WO2012137241A1 - Moteur linéaire - Google Patents

Moteur linéaire Download PDF

Info

Publication number
WO2012137241A1
WO2012137241A1 PCT/JP2011/001996 JP2011001996W WO2012137241A1 WO 2012137241 A1 WO2012137241 A1 WO 2012137241A1 JP 2011001996 W JP2011001996 W JP 2011001996W WO 2012137241 A1 WO2012137241 A1 WO 2012137241A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear motor
section
fixed
bearing
sliding
Prior art date
Application number
PCT/JP2011/001996
Other languages
English (en)
Japanese (ja)
Inventor
陽介 高石
興起 仲
小林　学
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to KR1020137026072A priority Critical patent/KR101374464B1/ko
Priority to PCT/JP2011/001996 priority patent/WO2012137241A1/fr
Priority to JP2013508620A priority patent/JP5306558B2/ja
Priority to CN201180069957.6A priority patent/CN103460575B/zh
Priority to TW100112932A priority patent/TWI426684B/zh
Publication of WO2012137241A1 publication Critical patent/WO2012137241A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2207/00—Specific aspects not provided for in the other groups of this subclass relating to arrangements for handling mechanical energy
    • H02K2207/03—Tubular motors, i.e. rotary motors mounted inside a tube, e.g. for blinds
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings

Definitions

  • the present invention relates to a linear motor including a slide bearing disposed between a movable portion and a fixed portion, and a sliding member disposed eccentrically from the central axis of the fixed portion.
  • the shaft member (first sleeve) has N-pole and S-pole permanent magnets alternately formed along the axial direction in the interior thereof, and further improves the thrust between the permanent magnets.
  • a structure provided with a magnetic body (yoke) is employed.
  • the coil surrounding the outer periphery of the shaft member is provided in the movable part, and the shaft member moves linearly relative to the movable part in the axial direction of the shaft member inside the movable part located on the outer peripheral side of the shaft member.
  • a bearing for guiding the movement is provided.
  • a linear motor having such a structure has a structure in which a cylindrical or quadrangular bearing and a movable part are arranged around a shaft member, and a minute gap is provided between the bearing and the shaft member to facilitate relative motion. (For example, refer to Patent Document 1).
  • the conventional linear motor is configured as described above, rattling and fluctuation occur between the bearing and the shaft member by a minute gap provided between the bearing and the shaft member.
  • a shaft type linear motor in which a shaft that transmits thrust to the machine is provided in the movable part, there is a problem in that the positioning accuracy of the shaft tip part is lowered.
  • the present invention has been made to solve the above-described problems, and its purpose is to eliminate rattling and fluctuation between the bearing and the shaft member. For example, the positioning accuracy of the shaft tip portion of the shaft type linear motor Is to make it higher.
  • the linear motor includes a fixed portion and a movable portion that is located inside the fixed portion and is provided so as to be relatively displaceable in the axial direction with respect to the fixed portion.
  • a magnet part made up of a plurality of permanent magnets laminated in the axial direction, and a first sliding part made of a magnetic material that is arranged at one end of the magnet part and slides and guides the inside of the fixed part in the axial direction.
  • the fixed portion is provided inside the fixed portion with a first bearing made of a non-magnetic material that is in contact with the inner surface of the fixed portion that slidably supports the first sliding portion, and provides a magnetic flux to its inner space.
  • the positioning accuracy of the shaft tip portion of the shaft type linear motor can be increased, and the shaft type linear motor can be applied to precision electronic devices such as surface mounters and board inspection machines.
  • FIG. 1 is a structural diagram of a plain bearing of a shaft type linear motor showing Embodiment 1 of the present invention. It is sectional drawing of the shaft type linear motor which shows Example 2 of this invention. It is sectional drawing of the shaft type linear motor which shows Example 3 of this invention. It is a block diagram of the plain bearing of the shaft type linear motor which shows Example 4 of this invention. It is sectional drawing of the shaft type linear motor which shows Example 5 of this invention. It is sectional drawing of the shaft type linear motor which shows Example 6 of this invention.
  • Example 1 is a cross-sectional view of a shaft type linear motor showing Embodiment 1 of the present invention
  • FIG. 2 is an exploded perspective view of the shaft type linear motor showing Embodiment 1 of the present invention
  • reference numeral 1 denotes a fixed portion of the shaft type linear motor
  • 2 denotes a movable portion of the shaft type linear motor, which can be displaced relative to the fixed portion 1 in the axial direction
  • 31 is a slide bearing that functions as a first bearing and has an L-shaped cross section along the axial direction
  • 51 is a power supply lead wire
  • 11 is a plurality for generating a magnetic flux by causing a current to flow from the power supply lead wire 51.
  • a U-shaped lower frame, 15 is a base for increasing mechanical rigidity
  • 16 is a bearing that supports a shaft
  • 17 is a bracket that holds the bearing
  • 18 is a cover that prevents foreign matter from entering
  • 41 is a position.
  • the fixed portion 1 is a slide bearing 31, a coil 11, a bobbin 12, an upper frame 13, a lower frame 14, a base 15, a bearing 16, a bracket 17, a cover 18, and a position detector 41. It is made.
  • 32 is a sliding member that slides and guides the surface of the slide bearing 31 that functions as a first sliding portion
  • 21 is a magnet portion that generates thrust by interaction with the magnetic flux generated by the plurality of coils 11.
  • a plurality of permanent magnets stacked in order to achieve this. 22 is made of a magnetic material or a non-magnetic material, and is arranged between the plurality of permanent magnets 21 so that the N pole and S pole magnetic poles of the plurality of laminated permanent magnets 21 are alternately formed in the axial direction.
  • the spacer 23 is a shaft coupling member
  • 24 is a shaft (shaft) for transmitting the generated thrust to the machine
  • the movable part 2 includes a sliding member 32, a permanent magnet 21, a spacer 22, and a shaft coupling member 23.
  • the movable part 2 is connected to the end of the shaft 24.
  • the other end of the shaft 24 protrudes outside the fixed part 1 and is used for position detection.
  • the central axis of the plurality of permanent magnets 21, the central axis of the spacer 22, and the central axis of the shaft coupling member 23 coincide with the central axis of the shaft 24.
  • the movable part 2 is disposed inside the fixed part 1 and has a structure movable in the Z direction in FIG.
  • the plurality of coils 11 and the plurality of bobbins 12 are arranged concentrically outside the plurality of permanent magnets 21, and the central axes of the plurality of coils 11 and the central axes of the plurality of bobbins 12 are Each coincides with the central axis of the shaft 24.
  • Reference numeral 42 denotes a scale
  • 25 denotes a shaft tip of the shaft 24
  • 26 denotes a scale coupling member
  • 52 denotes a position detector lead.
  • the scale 42 is coupled to the shaft distal end portion 25 by the scale coupling member 26, and has a structure that can move according to the movement of the shaft 24.
  • the scale 42 has optical or magnetic position information recorded therein, and the position detector 41 coupled to the fixed portion 1 detects the position of the shaft 24 in the Z direction in FIG. In addition, the position signal is transmitted from the position detector lead wire 52 to the control unit.
  • the A-A ′ cross section and the B-B ′ cross section are cross sections along the XY plane of the shaft type linear motor shown in FIG.
  • FIG. 3 is a configuration diagram of a control unit of the shaft type linear motor showing the first embodiment of the present invention.
  • 90 is a control unit
  • 100 is a shaft type linear motor.
  • 91 is a position control circuit
  • 92 is a speed control circuit
  • 93 is a current control circuit
  • 99 is a current detector.
  • a control unit 90 is a position control circuit 91, a speed control circuit 92, a current control circuit 93, and a current detector 99. Composed.
  • Position information detected by the scale 42 and the position detector 41 is fed back to the control unit 90 of the shaft type linear motor 100.
  • the position control circuit 91 performs position control by comparing the position feedback value from the position detector 41 with the command value, and the speed control circuit 92 differentiates the output value from the position control circuit 91 and the position feedback value.
  • the current control circuit 93 can perform thrust control by comparing the output value from the speed control circuit 92 and the current feedback value from the current detector 99, respectively.
  • FIG. 4 is a structural diagram of a plain bearing of a shaft type linear motor showing Embodiment 1 of the present invention.
  • 61 is a magnetic flux
  • 62a and 62b are magnetic attractive forces generated by the influence of the magnetic flux 61 produced by the permanent magnet 21.
  • the slide bearing 31 is made of resin (non-magnetic material), and has a L-shaped cross section along the axial direction as shown in the A-A 'cross section of FIG.
  • the sliding member 32 is, for example, an S50C material
  • the upper frame 13 and the lower frame 14 are, for example, SPCC materials, all of which are magnetic materials.
  • the sliding member 32 is not concentric with respect to the central axis of the inner space of the coil 11 arranged concentrically with respect to the central axis of the shaft 24, and is installed so as to be eccentric to the sliding bearing 31 side.
  • the gap between the sliding member 32 and the upper frame 13 and the gap between the sliding member 32 and the lower frame 14 are each on the side where the slide bearing 31 having an L-shaped cross section is interposed (A in FIG. 4).
  • -A 'cross section does not exist on the left side and bottom surface of the sliding member 32), and has a predetermined distance on the non-intervening side (on the AA' cross section in FIG. 4, the right side surface and top surface of the sliding member 32). Will exist.
  • the magnetic flux 61 is magnetic between the upper frame 13 that is a magnetic material and the permanent magnet 21, between both side surfaces of the U-shaped lower frame 14 that is a magnetic material, and the permanent magnet 21.
  • a cross section as a material is formed between the lower surface of the U-shaped lower frame 14 and the permanent magnet 21.
  • magnetic attractive forces 62a and 62b are generated between the sliding member 32, which is a magnetic material, and the upper frame 13 and the U-shaped lower frame 14, which are magnetic materials.
  • 32 is disposed in such a way that the lower frame 14 has an L-shaped slide bearing 31 on the side where the L-shaped slide bearing 31 is interposed.
  • the bias of the sliding member 32 causes the magnetic attraction force 62a to generate a slide having an L-shaped cross section. It acts strongly on the side where the bearing 31 is interposed (the left side surface and the lower surface of the sliding member 32 in the section AA ′ in FIG. 4), and the magnetic attractive force 62b is not on the side where the L-shaped slide bearing 31 is not interposed (FIG. In the section AA ′ of FIG. 4, the sliding member 32 has almost no action on the right side surface and the upper surface.
  • the sliding member 32 and the sliding bearing 31 having an L-shaped cross section are always in contact with each other with a constant magnetic attractive force 62a.
  • the linear motor configuration does not require any processing.
  • the positioning accuracy of the shaft tip portion of the shaft type linear motor can be increased.
  • a motor can be applied. For example, it is possible to increase the density of components mounted on an electronic substrate.
  • Example 2 In the first embodiment of the present invention, the case where only one end portion of the movable portion 2 is the slide bearing 31 has been described. However, as shown in FIG. 5, both end portions of the movable portion 2 are connected to the slide bearing 31a as the first bearing.
  • the sliding bearing 31b as the second bearing may be used, and the same effect can be obtained by such a configuration.
  • a sliding member 32a Corresponding to the sliding bearings 31a, 31b at both ends of the movable part 2, on both sides sliding with the sliding bearings 31a, 31b of the fixed part 1, a sliding member 32a, which is a first sliding part, A sliding member 32b, which is the second sliding portion, is installed.
  • Example 3 In the first and second embodiments of the present invention, the case where the positional accuracy in the X and Y directions is ensured by using two surfaces of the L-shaped slide bearing 31 is described.
  • the slide bearing 35 In the case of only one direction, for example, only the X direction, as shown in FIG. 6, the slide bearing 35 may be formed in a flat plate shape parallel to the lower surface of the lower frame 14 along the axial direction. In this case, the same effects as those of the first and second embodiments can be obtained.
  • FIG. 7 is a structural diagram of a plain bearing of a shaft type linear motor showing Embodiment 4 of the present invention.
  • Reference numeral 71 denotes a first intermediate member, which is an intermediate member in FIG.
  • the slide bearing 31 is made of resin (non-magnetic material) and has an L-shaped cross section along the axial direction as shown in the AA ′ cross section of FIG. It is in contact.
  • the intermediate member 71 is, for example, a magnetic material such as an SPCC material, and has an L-shaped cross section along the axial direction as shown in the AA ′ cross section of FIG. And is in contact with the lower surface.
  • the sliding member 32 is, for example, an S50C material, and the upper frame 13 and the lower frame 14 are, for example, SPCC materials, all of which are magnetic materials.
  • the sliding member 32 is installed so as to coincide with the central axis of the inner space of the coil 11 arranged concentrically with respect to the central axis of the shaft 24.
  • the gap between the sliding member 32 and the upper frame 13 and the gap between the sliding member 32 and the lower frame 14 are the sides where the slide bearing 31 and the intermediate member 71 having an L-shaped cross section are interposed ( In the AA ′ cross section of FIG. 7, it does not exist on the left side and bottom surface of the sliding member 32, and on the non-intervening side (the right side surface and top surface of the sliding member 32 in the AA ′ cross section of FIG. 7). It exists with a predetermined distance.
  • the magnetic flux 61 is magnetic between the upper frame 13, which is a magnetic material, and the permanent magnet 21, and between the right side surface of the U-shaped lower frame 14, which is a magnetic material, and the permanent magnet 21.
  • a cross section that is a material is formed between the lower surface of the L-shaped intermediate member 71 and the permanent magnet 21, and a cross section that is a magnetic material is formed between the right side surface of the L-shaped intermediate member 71 and the permanent magnet 21.
  • magnetic attractive forces 62a and 62b are formed between the sliding member 32, which is a magnetic material, the upper frame 13, which is a magnetic material, the U-shaped lower frame 14, and the L-shaped intermediate member 71.
  • the magnetic attraction force 62a is on the side where the L-shaped slide bearing 31 and the intermediate member 71 are interposed (on the left side surface and the lower surface of the sliding member 32 in the AA 'cross section in FIG. 7). It acts strongly, and the magnetic attractive force 62b hardly acts on the side where the L-shaped slide bearing 31 and the intermediate member 71 are not interposed (the right side surface and the top surface of the sliding member 32 in the AA ′ cross section in FIG. 7). become.
  • the sliding member 32 and the sliding bearing 31 having an L-shaped cross section are always in contact with each other with a constant magnetic attractive force 62a.
  • the linear motor configuration does not require any processing.
  • the positioning accuracy of the shaft tip portion of the shaft-type linear motor can be increased.
  • a motor can be applied. For example, it is possible to increase the density of components mounted on an electronic substrate.
  • Example 5 In the fourth embodiment of the present invention, the case where the intermediate member 71 is applied only to one end of the movable portion 2 has been described. However, as shown in FIG. 8, the intermediate member that is the first intermediate member at both ends of the movable portion 2. 71a and the intermediate member 71b which is a 2nd intermediate member may be applied, and the same effect can be acquired also by such a structure.
  • Example 6 In the fourth embodiment and the fifth embodiment of the present invention, the case where the positional accuracy in the X and Y directions is secured using the two surfaces of the L-shaped intermediate member 71 is described.
  • the intermediate member 75 may be formed in a flat plate shape parallel to the lower surface of the lower frame 14 along the axial direction as shown in FIG. In this case, the same effects as those of the fourth and fifth embodiments can be obtained.
  • the present invention is not limited to this, and the same effect can be obtained when applied to other linear motors. Obtainable.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)

Abstract

L'invention porte sur un moteur linéaire. Les moteurs linéaires classiques posaient des problèmes en ce sens qu'il se formait du jeu et de la fluctuation entre la portée et une barre en fonction de la grandeur d'une étroite fente entre la portée et la barre et en ce sens que, par suite, on constatait une détérioration de la précision dans le positionnement du segment de pointe avant de la barre qui transmet une force de poussée à une machine. Pour obtenir un moteur linéaire qui puisse résoudre ces problèmes, qui puisse être débarrassé du jeu et de la fluctuation entre la portée et la barre et qui puisse améliorer la précision du positionnement d'un segment mobile, le moteur linéaire a été réalisé de sorte qu'il présente un segment ancré (1) et un segment mobile (2). Le segment mobile (2) comporte : des aimants permanents (21) ; et un élément coulissant (32) comprenant une matière magnétique, qui est disposé à un segment de pointe avant des aimants permanents (21) et qui coulisse dans le segment ancré (1) dans la direction de l'axe. Le segment ancré (1) comprend : une portée lisse (31) qui est destinée à entrer en contact avec la face intérieure du segment ancré (1), et qui supporte l'élément coulissant (32) dans un état propre au coulissement ; et une bobine (11) qui est formée dans le segment ancré (1) et dans l'espace intérieur de laquelle le segment coulissant (2) se déplace par rapport à cette bobine. L'axe central de l'élément coulissant (32) est disposé de façon à être excentré par rapport au côté de la portée lisse (31) relativement à l'axe central de la section transversale de l'espace intérieur formé par la bobine (11). Ledit élément coulissant (32) est conçu pour entrer en contact avec la portée lisse (31).
PCT/JP2011/001996 2011-04-04 2011-04-04 Moteur linéaire WO2012137241A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020137026072A KR101374464B1 (ko) 2011-04-04 2011-04-04 리니어 모터
PCT/JP2011/001996 WO2012137241A1 (fr) 2011-04-04 2011-04-04 Moteur linéaire
JP2013508620A JP5306558B2 (ja) 2011-04-04 2011-04-04 リニアモータ
CN201180069957.6A CN103460575B (zh) 2011-04-04 2011-04-04 直线电动机
TW100112932A TWI426684B (zh) 2011-04-04 2011-04-14 線型馬達

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/001996 WO2012137241A1 (fr) 2011-04-04 2011-04-04 Moteur linéaire

Publications (1)

Publication Number Publication Date
WO2012137241A1 true WO2012137241A1 (fr) 2012-10-11

Family

ID=46968692

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/001996 WO2012137241A1 (fr) 2011-04-04 2011-04-04 Moteur linéaire

Country Status (5)

Country Link
JP (1) JP5306558B2 (fr)
KR (1) KR101374464B1 (fr)
CN (1) CN103460575B (fr)
TW (1) TWI426684B (fr)
WO (1) WO2012137241A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014167720A1 (fr) * 2013-04-12 2014-10-16 三菱電機株式会社 Élément mobile et moteur linéaire

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07274475A (ja) * 1994-03-28 1995-10-20 Sofutoronikusu Kk リニアアクチュエータ
JPH09182408A (ja) * 1995-12-27 1997-07-11 Hitachi Metals Ltd リニアモータ
JPH09261942A (ja) * 1996-03-26 1997-10-03 Sharp Corp リニアパルスモータ
JP2010288423A (ja) * 2009-06-15 2010-12-24 Kayaba Ind Co Ltd リニアアクチュエータ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3820169B2 (ja) * 2002-03-20 2006-09-13 三菱電機株式会社 リニアモータおよびその製造方法
JP2006280125A (ja) * 2005-03-30 2006-10-12 Thk Co Ltd リニアモータアクチュエータ
CN101741215B (zh) * 2008-11-20 2012-07-04 中国科学院宁波材料技术与工程研究所 一种永磁同步直线电机

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07274475A (ja) * 1994-03-28 1995-10-20 Sofutoronikusu Kk リニアアクチュエータ
JPH09182408A (ja) * 1995-12-27 1997-07-11 Hitachi Metals Ltd リニアモータ
JPH09261942A (ja) * 1996-03-26 1997-10-03 Sharp Corp リニアパルスモータ
JP2010288423A (ja) * 2009-06-15 2010-12-24 Kayaba Ind Co Ltd リニアアクチュエータ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014167720A1 (fr) * 2013-04-12 2014-10-16 三菱電機株式会社 Élément mobile et moteur linéaire
TWI500238B (zh) * 2013-04-12 2015-09-11 Mitsubishi Electric Corp 可動子及線性馬達
JP5872108B2 (ja) * 2013-04-12 2016-03-01 三菱電機株式会社 可動子およびリニアモータ

Also Published As

Publication number Publication date
JPWO2012137241A1 (ja) 2014-07-28
TWI426684B (zh) 2014-02-11
TW201242222A (en) 2012-10-16
JP5306558B2 (ja) 2013-10-02
CN103460575B (zh) 2015-03-25
CN103460575A (zh) 2013-12-18
KR20130115400A (ko) 2013-10-21
KR101374464B1 (ko) 2014-03-17

Similar Documents

Publication Publication Date Title
JP4702629B2 (ja) ムービングマグネット形リニアスライダおよびそれを用いた工作機械
US20150137627A1 (en) Vibration actuator and mobile information terminal
TWI343164B (en) Voice coil motor
JPWO2007026566A1 (ja) リニアモータ
JP2001352747A (ja) リニアモータおよびこれを駆動源とするプレス成形装置
JP2007325389A (ja) 可動マグネット型リニアモータを内蔵したスライド装置
JP2565783Y2 (ja) スライド変位装置
JP2007325389A5 (fr)
JP2014506445A (ja) リニアモータを有するピペット装置
JP2006238540A (ja) リニアモータを内蔵したスライド装置
JP5306558B2 (ja) リニアモータ
WO2014041589A1 (fr) Moteur à courant continu linéaire
JP5372298B2 (ja) リニアモータ
JP2016144257A (ja) 磁石装置
JP2011193703A (ja) リニアモータ対、移動ステージ、及び電子顕微鏡
KR20140103226A (ko) 햅틱 액츄에이터
JP2012060756A (ja) リニアモータ
JP2021032654A (ja) 運動検出装置および金型装置
JP2015097456A (ja) 可動コイル型リニアモータを内蔵した立軸用スライド装置
JP2005184877A (ja) 平面アクチュエータ可動子部およびこれを備えた平面アクチュエータ
JP2016019315A (ja) リニアモータ、及びそれを用いた駆動システム
JP2017093222A (ja) コアレスリニアモータ
JP2016140191A (ja) 可動コイル型リニアモータを内蔵した立軸用スライド装置
JP5669446B2 (ja) 移動体の駆動機構
JP2012175850A (ja) 円筒リニアモータ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11862983

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2013508620

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20137026072

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11862983

Country of ref document: EP

Kind code of ref document: A1