WO2014076762A1 - Suspended metal mask for printing and method for producing same - Google Patents

Suspended metal mask for printing and method for producing same Download PDF

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Publication number
WO2014076762A1
WO2014076762A1 PCT/JP2012/079384 JP2012079384W WO2014076762A1 WO 2014076762 A1 WO2014076762 A1 WO 2014076762A1 JP 2012079384 W JP2012079384 W JP 2012079384W WO 2014076762 A1 WO2014076762 A1 WO 2014076762A1
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WO
WIPO (PCT)
Prior art keywords
metal
printing
mesh
base metal
opening pattern
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PCT/JP2012/079384
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French (fr)
Japanese (ja)
Inventor
秀樹 仁科
Original Assignee
株式会社ボンマーク
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Publication date
Application filed by 株式会社ボンマーク filed Critical 株式会社ボンマーク
Priority to KR1020157013787A priority Critical patent/KR101723320B1/en
Priority to JP2014546759A priority patent/JP5919391B2/en
Priority to PCT/JP2012/079384 priority patent/WO2014076762A1/en
Priority to CN201280077026.5A priority patent/CN104822534B/en
Publication of WO2014076762A1 publication Critical patent/WO2014076762A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41CPROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00Forme preparation
    • B41C1/14Forme preparation for stencil-printing or silk-screen printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00Printing plates or foils; Materials therefor
    • B41N1/24Stencils; Stencil materials; Carriers therefor
    • B41N1/247Meshes, gauzes, woven or similar screen materials; Preparation thereof, e.g. by plasma treatment

Definitions

  • the present invention relates to a suspend metal mask for printing and a method for manufacturing the same.
  • the structure of this patterning mask is the same as that described in FIGS. 1 to 3 of Japanese Patent No. 3560042.
  • the patterning mask 26 includes a mesh layer 21 made of a metal wire.
  • the mesh layer 21 has a two-dimensional regular pattern of openings 28 separated by solid elements.
  • a patterned print layer 22 is disposed partially surrounding the mesh layer 21.
  • the print layer 22 is formed of two parts, a stencil layer 23 and a seal layer 24, and both parts 23 and 24 are patterned to have the same pattern.
  • the stencil layer 23 is made of a standard photoresist material used in lithography, and the stencil layer 23 is patterned by a standard lithography process.
  • the seal layer 24 of the print layer 22 has exactly the same pattern as the stencil layer 23, except that it is substantially elastic.
  • the seal layer 24 is bonded to the stencil layer 23, and forms the print layer 22 together with this layer.
  • the print layer 22 is mechanically fixed to the mesh layer 21.
  • the material of the stencil layer 23 may be formed by electroplating nickel, for example.
  • the mesh layer 21 can be made of a material such as metal or polymer. A material such as a polymer, a resist, or a metal can be used for the stencil layer 23.
  • the patterning mask 26 comprising the two-part printing layer 22 and the mesh layer 21 can be used as a patterning tool for the printing process shown in FIG. For this purpose, the patterning mask 26 is lowered onto a substantially flat surface of the substrate 25.
  • the ink 27 flows into the orifice of the printing layer 22 through the opening of the mesh layer 21.
  • the interface between the substrate 25 and the print layer 22 can be filled with the orifice 29 of the patterned print layer 22, and the seal against the ink 27 reaching the substrate 25. I will provide a.
  • the ink 27 is confined in the area of each orifice 29.
  • FIG. 17 shows another embodiment of the patterning mask 26.
  • the print layer 22 does not partially surround the mesh layer 21 but is only attached to the lower side of the mesh layer 21, which is different from the embodiment of FIGS. 15 to 16. It can be made thinner than the stencil layer and the mesh layer. Furthermore, here the orifice 29 is smaller than the opening 28 of the mesh layer 21.
  • FIG. 18 shows the structure of a known suspending metal mask for printing.
  • the structure of the suspending metal mask for printing is the same as that shown in FIG. 3 of Japanese Patent Application Laid-Open No. 11-157042.
  • the metal mask 32 is bonded and fixed to the center of the printing surface of the screen mesh 31 whose outer periphery is bonded and fixed to a plate frame (not shown), and the resin 33 is applied and solidified on the squeegee surface side of the screen mesh 31.
  • through holes 33 a are formed on the photosensitive emulsion 33 by printing or the like in accordance with the image through holes 32 a of the metal mask 32.
  • the through hole 33a may be formed by any means, and is formed slightly wider than the image through hole portion 32a of the metal mask 32.
  • a so-called emulsion plate in which a photosensitive emulsion for forming a printing pattern is applied to a mesh layer made of metal wire, is flexible and comes in line contact with the substrate during squeezing. Air retention due to squeezing is small and the plate separation is good, but the metal wire of the mesh layer is thin, so the durability is poor.
  • the metal mask plate since the metal mask plate has many metal parts, the entire mask is hard, and the surface comes into contact with the substrate during squeezing, so that there is more air accumulation due to squeezing than the emulsion plate, and the plate separation is poor.
  • a suspend metal mask for printing in which a combination mesh is stretched on a square plate frame, and a base metal made of nickel or the like is joined to the stainless steel mesh provided at the center of the combination mesh by joint plating, the metal portion of the base metal Therefore, when the touch panel pattern or the like is printed, printing rubbing occurs due to a delay in the separation of the plate. In particular, printing rubbing due to a delay in plate separation occurs remarkably in a large area of the pattern. Further, since the pattern includes a thin line portion and a large area portion, there is a problem that variation in plate thickness is likely to occur during plating.
  • the present invention has been made in order to solve the above-described problems.
  • a suspending metal mask for printing which has improved plate separation by reducing the area of the metal portion of the base metal and making it flexible, and its A manufacturing method is provided.
  • the plate frame, the combination mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, and the metal mesh is provided in the center, and the metal mesh is in close contact
  • the base metal provided with a base metal provided with an opening pattern for printing that is integrally bonded by joint plating and provided with an opening pattern for printing the metal portion around the portion where the opening pattern for printing is formed, The area of the metal portion of the base metal is reduced by removing as much as possible the metal portion that is not related to printing other than that.
  • the ratio of the metal part to be removed is 10 to 90% in the metal part that is not related to printing.
  • the area of the metal part of the base metal is reduced so that it is in line contact with the printed circuit board.
  • the base metal leaves the metal part around the part where the opening pattern for printing is formed, and forms a large number of dummy holes for reducing the metal area in the metal part that is not related to printing,
  • the metal area reduction dummy holes are filled with emulsion to close the holes so as not to be printed.
  • the dummy hole for reducing the metal area is a circular hole.
  • the base metal leaves the metal part around the part where the opening pattern for printing is formed, removes all other metal parts not related to printing, and does not have the metal part of the base metal.
  • the mesh opening is filled with an emulsion to close the opening so as not to be printed.
  • the metal portion around the portion where the opening pattern for printing of the base metal is formed is left, and the metal portion other than the portion not related to printing is removed as much as possible. Since the area of the metal portion is reduced, the flexibility of the base metal is improved, the air release property is improved, and the separation of the plate can be improved.
  • the plate separation state is compared between the case where the base metal of the suspending metal mask for printing (point contact) is used and the case where the base metal of the suspending metal mask for conventional printing is used (surface contact).
  • point contact the case where the base metal of the suspending metal mask for printing
  • surface contact the case where the base metal of the suspending metal mask for conventional printing is used (surface contact).
  • FIG. 1 It is a top view which shows the structure of the base metal of the suspend metal mask for printing in Embodiment 2 of this invention. It is a microscope picture which shows the state which roughened the SUS base material surface for base metals of the suspend metal mask for printing in Embodiment 3 of this invention by bead blasting etc.
  • FIG. It is a microscope picture which further expands and shows the state which roughened the SUS base material surface for base metals of the suspend metal mask for printing in Embodiment 3 of this invention by bead blasting etc.
  • FIG. It is the cross-sectional view and top view which show the conventional patterning mask. It is a cross-sectional view showing a patterning mask on a substrate in a conventional printing step. It is sectional drawing which shows the other example of the conventional patterning mask. It is sectional drawing which shows the conventional suspend metal mask for printing.
  • FIG. 1 is a perspective view showing components necessary for a method for manufacturing a suspending metal mask for printing according to the present invention
  • FIGS. 2 to 7 show manufacturing steps of the method for manufacturing a suspending metal mask for printing according to the present invention. It is sectional drawing.
  • FIG. 8 is a plan view showing the structure of the base metal of the suspending metal mask for printing according to the present invention
  • FIG. 9 is an enlarged plan view showing the structure of the main part of the base metal of the suspending metal mask for printing according to the present invention
  • FIG. FIG. 11 is a plan view showing the structure of the base metal of the suspending metal mask for printing.
  • FIG. 11 shows the case where the base metal of the suspending metal mask for printing of the present invention is used (point contact) and the base metal of the conventional suspending metal mask for printing. It is explanatory drawing which compares and shows the plate separation state when there exists (surface contact).
  • the constituent elements necessary for the method for producing a suspending metal mask for printing according to the present invention include a metal mesh 1 made of stainless steel or nickel mesh having conductivity and provided at the center, and this metal Formed on a square metal plate frame 3 in which a combination mesh composed of a Tetron mesh 2 provided on the outside of the mesh 1 is stretched on the inside and a SUS base material 4 for a base metal, forming an opening pattern for printing A base metal 5 having a printing opening pattern forming resist 5a applied to a portion to be formed, a quadrilateral joining auxiliary metal plate frame 7 in which a tetron mesh 6 is stretched, and a tetron of the joining auxiliary metal plate frame 7 It is comprised from the sponge 8 interposed between the mesh 6 and the SUS base material 4 for base metals.
  • the mesh stretched on the rectangular metal plate frame 3 is preferably a combination mesh composed of a metal mesh 1 at the center and an outer tetron mesh 2 but is not a combination mesh and has electrical conductivity.
  • a single piece of metal mesh 1 may be used.
  • a large number of metal area reducing dummy hole forming resists are formed in the base metal 5 in order to form many dummy holes for reducing the area of the metal portion. (Not shown). By forming a large number of metal area reducing dummy holes (not shown) in the base metal 5, the area of the metal portion is reduced and the flexibility of the base metal 5 can be improved.
  • the base metal 5 has a squeegee surface on the plating growth side and a surface in contact with the printing surface on the SUS base material 4 side for the base metal.
  • a squeegee surface on the plating growth side and a surface in contact with the printing surface on the SUS base material 4 side for the base metal.
  • the surface that contacts the printing surface of the base metal 5 is smooth without roughness (close to a mirror surface)
  • there is a risk that the air will not be able to pass and will adhere. is there. Therefore, when the surface of the base metal SUS base material 4 is mirror-finished, the surface that comes into contact with the printed surface of the base metal 5 is later roughened by polishing with a nonwoven fabric containing sandpaper or an abrasive. It is possible.
  • the surface of the SUS base material 4 for base metal is roughened by bead blasting, buffing or the like in advance, the surface that comes into contact with the printing surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or abrasive. By doing so, it is not necessary to roughen.
  • a rectangular metal plate frame 3 is arranged on the right side, and a rectangular bonding auxiliary metal plate frame 7 is arranged on the left side. .
  • the base metal 5 is disposed so as to be overlapped with the metal mesh 1 of the metal plate frame 3, the metal plate frame 3 and the joining auxiliary metal plate frame 7 are overlapped with each other, and fastened and fixed with an adhesive tape 9 or the like,
  • the base metal 5 and the metal mesh 1 are set so as to be in close contact with each other via the base metal SUS base material 4 and the sponge 8.
  • the base metal 5 is connected to the cathode 10 while being electrically connected and accommodated in a plating tank 11 containing a nickel sulfamate bath, and nickel 12 is connected to the anode 13. And metal mesh 1 are bonded and bonded together.
  • This bonding plating amount is usually 2 ⁇ m on one side, and the same plating method as electroforming plating is used. Further, by using a low current of about 0.5 A / dm 2 for the positive / cathode current density, it is possible to improve the uniformity of the bonding plating amount and to prevent the metal mesh 1 from being disconnected.
  • the one set in the above-mentioned close contact state is taken out from the plating tank 11 (see FIG. 3), and the adhesive tape 9 is removed and the one set in the close contact state is released (see FIG. 4).
  • the base metal SUS base material 4 is peeled from the base metal 5 (see FIGS. 5 and 6).
  • the base metal 5 has a squeegee surface on the plating growth side and a surface in contact with the printing surface on the base metal SUS base material 4 side.
  • the surface of the SUS base material 4 for base metal is previously roughened by bead blasting, buffing or the like, and the surface that comes into contact with the printing surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or an abrasive. This may be omitted.
  • a resist 5a for forming a printing opening pattern and a resist for forming a metal area reduction dummy hole are formed from the base metal 5 of the metal plate frame 3 in which the joint between the base metal 5 and the metal mesh 1 is integrally joined by plating.
  • peeling off not shown
  • a printing opening pattern 5b and a metal area reduction dummy hole are formed.
  • the suspend metal mask for printing according to the first embodiment of the present invention is completed (see FIG. 7).
  • the printing opening pattern forming resist 5a and the printing opening pattern 5b of the base metal 5 are simplified and show only images. Also, many metal area reduction dummy hole forming resists and metal area reduction dummy holes are not shown.
  • FIG. 8 schematically shows the structure of the base metal 5 and is different from the actual one.
  • FIG. 9 is an enlarged view of the structure of the base metal 5.
  • the base metal 5 is configured such that the metal portion around the portion where the printing opening pattern 5b is formed leaves about several millimeters.
  • metal parts that are not necessary and are not related to other printing are removed as much as possible. That is, a large number of metal area reduction dummy circular holes 5d having a diameter of about 30 mm are provided in a metal part which is not necessary regardless of printing, and the interval between the adjacent dummy circular holes 5d is about 5 mm. Thus, the area of the metal portion of the base metal 5 is reduced.
  • the dummy circular holes 5d are formed in one row in the vertical direction with an angle of about 30 ° with respect to the vertical line, and with an angle of about 60 to 67.5 ° with respect to the horizontal line. It is formed so as to form one row in an oblique direction.
  • the dummy circular holes 5d are arranged so that the dummy circular holes 5d arranged adjacent to the left and right sides of the dummy circular holes 5d are not in the same horizontal position but are staggered in the vertical direction. ing.
  • the dummy circular holes 5d may be formed in a straight line in the vertical and horizontal directions without making an angle with respect to the vertical and horizontal lines.
  • the ratio of the metal portion to be removed by forming the dummy circular hole 5d is theoretically 1 to 99%, but is actually preferably about 10 to 90%, 20 to 80%, 30 to 70%, It may be 40 to 60% or around 50%.
  • the formed circular circular hole 5d for reducing the metal area is initially open as shown in the left half of FIG. 8, but after forming, it is used for reducing the metal area as shown in the right half of FIG.
  • the dummy circular hole 5d is filled with the photosensitive emulsion 14 to close the opening, thereby preventing printing.
  • the photosensitive emulsion 14 filled in the metal area reduction dummy circular hole 5d has a concave shape without flattening the surface due to capillary action. Therefore, since the surface of the base metal 5 and the surface of the photosensitive emulsion 14 are not flush with each other, there is a step, and it is possible to prevent the base metal 5 from coming into close contact with the printing substrate 15 and becoming difficult to separate.
  • the metal area reduction dummy circular hole 5d is a circular hole, the current density at the time of plating and the elongation in the vertical and horizontal directions are the same. However, it may be a slit hole or a lattice hole. Further, the metal area reducing dummy circular hole 5d has an angle of 22.5 ° so that the contact of the squeegee is shifted in the traveling direction.
  • FIG. 10 schematically shows the structure of the base metal of the conventional suspend metal mask for printing, which is different from the actual one.
  • the base metal 5 has only a part of the part where the printing opening pattern 5b is formed, and the metal part remains in all other parts. Therefore, the base metal 5 itself has a hard configuration due to the large number of metal portions, and the base metal 5 lacks flexibility.
  • FIG. 11 shows a comparison between plate separation states when the base metal of the suspending metal mask for printing of the present invention is used (point contact) and when the base metal of the suspending metal mask for printing is used (surface contact). It is explanatory drawing.
  • the base metal 5 is curved and comes into surface contact with the printed board 15, although the separation of the plate is deteriorated, according to the present invention, since the metal portion of the base metal 5 is reduced and the flexibility is improved, the base metal 5 bends at an angle rather than a curve as shown in FIG. As a result, the printing substrate 15 is brought into point contact, and the separation of the plate is improved. Thereby, for example, damage to a specially shaped substrate can be reduced.
  • FIG. 12 is a plan view showing the structure of the base metal of the suspend metal mask for printing in the second embodiment of the present invention.
  • the base metal 5 has a metal portion around the portion where the printing opening pattern 5b is formed, leaving about several millimeters, and other metal portions that are not necessary regardless of printing, By forming a large number of dummy circular holes 5d for reducing the metal area with a diameter of about 30 mm so that the distance between the adjacent dummy circular holes 5d is about 5 mm, the area of the metal portion of the base metal 5 is reduced.
  • the base metal 5 has a metal portion around the portion where the printing opening pattern 5b is formed, a few mm is left. All other metal parts are eliminated from the parts which are not necessary because they are not related to printing.
  • the metal mesh 1 located in the part other than the circumference of several mm around the part where the opening pattern 5b for printing is formed is shown in the left half of FIG. 12, the metal mesh 1 is initially opened. As shown in the right half of FIG.
  • the metal mesh 1 that is not related to printing is prevented from being printed by filling the opening of the metal mesh 1 with photosensitive emulsion 14 and closing the mesh opening.
  • the base metal of the suspending metal mask for printing according to the second embodiment is more flexible than the base metal of the suspending metal mask for printing according to the first embodiment, but the strength is weakened accordingly. .
  • Embodiment 3 when the surface roughness of the base metal SUS base material 4 is small, the surface that comes into contact with the printed surface of the base metal 5 is less rough and close to a smooth mirror finish. For example, when printing on a film-like printed circuit board, there is a possibility that air will not be able to pass and will adhere. Therefore, when the surface roughness of the base metal SUS base material 4 is small, if the surface that comes into contact with the printed surface of the base metal 5 is later polished with a non-woven fabric containing an abrasive, Is less likely to occur and has excellent uniformity. In addition, it can also grind with a sandpaper instead of the nonwoven fabric containing the abrasive
  • the surface of the base metal SUS base material 4 is roughened with bead blasting in advance, and the surface that comes into contact with the printed surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or an abrasive. You may do it.
  • the abrasive used for blasting can be a spherical object such as a steel ball in addition to beads.
  • 13 is a photomicrograph showing the surface of the SUS base material for base metal of the suspend metal mask for printing in Embodiment 3 of the present invention roughened by bead blasting, etc.
  • FIG. 14 is for printing in Embodiment 3 of the present invention.
  • the bead blasting is a thin film with a plating film of the base metal 5 of 2 to 25 ⁇ m, but is easily peeled off from the SUS base material 4.
  • a metal mask polished with ceramic # 1000 was prepared.
  • This metal mask has an arithmetic average roughness Ra: 0.072 ⁇ m, a maximum height Rmax: 1.516 ⁇ m, a ten-point average roughness Rz: 1.004 ⁇ m, and an average interval Sm: 92.3 ⁇ m. There has occurred.
  • Test Example 1 is a metal mask polished by belt # 1000, arithmetic average roughness Ra: 0.080 ⁇ m, maximum height Rmax: 2.112 ⁇ m, ten-point average roughness Rz: 0.852 ⁇ m, The average unevenness spacing Sm was 241.7 ⁇ m, and no rubbing occurred when printed.
  • Test example 2 is a metal mask polished with sandpaper # 400, arithmetic average roughness Ra: 0.060 ⁇ m, maximum height Rmax: 1.756 ⁇ m, ten-point average roughness Rz: 0.812 ⁇ m, unevenness
  • the average interval Sm was 286.8 ⁇ m, and no rubbing occurred when printed.
  • Test Example 3 is a metal mask polished with sandpaper # 1000, arithmetic average roughness Ra: 0.096 ⁇ m, maximum height Rmax: 3.144 ⁇ m, ten-point average roughness Rz: 1.412 ⁇ m, unevenness
  • the average interval Sm was 136.2 ⁇ m, and no rubbing occurred when printed.
  • Test Example 4 is a case where the surface of the SUS base material 4 for base metal was previously roughened with bead blast 2.0, arithmetic average roughness Ra: 0.132 ⁇ m, maximum height Rmax: 2.904 ⁇ m, ten points. It was a metal mask having an average roughness Rz: 1.480 ⁇ m and an average unevenness interval Sm: 174.3 ⁇ m, and no rubbing occurred when printed.
  • Test Examples 1 to 4 are all free of rubbing and good printing results, but Test Example 1 has low reproducibility, and Test Examples 2 to 3 are freehand processing, so the stability is poor. However, in Test Example 4, the rubbing is improved, and at the same time, there is no disconnection of the fine line portion, and the printing result is good.
  • the present invention can be applied to a suspend metal mask for printing that reduces the area of the metal portion of the base metal to give flexibility and improve the separation of the plate.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Textile Engineering (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

This suspended metal mask for printing is provided with: a plate frame (3); a mesh that is provided in a stretched manner by means of the outer perimeter thereof being adhered/affixed to the inside of the plate frame and that has an electrically conductive metal mesh (1) at least at the center portion thereof; and a base metal (5) that is integrally joined by means of being contacted/stacked and then joined/plated onto the metal mesh (1), and to which an opening pattern (5b) for printing is provided. Of the base metal (5), the area of the metal portion of the base metal (5) is reduced by means of the metal portion at the periphery of the portion at which the opening pattern (5b) for printing is formed remaining and the metal portions at other portions unrelated to printing being eliminated as much as possible. A plurality of metal-area-reducing holes (5d) are formed at the metal portions at the portions unrelated to printing, and an emulsion (14) fills the metal-area-reducing holes to occlude the holes.

Description

印刷用サスペンドメタルマスク及びその製造方法Suspended metal mask for printing and manufacturing method thereof
 この発明は、印刷用サスペンドメタルマスク及びその製造方法に関するものである。 The present invention relates to a suspend metal mask for printing and a method for manufacturing the same.
 公知のパターニング・マスクの代表的な構造を図15~図17に示す。このパターニング・マスクの構造は、日本特許第3560042号公報の図1~図3に記載されているものと同一のものである。パターニング・マスク26は、金属製ワイヤからなるメッシュ層21を備える。メッシュ層21は、固体要素によって分離された2次元の規則的なパターンの開口28を有する。メッシュ層21を部分的に取り囲んでパターン化印刷層22を配置する。印刷層22は、ステンシル層23とシール層24の2つの部分から形成されており、両方の部分23、24ともパターン化され、同じパターンである。ステンシル層23は、リソグラフィで用いられる標準的なフォトレジスト材料からなり、ステンシル層23のパターニングは、標準的なリソグラフィ・プロセスで行う。印刷層22のシール層24は、ステンシル層23とまったく同じパターンを有するが、実質上弾性的である点が異なる。シール層24はステンシル層23に接着されて、この層とともに印刷層22を形成している。そして印刷層22は、メッシュ層21に機械的に固定されている。ステンシル層23の材料は、例えばニッケルを電気めっきしてステンシル層23を形成しても良い。また、メッシュ層21は、金属またはポリマーのような材料を使用することができる。ステンシル層23には、ポリマー、レジストまたは金属のような材料を使用することができる。2つの部分からなる印刷層22およびメッシュ層21を備えるパターニング・マスク26は、図16に示した印刷工程用のパターニング・ツールとして使用することができる。このために、基板25の実質上平らな表面上にパターニング・マスク26を下ろす。その後、インク27を印刷層22に注入すると、インク27は、メッシュ層21の開口を通って印刷層22のオリフィス内に流れ込む。パターン化印刷層22は、基板25と接触している場合、基板25と印刷層22との界面に、パターン化印刷層22のオリフィス29を充填することができ基板25に到達するインク27に対するシールを提供する。インク27は、それぞれのオリフィス29の領域に閉じ込められる。 Typical structures of known patterning masks are shown in FIGS. The structure of this patterning mask is the same as that described in FIGS. 1 to 3 of Japanese Patent No. 3560042. The patterning mask 26 includes a mesh layer 21 made of a metal wire. The mesh layer 21 has a two-dimensional regular pattern of openings 28 separated by solid elements. A patterned print layer 22 is disposed partially surrounding the mesh layer 21. The print layer 22 is formed of two parts, a stencil layer 23 and a seal layer 24, and both parts 23 and 24 are patterned to have the same pattern. The stencil layer 23 is made of a standard photoresist material used in lithography, and the stencil layer 23 is patterned by a standard lithography process. The seal layer 24 of the print layer 22 has exactly the same pattern as the stencil layer 23, except that it is substantially elastic. The seal layer 24 is bonded to the stencil layer 23, and forms the print layer 22 together with this layer. The print layer 22 is mechanically fixed to the mesh layer 21. The material of the stencil layer 23 may be formed by electroplating nickel, for example. The mesh layer 21 can be made of a material such as metal or polymer. A material such as a polymer, a resist, or a metal can be used for the stencil layer 23. The patterning mask 26 comprising the two-part printing layer 22 and the mesh layer 21 can be used as a patterning tool for the printing process shown in FIG. For this purpose, the patterning mask 26 is lowered onto a substantially flat surface of the substrate 25. Thereafter, when the ink 27 is injected into the printing layer 22, the ink 27 flows into the orifice of the printing layer 22 through the opening of the mesh layer 21. When the patterned print layer 22 is in contact with the substrate 25, the interface between the substrate 25 and the print layer 22 can be filled with the orifice 29 of the patterned print layer 22, and the seal against the ink 27 reaching the substrate 25. I will provide a. The ink 27 is confined in the area of each orifice 29.
 図17にパターニング・マスク26の他の実施例を示す。ここでは、印刷層22は、部分的にもメッシュ層21を取り囲んでおらず、メッシュ層21の下側に取り付けられているだけであるという点が、図15~図16の実施例と異なる。ステンシル層とメッシュ層より薄くすることができる。さらに、ここではオリフィス29はメッシュ層21の開口28より小さい。 FIG. 17 shows another embodiment of the patterning mask 26. Here, the print layer 22 does not partially surround the mesh layer 21 but is only attached to the lower side of the mesh layer 21, which is different from the embodiment of FIGS. 15 to 16. It can be made thinner than the stencil layer and the mesh layer. Furthermore, here the orifice 29 is smaller than the opening 28 of the mesh layer 21.
 また、公知の印刷用サスペンドメタルマスクの構造を図18に示す。この印刷用サスペンドメタルマスクの構造は、日本特開平11-157042号公報の図3に記載されているものと同一のものである。印刷用サスペンドメタルマスクは、版枠(図示せず)に外周を接着固定したスクリーンメッシュ31の印刷面中央部にメタルマスク32を接着固定し、スクリーンメッシュ31のスキージ面側に樹脂33を塗布固化し、メタルマスク32の画像透孔部32aに合わせて感光乳剤33に焼付等により透孔33aを形成する。この透孔33aはどのような手段によって形成しても良く、メタルマスク32の画像透孔部32aより僅かに幅広に形成している。 FIG. 18 shows the structure of a known suspending metal mask for printing. The structure of the suspending metal mask for printing is the same as that shown in FIG. 3 of Japanese Patent Application Laid-Open No. 11-157042. In the suspend metal mask for printing, the metal mask 32 is bonded and fixed to the center of the printing surface of the screen mesh 31 whose outer periphery is bonded and fixed to a plate frame (not shown), and the resin 33 is applied and solidified on the squeegee surface side of the screen mesh 31. Then, through holes 33 a are formed on the photosensitive emulsion 33 by printing or the like in accordance with the image through holes 32 a of the metal mask 32. The through hole 33a may be formed by any means, and is formed slightly wider than the image through hole portion 32a of the metal mask 32.
日本特許第3560042号公報Japanese Patent No. 3560042 日本特開平11-157042号公報Japanese Unexamined Patent Publication No. 11-157042
 従来、金属製ワイヤからなるメッシュ層に印刷パターン形成用の感光乳剤を塗布してなる、乳剤版と呼ばれるものは、柔軟性があり、スキージング時に基板へ線接触するため、メタルマスク版に比べてスキージングによる空気溜まりが少なく、版離れは良好であるが、メッシュ層の金属製ワイヤが細いため、耐久性に乏しいものであった。一方、メタルマスク版は、金属部分が多いため、マスク全体が硬く、スキージング時に基板へ面接触するため、乳剤版に比べてスキージングによる空気溜まりが多く、版離れが悪かった。 Conventionally, a so-called emulsion plate, in which a photosensitive emulsion for forming a printing pattern is applied to a mesh layer made of metal wire, is flexible and comes in line contact with the substrate during squeezing. Air retention due to squeezing is small and the plate separation is good, but the metal wire of the mesh layer is thin, so the durability is poor. On the other hand, since the metal mask plate has many metal parts, the entire mask is hard, and the surface comes into contact with the substrate during squeezing, so that there is more air accumulation due to squeezing than the emulsion plate, and the plate separation is poor.
 また、四角形の版枠にコンビネーションメッシュを紗張りし、このコンビネーションメッシュの中央部に設けたステンレスメッシュにニッケル等からなるベースメタルを接合めっきにより接合した印刷用サスペンドメタルマスクでは、ベースメタルの金属部分の面積が大きく柔軟性に欠けるため、タッチパネルパターン等の印刷を行う際に、版離れの遅れにより印刷擦れが発生している。特に版離れの遅れによる印刷擦れはパターンの大面積部に顕著に発生する。また、パターンに細線部と大面積部とがあるため、めっき時に板厚のばらつきが発生し易くなるという問題があった。 In the case of a suspend metal mask for printing, in which a combination mesh is stretched on a square plate frame, and a base metal made of nickel or the like is joined to the stainless steel mesh provided at the center of the combination mesh by joint plating, the metal portion of the base metal Therefore, when the touch panel pattern or the like is printed, printing rubbing occurs due to a delay in the separation of the plate. In particular, printing rubbing due to a delay in plate separation occurs remarkably in a large area of the pattern. Further, since the pattern includes a thin line portion and a large area portion, there is a problem that variation in plate thickness is likely to occur during plating.
 この発明は、上述のような課題を解決するためになされたもので、ベースメタルの金属部分の面積を小さくして柔軟性を持たせることにより、版離れを改善した印刷用サスペンドメタルマスク及びその製造方法を提供するものである。 The present invention has been made in order to solve the above-described problems. A suspending metal mask for printing which has improved plate separation by reducing the area of the metal portion of the base metal and making it flexible, and its A manufacturing method is provided.
 この発明に係る印刷用サスペンドメタルマスクにおいては、版枠と、版枠の内側に外周を接着固定して張設され、中央部に金属製メッシュが設けられたコンビネーションメッシュと、金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用の開口パターンが設けられたベースメタルとを備えたものにおいて、ベースメタルは、印刷用の開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は可能な限り除去することにより、ベースメタルの金属部分の面積を縮小したものである。 In the suspending metal mask for printing according to the present invention, the plate frame, the combination mesh that is stretched by bonding and fixing the outer periphery to the inside of the plate frame, and the metal mesh is provided in the center, and the metal mesh is in close contact In the base metal provided with a base metal provided with an opening pattern for printing that is integrally bonded by joint plating and provided with an opening pattern for printing, the metal portion around the portion where the opening pattern for printing is formed, The area of the metal portion of the base metal is reduced by removing as much as possible the metal portion that is not related to printing other than that.
 また、印刷に関係がない部分の金属部分は、除去する金属部分の比率が10~90%である。 Also, the ratio of the metal part to be removed is 10 to 90% in the metal part that is not related to printing.
 また、ベースメタルの金属部分の面積を縮小して、印刷基板と線接触するようにしたものである。 Also, the area of the metal part of the base metal is reduced so that it is in line contact with the printed circuit board.
 また、ベースメタルは、印刷用の開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分には多数の金属面積縮小用ダミー孔を形成し、前記金属面積縮小用ダミー孔に乳剤を充填して孔を閉塞することにより、印刷されないようにしたものである。 In addition, the base metal leaves the metal part around the part where the opening pattern for printing is formed, and forms a large number of dummy holes for reducing the metal area in the metal part that is not related to printing, The metal area reduction dummy holes are filled with emulsion to close the holes so as not to be printed.
 また、金属面積縮小用ダミー孔は、円形孔である。 The dummy hole for reducing the metal area is a circular hole.
 また、ベースメタルは、印刷用の開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は全てを無くし、ベースメタルの金属部分の存在しない部分の金属製メッシュは、メッシュの開口に乳剤を充填して開口を閉塞することにより、印刷されないようにしたものである。 In addition, the base metal leaves the metal part around the part where the opening pattern for printing is formed, removes all other metal parts not related to printing, and does not have the metal part of the base metal. In the metal mesh, the mesh opening is filled with an emulsion to close the opening so as not to be printed.
 この発明によれば、ベースメタルの印刷用開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は可能な限り除去することにより、ベースメタルの金属部分の面積を縮小したので、ベースメタルの柔軟性が良くなり、空気抜け性が向上して版離れを良くすることができる。 According to the present invention, the metal portion around the portion where the opening pattern for printing of the base metal is formed is left, and the metal portion other than the portion not related to printing is removed as much as possible. Since the area of the metal portion is reduced, the flexibility of the base metal is improved, the air release property is improved, and the separation of the plate can be improved.
この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図である。It is a perspective view which isolate | separates and shows each component required for the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合めっき工程を示す断面図である。It is sectional drawing which shows the joining plating process of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合めっきが終了した状態を示す断面図である。It is sectional drawing which shows the state which the junction plating of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention was complete | finished. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法の接合状態からセットを解除した状態を示す断面図である。It is sectional drawing which shows the state which canceled the set from the joining state of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルからSUS母材を剥離している状態を示す断面図である。It is sectional drawing which shows the state which has peeled the SUS base material from the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離する前の状態を示す断面図である。It is sectional drawing which shows the state before peeling the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクの製造方法のベースメタルの開口レジストを剥離して完成した印刷用サスペンドメタルマスクを示す断面図である。It is sectional drawing which shows the suspend metal mask for printing completed by peeling the opening resist of the base metal of the manufacturing method of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図である。It is a top view which shows the structure of the base metal of the suspend metal mask for printing in Embodiment 1 of this invention. この発明の実施の形態1における印刷用サスペンドメタルマスクのベースメタルの要部構成を示す拡大平面図である。It is an enlarged plan view which shows the principal part structure of the base metal of the suspend metal mask for printing in Embodiment 1 of this invention. 従来の印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図である。It is a top view which shows the structure of the base metal of the conventional suspend metal mask for printing. この発明の実施の形態1における印刷用サスペンドメタルマスクのベースメタルを用いた場合(点接触)と従来の印刷用サスペンドメタルマスクのベースメタルを用いた場合(面接触)の版離れ状態を比較して示す説明図である。In the first embodiment of the present invention, the plate separation state is compared between the case where the base metal of the suspending metal mask for printing (point contact) is used and the case where the base metal of the suspending metal mask for conventional printing is used (surface contact). It is explanatory drawing shown. この発明の実施の形態2における印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図である。It is a top view which shows the structure of the base metal of the suspend metal mask for printing in Embodiment 2 of this invention. この発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタル用SUS母材表面をビーズブラスト等で粗した状態を示す顕微鏡写真である。It is a microscope picture which shows the state which roughened the SUS base material surface for base metals of the suspend metal mask for printing in Embodiment 3 of this invention by bead blasting etc. FIG. この発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタル用SUS母材表面をビーズブラスト等で粗した状態を更に拡大して示す顕微鏡写真である。It is a microscope picture which further expands and shows the state which roughened the SUS base material surface for base metals of the suspend metal mask for printing in Embodiment 3 of this invention by bead blasting etc. FIG. 従来のパターニング・マスクを示す横断面図および平面図である。It is the cross-sectional view and top view which show the conventional patterning mask. 従来の印刷ステップにおける基板上のパターニング・マスクを示す横断面図である。It is a cross-sectional view showing a patterning mask on a substrate in a conventional printing step. 従来のパターニング・マスクの他の例を示す断面図である。It is sectional drawing which shows the other example of the conventional patterning mask. 従来の印刷用サスペンドメタルマスクを示す断面図である。It is sectional drawing which shows the conventional suspend metal mask for printing.
 この発明をより詳細に説明するため、添付の図面に従ってこれを説明する。なお、各図中、同一又は相当する部分には同一の符号を付しており、その重複説明は適宜に簡略化ないし省略する。 In order to explain the present invention in more detail, this will be described with reference to the attached drawings. In addition, in each figure, the same code | symbol is attached | subjected to the part which is the same or it corresponds, The duplication description is simplified or abbreviate | omitted suitably.
実施の形態1.
 図1はこの発明の印刷用サスペンドメタルマスクの製造方法に必要な各構成要素を分離して示す斜視図、図2~図7はこの発明の印刷用サスペンドメタルマスクの製造方法の製造工程を示す断面図である。図8はこの発明の印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図、図9はこの発明の印刷用サスペンドメタルマスクのベースメタルの要部構成を示す拡大平面図、図10は従来の印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図、図11はこの発明の印刷用サスペンドメタルマスクのベースメタルを用いた場合(点接触)と従来の印刷用サスペンドメタルマスクのベースメタルを用いた場合(面接触)の版離れ状態を比較して示す説明図である。
Embodiment 1.
FIG. 1 is a perspective view showing components necessary for a method for manufacturing a suspending metal mask for printing according to the present invention, and FIGS. 2 to 7 show manufacturing steps of the method for manufacturing a suspending metal mask for printing according to the present invention. It is sectional drawing. FIG. 8 is a plan view showing the structure of the base metal of the suspending metal mask for printing according to the present invention, FIG. 9 is an enlarged plan view showing the structure of the main part of the base metal of the suspending metal mask for printing according to the present invention, and FIG. FIG. 11 is a plan view showing the structure of the base metal of the suspending metal mask for printing. FIG. 11 shows the case where the base metal of the suspending metal mask for printing of the present invention is used (point contact) and the base metal of the conventional suspending metal mask for printing. It is explanatory drawing which compares and shows the plate separation state when there exists (surface contact).
 この発明の印刷用サスペンドメタルマスクの製造方法に必要な構成要素は、図1に示すように、中央部に設けられた通電性を有するステンレスメッシュ又はニッケルメッシュからなる金属製メッシュ1及びこの金属製メッシュ1の外側に設けられたテトロンメッシュ2とからなるコンビネーションメッシュが内側に張設された四角形状の金属製版枠3と、ベースメタル用SUS母材4上に設けられ、印刷用開口パターンが形成される部分に印刷開口パターン形成用レジスト5aが施されたベースメタル5と、テトロンメッシュ6が張設された四角形状の接合補助用金属製版枠7と、この接合補助用金属製版枠7のテトロンメッシュ6とベースメタル用SUS母材4との間に介装されるスポンジ8とから構成される。なお、四角形状の金属製版枠3に張設されるメッシュは、中央部の金属製メッシュ1と外側のテトロンメッシュ2とからなるコンビネーションメッシュが好適であるが、コンビネーションメッシュでなく、通電性を有する金属製メッシュ1の単体からなる一枚物であっても良い。また、上記ベースメタル5には、印刷開口パターン形成用レジスト5aの他に、金属部分の面積を縮小するためのダミー孔を多数形成するために、多数の金属面積縮小ダミー孔形成用レジスト(図示せず)を施しておく。この金属面積縮小用ダミー孔(図示せず)をベースメタル5に多数形成することにより、金属部分の面積が縮小され、ベースメタル5の柔軟性を向上させることができる。また、ベースメタル5は、めっき成長側がスキージ面となり、ベースメタル用SUS母材4側が印刷面と接触する面となる。例えば、フィルム状の印刷基板に印刷する場合、ベースメタル5の印刷面と接触する面に粗さが無く滑らか(鏡面に近い)であると、空気の通り道ができずに密着してしまう恐れがある。したがって、ベースメタル用SUS母材4の表面を鏡面仕上げとした場合は、ベースメタル5の印刷面と接触する面を後でサンドペーパーや研磨剤が入っている不織布で研磨することにより、粗くすることが考えられる。一方、ベースメタル用SUS母材4の表面を予めビーズブラスト、バフ研磨等で粗くした場合は、ベースメタル5の印刷面と接触する面を後でサンドペーパーや研磨剤が入っている不織布で研磨することにより、粗くする必要はない。 As shown in FIG. 1, the constituent elements necessary for the method for producing a suspending metal mask for printing according to the present invention include a metal mesh 1 made of stainless steel or nickel mesh having conductivity and provided at the center, and this metal Formed on a square metal plate frame 3 in which a combination mesh composed of a Tetron mesh 2 provided on the outside of the mesh 1 is stretched on the inside and a SUS base material 4 for a base metal, forming an opening pattern for printing A base metal 5 having a printing opening pattern forming resist 5a applied to a portion to be formed, a quadrilateral joining auxiliary metal plate frame 7 in which a tetron mesh 6 is stretched, and a tetron of the joining auxiliary metal plate frame 7 It is comprised from the sponge 8 interposed between the mesh 6 and the SUS base material 4 for base metals. The mesh stretched on the rectangular metal plate frame 3 is preferably a combination mesh composed of a metal mesh 1 at the center and an outer tetron mesh 2 but is not a combination mesh and has electrical conductivity. A single piece of metal mesh 1 may be used. In addition to the printing opening pattern forming resist 5a, a large number of metal area reducing dummy hole forming resists (see FIG. 5) are formed in the base metal 5 in order to form many dummy holes for reducing the area of the metal portion. (Not shown). By forming a large number of metal area reducing dummy holes (not shown) in the base metal 5, the area of the metal portion is reduced and the flexibility of the base metal 5 can be improved. The base metal 5 has a squeegee surface on the plating growth side and a surface in contact with the printing surface on the SUS base material 4 side for the base metal. For example, when printing on a film-like printed circuit board, if the surface that contacts the printing surface of the base metal 5 is smooth without roughness (close to a mirror surface), there is a risk that the air will not be able to pass and will adhere. is there. Therefore, when the surface of the base metal SUS base material 4 is mirror-finished, the surface that comes into contact with the printed surface of the base metal 5 is later roughened by polishing with a nonwoven fabric containing sandpaper or an abrasive. It is possible. On the other hand, when the surface of the SUS base material 4 for base metal is roughened by bead blasting, buffing or the like in advance, the surface that comes into contact with the printing surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or abrasive. By doing so, it is not necessary to roughen.
 印刷用サスペンドメタルマスクの製造方法の接合めっき工程に当たっては、図2に示すように、右側に四角形状の金属製版枠3を配置し、左側に四角形状の接合補助用金属製版枠7を配置する。そして、金属製版枠3の金属製メッシュ1と重合位置するようにベースメタル5を配置し、金属製版枠3と接合補助用金属製版枠7を互いに重合させて粘着テープ9等で締結固定し、ベースメタル用SUS母材4及びスポンジ8を介してベースメタル5と金属製メッシュ1が互いに密着状態となるようにセットする。この密着状態にセットしたものを陰極10に接続するとともに電気的に導通させて、スルファミン酸ニッケル浴が入っためっき槽11内に収容し、ニッケル12を陽極13に接続することにより、ベースメタル5と金属製メッシュ1の間で接合めっきを行い、両者を一体的に接合する。この接合めっき量は、通常片側2μmとし、電鋳めっきと同じめっき法を用いる。また、陽・陰極電流密度は約0.5A/dmの低電流を用いることにより、接合めっき量の均一性向上と金属製メッシュ1の断線を防止することができる。 In the bonding plating step of the method for producing a suspending metal mask for printing, as shown in FIG. 2, a rectangular metal plate frame 3 is arranged on the right side, and a rectangular bonding auxiliary metal plate frame 7 is arranged on the left side. . Then, the base metal 5 is disposed so as to be overlapped with the metal mesh 1 of the metal plate frame 3, the metal plate frame 3 and the joining auxiliary metal plate frame 7 are overlapped with each other, and fastened and fixed with an adhesive tape 9 or the like, The base metal 5 and the metal mesh 1 are set so as to be in close contact with each other via the base metal SUS base material 4 and the sponge 8. The base metal 5 is connected to the cathode 10 while being electrically connected and accommodated in a plating tank 11 containing a nickel sulfamate bath, and nickel 12 is connected to the anode 13. And metal mesh 1 are bonded and bonded together. This bonding plating amount is usually 2 μm on one side, and the same plating method as electroforming plating is used. Further, by using a low current of about 0.5 A / dm 2 for the positive / cathode current density, it is possible to improve the uniformity of the bonding plating amount and to prevent the metal mesh 1 from being disconnected.
 次に、接合めっき工程が終了したら、上記密着状態にセットしたものをめっき槽11から取り出し(図3参照)、粘着テープ9を取り外して密着状態にセットしたものを解除する(図4参照)。次に、ベースメタル5からベースメタル用SUS母材4を剥離する(図5及び図6参照)。ベースメタル5は、めっき成長側がスキージ面となり、ベースメタル用SUS母材4側が印刷面と接触する面となる。例えば、フィルム状の印刷基板に印刷する場合、ベースメタル5の印刷面と接触する面に粗さが無く滑らか(鏡面に近い)であると、空気の通り道ができずに密着してしまう恐れがある。したがって、ベースメタル用SUS母材4の表面を鏡面仕上げとした場合は、ベースメタル5の印刷面と接触する面を後でサンドペーパーや研磨剤が入っている不織布で研磨することにより、粗くすることが考えられる。なお、ベースメタル用SUS母材4の表面を予めビーズブラスト、バフ研磨等で粗くして、ベースメタル5の印刷面と接触する面を後でサンドペーパーや研磨剤が入っている不織布で研磨することを省略しても良い。その後、ベースメタル5と金属製メッシュ1の接合部がめっきにより一体的に接合されている金属製版枠3のベースメタル5から印刷開口パターン形成用レジスト5a及び金属面積縮小ダミー孔形成用レジスト(図示せず)を剥離することにより、印刷用開口パターン5b及び金属面積縮小用ダミー孔(図示せず)が形成される。これにより、この発明の実施の形態1の印刷用サスペンドメタルマスクが完成する(図7参照)。なお、図1~図7においては、ベースメタル5の印刷開口パターン形成用レジスト5a及び印刷用開口パターン5bは、簡略化してイメージのみを示したものである。また、多数の金属面積縮小ダミー孔形成用レジスト及び金属面積縮小用ダミー孔はいずれも図示していない。 Next, when the bonding plating step is completed, the one set in the above-mentioned close contact state is taken out from the plating tank 11 (see FIG. 3), and the adhesive tape 9 is removed and the one set in the close contact state is released (see FIG. 4). Next, the base metal SUS base material 4 is peeled from the base metal 5 (see FIGS. 5 and 6). The base metal 5 has a squeegee surface on the plating growth side and a surface in contact with the printing surface on the base metal SUS base material 4 side. For example, when printing on a film-like printed circuit board, if the surface that contacts the printing surface of the base metal 5 is smooth without roughness (close to a mirror surface), there is a risk that the air will not be able to pass and will adhere. is there. Therefore, when the surface of the base metal SUS base material 4 is mirror-finished, the surface that comes into contact with the printed surface of the base metal 5 is later roughened by polishing with a nonwoven fabric containing sandpaper or an abrasive. It is possible. In addition, the surface of the SUS base material 4 for base metal is previously roughened by bead blasting, buffing or the like, and the surface that comes into contact with the printing surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or an abrasive. This may be omitted. Thereafter, a resist 5a for forming a printing opening pattern and a resist for forming a metal area reduction dummy hole (see FIG. 5) from the base metal 5 of the metal plate frame 3 in which the joint between the base metal 5 and the metal mesh 1 is integrally joined by plating. By peeling off (not shown), a printing opening pattern 5b and a metal area reduction dummy hole (not shown) are formed. Thereby, the suspend metal mask for printing according to the first embodiment of the present invention is completed (see FIG. 7). 1 to 7, the printing opening pattern forming resist 5a and the printing opening pattern 5b of the base metal 5 are simplified and show only images. Also, many metal area reduction dummy hole forming resists and metal area reduction dummy holes are not shown.
 図8はベースメタル5の構成を模式化して示したものであり、実際のものとは相違する。図9はベースメタル5の構成を拡大して示したものである。図8~図9において、ベースメタル5は、印刷用開口パターン5bが形成される部分の周囲の金属部分は数mm程度を残すようにしている。また、それ以外の印刷に関係がなく必要でない部分の金属部分は可能な限り除去するようにしている。すなわち、印刷に関係がなく必要でない部分の金属部分に、直径約30mm程度の多数の金属面積縮小用ダミー円形孔5dを、互いに隣接するダミー円形孔5dの相互間の間隔が約5mmとなるように形成することにより、ベースメタル5の金属部分の面積を少なくしている。このダミー円形孔5dは、垂直線に対して約30°の角度を持って縦方向に1列となるように形成されており、水平線に対して約60~67.5°の角度を持って斜め方向に1列となるように形成されている。このダミー円形孔5dは、各1個のダミー円形孔5dを見ると、その左右に隣接して配置されるダミー円形孔5dは同じ水平位置ではなく、縦方向に千鳥状にずれるように配置されている。また、ダミー円形孔5dは、垂直線及び水平線に対して角度を付けずに縦横方向に一直線に形成しても良い。なお、ダミー円形孔5dを形成することにより除去する金属部分の比率は、理論上1~99%であるが、実際には10~90%程度が好ましく、20~80%、30~70%、40~60%、50%前後であっても良い。これにより、金属部分を少なくした分、ベースメタル5の柔軟性が良くなり、ベースメタル5自体の柔軟性と空気抜け性を向上させて、版離れを良くすることができる。なお、形成された金属面積縮小用ダミー円形孔5dは、図8の左側半分に示すように、当初は開口しているが、形成後は図8の右側半分に示すように、金属面積縮小用ダミー円形孔5dに感光乳剤14を充填して開口を閉塞することにより、印刷されないようにしている。また、金属面積縮小用ダミー円形孔5dに充填された感光乳剤14は、毛細管現象により表面が平らにならずに凹形状となる。したがって、ベースメタル5の表面と感光乳剤14の表面とは面一にならず段差ができるので、ベースメタル5が印刷基板15と密着して離れ難くなることを防止することができる。また、金属面積縮小用ダミー円形孔5dは、円形孔であるため、めっき時の電流密度や、上下、左右方向の伸び率が同じとなるので、スリット孔や格子孔よりも作り易く、好適であるが、スリット孔や格子孔であっても良い。また、金属面積縮小用ダミー円形孔5dは、スキージの当たりが進行方向にずれるように22.5°の角度を付けている。 FIG. 8 schematically shows the structure of the base metal 5 and is different from the actual one. FIG. 9 is an enlarged view of the structure of the base metal 5. 8 to 9, the base metal 5 is configured such that the metal portion around the portion where the printing opening pattern 5b is formed leaves about several millimeters. In addition, metal parts that are not necessary and are not related to other printing are removed as much as possible. That is, a large number of metal area reduction dummy circular holes 5d having a diameter of about 30 mm are provided in a metal part which is not necessary regardless of printing, and the interval between the adjacent dummy circular holes 5d is about 5 mm. Thus, the area of the metal portion of the base metal 5 is reduced. The dummy circular holes 5d are formed in one row in the vertical direction with an angle of about 30 ° with respect to the vertical line, and with an angle of about 60 to 67.5 ° with respect to the horizontal line. It is formed so as to form one row in an oblique direction. The dummy circular holes 5d are arranged so that the dummy circular holes 5d arranged adjacent to the left and right sides of the dummy circular holes 5d are not in the same horizontal position but are staggered in the vertical direction. ing. The dummy circular holes 5d may be formed in a straight line in the vertical and horizontal directions without making an angle with respect to the vertical and horizontal lines. The ratio of the metal portion to be removed by forming the dummy circular hole 5d is theoretically 1 to 99%, but is actually preferably about 10 to 90%, 20 to 80%, 30 to 70%, It may be 40 to 60% or around 50%. As a result, the flexibility of the base metal 5 is improved by reducing the metal portion, and the flexibility and air escape of the base metal 5 itself can be improved to improve the separation of the plate. The formed circular circular hole 5d for reducing the metal area is initially open as shown in the left half of FIG. 8, but after forming, it is used for reducing the metal area as shown in the right half of FIG. The dummy circular hole 5d is filled with the photosensitive emulsion 14 to close the opening, thereby preventing printing. Further, the photosensitive emulsion 14 filled in the metal area reduction dummy circular hole 5d has a concave shape without flattening the surface due to capillary action. Therefore, since the surface of the base metal 5 and the surface of the photosensitive emulsion 14 are not flush with each other, there is a step, and it is possible to prevent the base metal 5 from coming into close contact with the printing substrate 15 and becoming difficult to separate. Further, since the metal area reduction dummy circular hole 5d is a circular hole, the current density at the time of plating and the elongation in the vertical and horizontal directions are the same. However, it may be a slit hole or a lattice hole. Further, the metal area reducing dummy circular hole 5d has an angle of 22.5 ° so that the contact of the squeegee is shifted in the traveling direction.
 図10は従来の印刷用サスペンドメタルマスクのベースメタルの構成を模式化して示したものであり、実際のものとは異なる。図10において、ベースメタル5は、印刷用開口パターン5bが形成される部分の一部が開口しているだけであり、それ以外の部分は全て金属部分が残っている。したがって、金属部分が多くある分、ベースメタル5自体がハード構成となり、ベースメタル5の柔軟性にも欠けているものである。 FIG. 10 schematically shows the structure of the base metal of the conventional suspend metal mask for printing, which is different from the actual one. In FIG. 10, the base metal 5 has only a part of the part where the printing opening pattern 5b is formed, and the metal part remains in all other parts. Therefore, the base metal 5 itself has a hard configuration due to the large number of metal portions, and the base metal 5 lacks flexibility.
 図11はこの発明の印刷用サスペンドメタルマスクのベースメタルを用いた場合(点接触)と従来の印刷用サスペンドメタルマスクのベースメタルを用いた場合(面接触)の版離れ状態を比較して示す説明図である。従来の場合は、ベースメタル5の金属部分が多く残っている分、柔軟性にも欠けるので、図11aに示すように、ベースメタル5が湾曲して印刷基板15と面接触することになり、版離れが悪くなるが、この発明によれば、ベースメタル5の金属部分を少なくして、柔軟性を良くしたので、図11bに示すように、ベースメタル5が湾曲でなく角度を持って折れ曲がるので、印刷基板15と点接触することになり、版離れが良くなる。これにより、例えば特殊形状の基板に対するダメージを小さくすることが可能となる。 FIG. 11 shows a comparison between plate separation states when the base metal of the suspending metal mask for printing of the present invention is used (point contact) and when the base metal of the suspending metal mask for printing is used (surface contact). It is explanatory drawing. In the conventional case, since much metal portion of the base metal 5 remains, the flexibility is also lacking. Therefore, as shown in FIG. 11a, the base metal 5 is curved and comes into surface contact with the printed board 15, Although the separation of the plate is deteriorated, according to the present invention, since the metal portion of the base metal 5 is reduced and the flexibility is improved, the base metal 5 bends at an angle rather than a curve as shown in FIG. As a result, the printing substrate 15 is brought into point contact, and the separation of the plate is improved. Thereby, for example, damage to a specially shaped substrate can be reduced.
実施の形態2.
 図12はこの発明の実施の形態2における印刷用サスペンドメタルマスクのベースメタルの構成を示す平面図である。
Embodiment 2.
FIG. 12 is a plan view showing the structure of the base metal of the suspend metal mask for printing in the second embodiment of the present invention.
 上記実施の形態1では、ベースメタル5は、印刷用開口パターン5bが形成される部分の周囲の金属部分は数mm程度を残し、それ以外の印刷に関係がなく必要でない部分の金属部分に、直径約30mm程度の多数の金属面積縮小用ダミー円形孔5dを、互いに隣接するダミー円形孔5dの相互間の間隔が約5mmとなるように形成することにより、ベースメタル5の金属部分の面積を少なくしているが、この実施の形態2においては、図12に示すように、ベースメタル5は、印刷用開口パターン5bが形成される部分の周囲の金属部分は数mm程度を残しているが、それ以外の印刷に関係がなく必要でない部分は、全ての金属部分を無くしている。すなわち、印刷用開口パターン5bが形成される部分の周囲数mm以外には、ベースメタル5の金属部分は存在せず、金属製メッシュ1が存在するのみである。これにより、ベースメタル5の金属部分の多くを無くした分、ベースメタル5の柔軟性が良くなり、ベースメタル5自体の柔軟性と空気抜け性を向上させて、版離れを良くすることができる。なお、印刷用開口パターン5bが形成される部分の周囲数mm以外の部分に位置する金属製メッシュ1は、図12の左側半分に示すように、当初は金属製メッシュ1が開口しているが、印刷に関係がない部分の金属製メッシュ1は、図12の右側半分に示すように、金属製メッシュ1の開口に感光乳剤14を充填してメッシュ開口を閉塞することにより、印刷されないようにしている。この実施の形態2の印刷用サスペンドメタルマスクのベースメタルは、上記実施の形態1の印刷用サスペンドメタルマスクのベースメタルよりも柔軟性に富んだものとなるが、その分強度の方は弱くなる。 In the first embodiment, the base metal 5 has a metal portion around the portion where the printing opening pattern 5b is formed, leaving about several millimeters, and other metal portions that are not necessary regardless of printing, By forming a large number of dummy circular holes 5d for reducing the metal area with a diameter of about 30 mm so that the distance between the adjacent dummy circular holes 5d is about 5 mm, the area of the metal portion of the base metal 5 is reduced. In the second embodiment, as shown in FIG. 12, although the base metal 5 has a metal portion around the portion where the printing opening pattern 5b is formed, a few mm is left. All other metal parts are eliminated from the parts which are not necessary because they are not related to printing. That is, there is no metal portion of the base metal 5 other than a few mm around the portion where the printing opening pattern 5b is formed, and only the metal mesh 1 is present. Accordingly, the flexibility of the base metal 5 is improved as much as the metal portion of the base metal 5 is eliminated, and the flexibility and air escape of the base metal 5 itself can be improved and the separation of the plate can be improved. . In addition, although the metal mesh 1 located in the part other than the circumference of several mm around the part where the opening pattern 5b for printing is formed is shown in the left half of FIG. 12, the metal mesh 1 is initially opened. As shown in the right half of FIG. 12, the metal mesh 1 that is not related to printing is prevented from being printed by filling the opening of the metal mesh 1 with photosensitive emulsion 14 and closing the mesh opening. ing. The base metal of the suspending metal mask for printing according to the second embodiment is more flexible than the base metal of the suspending metal mask for printing according to the first embodiment, but the strength is weakened accordingly. .
実施の形態3.
 上記実施の形態3においては、ベースメタル用SUS母材4の表面の粗さが少ない場合、ベースメタル5の印刷面と接触する面の粗さが少なく滑らかな鏡面仕上げに近い面となるので、例えば、フィルム状の印刷基板に印刷する場合、空気の通り道ができずに密着してしまう恐れがある。そこで、ベースメタル用SUS母材4の表面の粗さが少ない場合は、ベースメタル5の印刷面と接触する面を後で研磨剤が入っている不織布で研磨することにより、粗くすると、開口不良が発生しにくく、均一性に優れたものとなる。なお、研磨剤が入っている不織布の代わりにサンドペーパーで研磨することもできる。また、ベースメタル用SUS母材4の表面を予めビーズブラスト等で粗くして、ベースメタル5の印刷面と接触する面を後でサンドペーパーや研磨剤が入っている不織布で研磨することを省略しても良い。ブラストに使用する砥剤は、ビーズ以外に鋼球等の球状物を用いることもできる。図13はこの発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタル用SUS母材表面をビーズブラスト等で粗した状態を示す顕微鏡写真、図14はこの発明の実施の形態3における印刷用サスペンドメタルマスクのベースメタル用SUS母材表面をビーズブラスト等で粗した状態を更に拡大して示す顕微鏡写真である。ビーズブラストは、ベースメタル5のめっき皮膜が2~25μmと薄膜であるが、SUS母材4から剥がし易くなる。
Embodiment 3.
In Embodiment 3 described above, when the surface roughness of the base metal SUS base material 4 is small, the surface that comes into contact with the printed surface of the base metal 5 is less rough and close to a smooth mirror finish. For example, when printing on a film-like printed circuit board, there is a possibility that air will not be able to pass and will adhere. Therefore, when the surface roughness of the base metal SUS base material 4 is small, if the surface that comes into contact with the printed surface of the base metal 5 is later polished with a non-woven fabric containing an abrasive, Is less likely to occur and has excellent uniformity. In addition, it can also grind with a sandpaper instead of the nonwoven fabric containing the abrasive | polishing agent. Also, the surface of the base metal SUS base material 4 is roughened with bead blasting in advance, and the surface that comes into contact with the printed surface of the base metal 5 is later polished with a nonwoven fabric containing sandpaper or an abrasive. You may do it. The abrasive used for blasting can be a spherical object such as a steel ball in addition to beads. 13 is a photomicrograph showing the surface of the SUS base material for base metal of the suspend metal mask for printing in Embodiment 3 of the present invention roughened by bead blasting, etc. FIG. 14 is for printing in Embodiment 3 of the present invention. It is a microscope picture which further expands and shows the state which roughened the SUS base material surface for base metals of a suspend metal mask with bead blasting etc. The bead blasting is a thin film with a plating film of the base metal 5 of 2 to 25 μm, but is easily peeled off from the SUS base material 4.
 なお、比較例として、セラミック#1000で研磨したメタルマスクを用意した。このメタルマスクは、算術平均粗さRa:0.072μm、最大高さRmax:1.516μm、十点平均粗さRz:1.004μm、凹凸の平均間隔Sm:92.3μmであり、印刷すると擦れが発生した。これに対し、試験例1は、ベルト#1000で研磨したメタルマスクであり、算術平均粗さRa:0.080μm、最大高さRmax:2.112μm、十点平均粗さRz:0.852μm、凹凸の平均間隔Sm:241.7μmであり、印刷すると擦れが発生しなかった。また、試験例2は、サンドペーパー#400で研磨したメタルマスクであり、算術平均粗さRa:0.060μm、最大高さRmax:1.756μm、十点平均粗さRz:0.812μm、凹凸の平均間隔Sm:286.8μmであり、印刷すると擦れが発生しなかった。また、試験例3は、サンドペーパー#1000で研磨したメタルマスクであり、算術平均粗さRa:0.096μm、最大高さRmax:3.144μm、十点平均粗さRz:1.412μm、凹凸の平均間隔Sm:136.2μmであり、印刷すると擦れが発生しなかった。また、試験例4は、ベースメタル用SUS母材4の表面を予めビーズブラスト2.0で粗くした場合で、算術平均粗さRa:0.132μm、最大高さRmax:2.904μm、十点平均粗さRz:1.480μm、凹凸の平均間隔Sm:174.3μmのメタルマスクであり、印刷すると擦れが発生しなかった。これらの試験例1~4は、いずれも擦れが無く印刷結果が良好であるが、試験例1は再現性が低く、試験例2~3はフリーハンド加工であることから、安定性が悪い。しかし、試験例4は擦れが改善されると同時に、細線部の断線もなく印刷結果が良好である。 As a comparative example, a metal mask polished with ceramic # 1000 was prepared. This metal mask has an arithmetic average roughness Ra: 0.072 μm, a maximum height Rmax: 1.516 μm, a ten-point average roughness Rz: 1.004 μm, and an average interval Sm: 92.3 μm. There has occurred. In contrast, Test Example 1 is a metal mask polished by belt # 1000, arithmetic average roughness Ra: 0.080 μm, maximum height Rmax: 2.112 μm, ten-point average roughness Rz: 0.852 μm, The average unevenness spacing Sm was 241.7 μm, and no rubbing occurred when printed. Test example 2 is a metal mask polished with sandpaper # 400, arithmetic average roughness Ra: 0.060 μm, maximum height Rmax: 1.756 μm, ten-point average roughness Rz: 0.812 μm, unevenness The average interval Sm was 286.8 μm, and no rubbing occurred when printed. Test Example 3 is a metal mask polished with sandpaper # 1000, arithmetic average roughness Ra: 0.096 μm, maximum height Rmax: 3.144 μm, ten-point average roughness Rz: 1.412 μm, unevenness The average interval Sm was 136.2 μm, and no rubbing occurred when printed. Test Example 4 is a case where the surface of the SUS base material 4 for base metal was previously roughened with bead blast 2.0, arithmetic average roughness Ra: 0.132 μm, maximum height Rmax: 2.904 μm, ten points. It was a metal mask having an average roughness Rz: 1.480 μm and an average unevenness interval Sm: 174.3 μm, and no rubbing occurred when printed. These Test Examples 1 to 4 are all free of rubbing and good printing results, but Test Example 1 has low reproducibility, and Test Examples 2 to 3 are freehand processing, so the stability is poor. However, in Test Example 4, the rubbing is improved, and at the same time, there is no disconnection of the fine line portion, and the printing result is good.
 この発明は、ベースメタルの金属部分の面積を小さくして柔軟性を持たせ、版離れを改善する印刷用サスペンドメタルマスクに適用することができる。 The present invention can be applied to a suspend metal mask for printing that reduces the area of the metal portion of the base metal to give flexibility and improve the separation of the plate.
 1 金属製メッシュ
 2 テトロンメッシュ
 3 金属製版枠
 4 ベースメタル用SUS母材
 5 ベースメタル
 5a 印刷開口パターン形成用レジスト
 5b 印刷用開口パターン
 5d 金属面積縮小用ダミー円形孔
 6 テトロンメッシュ
 7 接合補助用金属製版枠
 8 スポンジ
 9 粘着テープ
 10 陰極
 11 めっき槽
 12 ニッケル
 13 陽極
 14 感光乳剤
 15 印刷基板
 21 メッシュ層
 22 印刷層
 23 ステンシル層
 24 シール層
 25 基板
 26 パターニング・マスク
 27 インク
 28 開口
 29 オリフィス
 31 スクリーンメッシュ
 32 メタルマスク
 32a 画像透孔部
 33 樹脂(感光乳剤)
 33a 透孔
DESCRIPTION OF SYMBOLS 1 Metal mesh 2 Tetron mesh 3 Metal plate frame 4 SUS base material for base metal 5 Base metal 5a Resist for printing opening pattern formation 5b Printing opening pattern 5d Dummy circular hole for metal area reduction 6 Tetron mesh 7 Metal plate for joining assistance Frame 8 Sponge 9 Adhesive tape 10 Cathode 11 Plating tank 12 Nickel 13 Anode 14 Photosensitive emulsion 15 Print substrate 21 Mesh layer 22 Print layer 23 Stencil layer 24 Seal layer 25 Substrate 26 Patterning mask 27 Ink 28 Opening 29 Orifice 31 Screen mesh 32 Metal Mask 32a Image through-hole 33 Resin (photosensitive emulsion)
33a Through hole

Claims (8)

  1.  版枠と、
     前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、
     前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクにおいて、
     前記ベースメタルは、前記印刷用開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は可能な限り除去することにより、ベースメタルの金属部分の面積を縮小したことを特徴とするスクリーン印刷用サスペンドメタルマスク。
    Plate frame,
    A mesh having a metal mesh that is electrically conductive at least in the center, and is stretched by bonding and fixing the outer periphery to the inside of the plate frame;
    In a suspend metal mask for screen printing comprising a base metal provided with an opening pattern for printing, which is integrally bonded to the metal mesh and integrally bonded by bonding plating,
    The base metal leaves the metal part around the part where the printing opening pattern is formed, and removes the metal part other than the part not related to printing as much as possible. Suspended metal mask for screen printing, characterized by a reduced area.
  2.  印刷に関係がない部分の金属部分は、除去する金属部分の比率が10~90%であることを特徴とする請求項1記載のスクリーン印刷用サスペンドメタルマスク。 2. The suspending metal mask for screen printing according to claim 1, wherein a ratio of the metal part to be removed is 10 to 90% of the metal part which is not related to printing.
  3.  ベースメタルの金属部分の面積を縮小して、印刷基板と線接触するようにしたことを特徴とする請求項1記載のスクリーン印刷用サスペンドメタルマスク。 2. The suspending metal mask for screen printing according to claim 1, wherein the area of the metal portion of the base metal is reduced to be in line contact with the printed circuit board.
  4.  ベースメタルは、印刷用開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分には多数の金属面積縮小用ダミー孔を形成し、前記金属面積縮小用ダミー孔に乳剤を充填して孔を閉塞することにより、印刷されないようにしたことを特徴とする請求項1~請求項3のいずれかに記載のスクリーン印刷用サスペンドメタルマスク。 In the base metal, a metal portion around the portion where the opening pattern for printing is formed is left, and a plurality of dummy holes for reducing the metal area are formed in the metal portion which is not related to the printing, and the metal area The suspended metal mask for screen printing according to any one of claims 1 to 3, wherein printing is prevented by filling the reduction dummy holes with an emulsion to close the holes.
  5.  金属面積縮小用ダミー孔は、円形孔であることを特徴とする請求項4記載のスクリーン印刷用サスペンドメタルマスク。 5. The suspending metal mask for screen printing according to claim 4, wherein the dummy hole for reducing the metal area is a circular hole.
  6.  版枠と、
     前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、
     前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクにおいて、
     前記ベースメタルは、前記印刷用開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は全て無くし、
     前記ベースメタルの金属部分の存在しない部分の金属製メッシュは、メッシュの開口に乳剤を充填して開口を閉塞することにより、印刷されないようにしたことを特徴とするスクリーン印刷用サスペンドメタルマスク。
    Plate frame,
    A mesh having a metal mesh that is electrically conductive at least in the center, and is stretched by bonding and fixing the outer periphery to the inside of the plate frame;
    In a suspend metal mask for screen printing comprising a base metal provided with an opening pattern for printing, which is integrally bonded to the metal mesh and integrally bonded by bonding plating,
    The base metal leaves the metal part around the part where the opening pattern for printing is formed, and eliminates all other metal parts not related to printing,
    A suspending metal mask for screen printing, wherein a metal mesh of a portion where the metal portion of the base metal does not exist is not printed by filling the mesh opening with an emulsion to close the opening.
  7.  版枠と、前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備えたスクリーン印刷用サスペンドメタルマスクの製造方法であって、
     所定部分に印刷開口パターン形成用レジストが施され、かつそれ以外の部分に多数の金属面積縮小ダミー孔形成用レジストが施された前記ベースメタルと前記金属製メッシュとを一体接合する工程と、
     前記ベースメタルから前記印刷開口パターン形成用レジスト及び前記多数の金属面積縮小ダミー孔形成用レジストを剥離することにより、前記ベースメタルの所定部分に印刷用開口パターンを形成するとともに、前記ベースメタルのそれ以外の部分に多数の金属面積縮小用ダミー孔を形成する工程と、
     前記ベースメタルの所定部分に形成された印刷用開口パターンは開口したままとし、前記ベースメタルのそれ以外の部分に形成された多数の金属面積縮小用ダミー孔に乳剤を充填して開口を閉塞することにより、印刷されないようにする工程と、
     を備えたことを特徴とするスクリーン印刷用サスペンドメタルマスクの製造方法。
    A plate frame, a mesh having an outer periphery bonded and fixed to the inside of the plate frame, and a mesh having an electrically conductive metal mesh at least in the center, and an adhesive polymerized to the metal mesh and integrally bonded by bonding plating A suspending metal mask for screen printing comprising a base metal provided with an opening pattern for printing,
    A step of integrally bonding the base metal and the metal mesh, wherein a resist for forming a printing opening pattern is applied to a predetermined portion and a plurality of metal area reduction dummy hole forming resists are applied to other portions;
    By removing the resist for forming a printing opening pattern and the resists for forming a plurality of metal area reduction dummy holes from the base metal, a printing opening pattern is formed in a predetermined portion of the base metal, and that of the base metal. Forming a large number of metal area reduction dummy holes in a portion other than
    The opening pattern for printing formed in a predetermined portion of the base metal is left open, and a large number of dummy holes for reducing the metal area formed in other portions of the base metal are filled with emulsion to close the opening. A process of preventing printing,
    A method for producing a suspending metal mask for screen printing, comprising:
  8.  版枠と、前記版枠の内側に外周を接着固定して張設され、少なくとも中央部に通電性のある金属製メッシュを有するメッシュと、前記金属製メッシュに密着重合させて接合めっきにより一体接合され、印刷用開口パターンが設けられたベースメタルとを備え、前記ベースメタルは、前記印刷用開口パターンが形成される部分の周囲の金属部分は残し、それ以外の印刷に関係がない部分の金属部分は全て無くしたスクリーン印刷用サスペンドメタルマスクの製造方法であって、
     所定部分に印刷開口パターン形成用レジストが施された前記ベースメタルと前記金属製メッシュとを一体接合する工程と、
     前記ベースメタルから前記印刷開口パターン形成用レジストを剥離することにより、前記ベースメタルの所定部分に印刷用開口パターンを形成する工程と、
     前記ベースメタルの所定部分に形成された印刷用開口パターンは開口したままとし、前記ベースメタルの金属部分の存在しない部分の金属製メッシュの開口に乳剤を充填して開口を閉塞することにより、印刷されないようにする工程と、
     を備えたことを特徴とするスクリーン印刷用サスペンドメタルマスクの製造方法。
    A plate frame, a mesh having an outer periphery bonded and fixed to the inside of the plate frame, and a mesh having an electrically conductive metal mesh at least in the center, and an adhesive polymerized to the metal mesh and integrally bonded by bonding plating And a base metal provided with an opening pattern for printing, the base metal leaving a metal portion around the portion where the opening pattern for printing is formed, and the other portion of the metal not related to printing A method for producing a suspending metal mask for screen printing in which all parts are eliminated,
    A step of integrally joining the base metal and the metal mesh that have been subjected to a resist for forming a printing opening pattern on a predetermined portion;
    Forming a printing opening pattern on a predetermined portion of the base metal by peeling the printing opening pattern forming resist from the base metal;
    Printing is performed by leaving the opening pattern for printing formed in a predetermined portion of the base metal open, and filling the opening of the metal mesh where the metal portion of the base metal does not exist with an emulsion to close the opening. The process of preventing it,
    A method for producing a suspending metal mask for screen printing, comprising:
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