WO2013069184A1 - 反転ヘッド - Google Patents
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- Publication number
- WO2013069184A1 WO2013069184A1 PCT/JP2012/005771 JP2012005771W WO2013069184A1 WO 2013069184 A1 WO2013069184 A1 WO 2013069184A1 JP 2012005771 W JP2012005771 W JP 2012005771W WO 2013069184 A1 WO2013069184 A1 WO 2013069184A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nozzle
- component
- base
- head
- substrate
- Prior art date
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- 239000000758 substrate Substances 0.000 claims description 75
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 238000011143 downstream manufacturing Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 210000000078 claw Anatomy 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7565—Means for transporting the components to be connected
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
Definitions
- the present invention relates to a reversing head that is provided in a component mounting apparatus that mounts a component on a substrate with a mounting head, and that the component is turned upside down and delivered to the mounting head.
- Some component mounting devices that mount components on the board using the mounting head receive components mounted upside down by the reversing head and mount them on the substrate. For example, they are driven to the peripheral area of a liquid crystal panel.
- Liquid crystal panel manufacturing apparatuses for mounting components such as circuits are known.
- the nozzle is usually attached to the lower end of a shaft-like member extending in the vertical direction, and the component adsorbed by the nozzle can be moved up and down and swung around the vertical axis.
- a mechanism that vertically moves the shaft-like member to which the nozzle is attached and swings around the vertical axis is attached to the periphery of the shaft-like member (for example, Patent Document 1).
- the mounting head is spatially fixed in order to eliminate positioning errors that occur when the mounting head is moved, and this spatially fixed mounting is provided.
- the reversing head enters the region between the substrate and the mounting head, and delivers the component upside down to the mounting head.
- the mounting head receives the component, the reversing head is above the part mounting target part. After leaving, the part is lowered and mounted on the part mounting target site.
- the reversing head is provided with a nozzle holder supporting member that can swing in a horizontal plane on a flat base provided on a movable member that can be moved up and down. Further, both ends of the nozzle holder extending in the horizontal direction can be rotatably supported, and the nozzle can be held on the side surface of the nozzle holder.
- the nozzle holder includes a nozzle base that extends in the horizontal direction and has a vacuum path formed therein, and the nozzle is locked to the side surface of the nozzle base.
- the nozzle locking member that connects the nozzle and the vacuum path in the nozzle base is provided, and the nozzle locking member needs to be attached to the nozzle base with a screw, but the screw is sufficiently screwed into the nozzle base.
- the nozzle base itself becomes thick, and the part descending stroke when the mounting head mounts the part on the board becomes longer, leading to an increase in the size of the entire apparatus. Arise.
- the present invention can shorten the descending stroke of the component when the mounting head mounts the component on the board in the component mounting apparatus, thereby realizing a compact component mounting apparatus and improving the component mounting accuracy.
- An object is to provide a reversing head.
- the reversing head of the present invention is provided in a component mounting apparatus for mounting a component on a substrate by a mounting head, and the component supplied to a component supply position is sucked upside down by a nozzle and turned upside down.
- a nozzle holder that holds the nozzle, and a rotation drive unit that rotates the nozzle holder about a horizontal axis to switch the direction of the nozzle up and down, the nozzle holder is supported at both ends and extends in the horizontal direction,
- a nozzle base having a vacuum path formed therein, and the nozzle and the vacuum path in the nozzle base by locking the nozzle to the side surface of the nozzle base
- a pair of fixing members that are slidably mounted on both ends of the nozzle base from outside the both ends of the nozzle base and fix the nozzle locking member to the nozzle base.
- a nozzle locking member for locking the nozzle to the side surface of the nozzle base and communicating the nozzle and the vacuum path in the nozzle base is attached to both ends of the nozzle base from the outside of both ends of the nozzle base.
- the screw base is fixed to the nozzle base by a pair of fixing members, and a screw is not necessary for attaching the nozzle locking member to the nozzle base. Therefore, it is necessary to consider the dimensions necessary for screw insertion. Absent. Therefore, since the height dimension of the nozzle base can be reduced accordingly, the reversing head moves both the substrate and the mounting head when moving the inverted component above the component mounting target part on the substrate.
- the distance between the board and the mounting head required to prevent interference with the mounting head can be set small, which shortens the component lowering stroke when the mounting head mounts the component on the board. It is possible to reduce the overall size and improve the mounting accuracy of components.
- FIG. 1 A) Top view of component mounting apparatus in one embodiment of this invention, (b) Side view (A) top view, (b) front view, (c) side view of a reversing head in one embodiment of the present invention
- the perspective view of the inversion head with which the component mounting apparatus in one embodiment of this invention is provided 1 is an exploded perspective view of a reversing head according to an embodiment of the present invention.
- the block diagram which shows the control system of the component mounting apparatus in one embodiment of this invention (A), (b) The figure which shows the condition which delivers the component which the inversion head of the component mounting apparatus in one embodiment of this invention turned upside down to the mounting head
- the component mounting apparatus 1 shown in FIGS. 1A and 1B carries in and positions a board 2 sent from another apparatus adjacent to the upstream process side of the component mounting apparatus 1, and A device that repeatedly performs a component mounting operation in which a component 4 is mounted on an electrode portion 3 provided at an edge and is carried out to another device adjacent to the downstream process side of the component mounting device 1.
- a control device 24 a control device 24.
- the transport direction of the substrate 2 (arrow A shown in FIG.
- the X-axis direction is the X-axis direction
- the horizontal plane direction orthogonal to the X-axis direction is the Y-axis direction
- the vertical direction is the Z-axis direction.
- the Y-axis direction being the front-rear direction
- the side on which an operator (not shown) performs work is the front side and the opposite side (the left side of FIGS. 1A and 1B). Is the rear.
- the X-axis direction as the left-right direction the side on the upstream process side (right side as viewed from the operator, upper side in FIG. 1A) is on the right, and the downstream process side apparatus is provided.
- the left side as viewed from the operator is the left side.
- both the substrate carry-in portion 12 and the substrate carry-out portion 13 are constituted by a conveyor mechanism extending in the X-axis direction, and are provided in the rear region on the base 11 so as to face each other in the X-axis direction.
- a substrate carry-in portion 12 is disposed at the right end portion of the base 11, and a substrate carry-out portion 13 is disposed at the left end portion of the base 11.
- the substrate positioning unit 14 is provided in a region between the substrate carry-in unit 12 and the substrate carry-out unit 13 on the base 11, and includes a substrate holding table 14 a that holds the substrate 2 and a substrate holding table 14 a that holds the substrate 2. It comprises a substrate holding table drive unit 14b that moves horizontally and moves up and down.
- the backup stage 15 is provided extending in the X-axis direction in a region in front of the substrate positioning portion 14 on the base 11.
- the substrate positioning unit 14 moves and positions the substrate 2 by moving the substrate holding table 14a holding the substrate 2 by the substrate holding table driving unit 14b. At this time, the orientation of the substrate 2 is adjusted so that the rows of the electrode portions 3 that are component mounting target portions provided on the edge portion of the substrate 2 are aligned in the X-axis direction, and the rows of the electrode portions 3 are backed up. It is located above the stage 15.
- the substrate positioning unit 14 positions the substrate 2 so that the row of the electrode units 3 at the edge of one long side of the substrate 2 is positioned above the backup stage 15, and the component at the one long side. 4 is mounted, the substrate holding table 14a is rotated 90 degrees so that the row of the electrode portions 3 at the edge of one short side of the substrate 2 is positioned above the backup stage 15. Operates to perform positioning.
- a tray supply unit 16 and a tray collection unit 17 each stack a plurality of trays TR in the vertical direction and stock a plurality of tray stockers from which trays TR can be taken in and out. Consists of.
- the tray TR in which the component 4 is stored (before the component 4 is taken out) is stocked in the tray supply unit 16, and the component 4 is not stored in the tray collection unit 17 (the component 4 is taken out). After that, the tray TR is stocked.
- the tray moving mechanism 18 includes a Y-axis table 18a that extends in the Y-axis direction in the front region of the base 11, and extends on the Y-axis table 18a by extending in the X-axis direction.
- the X-axis table 18b that moves in the Y-axis direction
- the Z-axis table 18c that moves in the X-axis direction on the X-axis table 18b, and can be moved up and down, and the top plate of the Z-axis table 18c are attached.
- the tray support unit 18d includes a tray gripping mechanism (not shown) for taking out the tray TR from the tray supply unit 16 and storing the tray TR in the tray collection unit 17.
- the tray moving mechanism 18 combines a moving operation of the X-axis table 18b with respect to the Y-axis table 18a, a moving operation of the Z-axis table 18c with respect to the X-axis table 18b, and a lifting operation of the top plate portion of the Z-axis table 18c. Is moved three-dimensionally, the tray TR is taken out from below the tray supply unit 16, and the tray TR is moved to a predetermined component supply position (a position where the reversing head 20 described below sucks the component 4; FIG. 1B). An operation of moving (supplying operation of the component 4) and an operation of storing the empty tray TR in which the removal of the component 4 by the reversing head 20 is completed in the component supply position in the tray collection unit 17 are performed.
- the reversing head 20 picks up the component 4 in the tray TR positioned at the component supply position by the tray moving mechanism 18 by using the nozzle 20a and then switches the direction of the nozzle 20a between the lower side and the upper side to change the component 4 Invert the top and bottom.
- the reversing head 20 can swing the nozzle 20a in an upward or downward direction in a horizontal plane, and can adjust the direction in the horizontal plane of the part 4 that is inverted up and down (details will be described later).
- a gate-type stage 21a is provided at the center of the base 11 so as to extend in the X-axis direction.
- the reversing head moving mechanism 21 extends in the Y-axis direction and extends below the portal-type stage 21a in the X-axis direction.
- a movable base 21d extending in the Z-axis direction and movable on the Y-stage 21b in the Y-axis direction.
- the reversing head 20 is attached to the moving base 21d.
- the reversing head moving mechanism 21 reverses by combining the movement of the Z stage 21c with respect to the Y stage 21b in the Y-axis direction and the up-and-down movement of the moving base 21d with respect to the Z stage 21b.
- the head 20 is moved.
- the recognition camera 22 has its imaging field of view directed downward, and is arranged so that the imaging optical axis passes through the component supply position.
- the recognition camera 22 images from above the component 4 positioned at the component supply position or the component 4 sucked upside down by the reversing head 20 from the component supply position.
- the mounting head 23 is provided at a position above the backup stage 15 and fixed to the portal stage 21a (and thus spatially fixed).
- the mounting head 23 is provided with a nozzle-shaped component mounting portion 23a extending downward.
- the component mounting portion 23a is moved upside down by the reversing head 20 and received by the component mounting portion 23a. Is attached to the electrode portion 3 of the substrate 2 on the backup stage 15.
- the mounting head 23 since the mounting head 23 is fixed above the backup stage 15, the mounting point of the component 4 is substantially coincident with the lowest point of the lower stroke of the component mounting portion 23a included in the mounting head 23. It has become.
- the reversing head 20 delivers the vertically inverted component 4 to the mounting head 23
- the mounting head 23 enters the region between the substrate 2 and the mounting head 23 positioned by the substrate positioning unit 14. Is moved in the horizontal direction (backward) from the front position.
- the reversing head 20 includes a flat base 31 that protrudes laterally from a movable base 21d that is movable up and down in the reversing head moving mechanism 21.
- a plurality of bearings 32 provided on the lower surface of the base 31, a nozzle holder support member 33 provided with a part of the outer peripheral surface supported by the plurality of bearings 32 and swingable in a horizontal plane below the base 31, a nozzle Both ends are supported by the holder support member 33 and extend in the horizontal direction.
- the holder support member 33 is provided with a nozzle holder 34 that can freely rotate about the horizontal axis CX and holds the nozzle 20a on the side surface.
- the nozzle holder support member 33 is formed of a member having a disk shape as a whole in plan view, and a rocking center P set at the center portion of the disk is formed on a part of the outer peripheral portion thereof.
- a rocking center P set at the center portion of the disk is formed on a part of the outer peripheral portion thereof.
- a plurality of bearings 32 provided on the lower surface of the base portion 31 externally supports the arc-shaped outer peripheral surfaces 41a of the three protruding portions 41 of the nozzle holder support member 33, and the nozzle holder support member 33 is set at the center thereof. It can be swung in a horizontal plane with respect to the base 31 around the moving center P.
- the nozzle holder support member 33 is configured such that the arc-shaped outer peripheral surface 41 a is supported by a plurality of bearings 32 provided on the base portion 31 and can swing freely in the horizontal plane with respect to the base portion 31.
- the nozzle holder support member 33 is provided with a notch 42 in a central region including the swing center P. Both portions sandwiching the notch 42 are a pair of arm portions 43 extending in the horizontal plane direction.
- a pair of bearings 44 (FIG. 2B) is built in the pair of arm portions 43, and both end portions of the nozzle holder 34 are supported in a horizontal posture by the pair of bearings 44.
- the nozzle holder 34 is supported at both ends by the nozzle holder support member 33 and extends so as to traverse the notch portion 42 of the nozzle holder support member 33 in the horizontal direction, and can be freely rotated about the horizontal axis CX. In this configuration, the nozzle 20a is held.
- the nozzle holder 34 includes a compression spring, in addition to the nozzle base 51 extending in the horizontal direction with both ends rotatably supported by a pair of bearings 44 provided in the nozzle holder support member 33.
- a member 52, a nozzle locking member 53, and a pair of fixing members 54 are provided.
- the nozzle base 51 includes a rectangular parallelepiped base body 61 extending in the horizontal direction and two cylindrical base body support portions 62 provided to extend outward from both ends of the base body 61. .
- the nozzle 20a is formed in a horizontally long rectangular parallelepiped shape and has a nozzle main body 64 having a convex portion 63 protruding outward from the nozzle holder 34, and a nozzle main body.
- a cylindrical portion 65 extending from 64 to the inside of the nozzle holder 34 is provided, and a slit-like component suction port 66 is provided in the nozzle body 64.
- the nozzle locking member 53 is made of a horizontally long flat rectangular member, and has an opening 53a having a size capable of penetrating the convex portion 63 of the nozzle 20a.
- a rectangular recess 67 and a cylindrical recess 68 located in the rectangular recess 67 are provided on one side surface of the base body 61.
- a cylindrical portion 65 of the nozzle 20a is accommodated in the cylindrical recess 68, and a convex portion 63 of the nozzle 20a in which the cylindrical portion 65 is accommodated in the cylindrical recess 68 is inserted into the rectangular recess 67 from the opening 53a.
- the nozzle body 64 in a state of being penetrated is accommodated.
- Each fixing member 54 has a through hole 54a through which both end portions (base body support portion 62) of the nozzle base 51 penetrate at the center, and a pair of claw portions 54b are provided at both upper and lower end portions sandwiching the through hole 54a. .
- each fixing member 54 the cylindrical portion 65 of the nozzle 20 a through which the compression spring member 52 is inserted is accommodated in the cylindrical concave portion 68, and the convex portion 63 of the nozzle 20 a extends from the opening 53 a of the nozzle locking member 53.
- the nozzle locking member 53 is attached to the base body 61 so as to penetrate, the nozzle base 51 is slid and attached to both ends of the nozzle base 51 from the outside of both ends of the nozzle base 51.
- the pair of claw portions 54b of each fixing member 54 includes a locking recess 53b (FIG. 5B) at the end of the nozzle locking member 53 and a locking recess 61a (FIG.
- each fixing member 54 is fixed to the nozzle base 51 by the engagement of the O-ring 54c provided on the inner surface of the through hole 54a and the groove 62a provided on the base body support 62 (FIG. 6B). ) ⁇ FIG. 6A), the nozzle 20a is attached to the nozzle base 51 (FIG. 5A).
- an in-nozzle vacuum path 71 having one end opened to the component suction port 66 and the other end opened to the side surface of the cylindrical portion 65 is provided inside the nozzle 20a.
- an intra-nozzle base vacuum path 72 is provided inside the nozzle base 51.
- the nozzle base internal vacuum path 72 is provided inside the base body 61 and is provided inside the nozzle base first vacuum path 72 a whose one end opens into the cylindrical recess 68 and one base body support portion 62.
- the nozzle base second vacuum path 72b connected to the nozzle base first vacuum path 72a.
- the in-nozzle vacuum path 71 and the in-nozzle base vacuum path 72 communicate with each other (FIG. 6A).
- the side on which the second vacuum path 72b in the nozzle base is provided (the left side base body support portion 62 in FIGS. 6A and 6B) is provided.
- the nozzle 20a is connected to the vacuum pressure supply pipe 73 via the nozzle internal vacuum path 71 and the nozzle base vacuum path 72, and the vacuum pressure supply device supplies the vacuum pressure.
- the vacuum pressure supply device supplies the vacuum pressure.
- the nozzle holder 34 of the reversing head 20 included in the component mounting apparatus 1 is supported at both ends by the nozzle holder support member 33 and extends in the horizontal direction, and has a vacuum path (vacuum path in the nozzle base) inside. 72) and the nozzle locking member 53 and the nozzle for locking the nozzle 20a to the side surface of the nozzle base 51 and communicating the nozzle 20a (inner nozzle vacuum path 71) and the nozzle base vacuum path 72.
- a pair of fixing members 54 that are slidably mounted on both ends of the nozzle base 51 from outside the both ends of the base 51 and fix the nozzle locking member 53 to the nozzle base 51 are provided.
- the nozzle locking member 53 is fixed to the nozzle base 51 by the pair of fixing members 54 attached to both ends of the nozzle base 51 from the outside of both ends of the nozzle base 51.
- a screw is not necessary for attaching the nozzle locking member 53 to the nozzle base 51.
- a bracket 81 is provided at a front position of the nozzle holder support member 33 so as to extend forward.
- a reversing motor 82 is provided on the upper surface of the bracket 81. It is attached.
- a drive pulley 83 is attached to the drive shaft 82a of the reversing motor 82, and the base (on the side opposite to the side on which the nozzle base second vacuum path 72b is provided) on one side of the nozzle holder 34 is provided.
- a driven pulley 84 is attached to the main body support portion 62.
- a transmission belt 85 is stretched between the drive pulley 83 and the driven pulley 84.
- the mechanism including the reversing motor 82, the drive pulley 83, the driven pulley 84, and the transmission belt 85 rotates the nozzle holder 34 around the horizontal axis CX to switch the direction of the nozzle 20a up and down.
- a rotation drive unit 86 is provided.
- a swing motor 91 is provided on the upper surface of the base 31.
- the drive shaft 91a of the swing motor 91 penetrates the base 31 in the thickness direction and extends downward, and the tip of the drive shaft 91a is positioned on the lower surface side of the nozzle holder support member 33 and extends in the horizontal direction.
- One end of the arm 92 is attached.
- a groove 92a extending in the vertical direction is provided on the other end side of the swing drive arm 92, and this groove 92a is engaged with a pin member 93 that extends downward from the lower surface of the nozzle holder support member 33. Yes.
- FIG. 8B shows the nozzle holder support member by operating the swing motor 91 from the state of FIG. 8A and swinging the swing drive arm 92 clockwise (arrow R1) in plan view.
- An example is shown in which 33 is swung counterclockwise (arrow R2) in plan view.
- the swing motor 91, the swing drive arm 92, and the pin member 93 cause the nozzle holder support member 33 to swing in the horizontal plane with respect to the base portion 31, and are directed upward or downward.
- the swing drive unit 94 changes the orientation of 20a in the horizontal plane.
- the operation control of the board carry-in section 12, the board carry-out section 13, the board positioning section 14, the tray moving mechanism 18, the reversing head 20, the reversing head moving mechanism 21, and the mounting head 23 is performed by a control device. 24. Further, the image pickup operation control by the recognition camera 22 and the image recognition control based on the obtained image data are also performed by the control device 24 (FIG. 9).
- control device 24 When the control device 24 detects that the substrate 2 has been sent from the other device adjacent to the upstream process side of the component mounting device 1 to the substrate carry-in portion 12, the control device 24 controls the operation of the substrate carry-in portion 12 and the substrate positioning portion 14. Then, the substrate 2 is transferred from the substrate carry-in unit 12 to the substrate positioning unit 14.
- the control device 24 controls the operation of the substrate positioning unit 14 to move the substrate 2 in a horizontal plane, and moves the substrate 2 on one long side of the substrate 2.
- the substrate 2 is positioned so that the row of electrode portions 3 is positioned above the backup stage 15 in the X-axis direction.
- the electrode portion 3 corresponding to the component mounting target site to which the component 4 is to be mounted is positioned at the mounting point of the component 4 immediately below the mounting head 23.
- control device 24 controls the operation of the tray moving mechanism 18 to take out the tray TR from the tray supply unit 16 and position the taken-out tray TR to the component supply position.
- the control device 24 controls the operation of the reversing head moving mechanism 21 so that the reversing head 20 with the nozzle 20a facing downward is placed above the tray supply unit 16. Move. Then, the operation control of the reversing head moving mechanism 21 is performed to lower the moving base 21d so that the nozzle 20a of the reversing head 20 contacts the component 4 on the tray TR supplied to the component supply position from above. The component 4 is adsorbed to and the component 4 is taken out (pickup).
- the control device 24 When the control device 24 picks up the component 4 by the reversing head 20 and removes it from the tray TR, the control device 24 controls the operation of the rotation drive unit 86 to switch the direction of the nozzle 20a from below to above, thereby reversing the component 4 up and down. Then, the upside down component 4 is picked up by the recognition camera 22 to recognize the image, and the amount of positional deviation from the reference position of the center position of the upside down component 4 is detected.
- the image recognition of the component 4 is performed in a state where the image is reversed upside down by the reversing head 20, but the component 4 is taken out by the reversing head 20 from the tray TR positioned at the component supply position by the tray moving mechanism 18. Before that, the part 4 may be imaged by the recognition camera 22 and performed.
- the control device 24 detects the amount of displacement from the reference position of the component 4 that is vertically inverted by the reversing head 20, the component 4 is located above the electrode portion 3 (the mounting head 23) that is the component mounting target portion on the substrate 2.
- the reversing head 20 is moved so as to be located below (FIG. 10A ⁇ FIG. 10B).
- the moving position of the reversing head 20 is determined so as to cancel the positional deviation of the component 4 with respect to the reference position of the electrode unit 3 detected through imaging by the recognition camera 22, and the operation control of the swing driving unit 94 is performed.
- the orientation of the nozzle 20a in the horizontal plane is changed to a normal orientation.
- the reversing head 20 moves the nozzle holder 34 up and down (here, the moving base 21d). And the mechanism for swinging around the vertical axis (here, the swing drive unit 94) do not exist in the upper and lower regions of the nozzle holder 34, and the upper and lower regions of the nozzle holder 34 are open. Necessary to prevent the reversing head 20 from interfering with both the substrate 2 and the mounting head 23 when the vertically inverted component 4 is moved above the electrode portion 3 which is a component mounting target portion on the substrate 2.
- a distance L between the substrate 2 and the mounting head 23 may be a value obtained by adding an appropriate clearance to the thickness of the nozzle holder 34.
- the control device 24 positions the component 4 above the electrode portion 3 which is a component mounting target portion on the substrate 2, the control device 24 controls the operation of the reversing head moving mechanism 21 to raise the reversing head 20 and suck it to the nozzle 20a.
- the component 4 thus brought into contact with the component mounting portion 23a of the mounting head 23 from below (or the component mounting portion 23a of the mounting head 23 is lowered, and the component 4 having the component mounting portion 23a adsorbed by the nozzle 20a is viewed from above. Then, the component 4 is transferred from the reversing head 20 to the mounting head 23.
- the control device 24 When the control device 24 delivers the component 4 from the reversing head 20 to the mounting head 23, the control device 24 controls the reversing head moving mechanism 21 to move the reversing head 20 forward, so that the substrate 2 and the mounting head 23 are moved.
- the nozzle holder 34 is moved away from the area. Then, when the control device 24 moves the nozzle holder 34 out of the region between the substrate 2 and the mounting head 23, the component mounting portion 23a of the mounting head 23 is moved down and the component 4 that has been attracted to the component mounting portion 23a. Is pressed onto the electrode part 3 which is a part mounting target part on the substrate 2 from above.
- the reversing head 20 sucks the component 4 supplied to the component supply position from above by the nozzle 20a and reverses it upside down. It has a function of moving the component mounting target part (electrode part 3) on the board 2 positioned by the board positioning part 14 upward.
- the mounting head 23 receives the component 4 moved above the part mounting target part from the reversing head 20, and after the reversing head 20 has retreated from above the part mounting target part, the component 4 is lowered to lower the part mounting target part. It has a function to be mounted on.
- the control device 24 mounts the component 4 on the electrode portion 3 that is a component mounting target portion on the substrate 2 as described above, the control device 24 moves the component mounting portion 23a of the mounting head 23 and moves a new component.
- substrate 2 is moved so that the electrode part 3 which is an object part is located in the mounting point (below the mounting head 23) of the components 4.
- FIG. After the next component 4 is sucked (pickup) by the reversing head 20, the component 4 is mounted on the electrode part 3 which is a new component mounting target site.
- the control device 24 performs the operation control of the board positioning part 14 to rotate the board 2 by 90 degrees, and then the one short side.
- the component 4 is mounted in the same procedure for the side electrode unit 3.
- the operation of the substrate positioning unit 14 is controlled, and the substrate 2 on which the mounting of the component 4 is completed is delivered to the substrate unloading unit 13, and then the substrate The operation of the carry-out unit 13 is controlled, and the substrate 2 is carried out to another apparatus adjacent to the downstream process side.
- the reversing head 20 of the component mounting apparatus 1 locks the nozzle 20a on the side surface of the nozzle base 51, and the nozzle 20a and the vacuum path in the nozzle base 51 (nozzle base vacuum path). 72) is connected to the nozzle base 51 by a pair of fixing members 54 attached to both ends of the nozzle base 51 from outside the both ends of the nozzle base 51.
- a screw is not required for attaching the nozzle locking member 53 to the nozzle base 51, it is not necessary to consider the dimensions required for screwing in the screw.
- the dimension in the height direction of the nozzle base 51 can be reduced accordingly, so that when the vertically inverted component 4 is moved above the component mounting target portion (electrode part 3) on the substrate 2, it is reversed.
- the distance L between the board 2 and the mounting head 23 necessary to prevent the head 20 from interfering with both the board 2 and the mounting head 23 can be set small, whereby the mounting head 23 places the component 4 on the board. 2 can shorten the descending stroke of the component 4 to improve the mounting accuracy of the component 4.
- a reversing head capable of shortening the descending stroke of the component when the mounting head mounts the component on a substrate to realize a compact component mounting apparatus and improve the component mounting accuracy is provided.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
2 基板
3 電極部(部品装着対象部位)
4 部品
20 反転ヘッド
20a ノズル
23 装着ヘッド
34 ノズルホルダ
51 ノズルベース
53 ノズル係止部材
54 固定部材
72 ノズルベース内真空路(真空路)
86 回転駆動部
CX 水平軸
Claims (1)
- 装着ヘッドによって基板に部品を装着する部品実装装置に備えられ、部品供給位置に供給された前記部品をノズルにより上方から吸着して上下反転させ、その上下反転させた前記部品を前記基板上の部品装着対象部位の上方に移動させて前記装着ヘッドに受け渡す反転ヘッドであって、
両端が支持されて水平方向に延び、水平軸回りの回転が自在であるとともに側面に前記ノズルを保持したノズルホルダと、
前記ノズルホルダを水平軸回りに回転させて前記ノズルの向きを上下に切り替える回転駆動部とを備え、
前記ノズルホルダは、
両端が支持されて水平方向に延び、内部に真空路が形成されたノズルベースと、
前記ノズルを前記ノズルベースの前記側面に係止して前記ノズルと前記ノズルベース内の前記真空路とを連通させるノズル係止部材と、
前記ノズルベースの両端部の外方から前記ノズルベースの両端部にスライド装着されて前記ノズル係止部材を前記ノズルベースに固定する一対の固定部材とを備えたことを特徴とする反転ヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020137016782A KR20140086922A (ko) | 2011-11-08 | 2012-09-11 | 반전 헤드 |
CN201280004461.5A CN103299726B (zh) | 2011-11-08 | 2012-09-11 | 翻转头 |
US13/995,252 US9357653B2 (en) | 2011-11-08 | 2012-09-11 | Inverting head |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2011-244232 | 2011-11-08 | ||
JP2011244232A JP5691001B2 (ja) | 2011-11-08 | 2011-11-08 | 反転ヘッド |
Publications (1)
Publication Number | Publication Date |
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WO2013069184A1 true WO2013069184A1 (ja) | 2013-05-16 |
Family
ID=48288975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2012/005771 WO2013069184A1 (ja) | 2011-11-08 | 2012-09-11 | 反転ヘッド |
Country Status (5)
Country | Link |
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US (1) | US9357653B2 (ja) |
JP (1) | JP5691001B2 (ja) |
KR (1) | KR20140086922A (ja) |
CN (1) | CN103299726B (ja) |
WO (1) | WO2013069184A1 (ja) |
Families Citing this family (3)
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JP6283818B2 (ja) * | 2014-04-14 | 2018-02-28 | パナソニックIpマネジメント株式会社 | 電子部品搭載装置 |
JP6364612B2 (ja) * | 2014-04-14 | 2018-08-01 | パナソニックIpマネジメント株式会社 | 電子部品搭載装置 |
WO2018154760A1 (ja) * | 2017-02-27 | 2018-08-30 | ヤマハ発動機株式会社 | 部品実装装置 |
Citations (3)
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JP2002329752A (ja) * | 2002-04-30 | 2002-11-15 | Matsushita Electric Ind Co Ltd | 電子部品のボンディング装置 |
WO2004051731A1 (ja) * | 2002-12-02 | 2004-06-17 | Matsushita Electric Industrial Co., Ltd. | 部品供給ヘッド装置、部品供給装置、部品実装装置、及び実装ヘッド部の移動方法 |
JP2005347321A (ja) * | 2004-05-31 | 2005-12-15 | Yamaha Motor Co Ltd | 部品供給装置およびそれを備えた実装機 |
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US4458412A (en) * | 1981-05-06 | 1984-07-10 | Universal Instruments Corporation | Leadless chip placement machine for printed circuit boards |
JP2773307B2 (ja) * | 1989-10-17 | 1998-07-09 | 松下電器産業株式会社 | 電子部品の実装方法 |
JP3469652B2 (ja) * | 1994-09-26 | 2003-11-25 | 富士機械製造株式会社 | 電子部品装着装置 |
JP3132353B2 (ja) * | 1995-08-24 | 2001-02-05 | 松下電器産業株式会社 | チップの搭載装置および搭載方法 |
TW331550B (en) | 1996-08-14 | 1998-05-11 | Tokyo Electron Co Ltd | The cassette receiving room |
JP2000068327A (ja) | 1998-08-20 | 2000-03-03 | Matsushita Electric Ind Co Ltd | 部品の実装方法と装置 |
JP4480840B2 (ja) * | 2000-03-23 | 2010-06-16 | パナソニック株式会社 | 部品実装装置、及び部品実装方法 |
US20020192059A1 (en) * | 2001-06-15 | 2002-12-19 | Foster James E. | Methods and apparatus for transferring electrical components |
JP4334892B2 (ja) * | 2003-03-20 | 2009-09-30 | パナソニック株式会社 | 部品実装方法 |
JP4093156B2 (ja) * | 2003-09-11 | 2008-06-04 | セイコーエプソン株式会社 | 半導体装置製造用治具、半導体装置製造方法および半導体装置 |
JP4595740B2 (ja) * | 2005-08-16 | 2010-12-08 | パナソニック株式会社 | チップ反転装置およびチップ反転方法ならびにチップ搭載装置 |
JP5083221B2 (ja) | 2009-01-05 | 2012-11-28 | パナソニック株式会社 | パレット自動交換装置 |
KR20110107809A (ko) * | 2009-01-08 | 2011-10-04 | 파나소닉 주식회사 | 부품 실장장치 및 그 방법 |
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- 2011-11-08 JP JP2011244232A patent/JP5691001B2/ja active Active
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2012
- 2012-09-11 WO PCT/JP2012/005771 patent/WO2013069184A1/ja active Application Filing
- 2012-09-11 CN CN201280004461.5A patent/CN103299726B/zh active Active
- 2012-09-11 US US13/995,252 patent/US9357653B2/en active Active
- 2012-09-11 KR KR1020137016782A patent/KR20140086922A/ko not_active Application Discontinuation
Patent Citations (3)
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JP2002329752A (ja) * | 2002-04-30 | 2002-11-15 | Matsushita Electric Ind Co Ltd | 電子部品のボンディング装置 |
WO2004051731A1 (ja) * | 2002-12-02 | 2004-06-17 | Matsushita Electric Industrial Co., Ltd. | 部品供給ヘッド装置、部品供給装置、部品実装装置、及び実装ヘッド部の移動方法 |
JP2005347321A (ja) * | 2004-05-31 | 2005-12-15 | Yamaha Motor Co Ltd | 部品供給装置およびそれを備えた実装機 |
Also Published As
Publication number | Publication date |
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CN103299726A (zh) | 2013-09-11 |
JP5691001B2 (ja) | 2015-04-01 |
KR20140086922A (ko) | 2014-07-08 |
JP2013102017A (ja) | 2013-05-23 |
US20130269179A1 (en) | 2013-10-17 |
CN103299726B (zh) | 2016-06-08 |
US9357653B2 (en) | 2016-05-31 |
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