DE112012005378A5 - Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen - Google Patents

Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen Download PDF

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Publication number
DE112012005378A5
DE112012005378A5 DE112012005378.8T DE112012005378T DE112012005378A5 DE 112012005378 A5 DE112012005378 A5 DE 112012005378A5 DE 112012005378 T DE112012005378 T DE 112012005378T DE 112012005378 A5 DE112012005378 A5 DE 112012005378A5
Authority
DE
Germany
Prior art keywords
solar thermal
vacuum tubes
thermal systems
producing vacuum
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112012005378.8T
Other languages
English (en)
Inventor
Stefan Laure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Laure Plasmatechnologie GmnH
Original Assignee
Dr Laure Plasmatechnologie GmnH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Laure Plasmatechnologie GmnH filed Critical Dr Laure Plasmatechnologie GmnH
Publication of DE112012005378A5 publication Critical patent/DE112012005378A5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/09—Reshaping the ends, e.g. as grooves, threads or mouths
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/13—Reshaping combined with uniting or heat sealing, e.g. for making vacuum bottles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S10/00—Solar heat collectors using working fluids
    • F24S10/40—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors
    • F24S10/45—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors the enclosure being cylindrical
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2225/00—Transporting hot glass sheets during their manufacture
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers
    • Y02E10/44—Heat exchange systems
DE112012005378.8T 2011-12-23 2012-12-22 Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen Withdrawn DE112012005378A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011122324 2011-12-23
DE102011122324.3 2011-12-23
PCT/DE2012/001222 WO2013091611A2 (de) 2011-12-23 2012-12-22 Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen

Publications (1)

Publication Number Publication Date
DE112012005378A5 true DE112012005378A5 (de) 2014-09-04

Family

ID=47757251

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112012005378.8T Withdrawn DE112012005378A5 (de) 2011-12-23 2012-12-22 Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen

Country Status (5)

Country Link
US (1) US20150000338A1 (de)
EP (1) EP2794499A2 (de)
CN (1) CN104136385A (de)
DE (1) DE112012005378A5 (de)
WO (1) WO2013091611A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013010358A1 (de) * 2013-06-21 2014-12-24 Dr. Laure Plasmatechnologie Gmbh Vorrichtung und Verfahren zur Herstellung von Vakuumröhren
EP2977690B1 (de) * 2014-07-24 2018-01-31 Airbus Defence and Space GmbH Verfahren zum vakuumdichten Verschließen eines doppelwandigen Glasrohrs
CN112374733A (zh) * 2020-11-10 2021-02-19 桂林电子科技大学 一种可视化高温石英热管封装装置和方法
CN114292013B (zh) * 2021-11-15 2024-01-19 山东绿成环保材料有限公司 一种用于玻璃管末端的高效自动化收口装置及使用方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309261A (en) * 1980-07-03 1982-01-05 University Of Sydney Method of and apparatus for reactively sputtering a graded surface coating onto a substrate
DE10138277A1 (de) * 2001-08-10 2003-03-20 Ritter En Und Umwelttechnik Gm Verfahren zum Herstellen eines Elements mit einem hermetisch abgeschlossenen luftleeren Raum
CN1558163A (zh) * 2004-01-28 2004-12-29 赵宝善 全玻璃真空太阳集热管及其制造工艺
EP1884576B1 (de) * 2006-07-26 2012-09-12 Dr. Laure Plasmatechnologie Gmbh Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen
CN1951844B (zh) * 2006-11-10 2010-12-08 冯方军 全自动太阳能集热管封口机
WO2009004048A1 (de) * 2007-07-03 2009-01-08 Von Ardenne Anlagentechnik Gmbh Verfahren und vorrichtung zum schleusen überlanger substrate in einer vakuumbeschichtungsanlage
DE102009016708B4 (de) * 2008-04-10 2012-08-09 Von Ardenne Anlagentechnik Gmbh Solarabsorber-Schichtsystem und Verfahren zu seiner Herstellung
DE102009042432A1 (de) * 2008-09-29 2010-04-22 Von Ardenne Anlagentechnik Gmbh Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage

Also Published As

Publication number Publication date
CN104136385A (zh) 2014-11-05
US20150000338A1 (en) 2015-01-01
WO2013091611A2 (de) 2013-06-27
EP2794499A2 (de) 2014-10-29
WO2013091611A3 (de) 2013-08-08

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Legal Events

Date Code Title Description
R082 Change of representative

Representative=s name: GEITZ TRUCKENMUELLER LUCHT, PATENTANWAELTE, DE

Representative=s name: GEITZ TRUCKENMUELLER LUCHT CHRIST PATENTANWAEL, DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee