WO2013105412A1 - 静圧気体軸受装置 - Google Patents

静圧気体軸受装置 Download PDF

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Publication number
WO2013105412A1
WO2013105412A1 PCT/JP2012/083075 JP2012083075W WO2013105412A1 WO 2013105412 A1 WO2013105412 A1 WO 2013105412A1 JP 2012083075 W JP2012083075 W JP 2012083075W WO 2013105412 A1 WO2013105412 A1 WO 2013105412A1
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WO
WIPO (PCT)
Prior art keywords
housing
gas bearing
static pressure
pressure gas
support
Prior art date
Application number
PCT/JP2012/083075
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
琢哉 平山
Original Assignee
オイレス工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オイレス工業株式会社 filed Critical オイレス工業株式会社
Priority to CN201280065781.1A priority Critical patent/CN104024668B/zh
Priority to KR1020147022027A priority patent/KR20140114861A/ko
Publication of WO2013105412A1 publication Critical patent/WO2013105412A1/ja

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads

Definitions

  • the present invention relates to a hydrostatic gas bearing device that supports a support object in a non-contact manner, and particularly to a hydrostatic gas bearing device that is suitable for supporting a large support object in a non-contact manner.
  • Patent Document 1 discloses a hydrostatic bearing pad type rotating device having high-precision rotational performance.
  • the hydrostatic gas bearing device used in the hydrostatic bearing pad type rotating device supports the rotating body in a non-contact manner from the radial direction so that the rotating body to be supported can rotate in the direction around the axis.
  • a ball stud support member is attached to the bracket, and the static pressure gas bearing pad is fixed to the bracket via a ball stud screwed into the ball stud support member.
  • each static pressure gas bearing pad is fixed to the bracket via the ball stud, so that the static pressure gas bearing pad is attached to the bracket.
  • the angle is automatically adjusted.
  • the radial positioning of each hydrostatic gas bearing pad is performed by finely adjusting the screwing of the ball stud into the ball stud support member individually.
  • the number of static pressure gas bearing pads to be subjected to such a troublesome fine adjustment work increases, so that the work load for aligning the axis of the rotating body to be supported increases. To do. Therefore, in the static pressure gas bearing device described in Patent Document 1, positioning of a plurality of arranged static pressure gas bearing pads is very complicated and is not suitable for a large support target.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a static pressure gas bearing device in which the axis of the support target can be easily aligned regardless of the size of the support target.
  • a plurality of segmented hydrostatic gas bearings are arranged such that the support surfaces of these hydrostatic gas bearings are in the outer peripheral direction or the axial direction of the support target. It attached to the inner peripheral surface of a housing so that it might be arranged.
  • the present invention is a static pressure gas bearing device for supporting a support object in a non-contact manner, A plurality of static pressure gas bearings having a support surface for supporting the support object in a non-contact manner; A housing for holding the plurality of static pressure gas bearings, The plurality of static pressure gas bearings are: Arranged in the outer circumferential direction or the axial direction of the object to be supported, and attached to the inner peripheral surface of the housing so that the position of the support surface with respect to the inner peripheral surface of the housing is fixed.
  • a plurality of segmented hydrostatic gas bearings are arranged in the outer peripheral direction or the axial direction of the support target, and the inner peripheral surface of the housing is fixed so that the position of the support surface with respect to the inner peripheral surface of the housing is fixed. It is attached to.
  • the support surfaces of these hydrostatic gas bearings can be combined and finished with high precision by machining, thereby eliminating the need for troublesome fine adjustment for each hydrostatic gas bearing. It is possible to easily align the axis of the pressurized gas bearing and the support target. Thereby, it is possible to provide a static pressure gas bearing device in which the axis alignment of the support target is easy regardless of the size of the support target.
  • FIG. 1A is an external view of a static pressure gas bearing device 1 according to an embodiment of the present invention
  • FIG. 1B is a cross section of the static pressure gas bearing device 1 shown in FIG.
  • FIG. 2A, 2B, and 2C are a front view, a right side view, and a bottom view of the hydrostatic gas bearing pad 2
  • FIG. 2D is an AA view of FIG. 2C.
  • FIGS. 3C and 3D are cross-sectional views taken along line BB in FIG. 3A
  • 4A is a front view of the bracket 4
  • FIG. 4B is a cross-sectional view taken along the line CC in FIG. 4A.
  • FIG. 5 is an enlarged view of a portion D of the static pressure gas bearing device 1 shown in FIG.
  • FIG. 1A is an external view of a static pressure gas bearing device 1 according to the present embodiment
  • FIG. 1B is a cross-sectional view of the static pressure gas bearing device 1 shown in FIG. .
  • the hydrostatic gas bearing device 1 supports a cylindrical support target (not shown) such as a large shaft in a non-contact manner by a plurality of segmented hydrostatic gas bearing pads.
  • a static pressure gas bearing device 1 includes a plurality of static pressure gas bearing pads 2 having a support surface 20 that supports a support object in a non-contact manner, and a cylindrical shape that holds these static pressure gas bearing pads 2.
  • the plurality of static pressure gas bearing pads 2 are arranged so that their support surfaces 20 are arranged along the outer peripheral surface of the support target on the inner peripheral surface 30 of the housing 3. It is arranged on ⁇ and attached to the inner peripheral surface 30 of the housing 3.
  • three static pressure gas bearing pads 2 are arranged in the outer circumferential direction ⁇ of the support target and provided in two rows in the axial direction ⁇ of the support target (total six static pressures).
  • Gas bearing pad 2 the present invention is not limited to this.
  • the number of static pressure gas bearing pads 2 corresponding to the size, weight, etc. of the support target may be arranged in at least one of the outer peripheral direction ⁇ and the axial direction ⁇ of the support target.
  • FIG. 2A, 2B, and 2C are a front view, a right side view, and a bottom view of the hydrostatic gas bearing pad 2, and FIG. 2D is an AA view of FIG. 2C. It is sectional drawing.
  • the support surface 20 of the hydrostatic gas bearing pad 2 has a diameter slightly larger than the outer diameter of the support target so that a gas layer having a uniform thickness is formed between the outer peripheral surface of the support target and the support surface 20. It is formed in an arc shape. As shown in the figure, this static pressure gas bearing pad 2 includes an arc-shaped back metal 21 and a porous sintered layer 22 formed on an inner peripheral surface 23 (a surface on the support surface 20 side) of the back metal 21. It is equipped with.
  • the back metal 21 has an outer diameter that is substantially the same as the inner diameter of the housing 3 such that the outer peripheral surface 24 (the surface opposite to the support surface 20) follows the inner peripheral surface 30 of the housing 3.
  • a screw hole 25 for fastening a bolt (not shown) for fixing the hydrostatic gas bearing pad 2 to the housing 3 is formed in the outer peripheral surface 24 of the back metal 21.
  • one or more grooves 26A along the circumferential direction are formed on the inner peripheral surface 23 of the back metal 21, and the inside of the back metal 21 is for supplying compressed gas to these grooves 26A.
  • An air passage 26 is formed.
  • a compressed gas (not shown) is provided on one side surface 27 of the back metal 21 (a surface facing the outside from the opening of the housing 3 when the static pressure gas bearing pad 2 is assembled to the inner peripheral surface 30 of the housing 3).
  • An air supply port 28 for connecting the air supply pipe of the supply pump to the air passage 26 is formed.
  • the static pressure gas bearing pad 2 is attached to a fixing jig (not shown).
  • a bolt hole 29 for inserting a bolt is formed to fix the bolt.
  • the compressed gas from the compressed gas supply pump is supplied to the back side of the porous sintered layer 22 via the supply pipe connected to the supply port 28 and the air passage 26. It is supplied to the groove 26A.
  • the compressed air from the compressed gas supply pump passes through the pores in the porous sintered layer 22 and is discharged from the surface 20 of the porous sintered layer 22 that functions as the support surface 20.
  • FIGS. 3 (A) and 3 (B) are a front view and a right side view of the housing 3, and FIGS. 3 (C) and 3 (D) are BB cross-sectional views of FIG. 3 (A).
  • the housing 3 has a stepped cylindrical shape in which a small diameter portion 33 is formed on both ends of the outer diameter surface.
  • the housing 3 includes a cylindrical housing body 31 and a cylindrical insertion portion 33 that is formed integrally with both end surfaces 32 of the housing body 31 and has a diameter smaller than the outer diameter of the housing body 31. I have.
  • Each insertion portion 33 is inserted into an insertion hole 40 described later of the bracket 4.
  • the outer peripheral surface 34 of the housing body 31 penetrates to the inner peripheral surface 30 of the housing 3 at a position corresponding to the screw hole 25 of each static pressure gas bearing pad 2 arranged at a predetermined position on the inner peripheral surface 30 of the housing 3.
  • Bolt holes 35 are formed. Bolts (not shown) are inserted into these bolt holes 35 from the outer peripheral surface 34 side, and screwed into the screw holes 25 of the static pressure gas bearing pad 2 in the housing 3, whereby the inner peripheral surface 30 of the housing 3.
  • the static pressure gas bearing pad 2 is fixed at a predetermined position.
  • screw holes 36 are formed in both end faces 32 of the housing main body 31 to be screwed with bolts 39 (see FIG. 1) for fixing the housing 3 to the bracket 4.
  • a screw hole 37 is formed in the Z direction at an upper position of the outer peripheral surface 34 of the housing main body 31 in the vicinity of both end surfaces 32 so as to be screwed with a position adjusting bolt 50 described later of the support position adjusting mechanism 5.
  • the insertion portion 33 has the same inner diameter as that of the housing body 31 and the axial center of the housing body 31 coincides. Further, the insertion portion 33 has an outer diameter r1 that is smaller than the outer diameter r2 of the housing body 31. These insertion portions 33 are inserted into the two brackets 4 described later until both end surfaces 32 of the housing main body 31 come into contact with one side surface 44 of two brackets 4 described later installed on both sides of the housing 3. It is inserted into the hole 40.
  • FIG. 4 (A) is a front view of the bracket 4 and FIG. 4 (B) is a cross-sectional view taken along the line CC of FIG. 4 (A).
  • the bracket 4 is formed integrally with a plate-shaped bracket body 41, a lower end portion of the bracket body 41, a pedestal 42 that prevents the bracket body 41 from lying down, and an upper end portion of the bracket body 41. And a holding portion 43 that holds the support position adjusting mechanism 5.
  • an insertion hole 40 into which the insertion portion 33 of the housing 3 is inserted is formed so as to penetrate both side surfaces 44 and 45 of the bracket body 41.
  • the insertion hole 40 of the bracket 4 and the insertion portion 33 of the housing 3 have a predetermined gap.
  • the fitting with the insertion portion 33 of the housing 3 is a loose clearance fitting with a clearance for the position adjustment of the housing 3 between the inner peripheral surface of the insertion hole 40 and the outer peripheral surface of the insertion portion 33 of the housing 3. Yes.
  • the housing 3 in which the insertion portion 33 is inserted into the insertion hole 40 of the bracket 4 can be moved by a distance corresponding to the position adjustment amount of the housing 3 in the radial direction of the insertion hole 40 of the bracket 4.
  • the hole diameter r ⁇ b> 3 of the insertion hole 40 is such that the end surface 32 of the housing body 31 comes into contact with one side surface 44 of the bracket body 41.
  • the housing 3 is formed smaller than the outer diameter r ⁇ b> 2 of the housing body 31.
  • Bolt holes 46 are formed at the positions. With the insertion portion 33 of the housing 3 inserted into the insertion hole 40 from one side 44 side of the bracket 4, the bolt 39 (see FIG. 1) is inserted into the bolt hole 46 from the other side 45 side of the bracket body 41. Then, the housing 3 is fixed to the bracket 4 by being screwed into the screw holes 36 of the housing 3. In order to enable the position adjustment of the housing 3 with respect to the bracket 4 by the support position adjustment mechanism 5, the bolt hole 46 is sized so that the inserted bolt 39 can move in the Z direction at least by the position adjustment allowance of the housing 3. Is formed.
  • the pedestal 42 protrudes from the side surface of at least one side of the bracket body 41 at the lower end portion of the bracket body 41 to prevent the bracket body 41 from falling sideways, and forms a bottom surface 49 wider than the plate thickness of the bracket body 41.
  • the pedestal 42 is formed in a shape protruding from the other side surface 45 of the bracket body 41 opposite to the housing 3.
  • the holding portion 43 protrudes from the other side surface 45 of the bracket body 41 at the upper end portion of the bracket body 41, and a concave portion 47 for holding the support position adjusting mechanism 5 is formed on the upper surface 43A.
  • a screw hole for fastening a fixing bolt for fixing the support position adjusting mechanism 5 is formed in the bottom surface 48 of the recess 47.
  • FIG. 5 is an enlarged view of part D of the static pressure gas bearing device 1 shown in FIG.
  • the support position adjusting mechanism 5 includes a position adjusting bolt 50 and a plate 51 fixed to the recess 47 of the holding portion 43 of the bracket 4 with a fixing bolt (not shown).
  • the plate 51 is formed with a bolt hole at a position corresponding to the screw hole of the bottom surface 48 of the concave portion 47 of the holding portion 43 of the bracket 4.
  • the plate 51 is fixed to the holding portion 43 of the bracket 4 by inserting the fixing bolt into the bolt hole and fastening it to the screw hole of the bottom surface 48 of the concave portion 47 of the holding portion 43 of the bracket 4.
  • the plate 51 has a bolt hole for inserting the position adjusting bolt 50 at a position corresponding to the screw hole 37 formed in the housing main body 31 of the housing 3 in which the insertion portion 33 is inserted into the insertion hole 40 of the bracket 4. 52 is formed.
  • the insertion portion 33 of the housing 3 when the insertion portion 33 of the housing 3 is inserted into the insertion hole 40 of the bracket 4, the insertion portion 33 has a loose clearance fit between the insertion hole 40 of the bracket 4 and the insertion portion 33 of the housing 3.
  • a gap d ⁇ b> 1 corresponding to at least the position adjustment amount of the housing 3 is formed between the outer peripheral surface and the inner peripheral surface of the insertion hole 40.
  • the bottom surface 48 of the recess 47 formed in the holding portion 43 of the bracket 4 is formed at a position higher than the outer peripheral surface 34 of the housing body 31, the lower surface 53 of the plate 51 and the housing body 31
  • a gap d ⁇ b> 2 corresponding to at least the position adjustment allowance of the housing 3 is also formed between the outer peripheral surface 34.
  • the housing 3 is pulled toward the plate 51 side by inserting the position adjusting bolt 50 into the bolt hole 52 of the plate 51 and screwing it into the screw hole 37 of the housing 3 and adjusting the tightening amount.
  • the position of the housing 3 relative to the bracket 4 can be adjusted because it is pulled away from the plate 51.
  • the static pressure gas bearing pad 2 is positioned in the housing 3, and a bolt is inserted into the bolt hole 35 of the housing 3 and screwed into the screw hole 25 of the static pressure gas bearing pad 2 positioned in the housing 3.
  • the static pressure gas bearing pad 2 is fixed to a predetermined position on the inner peripheral surface 30 of the housing 3.
  • the static pressure expected bearing pad 2 is arranged so that one side surface 27 of the back metal 21 in which the bolt hole 29 is formed is aligned with the end surface of the insertion portion 33 of the housing 3 (see FIG. 1).
  • a desired number of support surfaces 20 are arranged in a desired pattern in the outer peripheral direction ⁇ and the axial direction ⁇ of the support target.
  • a plurality of static pressure gas bearings fixed to the inner peripheral surface 30 of the housing 3 using bolt holes 29 formed on the side surface of the static pressure gas bearing pad 2 (one side surface 27 of the back metal 21).
  • a fixing jig (not shown) is fixed to the pad 2 with a bolt.
  • the support surfaces 20 of the plurality of hydrostatic gas bearing pads 2 fixed to the inner peripheral surface 30 of the housing 3 are collectively machined (grinding, cutting, etc.). .
  • the support surfaces 20 of the plurality of static pressure gas bearing pads 2 are finished with high precision so as to be arcuate surfaces on the same circumference.
  • each bracket is arranged so that the support center O that is supported in a non-contact manner by the plurality of static pressure gas bearings 3 is horizontal in the insertion hole 30 of the housing 3. The position (height) of the housing 3 with respect to 4 is adjusted.
  • a plurality of static pressure gas bearing pads 2 are arranged inside the housing 3 such that the support surfaces 20 of these static pressure gas bearing pads 2 are arranged in the outer peripheral direction ⁇ or the axial direction ⁇ of the support target. It attaches to the surrounding surface 30, and the support surface 20 of these static pressure gas bearing pads 2 is machined collectively.
  • the support surfaces 20 of the plurality of static pressure gas bearing pads 2 can be accurately finished so that the support surfaces 20 are circular arc surfaces on the same circumference. Therefore, the axis O of the static pressure gas bearing pad 2 and the axis to be supported can be easily matched without performing complicated fine adjustment operations. Thereby, the hydrostatic gas bearing device 1 in which the axis alignment of the support target is easy can be provided regardless of the size of the support target.
  • the support surfaces 20 of the plurality of static pressure gas bearing pads 2 can be accurately formed into an arc shape having a slightly larger diameter than the outer peripheral surface of the cylindrical support object by simultaneous processing. it can. For this reason, for example, even if the inner diameter of the housing 3 is not finished with high accuracy, a gas layer having a uniform thickness is formed between the outer peripheral surface of the support target and the support surface 20 of the static pressure gas bearing pad 2. This makes it possible to stably support the object to be supported without contact.
  • the fitting between the insertion hole 40 of the bracket 4 and the insertion portion 33 of the housing 3 is a loose clearance fit, and the inner diameter of the bolt hole 46 of the bracket 4 corresponding to the screw hole 37 of the housing 3. Is formed larger than the nominal diameter of the bolt 39 by at least the position adjustment allowance of the housing 3. Then, the position of the housing 3 with respect to the bracket 4 is adjusted by adjusting the tightening degree of the position adjusting bolt 50 screwed with the screw hole 37 of the housing 3 through the bolt hole 52 of the plate 51 fixed to the bracket 4. .
  • the positions of both ends of the housing 3 that holds the object to be supported can be set to the tightening degree of the position adjusting bolt 50 without changing the positions of the individual static pressure gas bearing pads 2.
  • a plurality of the static pressure gas bearing pads 2 are arranged in the outer circumferential direction ⁇ of the support target so that the support surfaces 20 are arranged asymmetrically with respect to the horizontal plane including the axis O.
  • one static pressure gas bearing pad 2 is disposed on the upper side of the horizontal plane including the axis O and two static pressure gas bearing pads 2 are disposed on the inner circumferential surface 30 of the housing 3.
  • the present invention is not limited to this.
  • the support surface 20 is arranged along the outer peripheral surface of the support target so that the support surfaces 20 are arranged at substantially equal angular pitches around the axis O.
  • a plurality of pressurized gas bearing pads 2 may be arranged.
  • the support surface 20 of the static pressure gas bearing pad 2 is formed in an arc shape in accordance with the outer peripheral surface of the cylindrical support target, but the present invention is not limited to this.
  • the support surface 20 should just be formed in the same shape as the site
  • the plate 51 fixed to the holding portion 43 of the bracket 4 and the position adjusting bolt 50 screwed with the screw hole 37 of the housing 3 through the bolt hole 52 of the plate 51 are supported.
  • a position adjusting mechanism 5 is configured.
  • the support position adjusting mechanism 5 may have any structure as long as the position of the housing 3 with respect to the bracket 4 can be adjusted.
  • the support position adjusting mechanism 5 is attached to the upper part of the bracket 4, but the support position adjusting mechanism may be further attached to the side surface of the bracket 4 facing the outer peripheral surface of the housing 3.
  • the housing shape is a cylindrical shape.
  • the shape of the housing is not limited to this, and a shape that holds a plurality of segmented static pressure gas bearings and does not cause unnecessary gas leakage or the like. If it is, other shapes may be used.
  • the static pressure gas bearing pad 2 is of the type in which the support surface 20 is formed of a porous sintered layer, but the present invention is not limited to this.
  • a hydrostatic gas bearing pad of a type in which a compressed gas discharge port such as a self-formed throttle, an orifice throttle, or a surface throttle is formed on the support surface 20 may be used.
  • the housing 3 is cylindrical, but the housing 3 may be cylindrical. In the above embodiment, both ends of the housing 3 are supported by the pair of brackets 4. However, the housing 3 only needs to be supported by at least one bracket 4.
  • the present invention can be widely applied to applications for facilitating alignment of the support target in a static pressure gas bearing device that supports the support target in a non-contact manner.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
PCT/JP2012/083075 2012-01-10 2012-12-20 静圧気体軸受装置 WO2013105412A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201280065781.1A CN104024668B (zh) 2012-01-10 2012-12-20 静压气体轴承装置
KR1020147022027A KR20140114861A (ko) 2012-01-10 2012-12-20 정압 기체 베어링 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-002338 2012-01-10
JP2012002338A JP5868709B2 (ja) 2012-01-10 2012-01-10 静圧気体軸受装置

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WO2013105412A1 true WO2013105412A1 (ja) 2013-07-18

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KR (1) KR20140114861A (ko)
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JP6177619B2 (ja) * 2013-08-02 2017-08-09 オイレス工業株式会社 静圧気体軸受装置
KR101710173B1 (ko) * 2015-01-06 2017-02-27 주식회사 삼도인더스트리 정압베어링을 구비한 고속프레스
WO2016202407A1 (en) * 2015-06-19 2016-12-22 Thöni Industriebetriebe Gmbh Hingedly supported biogas plant fermentation container
CN113334749B (zh) * 2021-06-07 2022-06-14 太原理工大学 一种变驱动多尺寸高效率多束纤维螺旋同步缠绕设备

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CH430344A (de) * 1965-12-31 1967-02-15 Bbc Brown Boveri & Cie Radialgleitlager
JPH07103236A (ja) * 1993-10-01 1995-04-18 Koyo Seiko Co Ltd 静圧軸受装置
JP2004528113A (ja) * 2001-05-09 2004-09-16 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 空気力学式ロータベアリング
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JP2010060013A (ja) * 2008-09-02 2010-03-18 Ckd Corp 浮上ユニット及びそれを備えた非接触支持装置

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JPS58129327U (ja) * 1982-02-26 1983-09-01 株式会社日立製作所 回転体の下軸受
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JP2010124565A (ja) * 2008-11-18 2010-06-03 Ntn Corp 静圧軸受パッド式回転装置
CN102242769B (zh) * 2011-05-27 2013-02-20 大连交通大学 径向包容挤压膜气体静压轴承
CN102305243B (zh) * 2011-08-31 2013-02-13 中国人民解放军国防科学技术大学 自补偿流体静压轴承

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Publication number Priority date Publication date Assignee Title
CH430344A (de) * 1965-12-31 1967-02-15 Bbc Brown Boveri & Cie Radialgleitlager
JPH07103236A (ja) * 1993-10-01 1995-04-18 Koyo Seiko Co Ltd 静圧軸受装置
JP2004528113A (ja) * 2001-05-09 2004-09-16 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 空気力学式ロータベアリング
JP2008298275A (ja) * 2007-06-04 2008-12-11 Ntn Corp 静圧気体軸受および回転装置
JP2010060013A (ja) * 2008-09-02 2010-03-18 Ckd Corp 浮上ユニット及びそれを備えた非接触支持装置

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CN104024668B (zh) 2017-02-22
CN104024668A (zh) 2014-09-03
KR20140114861A (ko) 2014-09-29
JP5868709B2 (ja) 2016-02-24
JP2013142431A (ja) 2013-07-22

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