WO2013091611A3 - Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen - Google Patents

Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen Download PDF

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Publication number
WO2013091611A3
WO2013091611A3 PCT/DE2012/001222 DE2012001222W WO2013091611A3 WO 2013091611 A3 WO2013091611 A3 WO 2013091611A3 DE 2012001222 W DE2012001222 W DE 2012001222W WO 2013091611 A3 WO2013091611 A3 WO 2013091611A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
vacuum unit
tube
coated
solar thermal
Prior art date
Application number
PCT/DE2012/001222
Other languages
English (en)
French (fr)
Other versions
WO2013091611A2 (de
Inventor
Stefan Laure
Original Assignee
Dr. Laure Plasmatechnologie Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr. Laure Plasmatechnologie Gmbh filed Critical Dr. Laure Plasmatechnologie Gmbh
Priority to US14/367,314 priority Critical patent/US20150000338A1/en
Priority to CN201280070467.2A priority patent/CN104136385A/zh
Priority to DE112012005378.8T priority patent/DE112012005378A5/de
Priority to EP12829100.2A priority patent/EP2794499A2/de
Publication of WO2013091611A2 publication Critical patent/WO2013091611A2/de
Publication of WO2013091611A3 publication Critical patent/WO2013091611A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/09—Reshaping the ends, e.g. as grooves, threads or mouths
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/13—Reshaping combined with uniting or heat sealing, e.g. for making vacuum bottles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S10/00—Solar heat collectors using working fluids
    • F24S10/40—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors
    • F24S10/45—Solar heat collectors using working fluids in absorbing elements surrounded by transparent enclosures, e.g. evacuated solar collectors the enclosure being cylindrical
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2225/00—Transporting hot glass sheets during their manufacture
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers
    • Y02E10/44—Heat exchange systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Energy (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Sustainable Development (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

Es werden ein Verfahren und eine Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen vorgeschlagen, wobei die Vakuumröhre ein Außenrohr und ein in dem Außenrohr angeordnetes Innenrohr aufweist, und der Zwischenraum zwischen dem Außenrohr und dem Innenrohr nach außen verschlossen und evakuiert ist. Dabei wird ein Außenrohr (4) in einer ersten Vakuumeinheit (1) beschichtet und ein Innenrohr (5) in einer zweiten Vakuumeinheit (2) beschichtet. Das beschichtete Außenrohr (4) und das beschichtete Innenrohr (5) werden in einer dritten Vakuumeinheit (3) zusammengesetzt und an den Enden miteinander verschmolzen. Die dritte Vakuumeinheit ist mit der ersten Vakuumeinheit (1) und der zweiten Vakuumeinheit (2) verbunden, so dass das Außenrohr (4) und das Innenrohr (5) während der gesamten Herstellung der Vakuumröhre nicht an Atmosphäre gelangen.
PCT/DE2012/001222 2011-12-23 2012-12-22 Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen WO2013091611A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US14/367,314 US20150000338A1 (en) 2011-12-23 2012-12-22 Method and device for producing vacuum tubes for solar thermal installations
CN201280070467.2A CN104136385A (zh) 2011-12-23 2012-12-22 制造用于太阳热能设备的真空管的方法和装置
DE112012005378.8T DE112012005378A5 (de) 2011-12-23 2012-12-22 Verfahren und Vorrichtung zur Herstellung von Vakuumröhren für solarthermische Anlagen
EP12829100.2A EP2794499A2 (de) 2011-12-23 2012-12-22 Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011122324.3 2011-12-23
DE102011122324 2011-12-23

Publications (2)

Publication Number Publication Date
WO2013091611A2 WO2013091611A2 (de) 2013-06-27
WO2013091611A3 true WO2013091611A3 (de) 2013-08-08

Family

ID=47757251

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2012/001222 WO2013091611A2 (de) 2011-12-23 2012-12-22 Verfahren und vorrichtung zur herstellung von vakuumröhren für solarthermische anlagen

Country Status (5)

Country Link
US (1) US20150000338A1 (de)
EP (1) EP2794499A2 (de)
CN (1) CN104136385A (de)
DE (1) DE112012005378A5 (de)
WO (1) WO2013091611A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013010358A1 (de) * 2013-06-21 2014-12-24 Dr. Laure Plasmatechnologie Gmbh Vorrichtung und Verfahren zur Herstellung von Vakuumröhren
EP2977690B1 (de) * 2014-07-24 2018-01-31 Airbus Defence and Space GmbH Verfahren zum vakuumdichten Verschließen eines doppelwandigen Glasrohrs
CN112374733A (zh) * 2020-11-10 2021-02-19 桂林电子科技大学 一种可视化高温石英热管封装装置和方法
CN114292013B (zh) * 2021-11-15 2024-01-19 山东绿成环保材料有限公司 一种用于玻璃管末端的高效自动化收口装置及使用方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309261A (en) * 1980-07-03 1982-01-05 University Of Sydney Method of and apparatus for reactively sputtering a graded surface coating onto a substrate
DE10138277A1 (de) * 2001-08-10 2003-03-20 Ritter En Und Umwelttechnik Gm Verfahren zum Herstellen eines Elements mit einem hermetisch abgeschlossenen luftleeren Raum
EP1884576A2 (de) * 2006-07-26 2008-02-06 Dr. Laure Plasmatechnologie Gmbh Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen
WO2009004048A1 (de) * 2007-07-03 2009-01-08 Von Ardenne Anlagentechnik Gmbh Verfahren und vorrichtung zum schleusen überlanger substrate in einer vakuumbeschichtungsanlage
DE102009016708A1 (de) * 2008-04-10 2009-10-22 Von Ardenne Anlagentechnik Gmbh Solarabsorber-Schichtsystem und Verfahren zu seiner Herstellung
DE102009042432A1 (de) * 2008-09-29 2010-04-22 Von Ardenne Anlagentechnik Gmbh Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1558163A (zh) * 2004-01-28 2004-12-29 赵宝善 全玻璃真空太阳集热管及其制造工艺
CN1951844B (zh) * 2006-11-10 2010-12-08 冯方军 全自动太阳能集热管封口机

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309261A (en) * 1980-07-03 1982-01-05 University Of Sydney Method of and apparatus for reactively sputtering a graded surface coating onto a substrate
DE10138277A1 (de) * 2001-08-10 2003-03-20 Ritter En Und Umwelttechnik Gm Verfahren zum Herstellen eines Elements mit einem hermetisch abgeschlossenen luftleeren Raum
EP1884576A2 (de) * 2006-07-26 2008-02-06 Dr. Laure Plasmatechnologie Gmbh Vorrichtung zur Plasmabeschichtung von länglichen, zylindrischen Bauteilen
WO2009004048A1 (de) * 2007-07-03 2009-01-08 Von Ardenne Anlagentechnik Gmbh Verfahren und vorrichtung zum schleusen überlanger substrate in einer vakuumbeschichtungsanlage
DE102009016708A1 (de) * 2008-04-10 2009-10-22 Von Ardenne Anlagentechnik Gmbh Solarabsorber-Schichtsystem und Verfahren zu seiner Herstellung
DE102009042432A1 (de) * 2008-09-29 2010-04-22 Von Ardenne Anlagentechnik Gmbh Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WINDOW B ET AL: "Progress in the materials science of all-glass evacuated collectors", SOLAR ENERGY, PERGAMON PRESS. OXFORD, GB, vol. 32, no. 5, 1 January 1984 (1984-01-01), pages 609 - 623, XP025415819, ISSN: 0038-092X, [retrieved on 19840101], DOI: 10.1016/0038-092X(84)90137-3 *

Also Published As

Publication number Publication date
CN104136385A (zh) 2014-11-05
WO2013091611A2 (de) 2013-06-27
EP2794499A2 (de) 2014-10-29
DE112012005378A5 (de) 2014-09-04
US20150000338A1 (en) 2015-01-01

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