WO2013129573A1 - Actionneur vibratoire et barillet de lentille - Google Patents

Actionneur vibratoire et barillet de lentille Download PDF

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Publication number
WO2013129573A1
WO2013129573A1 PCT/JP2013/055412 JP2013055412W WO2013129573A1 WO 2013129573 A1 WO2013129573 A1 WO 2013129573A1 JP 2013055412 W JP2013055412 W JP 2013055412W WO 2013129573 A1 WO2013129573 A1 WO 2013129573A1
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WO
WIPO (PCT)
Prior art keywords
stator
vibration actuator
elastic body
radial direction
piezoelectric element
Prior art date
Application number
PCT/JP2013/055412
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English (en)
Japanese (ja)
Inventor
光輝 日野
佐藤　高広
慎二 西原
Original Assignee
株式会社ニコン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ニコン filed Critical 株式会社ニコン
Publication of WO2013129573A1 publication Critical patent/WO2013129573A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer

Definitions

  • the present invention relates to a vibration actuator and a lens barrel including the vibration actuator.
  • the vibration actuator includes a stator in which an elastic body and an electromechanical conversion element are combined.
  • the electromechanical transducer of the vibration actuator is excited by a drive signal to generate a traveling wave on the surface of the elastic body. This traveling wave causes an elliptical motion on the surface of the elastic body.
  • the movable element in pressure contact with the surface of the elastic body is driven by the wavefront of the elliptical motion and converted into a rotational motion.
  • An object of the present invention is to provide a vibration actuator and a lens barrel that can be further thinned.
  • an annular elastic body and a stator having an electromechanical transducer for generating a traveling wave in the elastic body, and the traveling wave generated in the elastic body in contact with the elastic body.
  • a vibration actuator comprising a mover that moves relative to the stator, wherein the elastic body has a contact surface with the mover provided on a side surface in a radial direction.
  • the elastic body is provided with a contact surface with the moving element on a radially inner side, and the electromechanical transducer element on a radially outer side. Is provided.
  • the elastic body in the vibration actuator according to the first aspect, is provided with a contact surface with the moving element on a radially outer side, and the electromechanical transducer element on a radially inner side. Is provided.
  • the elastic body in the vibration actuator according to the first aspect, is provided with a contact surface with the moving element on a radially inner side, and the elastic body has the surface on at least one surface in the central axis direction.
  • An electromechanical conversion element is provided.
  • the elastic body is provided with a contact surface with the moving element on a radially outer side, and the elastic body has the surface on at least one surface in the central axis direction.
  • An electromechanical conversion element is provided.
  • the electromechanical conversion element is provided on both surfaces in the central axis direction of the elastic body.
  • a seventh aspect of the present invention is the vibration actuator according to the sixth aspect, wherein the electromechanical transducer elements provided on both surfaces of the elastic body in the central axis direction are wavelength relative to each other when viewed from the direction of the central axis. Is characterized by a 1 ⁇ 4 shift.
  • a stator including an annular elastic body, an electromechanical transducer that generates a traveling wave in the elastic body, and the elastic body in contact with the stator.
  • a moving actuator that moves relative to the stator by waves, The elastic body and the mover are vibration actuators that are brought into pressure contact in a radial direction.
  • the invention described in claim 9 is a lens barrel comprising the vibration actuator according to any one of claims 1 to 8 and an optical member driven by the vibration actuator.
  • FIG. 1 is a schematic configuration diagram of a camera 1 on which an ultrasonic motor 10 of Embodiment 1 is mounted. It is a top view when the ultrasonic motor 10 of Embodiment 1 is seen from the central axis direction.
  • 1 is a perspective view showing a stator base 11a in an ultrasonic motor 10 according to Embodiment 1.
  • FIG. 1 is a perspective view showing a piezoelectric element 12 in an ultrasonic motor 10 according to Embodiment 1.
  • FIG. FIG. 3 is a plan view when comb teeth 11b are formed on a radially outer peripheral surface of a stator 11 in the ultrasonic motor 10 according to the first embodiment.
  • FIG. 6 is a perspective view showing an ultrasonic motor 20 according to a second embodiment.
  • FIG. 6 is a plan view when the stator 21 of the second embodiment is viewed from the phase A side of the piezoelectric element 22.
  • FIG. 6 is a plan view when the stator 21 of the second embodiment is viewed from the B phase portion side of the piezoelectric element 22.
  • FIG. 6 is a perspective view of the ultrasonic motor 20 according to the second embodiment when comb teeth 21b are formed on the inner circumferential surface of the stator 21 in the radial direction.
  • FIG. 1 is a schematic configuration diagram of a camera 1 equipped with the ultrasonic motor 10 of the first embodiment.
  • the camera 1 includes a camera body 2 and a lens barrel 3.
  • the camera body 2 includes an image sensor 6.
  • the imaging element 6 is an imaging device that captures a subject image formed by the lens barrel 3.
  • the lens barrel 3 is an interchangeable lens that is detachably attached to the camera body 2.
  • the lens barrel 3 is an interchangeable lens.
  • the present invention is not limited to this, and a lens barrel integrated with the camera body may be used.
  • the lens barrel 3 includes a lens 4 as an optical member, a cam barrel 5, an ultrasonic motor 10, and other members (not shown).
  • the ultrasonic motor 10 of the present embodiment is used as a drive source for driving the lens 4 when adjusting the focus of the camera 1.
  • the driving force extracted from the ultrasonic motor 10 is transmitted to the cam cylinder 5 through a power transmission mechanism (not shown).
  • the cam cylinder 5 is engaged with the lens 4 by a cam mechanism.
  • the cam cylinder 5 is rotated by the driving force of the ultrasonic motor 10, the lens 4 is moved in the direction of the optical axis A by the cam mechanism. Thereby, focus adjustment is performed.
  • FIG. 2 is a plan view of the ultrasonic motor 10 according to the first embodiment when viewed from the central axis direction.
  • FIG. 3 is a perspective view showing the stator base 11a in the ultrasonic motor 10 of the first embodiment.
  • FIG. 4 is a perspective view showing the piezoelectric element 12 in the ultrasonic motor 10 according to the first embodiment.
  • the ultrasonic motor 10 of the present embodiment includes a stator 11 as a stator and a rotor 13 as a mover.
  • the stator 11 includes a stator base 11a and comb teeth 11b shown in FIG. 3, and a piezoelectric element 12 shown in FIG.
  • the stator base 11a is an elastic body formed in an annular shape as shown in FIG.
  • the stator base 11a is made of an elastically deformable metal material such as an iron alloy such as stainless steel or invar material or brass.
  • the comb teeth 11b are portions formed on the inner circumferential surface of the stator base 11a in the radial direction.
  • the comb tooth 11b is an amplification (enlargement) mechanism that amplifies the amplitude of the traveling wave.
  • a stator sliding surface 11c is formed on the tip surface of the comb teeth 11b.
  • the outer peripheral surface of the rotor 16 is brought into pressure contact with the stator sliding surface 11c.
  • the stator sliding surface 11 c is a contact surface between the stator base 11 a and the rotor 16.
  • the stator 11 includes a piezoelectric element bonding surface 11d on the outer circumferential surface of the stator base 11a in the radial direction.
  • the piezoelectric element 12 is bonded to the piezoelectric element bonding surface 11d.
  • the piezoelectric element 12 is excited by being supplied with a drive signal, and generates a traveling wave in the stator base 11a.
  • the elliptical motion generated in the stator base 11a by this traveling wave is amplified by the comb teeth 11b.
  • the amplified elliptical motion is converted into rotational motion by the rotor 13 in pressure contact with the stator sliding surface 11c.
  • the piezoelectric element 12 is a cylindrical electrode member as shown in FIG.
  • the piezoelectric element 12 is an electromechanical transducer that converts electrical energy into mechanical energy.
  • the piezoelectric element 12 is made of, for example, PZT (lead zirconate titanate), ceramics, or the like. As shown in FIG. 2, the piezoelectric element 12 is bonded to the outer peripheral surface (piezoelectric element bonding surface 11d) of the stator base 11a.
  • the piezoelectric element 12 of this embodiment is polarized so as to have 6 wavelengths (6 ⁇ ) over the entire circumference.
  • the piezoelectric element 12 includes an A-phase portion 12a, a B-phase portion 12b, a ⁇ / 4 portion 12c, and a 3 / 4 ⁇ portion 12d.
  • the A-phase portion 12a is polarized so that the polarization directions are alternately reversed (A +, A-, A +, A-, A +) every half wavelength.
  • the B phase portion 12b is also polarized so that the polarization direction is alternately reversed (B +, B ⁇ , B +, B ⁇ , B +) for each half wavelength.
  • the ⁇ / 4 portion 12c is an unpolarized region formed in order to shift the A phase portion 12a and the B phase portion 12b from each other by 1 ⁇ 4 wavelength.
  • the 3 / 4 ⁇ portion 12d is an unpolarized region formed to shift the A phase portion 12a and the B phase portion 12b by 3/4 wavelengths from each other.
  • the A-phase portion 12a and the B-phase portion 12b are arranged symmetrically with the ⁇ / 4 portion 12c and the 3 / 4 ⁇ portion 12d interposed therebetween.
  • the A phase part 12a and the B phase part 12b of the piezoelectric element 12 are connected to a flexible printed circuit board (not shown) provided inside the lens barrel 3 (FIG. 1).
  • a lens CPU (not shown) is mounted on the flexible printed circuit board.
  • the piezoelectric element 12 is excited by a drive signal supplied from a flexible printed board, and generates a traveling wave in the stator base 11a.
  • the stator base 11a generates an elliptical motion by this traveling wave. This elliptical motion is further amplified by the comb teeth 11b.
  • the rotor 13 is a member formed in an annular shape as shown in FIG.
  • the rotor 13 is disposed inside the stator 11 in the radial direction.
  • the rotor 13 is in pressure contact with the stator sliding surface 11c of the comb teeth 11b by a pressure mechanism (not shown).
  • the rotor 13 is supported by a support mechanism (not shown) so as to be rotatable around the central axis.
  • the rotor 13 in pressure contact with the stator sliding surface 11 c moves (rotates) relative to the stator 11 by the elliptical motion amplified by the comb teeth 11 b of the stator 11.
  • the elliptical motion amplified by the comb teeth 11b of the stator 11 is converted into rotational motion by the rotor 13 and transmitted to the cam cylinder 5 (FIG. 1) via a power transmission mechanism (not shown).
  • the ultrasonic motor 10 has the following effects.
  • the stator 11 includes a stator sliding surface 11c in pressure contact with the rotor 13 on the radially inner side. Thereby, the direction of taking out the rotational motion by the rotor 13 is the radial direction of the stator 11. For this reason, the length of the rotation axis direction of the ultrasonic motor 10 can be shortened. Therefore, the ultrasonic motor 10 can be further reduced in thickness. And the optical apparatus carrying this ultrasonic motor 10 can shorten the full length of an optical axis direction. Accordingly, it is possible to mount the ultrasonic motor on a thin optical device, which has been difficult in the past.
  • the rotor 13 is disposed inside the stator 11 in the radial direction. For this reason, the radial dimension in the lens barrel 3 can be reduced. Since the drive signal supplied to the piezoelectric element 12 is two alternating voltages whose phases are different from each other by 90 degrees, the peripheral drive circuit can be simplified.
  • the ultrasonic motor 10 of the first embodiment the example in which the comb teeth 11b are formed on the inner circumferential surface in the radial direction of the stator base 11a has been described. However, as illustrated in FIG. You may form in the outer peripheral surface of radial direction. In this case, the rotor 13 is disposed outside the stator 11 and is in pressure contact with the stator sliding surface 11c of the comb teeth 11b. Even when the ultrasonic motor 10 of the first embodiment is configured as shown in FIG. 5, the ultrasonic motor 10 can be further reduced in thickness.
  • FIG. 6 is a perspective view showing the ultrasonic motor 20 of the second embodiment.
  • FIG. 7 is a side view of the stator 21 according to the second embodiment when viewed from the radial direction.
  • FIG. 8 is a plan view when the stator 21 of the second embodiment is viewed from the phase A side of the piezoelectric element 22.
  • FIG. 9 is a plan view when the stator 21 of the second embodiment is viewed from the B-phase portion side of the piezoelectric element 22.
  • the ultrasonic motor 20 of the present embodiment includes a stator 21 as a stator and a rotor 23 as a mover.
  • the stator 21 includes a stator base 21a, comb teeth 21b, and a piezoelectric element 22.
  • the stator base 21a is an elastic body formed in an annular shape as shown in FIG.
  • the stator base 21a is made of an elastically deformable metal material such as an iron alloy such as stainless steel or invar material or brass.
  • the comb teeth 21b are portions formed on the outer peripheral surface of the stator base 21a in the radial direction.
  • the comb tooth 21b is an amplification (enlargement) mechanism that amplifies the amplitude of the traveling wave.
  • a stator sliding surface 21c is formed on the tip surface of the comb teeth 21b.
  • the inner peripheral surface of the rotor 23 is brought into pressure contact with the stator sliding surface 21c.
  • the stator sliding surface 21 c is a contact surface between the stator base 21 a and the rotor 23.
  • the stator 21 has an A-phase portion 22a of a piezoelectric element 22 joined to the upper surface of the stator base 21a in the central axis direction.
  • the stator 21 has a B-phase portion 22b of the piezoelectric element 22 joined to the lower surface of the stator base 21a in the central axis direction.
  • the piezoelectric elements 22 bonded to both surfaces in the central axis direction are excited by a drive signal to generate a traveling wave in the stator base 21a.
  • the stator base 21a generates an elliptical motion by this traveling wave. This elliptical motion is amplified by the comb teeth 21b.
  • the elliptical motion amplified by the comb teeth 21b is converted into rotational motion by the rotor 23 in pressure contact with the stator sliding surface 21c.
  • the piezoelectric element 22 is an electrode member formed in an annular shape.
  • the piezoelectric element 22 is an electromechanical transducer that converts electrical energy into mechanical energy.
  • the piezoelectric element 22 is made of, for example, PZT (lead zirconate titanate), ceramics, or the like.
  • the piezoelectric element 22 of the present embodiment is polarized so as to have 9 wavelengths (9 ⁇ ) on the upper and lower surfaces of the stator base 21a. That is, the piezoelectric element 22 includes an A phase portion 22a and a B phase portion 22b. As shown in FIG. 8, in the A phase portion 22a of the piezoelectric element 22, the polarization directions are alternately reversed (A +, A ⁇ , A +,... A ⁇ , A +, A ⁇ ) every half wavelength. Are polarized to 18 poles. Further, as shown in FIG. 9, the B-phase portion 22b of the piezoelectric element 22 has a polarization direction alternately reversed every half wavelength (B +, B ⁇ , B +,... B ⁇ , B +, B ⁇ ). It is polarized to 18 poles. In the A-phase portion 22a and the B-phase portion 22b of the piezoelectric element 22, a pair of adjacent poles (+, ⁇ ) whose polarization directions are opposite to each other correspond to one wavelength.
  • the A-phase portion 22a and the B-phase portion 22b of the piezoelectric element 22 are joined so as to be shifted by a quarter wavelength ( ⁇ ) in the circumferential direction of the stator 21, as shown in FIG.
  • ⁇ quarter wavelength
  • region of (lambda) / 4 part 12c and 3/4 (lambda) part 12d for shifting A phase part 12a and B phase part 12b by predetermined wavelength becomes unnecessary.
  • the A-phase portion 22a and the B-phase portion 22b of the piezoelectric element 22 are connected to a flexible printed circuit board (not shown) provided inside the lens barrel 3 (FIG. 1).
  • a lens CPU (not shown) is mounted on the flexible printed circuit board. From the flexible printed board, two AC voltages whose phases are different from each other by 90 degrees are supplied to the A-phase portion 22a and the B-phase portion 22b of the piezoelectric element 22 as drive signals.
  • the piezoelectric element 22 is excited by a drive signal supplied from a flexible printed board, and generates a traveling wave in the stator base 21a.
  • the rotor 23 is a member formed in an annular shape as shown in FIG.
  • the rotor 23 is disposed outside the stator 21 in the radial direction.
  • the rotor 23 is in pressure contact with the stator sliding surface 21c of the comb tooth 21b by a pressure mechanism (not shown).
  • the rotor 23 is supported by a support mechanism (not shown) so as to be rotatable around the central axis.
  • the rotor 23 moves (rotates) relative to the stator 21 by the elliptical motion amplified by the comb teeth 21b of the stator 21. That is, the elliptical motion amplified by the comb teeth 21b of the stator 21 is converted into rotational motion by the rotor 23 and transmitted to the cam cylinder 5 (FIG. 1) via a power transmission mechanism (not shown).
  • the ultrasonic motor 20 has the following effects.
  • the stator 21 includes a stator sliding surface 21c that is in pressure contact with the rotor 23 on the radially outer side.
  • the direction in which the rotary motion is extracted by the rotor 23 is the radial direction of the stator 21.
  • the length of the rotation axis direction of the ultrasonic motor 20 can be shortened. Therefore, the ultrasonic motor 20 can be further reduced in thickness.
  • the optical apparatus carrying this ultrasonic motor 20 can shorten the full length of an optical axis direction. Accordingly, it is possible to mount the ultrasonic motor on a thin optical device, which has been difficult in the past.
  • the rotor 23 is disposed outside the stator 21 in the radial direction. For this reason, the space for accommodating the cam cylinder 5 and the lens 4 can be widened on the inner side in the radial direction.
  • the A-phase portion 22 a and the B-phase portion 22 b of the piezoelectric element 22 are joined so as to be shifted by a quarter wavelength ( ⁇ ) in the circumferential direction of the stator 21. For this reason, the area
  • the ultrasonic motor 20 according to the second embodiment the example in which the comb teeth 21b are formed on the radial outer peripheral surface of the stator base 21a has been described. However, as illustrated in FIG. You may form in the inner peripheral surface of a direction. In this case, the rotor 23 is disposed inside the stator 21 and is in pressure contact with the stator sliding surface 21c of the comb teeth 21b. Even when the ultrasonic motor 20 of the second embodiment is configured as shown in FIG. 10, the ultrasonic motor 20 can be further reduced in thickness.
  • the present invention can be variously modified and changed as described below, and these are also within the scope of the present invention.
  • the annular base shown in the second embodiment is formed on both surfaces (or one surface) of the stator base 11a in the central axis direction.
  • the piezoelectric element 22 may be bonded.
  • the piezoelectric element 22 (A phase portion 22a or B phase portion 22b) may be bonded only to one surface of the stator base 11a in the central axis direction. In that case, as in the first embodiment, the ⁇ / 4 portion 12c and the 3 / 4 ⁇ portion 12d are arranged.
  • the cylindrical piezoelectric element 12 shown in the first embodiment is bonded to the inner peripheral surface of the stator base 21a in addition to the annular piezoelectric element 22 bonded to both surfaces in the central axis direction of the stator base 21a. May be.
  • the vibration actuator a rotary ultrasonic motor in which the rotor is driven to rotate is described as an example.
  • the present invention is not limited to this, and a linear actuator may be used.
  • the ultrasonic actuator using the vibration in the ultrasonic region is described as an example of the vibration actuator.
  • the present invention is not limited to this.
  • the present invention may be applied to a vibration actuator that uses vibrations outside the ultrasonic range.
  • the example which used the ultrasonic motors 10 and 20 as a drive source for driving the lens 4 at the time of the focus adjustment of the camera 1 was demonstrated.
  • the present invention is not limited to this.
  • the lens barrel 3 when the lens barrel 3 is a zoom lens, the lens barrel 3 may be used as a drive source during zoom driving. Further, it may be used as a drive source of a camera shake correction mechanism that drives a part of the lens 4 to correct camera shake.
  • the present invention can be applied to optical devices other than cameras. Further, it can also be used in a driving unit of a copying machine or a facsimile, a steering wheel tilt device or a headrest driving unit of an automobile, a driving device of a watch, or the like.

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  • Lens Barrels (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un actionneur vibratoire et un barillet de lentille caractérisés en ce que l'épaisseur peut être réduite. L'actionneur vibratoire (10) selon la présente invention est un actionneur vibratoire (10, 20) équipé d'un stator, doté d'un corps élastique annulaire (11a) et d'un élément (12) de conversion électromécanique qui génère des ondes progressives dans le corps élastique, et d'un élément mobile, qui entre en contact avec le corps élastique et est déplacé par rapport au stator par les ondes progressives générées dans le corps élastique, ledit actionneur vibratoire étant caractérisé en ce que la surface (11c) de contact du corps élastique par rapport à l'élément mobile est située sur la surface latérale dans la direction radiale.
PCT/JP2013/055412 2012-02-28 2013-02-28 Actionneur vibratoire et barillet de lentille WO2013129573A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-041182 2012-02-28
JP2012041182 2012-02-28

Publications (1)

Publication Number Publication Date
WO2013129573A1 true WO2013129573A1 (fr) 2013-09-06

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PCT/JP2013/055412 WO2013129573A1 (fr) 2012-02-28 2013-02-28 Actionneur vibratoire et barillet de lentille

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WO (1) WO2013129573A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225182A (ja) * 1986-03-25 1987-10-03 Canon Inc 振動波モ−タ
JPS6389080A (ja) * 1986-09-30 1988-04-20 Canon Inc 振動波モ−タ
JPH04101680A (ja) * 1990-08-21 1992-04-03 Nec Corp 圧電モータ
JP2006101593A (ja) * 2004-09-28 2006-04-13 Sanyo Electric Co Ltd 往復駆動機構及びこれを用いた光学装置
JP2010226854A (ja) * 2009-03-23 2010-10-07 Nikon Corp 振動アクチュエータ、それを備えたレンズ鏡筒及びカメラ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225182A (ja) * 1986-03-25 1987-10-03 Canon Inc 振動波モ−タ
JPS6389080A (ja) * 1986-09-30 1988-04-20 Canon Inc 振動波モ−タ
JPH04101680A (ja) * 1990-08-21 1992-04-03 Nec Corp 圧電モータ
JP2006101593A (ja) * 2004-09-28 2006-04-13 Sanyo Electric Co Ltd 往復駆動機構及びこれを用いた光学装置
JP2010226854A (ja) * 2009-03-23 2010-10-07 Nikon Corp 振動アクチュエータ、それを備えたレンズ鏡筒及びカメラ

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