WO2013091611A2 - Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen - Google Patents
Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen Download PDFInfo
- Publication number
- WO2013091611A2 WO2013091611A2 PCT/DE2012/001222 DE2012001222W WO2013091611A2 WO 2013091611 A2 WO2013091611 A2 WO 2013091611A2 DE 2012001222 W DE2012001222 W DE 2012001222W WO 2013091611 A2 WO2013091611 A2 WO 2013091611A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum
- vacuum unit
- outer tube
- inner tube
- tube
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/09—Reshaping the ends, e.g. as grooves, threads or mouths
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/13—Reshaping combined with uniting or heat sealing, e.g. for making vacuum bottles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S10/00—Solar heat collectors using working fluids
- F24S10/40—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors
- F24S10/45—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors the enclosure being cylindrical
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2225/00—Transporting hot glass sheets during their manufacture
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
- C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y02E10/44—Heat exchange systems
Definitions
- the invention is based on a method and a device for producing vacuum tubes for solar thermal systems.
- Such vacuum tubes are also referred to as tube collectors. They have a sunlight-permeable outer tube, also called cladding tube, and an inner tube arranged in the outer tube, which is typically equipped with an absorber.
- the outer tube and the inner tube are usually cylindrical tubes with a circular cross-section. Preferably, the axes of outer tube and inner tube parallel to each other.
- outer tube and inner tube can be arranged coaxially.
- Outer tube and inner tube are typically made of glass.
- applications are known in which an inner tube made of metal is used. The space between the outer tube and the inner tube is closed to the outside. There is a vacuum in the gap. The pressure in the gap is far below atmospheric pressure.
- outer tubes and inner tubes used to make a vacuum tube are usually open at one end and closed at the other end. At the closed end, outer tube and inner tube each have a bottom. Outer tube and inner tube have the quality
- the invention has for its object to provide a method and apparatus for the production of vacuum tubes for solar thermal systems available that allow the production of vacuum tubes under reproducible conditions in consistently high quality and as few manufacturing steps.
- the method is characterized in that the coating of the inner tube and the coating of the outer tube and the assembly of inner tube and outer tube in a closed system in a vacuum, without the inner tube or the outer tube between the individual processing steps reaches atmosphere.
- the coating of the outer tube takes place in a first vacuum unit.
- the coating of the Inner tube takes place in a second vacuum unit.
- the first and second vacuum units are evacuated to atmospheric pressure throughout the processing. They are connected to a third vacuum unit.
- the third vacuum unit is connected to the first vacuum unit and the second vacuum unit such that the outer tubes and inner tubes under
- the vacuum space of the first vacuum unit is separated from the vacuum space of the third vacuum unit only by a slider.
- the inner tube is inserted into the outer tube. Further, in the third vacuum unit, the space between the inner tube and the outer tube is closed. For this purpose, the free ends of the coated outer tube and the coated inner tube are fused together. Further, in the third vacuum unit annealing of
- Inner tube after closing also a vacuum.
- a getter may additionally be introduced into the gap, which serves to bind the last traces of interfering or harmful substances by sorption or direct reaction.
- the outer pipe can be transported into the third vacuum unit without coming into contact with the atmosphere.
- the inner tube after the coating can pass directly from the second vacuum unit in the third vacuum unit, without having contact with the atmosphere, since the third vacuum unit is connected to it second vacuum unit. Only the finished vacuum tube is discharged from the device and optionally reaches the atmosphere.
- the device according to the invention is equipped with a first vacuum unit, a second vacuum unit and a third vacuum unit, each having a plurality of vacuum pumps for generating a vacuum.
- the first vacuum unit is connected to the third vacuum unit via a closable opening.
- the second vacuum unit is connected via a closable opening with the third vacuum unit.
- the openings can be closed with a slide.
- a lock can be provided between the vacuum units.
- First and second vacuum unit are each equipped with at least one coating station, in which a coating is applied to the outer tube or the inner tube.
- the first vacuum unit is further equipped with a first transporting device which transports an outer tube in the first vacuum unit in the longitudinal direction of an outer tube.
- the second vacuum unit is equipped with a second transport device which transports an inner tube in the second vacuum unit in the longitudinal direction of an inner tube.
- the transport devices ensure that the outer tube or the inner tube are transported to the coating stations and to the third vacuum unit.
- the third vacuum unit has a device for joining in each case an outer tube and an inner tube. This can be part of a transport device. In each case an inner tube and an outer tube are pushed into each other.
- the third vacuum unit is equipped with a magazine in which a plurality of outer tubes and / or inner tubes are stored and tempered.
- the tempering is a heat treatment of outer tube and inner tube to obtain certain properties.
- the outer tube and the inner tube made of glass. The slow heating and / or cooling during annealing eliminates stresses in the glass.
- the third vacuum unit is provided with a fusion device which defines the ends of an inner tube and an outer tube fused together to close the gap between the outer tube and inner tube.
- the first vacuum unit may be equipped with a lock via which an outer tube is introduced into the first vacuum unit.
- the second vacuum unit can be equipped with a lock via which an inner tube is introduced into the second vacuum unit.
- the third vacuum unit may be equipped with a lock to discharge a finished vacuum tube from the third vacuum unit.
- the method and apparatus of the present invention can be used to make vacuum tubes that are closed at one end and open at the other end, as well as to produce vacuum tubes that are open at both ends.
- the inventive method and device according to the invention over known methods and devices have the advantage that the coating of the outer tube and inner tube, the joining of outer tube and inner tube and the closing of the gap between the outer tube and inner tube in a closed system in vacuum under defined and reproducible Conditions takes place. Since the outer tube and the inner tube are treated throughout in a vacuum during this entire process, there is no contamination and no moistening of outer tube and inner tube. A cleaning can therefore be omitted between the individual processing steps. Apart from the transport within the closed device eliminates transport from one processing location to another and storage. This considerably reduces the number of manufacturing and processing steps. The production time is shortened. The method according to the invention runs automatically, so that manual processing steps are eliminated.
- an outer tube and an inner tube are introduced into the first and second vacuum unit immediately after their production. You get so immediately after the glass pull in the vacuum of the first and second vacuum unit.
- a predetermined temperature limit is not undershot. This has the consequence that impurities are not present or at most in traces on the surfaces of the outer tube and inner tube.
- an outer tube is cleaned after introduction into the first vacuum unit.
- the first vacuum unit is equipped with a first cleaning device. If the first vacuum unit is equipped with a lock for introducing an outer tube, then the cleaning device can be arranged on the lock. Such cleaning of an outer tube is necessary if the outer tube is contaminated prior to introduction into the first vacuum unit due to storage or transport.
- an inner tube is cleaned after introduction into the second vacuum unit.
- the second vacuum unit is equipped with a second cleaning device. If the second vacuum unit is equipped with a lock for introducing an inner tube, then the cleaning device can be arranged on the lock. Such cleaning of an inner tube is necessary when the inner tube before the
- Incorporation is contaminated in the second vacuum unit due to storage or transport.
- the coating is preferably an antireflective coating which has a low degree of absorption and a low reflectance.
- an outer coating is applied to the outside of the outer tube in the first vacuum unit.
- This is preferably an antireflective coating with a low degree of absorption and a low degree of reflection.
- a mirror layer is applied to the outside of the inner tube in the second vacuum unit.
- an absorber layer is applied to the outside of the inner tube in the second vacuum unit.
- a bottom is formed on the outer tube in the first vacuum unit.
- one end of the outer tube is closed by a bottom.
- the outer tube thus receives the appearance of a test tube.
- the molding of a floor preferably takes place before the application of a coating.
- Outer tubes with a bottom at one end serve to produce vacuum tubes closed at one end.
- a bottom is formed on the inner tube in the second vacuum unit.
- the inner tube is closed at one end with a bottom.
- Such an inner tube is preferably used in a corresponding outer tube, which is also equipped at one end with a bottom.
- Outer tubes and inner tubes with a bottom at one end serve for the manufacture of one end closed vacuum tubes.
- the molding of a floor to an inner tube preferably takes place before the application of a coating.
- the outer tube is transported in the first vacuum unit in the longitudinal direction relative to the longitudinal axis of the outer tube.
- the inner tube is transported in the second vacuum unit in the longitudinal direction relative to the longitudinal axis of the inner tube.
- the transport directions of the outer tube and the inner tube are parallel to each other.
- the outer tube and / or the inner tube are transported in the longitudinal direction relative to its longitudinal axis in the third vacuum unit.
- an inner tube is inserted in its introduction into the third vacuum unit in an outer tube.
- a plurality of outer tubes are arranged in a revolver-like magazine in the third vacuum unit.
- the magazine is rotated about an axis parallel to the transport direction of the outer tube in the first Vacuum unit and / or parallel to the transport direction of the inner tube in the second vacuum unit.
- the coating is applied to the outer tube and / or the coating on the inner tube by means of a plasma process.
- the outer tube in the first vacuum unit and / or the inner tube in the second vacuum unit are transported by means of rollers or by means of a linear unit.
- a centering element for the inner tube is introduced into the outer tube.
- the first vacuum unit and / or the second vacuum unit and / or the third vacuum unit each have at least one vacuum chamber.
- the vacuum chambers are linked together in such a way that an outer tube or an inner tube can be transported from one vacuum chamber to the next, without thereby reaching the atmosphere. Since a different pressure can prevail in the individual vacuum chambers, sliders are advantageously provided between the vacuum chambers. If the pressure between two vacuum chambers is very different, a lock can also be provided.
- the first vacuum unit is equipped with a first vacuum chamber, which in turn is equipped with a first coating station.
- the first coating station applies a coating to an inside of an outer tube.
- the first vacuum unit with a second vacuum chamber equipped with a second coating station, which applies a coating on the outside of an outer tube.
- the second vacuum unit is equipped with a third vacuum chamber with a third coating station, which as a coating on a mirror layer on the outside of the inner tube. Furthermore, the second vacuum unit is equipped with a fourth vacuum chamber with a fourth coating station, which as coating an absorber layer on the
- the first coating station and / or the second coating station and / or the third coating station and / or the fourth coating station have plasma coating devices.
- the magazine of the third vacuum unit is rotatable about an axis.
- Figure 1 Apparatus for the production of vacuum tubes for solar thermal
- FIG. 2 shows a device according to FIG. 1 with outer tubes and inner tubes
- FIG. 3 shows a schematic representation of the device according to FIG. 1.
- FIGS. 1 to 3 show an exemplary embodiment of a device for
- the device has a first vacuum unit 1, a second vacuum unit 2 and a third vacuum unit 3.
- first vacuum unit outer tubes 4 are coated.
- second vacuum unit inner tubes 5 are coated.
- the outer tubes 4 are elongated cylindrical hollow body with a circular cross-section and a bottom 6. They are made of glass. The bottom 6 can be formed in a first portion of the first vacuum unit 1 to the outer tube 4.
- the inner tubes 5 are elongated cylindrical hollow bodies with a circular
- the outer diameter of the inner tubes 5 is smaller than the inner diameter of the outer tubes 4.
- the inner tubes are also made of glass.
- the bottom 7 can be formed in a first portion of the second vacuum unit 2 to the inner tube 5.
- the outer tubes 4 are transported in the first vacuum unit 1 by means of a transport device, not shown.
- the transport direction is shown by the arrow 8 in FIG.
- the inner tubes 5 are in the second vacuum unit 2 by means of a transport device, not shown transported.
- the transport direction is shown in FIG. 1 by an arrow 9.
- the third vacuum unit 3 has a magazine 10, shown in FIG. 2, which is rotatable about an axis 11. The magazine can accommodate a plurality of outer tubes 4 and inner tubes 5.
- the first vacuum unit 1 is equipped with a plurality of vacuum pumps 12, 13, 14, 15. They reduce in the closed space of the first vacuum unit, the gas density, thus lower the pressure and thus serve to generate and maintain the vacuum in the first vacuum unit 1.
- the second vacuum unit 2 is also equipped with multiple vacuum pumps 16, 17,
- the first vacuum unit 1 is equipped with a first coating station 20 and a first vacuum chamber 25. To the first vacuum chamber 25, the vacuum pump 12 is connected. The first vacuum chamber 25 is part of the first coating station 20.
- the coating device not visible in the drawing is a plasma device for applying a
- the first vacuum chamber 25 is connected via a vacuum transport path to a second vacuum chamber 26 and a second coating station 21. To the vacuum transport path, the vacuum pump 13 is connected. The vacuum pump 14 is at the second
- Vacuum chamber 26 connected.
- the second coating station 21 and the second vacuum chamber 26 are also part of the first vacuum unit 1.
- the coating device of the second coating station 21, not visible in the drawing, is a plasma device for applying an outer coating to the outside of an outer tube.
- the second vacuum chamber 26 is connected to the third via a further vacuum transport path Vacuum unit 3 connected. At this vacuum transport path, the vacuum pump 15 is connected.
- the second vacuum unit 2 is equipped with a third coating station 22 and a third vacuum chamber 27.
- the vacuum pump 17 is connected to the third vacuum chamber 27.
- the third vacuum chamber 27 is part of the third coating station 22.
- the coating device not visible in the drawing is a plasma device for applying a mirror layer to the outside of an inner tube.
- the third vacuum chamber 27 is connected via a vacuum transport path to a fourth vacuum chamber 28 and a fourth coating station 23.
- the vacuum pump 18 is connected.
- the fourth coating station 23 and the fourth vacuum chamber 28 are also part of the second vacuum unit 2.
- the coating device, not visible in the drawing, of the fourth coating station 23 is a plasma device for applying an outer coating to the outside of an inner tube, in particular an absorber layer.
- the vacuum pump 19 is connected to the fourth vacuum chamber 28 .
- the fourth vacuum chamber 28 is connected to the third vacuum unit 3 via a further vacuum transport path.
- the third vacuum unit 3 has a fifth vacuum chamber 29, in which the magazine 10 is arranged.
- the fifth vacuum chamber 29 is equipped with a tempering device, not shown in the drawing.
- the third vacuum unit 3 has a sixth vacuum chamber 30, which is equipped with a fusion device 24.
- this merging device 24 an outer tube is in each case fused with an inner tube such that the intermediate space between the outer tube and the inner tube is closed.
- the individual sections of the first, second and third vacuum units 1, 2, 3 are equipped with slides. These sliders can be opened and closed to individual sections of the vacuum units when needed separate.
- a first slider 31 is disposed in front of the third vacuum chamber 27.
- a second slider 32 is disposed after the third vacuum chamber. The sliders 31, 32 are opened so that an inner tube can pass.
- the sliders 31, 32 are closed when an inner tube is coated in the third vacuum chamber so as not to stress the vacuum in the conveying paths before and after the third vacuum chamber 27 by the coating process and the coating material. Accordingly, sliders 33 and 34 are disposed on the third vacuum chamber 28, sliders 36, 37 on the first vacuum chamber 25, and sliders 38, 39 on the second vacuum chamber 26. A slider 40 is disposed at the junction between the first vacuum unit 1 and the third vacuum unit 3. A slider 35 is disposed at the junction between the second vacuum unit 2 and the third vacuum unit 3. Between the fifth vacuum chamber 29 and the sixth vacuum chamber 30, a slider 41 is arranged. The sixth vacuum chamber 30 is further equipped with a slide 50 at its end remote from the fifth vacuum chamber. About this slide a finished vacuum tube is discharged from the device. The first vacuum unit 1 is at its front end relative to the
- Transport direction 8 of the outer tubes equipped with a lock 46 is introduced into the device.
- the lock can be equipped with a cleaning device, not shown in the drawing.
- the lock 46 may be equipped with a device, not shown in the drawing for molding a bottom 6 to an outer tube.
- the lock has a vacuum pump, which is also not shown in the drawing.
- the second vacuum unit 2 is equipped at its front end with respect to the transport direction 9 of the inner tubes with a lock 47.
- a lock 47 an inner tube is introduced into the device.
- the lock can be fitted with a cleaning device not shown in the drawing. be equipped.
- the lock 47 may be equipped with a device not shown in the drawing for molding a bottom 7 to an inner tube.
- the lock has a vacuum pump, which is also not shown in the drawing.
- a depot 48 shown in Figure 2 is arranged, in which outer tubes can be stored in the second coating station 21 after their coating in the first coating station 20 and before their coating.
- the depot is part of the first vacuum unit 1.
- the depot can serve as a buffer between the first and second coating stations.
- the coating operations in the first and second coating stations 20, 21 may take different amounts of time.
- a depot 49 shown in Figure 2 is arranged, in which inner tubes after their coating in the third coating station 22 and before their coating in the fourth coating station 23 are stored can.
- the depot is part of the second vacuum unit 2.
- the depot 49 there is a vacuum.
- the depot can serve as a buffer between the third and fourth coating stations.
- the coating processes in the third and fourth coating stations 22, 23 may take different lengths.
- An outer tube 4 is introduced via the lock 46 into the first vacuum unit 1 of the device. Subsequently, a bottom 6 is integrally formed on the outer tube.
- a transport device not shown in the drawing, the outer tube 4 to the first vacuum chamber 25 with the first Coating station 20 transported.
- the slider 36 is opened so that the outer tube 4 can be moved into the first vacuum chamber 25. If the outer tube is in the first vacuum chamber 25, the slider 36 is closed.
- the slide 37 is already closed. In the first vacuum chamber 25, the outer tube is coated on its inner side.
- the slider 37 is opened.
- the coated outer tube is moved out of the first vacuum chamber.
- the slider 37 is closed again.
- Vacuum chamber 26 the outer tube provided with a coating on the inside is temporarily stored in the depot 48. So that the outer tube can be transported in the second vacuum chamber, the slider 38 is opened. After the outer tube 4 is received in the second vacuum chamber 26, the slider 38 is closed. The slider 39 is already closed. In the second vacuum chamber 26 with the second coating station 21, the outer tube is coated on its outside. After completion of the coating operation, the slider 39 opens so that the coated outer tube 4 can leave the second vacuum chamber 26. Via a vacuum transport path, the coated outer tube 4 passes to the third vacuum unit 3. For this purpose, the slider 40 is opened so that the outer tube can happen. In the fifth vacuum chamber 29, the coated outer tube is deposited in the magazine 10. At the same time as the coating of an outer tube takes place in the second
- Vacuum unit 2 the coating of an inner tube 5.
- the processing of outer tube and inner tube is parallel.
- An inner tube 5 is introduced via the lock 47 into the second vacuum unit 2 of the device.
- a bottom 7 is integrally formed on the inner tube.
- the inner tube 5 is transported to the third vacuum chamber 27 with the third coating station 22.
- the slide 31 is opened so that the inner tube 5 in the third Vakuumkam- mer 27 can be moved. If the inner tube is located in the third vacuum chamber 27, the slide 31 is closed.
- the slider 32 is already closed. In the third vacuum chamber 27, the inner tube is coated on its outside. It is applied a mirror layer. After completion of the coating operation, the slider 32 is opened.
- the coated inner tube is moved out of the third vacuum chamber 27. Then the slider 32 is closed again.
- the inner tube passes to the fourth coating station 23 with the fourth vacuum chamber 28 via a vacuum transport path with a transport device (not shown in the drawing).
- the inner tube provided with a coating on the outer side is temporarily stored in the depot 49. So that the inner tube can be transported in the fourth vacuum chamber, the slider 33 is opened. After the inner tube 5 is received in the fourth vacuum chamber 28, the slider 33 is closed. The slider 34 is already closed.
- the inner tube is coated again on its outside. An absorber layer is applied. After completion of the coating operation, the slider 34 opens so that the coated inner tube 5 can leave the fourth vacuum chamber 28. Via a vacuum transport path, the coated inner tube 5 passes to the third
- Vacuum unit 3 For this purpose, the slider 35 is opened so that the inner tube can happen.
- the coated inner tube In the fifth vacuum chamber 29, the coated inner tube is moved to the magazine 10 and inserted into an already stored there outer tube.
- a getter In the third vacuum unit, a getter, not shown in the drawing, can be introduced into an outer tube.
- an outer tube is transported with an inner tube disposed therein in the sixth vacuum chamber 30.
- the outer tube and the inner tube are fused together at their open ends.
- the space between the outer tube and the inner tube is closed. Since the process takes place in a vacuum, prevails in the closed space between the outer tube and the Inner tube also a vacuum.
- the outer tube with the inner tube arranged therein is transported back into the fifth vacuum chamber, deposited in the magazine 10 and tempered. After completion of the annealing process, the manufacture of the vacuum tube is completed. The finished vacuum tube is removed by the open slide 50.
- the coating of outer tubes in the first vacuum unit 1 is carried out continuously.
- the outer tubes are introduced one after the other into the first vacuum unit 1. Once, for example, the coating of a
- outside tube is completed in the first coating station 20, the corresponding coated outer tube is removed from the first vacuum chamber 25 and the next outer tube is received in the first coating station 20.
- the coating of the inner tubes in the second vacuum unit also takes place in this way.
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Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201280070467.2A CN104136385A (zh) | 2011-12-23 | 2012-12-22 | 制造用于太阳热能设备的真空管的方法和装置 |
US14/367,314 US20150000338A1 (en) | 2011-12-23 | 2012-12-22 | Method and device for producing vacuum tubes for solar thermal installations |
DE112012005378.8T DE112012005378A5 (de) | 2011-12-23 | 2012-12-22 | Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen |
EP12829100.2A EP2794499A2 (de) | 2011-12-23 | 2012-12-22 | Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011122324 | 2011-12-23 | ||
DE102011122324.3 | 2011-12-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2013091611A2 true WO2013091611A2 (de) | 2013-06-27 |
WO2013091611A3 WO2013091611A3 (de) | 2013-08-08 |
Family
ID=47757251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2012/001222 WO2013091611A2 (de) | 2011-12-23 | 2012-12-22 | Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen |
Country Status (5)
Country | Link |
---|---|
US (1) | US20150000338A1 (de) |
EP (1) | EP2794499A2 (de) |
CN (1) | CN104136385A (de) |
DE (1) | DE112012005378A5 (de) |
WO (1) | WO2013091611A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013010358A1 (de) * | 2013-06-21 | 2014-12-24 | Dr. Laure Plasmatechnologie Gmbh | Vorrichtung und Verfahren zur Herstellung von Vakuumröhren |
EP2977690A1 (de) * | 2014-07-24 | 2016-01-27 | Airbus Defence and Space GmbH | Verfahren zum vakuumdichten Verschließen eines doppelwandigen Glasrohrs |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112374733A (zh) * | 2020-11-10 | 2021-02-19 | 桂林电子科技大学 | 一种可视化高温石英热管封装装置和方法 |
CN114292013B (zh) * | 2021-11-15 | 2024-01-19 | 山东绿成环保材料有限公司 | 一种用于玻璃管末端的高效自动化收口装置及使用方法 |
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US4309261A (en) * | 1980-07-03 | 1982-01-05 | University Of Sydney | Method of and apparatus for reactively sputtering a graded surface coating onto a substrate |
DE10138277A1 (de) * | 2001-08-10 | 2003-03-20 | Ritter En Und Umwelttechnik Gm | Verfahren zum Herstellen eines Elements mit einem hermetisch abgeschlossenen luftleeren Raum |
CN1558163A (zh) * | 2004-01-28 | 2004-12-29 | 赵宝善 | 全玻璃真空太阳集热管及其制造工艺 |
EP1884576B1 (de) * | 2006-07-26 | 2012-09-12 | Dr. Laure Plasmatechnologie Gmbh | Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen |
CN1951844B (zh) * | 2006-11-10 | 2010-12-08 | 冯方军 | 全自动太阳能集热管封口机 |
DE112008001620B4 (de) * | 2007-07-03 | 2021-08-26 | VON ARDENNE Asset GmbH & Co. KG | Verfahren und Vorrichtung zum Schleusen überlanger Substrate in einer Vakuumbeschichtungsanlage, Vakuumbeschichtungsanlage und Verfahren zu deren Betrieb |
DE102009016708B4 (de) * | 2008-04-10 | 2012-08-09 | Von Ardenne Anlagentechnik Gmbh | Solarabsorber-Schichtsystem und Verfahren zu seiner Herstellung |
DE102009042432A1 (de) * | 2008-09-29 | 2010-04-22 | Von Ardenne Anlagentechnik Gmbh | Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage |
-
2012
- 2012-12-22 WO PCT/DE2012/001222 patent/WO2013091611A2/de active Application Filing
- 2012-12-22 DE DE112012005378.8T patent/DE112012005378A5/de not_active Withdrawn
- 2012-12-22 CN CN201280070467.2A patent/CN104136385A/zh active Pending
- 2012-12-22 US US14/367,314 patent/US20150000338A1/en not_active Abandoned
- 2012-12-22 EP EP12829100.2A patent/EP2794499A2/de not_active Withdrawn
Non-Patent Citations (1)
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013010358A1 (de) * | 2013-06-21 | 2014-12-24 | Dr. Laure Plasmatechnologie Gmbh | Vorrichtung und Verfahren zur Herstellung von Vakuumröhren |
EP2977690A1 (de) * | 2014-07-24 | 2016-01-27 | Airbus Defence and Space GmbH | Verfahren zum vakuumdichten Verschließen eines doppelwandigen Glasrohrs |
WO2016012070A1 (de) * | 2014-07-24 | 2016-01-28 | Airbus Defence and Space GmbH | Verfahren zum vakuumdichten verschliessen eines doppelwandigen glasrohrs |
Also Published As
Publication number | Publication date |
---|---|
US20150000338A1 (en) | 2015-01-01 |
EP2794499A2 (de) | 2014-10-29 |
WO2013091611A3 (de) | 2013-08-08 |
DE112012005378A5 (de) | 2014-09-04 |
CN104136385A (zh) | 2014-11-05 |
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