Classifications

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  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
  • H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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  • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
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  • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
  • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
  • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
  • H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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  • H01L2224/13009—Bump connector integrally formed with a via connection of the semiconductor or solid-state body
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  • H01L2224/13025—Disposition the bump connector being disposed on a via connection of the semiconductor or solid-state body
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  • H01L2224/13026—Disposition relative to the bonding area, e.g. bond pad, of the semiconductor or solid-state body
  • H01L2224/13027—Disposition relative to the bonding area, e.g. bond pad, of the semiconductor or solid-state body the bump connector being offset with respect to the bonding area, e.g. bond pad
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  • H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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  • H01L2224/13147—Copper [Cu] as principal constituent
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Definitions

• Disclosed embodiments relate to electronic devices, and more particularly to assembly of integrated circuit (IC) die or a wafer comprising a plurality of die having protruding through-substrate via tips to at least one workpiece, and electronic devices therefrom.
• IC integrated circuit
• TSVs through-substrate vias
• BEOL back end of the line
• the TSVs terminate on the bottomside of the TSV die as protruding TSV tips, such as protruding a distance of 5 to 15 ⁇ ⁇ from the bottomside substrate (e.g., silicon) surface.
• the TSV die are commonly thinned in wafer form to expose the TSVs and to form the tips, such as to a die thickness of 25 to 100 ⁇ , using a process generally including backgrinding.
• the TSV die can be bonded face-up or facedown, and can be bonded to from both of its sides to enable formation of stacked die devices.
• TSVs on the TSV die are generally arranged in a plurality of separate TSV arrays that cover a relatively small percentage of the TSV die area, and thus TSVs collectively do not approach uniformly covering the area of the TSV die.
• the TSVs within the TSV arrays are typically regularly spaced having a fixed pitch. Regions beyond the TSV arrays, or TSV-free regions, result in an irregular bottomside topography caused by the protruding TSV tips being elevated, with the TSV-free regions having a consistent lowest elevation.
• the TSV tips may include a metal cap thereon, such as a cap including a nickel comprising layer, that can function as an inter-metallic compound (IMC) barrier to overlying Sn- based solder in the case of solder mediated joints to a workpiece (e.g., a package substrate or another die or a die stack) to avoid, or at least delay, the consumption of the inner metal core (e.g., copper) of the TSV from forming an IMC which can lead to cracking of the outer dielectric sleeve of the TSV, and resulting failures (e.g., leakage or shorts) on the TSV die.
• the metal cap can significantly increase the height of the TSV tips relative to the TSV-free regions.
• Thermo-compression (TC) bonding is a common IC assembly method that involves the use of pressure (e.g., 40 to 80 N/cm 2 ) applied by a bond head and a significant temperature (e.g., a temperature high enough to melt solder, such as 230 to 300 °C) to join two materials by interdiffusion across the boundary of the materials.
• the TC bonding process relies on pressure to push pillars or other bonding features on the topside surface of TSV die or a TSV wafer against opposing pads on a substrate, wafer or another die that are to be bonded, and to heat and melt the solder.
• the TC bond head comes in direct contact with the TSV tips that protrude far above the surrounding TSV-free regions, effectively resulting in non-uniformly distributed pressure applied to the bonds formed on the topside of the die.
• Disclosed embodiments are based on several recognitions of happenings during
• TSV-free regions have a consistent lowest elevation relative to protruding TSV tips resulting in an irregular bottomside topography than can cause pick-up problems and substantially non-uniformly distributed pressure applied during subsequent bonding operations that can cause problems including die warpage, damage to brittle low-k dielectrics between the TSVs and the bonded topside surface, and cracking of the TSV's dielectric sleeve where the TSV exits the die bottomside.
• the exposed TSVs on the bottomside of the TSV die or TSV wafer can be damaged during vacuum pick-up, which can lead to poor bond integrity during subsequent bonding of the TSV tip to another workpiece.
• thin TSV die and thin TSV wafers can easily bend when subjected to non-uniformly distributed pressure during bonding.
• Disclosed embodiments solve the above-described tip damage problem by adding a protective layer over the protruding TSV tips on the bottomside of the TSV die for reducing or eliminating damage during TC bonding to a workpiece (e.g., organic substrate), which results in a more uniform pressure applied by the TC bond head during TC bonding.
• a protective layer has been found to eliminate or at least significantly reduce TC-bonding induced opens on the bonded topside of the TSV die, and subsequently bonded devices to the bottomside TSV tips of the TSV die. Since disclosed protective layer is on the bottomside of the TSV die, no active die area is lost.
• FIG. 1 is a flow chart that shows steps in an example method of protecting TSV die including protruding TSV tips on the bottomside of the TSV die from bonding damage by adding a protective layer between and over the protruding TSV tips, according to an example embodiment.
• FIG. 2 is a simplified cross-sectional depiction of a TSV die comprising a plurality of TSVs that include protruding TSV tips having a protective layer between and over the protruding TSV tips on the bottomside of the TSV die, according to an example embodiment.
• FIG. 3 shows an example protected stacked die precursor comprising the TSV die shown in FIG. 2 bonded to a workpiece, according to an example embodiment.
• FIG. 1 shows steps in an example method 100 of protecting TSV die including protruding TSV tips on the bottomside of the TSV die from bonding damage by adding a protective layer between and over the protruding TSV tips, according to an example embodiment.
• Step 101 comprises providing a substrate (e.g., a wafer) comprising a plurality of TSV die having a topside including active circuitry, a bottomside, and a plurality of TSVs.
• a substrate e.g., a wafer
• the TSVs each include an inner metal core and an outer dielectric sleeve that extends the full thickness of the TSV die from the topside surface (generally coupled to the contact level or one of the back end of the line (BEOL) metal layers (e.g., Ml, M2, etc.)) to the protruding TSV tips that emerge from the bottomside of the TSV die.
• a length of the protruding TSV tips measured from the bottomside of the TSV die is from 2 to 15 ⁇ .
• the TSV diameter is ⁇ 12 ⁇ , such as 4 to 10 ⁇ in one particular embodiment.
• the inner metal core can comprise Cu in one embodiment.
• Other electrically conductive materials can be used for the inner metal core.
• the outer dielectric sleeve can comprise materials such as silicon oxide, silicon nitride, phosphorus-doped silicate glass (PSG), silicon oxynitride, or certain chemical vapor deposited (CVD) polymers (e.g., parylene).
• the outer dielectric sleeve is typically 0.2 ⁇ to 5 ⁇ thick.
• a metal diffusion barrier layer (such as a refractory metal or a refractory metal nitride) referred to herein as a "TSV barrier” is generally added and is deposited on the dielectric sleeve.
• TSV barrier materials can include materials including Ta, W, Mo, Ti, TiW, TiN, TaN, WN, TiSiN or TaSiN, which can be deposited by physical vapor deposition (PVD) or CVD.
• PVD physical vapor deposition
• the TSV barrier is typically 100-500 A thick.
• the TSV tips generally include a metal cap thereon that comprises at least a first metal layer that includes a metal that is not in the inner metal core.
• the metal layer for the cap is exclusive of solder can be electrolessly or electro lyrically deposited (i.e., electroplating) on a distal portion of the protruding TSV tips.
• the first metal layer forms an electrical contact with at least the topmost surface of the inner metal core of the TSV tip.
• the first metal layer can be generally 1 to 8 ⁇ thick.
• the first metal layer can provide both an IMC block.
• the first metal layer can comprise materials including Ni, Pd, Ti, Au, Co, Cr, Rh, NiP, B, CoWP or CoP, for example.
• the first metal layer can comprise a 3 to 8 ⁇ thick electroplated Cu plated layer.
• the inner metal core comprises copper and the TSV tips include a metal cap that includes at least one of Ti, Ni, Pd, and Au.
• An optional metal barrier layer may also be included between the first metal layer and the distal portion of the TSV tips.
• a Ti or Ta comprising layer of about 1 kA to 3 kA may be used as a barrier layer.
• the metal caps can include a second metal layer exclusive of solder that is different from the first metal layer.
• the combined thickness of the first and second metal layers can be 1 ⁇ to 10 ⁇ .
• One metal cap arrangement comprises Ni/Au.
• the substrate (e.g., a wafer) provided in step 101 can also include a first dielectric layer on the bottomside of the substrate between the TSV tips that is generally formed and etched back to expose the TSV tips before the metal caps are formed.
• a first dielectric layer on the bottomside of the substrate between the TSV tips that is generally formed and etched back to expose the TSV tips before the metal caps are formed.
• the TSV tips extend out about 5 ⁇ from the bottomside surface of TSV die
• the metal caps 240 add about 5 ⁇ in height to the TSV tips
• the first dielectric layer is about 3 ⁇ thick.
• the metal capped TSV tips protrude about 7 ⁇ above the first dielectric layer.
• Step 102 comprises forming or applying a protective layer on the bottomside of the TSV die including between and over the protruding TSV tips.
• the protective layer can planarize over protruding TSV tips to provide a substantially planar surface.
• a substantially planar surface has a maximum height range of 1 ⁇ .
• the protective layer is a blanket layer that is spun on to cover over the top of existing topography, including over the metal capped TSV tips and the first dielectric layer between the TSV tips described above.
• the protective layer is generally a dielectric material.
• dielectric materials for the protective layer include polymers such as benzocyclobutene (BCB), polybenzoxazole (PBO), and some polyimides (PI) that are formed from photosensitive precursor materials.
• the protective layer can comprise the same dielectric material as is used for the first dielectric layer so that if desired, the protective layer can be left on the substrate (e.g., wafer) after exposing the TSV tips by partial etchback as described below in step 105.
• the method can include optionally curing the protective layer in the case of curable protective layer materials to increase the stiffness of the protective layer before bonding (step 104 described below).
• the protective layer comprises a metal tape, such as an aluminum tape.
• a metal tape of suitable material and thickness e.g., a 15 to 20 ⁇ thick aluminum tape
• Step 103 comprises singulating the substrate (e.g., wafer) into a plurality of singulated TSV die. Conventional sawing techniques may be used.
• Step 104 comprises bonding the singulated TSV die with the topside down onto a workpiece surface with the bottomside up and in contact with a bond head.
• the workpiece can comprise an organic substrate in one embodiment, such as a substrate strip.
• the bonding can comprise TC bonding that can involve the use of pressure (e.g., 40 to 80 N/cm 2 ) applied by a bond head.
• pressure e.g. 40 to 80 N/cm 2
• the protective layer being on top of the TSV tips prevents the bond head from making direct contact to the protruding TSV tips such that magnitude of the pressure exerted on TSV tips is reduced by "spreading" bond head contact area to entire die bottomside of the TSV die instead of just the area of the TSV tips.
• Step 105 comprises partially removing or completely removing the protective layer to expose the TSV tips for subsequent bonding. Dry etching or ashing can be used for this step. Wet etch processing may also be suitable. If etching is used in step 105 the etch is engineered to be highly selective so that the underfill that is typically between the TSV die and the workpiece (e.g., organic substrate) is not damaged at its exposed periphery during step 105. In the embodiment for which the protective layer comprises a metal tape, the metal tape can be completely removed by a suitable adhesive removal process that does not degrade the underfill between the TSV die and the workpiece.
• method 100 is applicable to any TC bonder apparatus as the disclosed protective layer is applied to the TSV die and not to the bond head. Moreover, the spreading of the bond head pressure, provided by disclosed protective layer, reduces TC bonding-induced warpage of the TSV die, and can eliminate or at least significantly reduce cracking of the TSV's dielectric sleeve.
• FIG. 2 is a simplified cross-sectional depiction of a TSV die 200 comprising a plurality of TSVs 216 that include protruding TSV tips 217 having a protective layer 231(b) over a first dielectric layer 231(a) between and over the protruding TSV tips 217 on the bottomside 210 of the TSV die, according to an example embodiment.
• the protruding TSV tips 217 are shown having a metal cap 240 on the distal tip end 217(a).
• TSV die 200 comprises a substrate 205 including a topside surface 207 including active circuitry 209 and a bottomside surface 210.
• the active circuitry 209 on TSV die 200 is configured to provide an IC circuit function, such as a logic function, for example.
• the connection to active circuitry 209 is optional, since the TSV may simply provide a through-die connection through the substrate 205 without connecting to active circuitry 209 (e.g., to a device attached to bottomside 210 of TSV die 200).
• the TSVs 216 comprise an outer dielectric sleeve 221 and an inner metal core
• the TSVs 216 extends from the topside surface 207 to protruding TSV tip 217 emerging from the bottomside surface 210.
• the protective layer 231(b) is shown as a planarizing layer over protruding TSV tips 217.
• the TSV tip ends 217(a) extend out about 5 ⁇ from the bottomside surface 210
• the metal caps 240 add about 5 ⁇ in height to the TSV tips 217
• the protective layer 231(b) thickness is in the range from 10 to 15 ⁇ with first dielectric layer 231(a) being about 3 ⁇ thick.
• the protective layer 231(b) is about 3 to 8 ⁇ above the metal caps 240 on the TSV tips 217.
• FIG. 3 shows an example protected stacked die precursor 300 comprising the
• TSV die 200 shown in FIG. 2 bonded to a workpiece shown as substrate 330, according to an example embodiment.
• the protected stacked die precursor 300 having TSV tips encapsulated enables shipping of such units with a reduced risk of damaging the TSV tips.
• TSV die 200 is bonded topside 207 down to pads 337 on substrate 330 that is shown as a package substrate (e.g., organic substrate).
• the package substrate can comprise a ceramic or an organic substrate, that may be thin (e.g., ⁇ 350 ⁇ ).
• the package substrate is generally provided as a substrate panel (or strip).
• the assembling can comprise TC bonding.
• the TSV die 200 is shown including pillars 325 that are capped with solder 326. Underfill 328 is shown between the TSV die 200 and the package substrate 330.
• the package substrate 330 is shown including a ball grid array (BGA) comprising a plurality of solder balls 331.
• BGA ball grid array
• Protected stacked die precursor 300 shown in FIG. 3 can be used to form a stacked die device (e.g., system in package (SIP)) including TC bonding the stacked die precursor 300 to a workpiece.
• the protective layer 231(b) on the bottomside 210 of the TSV die 200 is partially or completely removed to expose the TSV tips 217 for subsequent bonding.
• a top IC die can be assembled onto the exposed TSV tips 217 of the TSV die 200.
• the top IC die comprises a memory die
• the TSV die 200 comprises a logic die.
• the top die comprises an IC die stack comprising a plurality of stacked IC die that are bonded to one another.
• the reduced warpage of the TSV die 200 following TC bonding provided by the protective layer described above can also reduce failures with top die assembly onto the protruding TSV tips due to loss of co-planarity. Overmolding can follow, and then singulation to form a plurality of stacked die devices.
• method can further comprise attaching a BGA of solder balls to the bottom of the workpiece before singulation.
• the active circuitry formed on the substrate having a semiconductor surface comprises circuit elements that may generally include transistors, diodes, capacitors, and resistors, as well as signal lines and other electrical conductors that interconnect the various circuit elements to provide an IC circuit function.
• provide an IC circuit function refers to circuit functions from ICs, that for example may include an application specific integrated circuit (ASIC), a digital signal processor, a radio frequency chip, a memory, a microcontroller and a system-on-a-chip or a combination thereof.
• ASIC application specific integrated circuit
• Disclosed embodiments can be integrated into a variety of process flows to form a variety of devices and related products.
• the semiconductor substrates may include various elements therein and/or layers thereon.
• barrier layers can include barrier layers, other dielectric layers, device structures, active elements and passive elements, including source regions, drain regions, bit lines, bases, emitters, collectors, conductive lines, conductive vias, etc.
• disclosed embodiments can be used in a variety of semiconductor device fabrication processes including bipolar, CMOS, BiCMOS and MEMS processes.

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• 2011
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