WO2013005314A1 - 密閉チャンバ - Google Patents

密閉チャンバ Download PDF

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Publication number
WO2013005314A1
WO2013005314A1 PCT/JP2011/065464 JP2011065464W WO2013005314A1 WO 2013005314 A1 WO2013005314 A1 WO 2013005314A1 JP 2011065464 W JP2011065464 W JP 2011065464W WO 2013005314 A1 WO2013005314 A1 WO 2013005314A1
Authority
WO
WIPO (PCT)
Prior art keywords
seal
corner
sealing
cross
groove
Prior art date
Application number
PCT/JP2011/065464
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
吉田秀彦
中川雅晴
矢部学
斉藤宣和
城戸信二
Original Assignee
入江工研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 入江工研株式会社 filed Critical 入江工研株式会社
Priority to JP2013522652A priority Critical patent/JP5427317B2/ja
Priority to CN201180055832.8A priority patent/CN103221723B/zh
Priority to KR1020137011917A priority patent/KR101616549B1/ko
Priority to PCT/JP2011/065464 priority patent/WO2013005314A1/ja
Publication of WO2013005314A1 publication Critical patent/WO2013005314A1/ja

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J12/00—Pressure vessels in general
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing

Definitions

  • the present invention relates to an assembled sealed chamber that can be used in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, a solar cell panel manufacturing apparatus, and the like.
  • a vacuum chamber, a chamber for sealing a gas, and the like are used, for example, when performing film formation or etching on a target object such as a semiconductor wafer or a liquid crystal display substrate.
  • Such sealed chambers have generally been manufactured by using a large block of aluminum alloy, stainless steel or the like and cutting out the inside of the block. For this reason, it is difficult to increase the size of the closed chamber, and a large processing machine is required when manufacturing, and the manufacturing cost is increased because the internal material that has been cut out is wasted. There was a problem.
  • a sealed chamber having a structure in which a frame-shaped chamber body is divided into a plurality of constituent members, and the plurality of divided constituent members are welded.
  • welding of aluminum alloys in particular is expensive and expensive, and both aluminum alloys and stainless steels can not be distorted or cracked after welding, or the welds can not be made flat. It is necessary to carry out secondary processing, which is a factor causing cost increase.
  • each component can not be removed after use, there are problems such as difficulty in maintenance work, and in the case of a welded structure, cracking due to fatigue of the welded portion.
  • objects to be processed, such as substrates are also increasing in size in recent years, portability is inconvenient if each component can not be removed, and it becomes difficult to meet the demand for an increase in the size of the chamber itself. There is.
  • This vacuum vessel is configured as a box-like vessel by joining the end faces of four side plates to form a hollow frame, and joining the top plate and the bottom plate to the upper and lower opening faces of the hollow frame. It is done. Further, a seal groove is provided on the joint surface of each plate material, and the sealing property of the container is ensured by inserting and sealing the integrally formed seal material into the seal groove.
  • the present invention has been made to solve such problems, and the object of the present invention is to manufacture it simply and inexpensively as compared with the conventional cutting and welding sealed chamber, and It is an object of the present invention to ensure that the seal member and the seal groove are in close contact with each other to prevent the occurrence of a leak, and to provide a highly airtight sealed chamber stably.
  • the present invention is an assembly-type sealed chamber in which a sealed space is provided inside by joining a plurality of plate members, and a seal groove formed on a joint surface of adjacent plate members And a seal material having branched portions branched in different directions, and when the seal material is mounted in the seal groove, the periphery of the seal material branch portion is compressed and deformed in the direction of the seal groove corner portion, whereby the corner of the seal material branch portion It is characterized in that the portion is pressed against the corner of the seal groove branch portion to be in close contact.
  • the filling rate of the sealing material branch portion be set to about 100%.
  • the "filling ratio” means the ratio (S2 / S1) of the cross sectional area of the seal material to the cross sectional area of the seal groove, where the cross sectional area of the seal groove is S1 and the cross sectional area of the seal material is S2. .
  • a structure in which the cross-sectional area of the branch portion is larger than the cross-sectional area of the linear portion can be adopted for the sealing material.
  • the seal material branch portion When the seal material of this structure is mounted in a seal groove having a uniform cross-sectional area, the seal material branch portion is deformed only in the direction opposite to the extension direction, that is, in the direction away from the branch portion. Power is secured.
  • the seal groove may have a structure in which the cross-sectional area of the branch portion is smaller than the cross-sectional area of the linear portion.
  • the seal surface between the corner of the seal material branch and the corner of the seal groove bifurcation has an R shape (arc surface) or C surface so that the seal material in contact with the corner of the seal groove bifurcation is not damaged. It may be changed to a chamfered shape such as a shape (45 ° inclined surface).
  • a plurality of plate members are joined to form a sealed chamber in which the sealed space is provided internally, thereby making it possible to compare with a sealed chamber manufactured by welding of stainless steel or cutting of aluminum alloy.
  • the corner of the seal material branch portion is pressed against the corner portion of the seal groove branch portion so as to be in close contact with each other by compressive deformation around the branch portion of the seal material.
  • the sealability to the corner of the seal groove branch portion is enhanced, the occurrence of leak can be prevented, and a highly airtight sealed chamber can be stably provided.
  • FIG. 8 is an explanatory view showing an operation when the seal material of FIG. 8 is attached to the seal groove of FIG. 7; The enlarged view which shows the shape of the sealing material branch part in this invention.
  • FIG. 18 is an explanatory view showing an operation when the sealing material of FIG. 10 is attached to the sealing groove of FIG. 7;
  • the sealed chamber C of the present invention is an assembly type container assembled using a plurality of plate members 1, 2, 3, 4, a seal member 5, and a bolt 7.
  • the apparatus can be used as a vacuum chamber in which the inside is vacuumed to perform film formation processing, etching processing, and the like of a semiconductor wafer.
  • the closed chamber C is formed by fixing the two side plates 1, 1 and the two exhaust side plates 2, 2 arranged opposite to each other with a bolt 7 to form a flat square shaped frame 8.
  • the top plate 3 is disposed on the upper opening surface of the form 8 and the bottom plate 4 is disposed on the lower opening surface and fixed by the bolt 7 to form a rectangular hollow container having a space sealed inside. It is done.
  • seal grooves 6 are provided on the joint surface of the mold 8 and the top plate 3, the joint surface of the mold 8 and the bottom plate 4, and the joint surface of the adjacent side plate 1 and the exhaust side plate 2. Air tightness is maintained by mounting the sealing material 5 in the sealing groove 6.
  • the exhaust port 21 is provided in the exhaust port side plate 2, and a vacuum pump (not shown) for evacuating the closed space in the chamber can be attached.
  • the side plate 1 is made of a flat rectangular aluminum alloy plate, and linear concave grooves 61, 61,... Are formed on the upper side, the lower side, and the left and right sides, respectively.
  • An annular groove 62 is provided, which is connected in series to form a circular groove 62.
  • screw holes 11, 11, ... for fastening the adjacent exhaust sided side plates 2 with a plurality of bolts 7, 7, ... and the exhaust sided side plates 2 are aligned.
  • a pin hole 15 for inserting the pin 14 is provided.
  • screw holes 12, 12 ... for fastening the top plate 3 are provided on the upper side surface of the side plate 1, and screw holes 13, 13 ... for fastening the bottom plate 4 are provided on the lower side surface, respectively. It is done.
  • the side plate 2 with the exhaust port is made of a flat square aluminum alloy plate, and the exhaust port 22 is formed to penetrate at the central portion, and the exhaust port 21 is fixed around the exhaust port 22. Screw holes 23, 23, ... are provided.
  • groove 61 which has the bending part 63 in both ends is formed in the upper surface of the side plate 2 with an exhaust port, the screw holes 24,24, ... for fastening the top plate 3 are provided.
  • the lower surface is provided with a recessed groove 61 having a bent portion 63 and screw holes 25, 25... For fastening the bottom plate 4.
  • insertion holes 26 for bolt insertion are provided at positions corresponding to the screw holes 11 of the side plate 1.
  • step portions 27, 27 are formed on the left and right sides of the inner side surface of the side plate 2 with the exhaust port, and the left and right end surfaces of the side plate 1 are joined to the step portion 27 to fasten the bolt 7 Eight is formed.
  • the top plate 3 is also made of a flat square aluminum alloy plate, and through-holes 31, 31... For bolt insertion to be fastened to the mold 8 are provided along the periphery thereof. There is. Similarly, the bottom plate 4 is also provided with insertion holes 41, 41,... For bolt insertion.
  • an aluminum alloy plate is used as the material of the side plate 1, the side plate 2 with the exhaust port, the top plate 3 and the bottom plate 4, but instead, a metal plate such as stainless steel plate or carbon steel plate is used. You may.
  • the seal member 5 is formed of a skeleton seal member made of an elastic body, and is framed and formed in a rectangular parallelepiped shape having eight top portions 51 in total.
  • twelve linear portions 52, 52, ... are formed of round rod-like rubber materials formed by vulcanizing a fluorocarbon resin, and T-shaped branch portions 53 as shown in the enlarged view in the vicinity of each top portion 51.
  • T-shaped branch portions 53 are integrally formed by bonding them with an adhesive or vulcanization molding.
  • the material and molding method of the sealing material 5 are not limited to this, and any material and molding method may be used as long as the bonding portion of the plate material can be sealed.
  • the side plate 1 is attached to the integrally formed seal member 5.
  • the linear portions 52, 52,... Of the sealing material 5 are sequentially fitted into the annular recessed groove 62 provided over the entire side surface of the side plate 1.
  • the pin 14 is inserted into the pin hole 15 of the side plate 1.
  • the side plate 2 with the exhaust port is attached to the seal member 5 on which the side plate 1 is attached.
  • the remaining linear portions 52, 52,... Of the sealing material 5 are fitted into the recessed grooves 61 provided on the upper and lower side surfaces of the side plate 2 with the exhaust port.
  • the left and right end surfaces of the side plate 1 abut the step 27, and the pin 14 is inserted into the pin hole 28 of the side plate 2 with the exhaust port.
  • the bolt 7 inserted from the insertion hole 26 is screwed to the screw hole 11 to fix the side plate 1 and the side plate 2 with exhaust port.
  • the joint surface of the mold 8 and the bottom plate 4 is obtained by inserting the bolt 7 into the insertion hole 41, screwing it into the screw holes 13 and 25 and fixing it to the lower surface of the mold 8. Sealed by an annular seal member 5.
  • the plate members 1, 2, 3, 4 are fitted into the integrally formed seal member 5 and assembled by simply fixing them with the bolt 7.
  • the closed chamber C can be manufactured in a short time and with a simple operation, that is, at low cost, as compared with the conventional manufacturing method such as cutting.
  • the side plate 1, the side plate 2 with the exhaust port, the top plate 3 and the bottom plate 4 which are the component parts are all made of plate materials, the size of the whole plate chamber C can be easily made large if the size of each plate material is formed large. Can be expanded.
  • the overall size of the closed chamber C can be further expanded.
  • the present invention is characterized in that the relationship between the sealing material 5 and the sealing groove 6 is improved in order to improve the sealing property of the bonding surfaces of the plate members 1, 2, 3 and 4 by the sealing material 5.
  • the detailed structure will be described below.
  • FIG. 7 is an enlarged view showing the vicinity of the seal groove branch portion 64 branched in different directions with respect to the seal groove 6A having a general rectangular cross section
  • FIG. 8 is a seal material 5A having a general circular cross section.
  • FIG. 8 is an enlarged view of the vicinity of the seal material branch portion 53 in the same manner.
  • FIG. 9 shows a state where the sealing material 5A of FIG. 8 is attached to the sealing groove 6A of FIG.
  • FIG. 9 when the sealing material 5A having a round cross section is inserted into the sealing groove 6A having a square cross section, in the surfaces A and B of the bottom of the sealing groove as shown in FIG. The repulsive force of the sealing material 5A is obtained.
  • the sealing material 5A the combined force of the stretching in the vicinity of the sealing material branching portion 53 branched in three directions acts in the D direction and the E direction in the figure, so in the corner 64a of the sealing groove branching portion 64 The repulsive force of the sealing material 5A in the C direction necessary for sealing is not sufficient. For this reason, unless the corners (ridge lines) 64a of the seal groove branch portion 64 form a substantially perfect straight line, the sealing material 5A tends to make it difficult to seal the gap of the corners 64a. In addition, even when sealed, the sealing performance (for example, the decrease in gas permeation time) is not good, and there is a practical problem in using it as a vacuum chamber.
  • the corner 53a of the seal material branch portion 53 is predetermined relative to the corner 64a of the seal groove branch 64.
  • the filling rate of the branch portion 53 (the ratio of the cross-sectional area of the seal material branch portion 64 to the cross-sectional area of the seal groove branch portion 53) is set to a high value near 100%.
  • FIG. 10 is an enlarged view of the vicinity of the branch portion 53 of the sealing material 5B of the present invention as an example.
  • the cross-sectional shape of the linear portion 52 of the seal member 5B of this embodiment is a round shape
  • the cross-sectional shape of the branch portion 53 is a semicircular shape and a square shape with rounded corners. It consists of a combined composite shape. Therefore, the cross-sectional area of the branch portion 53 is formed to be larger than the cross-sectional area of the linear portion 52.
  • FIG. 11 shows a state in which the seal member 5B of FIG. 10 is attached to the seal groove 6A of FIG.
  • the filling factor of the seal material branch portion 53 is set to near 100%.
  • the seal member 5B can not escape, and can only deform in the direction opposite to the extension direction of the seal member 5B, that is, in the direction away from the seal groove branch portion 64. Therefore, in the corner portion 64a of the seal groove branch portion 64, the pressing force of the sealing material 5B is secured without being offset in the C direction necessary for sealing the gap.
  • the sealing material 5B of the present embodiment a sufficient pressing force can be obtained against the corner 64a of the sealing groove branch portion 64, and the adhesion between the sealing material 5B and the sealing groove 6A is enhanced to close the gap. Leaks can be reliably prevented.
  • the structure of the sealing material 5 is not limited to the shape shown in FIG. 12 to 16 show a seal material having a round cross-sectional area of the seal material branch portion 53 in order to secure the repulsive force of the seal material 5 in the C direction of FIG. 11 at the corner 64a of the seal groove branch portion 64. It shows an example larger than the cross-sectional area of 5A (see FIG. 8).
  • the cross-sectional shape of the branch portion 53 is formed into a circle having a diameter larger than that of the linear member 52.
  • the cross-sectional shape of the linear portion 52 is circular
  • the cross-sectional shape of the branch portion 53 is formed into a semi-elliptical shape in which the upper half has a larger cross-sectional area than the semi-circular shape. It is done.
  • the cross-sectional shape of the branching portion 53 is formed into an elliptical shape in which the cross-sectional area is enlarged in the vertical direction with respect to the circular shape, and in the sealing material 5F shown in FIG.
  • the cross-sectional shape is formed in an elliptical shape in which the cross-sectional area is expanded in the left-right direction with respect to the circular shape.
  • the sealing material 5G shown in FIG. 16 is formed into a substantially rectangular shape in which the cross-sectional shape of the branching portion 53 is one size larger than a circle and the four corners are rounded.
  • the cross-sectional area of the branch portion 53 is set to be relatively larger than the cross-sectional area of the linear portion 52 in the sealing material 5. Therefore, when the seal members 5C to 5G are attached to the seal groove 6A (see FIG. 7) having a square cross section, the seal member 5 is compressed by the plate as shown in FIG. The resultant force in the D direction and the repulsive force in the opposite direction increase. As a result, since the pressing force in the C direction in FIG. 11 becomes strong, the adhesion of the seal groove branch portion 64 to the corner portion 64a is enhanced, and the gap can be closed to surely prevent the leak.
  • seal material branch portion 53 in which the cross-sectional area is enlarged is attached to the general cross-sectional square seal groove branch portion 64
  • cross-sectional area is reversed
  • a seal material branch portion 53 having a generally round cross-sectional shape may be attached to the seal groove branch portion 64 which is reduced in size.
  • the cross-sectional area of the bifurcated portion 64 is smaller than the cross-sectional area of the linear portion 65 by providing the protruding portion 66 projecting on the inner wall surface of the bifurcated portion 64 It is set to be Further, in the seal groove 6C shown in FIG. 18, by making the groove depth d in the vicinity of the corner of the branch portion 64 shallow in the groove having a rectangular cross section, the cross section of the branch portion 64 is also Is set to be smaller. Furthermore, in the seal groove 6D shown in FIG.
  • the cross-sectional area of the bifurcated portion 64 is also smaller than the cross-sectional area of the linear portion 65 by narrowing the groove width w near the corner of the bifurcated portion 64 in the groove of square cross section. It is set to be smaller.
  • the cross-sectional area of the branch portion 64 is set to be relatively smaller than the cross-sectional area of the linear portion 65 in the seal groove 6. Therefore, when the seal member 5A (FIG. 8) having a round cross section is attached to the seal grooves 6B (FIG. 17), 6C (FIG. 18) and 6D (FIG. 19) whose cross-sectional areas are reduced, FIG. In the same manner as in the above case, the sealing material 5A is compressed by the plate material, and the resultant force in the D direction and the repulsive force in the opposite direction increase. Therefore, the adhesion to the corner 64 a of the seal groove branch portion 64 is also enhanced by these examples, and the gap can be closed to surely prevent the leak.
  • the filling rate of the sealing material branch portion 53 is set to about 100%. Even if the filling rate is close to 100%, even if it is less than 100%, for example, about 90%, in the case where the sealing material 5 is an elastic body, the pressure is exerted on the sealing material 5 at the portion in close contact with the sealing surface. In order to exhibit properties close to liquid. Also, the filling rate may exceed 100%. The seal material 5 having a filling rate exceeding 100% is deformed in a direction away from the branch portion 53 when fitted in the seal groove 6, and the seal material is completely accommodated in the groove, so the seal groove branch portion 64. The seal member 5 in contact with the corner portion 64a of the case is not damaged.
  • the sealing surface of the corner 53a of the sealing material branch 53 and the corner 64a of the sealing groove branch 64 into a chamfered shape so that the sealing material 5 is not damaged.
  • the seal surface is formed in an R shape (arc surface) as shown in FIG. 20 or a configuration in which the seal surface is formed in a C surface shape (45 ° inclined surface) as shown in FIG. it can.
  • the length of the sealing material 5 may be set shorter than the length of the sealing groove 6. Also in this case, when the seal member 5 is inserted into the seal groove 6, the seal member 5 tends to expand and the resultant force in the D direction and the repulsive force in the opposite direction increase, so the same effect as the embodiment described above is obtained. can get.
  • the sealed chamber of the present invention can be used for a wide range of applications such as a flat panel display manufacturing apparatus, a solar cell panel manufacturing apparatus, and an organic EL panel manufacturing apparatus as well as a semiconductor manufacturing apparatus.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Rigid Containers With Two Or More Constituent Elements (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
PCT/JP2011/065464 2011-07-06 2011-07-06 密閉チャンバ WO2013005314A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013522652A JP5427317B2 (ja) 2011-07-06 2011-07-06 密閉チャンバ
CN201180055832.8A CN103221723B (zh) 2011-07-06 2011-07-06 密封腔室
KR1020137011917A KR101616549B1 (ko) 2011-07-06 2011-07-06 밀폐 챔버
PCT/JP2011/065464 WO2013005314A1 (ja) 2011-07-06 2011-07-06 密閉チャンバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/065464 WO2013005314A1 (ja) 2011-07-06 2011-07-06 密閉チャンバ

Publications (1)

Publication Number Publication Date
WO2013005314A1 true WO2013005314A1 (ja) 2013-01-10

Family

ID=47436687

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/065464 WO2013005314A1 (ja) 2011-07-06 2011-07-06 密閉チャンバ

Country Status (4)

Country Link
JP (1) JP5427317B2 (ko)
KR (1) KR101616549B1 (ko)
CN (1) CN103221723B (ko)
WO (1) WO2013005314A1 (ko)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124557U (ja) * 1984-01-30 1985-08-22 トヨタ自動車株式会社 シリンダヘツドとシリンダヘツドカバ−との間のシ−ル構造
JP2004286165A (ja) * 2003-03-24 2004-10-14 Hitachi Kokusai Electric Inc 容器、基板処理装置及びこれを用いた半導体装置の製造方法
JP2010084920A (ja) * 2008-10-02 2010-04-15 Maruyama Mfg Co Ltd シール装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4253631B2 (ja) * 2004-10-18 2009-04-15 内山工業株式会社 パッキン
JP4926530B2 (ja) * 2006-04-27 2012-05-09 東京エレクトロン株式会社 シール部材、減圧容器、減圧処理装置、減圧容器のシール機構、および減圧容器の製造方法
JP4903013B2 (ja) * 2006-05-17 2012-03-21 東京エレクトロン株式会社 減圧容器、減圧処理装置および減圧容器の製造方法
JP2008249097A (ja) * 2007-03-30 2008-10-16 Nok Corp 密封構造及びガスケット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124557U (ja) * 1984-01-30 1985-08-22 トヨタ自動車株式会社 シリンダヘツドとシリンダヘツドカバ−との間のシ−ル構造
JP2004286165A (ja) * 2003-03-24 2004-10-14 Hitachi Kokusai Electric Inc 容器、基板処理装置及びこれを用いた半導体装置の製造方法
JP2010084920A (ja) * 2008-10-02 2010-04-15 Maruyama Mfg Co Ltd シール装置

Also Published As

Publication number Publication date
JP5427317B2 (ja) 2014-02-26
KR20140031167A (ko) 2014-03-12
JPWO2013005314A1 (ja) 2015-02-23
CN103221723B (zh) 2016-02-24
CN103221723A (zh) 2013-07-24
KR101616549B1 (ko) 2016-04-28

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