WO2012091344A3 - 비전검사장치 - Google Patents

비전검사장치 Download PDF

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Publication number
WO2012091344A3
WO2012091344A3 PCT/KR2011/009851 KR2011009851W WO2012091344A3 WO 2012091344 A3 WO2012091344 A3 WO 2012091344A3 KR 2011009851 W KR2011009851 W KR 2011009851W WO 2012091344 A3 WO2012091344 A3 WO 2012091344A3
Authority
WO
WIPO (PCT)
Prior art keywords
camera
image
inspection apparatus
visual inspection
lateral
Prior art date
Application number
PCT/KR2011/009851
Other languages
English (en)
French (fr)
Other versions
WO2012091344A2 (ko
Inventor
이현율
강근형
박태광
Original Assignee
주식회사 미르기술
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 미르기술 filed Critical 주식회사 미르기술
Priority to JP2013547309A priority Critical patent/JP2014503824A/ja
Priority to EP11852270.5A priority patent/EP2660586A2/en
Priority to US13/997,441 priority patent/US20130301904A1/en
Priority to CN2011800631766A priority patent/CN103430013A/zh
Publication of WO2012091344A2 publication Critical patent/WO2012091344A2/ko
Publication of WO2012091344A3 publication Critical patent/WO2012091344A3/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2504—Calibration devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0815—Controlling of component placement on the substrate during or after manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Input (AREA)
  • Image Processing (AREA)

Abstract

본 발명에 따른 비전검사장치는, 검사대상물을 카메라로 촬영하여 양호 또는 불량을 판별하기 위한 비전검사장치로서, 검사대상물을 안착시키는 스테이지부와, 렌즈와 이미지감지부를 포함하여 구성되되 검사대상물의 영상을 촬영하기 위한 카메라부와, 상기 검사대상물에 조명을 제공하기 위한 조명부와, 상기 카메라부에서 촬영된 영상을 판독하여 상기 검사대상물의 양호 또는 불량을 판별하는 비전처리부를 포함하며, 상기 카메라부 중에서 검사대상물이 안착된 평면에 수직한 선에 대해 기울어져 설치되는 측부카메라 내의 이미지감지부는, 상기 검사대상물의 중심과 상기 측면카메라부 내의 카메라렌즈 중심을 잇는 선에 대해 미리 설정된 각도로 기울어져 설치된다. 본 발명에 의해, 분해능을 높이면서도 검사대상물에 대한 광로차를 보정함으로써, 검사대상물에 대한 정확한 영상의 판독이 가능하다. 또한, 장치의 크기 변함이 없이도 검사대상물의 뚜렷한 측면 영상을 확보할 수 있다.
PCT/KR2011/009851 2010-12-30 2011-12-20 비전검사장치 WO2012091344A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013547309A JP2014503824A (ja) 2010-12-30 2011-12-20 視覚検査装置
EP11852270.5A EP2660586A2 (en) 2010-12-30 2011-12-20 Visual inspection apparatus
US13/997,441 US20130301904A1 (en) 2010-12-30 2011-12-20 Visual inspection apparatus
CN2011800631766A CN103430013A (zh) 2010-12-30 2011-12-20 目视检查装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100138460A KR101240947B1 (ko) 2010-12-30 2010-12-30 비전검사장치
KR10-2010-0138460 2010-12-30

Publications (2)

Publication Number Publication Date
WO2012091344A2 WO2012091344A2 (ko) 2012-07-05
WO2012091344A3 true WO2012091344A3 (ko) 2012-09-07

Family

ID=46383639

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009851 WO2012091344A2 (ko) 2010-12-30 2011-12-20 비전검사장치

Country Status (6)

Country Link
US (1) US20130301904A1 (ko)
EP (1) EP2660586A2 (ko)
JP (1) JP2014503824A (ko)
KR (1) KR101240947B1 (ko)
CN (1) CN103430013A (ko)
WO (1) WO2012091344A2 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2781912B1 (en) * 2013-03-19 2021-05-05 Hennecke Systems GmbH Inspection system
CN112837266A (zh) 2014-11-24 2021-05-25 基托夫系统有限公司 自动检查
ITUB20159510A1 (it) * 2015-12-22 2017-06-22 Sacmi Apparato di ispezione ottica di oggetti
US10600174B2 (en) 2015-12-29 2020-03-24 Test Research, Inc. Optical inspection apparatus
CN106595516B (zh) * 2016-11-29 2019-11-05 江苏瑞伯特视觉科技股份有限公司 一种基于定焦镜头的大景深结构光测量方法
US11384946B2 (en) * 2017-08-28 2022-07-12 Daikin Industries, Ltd. Air-conditioning device
CN111033135A (zh) * 2017-08-28 2020-04-17 大金工业株式会社 空气处理装置
KR102091014B1 (ko) * 2017-12-27 2020-04-28 선문대학교 산학협력단 머신 비전 장치 및 머신 비전을 이용한 제품 검사 방법
CN108107614A (zh) * 2017-12-28 2018-06-01 深圳市华星光电半导体显示技术有限公司 显示检查方法及显示检查装置
US20200160089A1 (en) * 2018-11-15 2020-05-21 International Business Machines Corporation Visual pattern recognition with selective illumination for assisted inspection
JPWO2023012966A1 (ko) * 2021-08-05 2023-02-09
KR102520888B1 (ko) 2022-07-12 2023-04-14 배종옥 인공지능 입체적 비전검사 시스템
KR20240059078A (ko) 2022-10-27 2024-05-07 주식회사 코드기어 인공지능 기반의 불량품 판별 및 분류 자동화 시스템

Citations (4)

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JP2003130801A (ja) * 2001-10-22 2003-05-08 Ushio Inc 蛍光体の検査方法および装置
JP2007333591A (ja) * 2006-06-15 2007-12-27 Daiichi Jitsugyo Viswill Co Ltd 検査用照明装置

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KR100378490B1 (ko) * 2001-04-06 2003-03-29 삼성테크윈 주식회사 씨씨디 카메라의 조명장치
JP2003130801A (ja) * 2001-10-22 2003-05-08 Ushio Inc 蛍光体の検査方法および装置
JP2007333591A (ja) * 2006-06-15 2007-12-27 Daiichi Jitsugyo Viswill Co Ltd 検査用照明装置

Also Published As

Publication number Publication date
WO2012091344A2 (ko) 2012-07-05
US20130301904A1 (en) 2013-11-14
CN103430013A (zh) 2013-12-04
KR101240947B1 (ko) 2013-03-18
EP2660586A2 (en) 2013-11-06
KR20120076761A (ko) 2012-07-10
JP2014503824A (ja) 2014-02-13

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