WO2014050384A1 - 露光描画装置、露光描画システム、プログラム及び露光描画方法 - Google Patents

露光描画装置、露光描画システム、プログラム及び露光描画方法 Download PDF

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Publication number
WO2014050384A1
WO2014050384A1 PCT/JP2013/072502 JP2013072502W WO2014050384A1 WO 2014050384 A1 WO2014050384 A1 WO 2014050384A1 JP 2013072502 W JP2013072502 W JP 2013072502W WO 2014050384 A1 WO2014050384 A1 WO 2014050384A1
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WIPO (PCT)
Prior art keywords
information
job
exposure
image
job information
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Application number
PCT/JP2013/072502
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English (en)
French (fr)
Japanese (ja)
Inventor
幸久 尾崎
佐藤　淳一
Original Assignee
株式会社アドテックエンジニアリング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社アドテックエンジニアリング filed Critical 株式会社アドテックエンジニアリング
Priority to KR1020157006282A priority Critical patent/KR102119430B1/ko
Priority to CN201380049191.4A priority patent/CN104641299B/zh
Publication of WO2014050384A1 publication Critical patent/WO2014050384A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2032—Simultaneous exposure of the front side and the backside
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits

Definitions

  • the present invention relates to an exposure drawing apparatus, an exposure drawing system, a program, and an exposure drawing method, and more particularly, to an exposure drawing apparatus and an exposure drawing system that draw images on both sides of a substrate to be exposed, and the exposure drawing apparatus and the exposure drawing system.
  • the present invention relates to a program to be executed and an exposure drawing method for drawing an image on both sides of a substrate to be exposed.
  • an exposure drawing apparatus that exposes a substrate to be exposed, which is a printed circuit board, to a light beam modulated based on image information and draws an image on the substrate to be exposed. Also, in order to draw an image on both surfaces of the substrate to be exposed, two exposure drawing apparatuses are arranged in parallel, one is used for drawing the first surface, and the other is drawn on the second surface opposite to the first surface.
  • An exposure and drawing system for use in the field has also been developed.
  • the substrate to be exposed is conveyed to a predetermined position of the exposure drawing device for the second surface, An image is drawn on the second surface of the substrate to be exposed by the exposure drawing apparatus.
  • Patent Document 1 discloses a throughput of a transfer process of a substrate to be exposed when images are drawn on the first surface and the second surface of the substrate to be exposed using two exposure drawing devices, respectively. An exposure drawing system with improved image quality is disclosed.
  • Each exposure drawing apparatus included in the exposure drawing system includes a stage on which the substrate to be exposed is placed, stage moving means for moving the stage linearly, and light on the first surface of the substrate to be exposed placed on the stage. And a drawing unit having beam scanning means for scanning the beam.
  • Each exposure drawing apparatus includes an upstream unit disposed on the upstream side of the drawing unit in the moving direction of the stage, and a downstream unit disposed on the downstream side of the drawing unit in the moving direction of the stage.
  • Each exposure drawing apparatus carries the substrate to be exposed onto the stage in the drawing unit by holding the substrate to be exposed in the upstream unit and moving it in the transport direction that is the same as the moving direction of the stage.
  • a carrying-in means is provided.
  • Each exposure drawing apparatus includes unloading means for unloading the exposed substrate to the downstream unit so as to hold the exposed substrate on the stage in the drawing unit and move it in the transport direction.
  • each exposure drawing apparatus when the light beam is scanned on the first surface of the substrate to be exposed, the stage is moved from the upstream side to the downstream side in the transport direction, and the substrate to be exposed is carried to the stage located on the upstream side, The substrate to be exposed is unloaded from the stage located on the downstream side.
  • an operator draws an image drawn on the exposed substrate and an exposure condition for drawing on the exposure drawing apparatus.
  • Enter job information indicating a request (job).
  • job information indicating a request (job).
  • job information indicating a request (job).
  • the exposure drawing process may fail and the exposed substrate that has become defective may be removed.
  • the exposure drawing process may fail and the exposed substrate that has become defective may be removed.
  • each surface of the substrate to be exposed does not correspond to each other.
  • the present invention has been made in view of the above problem, and an exposure drawing apparatus capable of preventing images that do not correspond to each other from being drawn on each side when drawing images on both sides of the substrate to be exposed,
  • An object of the present invention is to provide an exposure drawing system, a program, and an exposure drawing method.
  • an exposure drawing apparatus comprises a first drawing means for drawing an image on the first surface by exposing the first surface of the substrate to be exposed, and the substrate on the substrate to be exposed.
  • First job information in which image information indicating an image to be drawn on the first surface is associated with exposure condition information indicating an exposure condition, and an image to be drawn on a second surface opposite to the first surface of the substrate to be exposed
  • Storage means for storing second job information in which image information indicating the exposure condition information indicating the exposure condition is associated, and correspondence information indicating a correspondence relationship between the first job information and the second job information; The second surface of the substrate to be exposed on which the first surface is exposed on the first surface under the exposure condition indicated by the first job information, thereby drawing the image indicated by the first job information on the first surface.
  • Second drawing means for drawing an image indicated by the second job information on the second surface.
  • an image is drawn on the first surface by exposing the first surface of the substrate to be exposed by the first drawing means.
  • the first job information in which image information indicating an image to be drawn on the first surface of the substrate to be exposed and exposure condition information indicating an exposure condition are associated with each other by the storage unit.
  • Second job information in which image information indicating an image to be drawn on a second surface opposite to the first surface of the substrate is associated with exposure condition information indicating an exposure condition, and the first job information and the second Correspondence information indicating a correspondence relationship with job information is stored.
  • the second drawing means exposes the first surface under the exposure condition indicated by the first job information by the first drawing means, thereby indicating the first surface by the first job information.
  • the first job information associated with the first job information used when the image is drawn on the first surface based on the correspondence information.
  • the image indicated by the second job information is drawn on the second surface.
  • the correspondence information that associates the first job information for drawing an image on the first surface with the second job information for drawing an image on the second surface is used. Since the image is drawn on the second surface using the second job information associated with the first job information used when the image is drawn on the first surface, the image is drawn on both surfaces of the substrate to be exposed. At this time, it is possible to prevent the drawing of images that do not correspond to each other on each surface.
  • the storage means includes a first storage area storing the first job information and a second storage area storing the second job information, and the correspondence information is stored in the first storage area. You may make it memorize
  • an exposure drawing system is a first in which image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • First storage means for storing job information, a first image for rendering an image indicated by the first job information on the first surface by exposing the first surface under an exposure condition indicated by the first job information.
  • a first exposure drawing apparatus comprising: drawing means; and transmission means for sending information indicating the first job information used when drawing an image on the first surface by the first drawing means; and the substrate to be exposed Second job information in which image information indicating an image to be drawn on a second surface opposite to the first surface and exposure condition information indicating an exposure condition are associated with each other, and the first job information and the second job Correspondence with information Second storage means for storing correspondence information, receiving means for receiving information indicating the first job information transmitted by the transmitting means, and information indicating the first job information received by the receiving means in the correspondence information And determining means for determining an image to be drawn on the second surface and an exposure condition based on the second job information associated with the first job information indicated by the first job information, and the exposure condition determined by the determining means. And a second exposure drawing apparatus including second drawing means for drawing the image determined by the determining means on the second surface by exposing two surfaces.
  • the first storage unit of the first exposure drawing apparatus associates image information indicating an image drawn on the first surface of the substrate to be exposed with exposure condition information indicating the exposure condition.
  • the first job information is stored.
  • the first drawing unit of the first exposure drawing apparatus exposes the first surface under the exposure condition indicated by the first job information, so that the image indicated by the first job information is applied to the first surface.
  • the transmission means of the first exposure drawing apparatus sends information indicating the first job information used when the first drawing means draws an image on the first surface.
  • the image information indicating the image to be drawn on the second surface opposite to the first surface of the substrate to be exposed and the exposure condition by the second storage means of the second exposure drawing apparatus are stored. Further, the information indicating the first job information transmitted by the transmitting unit is received by the receiving unit of the second exposure drawing apparatus. Further, based on the second job information associated with the first job information indicated by the information indicating the first job information received by the receiving unit in the correspondence information by the determining unit of the second exposure drawing apparatus. Thus, an image to be drawn on the second surface and an exposure condition are determined. Further, the second drawing means of the second exposure drawing apparatus exposes the second surface under the exposure condition determined by the determining means, thereby drawing the image determined by the determining means on the second surface.
  • the second exposure drawing apparatus causes the first job information for drawing an image on the first surface and the second job information for drawing an image on the second surface. Is stored, and the second job information associated with the first job information used when the image is drawn on the first surface is specified and used. Since images are drawn on two surfaces, it is possible to prevent images that do not correspond to each other from being drawn on each surface when images are drawn on both surfaces of the substrate to be exposed.
  • the correspondence information includes identification information for identifying the first job information and identification information for identifying the second job information corresponding to the first job information.
  • the information indicating the first job information may be the identification information of the first job information.
  • the transmission unit of the first exposure drawing apparatus transmits the information indicating the first job information only when the drawing by the first drawing unit is normally completed.
  • the transmission unit of the first exposure drawing apparatus transmits error information indicating that an error has occurred when the drawing by the first drawing unit ends abnormally.
  • the exposure drawing system includes a third storage unit that stores the first job information, the second job information, and the correspondence information, and the first job information stored by the third storage unit. Is transmitted to the first exposure drawing apparatus, and further includes a control device including a second transmission means for transmitting the second job information and the correspondence information to the second exposure drawing apparatus, and the first exposure drawing apparatus includes: , Further comprising second receiving means for receiving the first job information transmitted by the second transmitting means, wherein the first drawing means of the first exposure drawing apparatus receives the first received by the second receiving means. Third receiving means for drawing an image on the first surface using one job information, and wherein the second exposure drawing apparatus receives the second job information and the correspondence information transmitted by the second transmitting means.
  • the second determining unit of the second exposure drawing apparatus determines an image to be drawn on the second surface and an exposure condition using the second job information and the correspondence information received by the third receiving unit. May be. As a result, the entire system can be comprehensively managed by the control device.
  • the control device further includes a receiving unit that receives input of the first job information, the second job information, and the correspondence information, and the third storage unit of the control device.
  • the first job information, the second job information, and the correspondence information received by the receiving unit may be stored. Thereby, the image corresponding to each other can be drawn on each surface of the substrate to be exposed using the job information input by the user.
  • an exposure drawing system is a first in which image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • image information indicating an image drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • exposure condition information indicating an exposure condition are associated with each other.
  • First drawing means for drawing an image on the first surface, and the first information associated with the first job information used when the image is drawn on the first surface by the first drawing means in the correspondence information.
  • a first exposure drawing apparatus including a transmission unit for transmitting information; a reception unit for receiving the second job information transmitted by the transmission unit; and an exposure indicated by the second job information received by the reception unit.
  • a second exposure drawing apparatus including second drawing means for drawing an image indicated by the second job information on the second surface by exposing the second surface under conditions.
  • the first storage unit of the first exposure drawing apparatus associates image information indicating an image drawn on the first surface of the substrate to be exposed with exposure condition information indicating the exposure condition.
  • the first job information is stored, and the first job information, the image information indicating the image drawn on the second surface opposite to the first surface of the substrate to be exposed, and the exposure condition information indicating the exposure condition Correspondence information indicating the correspondence relationship of the second job information associated with is stored.
  • the first drawing unit of the first exposure drawing apparatus exposes the first surface under the exposure condition indicated by the first job information, so that the image indicated by the first job information is applied to the first surface.
  • the second job information associated with the first job information used when the image is drawn on the first surface by the first drawing unit in the correspondence information by the transmission unit of the first exposure drawing apparatus. Is transmitted.
  • the second job information transmitted by the transmitting unit is received by the receiving unit of the second exposure drawing apparatus. Further, the second drawing unit of the second exposure drawing apparatus exposes the second surface under the exposure condition indicated by the second job information received by the receiving unit, so that an image indicated by the second job information is obtained. It is drawn on the second surface.
  • the first exposure drawing apparatus causes the first job information for drawing an image on the first surface and the second job information for drawing an image on the second surface.
  • the second job information associated with the first job information used when the image is drawn on the first surface is transmitted to the second exposure drawing apparatus using the correspondence information. Therefore, when images are drawn on both surfaces of the substrate to be exposed, it is possible to prevent images that do not correspond to each other from being drawn on each surface.
  • an exposure drawing system is a first in which image information indicating an image to be drawn on a first surface of a substrate to be exposed is associated with exposure condition information indicating an exposure condition.
  • a fourth storage means for storing job information; a first for rendering an image indicated by the first job information on the first surface by exposing the first surface under an exposure condition indicated by the first job information;
  • a first exposure drawing apparatus comprising drawing means, and third transmission means for sending information indicating the first job information used for drawing by the first drawing means; the first job information; and the substrate to be exposed.
  • Second job information in which image information indicating an image drawn on a second surface opposite to the first surface and exposure condition information indicating an exposure condition are associated with each other, and the first job information and the second job information
  • the correspondence with Fifth storage means for storing correspondence information, fourth reception means for receiving information indicating the first job information transmitted by the third transmission means, and the correspondence information received by the fourth reception means in the correspondence information
  • a control device including a fourth transmission unit that transmits the second job information associated with the first job information indicated by the information indicating the first job information, and the second transmission unit transmitted by the fourth transmission unit.
  • a second receiving unit configured to receive information indicating two job information; and exposing the second surface under an exposure condition indicated by the information indicating the second job information received by the fifth receiving unit.
  • a second exposure drawing apparatus including a second drawing means for drawing an image indicated by the job information on the second surface.
  • the fourth storage means of the first exposure drawing apparatus associates the image information indicating the image drawn on the first surface of the substrate to be exposed with the exposure condition information indicating the exposure condition.
  • the first job information is stored.
  • the first drawing unit of the first exposure drawing apparatus exposes the first surface under the exposure condition indicated by the first job information, so that the image indicated by the first job information is applied to the first surface.
  • Information indicating the first job information used for drawing by the first drawing unit is transmitted by the third transmission unit of the first exposure drawing apparatus.
  • the fifth storage means of the control device displays the first job information and the image information indicating the image to be drawn on the second surface opposite to the first surface of the exposed substrate. And the second job information in which the exposure condition information indicating the exposure condition is associated, and the correspondence information indicating the correspondence relationship between the first job information and the second job information.
  • information indicating the first job information transmitted by the third transmitting unit is received by the fourth receiving unit of the control device.
  • the fifth receiving means of the second exposure drawing apparatus receives the information indicating the second job information transmitted by the fourth transmitting means, and the second exposure drawing apparatus The second drawing means exposes the second surface under the exposure condition indicated by the information indicating the second job information received by the fifth receiving means, so that the image indicated by the second job information is the first image. Draw on two sides.
  • the control device associates the first job information for drawing an image on the first surface with the second job information for drawing an image on the second surface.
  • Correspondence information is stored, and the second job information associated with the first job information received when the image is drawn on the first surface received from the first exposure drawing apparatus is stored in the second using the correspondence information. Since the image is transmitted to the exposure drawing device, it is possible to prevent the drawing of images that do not correspond to each other when drawing images on both sides of the exposed substrate without adding a new function to the exposure drawing device. be able to.
  • the exposure condition includes a size of the substrate to be exposed, a number of exposure targets of the substrate to be exposed, and a mark for determining an image drawing area on the substrate to be exposed. It may include at least one of the arrangement pattern of the mark when provided and the photosensitive material type of the substrate to be exposed. Thereby, an image can be drawn on the exposure conditions suitable for each surface of the substrate to be exposed.
  • the computer associates image information indicating an image to be drawn on the first surface of the substrate to be exposed with exposure condition information indicating the exposure condition.
  • First drawing means for drawing an image indicated by the first job information on the first surface by exposing the first surface under an exposure condition indicated by the first job information, and indicated by the first job information.
  • the first job information When drawing an image on the second surface of the substrate to be exposed on which the first surface is drawn by exposing the first surface under exposure conditions, the first job information and The correspondence indicating the correspondence between the image information indicating the image drawn on the second surface opposite to the first surface of the substrate to be exposed and the second job information in which the exposure condition information indicating the exposure condition is associated.
  • the second job is exposed by exposing the second surface under the exposure condition indicated by the second job information associated with the first job information used when the image is drawn on the first surface. It functions as a second drawing means for drawing the image indicated by the information on the second surface.
  • the computer can be operated in the same manner as the exposure drawing apparatus and the exposure drawing system according to the present invention.
  • images are drawn on both sides, it is possible to prevent drawing of images that do not correspond to each other on each side.
  • an exposure drawing method includes a first drawing unit that draws an image on the first surface by exposing the first surface of the substrate to be exposed.
  • First job information in which image information indicating an image to be drawn is associated with exposure condition information indicating an exposure condition, and image information indicating an image to be drawn on a second surface opposite to the first surface of the substrate to be exposed.
  • the second surface of the substrate to be exposed on which the first surface is exposed on the first surface under the exposure condition indicated by the first job information thereby drawing the image indicated by the first job information on the first surface.
  • the exposure drawing method according to the present invention operates in the same manner as the exposure drawing apparatus and the exposure drawing system according to the present invention. It is possible to prevent images that do not correspond to each other from being drawn on each surface.
  • the exposed substrate C is a flat substrate such as a printed wiring board or a glass substrate for a flat panel display.
  • the exposure drawing system 1 is opposite to the first exposure drawing apparatus 2 that performs exposure on the first surface of the substrate C to be exposed and the first surface of the substrate C to be exposed.
  • a second exposure drawing apparatus 3 for performing exposure on the second surface is provided.
  • the exposure drawing system 1 is provided between the first exposure drawing device 2 and the second exposure drawing device 3, and includes a reversing device 4 for inverting the front and back of the substrate C to be exposed, a first surface of the substrate C to be exposed, A control device 5 for controlling exposure on the second surface is provided.
  • the first exposure drawing apparatus 2 and the control apparatus 5 are connected to each other by the wired cable 8a, and the second exposure drawing apparatus 3 and the control apparatus 5 are connected to each other by the wired cable 8a. Communication is performed between the apparatus 2 and the second exposure drawing apparatus 3 via the wired cable 8a. Similarly, the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 are connected by a wired cable 8b, and these exposure drawing apparatuses communicate via the wired cable 8b.
  • the configuration of the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 according to the present embodiment will be described.
  • the 1st exposure drawing apparatus 2 and the 2nd exposure drawing apparatus 3 have the same structure, the 1st exposure drawing apparatus 2 is demonstrated here and the description about the 2nd exposure drawing apparatus 3 is abbreviate
  • the first exposure drawing apparatus 2 includes a flat stage 10 for fixing the substrate C to be exposed.
  • a plurality of suction holes (not shown) for sucking air are provided on the upper surface of the stage 10.
  • the air between the substrate C to be exposed and the stage 10 is sucked through the suction hole, so that the substrate C to be exposed is vacuum-sucked to the stage 10. .
  • the stage 10 is supported by a flat base 12 movably provided on the upper surface of the table-like base 11. That is, one or a plurality of (in this embodiment, two) guide rails 14 are provided on the upper surface of the base 11.
  • the base 12 is supported so as to be freely movable along the guide rail 14, and is moved by being driven by a drive mechanism (stage drive unit 42 described later) constituted by a motor or the like.
  • the stage 10 moves along the guide rail 14 in conjunction with the movement of the base 12.
  • the direction in which the stage 10 moves is defined as the Y direction
  • the direction perpendicular to the Y direction in the horizontal plane is defined as the X direction
  • the direction orthogonal to the Y direction in the vertical plane is defined as the Z direction.
  • a gate-shaped gate 15 is provided on the upper surface of the base body 11 so as to straddle the two guide rails 14.
  • the exposed substrate C placed on the stage 10 moves so as to enter and exit along the guide rail 14 through the opening of the gate 15.
  • An exposure unit 16 that exposes a light beam toward the opening is attached to the upper part of the opening of the gate 15. When the stage 10 moves along the guide rail 14 and is positioned at the opening by the exposure unit 16, the light beam is exposed on the upper surface of the substrate C to be exposed placed on the stage 10.
  • the exposure unit 16 includes a plurality (16 in the present embodiment) of exposure heads 16a. Each of the exposure heads 16 a is arranged in a matrix in the exposure unit 16.
  • the exposure unit 16 is connected to an optical fiber 18 drawn from a light source unit 17 described later and a signal cable 20 drawn from an image processing unit 19 described later.
  • Each of the exposure heads 16a has a digital micromirror device (DMD) as a reflective spatial light modulation element.
  • the exposure head 16 a modulates the light beam from the light source unit 17 by controlling the DMD based on the image information input from the image processing unit 19.
  • the first exposure drawing apparatus 2 exposes the substrate C to be exposed by irradiating the substrate C with this modulated light beam.
  • the spatial light modulator is not limited to the reflective type, and may be a transmissive spatial light modulator such as liquid crystal.
  • the image area P1 that is an area exposed by the exposure head 16a has a rectangular shape in which one side is inclined at a predetermined inclination angle with respect to the moving direction (Y direction) of the stage 10. It is.
  • FIG. 3A shows only a part of the plurality of exposure heads 16a according to this embodiment.
  • the substrate C to be exposed is moved along with the movement of the stage 10 as shown in FIG. 3B.
  • a strip-shaped exposed region P2 is formed for each exposure head 16a.
  • Each of the exposure heads 16a arranged in a matrix is arranged in the X direction so as to be shifted by a distance obtained by multiplying the length of the long side of the image region P1 by a natural number (in this embodiment, 1).
  • Each of the exposed regions P2 is formed so as to partially overlap with the adjacent exposed region P2.
  • a gate-type gate 22 is further provided on the upper surface of the base 11 so as to straddle the two guide rails 14.
  • the exposed substrate C placed on the stage 10 moves so as to enter and exit the opening of the gate 22 along the guide rail 14.
  • the photographing unit 23 is a CCD camera or the like having a built-in strobe with a very short light emission time.
  • a rail 23a is provided on the upper part of the opening of the gate 22 along a direction (X direction) perpendicular to the moving direction (Y direction) of the stage 10 in the horizontal plane. It is provided so that it can move by being guided by 23a.
  • the imaging unit 23 images the upper surface of the substrate C to be exposed placed on the stage 10.
  • the first exposure drawing apparatus 2 includes a first transfer unit 6 that transfers a substrate C to be exposed carried from the outside to a predetermined position of the first exposure drawing apparatus 2, and a substrate C to be exposed. Is transported from the first exposure drawing device 2 to a predetermined position of the reversing device 4.
  • the second exposure drawing apparatus 3 includes a first transfer unit 6 that transfers the substrate C to be exposed from the reversing device 4 to a predetermined position of the second exposure drawing apparatus 3, and the substrate C to be exposed of the second exposure drawing apparatus 3.
  • a second transport unit 7 for transporting to the outside is provided.
  • the first transport unit 6 and the second transport unit 7 have a plurality of rotating rollers and a drive motor that rotates the rotating rollers.
  • Each of the plurality of rotating rollers is laid in parallel, and a sprocket or pulley that receives a rotational force transmitted by a belt or a wire is attached to one end of the rotating roller.
  • a transmission method using a cylindrical magnet can be employed in addition to the belt or the wire.
  • the first exposure drawing apparatus 2 is an auto carrier hand (hereinafter referred to as “automatic carrier hand”) that transports the substrate C to be exposed, which has been transported to the predetermined position by the first transport unit 6 from the predetermined position to the stage 10.
  • AC hand AC hand
  • the AC hand 24 is formed in a flat plate shape and is movably provided in the X direction and the Z direction.
  • the lower surface of the AC hand 24 is provided with a plurality of suction holes 25 for sucking air. The AC hand 24 sucks air between the AC hand 24 and the exposed substrate C through the suction hole 25 when the lower surface of the AC hand 24 moves to a position where the lower surface of the AC hand 24 contacts the upper surface of the exposed substrate C.
  • the substrate C is sucked and held on the lower surface of the AC hand 24 by vacuum suction. Further, when the AC hand 24 moves to the upper surface of the stage 10 with the substrate to be exposed C sucked and held on the lower surface of the AC hand 24, the substrate C to be exposed is pushed downward and pressed against the stage 10 Z. A pressing portion 26 that is movable in the direction is provided.
  • the AC hand 24 of the first exposure drawing apparatus 2 sucks and holds the unexposed substrate C that has been transported to the first transport unit 6 and moves it upward and places it on the upper surface of the stage 10. Further, the AC hand 24 of the first exposure drawing apparatus 2 moves the exposed substrate C upward by attracting and holding the exposed substrate C exposed on the first surface placed on the upper surface of the stage 10. Move to the second transport unit 7. The exposed substrate C whose first surface has moved to the second transport unit 7 is exposed to the outside of the first exposure drawing apparatus 2 by the second transport unit 7.
  • the AC hand 24 of the second exposure drawing apparatus 3 sucks and holds the exposed substrate C exposed to the first surface conveyed to the first conveyance unit 6 and moves the exposed substrate C upward. It is placed on the upper surface of the stage 10.
  • the AC hand 24 of the second exposure drawing apparatus 3 moves the upper surface by sucking and holding the exposed substrate C on which the first surface and the second surface placed on the upper surface of the stage 10 are exposed.
  • the exposure substrate C is moved to the second transport unit 7.
  • the exposed substrate C having the exposed first and second surfaces moved to the second transport unit 7 is carried out of the exposure drawing system 1 by the second transport unit 7.
  • the reversing device 4 includes a flat plate-like subframe 30 that is pivotally supported by a rotation shaft L.
  • the subframe 30 reverses the front and back of the substrate C to be exposed by rotating 180 degrees while holding the substrate C to be exposed inside.
  • a carry-in entrance 31 through which the substrate C to be exposed is carried into the sub-frame 30 is provided on the side of the sub-frame 30 on the side where the first exposure drawing apparatus 2 is located. It has been. Furthermore, a plurality of roller pairs 34 driven by a motor 33 are provided inside the subframe 30. The roller pair 34 conveys the substrate C to be exposed housed in the subframe 30 in a sandwiched state. The exposed substrate C is transported into the subframe 30 through the carry-in port 31 by the roller pair 34, and the front and back are reversed by the rotation of the subframe 30, and the subframe through the carry-in port 31 by the roller pair 34. 30 to the outside. In addition, when the subframe 30 finishes carrying out the substrate C to be exposed, the subframe 30 is rotated 180 degrees again in order to carry the next substrate C to be exposed.
  • the first exposure drawing apparatus 2 is provided with a system control unit 40 that is electrically connected to each part of the apparatus.
  • the system control unit 40 controls each part of the first exposure drawing apparatus 2. Is centrally controlled.
  • the first exposure drawing apparatus 2 includes a job storage unit 41, a stage drive unit 42, a display device 43, an input device 44, a shooting drive unit 46, and an external input / output unit 48.
  • the system control unit 40 has a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), and HDD (Hard Disk Drive). Further, the system control unit 40 causes the CPU to emit a light beam from the light source unit 17 and output corresponding image information from the image processing unit 19 at a timing according to the movement of the stage 10. In this way, the system control unit 40 controls the exposure of the light beam to the substrate C to be exposed by the exposure head 16a.
  • CPU Central Processing Unit
  • RAM Random Access Memory
  • ROM Read Only Memory
  • HDD Hard Disk Drive
  • the job storage unit 41 includes a RAM and a non-volatile memory, and stores job information indicating a job to be executed.
  • the job in this embodiment exposes and draws the same image on the first surface of one or more exposed substrates C under the same conditions, and the same image on the second surface of the exposed substrate C. This is a batch exposure processing request for exposure drawing under conditions. Details of the job information will be described later.
  • the job storage unit 41 stores job information of a job to be executed in a list format, but is not limited thereto, and may be stored in a queue format.
  • the stage drive unit 42 has a drive mechanism constituted by a motor or a hydraulic pump, and drives the stage 10 under the control of the system control unit 40.
  • the display device 43 is a display unit such as a liquid crystal display that displays various information under the control of the system control unit 40.
  • the input device 44 is an input means such as a touch sensor or operation buttons for inputting various information by a user operation.
  • the imaging drive unit 46 has a drive mechanism constituted by a motor or a hydraulic pump, and drives the imaging unit 23 under the control of the system control unit 40.
  • the external input / output unit 48 inputs / outputs various information to / from various information processing apparatuses including the second exposure drawing apparatus 3 and the control apparatus 5 connected to the first exposure drawing apparatus 2.
  • the external input / output unit 48 of the second exposure drawing apparatus 3 inputs various information to and from various information processing apparatuses including the first exposure drawing apparatus 2 and the control apparatus 5 connected to the second exposure drawing apparatus 3. Output.
  • the control device 5 includes a control unit 50 that controls the exposure drawing process in the exposure drawing system 1.
  • the control device 5 includes a storage unit 51 having a ROM, an HDD, and the like that store programs and various data necessary for exposure drawing processing by the control unit 50.
  • the storage unit 51 also stores job information, a job setting processing program, a first job execution processing program, a second job execution processing program, and a job selection processing program of the second embodiment.
  • control device 5 includes a display unit 52 such as a liquid crystal display that displays various types of information based on the control of the control unit 50, and an input unit 53 such as a keyboard and a mouse that inputs various types of information through user operations. Furthermore, the control device 5 includes a communication interface 54 that transmits and receives various types of information to and from the first exposure drawing device 2 and the second exposure drawing device 3 based on the control of the control unit 50.
  • display unit 52 such as a liquid crystal display that displays various types of information based on the control of the control unit 50
  • input unit 53 such as a keyboard and a mouse that inputs various types of information through user operations.
  • control device 5 includes a communication interface 54 that transmits and receives various types of information to and from the first exposure drawing device 2 and the second exposure drawing device 3 based on the control of the control unit 50.
  • the control device 5 accepts input of information regarding a job by a user operation. Further, when the control device 5 accepts input of information related to a job, the control device 5 generates and transmits job information corresponding to each of the first exposure drawing device 2 and the second exposure drawing device 3.
  • the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 receive job information, the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 store the received job information in the job storage unit 41, and the exposed substrate C according to the contents of the stored job.
  • the first exposure drawing apparatus 2 stores a plurality of pieces of job information
  • the first exposure drawing apparatus 2 executes the job indicated by the job information in the order in which the pieces of job information are received.
  • the second exposure drawing apparatus 3 according to the present embodiment sequentially executes jobs corresponding to the jobs executed by the first exposure drawing apparatus 2.
  • the control device 5 When generating the job information, the control device 5 causes the first exposure drawing device 2 to draw an image on the first surface of the substrate C to be exposed, and the second exposure drawing device 3 sets the second information of the substrate C to be exposed.
  • Job information 60B for drawing an image on the surface is generated and stored in the storage unit 51. That is, even for jobs related to the same substrate C to be exposed, exposure drawing processing is performed on the first surface and the second surface by separate exposure drawing apparatuses. Two-side job information 60B is generated and stored separately.
  • the job information 60A, 60B is information in which job identification information 61, image information 61a, exposure condition information 62, and partner information 63 are associated with each job, as shown in FIGS. 7A and 7B as an example. It is.
  • the job identification information 61 is information for identifying each job.
  • the image information 61a is information indicating an image to be drawn.
  • the exposure condition information 62 is information indicating the exposure conditions when exposing the light beam to draw an image corresponding to the substrate C to be exposed.
  • the exposure condition information 62 includes substrate size information indicating the substrate size of the exposure target substrate C (hereinafter referred to as “target substrate”) to be drawn, and drawing number information indicating the number of drawing of the target substrate. Contains.
  • the exposure condition information 62 includes mark information in which a mark arrangement pattern in the case where a mark for determining a drawing area of an image corresponding to the target substrate is provided is indicated by coordinates, and Sensitive material type information indicating the sensitive material type of the target substrate is included.
  • the arrangement pattern of the marks provided on the target substrate is a mirror image on the first surface and the second surface.
  • the information included in the exposure condition information 62 is not limited to these, and any information may be used as long as it is information used when performing the exposure drawing process, such as information indicating the intensity of the light beam and information indicating the moving speed of the stage 10. It may be the information.
  • the partner information 63 is information indicating job identification information of a partner job (hereinafter, also referred to as “partner job”) that corresponds to each other on the first and second sides.
  • the operator When the operator wants the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 to execute a job, the operator inputs each information included in the job information 60A and 60B to the control apparatus 5 via the input unit 53. .
  • the control device 5 performs job setting processing for generating job information 60A for the first surface and job information 60B for the second surface based on each input information and storing the job information 60B for the second surface in the storage unit 51. Do.
  • FIG. 8 is a flowchart showing a processing flow of a job setting processing program executed by the control unit 50 of the control device 5 when an execution instruction is input via the input unit 53.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • the display unit 52 is controlled to display a job input screen for assisting the user in inputting information related to the job.
  • the job input screen 70 includes a first surface image input field 71 for inputting image identification information indicating an image to be drawn on the first surface, and an image to be drawn on the second surface. It has the 2nd surface image input column 72 which inputs the image identification information shown.
  • the image identification information is a file name of a file including image information, a URL (Uniform Resource Locator) indicating a storage location of the image file, or the like.
  • the job input screen 70 also has a substrate type input field 73 for inputting substrate type information indicating the substrate type of the substrate C to be exposed that is applied to the job to be input. Further, the job input screen 70 has a drawing number input field 74 for inputting drawing number information indicating the number of drawing of the exposed substrate C in the target job. Furthermore, the job input screen 70 has an input end button 75 for designating information indicating that the input has ended. When each information is input to each input field, selection candidates are displayed in a list display or the like for each input field, and any one of the displayed selection candidates is selected via the input unit 53. good. The user designates the input end button 75 after inputting information corresponding to each input field using the input unit 53.
  • the process waits until the input end button 75 is designated, thereby waiting until the input of information related to the job is completed.
  • job information 60A, 60B is generated based on each information input in each input field, and the generated job information 60A, 60B is stored in the storage unit 51.
  • the control unit 50 uses the image information 61a as the image information of the image indicated by the information input in the first surface image input field 71, the information input in the drawing number input field 74 as the drawing number information, and the second information.
  • Information input in the surface image input field 72 is referred to as partner information 63.
  • the control unit 50 generates job information 60A for the first surface.
  • substrate size information, mark information, and sensitive material type information are determined from the information input in the substrate type input field 73.
  • the substrate size information, the mark information, and the photosensitive material type information are stored in the storage unit 51 in association with each substrate type of the substrate C to be exposed.
  • the substrate size information, mark information, and sensitive material type information corresponding to the substrate type indicated by the information input in the substrate type input field 73 are converted into the substrate size of the job information 60A. Information, mark information, and sensitive material type information.
  • the image information of the image indicated by the information input in the second surface image input field 72 is set as the image information 61a
  • the information input in the drawing number input field 74 is set as the number of drawn images
  • the first surface image input field 71 is displayed.
  • job information 60B on the second side is generated.
  • substrate size information, mark information, and sensitive material type information are determined and applied in the same manner as the job information 60A.
  • step S107 the job information 60A on the first surface generated by the processing in step S105 is transmitted to the first exposure drawing apparatus 2 via the wired cable 8a.
  • the first exposure drawing apparatus 2 stores the received job information 60 ⁇ / b> A in its own job storage unit 41.
  • step S109 the job information 60B for the second surface generated by the process in step S105 is transmitted to the second exposure drawing apparatus 3 via the wired cable 8a, and then the job setting process program is terminated.
  • the second exposure drawing apparatus 3 stores the received job information 60B in its own job storage unit 41.
  • the control device 5 performs the job information 60 ⁇ / b> A on the first surface and the job on the second surface based on information input by the user.
  • Information 60B is generated.
  • the counterpart information 63 is the job identification information attached to the corresponding job information, so that the corresponding job information 60A, 60B are associated with each other.
  • the job identification information 61 and the partner information 63 in each of the job information 60A and 60B correspond to correspondence information indicating a correspondence relationship between the job information 60A on the first surface and the job information 60B on the second surface.
  • the first exposure drawing apparatus 2 When the first exposure drawing apparatus 2 receives and stores the job information 60A from the control apparatus 5, the first exposure drawing apparatus 2 draws an image on the first surface of the substrate C to be exposed based on the stored job information 60A in accordance with a predetermined user operation. The first job execution process is performed.
  • FIG. 11 is a flowchart showing the flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing according to a predetermined user operation, but may be the timing at which the job information 60A is received.
  • step S200 control is performed to display the job information 60A stored in the job storage unit 41 on the display device 43.
  • the system control unit 40 performs control to display each job information 60A in a list format.
  • the number of exposed substrates C indicated by the drawing number information of the job information 60 ⁇ / b> A to be executed is arranged on the upstream side of the first transport unit 6 of the first exposure drawing apparatus 2.
  • the user selects and designates the displayed job information 60A via the input device 44, thereby inputting a job execution instruction indicated by the designated job information 60A.
  • next step S201 the process waits until the job execution instruction is input.
  • job information 60A corresponding to the job instructed to execute hereinafter referred to as “execution first page job”. Get image information from.
  • image information image information of the job information 60A
  • the present invention is not limited to this. That is, the image identification information may be stored in the job information 60A, and the image information of the image to be drawn may be acquired from the control device 5 or an external storage device based on the image identification information.
  • an exposure condition for drawing an image on the substrate C to be exposed is determined by executing the execution first surface job.
  • the system control unit 40 determines the exposure condition based on the substrate size information, the number of drawn images information, the mark information, and the photosensitive material type information in the job information 60A of the execution first surface job.
  • the system control unit 40 photographs the mark provided on the substrate C to be exposed by the photographing unit 23, and measures the position of the mark from the image obtained by the photographing. Further, the system control unit 40 determines a drawing area in which an image is drawn based on the measured mark position. Further, the system control unit 40 deforms the image to be drawn based on the determined size and shape of the drawing area.
  • the system control unit 40 determines the intensity of the light beam to be exposed, the moving speed of the stage 10 (or the exposure time of the light beam), and the like according to the photosensitive material type indicated by the photosensitive material type information.
  • an exposure drawing process for drawing an image by exposing a light beam to the substrate C to be exposed is started according to the determined exposure condition.
  • the system control unit 40 draws the deformed image on the exposed substrate C by exposing the light beam modulated based on the deformed image by the exposure head 16a. .
  • step S209 it is determined whether or not a predetermined error has occurred.
  • the system control unit 40 performs the exposure drawing process due to deformation or positioning failure of the substrate C to be exposed, failure of a part used when performing exposure drawing of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is determined that an error has occurred, for example, when stopped halfway. If the determination in step S209 is affirmative, the process proceeds to step S211, error information indicating that an error has occurred is transmitted to the control device 5, and the first job execution processing program is terminated. On the other hand, the control device 5 that has received the error information performs control to display the error information on the display unit 52. Note that the system control unit 40 may transmit error information to the second exposure drawing apparatus 3.
  • the second exposure drawing apparatus 3 that has received the error information performs control to display the error information on the display device 43, or draws job information 60B of the job corresponding to the execution first page job in which the error has occurred. 1 is subtracted from the number of sheets.
  • step S209 if a negative determination is made in step S209, the process proceeds to step S213.
  • step S213 it is determined whether or not the exposure drawing process for one substrate to be exposed C has been completed. If a negative determination is made in step S213, the process returns to step S209. If an affirmative determination is made, the process proceeds to step S215.
  • step S215 information indicating the execution first surface job is transmitted to the second exposure drawing apparatus 3.
  • the system control unit 40 transmits job identification information 61 in the job information 60 ⁇ / b> A of the execution first surface job to the second exposure drawing apparatus 3.
  • the job identification information 61 is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, but the present invention is not limited to this. That is, the information to be transmitted may be information that allows the second exposure drawing apparatus 3 to specify the execution first surface job, and may be, for example, the job information 60A itself.
  • next step S217 it is determined whether or not all the processes included in the execution first page job have been completed.
  • the system control unit 40 determines that the execution first surface job is completed when the exposure drawing process for the exposure target substrate C having the drawing number indicated by the drawing number information of the exposure condition information 62 is completed.
  • step S217 If the determination in step S217 is negative, the process returns to step S209. If the determination is affirmative, the first job execution processing program is terminated.
  • the second exposure drawing apparatus 3 When the second exposure drawing apparatus 3 according to the present embodiment receives the job identification information of the execution first page job from the first exposure drawing apparatus 2, the second exposure drawing apparatus 3 is based on the job identification information and the job information 60B received from the control device 5. Then, a second job execution process for drawing an image on the second surface of the substrate C to be exposed is performed.
  • FIG. 12 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job identification information is received, but may be the timing at which a predetermined execution instruction is input by the user via the input device 44.
  • step S301 there is job information 60B indicating a job on the second surface (hereinafter referred to as “execution second surface job”) corresponding to the job indicated by the job identification information of the received execution first surface job. It is determined whether or not to do.
  • the system control unit 40 determines whether or not the job information 60 ⁇ / b> B including the job identification information 61 of the execution first page job exists as the partner information 63 among the job information 60 ⁇ / b> B stored in the job storage unit 41. Determine whether.
  • step S301 determines whether there is no job to be executed. If the determination in step S301 is affirmative, the process proceeds to step S303. On the other hand, if a negative determination is made in step S301, the process proceeds to step S311 to be described later, error information indicating that there is no job to be executed is transmitted to the control device 5, and the first job execution processing program is terminated. To do.
  • step S303 image information of an image to be drawn on the exposed substrate C is acquired in the job information 60B of the execution second-surface job.
  • the system control unit 40 acquires the image information of the image indicated as the image information 61a in the job information 60B of the execution second page job.
  • the image information is stored in the storage unit 51 of the control device 5 and the second exposure drawing device 3 acquires the image information from the control device 5.
  • Image information may be stored in a storage unit included in the drawing apparatus 3.
  • an exposure condition for drawing an image on the substrate C to be exposed in the execution second surface job that is a job to be executed is set.
  • the system control unit 40 sets the exposure conditions based on the substrate size information, the number of drawn images information, the mark information, and the photosensitive material type information in the job information 60B of the execution second surface job.
  • an exposure drawing process for drawing an image by exposing a light beam to the substrate C to be exposed is started according to the set exposure condition.
  • step S309 it is determined whether an error has occurred in the execution second-side job.
  • the system control unit 40 performs the exposure drawing process due to deformation or positioning failure of the substrate C to be exposed, failure of a part used when performing exposure drawing of the light source unit 17, the image processing unit 19, the exposure unit 16, and the like. It is determined that an error has occurred, for example, when stopped halfway. If the determination in step S309 is affirmative, the process proceeds to step S311, where error information indicating that an error has occurred in the job being executed is transmitted to the control device 5, and the second job execution processing program is terminated. On the other hand, when it becomes negative determination by step S309, it transfers to step S313.
  • step S313 it is determined whether or not the exposure drawing process for the substrate C to be exposed has been completed. If the determination in step S313 is negative, the process returns to step S309. If the determination is affirmative, the process proceeds to step S315.
  • step S315 it is determined whether or not the execution second side job is completed.
  • the system control unit 40 determines that the execution second-side job is completed when the exposure drawing process for the exposure target substrate C having the drawing number indicated in the drawing number information of the exposure condition information 62 is completed. If a negative determination is made in step S314, the process proceeds to step S317.
  • step S317 the process waits until job identification information 61 for drawing an image on the next substrate C to be exposed in the execution second-surface job is received.
  • next step S319 it is determined whether or not the received job identification information 61 is the same as the job identification information 61 of the execution second side job.
  • step S319 If the determination in step S319 is affirmative, the process proceeds to step S309. On the other hand, if a negative determination is made in step S319, the process proceeds to step S311 and error information indicating that the job identification information 61 different from the job identification information 61 of the execution second-surface job has been received is transmitted to the control device 5. Then, the first job execution processing program ends.
  • step S315 determines whether the first job execution processing program is terminated.
  • step S215 of the first job execution processing program the first exposure drawing apparatus 2 transmits the job identification information 61 of the executed first surface job to the second exposure drawing apparatus 3, but this is not limitative. Not. That is, in step S215, the first exposure drawing apparatus 2 may transmit the partner information 63 of the job information 60A of the execution first surface job to the second exposure drawing apparatus 3. In this case, in step S301 of the second job execution processing program, the job indicated by the job information 60B having the received partner information 63 as the job identification information 61 is set as an execution second side job.
  • information indicating the first job executed is transmitted from the first exposure drawing apparatus 2 to the second exposure drawing apparatus 3, and the corresponding job is selected and executed by the second exposure drawing apparatus 3.
  • the first exposure drawing apparatus 2 transmits information indicating the first job to be executed to the control apparatus 5, the control apparatus 5 selects a corresponding job, and the selected job is subjected to the second exposure drawing. Transmit to device 3.
  • FIG. 13 is a flowchart showing a processing flow of a job setting processing program executed by the control unit 50 of the control device 5 of the exposure drawing system 1 when an execution instruction is input via the input unit 53.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • steps S401 to S405 processing similar to that in steps S101 to S105 of the first embodiment is performed.
  • the generated job information 60A for the first surface is transmitted to the first exposure drawing apparatus 2 via the wired cable 8a, and the job setting processing program is terminated.
  • the first exposure drawing apparatus 2 stores the received job information 60 ⁇ / b> A on the first surface in the job storage unit 41.
  • the first exposure drawing apparatus 2 When the first exposure drawing apparatus 2 stores the job information 60A, the first exposure drawing apparatus 2 performs a first job execution process for drawing an image on the first surface of the substrate C to be exposed based on the job information 60A.
  • FIG. 14 is a flowchart showing a flow of processing of the first job execution processing program executed by the system control unit 40 of the first exposure drawing apparatus 2 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job information 60A is received and stored, but may be the timing at which a predetermined execution instruction is input by the user via the input device 44. .
  • steps S500 to S513 processing similar to that in steps S201 to S213 of the first embodiment is performed.
  • step S515 job identification information of the job being executed is transmitted to the control device 5.
  • the system control unit 40 transmits the job identification information 61 in the job information 60 ⁇ / b> A of the execution first page job to the control device 5.
  • step S517 processing similar to that in step S217 of the first embodiment is performed, and the first job execution processing program is terminated.
  • the control device 5 When receiving the job identification information 61 from the first exposure drawing apparatus 2, the control device 5 according to the present embodiment stores the second surface job corresponding to the execution first surface job in the job identification information 61 and the storage unit 51. The job selection process to be selected based on the job information 60B being performed is performed.
  • FIG. 15 is a flowchart showing the flow of processing of the job selection processing program executed by the control unit 50 of the control device 5 at this time.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • the timing at which the program is executed is not limited to the timing at which the job identification information 61 of the execution first page job is received, but at the timing at which a predetermined execution instruction is input by the user via the input unit 53. There may be.
  • step S601 among the second-side job information 60B stored in the storage unit 51, the second surface corresponding to the first-side job information 60A having the job identification information of the received execution first-side job.
  • the job information 60B is searched.
  • the control unit 50 searches the job information 60B stored in the storage unit 51 for job information 60B including the job identification information 61 of the execution first page job as the partner information 63.
  • next step S603 as a result of the search, it is determined whether or not the second-side job information 60B corresponding to the received first-side job information 60A having the job identification information of the executed first-side job exists. .
  • step S603 determines whether the corresponding second-side job information 60B does not exist on the display unit 52. If the determination in step S603 is affirmative, the process proceeds to step S605. On the other hand, if a negative determination is made in step S603, the process proceeds to step S607, and control is performed to display error information indicating that the corresponding second-side job information 60B does not exist on the display unit 52.
  • step S605 the job information 60B obtained as a result of the search is transmitted to the second exposure drawing apparatus 3 via the wired cable 8a.
  • the second exposure drawing apparatus 3 stores the received job information 60B of the second surface in the job storage unit 41.
  • the image information 61a is included in the job information 60B including the received job identification information 61 as the job identification information 661. The image information of the image included as is acquired.
  • the second exposure drawing apparatus 3 When the second exposure drawing apparatus 3 according to the present embodiment receives the job information 60B on the second surface from the control device 5, the second exposure drawing apparatus 3 draws an image on the second surface of the substrate C to be exposed based on the received job information 60B. The second job execution process is performed.
  • FIG. 16 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job identification information of the job to be executed is received, but is the timing at which a predetermined execution instruction is input by the user via the input device 44. Also good.
  • step S701 image information of an image included as image information 61a in the received job information 60B is acquired.
  • next steps S703 to S717 processing similar to that in steps S305 to S319 of the first embodiment is performed.
  • images corresponding to each other are drawn on the first surface and the second surface of the substrate C to be exposed using the job information 60A and 60B indicating the double-sided job.
  • the third embodiment even when a single-side job indicating one of the jobs of the first surface and the second surface and the double-side job are mixed, the first surface of the substrate C to be exposed and Images corresponding to each other are drawn on the second surface.
  • control device 5 causes the first exposure drawing device 2 to draw an image on the first surface of the substrate C to be exposed, and the second exposure drawing device 3 to the exposure substrate C.
  • the job information 60B for drawing an image on the second surface is stored in the storage unit 51.
  • the job information 60A and 60B is information in which job identification information 61, exposure condition information 62, and partner information 63 are associated with each job. However, if the job to be set is the one-side job, the partner information 63 is left blank.
  • the jobs having the job identification information C000001 and C000002 are single-sided jobs, and the partner information 63 of the jobs having the job identification information C000001 and C000002 is blank.
  • the operator When an operator wants the first exposure drawing apparatus 2 and the second exposure drawing apparatus 3 to execute a job, the operator inputs information included in the job information 60A and 60B to the control apparatus 5 via the input unit 53. .
  • the control device 5 performs job setting processing for setting a job by storing each input information in the storage unit 51 as job information 60A for the first surface and job information 60B for the second surface.
  • FIG. 18 is a flowchart showing a flow of processing of a job setting processing program executed by the control unit 50 of the control device 5 of the exposure drawing system 1 when an execution instruction is input via the input unit 53.
  • the program is stored in advance in a predetermined area of the ROM of the storage unit 51.
  • steps S801 to S803 processing similar to that in steps S101 to S103 of the first embodiment is performed.
  • step S805 at least one of the job information 60A and 60B is generated for each piece of information input in each input field, and at least one of the generated job information 60A and 60B is stored in the storage unit 51.
  • the job to be set is a double-sided job, and the first job is performed in the same manner as in step S105 of the first embodiment.
  • the side job information 60A and the second side job information 60B are generated and stored.
  • the job to be set is a one-sided job, and the first surface job Only the information 60A is generated and stored.
  • the job to be set is a one-sided job, and the second surface job Only the information 60B is generated and stored.
  • step S807 it is determined whether or not the job to be set is a double-sided job. If the determination in step S807 is affirmative, the process proceeds to step S809. If the determination is negative, the setting target job is estimated to be a single-sided job, and the process proceeds to step S813 described later.
  • steps S809 and S811 processing similar to that in steps S107 and S109 of the first embodiment is performed, and the job setting processing program is terminated.
  • step S813 it is determined whether or not the job to be set is a first-side job. If an affirmative determination is made in step S813, the process moves to step S815, the same process as in step S107 of the first embodiment is performed, and the job setting process program ends.
  • step S813 the process proceeds to step S817, the same process as in step S109 of the first embodiment is performed, and the job setting process program is terminated.
  • the job information 60A for the first surface is transmitted to the first exposure drawing apparatus 2 and stored in the job storage unit 41 of the first exposure drawing apparatus 2.
  • the job information 60B for the second surface is transmitted to the second exposure drawing apparatus 3 and stored in the job storage unit 41 of the second exposure drawing apparatus 3.
  • the single-sided job and the double-sided job are stored in a mixed state.
  • the first exposure drawing apparatus 2 When the first exposure drawing apparatus 2 stores the job information 60A, the first exposure drawing apparatus 2 performs a first job execution process for drawing an image on the first surface of the substrate C to be exposed based on the job information 60A.
  • the first exposure drawing apparatus 2 performs the same first job execution process as that of the first embodiment.
  • the second exposure drawing apparatus 3 Upon receiving the job identification information 61 transmitted by the first job execution process, the second exposure drawing apparatus 3 receives the job identification information 61 and the job information 60B received from the control device 5 to determine the substrate C to be exposed. A second job execution process for drawing an image on the second surface is performed.
  • FIG. 20 is a flowchart showing the flow of processing of the second job execution processing program executed by the system control unit 40 of the second exposure drawing apparatus 3 at this time.
  • the program is stored in advance in a predetermined area of the ROM provided in the system control unit 40.
  • the timing at which the program is executed is not limited to the timing at which the job identification information of the job to be executed is received, but the execution instruction predetermined by the user via the input device 44 after receiving the job identification information. May be the timing at which is input.
  • steps S301 to S319 processing similar to that in steps S301 to S319 of the first embodiment is performed.
  • step S301 if a negative determination is made in step S301, the process proceeds to step S901.
  • step S901 when there is no job corresponding to the double-sided job but there is a job corresponding to the single-sided job, control is performed to display a job selection screen for assisting the user in selecting the job to be executed on the display device 43. .
  • the job selection screen 76 has a selection button 77 for selecting any one of the single-sided jobs stored in the job storage unit 41 and a non-selection button 78 for selecting no single-sided job. is doing.
  • the user uses the input device 44 to select any selection button 77 or non-selection button 78.
  • step S903 it is determined whether any job is selected. At this time, the system control unit 40 determines that any job is selected when any selection button 77 is selected, and does not select any job when the non-selection button 78 is selected. It is determined that
  • step S903 If the determination in step S903 is affirmative, the process proceeds to step S303, the image to be rendered is determined based on the job information 60B of the selected job, and the image information of the image is acquired. On the other hand, if a negative determination is made in step S903, the process proceeds to step S311, where error information indicating that the corresponding job does not exist is transmitted to the control device 5, and the second job execution processing program is terminated.
PCT/JP2013/072502 2012-09-27 2013-08-23 露光描画装置、露光描画システム、プログラム及び露光描画方法 WO2014050384A1 (ja)

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CN201380049191.4A CN104641299B (zh) 2012-09-27 2013-08-23 曝光描绘装置、曝光描绘系统、程序及曝光描绘方法

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TWI603160B (zh) 2017-10-21
CN104641299A (zh) 2015-05-20

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