WO2014050824A1 - ガラス基板の製造装置及びガラス基板の製造方法 - Google Patents

ガラス基板の製造装置及びガラス基板の製造方法 Download PDF

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Publication number
WO2014050824A1
WO2014050824A1 PCT/JP2013/075732 JP2013075732W WO2014050824A1 WO 2014050824 A1 WO2014050824 A1 WO 2014050824A1 JP 2013075732 W JP2013075732 W JP 2013075732W WO 2014050824 A1 WO2014050824 A1 WO 2014050824A1
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WIPO (PCT)
Prior art keywords
clarification
glass substrate
tube
glass
molten glass
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PCT/JP2013/075732
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English (en)
French (fr)
Japanese (ja)
Inventor
慎吾 藤本
貴央 ▲はま▼谷
Original Assignee
ＡｖａｎＳｔｒａｔｅ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to JP2013553731A priority Critical patent/JP5752811B2/ja
Priority to KR1020147010687A priority patent/KR101622057B1/ko
Publication of WO2014050824A1 publication Critical patent/WO2014050824A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/225—Refining
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/167—Means for preventing damage to equipment, e.g. by molten glass, hot gases, batches
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a glass substrate manufacturing apparatus and a glass substrate manufacturing method for manufacturing a glass substrate by molding a molten glass produced by melting a glass raw material.
  • a glass substrate is generally manufactured through a process of forming molten glass from a glass raw material and then forming the molten glass into a glass substrate.
  • the above step includes a step of removing minute bubbles contained in the molten glass (hereinafter also referred to as clarification) as necessary.
  • the clarification is performed by passing the molten glass containing a clarifying agent such as As 2 O 3 through the clarification tube while heating the clarification tube, and removing bubbles in the molten glass by the oxidation-reduction reaction of the clarification agent. Is called. More specifically, the temperature of the melted molten glass is further raised to make the fining agent function and the bubbles are floated and defoamed.
  • clarification includes a process for floating and defoaming bubbles (hereinafter also referred to as a defoaming process or a defoaming process) and a process for absorbing small bubbles into molten glass (hereinafter also referred to as an absorption process or an absorption process).
  • a defoaming process or a defoaming process a process for floating and defoaming bubbles
  • an absorption process or an absorption process Conventionally, As 2 O 3 has been commonly used as a fining agent, but recently, SnO 2 , Fe 2 O 3, and the like have been used from the viewpoint of reducing the environmental load.
  • the inner wall of the member in contact with the molten glass needs to be made of an appropriate material according to the temperature of the molten glass in contact with the member, the required quality of the glass substrate, and the like.
  • a platinum group metal such as platinum or a platinum alloy is generally used as a material constituting the above-mentioned clarification tube (Patent Document 1).
  • Platinum or a platinum alloy is expensive but has a high melting point and excellent corrosion resistance against molten glass.
  • the temperature at which the clarification tube is heated during the defoaming step is about 1000 to 1650 ° C., although it varies depending on the composition of the glass substrate to be molded.
  • tin oxide SnO 2 (tin oxide) or the like has recently been used as a clarifying agent that does not have a high environmental load as described above.
  • tin oxide has a weaker ability to release bubbles during the defoaming process than arsenous acid, so it is necessary to lower the viscosity of the glass to increase the defoaming effect, and therefore it is necessary to clarify at a high temperature. is there.
  • tin oxide when tin oxide is used as a fining agent, it is preferable to raise the temperature to 1600 ° C. or higher.
  • the present invention maintains the strength of the clarification tube even when SnO 2 having a low environmental load is used as a clarification agent when the defoaming treatment is performed by heating the clarification tube in the manufacturing process of the glass substrate.
  • a glass substrate manufacturing method and a manufacturing apparatus capable of reducing volatile substances adhering to the vicinity of a reinforcing portion of a clarification tube are provided.
  • one aspect of the present invention is a glass substrate manufacturing apparatus having a clarification tank for clarifying molten glass in a glass substrate manufacturing process, wherein the clarification tank is platinum or A clarification tube made of a platinum alloy, a reinforcing portion that is provided in the circumferential direction of the clarification tube, reinforces the clarification tube, and an upper region of the inner surface of the clarification tube, and passes the molten glass through the clarification tube A gas phase space that is preset as a space on the liquid surface of the molten glass when clarified, and the reinforcing portion has an air flow in the gas phase space in at least a part of the gas phase space. It is formed in a shape in which no stagnation occurs.
  • the reinforcing portion is formed in a shape that prevents the concentration of platinum volatiles from rising locally in the gas phase space.
  • the reinforcing part is formed in a shape that does not generate an airflow opposite to the airflow in the gas phase space.
  • Another aspect of the present invention is a glass substrate manufacturing apparatus having a clarification tank for clarifying molten glass in a glass substrate manufacturing process, wherein the clarification tank is made of platinum or a platinum alloy.
  • at least a part of the reinforcing portion belonging to the gas phase space may be formed in a curved shape.
  • another aspect of the present invention is a method for producing a glass substrate, wherein the above-mentioned glass substrate production apparatus is used to heat molten glass containing a fining agent while heating the fining tube to the fining tube.
  • a defoaming step of passing and defoaming is particularly suitable when the fining agent is tin oxide.
  • the above aspect is particularly suitable when the molten glass is made of a material that requires a melting temperature of 1300 ° C. or higher when the viscosity is 10 2.5 poise.
  • the glass substrate manufacturing apparatus and glass substrate manufacturing method of the present invention even if the temperature related to fining requires higher temperature than before, the strength of the fining tube is maintained by the reinforcing portion, and in the vicinity of the reinforcing portion. In this case, volatile substances are difficult to adhere. Therefore, since it can avoid that a foreign material mixes into a molten glass during a defoaming process, the quality of glass products can be maintained.
  • FIG. 2 It is a schematic block diagram of the glass substrate manufacturing apparatus for demonstrating the manufacturing method of the glass substrate of embodiment. It is the schematic which shows the basic composition of a clarification tank.
  • A) is a sectional view taken along line 3a-3a in FIG. 2, and
  • (b) is a plan view of a reinforcing portion. It is a figure which shows the modification of this embodiment,
  • (a) And (b) is sectional drawing which follows the 3a-3a line
  • FIG. 1 is a schematic diagram for explaining a glass substrate manufacturing method according to an embodiment, and shows a basic flow in manufacturing a glass substrate in a simplified manner.
  • a glass substrate manufacturing apparatus (hereinafter also simply referred to as an apparatus) 100 includes a melting tank 10 that heats a glass raw material to produce molten glass, a clarification tank 30 that clarifies molten glass, and a molding apparatus that molds molten glass (FIG. (Not shown) and transfer pipes 20 and 40 for connecting them.
  • the transfer pipe 20 connects the melting tank 10 and the clarification tank 30, and supplies the molten glass derived from the melting tank 10 to the clarification tank 30.
  • the transfer pipe 40 connects the clarification tank 30 and a molding apparatus (not shown), and supplies the molten glass derived from the clarification tank 30 to the molding apparatus (not shown).
  • the stirring tank for stirring and homogenizing a molten glass may be arrange
  • the arrow indicates the direction in which the molten glass flows.
  • the glass raw material thrown into the melting tank 10 is appropriately prepared according to the composition of the glass substrate to be produced.
  • the glass composition constituting the glass substrate is displayed in mass%, SiO 2 : 50 to 70%, Al 2 O 3 : 0 to 25%, B 2 O 3 : 1 to 15%, MgO: 0 to 10%, CaO: 0-20%, SrO: 0 to 20%, BaO: 0 to 10%, RO: 5 to 30% (where R is at least one selected from Mg, Ca, Sr and Ba, and mass% means the total amount thereof), It is preferable that it is an alkali free glass containing.
  • the glass substrate may be a glass containing a trace amount of alkali containing a trace amount of alkali metal.
  • the total of R ′ 2 O is 0.10% or more and 0.5% or less, preferably 0.20% or more and 0.5% or less (where R ′ is selected from Li, Na, and K) It is preferable that the glass substrate contains at least one kind. Of course, the total of R ′ 2 O may be less than 0.10%.
  • the glass composition is represented by mass% in addition to the above components, and SnO 2 : 0.01 to 1% (preferably 0.01 To 0.5%), Fe 2 O 3 : 0 to 0.2% (preferably 0.01 to 0.08%), and considering the environmental burden, As 2 O 3 , Sb 2 O 3 And you may prepare a glass raw material so that PbO may not be included substantially.
  • the molten glass generated in the melting tank 10 is sent to the clarification tank 30 through the transfer pipe 20.
  • the molten glass is kept at a predetermined temperature (in the case of glass having the above composition, for example, 1500 ° C. or higher), and clarification including a defoaming step for removing bubbles contained in the molten glass is performed.
  • the molten glass clarified in the clarification tank 30 is sent to the molding apparatus via the transfer pipe 40.
  • the molten glass is cooled in the transfer pipe 40 when it is sent from the clarification tank 30 to the molding apparatus so as to have a temperature suitable for molding (for example, about 1200 ° C. in the case of glass having the above composition).
  • molten glass is formed into a glass substrate.
  • FIG. 2 is a side view showing a basic configuration of the clarification tank 30.
  • the clarification tank 30 mainly includes a clarification tube 31, heater electrodes 32a and 32b connected to the clarification tube 31, and a reinforcing portion 33 as a reinforcing material for reinforcing the clarification tube.
  • the clarification tube 31 is a metal tube of a platinum alloy such as platinum or a platinum rhodium alloy, and generally has a cylindrical shape.
  • the molten glass MG flows through the inside of the clarification tube 31 using the pipe line of the clarification tube 31 as a flow path.
  • the heater electrodes 32 a and 32 b cause a current to flow from the outer peripheral wall surface of the clarification tube 31 to the clarification tube 31.
  • a current flows through the clarification tube 31
  • Joule heat is generated by the resistance of the clarification tube 31
  • the outer peripheral wall of the clarification tube 31 is heated, and the temperature of the molten glass MG rises to a predetermined temperature.
  • the clarification tank 30 passes the molten glass MG mixed with the clarifier while heating the molten glass MG through the clarification tube 31 to degas the molten glass MG.
  • the reinforcing portion 33 is a metal plate of platinum alloy such as platinum or platinum rhodium alloy, and is disposed between the clarification tubes 31 and 31 and is a ring-shaped plate material in which the clarification tubes 31 and 31 are welded and connected to both sides. is there.
  • the reinforcing portion 33 is provided in the circumferential direction of the clarification tube 31 to reinforce the clarification tube 31.
  • the outer diameter of the reinforcing portion 33 is made equal to the clarification tube 31.
  • the outer diameter of the reinforcing portion 33 may be slightly larger than that of the clarification tube 31 so that the reinforcement portion 33 protrudes from the outer peripheral surface of the clarification tube 31. Thereby, while improving the construction property of welding, the intensity
  • the molten glass MG flowing inside the clarification tube 31 does not flow in the entire cross-section of the flow path of the clarification tube 31, but normally, bubbles defoamed by defoaming treatment of the molten glass MG are provided above the clarification tube 31.
  • the gas phase space g is set in advance as a space on the liquid surface of the molten glass MG when the molten glass MG is passed through the clarification tube 31 and defoamed.
  • a gas exhaust port 30a is provided at the upper part of the clarification tube 31 for releasing the gas component in the bubbles released from the gas phase space g to the atmosphere.
  • the airflow F in the gas phase space g flows along the inner surface 31a of the clarification tube 31 toward the gas exhaust port 30a.
  • FIG. 3A is a cross-sectional view taken along line 3a-3a in FIG. 2, and FIG. 3B is a front view of the reinforcing portion 33.
  • the reinforcing portion 33 is a ring-shaped member that is provided in the circumferential direction of the clarification tube 31 and protrudes from the inner surface 31 a of the clarification tube 31 to the inside of the clarification tube 31.
  • the buckling strength in the circumferential direction of the reinforcing portion 33 is higher than the buckling strength in the circumferential direction of the clarification tube 31.
  • the buckling strength in the circumferential direction of the clarification tube 31 is improved by providing the reinforcement portion 33 in the clarification tube 31.
  • the defoaming is performed by passing the molten glass MG through the clarification tube 31, which is an upper region of the inner surface 31 a of the clarification tube 31.
  • the gas phase space g is set in advance as a space on the liquid surface of the molten glass MG.
  • the reinforcement part 33 which belongs to the gaseous-phase space g is removed.
  • the reinforcing part 33 is provided with a notch 33a corresponding to a part belonging to the gas phase space g.
  • the radius r of the arc constituting the inner edge of the notch 33a is equal to the radius R of the inner circumference of the clarification tube 31, that is, 1 ⁇ 2 of the inner diameter D of the clarification tube 31. Therefore, as shown in FIG. 3A, the portion where the notch 33a is formed in the reinforcing portion 33 does not protrude from the inner surface 31a of the clarification tube 31 and the gas phase space g The part to which it belongs is removed.
  • the amount p of the reinforcing portion 33 protruding from the inner surface 31a of the clarification tube 31 is set to 0 in the gas phase space g.
  • the reinforcing portion 33 is provided so as to protrude from the inner surface 31a of the clarification tube 31 with a predetermined protrusion amount p larger than zero.
  • the protrusion amount p of the reinforcing portion 33 is the radial height of the clarification tube 31 from the inner surface 31a of the clarification tube 31, and the thickness t, volatilization amount, temperature and strength of the clarification tube 31, and the reinforcement portion It is determined in consideration of the thickness of 33.
  • the width w of the notch 33a is equal to or slightly larger than the thickness t of the clarification tube 31.
  • the gas phase space g can have a predetermined size by adjusting the liquid level of the molten glass MG flowing through the clarification tube 31 of the clarification tank 30.
  • a gas space g having a certain size can be maintained.
  • the liquid level is measured by using a laser displacement meter, for example, as necessary, and adjusted by a suitable method such as increasing or decreasing the amount of glass material put into the melting tank 10.
  • a suitable method such as increasing or decreasing the amount of glass material put into the melting tank 10.
  • the liquid level of the molten glass is lowered, a portion protruding from the inner surface 31a of the clarification tube 31 of the reinforcing portion 33 may be exposed to the gas phase space g. Therefore, the liquid level of the molten glass is set to the gas phase space g set in advance. It is desirable to adjust so as not to fall below the lower limit of.
  • the vicinity of the reinforcing portion is a region including the surface of the reinforcing portion and where the airflow F can stay under the influence of the reinforcing portion. Volatile substances adhering to the vicinity of the reinforcing portion may fall and be mixed into the molten glass MG during the defoaming process, leading to a decrease in the quality of the glass substrate.
  • the defoaming treatment is performed by passing the molten glass through the clarification tube 31, a space on the liquid surface of the molten glass MG is previously stored.
  • a gas phase space g is set.
  • the reinforcing portion 33 is formed in a shape in which the airflow F does not stay in the gas phase space g. That is, the reinforcing portion 33 is provided in a shape that prevents the concentration of platinum volatiles from rising locally in at least a part of the gas phase space g.
  • the reinforcing portion 33 is formed in at least a part of the gas phase space g so as not to generate an airflow opposite to the airflow F toward the gas exhaust port 30a or an airflow that stagnates and stays in the airflow F. ing.
  • SnO 2 having a low environmental load is used as a fining agent to be blended in the molten glass MG, the temperature related to fining requires a high temperature, and the portion in contact with the gas phase space g of the fining tube 31 is volatilized.
  • the airflow in the gas phase space g does not stay in the vicinity of the reinforcing portion 33 and the concentration of the volatile matter does not rise locally and become supersaturated, the volatile matter is in the vicinity of the reinforcing portion 33. Does not adhere.
  • the reinforcement part 33 is provided in the circumferential direction of the clarification pipe 31 except the gas phase space g, the strength of the clarification pipe 31 can be maintained by the reinforcement part 33. Therefore, it is possible to effectively avoid foreign matters from being mixed into the molten glass MG while maintaining the strength of the clarification tube 31 during the defoaming step, and the quality of the glass product can be maintained.
  • the molten glass has a viscosity at which bubbles are likely to rise, preferably in a range from 120 poise to 400 poise so that the oxygen release reaction of the clarifier is promoted. It is heated before being supplied to the clarification tank 30.
  • a non-alkali glass or alkali alkali trace containing glass containing only trace amounts high-temperature viscosity glass
  • high-temperature viscosity glass i.e., for example, when a 10 2.5 poise 1300 ° C. or higher, preferably 1400 ° C. or more, more preferably 1500 ° C. or higher
  • a glass material that requires a melting temperature of 1,700 ° C. preferably 1710 ° C., more preferably 1720 ° C. That is, it is necessary to raise the temperature of the clarification tank 30 to near the temperature resistance of platinum or platinum alloy of the clarification pipe 31 constituting the clarification tank 30.
  • this embodiment is particularly suitable when a glass substrate is manufactured using a glass material having a high temperature viscosity. Specifically, it is particularly suitable when made of glass requiring 1300 ° C. or more melting temperature in the case of a 10 2.5 poise molten glass.
  • the melting temperature is preferably 1400 ° C. or higher, more preferably a glass material that requires a melting temperature of 1500 ° C. or higher.
  • tin oxide is used as a fining agent, the temperature is raised to 1630 ° C. to 1700 ° C., preferably 1630 ° C. to 1710 ° C., more preferably 1630 ° C. to 1720 ° C.
  • the present invention is particularly suitable for the production of glass substrates using tin oxide as a fining agent.
  • the present invention is particularly suitable for manufacturing glass substrates for flat panel displays (FPD) such as liquid crystal displays, plasma displays, and organic EL displays.
  • FPD flat panel displays
  • the present invention even when the portion of the inner wall of the clarification tube 31 in contact with the gas phase space g is volatilized, the volatile matter adheres to the inner surface 31a of the clarification tube 31. Can be suppressed.
  • the method for manufacturing a glass substrate of the present invention is not limited to the manufacturing method of the above-described embodiment.
  • the glass substrate manufacturing method of the present invention can be applied to glass raw materials other than the glass raw materials exemplified in the above-described embodiment, using conventional raw materials that have been conventionally used.
  • all the reinforcing portions 33 belonging to the gas phase space g set in advance as a space on the liquid surface of the molten glass MG are removed.
  • the reinforcing portion 33 has a shape in which airflow does not stay in the removed portion by removing at least a part belonging to the gas phase space g. It can also be formed.
  • the reinforcing part 33 When the portion of the clarification tube 31 in contact with the gas phase space g is volatilized, volatiles tend to adhere to the top portion a of the clarification tube 31. Therefore, a part of the reinforcing part 33 is removed so that the reinforcing part 33 does not protrude from the inner surface 31a of the clarification tube 31 at least at the top part a of the gas phase space g. Thereby, the reinforcement part 33 becomes a shape in which the stay of an air current does not arise in the vicinity of the top part a, and adhesion of the volatile matter to the vicinity of the reinforcement part 33 is suppressed.
  • the reinforcing portion 33 while maintaining the strength of the clarification tube 31 by the reinforcing portion 33, mixing of foreign matters into the molten glass MG can be suppressed, and the quality of the glass product can be maintained. Further, by forming one or two or more holes in the reinforcing portion 33 belonging to the gas phase space g, it is possible to prevent airflow from staying in the vicinity of the reinforcing portion 33. Further, in at least a part of the gas phase space g, a certain effect can be obtained only by making the amount p of the reinforcing portion 33 protruding from the inner surface 31a of the clarification tube 31 smaller than the other portions.
  • the amount p of the reinforcing portion 33 protruding from the inner surface 31a of the clarification tube 31 is reduced as compared with the conventional case, the stay of the air current in the vicinity of the reinforcing portion 33 is suppressed, the adhesion of volatiles is suppressed, and the molten glass MG The foreign matter is prevented from being mixed into the glass, and the quality of the glass product can be maintained.
  • at least a part of the reinforcing portion 33 belonging to the gas phase space g is formed in a curved shape, preferably a smooth curved shape, so that the air flow F does not stay in the vicinity of the reinforcing portion 33. You may do it.
  • the reinforcing portion 33 uses a ring-shaped plate material that is continuous in the circumferential direction.
  • the reinforcing portion 33 is disposed between the clarification tubes 31 and 31, and the clarification tube 31 is disposed on both sides of the reinforcement portion 33.
  • a connected configuration is adopted.
  • the aspect of the present invention is not limited to the above-described embodiment.
  • a ring-shaped reinforcing part having a cut is fixed to the inner surface 31 a of the clarification pipe 31, and the cut part of the reinforcing part 33 is made to correspond to the gas phase space g preset in the clarification pipe 31.
  • the cut portion of the reinforcing portion 33 may be set as a region where the reinforcing portion 33 does not protrude from the inner surface 31a of the clarification tube 31. Further, the reinforcing portion 33 may fix a ring-shaped plate material having a cutout portion 33 a in the circumferential direction to the inner surface 31 a of the clarification tube 31. Moreover, you may make it the air flow F go to the gas exhaust port 30a by enlarging the radius r of the circular arc of the notch 33a, so that it approaches the gas exhaust port 30a.
  • platinum group metal means a metal composed of a platinum group element, and is used as a term including not only a metal composed of a single platinum group element but also an alloy of the platinum group element.
  • the platinum group element refers to six elements of platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), osmium (Os), and iridium (Ir).
  • Platinum group metals are expensive, but have a high melting point and excellent corrosion resistance to molten glass.
  • the clarification tank is preferably cylindrical as shown in the figure, but there is no limitation on its shape as long as a space for accommodating the molten glass MG is secured therein.
  • the present invention is suitable for manufacturing a glass substrate on which glass is formed by an overflow downdraw method.
  • the present invention is suitable for manufacturing a glass substrate on which glass is formed by an overflow downdraw method.
  • molten glass is caused to flow down along both side surfaces of the wedge-shaped molded body, and is merged at the lower end portion of the wedge-shaped molded body to be formed into a sheet glass. Slowly cool and cut.
  • the overflow downdraw method can realize a smooth surface by stretching the molten glass in the vertical direction without touching anything and cooling it.
  • the cut glass sheet is further cut into a predetermined size according to the customer's specifications, subjected to end face polishing, cleaning, etc., and shipped.
  • the present invention is suitable for manufacturing a glass substrate for FPD having a thickness of 0.5 to 0.7 mm and a size of 300 ⁇ 400 mm to 2850 ⁇ 3050 mm, for example.
  • the alkali metal component is not included at all, or even if it is included, it is a trace amount that does not affect the semiconductor element. Is preferred.
  • the glass substrate for liquid crystal display devices and the like as described above, the glass composition, the temperature of the molten glass, the fining agent, and the like are selected, so the present invention is suitable for the production of glass substrates for liquid crystal display devices and the like. Suitable.
  • various suitable modifications can be made without departing from the spirit of the invention.
  • the reinforcing portion may be unevenness provided by bending the clarification tube in the circumferential direction of the clarification tube.
  • a concave portion is formed on the inner surface of the fining tube.
  • a convex portion is formed on the inner surface of the clarification tube.
  • the apparatus of the present invention can be advantageously used when a molten glass is formed to produce a glass substrate, particularly a glass substrate for a flat panel display (FPD) such as a liquid crystal display, a plasma display, and an organic EL display.
  • a flat panel display such as a liquid crystal display, a plasma display, and an organic EL display.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Liquid Crystal (AREA)
  • Glass Melting And Manufacturing (AREA)
PCT/JP2013/075732 2012-09-27 2013-09-24 ガラス基板の製造装置及びガラス基板の製造方法 WO2014050824A1 (ja)

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JP2013553731A JP5752811B2 (ja) 2012-09-27 2013-09-24 ガラス基板の製造装置及びガラス基板の製造方法
KR1020147010687A KR101622057B1 (ko) 2012-09-27 2013-09-24 글래스 기판의 제조 장치 및 글래스 기판의 제조 방법

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
JP2016533313A (ja) * 2013-10-18 2016-10-27 コーニング インコーポレイテッド ガラス製造装置および方法
WO2018110218A1 (ja) * 2016-12-16 2018-06-21 日本電気硝子株式会社 板ガラス製造方法、清澄容器及び板ガラス製造装置
JP2018172225A (ja) * 2017-03-31 2018-11-08 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板製造装置、及びガラス基板の製造方法
WO2019230488A1 (ja) * 2018-05-30 2019-12-05 日本電気硝子株式会社 ガラス物品の製造方法
US11919800B2 (en) 2018-09-27 2024-03-05 Corning Incorporated Modular molten glass delivery apparatus

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