WO2013058587A1 - Appareil de déshydratation sous vide - Google Patents

Appareil de déshydratation sous vide Download PDF

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Publication number
WO2013058587A1
WO2013058587A1 PCT/KR2012/008574 KR2012008574W WO2013058587A1 WO 2013058587 A1 WO2013058587 A1 WO 2013058587A1 KR 2012008574 W KR2012008574 W KR 2012008574W WO 2013058587 A1 WO2013058587 A1 WO 2013058587A1
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WO
WIPO (PCT)
Prior art keywords
bracket
housing
sealing member
upper housing
vacuum drying
Prior art date
Application number
PCT/KR2012/008574
Other languages
English (en)
Korean (ko)
Inventor
전영준
이민철
Original Assignee
주식회사 테라세미콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110106975A external-priority patent/KR101306779B1/ko
Priority claimed from KR1020110111117A external-priority patent/KR101297689B1/ko
Application filed by 주식회사 테라세미콘 filed Critical 주식회사 테라세미콘
Publication of WO2013058587A1 publication Critical patent/WO2013058587A1/fr

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking

Definitions

  • the present invention relates to a vacuum drying apparatus for drying a solvent contained in a coating liquid applied to a substrate.
  • a coating liquid such as a photoresist
  • a substrate for a flat panel display device used in an LCD (Liquid Crystal Display), an organic light emitting diode (OLED), a field emission display (FED), or the like.
  • LCD Liquid Crystal Display
  • OLED organic light emitting diode
  • FED field emission display
  • the vacuum drying apparatus includes a housing, and a chamber is formed inside the housing, which is a closed space in which a substrate is loaded and dried.
  • the housing has a fixed upper housing and an upper housing which is installed to be liftable and in contact with or separated from the lower housing.
  • the lower housing when the upper housing is lowered by a driving means such as a cylinder or a motor, and the lower surface of the upper housing contacts the sealing member provided on the upper surface of the lower housing, the lower housing
  • the chamber is formed between the upper housing and the upper housing and the upper housing and the lower housing are separated when the upper housing is raised.
  • the driving means is stopped, whereby the upper housing is in contact with the sealing member by its own weight. Thereafter, the chamber is depressurized by decompression means such as a vacuum pump.
  • the upper housing can no longer be lowered when the upper housing contacts the sealing member. That is, if the upper housing decompresses the chamber by the decompression means in a state in which the upper housing is in contact with the sealing member by its own weight, the upper housing cannot be lowered even though it tries to lower further. As a result, the upper housing or the connecting parts connecting the upper housing and the driving means are damaged.
  • the sealing member can be easily separated from the lower housing by deformation by heat or the like. For this reason, since the airtight leakage between the upper housing and the lower housing is leaked, there is a disadvantage that the reliability of the vacuum drying process is lowered.
  • the present invention has been made to solve the problems of the prior art as described above, the object of the present invention is that the upper housing to form a chamber between the lower housing and the removably installed and fixed, the pressure when the chamber is depressurized, It is to provide a vacuum drying apparatus that allows the play to be lowered by the car to prevent the parts from being damaged.
  • Another object of the present invention is to provide a vacuum drying apparatus which can be installed in the lower housing to prevent the sealing member sealing between the upper and lower housings from being separated from the lower housing to improve the reliability of the vacuum drying process.
  • Vacuum drying apparatus for achieving the above object, the main body; A lower housing fixed to the main body and provided with a sealing member at an upper surface thereof; The lower housing is provided to be elevated in the main body above the lower housing, and when lowered, the lower surface is in contact with the sealing member to form a chamber which is a space for drying the dry body between the lower housing, An upper housing separated from the lower housing; Driving means installed on the main body to move the upper housing up and down; A decompression means installed on one side of the main body and depressurizing the chamber when the driving means stops and the upper housing contacts the sealing member by its own weight; When the chamber is depressurized by the decompression means, the upper housing includes means for allowing clearance to allow the lowering.
  • the vacuum drying apparatus when the chamber is closed by a fixed lower housing and an upper housing installed to be elevated, the upper housing is further lowered by the pressure difference, so that the upper housing and the upper housing are lowered. There is an effect that the parts for elevating the housing are prevented from being damaged.
  • the lower portion of the sealing member inserted into the insertion groove of the lower housing is formed larger than the upper portion of the sealing member exposed to the outside of the lower housing, and the connection portion connecting the lower portion and the upper portion of the sealing member to the insertion groove side.
  • FIG. 1 is a perspective view of a vacuum drying apparatus according to a first embodiment of the present invention.
  • FIG. 2 is a perspective view of the housing portion shown in FIG. 1.
  • FIG. 2 is a perspective view of the housing portion shown in FIG. 1.
  • FIG. 3 is an exploded perspective view of the housing shown in FIG. 2.
  • FIG. 4 is an enlarged perspective view of portion “A” of FIG. 2.
  • 5 to 9 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.
  • FIG. 10 is a cross sectional view of FIG. 2.
  • FIG. 11 is an enlarged view of a portion “B” of FIG. 10.
  • FIG. 12 is an enlarged view of the sealing member shown in FIG. 11.
  • FIG. 13 is a schematic cross-sectional view of relevant parts of a housing portion according to a second embodiment of the present invention.
  • FIG. 1 is a perspective view of a vacuum drying apparatus according to a first embodiment of the present invention
  • FIG. 2 is a perspective view of a housing part shown in FIG. 1
  • FIG. 3 is an exploded perspective view of the housing shown in FIG. 2.
  • the vacuum drying apparatus includes a main body 110 forming an appearance, and the housing 120 is installed inside the main body 110.
  • a chamber 120a which is an enclosed space in which a to-be-dried object 50, such as a flat panel display substrate, is loaded and dried, is formed.
  • the to-be-dried body 50 is coated with a coating liquid such as a photoresist, and the coating liquid contains a solvent such as a solvent or the like.
  • a coating liquid such as a photoresist
  • the coating liquid contains a solvent such as a solvent or the like.
  • the housing 120 has a lower housing 121 fixed to the main body 110 and an upper housing 125 installed to be elevated on the main body 110 above the lower housing 121.
  • the upper housing 125 is lowered, the lower surface of the upper housing 125 contacts the sealing member 180 installed on the upper surface of the lower housing 121 to seal the chamber 120a. Is formed.
  • the sealing member 180 will be described later.
  • the upper housing 125 is raised, the upper housing 125 and the lower housing 121 is separated, thereby opening the chamber 120a.
  • the to-be-dried body 50 is loaded into the chamber 120a or unloaded from the chamber 120a.
  • the upper housing 125 is elevated by driving means 130 such as a motor or a cylinder installed in the main body 110.
  • the connecting bracket 133 is coupled to the driving means 130 fixed to the main body 110, and the first bracket 141 is coupled to the connecting bracket 133.
  • the second bracket 142 coupled to the upper housing 125 is connected to the first bracket 141.
  • connection bracket 133 is supported and supported by the support rail 135 fixed to the main body 110, and is stably lifted.
  • the first bracket 141 and the second bracket 142 will be described later.
  • One side of the main body 110 is provided with a pressure reducing means (not shown) such as a vacuum pump for decompressing the chamber 120a in a vacuum state when the upper housing 125 is lowered to form a closed chamber 120a.
  • a pressure reducing means such as a vacuum pump for decompressing the chamber 120a in a vacuum state when the upper housing 125 is lowered to form a closed chamber 120a.
  • the decompression means communicates with a plurality of portions of the lower surface of the lower housing 121 and a plurality of portions of the upper surface of the upper housing 125 to uniformly dry the to-be-dried body 50 to depressurize the chamber 120a.
  • the to-be-dried body 50 loaded in the chamber 120a comes into contact with the lower surface of the lower housing 121, the to-be-dried body 50 is supported by the arm (not shown) of the robot to move the to-be-dried body 50 to the chamber 120a. ), Or when the to-be-dried body 50 is unloaded from the chamber 120a, there is no gap between the to-be-dried body 50 and the lower surface of the lower housing 121. In addition, when the to-be-dried body 50 is in contact with the inner bottom surface of the lower housing 121 when the to-be-dried body 50 is loaded into the chamber 120a, pumping by the decompression means may be disturbed.
  • the lower housing 121 is provided with a plurality of support pins 151 for raising and lowering the support body 50 spaced apart from the inner lower surface of the lower housing 121.
  • the support pin 151 is provided at the lower end of the elevating plate 155, which is installed at the lower side of the lower housing 121 so as to elevate, and elevate as the elevating plate 155 is elevated. That is, the upper end side of the support pin 151 supports the to-be-dried body 50 loaded in the chamber 120a while entering and exiting the chamber 120a in a form penetrating the lower housing 121.
  • the support pin 151 Since the support pin 151 is installed to be elevated, the support pin 151 may protrude upward from the lower surface of the lower housing 121 as necessary. Then, the space of the chamber 120a can be reduced as compared with the structure in which the support pin 151 always protrudes upward from the lower surface of the lower housing 121.
  • the driving means 130 stops. Then, the upper housing 125 contacts the sealing member 180 by its own weight, and in this state, the chamber 120a is decompressed by the decompression means.
  • the upper housing 125 Since the lower housing 121 is fixed and the upper housing 125 is provided to be liftable, the upper housing 125 tries to lower further when the chamber 120a is depressurized. However, if the upper housing 125 is not lowered, the upper housing 125, the driving means 130, and components connecting the upper housing 125 and the driving means 130 may be damaged.
  • the upper housing 125 is further lowered when the chamber 120a is depressurized by the decompression means while the upper housing 125 is in contact with the sealing member 180 by its own weight. Means are provided to allow for free play.
  • FIG. 2 is an enlarged perspective view of portion “A” of FIG. 2
  • FIG. 5 is a schematic cross-sectional view illustrating main parts for explaining an operation of the upper housing illustrated in FIG. 2.
  • the means is provided with a first bracket 141, a second bracket 142, a connection member 144, a first support member 146 and a second support member 147.
  • the first bracket 141 is coupled to the connection bracket 133 coupled to the driving means 130, and is elevated by the driving means 130 to form a first through hole 141a.
  • the second bracket 142 is coupled to the upper housing 125 and positioned above the first bracket 141, and has a second through hole 142a facing the first through hole 141a and is formed.
  • the upper housing 125 is elevated by elevating by the bracket 141.
  • connection member 144 is formed in a bar shape to connect the first bracket 141 and the second bracket 142.
  • the lower portion 144a of the connecting member 144 is positioned inside the first bracket 141 and is supported by the first bracket 141
  • the upper portion 144b is formed of the second bracket 142. It is located inside and is supported by the second bracket 142, the intermediate portion 144c passes through the first and second through holes 141a and 142a to connect the first bracket 141 and the second bracket 142. do.
  • the length L of the intermediate portion 144c of the connecting member 144 is formed longer than the sum of the thickness t1 of the first bracket 141 and the thickness t2 of the second bracket 142, It is installed to be movable in the same direction as the lifting direction of the upper housing (125).
  • the connecting member 144 is supported by the first bracket 141 and the second bracket 142, [the length L of the intermediate portion 144c of the connecting member 144- ⁇ the first bracket A thickness t1 of 141 + a thickness t2 of the second bracket 142 ⁇ ].
  • the first and second support members 146 and 147 are respectively coupled to the lower outer peripheral surface and the upper outer peripheral surface of the connecting member 144 and are hooked to the first bracket 141 and the second bracket 142 respectively. 144 prevents the first bracket 141 and the second bracket 142 from being separated.
  • Interlocking teeth are formed on the outer peripheral surface of the lower portion of the connecting member 144 and the inner peripheral surface of the first supporting member 146, respectively, and the outer peripheral surface of the upper portion of the connecting member 144 and the second supporting member.
  • Interdigital teeth are formed on the inner circumferential surface of 147, respectively.
  • First and second elastic members 148 and 149 are respectively provided on the lower outer peripheral surface and the upper outer peripheral surface of the connecting member 144.
  • the upper surface of the first elastic member 148 contacts the first bracket 141
  • the lower surface contacts the first support member 146
  • the lower surface of the second elastic member 149 contacts the second bracket 142.
  • the upper surface is in contact with the second support member 147.
  • the first and second elastic members 148 and 149 absorb shocks and the like applied to the first and second brackets 141 and 142 when the upper housing 125 is elevated by the driving means 130. .
  • the first elastic member 148 prevents the first bracket 141 and the first support member 146 from directly contacting the metal
  • the second elastic member 149 is formed from the second bracket (made of metal). 142 and the second support member 147 is prevented from directly contacting.
  • FIGS. 5 to 9 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.
  • the upper housing 125 is positioned above the lower housing 121 fixed to the main body 110 (see FIG. 1), so that the lower housing 121 and the upper housing 125 are separated from each other.
  • Assumed state is assumed to be the first state. In the first state, the first bracket 141 and the second bracket 142 interconnected by the connecting member 144 are in contact with each other.
  • the driving means 130 (see FIG. 2) is driven so that the lower surface of the upper housing 125 is the upper surface of the lower housing 121 as shown in FIG. 6.
  • the connection bracket 133 is lowered until it comes into contact with the sealing member 180 installed in the rear surface.
  • the driving means 130 is stopped.
  • the upper housing 125 contacts the sealing member 180 by its own weight, and the connecting bracket 133 is lowered further by its own weight.
  • the reason why the connecting bracket 133 may be lowered further is that the first bracket 141 and the second bracket 142 are not coupled to each other, and the first bracket 141 and the second bracket 142 are not coupled to each other. This is because they are connected to each other by the connecting member 144 and may flow a predetermined distance from each other at the intermediate portion 144c of the connecting member 144.
  • first bracket 141 since the first bracket 141 is also lowered together with the connection bracket 133, the first bracket 141 and the second bracket 142 may have clearances that are allowed by the intermediate portion 144c of the connection member 144.
  • ⁇ ) has a space (D).
  • the chamber 120a is boosted, and the connecting bracket 133 is raised by the driving means 130, as shown in FIG. 9.
  • the first bracket 141 is in contact with the second bracket 142.
  • the connecting bracket 133 is further raised, it is returned to the initial state shown in FIG.
  • the upper housing 125 when the chamber 120a is decompressed in a state in which the chamber 120a closed by the upper housing 125 and the lower housing 121 is formed, the upper housing 125 may be caused by a pressure difference. Since this can be lowered further, damage to the upper housing 125 and the components for elevating the upper housing 125 is prevented. In addition, when the upper housing 125 is further lowered by the pressure difference, the upper housing 125 is further in close contact with the sealing member 180, so that the chamber 120a is more firmly sealed.
  • the heater 160 is installed to dry the solvent using heat as well as a pressure difference.
  • FIG. 10 is a cross-sectional view of the combination of FIG.
  • the heater 160 is formed in a plate shape is installed on the inner lower surface of the lower housing 121 and the inner upper surface of the upper housing 125, respectively, and heat the dry object (50).
  • the heater 160 is divided into a plurality of portions 160a, 160b, 160c,..., And is independently controlled for each of the divided portions 160a, 160b, 160c,... do.
  • the solvent Since the solvent is dried and discharged by heat as well as the temperature difference, the solvent may be condensed after evaporated by heat. Then, the condensed solvent may fall into the to-be-dried body 50 to damage the to-be-dried body 50.
  • the vacuum drying apparatus is configured to fall outside the outer surface of the to-be-dried body 50 after the vaporized solvent is condensed on the side of the housing 120.
  • Figs. 11 is an enlarged view of a portion “B” of FIG. 10.
  • the internal central temperature of the housing 120 is the internal side temperature It may be higher, that is, the inner side temperature of the lower housing 121 and the upper housing 125 may be lower than the internal central temperature.
  • the vaporized solvent moves to the side surface of the housing 120 having a low temperature, and is condensed when the side temperature of the housing 120 is less than or equal to a predetermined temperature.
  • the solvent condensed on the side of the housing 120 flows into the inner lower edge of the lower housing 121 and then discharges to the outside.
  • the heater 160 installed in the lower housing 121 may have a lower housing. It is preferable to be spaced apart from the inner lower surface of 121.
  • a fence 170 is formed on the inner side of the upper housing 125 in which the solvent condensed after vaporizing is formed.
  • the condensed solvent formed on the fence 170 is dropped between the inner side of the lower housing 121 and the outer surface of the heater 160 to flow into the inner lower edge of the lower housing 121 and then discharged to the outside.
  • interval 121a is formed and the space
  • a storage groove 122 recessed downward to form a ring shape is formed at an inner bottom surface of the lower housing 121 facing the gap 121a. Then, since the condensed solvent introduced into the inner lower surface of the lower housing 121 flows into the storage groove 122 and is stored, movement along the inner lower surface of the lower housing 121 is prevented.
  • the storage groove 122 communicates with the decompression means for depressurizing the inside of the housing 120, and the condensed solvent stored in the storage groove 122 is discharged to the outside of the lower housing 121 by the decompression means.
  • damage to the dry matter 50 is prevented by the solvent condensed after evaporation.
  • the sealing member 180 is installed on the upper surface of the lower housing 121 to seal between the lower surface of the upper housing 125 and the upper surface of the lower housing 121.
  • Vacuum drying apparatus according to the present embodiment is installed firmly so that the sealing member 180 is not separated from the upper surface of the lower housing 121, this will be described with reference to Figs. 12 is an enlarged view of the sealing member illustrated in FIG. 11.
  • the upper surface of the lower housing 121 is recessed downward to form an insertion groove 123 forming a ring shape, the insertion groove 123 on the upper end of one inner surface and the upper end of the other inner surface of the insertion groove 123.
  • the locking projections 123a protruding toward the center side of each are formed.
  • the locking protrusion 123a may be continuously formed along the inner surface of the insertion groove 123 to form a ring shape.
  • the sealing member 180 forms a ring shape and the lower portion 181 is inserted into the insertion groove 123, and the upper portion 183 protrudes above the upper surface of the lower housing 121 to lower the upper housing 125. Contact with cotton At this time, the cross-sectional shape of the insertion groove 123 and the cross-sectional shape of the lower portion 181 of the sealing member 180 are formed to correspond substantially.
  • the lower portion 181 and the upper portion 183 of the sealing member 180 are formed in different sizes.
  • the widthwise thickness of the lower portion 181 of the sealing member 180 is the upper portion 183. It is formed larger than the thickness in the width direction. Then, the connecting portion 185 connecting the lower portion 181 and the upper portion 183 of the sealing member 180 is caught by the locking protrusion 123a. Therefore, the sealing member 180 is firmly inserted into the insertion groove 123 is not separated from the lower housing 121.
  • the lower portion 181 of the sealing member 180 has a cross-sectional shape having a substantially rectangular shape, and the upper portion 183 ) Forms an elliptical shape in which a cross-sectional shape is convex upward.
  • the connection portion 185 is formed of a concave portion 185a concave inwardly of the sealing member 180, and the corner portion of the lower portion 181 is formed to be rounded.
  • the radius of curvature of the upper portion 183 on the basis of the predetermined point inside the sealing member 180 R1 the radius of curvature of the connecting portion 185 on the basis of the outer predetermined point of the sealing member 180, R2, the sealing member
  • R1: R2: R3 1: 1: 0.2 to 0.3
  • the angle (theta) which an imaginary line which extends the both side surfaces of the lower side part 181 make is 45 degrees-50 degrees.
  • the sealing member 180 is preferably formed of EPDM rubber (Ethylene Propylene Diene Monomer Rubber) is coated with Teflon.
  • EPDM rubber Ethylene Propylene Diene Monomer Rubber
  • FIG. 13 is a schematic cross-sectional view showing main parts of a housing part according to a second embodiment of the present invention, and only the differences from FIG. 5 will be described.
  • the means for allowing clearance between the upper housing 225 can be lowered by the first bracket 241 and the second.
  • the bracket 242, the connection member 244, the first support member 246, the second support member 247, the first elastic member 248 and the second elastic member 249 are provided.
  • the first bracket 241 is coupled to the connection bracket 233 coupled to the driving means 130 (see FIG. 2), and is elevated by the driving means 130 to form a first through hole 241a.
  • the second bracket 242 is coupled to the upper housing 225 and is positioned below the first bracket 241, and a second through hole 242a is formed to face the first through hole 241a.
  • the upper housing 225 is raised and lowered by the bracket 241.
  • the upper portion 244a of the connecting member 244 connecting the first bracket 241 and the second bracket 242 is positioned inside the first bracket 241 and is supported by the first bracket 241.
  • the lower portion 244b is positioned inside the second bracket 242 to be supported by the second bracket 242, and the middle portion 244c penetrates the first and second through holes 241a and 242a.
  • the first and second support members 246 and 247 are respectively coupled to the upper outer peripheral surface and the lower outer peripheral surface of the connecting member 244, and are hooked to the first bracket 241 and the second bracket 242, respectively. 244 prevents the first bracket 241 and the second bracket 242 from being separated.
  • the first elastic member 248 is installed on the outer circumferential surface of the upper portion of the connecting member 244 and the bottom surface contacts the first bracket 241 and the top surface contacts the first support member 246.
  • the second elastic member 249 is installed on the outer circumferential surface of the lower portion of the connection member 244, and the upper surface of the second elastic member 249 contacts the second bracket 242, and the lower surface of the second elastic member 249 contacts the second supporting member 247.
  • the first bracket 141 is located under the second bracket 142
  • the vacuum drying apparatus according to the second embodiment of the present invention includes the first
  • the bracket 241 is located above the second bracket 242, and there is a difference in the positions of the first brackets 141 and 241 and the second brackets 142 and 242, and the other configurations are the same.
  • FIGS. 13 to 17 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.
  • the upper housing 225 is positioned above the fixed lower housing 221 so that the lower housing 221 and the upper housing 225 are separated from each other.
  • the first bracket 241 and the second bracket 242 interconnected by the connecting member 244 are spaced apart from each other.
  • first bracket 241 and the second bracket 242 may be spaced apart from each other is because the first bracket 241 and the second bracket 242 are connected by the connecting member 244 to be connected. This is because it is possible to flow a predetermined distance from each other in the middle portion 244c of the member 244.
  • the driving means 130 (see FIG. 2) is driven so that the lower surface of the upper housing 225 is the upper surface of the lower housing 221 as shown in FIG. 14.
  • the connection bracket 233 is lowered until it comes in contact with the sealing member 280 installed in the rear surface.
  • the driving means 130 is stopped.
  • the upper housing 225 contacts the sealing member 280 by the weight of the connecting bracket 233 and the upper housing 225, and the connecting member ( 244 is lowered to the second bracket 242 side.
  • the chamber 220a is boosted, and the connecting bracket 233 is raised by the driving means 130, as shown in FIG. 17.
  • the first bracket 241 and the second bracket 242 are separated from each other. Thereafter, when the connecting bracket 233 is further raised, it is returned to the initial state shown in FIG.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

L'invention concerne un appareil de déshydratation sous vide. L'appareil de déshydratation sous vide selon la présente invention est configuré en ce qu'une chambre scellée est formée par un logement inférieur fixe et un logement supérieur pouvant être élevé, et lorsque la pression dans la chambre est réduite, le logement supérieur est abaissé davantage que le logement inférieur grâce à une différence de pression. Ainsi, les dommages des composants pour l'élévation du logement supérieur et du logement inférieur peuvent être empêchés. Si le logement supérieur est davantage abaissé que le logement inférieur grâce à une différence de pression, alors le logement supérieur entre en outre fermement en contact avec un élément d'étanchéité, fermant ainsi plus hermétiquement la chambre. De plus, une partie inférieure de l'élément d'étanchéité insérée dans une rainure d'insertion du logement inférieur est plus large qu'une partie supérieure de l'élément d'étanchéité exposée vers l'extérieur du logement inférieur et une partie de liaison qui relie entre elles la partie inférieure et la partie supérieure de l'élément d'étanchéité se met en prise avec la rainure d'insertion pour permettre à l'élément d'étanchéité d'être couplé fermement au logement inférieur et d'empêcher ainsi l'élément d'étanchéité de s'échapper du logement inférieur, obtenant ainsi une fiabilité améliorée des processus de déshydratation sous vide.
PCT/KR2012/008574 2011-10-19 2012-10-19 Appareil de déshydratation sous vide WO2013058587A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020110106975A KR101306779B1 (ko) 2011-10-19 2011-10-19 진공 건조 장치
KR10-2011-0106975 2011-10-19
KR1020110111117A KR101297689B1 (ko) 2011-10-28 2011-10-28 진공 건조 장치
KR10-2011-0111117 2011-10-28

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WO2013058587A1 true WO2013058587A1 (fr) 2013-04-25

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Application Number Title Priority Date Filing Date
PCT/KR2012/008574 WO2013058587A1 (fr) 2011-10-19 2012-10-19 Appareil de déshydratation sous vide

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TW (1) TW201321697A (fr)
WO (1) WO2013058587A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200406614Y1 (ko) * 2005-11-04 2006-01-23 주식회사 케이에스엠 반도체 저압화학기상증착 설비의 플랜지
KR200409621Y1 (ko) * 2005-11-25 2006-02-24 평화오일씰공업주식회사 오링
KR20070058876A (ko) * 2005-12-05 2007-06-11 두산인프라코어 주식회사 오링 수용체

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200406614Y1 (ko) * 2005-11-04 2006-01-23 주식회사 케이에스엠 반도체 저압화학기상증착 설비의 플랜지
KR200409621Y1 (ko) * 2005-11-25 2006-02-24 평화오일씰공업주식회사 오링
KR20070058876A (ko) * 2005-12-05 2007-06-11 두산인프라코어 주식회사 오링 수용체

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