WO2013058587A1

WO2013058587A1 - Vacuum drying apparatus

Info

Publication number: WO2013058587A1
Application number: PCT/KR2012/008574
Authority: WO
Inventors: 전영준; 이민철
Original assignee: 주식회사 테라세미콘
Priority date: 2011-10-19
Filing date: 2012-10-19
Publication date: 2013-04-25
Also published as: TW201321697A

Abstract

Disclosed is a vacuum drying apparatus. The vacuum drying apparatus according to the present invention is configured in that a sealed chamber is formed by a fixed lower housing and an elevatable upper housing, and when the pressure in the chamber is reduced, the upper housing is lowered further than the lower housing by a pressure difference. Thus, damages to the components for elevating the upper housing and the lower housing may be prevented. If the upper housing is lowered further than the lower housing by a pressure difference, then the upper housing further tightly contacts a sealing member, thus more strongly sealing the chamber. In addition, a lower portion of the sealing member inserted into an insertion groove of the lower housing is larger than an upper portion of the sealing member exposed outwardly from the lower housing, and a connection portion which interconnects the lower portion and the upper portion of the sealing member engages with the insertion groove to enable the sealing member to be firmly coupled to the lower housing and thus to prevent the sealing member from escaping from the lower housing, thereby achieving improved reliability of vacuum drying processes.

Description

Vacuum drying equipment

The present invention relates to a vacuum drying apparatus for drying a solvent contained in a coating liquid applied to a substrate.

A coating liquid, such as a photoresist, is applied to a substrate for a flat panel display device used in an LCD (Liquid Crystal Display), an organic light emitting diode (OLED), a field emission display (FED), or the like. At this time, when the substrate is transferred in a state where the coating liquid applied to the substrate is not cured, a phenomenon occurs that the coating liquid is concentrated to one side.

In order to solve such a problem, when a solvent such as a solvent is mixed and applied to the coating liquid, and then the solvent is dried to temporarily harden the coating liquid, and then the substrate is transferred, the coating liquid is prevented from being oriented to one side.

By the way, in order to temporarily harden a coating liquid, a solvent should be dried. For this reason, a vacuum drying apparatus for forcibly drying the solvent contained in the coating liquid by using a pressure difference has been developed and used.

In general, the vacuum drying apparatus includes a housing, and a chamber is formed inside the housing, which is a closed space in which a substrate is loaded and dried. The housing has a fixed upper housing and an upper housing which is installed to be liftable and in contact with or separated from the lower housing.

Thus, when the upper housing is lowered by a driving means such as a cylinder or a motor, and the lower surface of the upper housing contacts the sealing member provided on the upper surface of the lower housing, the lower housing The chamber is formed between the upper housing and the upper housing and the upper housing and the lower housing are separated when the upper housing is raised.

Then, when the upper housing is in contact with the lower housing, the driving means is stopped, whereby the upper housing is in contact with the sealing member by its own weight. Thereafter, the chamber is depressurized by decompression means such as a vacuum pump.

In the conventional vacuum drying apparatus as described above, the upper housing can no longer be lowered when the upper housing contacts the sealing member. That is, if the upper housing decompresses the chamber by the decompression means in a state in which the upper housing is in contact with the sealing member by its own weight, the upper housing cannot be lowered even though it tries to lower further. As a result, the upper housing or the connecting parts connecting the upper housing and the driving means are damaged.

And, the sealing member can be easily separated from the lower housing by deformation by heat or the like. For this reason, since the airtight leakage between the upper housing and the lower housing is leaked, there is a disadvantage that the reliability of the vacuum drying process is lowered.

Prior art related to vacuum drying apparatus is disclosed in Korea Patent Publication No. 10-2011-0077338.

The present invention has been made to solve the problems of the prior art as described above, the object of the present invention is that the upper housing to form a chamber between the lower housing and the removably installed and fixed, the pressure when the chamber is depressurized, It is to provide a vacuum drying apparatus that allows the play to be lowered by the car to prevent the parts from being damaged.

Another object of the present invention is to provide a vacuum drying apparatus which can be installed in the lower housing to prevent the sealing member sealing between the upper and lower housings from being separated from the lower housing to improve the reliability of the vacuum drying process.

Vacuum drying apparatus according to the present invention for achieving the above object, the main body; A lower housing fixed to the main body and provided with a sealing member at an upper surface thereof; The lower housing is provided to be elevated in the main body above the lower housing, and when lowered, the lower surface is in contact with the sealing member to form a chamber which is a space for drying the dry body between the lower housing, An upper housing separated from the lower housing; Driving means installed on the main body to move the upper housing up and down; A decompression means installed on one side of the main body and depressurizing the chamber when the driving means stops and the upper housing contacts the sealing member by its own weight; When the chamber is depressurized by the decompression means, the upper housing includes means for allowing clearance to allow the lowering.

In the vacuum drying apparatus according to the present invention, when the chamber is closed by a fixed lower housing and an upper housing installed to be elevated, the upper housing is further lowered by the pressure difference, so that the upper housing and the upper housing are lowered. There is an effect that the parts for elevating the housing are prevented from being damaged.

And, if the upper housing is further lowered by the pressure difference, the upper housing is in close contact with the sealing member, there is an effect that the chamber is more tightly sealed.

The lower portion of the sealing member inserted into the insertion groove of the lower housing is formed larger than the upper portion of the sealing member exposed to the outside of the lower housing, and the connection portion connecting the lower portion and the upper portion of the sealing member to the insertion groove side. Takes Therefore, since the sealing member is firmly coupled to the lower housing, the sealing member is prevented from being separated from the lower housing, thereby improving the reliability of the vacuum drying process.

1 is a perspective view of a vacuum drying apparatus according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the housing portion shown in FIG. 1. FIG.

3 is an exploded perspective view of the housing shown in FIG. 2.

4 is an enlarged perspective view of portion “A” of FIG. 2.

5 to 9 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.

10 is a cross sectional view of FIG. 2.

11 is an enlarged view of a portion “B” of FIG. 10.

12 is an enlarged view of the sealing member shown in FIG. 11.

13 is a schematic cross-sectional view of relevant parts of a housing portion according to a second embodiment of the present invention;

14 to 17 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.

DETAILED DESCRIPTION OF THE INVENTION The following detailed description of the invention refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It is to be understood that the various embodiments of the invention, although different from one another, need not be mutually exclusive. For example, certain shapes, structures, and features described herein may be embodied in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. In addition, it is to be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled. The length, area, thickness, and shape of the embodiments shown in the drawings may be exaggerated for convenience.

Hereinafter, a vacuum drying apparatus according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First embodiment

1 is a perspective view of a vacuum drying apparatus according to a first embodiment of the present invention, FIG. 2 is a perspective view of a housing part shown in FIG. 1, and FIG. 3 is an exploded perspective view of the housing shown in FIG. 2.

As shown, the vacuum drying apparatus according to the present embodiment includes a main body 110 forming an appearance, and the housing 120 is installed inside the main body 110. In the housing 120, a chamber 120a, which is an enclosed space in which a to-be-dried object 50, such as a flat panel display substrate, is loaded and dried, is formed.

The to-be-dried body 50 is coated with a coating liquid such as a photoresist, and the coating liquid contains a solvent such as a solvent or the like. When the to-be-dried body 50 is loaded into the chamber 120a, the chamber 120a is decompressed to a vacuum state, whereby the solvent contained in the coating liquid applied to the to-be-dried body 50 is forcibly evaporated by the pressure difference. do.

The housing 120 has a lower housing 121 fixed to the main body 110 and an upper housing 125 installed to be elevated on the main body 110 above the lower housing 121. When the upper housing 125 is lowered, the lower surface of the upper housing 125 contacts the sealing member 180 installed on the upper surface of the lower housing 121 to seal the chamber 120a. Is formed.

The sealing member 180 will be described later.

Then, when the upper housing 125 is raised, the upper housing 125 and the lower housing 121 is separated, thereby opening the chamber 120a. When the chamber 120a is opened, the to-be-dried body 50 is loaded into the chamber 120a or unloaded from the chamber 120a.

The upper housing 125 is elevated by driving means 130 such as a motor or a cylinder installed in the main body 110.

In detail, the connecting bracket 133 is coupled to the driving means 130 fixed to the main body 110, and the first bracket 141 is coupled to the connecting bracket 133. The second bracket 142 coupled to the upper housing 125 is connected to the first bracket 141. Thus, when the connecting bracket 133 is lifted by the driving means 130, the first bracket 141 is lifted, thereby lifting the upper housing 125 while lifting the second bracket 142.

The connection bracket 133 is supported and supported by the support rail 135 fixed to the main body 110, and is stably lifted. The first bracket 141 and the second bracket 142 will be described later.

One side of the main body 110 is provided with a pressure reducing means (not shown) such as a vacuum pump for decompressing the chamber 120a in a vacuum state when the upper housing 125 is lowered to form a closed chamber 120a. . Preferably, the decompression means communicates with a plurality of portions of the lower surface of the lower housing 121 and a plurality of portions of the upper surface of the upper housing 125 to uniformly dry the to-be-dried body 50 to depressurize the chamber 120a. .

When the to-be-loaded body 50 loaded in the chamber 120a comes into contact with the lower surface of the lower housing 121, the to-be-dried body 50 is supported by the arm (not shown) of the robot to move the to-be-dried body 50 to the chamber 120a. ), Or when the to-be-dried body 50 is unloaded from the chamber 120a, there is no gap between the to-be-dried body 50 and the lower surface of the lower housing 121. In addition, when the to-be-dried body 50 is in contact with the inner bottom surface of the lower housing 121 when the to-be-dried body 50 is loaded into the chamber 120a, pumping by the decompression means may be disturbed.

For this reason, the lower housing 121 is provided with a plurality of support pins 151 for raising and lowering the support body 50 spaced apart from the inner lower surface of the lower housing 121.

The support pin 151 is provided at the lower end of the elevating plate 155, which is installed at the lower side of the lower housing 121 so as to elevate, and elevate as the elevating plate 155 is elevated. That is, the upper end side of the support pin 151 supports the to-be-dried body 50 loaded in the chamber 120a while entering and exiting the chamber 120a in a form penetrating the lower housing 121.

Since the support pin 151 is installed to be elevated, the support pin 151 may protrude upward from the lower surface of the lower housing 121 as necessary. Then, the space of the chamber 120a can be reduced as compared with the structure in which the support pin 151 always protrudes upward from the lower surface of the lower housing 121.

When the upper housing 125 descends by the driving means 130 and contacts the sealing member 180, the driving means 130 stops. Then, the upper housing 125 contacts the sealing member 180 by its own weight, and in this state, the chamber 120a is decompressed by the decompression means.

Since the lower housing 121 is fixed and the upper housing 125 is provided to be liftable, the upper housing 125 tries to lower further when the chamber 120a is depressurized. However, if the upper housing 125 is not lowered, the upper housing 125, the driving means 130, and components connecting the upper housing 125 and the driving means 130 may be damaged.

In the vacuum drying apparatus according to the present embodiment, the upper housing 125 is further lowered when the chamber 120a is depressurized by the decompression means while the upper housing 125 is in contact with the sealing member 180 by its own weight. Means are provided to allow for free play.

The above means will be described with reference to FIGS. 2, 4 and 5. 4 is an enlarged perspective view of portion “A” of FIG. 2, and FIG. 5 is a schematic cross-sectional view illustrating main parts for explaining an operation of the upper housing illustrated in FIG. 2.

As shown, the means is provided with a first bracket 141, a second bracket 142, a connection member 144, a first support member 146 and a second support member 147.

The first bracket 141 is coupled to the connection bracket 133 coupled to the driving means 130, and is elevated by the driving means 130 to form a first through hole 141a. The second bracket 142 is coupled to the upper housing 125 and positioned above the first bracket 141, and has a second through hole 142a facing the first through hole 141a and is formed. The upper housing 125 is elevated by elevating by the bracket 141.

The connection member 144 is formed in a bar shape to connect the first bracket 141 and the second bracket 142. In detail, the lower portion 144a of the connecting member 144 is positioned inside the first bracket 141 and is supported by the first bracket 141, and the upper portion 144b is formed of the second bracket 142. It is located inside and is supported by the second bracket 142, the intermediate portion 144c passes through the first and second through

holes

141a and 142a to connect the first bracket 141 and the second bracket 142. do.

At this time, the length L of the intermediate portion 144c of the connecting member 144 is formed longer than the sum of the thickness t1 of the first bracket 141 and the thickness t2 of the second bracket 142, It is installed to be movable in the same direction as the lifting direction of the upper housing (125). Thus, the connecting member 144 is supported by the first bracket 141 and the second bracket 142, [the length L of the intermediate portion 144c of the connecting member 144-{the first bracket A thickness t1 of 141 + a thickness t2 of the second bracket 142}].

The first and

second support members

146 and 147 are respectively coupled to the lower outer peripheral surface and the upper outer peripheral surface of the connecting member 144 and are hooked to the first bracket 141 and the second bracket 142 respectively. 144 prevents the first bracket 141 and the second bracket 142 from being separated.

Interlocking teeth (not shown) are formed on the outer peripheral surface of the lower portion of the connecting member 144 and the inner peripheral surface of the first supporting member 146, respectively, and the outer peripheral surface of the upper portion of the connecting member 144 and the second supporting member. Interdigital teeth (not shown) are formed on the inner circumferential surface of 147, respectively. Thus, when the first support member 146 or the second support member 147 rotates forward and backward, the length of the intermediate portion 144c of the connection member 144 is adjusted. That is, when the first support member 146 or the second support member 147 is rotated forward and backward, the length of the intermediate portion 144c of the connection member 144 is adjusted, and thus, the first bracket 141 and the second bracket 142. The flow distance of the connection member 144 supported by) is adjusted. If necessary, a plurality of first and

second support members

146 and 147 may be installed.

First and second

elastic members

148 and 149 are respectively provided on the lower outer peripheral surface and the upper outer peripheral surface of the connecting member 144. The upper surface of the first elastic member 148 contacts the first bracket 141, the lower surface contacts the first support member 146, and the lower surface of the second elastic member 149 contacts the second bracket 142. The upper surface is in contact with the second support member 147.

The first and second

elastic members

148 and 149 absorb shocks and the like applied to the first and

second brackets

141 and 142 when the upper housing 125 is elevated by the driving means 130. . In addition, the first elastic member 148 prevents the first bracket 141 and the first support member 146 from directly contacting the metal, and the second elastic member 149 is formed from the second bracket (made of metal). 142 and the second support member 147 is prevented from directly contacting.

The lifting motion of the upper housing 125 of the vacuum drying apparatus according to the present embodiment will be described with reference to FIGS. 5 to 9. 5 to 9 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.

As shown in FIG. 5, the upper housing 125 is positioned above the lower housing 121 fixed to the main body 110 (see FIG. 1), so that the lower housing 121 and the upper housing 125 are separated from each other. Assumed state is assumed to be the first state. In the first state, the first bracket 141 and the second bracket 142 interconnected by the connecting member 144 are in contact with each other.

In the initial state, the driving means 130 (see FIG. 2) is driven so that the lower surface of the upper housing 125 is the upper surface of the lower housing 121 as shown in FIG. 6. The connection bracket 133 is lowered until it comes into contact with the sealing member 180 installed in the rear surface.

Then, when the bottom surface of the upper housing 125 is in contact with the sealing member 180, the driving means 130 is stopped. When the driving means 130 is stopped, as shown in FIG. 7, the upper housing 125 contacts the sealing member 180 by its own weight, and the connecting bracket 133 is lowered further by its own weight. The reason why the connecting bracket 133 may be lowered further is that the first bracket 141 and the second bracket 142 are not coupled to each other, and the first bracket 141 and the second bracket 142 are not coupled to each other. This is because they are connected to each other by the connecting member 144 and may flow a predetermined distance from each other at the intermediate portion 144c of the connecting member 144.

Then, since the first bracket 141 is also lowered together with the connection bracket 133, the first bracket 141 and the second bracket 142 may have clearances that are allowed by the intermediate portion 144c of the connection member 144. 간격) has a space (D).

Subsequently, when the chamber 120a (see FIGS. 1 and 2) is decompressed by the decompression means, as shown in FIG. 8, the upper housing 125 is further lowered by the pressure difference to seal the sealing member 180. Squeeze.

When the drying of the to-be-dried body 50 (see FIG. 3) is completed, the chamber 120a is boosted, and the connecting bracket 133 is raised by the driving means 130, as shown in FIG. 9. The first bracket 141 is in contact with the second bracket 142. Thereafter, when the connecting bracket 133 is further raised, it is returned to the initial state shown in FIG.

In the vacuum drying apparatus according to the present embodiment, when the chamber 120a is decompressed in a state in which the chamber 120a closed by the upper housing 125 and the lower housing 121 is formed, the upper housing 125 may be caused by a pressure difference. Since this can be lowered further, damage to the upper housing 125 and the components for elevating the upper housing 125 is prevented. In addition, when the upper housing 125 is further lowered by the pressure difference, the upper housing 125 is further in close contact with the sealing member 180, so that the chamber 120a is more firmly sealed.

When the solvent is dried using only the pressure difference, the drying rate of the solvent mixed in the coating liquid is low. For this reason, in the vacuum drying apparatus according to the present embodiment, the heater 160 is installed to dry the solvent using heat as well as a pressure difference.

The heater 160 will be described with reference to FIGS. 3 and 10. 10 is a cross-sectional view of the combination of FIG.

As shown, the heater 160 is formed in a plate shape is installed on the inner lower surface of the lower housing 121 and the inner upper surface of the upper housing 125, respectively, and heat the dry object (50). The heater 160 is divided into a plurality of

portions

160a, 160b, 160c,..., And is independently controlled for each of the divided

portions

160a, 160b, 160c,... do.

Since the solvent is dried and discharged by heat as well as the temperature difference, the solvent may be condensed after evaporated by heat. Then, the condensed solvent may fall into the to-be-dried body 50 to damage the to-be-dried body 50.

In order to prevent this, the vacuum drying apparatus according to the present embodiment is configured to fall outside the outer surface of the to-be-dried body 50 after the vaporized solvent is condensed on the side of the housing 120.

The condensed solvent will be described below with reference to Figs. 11 is an enlarged view of a portion “B” of FIG. 10.

As shown, since the heater 160 can be controlled independently for each of the partitioned

portions

160a, 160b, 160c, ..., the internal central temperature of the housing 120 is the internal side temperature It may be higher, that is, the inner side temperature of the lower housing 121 and the upper housing 125 may be lower than the internal central temperature.

Then, the vaporized solvent moves to the side surface of the housing 120 having a low temperature, and is condensed when the side temperature of the housing 120 is less than or equal to a predetermined temperature. The solvent condensed on the side of the housing 120 flows into the inner lower edge of the lower housing 121 and then discharges to the outside. At this time, since the condensed solvent introduced into the inner lower surface of the lower housing 121 may flow between the heater 160 and the lower housing 121, the heater 160 installed in the lower housing 121 may have a lower housing. It is preferable to be spaced apart from the inner lower surface of 121.

In addition, a fence 170 is formed on the inner side of the upper housing 125 in which the solvent condensed after vaporizing is formed. The condensed solvent formed on the fence 170 is dropped between the inner side of the lower housing 121 and the outer surface of the heater 160 to flow into the inner lower edge of the lower housing 121 and then discharged to the outside.

In order to prevent the to-be-dried body 50 from being damaged by the condensed solvent falling from the bottom surface of the fence 170, between the inner side of the lower housing 121 and the outer surface of the heater 160. It is preferable that the space | interval 121a is formed and the space | interval 121a and the lower end surface of the fence 170 oppose.

In addition, a storage groove 122 recessed downward to form a ring shape is formed at an inner bottom surface of the lower housing 121 facing the gap 121a. Then, since the condensed solvent introduced into the inner lower surface of the lower housing 121 flows into the storage groove 122 and is stored, movement along the inner lower surface of the lower housing 121 is prevented.

The storage groove 122 communicates with the decompression means for depressurizing the inside of the housing 120, and the condensed solvent stored in the storage groove 122 is discharged to the outside of the lower housing 121 by the decompression means. Thus, damage to the dry matter 50 is prevented by the solvent condensed after evaporation.

The sealing member 180 is installed on the upper surface of the lower housing 121 to seal between the lower surface of the upper housing 125 and the upper surface of the lower housing 121. Vacuum drying apparatus according to the present embodiment is installed firmly so that the sealing member 180 is not separated from the upper surface of the lower housing 121, this will be described with reference to Figs. 12 is an enlarged view of the sealing member illustrated in FIG. 11.

As shown, the upper surface of the lower housing 121 is recessed downward to form an insertion groove 123 forming a ring shape, the insertion groove 123 on the upper end of one inner surface and the upper end of the other inner surface of the insertion groove 123. The locking projections 123a protruding toward the center side of each are formed. In this case, the locking protrusion 123a may be continuously formed along the inner surface of the insertion groove 123 to form a ring shape.

The sealing member 180 forms a ring shape and the lower portion 181 is inserted into the insertion groove 123, and the upper portion 183 protrudes above the upper surface of the lower housing 121 to lower the upper housing 125. Contact with cotton At this time, the cross-sectional shape of the insertion groove 123 and the cross-sectional shape of the lower portion 181 of the sealing member 180 are formed to correspond substantially.

The lower portion 181 and the upper portion 183 of the sealing member 180 are formed in different sizes. In detail, when the width between the inner circumferential surface and the outer circumferential surface of the sealing member 180 is the widthwise thickness of the sealing member 180, the widthwise thickness of the lower portion 181 of the sealing member 180 is the upper portion 183. It is formed larger than the thickness in the width direction. Then, the connecting portion 185 connecting the lower portion 181 and the upper portion 183 of the sealing member 180 is caught by the locking protrusion 123a. Therefore, the sealing member 180 is firmly inserted into the insertion groove 123 is not separated from the lower housing 121.

In the vacuum drying apparatus according to the present embodiment, in order to improve durability of the sealing member 180, the lower portion 181 of the sealing member 180 has a cross-sectional shape having a substantially rectangular shape, and the upper portion 183 ) Forms an elliptical shape in which a cross-sectional shape is convex upward. In addition, the connection portion 185 is formed of a concave portion 185a concave inwardly of the sealing member 180, and the corner portion of the lower portion 181 is formed to be rounded.

At this time, the radius of curvature of the upper portion 183 on the basis of the predetermined point inside the sealing member 180 R1, the radius of curvature of the connecting portion 185 on the basis of the outer predetermined point of the sealing member 180, R2, the sealing member When the radius of curvature of the portion where the lower portion 181 and the connecting portion 185 meet on the basis of another predetermined point inside 180 is R3, it is preferable that R1: R2: R3 = 1: 1: 0.2 to 0.3 In addition, it is preferable that the angle (theta) which an imaginary line which extends the both side surfaces of the lower side part 181 make is 45 degrees-50 degrees.

And, the sealing member 180 is preferably formed of EPDM rubber (Ethylene Propylene Diene Monomer Rubber) is coated with Teflon.

Second embodiment

FIG. 13 is a schematic cross-sectional view showing main parts of a housing part according to a second embodiment of the present invention, and only the differences from FIG. 5 will be described.

As shown in the drawing, when the chamber 220a is decompressed by the decompression means, the means for allowing clearance between the upper housing 225 can be lowered by the first bracket 241 and the second. The bracket 242, the connection member 244, the first support member 246, the second support member 247, the first elastic member 248 and the second elastic member 249 are provided.

The first bracket 241 is coupled to the connection bracket 233 coupled to the driving means 130 (see FIG. 2), and is elevated by the driving means 130 to form a first through hole 241a. The second bracket 242 is coupled to the upper housing 225 and is positioned below the first bracket 241, and a second through hole 242a is formed to face the first through hole 241a. The upper housing 225 is raised and lowered by the bracket 241.

The upper portion 244a of the connecting member 244 connecting the first bracket 241 and the second bracket 242 is positioned inside the first bracket 241 and is supported by the first bracket 241. The lower portion 244b is positioned inside the second bracket 242 to be supported by the second bracket 242, and the middle portion 244c penetrates the first and second through

holes

241a and 242a.

The first and

second support members

246 and 247 are respectively coupled to the upper outer peripheral surface and the lower outer peripheral surface of the connecting member 244, and are hooked to the first bracket 241 and the second bracket 242, respectively. 244 prevents the first bracket 241 and the second bracket 242 from being separated.

The first elastic member 248 is installed on the outer circumferential surface of the upper portion of the connecting member 244 and the bottom surface contacts the first bracket 241 and the top surface contacts the first support member 246. The second elastic member 249 is installed on the outer circumferential surface of the lower portion of the connection member 244, and the upper surface of the second elastic member 249 contacts the second bracket 242, and the lower surface of the second elastic member 249 contacts the second supporting member 247.

That is, in the vacuum drying apparatus according to the first embodiment of the present invention, the first bracket 141 is located under the second bracket 142, and the vacuum drying apparatus according to the second embodiment of the present invention includes the first The bracket 241 is located above the second bracket 242, and there is a difference in the positions of the

first brackets

141 and 241 and the

second brackets

142 and 242, and the other configurations are the same.

The lifting motion of the upper housing 225 according to the second embodiment of the present invention will be described with reference to FIGS. 13 to 17. 14 to 17 are schematic cross-sectional views of main parts for explaining the operation of the upper housing shown in FIG.

As shown in FIG. 13, it is assumed that the upper housing 225 is positioned above the fixed lower housing 221 so that the lower housing 221 and the upper housing 225 are separated from each other. In the first state, the first bracket 241 and the second bracket 242 interconnected by the connecting member 244 are spaced apart from each other.

The reason why the first bracket 241 and the second bracket 242 may be spaced apart from each other is because the first bracket 241 and the second bracket 242 are connected by the connecting member 244 to be connected. This is because it is possible to flow a predetermined distance from each other in the middle portion 244c of the member 244.

In the initial state, the driving means 130 (see FIG. 2) is driven so that the lower surface of the upper housing 225 is the upper surface of the lower housing 221 as shown in FIG. 14. The connection bracket 233 is lowered until it comes in contact with the sealing member 280 installed in the rear surface.

Then, when the bottom surface of the upper housing 225 is in contact with the sealing member 280, the driving means 130 is stopped. When the driving means 130 is stopped, as shown in FIG. 15, the upper housing 225 contacts the sealing member 280 by the weight of the connecting bracket 233 and the upper housing 225, and the connecting member ( 244 is lowered to the second bracket 242 side.

Then, when the chamber 220a is depressurized by the decompression means, as shown in FIG. 16, the upper housing 225 is further lowered by the pressure difference to compress the sealing member 280.

When the drying of the to-be-dried body 50 (see FIG. 3) is completed, the chamber 220a is boosted, and the connecting bracket 233 is raised by the driving means 130, as shown in FIG. 17. The first bracket 241 and the second bracket 242 are separated from each other. Thereafter, when the connecting bracket 233 is further raised, it is returned to the initial state shown in FIG.

Although the present invention has been described with reference to the preferred embodiment by way of example, it is not limited to the above embodiment and should be made by those skilled in the art without departing from the spirit of the present invention. Many variations and modifications are possible. Such modifications and variations are intended to fall within the scope of the invention and the appended claims.

Claims

main body;

A lower housing fixed to the main body and provided with a sealing member at an upper surface thereof;

The lower housing is provided to be elevated in the main body above the lower housing, and when lowered, the lower surface is in contact with the sealing member to form a chamber which is a space for drying the dry body between the lower housing, An upper housing separated from the lower housing;

Driving means installed on the main body to move the upper housing up and down;

A decompression means installed on one side of the main body and depressurizing the chamber when the driving means stops and the upper housing contacts the sealing member by its own weight;

And a means for allowing a clearance to allow the upper housing to lower when the chamber is decompressed by the decompression means.
The method of claim 1,

The means,

A first bracket coupled to the driving means and being lifted by the driving means and having a first through hole formed therein;

A second bracket coupled to the upper housing and positioned above the first bracket, and having a second through hole facing the first through hole, and lifting and lowering the upper housing by lifting and lowering by the first bracket;

A lower side is positioned inside the first bracket and is supported by the first bracket, and an upper portion is positioned inside the second bracket and is supported by the second bracket, and an intermediate portion is penetrated by the first and second penetrations. And a connecting member penetrating the ball and connecting the first bracket and the second bracket to be movable in a lifting direction of the upper housing.
The method of claim 2,

The first support member and the second support member which are caught by the first bracket and the second bracket on the lower part and the upper part of the connection member to prevent the connection member from being separated from the first bracket and the second bracket. Vacuum drying apparatus, characterized in that each coupled.
The method of claim 3,

The outer peripheral surface of the lower portion of the connecting member and the inner peripheral surface of the first support member are formed to engage with each other,

The outer peripheral surface of the upper portion of the connecting member and the inner peripheral surface of the second support member are formed to engage with each other,

And the intermediate part length of the connection member is adjusted as the first support member or the second support member rotates forward and backward.
The method of claim 4, wherein

The lower side of the connecting member is provided with a first elastic member having an upper surface in contact with the first bracket and the lower surface in contact with the first support member.

The upper side of the connecting member is a vacuum drying apparatus, characterized in that the lower surface is in contact with the second bracket and the upper surface is provided with a second elastic member in contact with the second support member.
The method of claim 1,

The means,

A first bracket coupled to the driving means and being lifted by the driving means and having a first through hole formed therein;

A second bracket coupled to the upper housing and positioned below the first bracket and formed with a second through hole facing the first through hole, the second bracket for elevating the upper housing while being lifted by the first bracket;

An upper portion is positioned inside the first bracket to be supported by the first bracket, and a lower portion is positioned inside the second bracket to be supported by the second bracket, and an intermediate portion is penetrated by the first and second penetrations. And a connecting member penetrating the ball and connecting the first bracket and the second bracket to be movable in a lifting direction of the upper housing.
The method of claim 6,

The first support member and the second support member are caught on the first bracket and the second bracket on the upper side and the lower side of the connection member to prevent the connection member from being separated from the first bracket and the second bracket. Vacuum drying apparatus, characterized in that each coupled.
The method of claim 7, wherein

Engaging teeth are formed on the outer peripheral surface of the upper portion of the connection member and the inner peripheral surface of the first support member, respectively.

The outer peripheral surface of the lower portion of the connecting member and the inner peripheral surface of the second support member are formed with the interlocking teeth, respectively.

And the intermediate part length of the connection member is adjusted as the first support member or the second support member rotates forward and backward.
The method of claim 8,

The upper portion of the connecting member is provided with a first elastic member having a lower surface in contact with the first bracket and an upper surface in contact with the first support member.

And a second elastic member having a top surface in contact with the second bracket and a bottom surface in contact with the second support member at a lower portion of the connection member.
The method according to claim 2 or 6,

The length of the intermediate portion of the connecting member is a vacuum drying apparatus, characterized in that formed longer than the sum of the thickness of the first bracket and the thickness of the second bracket.
The method according to claim 2 or 6,

The sealing member forms a ring shape and the lower portion is inserted into a ring-shaped insertion groove formed in the upper surface of the lower housing, and the upper portion protrudes above the upper surface of the lower housing.

When the direction from the inner circumferential surface of the sealing member toward the outer circumferential surface is the width direction of the sealing member, the width direction thickness of the lower portion of the sealing member is formed larger than the width direction thickness of the upper portion,

Connection portion for connecting the lower portion and the upper portion of the sealing member is a vacuum drying apparatus, characterized in that caught on the insertion groove side.
The method of claim 11,

One side inner surface upper end portion and the other inner surface upper end portion of the insertion groove is projected toward the center of the insertion groove is a vacuum drying apparatus, characterized in that each engaging projection is formed on the connecting portion of the sealing member.
The method of claim 12,

The locking projections are respectively formed along one inner surface and the other inner surface of the insertion groove to form a ring shape, respectively.
The method of claim 13,

The cross-sectional shape of the lower portion of the sealing member is a quadrangle, the cross-sectional shape of the upper portion is an elliptical convex upward, and the connecting portion is a concave portion concave inward of the sealing member. Vacuum drying apparatus, characterized in that formed in.
The method of claim 14,

The radius of curvature of the upper portion of the sealing member relative to the inner predetermined point of the sealing member R1, the radius of curvature of the connecting portion of the sealing member relative to the outer predetermined point of the sealing member R2, the inner other of the sealing member When the radius of curvature of the portion where the lower portion and the connecting portion of the sealing member meet on the basis of a predetermined point as R3,

R1: R2: R3 = 1: 1: 0.2-0.3,

The angle formed by the line of the imaginary line extending both sides of the lower portion of the sealing member is a vacuum drying apparatus, characterized in that 45 ° to 50 °.
The method of claim 15,

The sealing member is formed of EPDM rubber (Ethylene Propylene Diene Monomer Rubber) is vacuum drying apparatus, characterized in that the Teflon coating.