therein is preferred.
- linking group is an alkylenesiloxy group
- alkylenesiloxy group examples include, for example, ethylenedimethoxysiloxy group (— (CH 2 ) 2 —Si (OCH 3 ) 2 —O—), propylene dimethoxysiloxy group (— (CH 2 ) 3 —Si (OCH 3 ) 2 —O—), butylene dimethoxysiloxy group (— (CH 2 ) 4 —Si (OCH 3 ) 2 —O—), ethylenediethoxysiloxy group (— (CH 2 ) 2 —Si ( OC 2 H 5 ) 2 —O—), propylene diethoxysiloxy group (— (CH 2 ) 3 —Si (OC 2 H 5 ) 2 —O—), butylene diethoxysiloxy group (— (CH 2 ) 4 — Si (OC 2 H 5 ) 2 —O—) and the like.
- linking groups ethylenedimethoxysiloxy group (— (CH 2 ) 2 —Si (OCH 3 ) 2 —O—), propylene dimethoxysiloxy group (— (CH 2 ) 3 —Si (OCH 3 ) 2 —O— ) Or a butylene dimethoxysiloxy group (— (CH 2 ) 4 —Si (OCH 3 ) 2 —O—).
- More preferable surface modifying groups include surface modifying groups having a propylene dimethoxysiloxy group as a linking group.
- Method for producing functional abrasive Although the manufacturing method in particular of the functional abrasive grain concerning this invention is not restrict
- silane coupling agent examples include aromatic silanes such as phenyltrimethoxysilane and phenyltriethoxysilane; 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3 -Epoxy silanes such as glycidoxypropyltriethoxysilane and 2- (3,4 epoxycyclohexyl) ethyltrimethoxysilane; 3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyldimethylethoxy Silane, 3-aminopropylmethyldiethoxysilane, 4-aminobutyltriethoxysilane, 3-aminopropyldiisopropylethoxysilane, 1-amino-2- (dimethylethoxysilyl) propane, (aminoethylamino) -3 Iso
- Organoalkoxysilane having a nitrogen-containing heterocyclic ring an organoalkoxysilane having a nitro group such as 3- (2,4-dinitrophenylamino) propyltriethoxysilane and 3- (triethoxysilylpropyl) -p-nitrobenzamide; Organoalkoxysilanes having a carboalkoxy group such as 2- (carbomethoxy) ethyltrimethoxysilane; organoalkoxysilanes having an aldehyde group such as triethoxysilylbutyraldehyde as organoalkoxysilanes having an aldehyde group Organoalkoxysilanes having a ketone group such as 2-hydroxy-4- (3-methyldiethoxysilylpropoxy) diphenylketone; 2-cyanoethyltriethoxysilane, 3-cyanopropylphenyldimethoxysilane, 11-cyanodec
- silane coupling agents may be used alone or in combination of two or more.
- silane coupling agents phenyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, N- (3-triethoxysilylpropyl) -4,5-dihydroimidazole, N- [ 3- (Triethoxysilylpropyl)] benzotriazole and 3-cyanopropyltrimethoxysilane are preferred.
- the silane coupling agent may be a commercially available product or a synthetic product.
- the method for synthesizing the silane coupling agent is not particularly limited.
- a halogen-containing silane compound such as 3-bromopropyltrimethoxysilane and a compound having the above functional group are mixed with toluene in the presence of an acid catalyst such as sulfuric acid.
- an acid catalyst such as sulfuric acid.
- the solvent used in the synthesis reaction between the metal oxide particles and the silane coupling agent is not particularly limited.
- water and other organic solvents such as methanol, ethanol, n-propanol, isopropyl alcohol, and other lower alcohols.
- Ketones such as acetone and methyl ethyl ketone
- ethers such as diethyl ether, dioxane and tetrahydrofuran
- amides such as N, N-dimethylformamide
- sulfoxides such as dimethyl sulfoxide, and the like.
- organic solvents are preferred. These solvents may be used alone or in combination of two or more.
- a hydrophilic solvent for example, when adding a silane coupling agent to water-dispersed colloidal silica, it is preferable to add a hydrophilic solvent to such an extent that the silane coupling agent dissolves.
- the hydrophilic organic solvent include alcohols such as methanol, ethanol and isopropyl alcohol. Among these, it is preferable to use the same kind of alcohol as that generated by hydrolysis of the silane coupling agent to be used. This is because the solvent can be recovered and reused more easily by using the same kind of alcohol as that produced by hydrolysis of the silane coupling agent.
- the lower limit of the amount of the silane coupling agent used in the synthesis reaction is preferably 0.1 mol% or more, more preferably 1 mol% or more, where the number of moles of the metal oxide particles is 100 mol%. Preferably, it is more preferably 10 mol% or more.
- the upper limit of the amount of the silane coupling agent used in the synthesis reaction is preferably 90 mol% or less, more preferably 85 mol% or less, with the number of moles of metal oxide particles being 100 mol%. More preferably, it is 80 mol% or less. Within this range, the acidic zeta potential is sufficiently stable, and the metal oxide particles can be prevented from gelation over time.
- the amount of the silane coupling agent used can be determined from the specific surface area of the metal oxide particles measured by the BET method according to the following formula 1.
- the atmosphere during the synthesis reaction is not particularly limited, and can be performed under an air atmosphere, an inert gas atmosphere such as nitrogen or argon, or under vacuum.
- the pH during the synthesis reaction is not particularly limited, but is preferably 7 or more and 11 or less. If it is this range, a silane coupling agent can react with a metal oxide particle efficiently, and the possibility that silane coupling agents may self-condense can be reduced.
- the lower limit of the reaction temperature is not particularly limited, but is preferably 5 ° C or higher, more preferably 7 ° C or higher, and further preferably 10 ° C or higher.
- the upper limit of the reaction temperature is not particularly limited, but is preferably 100 ° C. or lower, more preferably 95 ° C. or lower, and further preferably 90 ° C. or lower.
- the lower limit of the reaction time is not particularly limited, but is preferably 1 hour or longer, more preferably 2 hours or longer, and further preferably 3 hours or longer.
- the synthesis reaction may be performed in one stage, or may be performed in two stages by changing the temperature.
- the target surface-modified metal oxide particles can be obtained by distilling off the reaction solvent under reduced pressure using a rotary evaporator or the like.
- the lower limit of the average primary particle diameter of the functional abrasive is preferably 5 nm or more, more preferably 7 nm or more, and further preferably 10 nm or more.
- the upper limit of the average primary particle diameter of the functional abrasive is preferably 500 nm or less, more preferably 250 nm or less, and further preferably 100 nm or less. If it is such a range, it can suppress more that dishing arises on the surface of the metal substrate after grind
- the average primary particle diameter of an abrasive grain is calculated based on the specific surface area of the abrasive grain measured by BET method, for example.
- the lower limit of the content of the functional abrasive in the polishing composition is preferably 0.01 g / L or more, more preferably 0.1 g / L or more, and 1 g / L or more. Further preferred. Further, the upper limit of the content of the functional abrasive in the polishing composition is preferably 200 g / L or less, more preferably 150 g / L or less, and further preferably 100 g / L or less. . If it is such a range, the cost of polishing composition can be suppressed and it can suppress more that dishing arises on the surface of the metal substrate after grind
- the polishing composition of the present invention may contain other abrasive grains in addition to the above functional abrasive grains.
- Such other abrasive grains may be any of inorganic particles, organic particles, and organic-inorganic composite particles.
- the inorganic particles include particles made of metal oxides that are not surface-modified such as silica, alumina, ceria, titania, silicon nitride particles, silicon carbide particles, and boron nitride particles.
- Specific examples of the organic particles include polymethyl methacrylate (PMMA) particles.
- PMMA polymethyl methacrylate
- the other abrasive grains may be used alone or in combination of two or more. Moreover, the said other abrasive grain may use a commercial item, and may use a synthetic product.
- the polishing composition of the present invention contains water as a dispersion medium or solvent for dispersing or dissolving abrasive grains. From the viewpoint of suppressing the inhibition of the action of other components, water containing as little impurities as possible is preferable. Specifically, after removing impurity ions with an ion exchange resin, pure water from which foreign matters are removed through a filter is used. Water, ultrapure water, or distilled water is preferred.
- the polishing composition of the present invention may further contain an oxidizing agent, a metal anticorrosive, a polishing accelerator, a surfactant, an antiseptic, an antifungal agent, a reducing agent, a water-soluble polymer, and a poorly soluble organic substance as necessary. It may further contain other components such as an organic solvent for dissolution. Among these other components, at least one selected from the group consisting of an oxidizing agent, a metal anticorrosive, a polishing accelerator, and a surfactant is preferable.
- the oxidant, the metal anticorrosive, the polishing accelerator, and the surfactant which are other preferable components will be described.
- the polishing composition according to the present invention may contain an oxidizing agent.
- the oxidizing agent contained in the polishing composition has an action of oxidizing the surface of the metal substrate, and improves the polishing rate of the metal substrate by the polishing composition.
- Usable oxidizing agent is, for example, peroxide.
- peroxide include hydrogen peroxide, peracetic acid, percarbonate, urea peroxide and perchloric acid, and persulfates such as sodium persulfate, potassium persulfate, and ammonium persulfate.
- peroxide include hydrogen peroxide, peracetic acid, percarbonate, urea peroxide and perchloric acid, and persulfates such as sodium persulfate, potassium persulfate, and ammonium persulfate.
- persulfate and hydrogen peroxide are preferable, and hydrogen peroxide is particularly preferable.
- the content of the oxidizing agent in the polishing composition is preferably 0.1 g / L or more, more preferably 1 g / L or more, and further preferably 3 g / L or more. As the content of the oxidizing agent increases, the polishing rate of the metal substrate by the polishing composition increases.
- the content of the oxidizing agent in the polishing composition is also preferably 200 g / L or less, more preferably 100 g / L or less, and still more preferably 50 g / L or less.
- the content of the oxidizing agent decreases, the material cost of the polishing composition can be suppressed, and the load of the treatment of the polishing composition after use for polishing, that is, the waste liquid treatment can be reduced.
- the risk of excessive oxidation of the metal substrate surface by the oxidizing agent can be reduced.
- the polishing composition according to the present invention can contain a metal anticorrosive. By adding a metal anticorrosive to the polishing composition, dishing of the metal substrate after polishing can be further suppressed.
- the usable metal anticorrosive agent is not particularly limited, but is preferably a heterocyclic compound.
- the number of heterocyclic rings in the heterocyclic compound is not particularly limited.
- the heterocyclic compound may be a monocyclic compound or a polycyclic compound having a condensed ring.
- These metal anticorrosives may be used alone or in combination of two or more.
- a commercially available product or a synthetic product may be used as the metal anticorrosive.
- isoindole compound indazole compound, purine compound, quinolidine compound, quinoline compound, isoquinoline compound, naphthyridine compound, phthalazine compound, quinoxaline compound, quinazoline compound, cinnoline compound, buteridine compound, thiazole compound, isothiazole compound, oxazole compound, iso Examples thereof include nitrogen-containing heterocyclic compounds such as oxazole compounds and furazane compounds.
- More specific examples include pyrazole compounds such as 1H-pyrazole, 4-nitro-3-pyrazolecarboxylic acid, 3,5-pyrazolecarboxylic acid, 3-amino-5-phenylpyrazole, 5 -Amino-3-phenylpyrazole, 3,4,5-tribromopyrazole, 3-aminopyrazole, 3,5-dimethylpyrazole, 3,5-dimethyl-1-hydroxymethylpyrazole, 3-methylpyrazole, 1-methyl Pyrazole, 3-amino-5-methylpyrazole, 4-amino-pyrazolo [3,4-d] pyrimidine, allopurinol, 4-chloro-1H-pyrazolo [3,4-D] pyrimidine, 3,4-dihydroxy-6 -Methylpyrazolo (3,4-B) -pyridine, 6-methyl-1H-pyrazolo [3,4-b] pyridine 3-amine, and the like.
- pyrazole compounds such as 1H-pyrazole, 4-
- imidazole compounds include imidazole, 1-methylimidazole, 2-methylimidazole, 4-methylimidazole, 1,2-dimethylpyrazole, 2-ethyl-4-methylimidazole, 2-isopropylimidazole, benzimidazole, 5,6-dimethylbenzimidazole, 2-aminobenzimidazole, 2-chlorobenzimidazole, 2-methylbenzimidazole, 2- (1-hydroxyethyl) benzimidazole, 2-hydroxybenzimidazole, 2-phenylbenzimidazole, 2 , 5-dimethylbenzimidazole, 5-methylbenzimidazole, 5-nitrobenzimidazole, 1H-purine and the like.
- triazole compounds include, for example, 1,2,3-triazole (1H-BTA), 1,2,4-triazole, 1-methyl-1,2,4-triazole, methyl-1H-1,2, 4-triazole-3-carboxylate, 1,2,4-triazole-3-carboxylic acid, methyl 1,2,4-triazole-3-carboxylate, 1H-1,2,4-triazole-3-thiol, 3,5-diamino-1H-1,2,4-triazole, 3-amino-1,2,4-triazole-5-thiol, 3-amino-1H-1,2,4-triazole, 3-amino- 5-benzyl-4H-1,2,4-triazole, 3-amino-5-methyl-4H-1,2,4-triazole, 3-nitro-1,2,4-triazole, 3-bromo-5 Nitro 1,2,4-triazole, 4- (1,2,4-triazol-1-yl) phenol, 4-amino-1,2,4-triazole, 4-amino
- tetrazole compounds include 1H-tetrazole, 5-methyltetrazole, 5-aminotetrazole, 5-phenyltetrazole, and the like.
- indazole compounds include, for example, 1H-indazole, 5-amino-1H-indazole, 5-nitro-1H-indazole, 5-hydroxy-1H-indazole, 6-amino-1H-indazole, 6-nitro-1H -Indazole, 6-hydroxy-1H-indazole, 3-carboxy-5-methyl-1H-indazole and the like.
- indole compounds include, for example, 1H-indole, 1-methyl-1H-indole, 2-methyl-1H-indole, 3-methyl-1H-indole, 4-methyl-1H-indole, 5-methyl-1H- Indole, 6-methyl-1H-indole, 7-methyl-1H-indole, 4-amino-1H-indole, 5-amino-1H-indole, 6-amino-1H-indole, 7-amino-1H-indole, 4-hydroxy-1H-indole, 5-hydroxy-1H-indole, 6-hydroxy-1H-indole, 7-hydroxy-1H-indole, 4-methoxy-1H-indole, 5-methoxy-1H-indole, 6- Methoxy-1H-indole, 7-methoxy-1H-indole, 4-chloro-1H Indole, 5-chloro-1H-indole, 6-chloro-1H Indo
- heterocyclic compounds are triazole compounds, and in particular, 1H-benzotriazole, 5-methyl-1H-benzotriazole, 5,6-dimethyl-1H-benzotriazole, 1- [N, N-bis (hydroxy Ethyl) aminomethyl] -5-methylbenzotriazole, 1- [N, N-bis (hydroxyethyl) aminomethyl] -4-methylbenzotriazole, 1,2,3-triazole, and 1,2,4-triazole Is preferred. Since these heterocyclic compounds have high chemical or physical adsorptive power to the surface of the metal substrate, a stronger protective film can be formed on the surface of the metal substrate. This is advantageous in improving the flatness of the surface of the metal substrate after polishing with the polishing composition of the present invention.
- a preferable metal anticorrosive is a nitrogen-containing five-membered ring compound, and at least one selected from the group consisting of 1H-pyrazole, 1,2,4-triazole, and 1H-tetrazole is more preferable. By using these compounds, excessive etching of the metal substrate can be suppressed.
- the lower limit of the content of the metal anticorrosive in the polishing composition is preferably 0.001 g / L or more, more preferably 0.005 g / L or more, and still more preferably 0.01 g / L or more.
- the upper limit of content of the metal anticorrosive agent in polishing composition is 20 g / L or less, More preferably, it is 15 g / L or less, More preferably, it is 10 g / L or less. Within such a range, the flatness of the surface of the metal substrate after polishing with the polishing composition is improved, and the polishing rate of the metal substrate with the polishing composition is improved.
- the polishing composition according to the present invention can contain a polishing accelerator.
- the polishing accelerator functions to improve the polishing rate of the metal substrate by the polishing composition by complexing and bonding to the surface of the metal substrate and forming an insoluble brittle film on the surface of the metal substrate.
- the etching action of the polishing accelerator has an advantageous effect that the polishing rate of the metal substrate by the polishing composition is improved.
- inorganic acid for example, inorganic acid, organic acid, amino acid, nitrile compound, chelating agent and the like can be used.
- specific examples of the inorganic acid include sulfuric acid, nitric acid, boric acid, carbonic acid, hypophosphorous acid, phosphorous acid, phosphoric acid and the like.
- organic acids include formic acid, acetic acid, propionic acid, butyric acid, valeric acid, 2-methylbutyric acid, n-hexanoic acid, 3,3-dimethylbutyric acid, 2-ethylbutyric acid, 4-methylpentanoic acid, n- Heptanoic acid, 2-methylhexanoic acid, n-octanoic acid, 2-ethylhexanoic acid, benzoic acid, glycolic acid, salicylic acid, glyceric acid, oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, malein Examples include acid, phthalic acid, malic acid, tartaric acid, citric acid, and lactic acid.
- Organic sulfuric acids such as methanesulfonic acid, ethanesulfonic acid and isethionic acid can also be used.
- a salt such as an alkali metal salt of an inorganic acid or an organic acid may be used instead of the inorganic acid or the organic acid or in combination with the inorganic acid or the organic acid.
- amino acids include glycine, ⁇ -alanine, ⁇ -alanine, N-methylglycine, N, N-dimethylglycine, 2-aminobutyric acid, norvaline, valine, leucine, norleucine, isoleucine, phenylalanine, proline, sarcosine, Ornithine, lysine, taurine, serine, threonine, homoserine, tyrosine, bicine, tricine, 3,5-diiodo-tyrosine, ⁇ - (3,4-dihydroxyphenyl) -alanine, thyroxine, 4-hydroxy-proline, cysteine, methionine , Ethionine, lanthionine, cystathionine, cystine, cysteic acid, aspartic acid, glutamic acid, S- (carboxymethyl) -cysteine, 4-aminobutyric acid, asparagine, glutamine,
- nitrile compounds include acetonitrile, aminoacetonitrile, propionitrile, butyronitrile, isobutyronitrile, benzonitrile, glutaronitrile, methoxyacetonitrile, and the like.
- chelating agents include nitrilotriacetic acid, diethylenetriaminepentaacetic acid, ethylenediaminetetraacetic acid, N, N, N-trimethylenephosphonic acid, ethylenediamine-N, N, N ′, N′-tetramethylenesulfonic acid, transcyclohexane Diamine tetraacetic acid, 1,2-diaminopropanetetraacetic acid, glycol ether diamine tetraacetic acid, ethylenediamine orthohydroxyphenylacetic acid, ethylenediamine disuccinic acid (SS form), N- (2-carboxylateethyl) -L-aspartic acid, ⁇ -Alanine diacetate, 2-phosphonobutane-1,2,4-tricarboxylic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, N, N'-bis (2-hydroxybenzyl) ethylenediamine-N, N'-diace
- the lower limit of the content of the polishing accelerator in the polishing composition is preferably 0.01 g / L or more, more preferably 0.1 g / L or more, and further preferably 1 g / L or more. As the content of the polishing accelerator increases, the polishing rate of the metal substrate by the polishing composition is improved.
- the upper limit of the content of the polishing accelerator in the polishing composition is preferably 50 g / L or less, more preferably 30 g / L or less, and even more preferably 15 g / L or less. As the content of the polishing accelerator decreases, the material cost of the polishing composition can be reduced.
- the polishing composition according to the present invention can contain a surfactant. By adding a surfactant to the polishing composition, dishing of the metal substrate after polishing can be further suppressed.
- the surfactant used may be any of an anionic surfactant, a cationic surfactant, an amphoteric surfactant and a nonionic surfactant, and among them, an anionic surfactant and Nonionic surfactants are preferred.
- a plurality of types of surfactants may be used in combination, and it is particularly preferable to use a combination of an anionic surfactant and a nonionic surfactant.
- anionic surfactant examples include, for example, polyoxyethylene alkyl ether acetic acid, polyoxyethylene alkyl ether sulfuric acid, alkyl ether sulfuric acid, polyoxyethylene alkyl sulfuric acid ester, alkyl sulfuric acid ester, polyoxyethylene alkyl sulfuric acid, alkyl Examples include sulfuric acid, alkylbenzene sulfonic acid, alkyl phosphoric acid ester, polyoxyethylene alkyl phosphoric acid ester, polyoxyethylene sulfosuccinic acid, alkyl sulfosuccinic acid, alkyl naphthalene sulfonic acid, alkyl diphenyl ether disulfonic acid, and salts thereof.
- polyoxyethylene alkyl ether acetic acid polyoxyethylene alkyl ether sulfate, alkyl ether sulfate and alkylbenzene sulfonate are preferred. Since these preferable anionic surfactants have high chemical or physical adsorption force to the metal substrate surface, a stronger protective film is formed on the metal substrate surface. This is advantageous in improving the flatness of the surface of the metal substrate after polishing with the polishing composition.
- cationic surfactant examples include alkyl trimethyl ammonium salt, alkyl dimethyl ammonium salt, alkyl benzyl dimethyl ammonium salt, and alkyl amine salt.
- amphoteric surfactants include alkyl betaines and alkyl amine oxides.
- nonionic surfactants include, for example, polyoxyalkylene alkyl ethers such as polyoxyethylene alkyl ether, sorbitan fatty acid esters, glycerin fatty acid esters, polyoxyethylene fatty acid esters, polyoxyethylene alkyl amines, and alkyl alkanols. Amides are mentioned. Of these, polyoxyalkylene alkyl ether is preferred. Since polyoxyalkylene alkyl ether has high chemical or physical adsorption force to the metal substrate surface, it forms a stronger protective film on the metal substrate surface. This is advantageous in improving the flatness of the surface of the metal substrate after polishing with the polishing composition.
- polyoxyalkylene alkyl ethers such as polyoxyethylene alkyl ether, sorbitan fatty acid esters, glycerin fatty acid esters, polyoxyethylene fatty acid esters, polyoxyethylene alkyl amines, and alkyl alkanols. Amides are mentioned. Of these, polyoxyalky
- the content of the surfactant in the polishing composition is preferably 0.001 g / L or more, more preferably 0.005 g / L or more, and still more preferably 0.01 g / L or more.
- the content of the surfactant in the polishing composition is also preferably 20 g / L or less, more preferably 15 g / L or less, and further preferably 10 g / L or less.
- the polishing rate of the polishing composition is improved.
- the lower limit of the pH of the polishing composition of the present invention is preferably 1.5 or more. As the pH of the polishing composition increases, the risk of excessive etching of the metal substrate surface by the polishing composition can be reduced.
- the upper limit of the pH of the polishing composition is preferably 12 or less. As the pH of the polishing composition decreases, it is possible to further suppress the formation of dents on the side of the wiring formed by polishing using the polishing composition, and to prevent dissolution of abrasive grains.
- a pH adjuster may be used.
- the pH adjuster to be used may be either acid or alkali, and may be any of inorganic and organic compounds.
- a pH adjuster can be used individually or in mixture of 2 or more types.
- the manufacturing method in particular of the polishing composition of this invention is not restrict
- the temperature at the time of mixing each component is not particularly limited, but is preferably 10 to 40 ° C., and may be heated to increase the dissolution rate. Further, the mixing time is not particularly limited.
- the polishing composition of the present invention is suitably used for polishing the metal substrate described above. Therefore, the present invention provides a polishing method for polishing a metal substrate using the polishing composition of the present invention. Moreover, this invention provides the manufacturing method of a metal substrate including the process of grind
- a polishing device As a polishing device, a general polishing device with a polishing platen to which a holder for holding a metal substrate and the like and a motor capable of changing the number of rotations can be attached and a polishing pad (polishing cloth) can be attached is used. can do.
- polishing pad a general nonwoven fabric, polyurethane, porous fluororesin, or the like can be used without particular limitation. It is preferable that the polishing pad is grooved so that the polishing liquid accumulates.
- the polishing conditions are not particularly limited.
- the rotation speed of the polishing platen is preferably 10 to 500 rpm, and the pressure applied to the metal substrate (polishing pressure) is preferably 0.5 to 10 psi.
- the method of supplying the polishing composition to the polishing pad is not particularly limited, and for example, a method of continuously supplying with a pump or the like is employed. Although the supply amount is not limited, it is preferable that the surface of the polishing pad is always covered with the polishing composition of the present invention.
- the substrate After completion of polishing, the substrate is washed in running water, and water droplets adhering to the substrate are removed by a spin dryer or the like, and dried to obtain a metal substrate.
- the polishing composition of the present invention may be a one-component type or a multi-component type including a two-component type.
- the polishing composition of the present invention may be prepared by diluting the stock solution of the polishing composition, for example, 10 times or more using a diluent such as water.
- the methanol solution of the silane coupling agent was added dropwise at a rate of 1 ml / min while stirring the colloidal silica solution at 40 ° C. in an air atmosphere at a rotation speed of the stirring blade of 600 rpm.
- the pH was adjusted with a pH adjuster (KOH) so that the pH of the solution became 8.0-9.0.
- the functional abrasive 1 obtained can be confirmed to have a benzotriazolyl group which is a functional group by performing FT-IR (Fourier transform infrared spectroscopy) analysis. . Therefore, according to these two analysis methods, the target surface modification group having a benzotriazolyl group at one end and having a propylenedimethoxysiloxy group as a linking group and the surface modification group are immobilized. It can be confirmed that functional abrasive grains containing silica are formed.
- Example 2 Instead of N- [3- (triethoxysilylpropyl)] benzotriazole, 8.2 g of IM-2000 (manufactured by JX Nippon Mining & Metals) (50 mol% with respect to the apparent number of moles of colloidal silica) A functional abrasive 2 was obtained in the same manner as in Example 1 except that it was used.
- the functional abrasive 2 obtained has a mercapto group which is a functional group by performing FT-IR (Fourier transform infrared spectroscopy) analysis. Therefore, by these two analytical methods, the target surface modifying group having a dihydroimidazolyl group at one end and having a propylene dimethoxysiloxy group as a linking group, and the silica on which the surface modifying group is immobilized, It can be confirmed that functional abrasive grains containing are formed.
- XPS X-ray photoelectron spectroscopy
- Example 3 Instead of N- [3- (triethoxysilylpropyl)] benzotriazole, KBM-803 (manufactured by Shin-Etsu Chemical Co., Ltd., 3-mercaptopropyltrimethoxysilane) 3.9 g (based on the apparent number of moles of colloidal silica)
- the functional abrasive 3 was obtained in the same manner as in Example 1 except that 50 mol%) was used.
- the functional abrasive 3 obtained can be confirmed to have a phenyl group as a functional group by performing FT-IR (Fourier transform infrared spectroscopy) analysis. Therefore, by these two analysis methods, the target surface modification group having a mercapto group at one end and having a propylenedimethoxysiloxy group as a linking group, and the silica on which the surface modification group is immobilized, It can be confirmed that functional abrasive grains containing are formed.
- XPS X-ray photoelectron spectroscopy
- Example 4 Instead of N- [3- (triethoxysilylpropyl)] benzotriazole, 4.1 g of trimethoxyphenylsilane (manufactured by Tokyo Chemical Industry Co., Ltd.) (50 mol% with respect to the apparent number of moles of colloidal silica) is used.
- the functional abrasive 4 was obtained in the same manner as in Example 1 except that.
- the functional abrasive 4 obtained By performing XPS (X-ray photoelectron spectroscopy) analysis on the functional abrasive 4 obtained, it can be confirmed that a Si—O—Si chemical bond is formed. Further, the functional abrasive 4 obtained can be confirmed to have a functional cyano group by conducting FT-IR (Fourier transform infrared spectroscopy) analysis. Therefore, by these two analytical methods, the target surface modification group having a phenyl group at one end and having a propylenedimethoxysiloxy group as a linking group, and the silica on which the surface modification group is immobilized, It can be confirmed that functional abrasive grains containing are formed.
- FT-IR Fastier transform infrared spectroscopy
- Example 5 Instead of N- [3- (triethoxysilylpropyl)] benzotriazole, 3.2 g of 2-cyanoethyltriethoxysilane (manufactured by Tokyo Chemical Industry Co., Ltd.) (50 mol% with respect to the apparent number of moles of colloidal silica) A functional abrasive 5 was obtained in the same manner as in Example 1 except that was used.
- the functional abrasive 5 obtained can be confirmed to have a cyano group as a functional group by performing FT-IR (Fourier transform infrared spectroscopy) analysis. Therefore, by these two analytical methods, the target surface modification group having a cyano group at one end and having a propylenedimethoxysiloxy group as a linking group, and the silica on which the surface modification group is immobilized, It can be confirmed that functional abrasive grains containing are formed.
- XPS X-ray photoelectron spectroscopy
- a polishing composition was prepared using the functional abrasive grains 1 to 5 thus obtained. Specifically, functional abrasive grains 6 g / L, glycine 10 g / L as a polishing accelerator, hydrogen peroxide 35 g / L as an oxidizing agent, and 1H-benzotriazole 0.2 g / L as a metal corrosion inhibitor, Each composition was stirred and mixed in water (mixing temperature: about 25 ° C., mixing time: about 10 minutes) to prepare polishing compositions 1 to 5. The pH of the polishing composition was adjusted to pH 7.0 by adding potassium hydroxide.
- polishing rate and etching rate for Cu were evaluated.
- the polishing conditions are as shown in Table 1 below.
- the polishing rate was evaluated by determining the thickness of a 200 mm Cu wafer before and after polishing from the measurement of sheet resistance by a DC 4 probe method and dividing the difference by the polishing time.
- the etching rate was evaluated from the change in weight of a Cu wafer immersed at 25 ° C. for 1 minute.
- a polishing composition using colloidal silica (average primary particle size: 35 nm, average secondary particle size: 68 nm) that is not surface-modified in place of the functional abrasive grains 1 to 5 is the same as described above. Were prepared and evaluated in the same manner.
- the polishing composition of the example containing the functional abrasive grains has a low etching rate and can suppress dishing on the metal surface.
- Example 1 scratch evaluation of a polished 200 mm Cu wafer was performed.
- the scratch was evaluated by a light interference type wafer surface inspection apparatus under the condition that a wafer having a size of 0.16 ⁇ m or more can be inspected.
- the number of scratches was 65 when the polishing composition of the comparative example was used, and 20 when the polishing composition of Example 1 was used. Therefore, it was found that when the polishing composition of Example 1 was used, scratches were reduced.
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Abstract
Description
本発明の研磨対象物となる金属基板は、好ましくは導電性物質層を有し、必要に応じてバリア層および絶縁膜を有する。
本発明の研磨用組成物中に含まれる機能性砥粒は、金属基板を機械的に研磨する作用を有し、また、金属基板のディッシングを抑制する。
金属酸化物粒子の具体例としては、例えば、シリカ、アルミナ、セリア、チタニア等が挙げられる。該金属酸化物粒子は、単独でもまたは2種以上混合して用いてもよい。また、該砥粒は、市販品を用いてもよいし合成品を用いてもよい。
本発明に係る表面修飾基は、金属基板に対して吸着することで前記金属基板の溶解を抑制する官能基(以下、単に官能基とも称する)を片末端に有する。さらに前記官能基と上記金属酸化物粒子とを連結する2価の連結基(以下、単に連結基とも称する)を有することが好ましい。
本発明に係る機能性砥粒の製造方法は、特に制限されないが、例えば、上記の金属酸化物粒子に対してシランカップリング剤を添加し、反応させ結合させることで製造することができる。
本発明の研磨用組成物は、砥粒を分散または溶解するための分散媒または溶媒として水を含む。他の成分の作用を阻害することを抑制するという観点から、不純物をできる限り含有しない水が好ましく、具体的には、イオン交換樹脂にて不純物イオンを除去した後、フィルタを通して異物を除去した純水や超純水、または蒸留水が好ましい。
本発明の研磨用組成物は、必要に応じてさらに、酸化剤、金属防食剤、研磨促進剤、界面活性剤、防腐剤、防カビ剤、還元剤、水溶性高分子、難溶性の有機物を溶解するための有機溶媒等の他の成分をさらに含んでもよい。これら他の成分の中でも、酸化剤、金属防食剤、研磨促進剤、および界面活性剤からなる群より選択される少なくとも1種が好ましい。以下、好ましい他の成分である酸化剤、金属防食剤、研磨促進剤、界面活性剤について説明する。
本発明に係る研磨用組成物は、酸化剤を含んでもよい。研磨用組成物中に含まれる酸化剤は、金属基板の表面を酸化する作用を有し、研磨用組成物による金属基板の研磨速度を向上させる。
本発明に係る研磨用組成物は、金属防食剤を含むことができる。研磨用組成物中に金属防食剤を加えることにより、研磨した後の金属基板のディッシングをより抑制することができる。
本発明に係る研磨用組成物は、研磨促進剤を含むことができる。研磨促進剤は、金属基板の表面に錯形成して結合し、不溶性の脆性膜を金属基板の表面に形成することによって研磨用組成物による金属基板の研磨速度を向上させる働きをする。また、研磨促進剤が有するエッチング作用により、研磨用組成物による金属基板の研磨速度が向上するという有利な効果がある。
本発明に係る研磨用組成物は、界面活性剤を含むことができる。研磨用組成物中に界面活性剤を加えることにより、研磨した後の金属基板のディッシングをより抑制することができる。
本発明の研磨用組成物のpHの下限は、1.5以上であることが好ましい。研磨用組成物のpHが大きくなるにつれて、研磨用組成物による金属基板表面の過剰なエッチングが起こる虞を少なくすることができる。
本発明の研磨用組成物の製造方法は、特に制限されず、例えば、機能性砥粒、および必要に応じて他の成分を、水中で攪拌混合することにより得ることができる。
上述のように、本発明の研磨用組成物は、上記で説明した金属基板の研磨に好適に用いられる。よって、本発明は、金属基板を本発明の研磨用組成物を用いて研磨する研磨方法を提供する。また、本発明は、金属基板を前記研磨方法で研磨する工程を含む金属基板の製造方法を提供する。
(合成例)
温度計、攪拌翼を備える10Lの反応器に、3-ブロモプロピルトリメトキシシラン2432g(10mol)、およびトルエン:キシレン=1:1(体積比)の混合溶媒5Lを加え、1時間攪拌して溶液を得た。この溶液に、1,2,3-ベンゾトリアゾール1191g(10mol)を添加し、さらに1時間攪拌した。その後、酸触媒である硫酸を10μmol添加後、10分間攪拌した。その後、50℃のエアバスにて4時間静置し、反応を進行させた。反応終了後、ロータリー式エバポレータでトルエンと硫酸を取り除き、目的物である、N-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールを得た。
(実施例1)
コロイダルシリカ水溶液1000g(濃度19.5重量%)を準備した。別途、上記合成例で得られたシランカップリング剤であるN-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールを7.5g秤量し、メタノール50gに溶解させた。このシランカップリング剤の量は、BET法で測定された前記コロイダルシリカの比表面積から、上記数式1に従い、シランカップリング剤1分子の占有面積を(5×10-10)2(m2)=25×10-20(m2)とし、コロイダルシリカの見かけのモル数を算出、その算出したモル数の50モル%に相当する量である。
N-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールの代わりに、IM-2000(JX日鉱日石金属株式会社製)8.2g(コロイダルシリカの見かけのモル数に対して50モル%)を用いたこと以外は、実施例1と同様にして、機能性砥粒2を得た。
N-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールの代わりに、KBM-803(信越化学工業株式会社製、3-メルカプトプロピルトリメトキシシラン)3.9g(コロイダルシリカの見かけのモル数に対して50モル%)を用いたこと以外は、実施例1と同様にして、機能性砥粒3を得た。
N-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールの代わりに、トリメトキシフェニルシラン(東京化成工業株式会社製)4.1g(コロイダルシリカの見かけのモル数に対して50モル%)を用いたこと以外は、実施例1と同様にして、機能性砥粒4を得た。
N-[3-(トリエトキシシリルプロピル)]ベンゾトリアゾールの代わりに、2-シアノエチルトリエトキシシラン(東京化成工業株式会社製)3.2g(コロイダルシリカの見かけのモル数に対して50モル%)を用いたこと以外は、実施例1と同様にして、機能性砥粒5を得た。
得られた機能性砥粒1~5を用いて研磨用組成物を調製した。具体的には、機能性砥粒 6g/L、研磨促進剤としてグリシン 10g/L、酸化剤として過酸化水素 35g/L、および金属防食剤として1H-ベンゾトリアゾール 0.2g/Lの濃度に、それぞれなるように水中で攪拌混合し(混合温度:約25℃、混合時間:約10分)、研磨用組成物1~5を調製した。なお、研磨用組成物のpHは、水酸化カリウムを加え、pH7.0に調整した。
Claims (5)
- 金属基板に対して吸着することで前記金属基板の溶解を抑制する官能基を片末端に有する表面修飾基と、前記表面修飾基が固定化されている金属酸化物粒子と、を含む機能性砥粒と、
水と、
を含む、研磨用組成物。 - 前記官能基が、メルカプト基、シアノ基、フェニル基、ジヒドロイミダゾリル基、ベンゾトリアゾリル基、およびテトラゾリル基からなる群より選択される少なくとも1種である、請求項1に記載の研磨用組成物。
- 酸化剤、金属防食剤、研磨促進剤、および界面活性剤からなる群より選択される少なくとも1種をさらに含む、請求項1または2に記載の研磨用組成物。
- 金属基板を請求項1~3のいずれか1項に記載の研磨用組成物を用いて研磨する、研磨方法。
- 金属基板を請求項4に記載の研磨方法で研磨する工程を含む、金属基板の製造方法。
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US14/655,597 US20150322294A1 (en) | 2012-12-28 | 2013-10-25 | Polishing composition |
SG11201505037VA SG11201505037VA (en) | 2012-12-28 | 2013-10-25 | Polishing composition |
KR1020157016607A KR102154512B1 (ko) | 2012-12-28 | 2013-10-25 | 연마용 조성물 |
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JP2012288415A JP6057706B2 (ja) | 2012-12-28 | 2012-12-28 | 研磨用組成物 |
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JP (1) | JP6057706B2 (ja) |
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EP3365403A4 (en) * | 2015-10-21 | 2019-06-19 | Cabot Microelectronics Corporation | COBALT N HIBITOR COMBINATION FOR IMPROVED BENDING |
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JP2016056254A (ja) * | 2014-09-08 | 2016-04-21 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
WO2016102279A1 (en) * | 2014-12-22 | 2016-06-30 | Basf Se | Use of a chemical mechanical polishing (cmp) composition for polishing of cobalt and / or co-balt alloy comprising substrates |
KR101833219B1 (ko) * | 2016-08-05 | 2018-04-13 | 주식회사 케이씨텍 | 텅스텐 베리어층 연마용 슬러리 조성물 |
JP6819280B2 (ja) * | 2016-12-27 | 2021-01-27 | Jsr株式会社 | 化学機械研磨用組成物および化学機械研磨方法 |
JP6841166B2 (ja) * | 2017-06-09 | 2021-03-10 | 堺化学工業株式会社 | フェニルアルコキシシラン処理シリカの製造方法 |
CN109096990A (zh) * | 2017-06-21 | 2018-12-28 | 圣戈本陶瓷及塑料股份有限公司 | 表面改性的研磨颗粒、研磨制品以及其形成方法 |
US10647887B2 (en) | 2018-01-08 | 2020-05-12 | Cabot Microelectronics Corporation | Tungsten buff polishing compositions with improved topography |
KR20200128679A (ko) * | 2018-03-15 | 2020-11-16 | 니타 듀폰 가부시키가이샤 | 연마 조성물 |
US20200172759A1 (en) * | 2018-12-04 | 2020-06-04 | Cabot Microelectronics Corporation | Composition and method for cobalt cmp |
US10968366B2 (en) * | 2018-12-04 | 2021-04-06 | Cmc Materials, Inc. | Composition and method for metal CMP |
KR102619857B1 (ko) * | 2020-05-20 | 2023-12-29 | 삼성에스디아이 주식회사 | 텅스텐 연마용 cmp 슬러리 조성물 및 이를 이용한 텅스텐 연마 방법 |
KR20230029618A (ko) * | 2020-06-30 | 2023-03-03 | 제이에스알 가부시끼가이샤 | 연마입자의 제조방법, 화학기계 연마용 조성물 및 화학기계 연마방법 |
KR102577164B1 (ko) * | 2020-12-29 | 2023-09-08 | 에스케이엔펄스 주식회사 | 반도체 공정용 연마 조성물 및 연마 조성물을 적용한 기판의 연마방법 |
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- 2013-10-25 KR KR1020157016607A patent/KR102154512B1/ko active IP Right Grant
- 2013-10-25 US US14/655,597 patent/US20150322294A1/en not_active Abandoned
- 2013-10-25 SG SG11201505037VA patent/SG11201505037VA/en unknown
- 2013-11-07 TW TW102140486A patent/TWI592471B/zh active
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US20150322294A1 (en) | 2015-11-12 |
SG11201505037VA (en) | 2015-07-30 |
JP6057706B2 (ja) | 2017-01-11 |
KR20150102990A (ko) | 2015-09-09 |
TWI592471B (zh) | 2017-07-21 |
TW201430115A (zh) | 2014-08-01 |
JP2014130944A (ja) | 2014-07-10 |
KR102154512B1 (ko) | 2020-09-10 |
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