WO2013002389A1 - Ｉｉｉ族窒化物半導体素子、及び、ｉｉｉ族窒化物半導体素子の製造方法 - Google Patents

Ｉｉｉ族窒化物半導体素子、及び、ｉｉｉ族窒化物半導体素子の製造方法 Download PDF

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WO2013002389A1
WO2013002389A1 PCT/JP2012/066769 JP2012066769W WO2013002389A1 WO 2013002389 A1 WO2013002389 A1 WO 2013002389A1 JP 2012066769 W JP2012066769 W JP 2012066769W WO 2013002389 A1 WO2013002389 A1 WO 2013002389A1
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layer
contact layer
nitride semiconductor
group iii
iii nitride
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PCT/JP2012/066769
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English (en)
French (fr)
Japanese (ja)
Inventor
陽平 塩谷
祐介 善積
孝史 京野
隆道 住友
上野　昌紀
簗嶋　克典
邦彦 田才
中島　博
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Sony Corp
Sumitomo Electric Industries Ltd
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Sony Corp
Sumitomo Electric Industries Ltd
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Priority to KR1020137031086A priority Critical patent/KR20130141709A/ko
Priority to EP12805410.3A priority patent/EP2728683A1/en
Priority to CN201280032130.2A priority patent/CN103650263A/zh
Publication of WO2013002389A1 publication Critical patent/WO2013002389A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
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    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
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    • H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
    • H01S5/3063—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping using Mg
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    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3202—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
    • H01S5/320275—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth semi-polar orientation
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    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
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Definitions

  • the first and second contact layers are preferably made of gallium nitride. Since GaN is a gallium nitride-based semiconductor that is a binary compound, good crystal quality can be provided when the first and second contact layers are made of GaN.
  • the carbon impurity concentration in the first contact layer is 1 ⁇ 10 17 cm ⁇ 3 or less.
  • the contact resistance and the operating voltage of the device are improved.
  • the group III nitride semiconductor device 11 includes an electrode 41 (for example, a cathode).
  • the electrode 41 is provided on the back surface 13b of the substrate 13 and is in direct contact with the back surface 13b.
  • the electrode 41 is made of, for example, Pd, Ti / Al, or the like.
  • TMG the supply of TMG is stopped and the substrate temperature is raised.
  • TMG, NH 3 , Cp 2 Mg, and atmospheric gas are supplied to the growth furnace 10 to grow and form the p-type GaN electron block layer 65a at a substrate temperature of about 900 degrees Celsius.
  • nitrogen it is preferable to supply nitrogen as an atmospheric gas.
  • TMG, TMI, NH 3 , Cp 2 Mg and nitrogen are supplied to the growth reactor 10 to grow and form the Mg-doped InGaN optical guide layer 65b at a substrate temperature of about 840 degrees Celsius.
  • a low-concentration Mg-doped GaN contact layer 65e (corresponding to the contact layer 25a) and a high-concentration Mg-doped GaN contact layer 65f (corresponding to the contact layer 25b) are grown and formed.
  • TMG, NH 3 , Cp 2 Mg, and atmospheric gas are supplied to the growth reactor 10 at about 900 degrees Celsius to grow and form the low-concentration Mg-doped GaN contact layer 65e.
  • the thickness of the low-concentration Mg-doped GaN contact layer 65e is about 40 nm.
  • FIGS. 13 to 15 show SIMS results obtained by analyzing the structure of the epitaxial stack from the surface side.
  • the epitaxial laminated structure used in this analysis is a structure in which an undoped GaN cap layer is laminated on the high-concentration Mg-doped GaN contact layer 65f in order to accurately measure the atomic concentration of the contact layer.
  • the horizontal axis of each figure shows the depth from the surface (p-side surface) of this epitaxial stack.
  • the analysis results from the surface of the epitaxial stack (p-side surface) to about 200 nm are shown.
  • the SIMS results shown in FIGS. 13 to 15 include analysis results for magnesium (Mg), aluminum (Al), and indium (In) as markers.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Nanotechnology (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
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PCT/JP2012/066769 2011-06-29 2012-06-29 Ｉｉｉ族窒化物半導体素子、及び、ｉｉｉ族窒化物半導体素子の製造方法 Ceased WO2013002389A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020137031086A KR20130141709A (ko) 2011-06-29 2012-06-29 Iii족 질화물 반도체 소자 및 iii족 질화물 반도체 소자의 제조 방법
EP12805410.3A EP2728683A1 (en) 2011-06-29 2012-06-29 Group iii nitride semiconductor element and method for manufacturing group iii nitride semiconductor element
CN201280032130.2A CN103650263A (zh) 2011-06-29 2012-06-29 Iii族氮化物半导体元件及iii族氮化物半导体元件的制造方法

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JP2011144664 2011-06-29
JP2011-144664 2011-06-29
JP2012-111478 2012-05-15
JP2012111478A JP2013033930A (ja) 2011-06-29 2012-05-15 Ｉｉｉ族窒化物半導体素子、及び、ｉｉｉ族窒化物半導体素子の製造方法

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US (1) US20130009202A1 (enExample)
EP (1) EP2728683A1 (enExample)
JP (1) JP2013033930A (enExample)
KR (1) KR20130141709A (enExample)
CN (1) CN103650263A (enExample)
TW (1) TW201310705A (enExample)
WO (1) WO2013002389A1 (enExample)

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JP2015170803A (ja) * 2014-03-10 2015-09-28 住友電気工業株式会社 ＩＩＩ族窒化物半導体素子、ｐ型コンタクト構造、ＩＩＩ族窒化物半導体素子を作製する方法
JP6249868B2 (ja) * 2014-04-18 2017-12-20 サンケン電気株式会社 半導体基板及び半導体素子
KR101636625B1 (ko) * 2014-12-18 2016-07-05 고려대학교 산학협력단 p형 반도체 박막 구조물의 형성 방법 및 이를 이용한 p형 오믹 전극의 제조 방법
TWI581453B (zh) * 2014-12-23 2017-05-01 錼創科技股份有限公司 半導體發光元件
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DE102017121484A1 (de) * 2017-06-21 2018-12-27 Osram Opto Semiconductors Gmbh Halbleiterkörper und Verfahren zur Herstellung eines Halbleiterkörpers
JP7043802B2 (ja) * 2017-11-16 2022-03-30 住友電気工業株式会社 垂直共振型面発光レーザ、垂直共振型面発光レーザを作製する方法
JP7412176B2 (ja) * 2018-01-23 2024-01-12 ソニーセミコンダクタソリューションズ株式会社 半導体レーザおよび電子機器
JP6785455B2 (ja) * 2018-05-11 2020-11-18 パナソニックＩｐマネジメント株式会社 発光ダイオード素子、及び発光ダイオード素子の製造方法
US11228160B2 (en) * 2018-11-15 2022-01-18 Sharp Kabushiki Kaisha AlGaInPAs-based semiconductor laser device and method for producing same
JP7288936B2 (ja) * 2021-09-21 2023-06-08 日機装株式会社 窒化物半導体発光素子
CN114497304B (zh) * 2022-01-28 2024-12-27 安徽格恩半导体有限公司 一种半导体元件
CN114824019B (zh) * 2022-04-08 2024-09-24 安徽格恩半导体有限公司 一种半导体发光元件
JP2023178173A (ja) * 2022-06-02 2023-12-14 豊田合成株式会社 Ｉｉｉ族窒化物半導体の製造方法
WO2024257516A1 (ja) * 2023-06-12 2024-12-19 パナソニックホールディングス株式会社 窒化物半導体発光素子及び窒化物半導体発光素子の製造方法

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