WO2012076259A1 - Halbleiterbauelement mit erhöhter stabilität gegenüber thermomechanischen einflüssen sowie verfahren zur kontaktierung eines halbleiters - Google Patents

Halbleiterbauelement mit erhöhter stabilität gegenüber thermomechanischen einflüssen sowie verfahren zur kontaktierung eines halbleiters Download PDF

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Publication number
WO2012076259A1
WO2012076259A1 PCT/EP2011/069280 EP2011069280W WO2012076259A1 WO 2012076259 A1 WO2012076259 A1 WO 2012076259A1 EP 2011069280 W EP2011069280 W EP 2011069280W WO 2012076259 A1 WO2012076259 A1 WO 2012076259A1
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Prior art keywords
semiconductor
conductive layer
electrically conductive
wiring
bonding
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Application number
PCT/EP2011/069280
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English (en)
French (fr)
Inventor
Gerhard Reber
Thomas Kaden
Michael Guenther
Original Assignee
Robert Bosch Gmbh
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Publication date
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Publication of WO2012076259A1 publication Critical patent/WO2012076259A1/de

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Definitions

  • the present invention relates to a semiconductor device in which the
  • Surface of a semiconductor is contacted by means of a wiring, and a method for contacting a semiconductor.
  • Semiconductors are mounted directly on a circuit carrier for applications with limited lateral space to map electrical functionality.
  • the assembly is usually done by soldering or gluing.
  • the wire bonding or ribbon bonding technique is usually used for contacting the surface of the semiconductor, such as diodes, MOSFET (metal oxide semiconductor field-effect transistor), IGBT (insulated-gate bipolar transistor).
  • MOSFET metal oxide semiconductor field-effect transistor
  • IGBT insulated-gate bipolar transistor
  • a bonded connection between the top of the semiconductor and a wire or ribbon, for example made of aluminum, is produced by means of ultrasound-assisted welding.
  • the end of the wire or ribbon is in turn connected to the circuit carrier at a second joint to achieve the same wiring level.
  • the robustness of electrical circuits is tested by reliability tests.
  • a typical and life-limiting failure pattern here is the failure of the junction of wire or ribbon and semiconductor.
  • the thin metallization on the semiconductors leads to very high current densities in the metallization itself and at the junction of chip metallization and bonding wire.
  • a semiconductor device which, compared to the prior art, has an increased stability of the
  • the semiconductor device in which the surface of the semiconductor is contacted by means of a wiring, between the surface of the semiconductor and the wiring, an electrically conductive layer whose thermal expansion coefficient lies between that of the semiconductor and the material of the wiring.
  • the wiring is done by means of bonding wire or ribbon.
  • the semiconductor device has a semiconductor, which is usually arranged and contacted on an electrical circuit carrier, for example a DCB substrate (direct bonded copper), a stamped grid or a PCB (Printed Circuit Board), wherein a conventional joining layer Can be used.
  • an electrical circuit carrier for example a DCB substrate (direct bonded copper), a stamped grid or a PCB (Printed Circuit Board), wherein a conventional joining layer Can be used.
  • a joining layer solder, a conductive adhesive or a sintered layer can be provided.
  • Semiconductors in the semiconductor devices according to the invention are preferably power semiconductors for controlling and switching high electrical currents and voltages, for example diodes, MOSFETs, IGBTs or the like, since in this case local resistance increases in the event of defective contacts could advantageously be reliably avoided, which otherwise would easily lead to failures at high currents ,
  • the invention configured contacting of the semiconductor using an electrically conductive layer.
  • the material for the electrically conductive layer it should preferably be noted that it has a surface on which conventional joining methods can be used, does not have very high rigidity and can be applied by conventional placement processes.
  • the electrically conductive layer preferably consists of a metal foil with adapted thermal expansion behavior.
  • Suitable metals and their coefficients of expansion are, for example:
  • Copper and gold are preferred according to the invention. It is also possible to use suitable alloys of corresponding metals.
  • the metal foil may also consist of several layers or foils of different metals.
  • MMCs Metal Matrix Composite
  • MMCs Metal Matrix Composite
  • the electrically conductive layer consists of a copper foil, which is surface-finished with a noble metal, preferably gold.
  • the thickness of the metal foil or the electrically conductive layer is to be selected as thin as possible, wherein it is preferred that the thickness of the metal foil corresponds approximately to the thickness of the semiconductor used in order to impress advantageously as small forces on the semiconductor.
  • the metal foil or the electrically conductive layer should preferably be burr-free or have a ridge on the side facing away from the semiconductor. This is ensured by choosing a suitable manufacturing method for the electrically conductive layer.
  • this metal foil or the electrically conductive layer should be selected to be slightly smaller than that of the semiconductor, but at least partially cover the active areas.
  • the metal foil can advantageously be deposited on the semiconductor by conventional placement processes.
  • additional joining material or a bonding layer may be provided between the semiconductor and the conductive layer or metal foil.
  • a joining layer solder, a conductive adhesive or a sintered layer can be used, wherein the surface of the metal foil can be coated according to the requirements of the joining processes.
  • the electrically conductive layer is the same or alternative by conventional bonding techniques and wiring materials Circuit board level contacted, for example by wire bonding,
  • Ribbon bonding or sticking, soldering, bonding a metal strip or a metal mesh, with wire bonding or ribbon bonding is preferred.
  • Wiring materials are usually metallic.
  • the metal foil can be made smaller, for example, at a gate terminal on the edge of the semiconductor, or have a hole, for example, when the gate terminal is located in the center of the semiconductor.
  • the metal foil can also have one or more contacts, for example in the form of an extension, in which, for example, a measuring current can be tapped or the load current can be contacted further in another way.
  • a method for contacting a semiconductor, preferably by wire bonding or ribbon ground, in which, prior to wiring between the surface of the semiconductor and the bonding wire or ribbon, an electrically conductive layer, preferably a metal foil, is arranged whose thermal expansion coefficient lies between that of the Semiconductor and the bonding wire or ribbon lies.
  • the semiconductor is usually arranged on a circuit carrier, wherein joining material can be arranged between the semiconductor and the circuit carrier and / or a bonding layer can be formed.
  • joining material is arranged between the electrically conductive layer and the semiconductor and / or a bonding layer is formed.
  • Semiconductor device also the process.
  • Figure 1 is a side view of a detail of an inventive
  • Figure 1 discloses a arranged on a circuit substrate 10 semiconductor 1 1, which is partially covered by a metal foil 12. Between the
  • Circuit substrate 10 and the semiconductor 1 1 is a bonding layer 13 is provided, through which the semiconductor 11 is fixed or contacted with the circuit substrate 10. Also located between the semiconductor 11 and the metal foil 12, a further bonding layer 14 for electrically conductive fixing of the metal foil 12 on the semiconductor 1 1. A wiring to the circuit substrate 10 on the side facing away from the circuit carrier 10 of the semiconductor 1 1 is connected by a bonding wire 15th given, which connects the metal foil 12 with the circuit substrate 10 electrically conductive.

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
  • Wire Bonding (AREA)

Abstract

Es wird ein Halbleiterbauelement beschrieben, bei dem die Oberfläche eines Halbleiters (11) mittels einer Verdrahtung (15) kontaktiert ist, wobei zwischen der Oberfläche des Halbleiters (11) und der Verdrahtung eine elektrisch leitfähige Schicht (12) angeordnet ist, deren thermischer Ausdehnungskoeffizient zwischen dem des Halbleiters (11) und dem des Materials der Verdrahtung liegt. Ferner wird ein Verfahren zur Kontaktierung eines Halbleiters (11) offenbart, bei dem auf der Oberfläche des Halbleiters (11) zumindest teilweise eine elektrisch leitfähige Schicht angeordnet wird und dass anschließend eine Verdrahtung erfolgt, wobei der thermische Ausdehnungskoeffizient der elektrisch leitfähigen Schicht zwischen dem des Halbleiters (11) und dem des Materials für die Verdrahtung liegt.

Description

Beschreibung Titel
Halbleiterbauelement mit erhöhter Stabilität gegenüber thermomechanischen Einflüssen sowie Verfahren zur Kontaktierung eines Halbleiters
Die vorliegende Erfindung betrifft ein Halbleiterbauelement, bei dem die
Oberfläche eines Halbleiters mittels einer Verdrahtung kontaktiert ist, sowie ein Verfahren zur Kontaktierung eines Halbleiters.
Stand der Technik
Halbleiter werden für Anwendungen mit einem geringen lateralen Platzangebot direkt auf einem Schaltungsträger montiert, um eine elektrische Funktionalität abzubilden. Die Montage erfolgt üblicherweise durch Löten oder Kleben. Zur Kontaktierung der Oberfläche des Halbleiters, beispielsweise Dioden, MOSFET (metal oxide semiconductor field-effect transistor), IGBT (insulated-gate bipolar transistor), wird in der Regel die Drahtbondtechnik bzw. Bändchenbondtechnik eingesetzt. Dabei wird mittels ultraschallunterstütztem Verschweißen eine stoffschlüssige Verbindung zwischen der Oberseite des Halbleiters und einem Draht oder Bändchen, beispielsweise aus Aluminium, hergestellt. Das Ende des Drahtes bzw. Bändchens wird an einer zweiten Fügestelle wiederum mit dem Schaltungsträger verbunden, um die gleiche Verdrahtungsebene zu erreichen. Die Robustheit elektrischer Schaltungen wird durch Zuverlässigkeitstests abgeprüft. Ein typisches und lebensdauerbegrenzendes Ausfallbild hierbei ist das Versagen der Verbindungsstelle von Draht oder Bändchen und Halbleiter.
Das Versagen ist oftmals darin begründet, dass der thermische
Ausdehnungskoeffizient von dem in der Regel verwendeten Aluminium als Draht oder Bändchen bei 23 μηι *Κ und der von dem Halbleitermaterial Silizium bei ca. 2 μηι *Κ liegt. Auch bei anderen Metallen, die als Bonddraht oder -Bändchen verwendet werden, wie beispielsweise Kupfer oder Gold, ist dieses Problem gegeben. Im thermomechanischen Wechselspiel tritt daher eine Zerrüttung der Fügestelle von Aluminium und Silizium auf, die eine Erhöhung des elektrischen Widerstandes zur Folge hat. Durch die lokale Widerstandserhöhung treten, insbesondere bei hohen Strömen in Leistungsschaltungen,
Verlustleistungen auf, die eine lokale Temperaturerhöhung und somit eine Zerstörung der Anbindung zur Folge haben.
Weiterhin kommt es durch die dünne Metallisierung auf den Halbleitern zu sehr hohen Stromdichten in der Metallisierung selbst und an der Verbindungsstelle von Chipmetallisierung und Bonddraht.
Aus der DE 10 2009 044 641 A1 sind Einrichtungen mit einem Halbleiterchip und ein Verfahren zu deren Herstellung bekannt, bei denen die Elektroden des Halbleiterchips mit einer Metallfolie versehen sind, die als Verdrahtungsschicht fungiert. Die Metallfolie wird auf der jeweiligen Elektrode durch Löten, Kleben und/oder Sintern fixiert.
Offenbarung der Erfindung
Erfindungsgemäß wird ein Halbleiterbauelement zur Verfügung gestellt, das gegenüber dem Stand der Technik über eine erhöhte Stabilität der
Verdrahtungsebene, insbesondere gegenüber thermomechanischen Einflüssen verfügt.
Dazu weist das erfindungsgemäße Halbleiterbauelement, bei dem die Oberfläche des Halbleiters mittels einer Verdrahtung kontaktiert ist, zwischen der Oberfläche des Halbleiters und der Verdrahtung eine elektrisch leitfähige Schicht auf, deren thermischer Ausdehnungskoeffizient zwischen dem des Halbleiters und dem Material der Verdrahtung liegt. Vorzugsweise erfolgt die Verdrahtung mittels Bondrahtes oder -bändchens.
Das Halbleiterbauelement besitzt einen Halbleiter, der in der Regel auf einem elektrischen Schaltungsträger, beispielsweise einem DCB-Substrat (Direct bonded copper), einem Stanzgitter oder einem PCB (Printed Circuit Board) angeordnet und kontaktiert ist, wobei eine konventionelle Fügeschicht Verwendung finden kann. Als Fügeschicht kann Lot, ein Leitkleber oder eine Sinterschicht vorgesehen sein.
Halbleiter in den erfindungsgemäßen Halbleiterbauteilen sind vorzugsweise Leistungshalbleiter für das Steuern und Schalten hoher elektrischer Ströme und Spannungen, beispielsweise Dioden, MOSFETs, IGBTs oder dergleichen, da vorteilhafterweise hierbei lokale Widerstandserhöhungen bei schadhaften Kontaktierungen sicher vermieden werden könnten, die ansonsten bei hohen Strömen leicht zu Ausfällen führen.
Auf der dem Schaltungsträger entgegengesetzten, üblicherweise als Oberseite bezeichneten Seite des Halbleiters, besteht die erfindungsgemäß ausgestaltete Kontaktierung des Halbleiters unter Verwendung einer elektrisch leitfähigen Schicht.
Bei der Auswahl des Materials für die elektrisch leitfähige Schicht sollte vorzugsweise beachtet werden, dass dieses eine Oberfläche besitzt, bei der herkömmliche Fügeverfahren angewendet werden können, keine sehr hohe Steifigkeit besitzt und über herkömmliche Bestückprozesse aufgebracht werden kann.
Die elektrisch leitfähige Schicht besteht vorzugsweise aus einer Metallfolie mit angepasstem thermischen Ausdehnungsverhalten.
Geeignete Metalle und deren Ausdehnungskoeffizienten sind beispielsweise:
Silber 19,5 μηι/ΓΤΐ*Κ
Kupfer 16 μηι/ΓΤΐ*Κ
Gold 14,2 μΓΠ/Γη*Κ
Nickel 13,0 μηι/ΓΤΐ*Κ
Edelstahl 10,0... 16,0 μΓηΛτι*Κ
Molybdän 5,2 μηι/ΓΤΐ*Κ
Kupfer und Gold werden erfindungsgemäß bevorzugt. Es können auch geeignete Legierungen entsprechender Metalle eingesetzt werden.
Um den Übergang des thermischen Ausdehnungskoeffizienten weiter abzustufen oder um beispielsweise Kupfer vor Oxidation zu schützen, kann die Metallfolie auch aus mehreren Schichten bzw. Folien aus unterschiedlichen Metallen bestehen. Es können auch MMCs (Metal Matrix Composite) zu derartigen Schichten verarbeitet sein.
So besteht die elektrisch leitfähige Schicht nach einer besonders bevorzugten Ausführungsform aus einer Kupferfolie, die mit einem Edelmetall, vorzugsweise Gold, oberflächenveredelt ist.
Die Dicke der Metallfolie bzw. der elektrisch leitfähigen Schicht ist möglichst dünn zu wählen, wobei es bevorzugt ist, dass die Dicke der Metallfolie in etwa der Dicke des verwendeten Halbleiters entspricht, um vorteilhafterweise möglichst geringe Kräfte auf den Halbleiter einzuprägen.
Die Metallfolie bzw. die elektrisch leitfähige Schicht sollte vorzugsweise gratfrei sein bzw. einen Grat auf der dem Halbleiter abgewandten Seite haben. Dies wird durch Wahl einer geeigneten Herstellungsmethode für die elektrisch leitfähige Schicht gewährleistet.
Die Dimension dieser Metallfolie bzw. der elektrisch leitfähigen Schicht sollte etwas kleiner als die des Halbleiters gewählt sein, jedoch die aktiven Bereiche zumindest teilweise abdecken. Dadurch kann die Metallfolie vorteilhafterweise durch konventionelle Bestückprozesse auf dem Halbleiter abgesetzt werden.
Nach einer bevorzugten Ausführungsform der Erfindung kann zusätzliches Fügematerial bzw. eine Fügeschicht zwischen Halbleiter und leitfähiger Schicht bzw. Metallfolie vorgesehen sein. Als Fügeschicht kann Lot, ein Leitkleber oder eine Sinterschicht verwendet werden, wobei die Oberfläche der Metallfolie nach den Erfordernissen der Fügeprozesse beschichtet sein kann.
Die elektrisch leitfähige Schicht ist durch konventionelle Verbindungstechniken und Materialien zur Verdrahtung auf die gleiche oder eine alternative Schaltungsträgerebene kontaktiert, beispielsweise durch Drahtbonden,
Bändchenbonden oder Aufkleben, Auflöten, Aufbonden eines Metallbandes oder eines Metallgeflechtes, wobei Drahtbonden oder Bändchenbonden bevorzugt ist. Materialien zur Verdrahtung sind üblicherweise metallisch.
Hat der Halbleiter zusätzlich zum Leistungsanschluss einen zusätzlichen
Logikanschluss auf der Oberfläche, kann die Metallfolie kleiner gewählt werden, beispielsweise bei einem Gateanschluss am Rand des Halbleiters, oder ein Loch aufweisen, beispielsweise wenn der Gateanschluss in der Mitte des Halbleiters angeordnet ist.
Auch kann die Metallfolie einen oder mehrere Kontakte, beispielsweise in Form einer Verlängerung aufweisen, bei der beispielsweise ein Messstrom abgegriffen oder der Laststrom auf andere Art weiter kontaktiert werden kann.
Vorteilhafterweise werden bei den erfindungsgemäßen Halbleiterbauteilen mechanische Kräfte auf einen größeren Bereich und auf zwei Fügestellen verteilt, wodurch eine deutlich erhöhte Stabilität der Kontakte gewährleistet ist. Diese ist natürlich auch durch die angepassten Ausdehnungskoeffizienten gegeben. Gleichzeitig wird vorteilhafterweise die Verteilung des eingeprägten Stromes auf eine größere Fläche auf dem Halbleiterbauelement bewirkt.
Erfindungsgemäß wird auch ein Verfahren zur Kontaktierung eines Halbleiters, vorzugsweise durch Drahtbonden oder Bändchenboden beansprucht, bei dem vor dem Verdrahten zwischen der Oberfläche des Halbleiters und dem Bondraht oder -bändchen eine elektrisch leitfähige Schicht, vorzugsweise eine Metallfolie angeordnet wird, deren thermischer Ausdehnungskoeffizient zwischen dem des Halbleiters und dem des Bonddrahtes oder -bändchens liegt.
Der Halbleiter wird üblicherweise auf einem Schaltungsträger angeordnet, wobei zwischen dem Halbleiter und dem Schaltungsträger Fügematerial angeordnet und/oder eine Fügeschicht ausgebildet werden kann.
Nach einer bevorzugten Ausführungsform des Verfahrens wird zwischen der elektrisch leitfähigen Schicht und dem Halbleiter Fügematerial angeordnet und/oder eine Fügeschicht ausgebildet. Ansonsten betreffen die Ausführungen zu dem erfindungsgemäßen
Halbleiterbauteil auch das Verfahren.
Vorteilhafte Weiterbildungen der Erfindung sind in den Unteransprüchen angegeben und in der Beschreibung beschrieben.
Zeichnungen
Ein Ausführungsbeispiel der Erfindung wird anhand einer Zeichnung und der nachfolgenden Beschreibung näher erläutert. Es zeigt:
Figur 1 in einer Seitenansicht ein Detail eines erfindungsgemäßen
Halbleiterbauteils.
Figur 1 offenbart einen auf einem Schaltungsträger 10 angeordneten Halbleiter 1 1 , der teilweise von einer Metallfolie 12 bedeckt ist. Zwischen dem
Schaltungsträger 10 und dem Halbleiter 1 1 ist eine Fügeschicht 13 vorgesehen, durch die der Halbleiter 11 fixiert bzw. mit dem Schaltungsträger 10 kontaktiert ist. Ebenso befindet sich zwischen dem Halbleiter 11 und der Metallfolie 12 eine weitere Fügeschicht 14 zur elektrisch leitenden Fixierung der Metallfolie 12 auf dem Halbleiter 1 1. Eine Verdrahtung mit dem Schaltungsträger 10 auf der dem Schaltungsträger 10 abgewandten Seite des Halbleiters 1 1 ist durch einen Bonddraht 15 gegeben, der die Metallfolie 12 mit dem Schaltungsträger 10 elektrisch leitend verbindet.

Claims

Ansprüche
Ein Halbleiterbauelement, bei dem die Oberfläche eines Halbleiters (11) mittels einer Verdrahtung kontaktiert ist, dadurch gekennzeichnet, dass zwischen der Oberfläche (1 1) des Halbleiters und der Verdrahtung eine elektrisch leitfähige Schicht angeordnet ist, deren thermischer
Ausdehnungskoeffizient zwischen dem des Halbleiters (11) und dem des Materials der Verdrahtung liegt.
Das Halbleiterbauelement nach Anspruch 1 , wobei die Verdrahtung aus Bonddraht (15) oder -bändchen besteht.
Das Halbleiterbauelement nach Anspruch 1 oder 2, wobei die elektrisch leitfähige Schicht eine Metallfolie (12) ist oder aus zumindest zwei nebeneinander angeordneten Metallfolien besteht.
Das Halbleiterbauelement nach einem der Ansprüche 1 bis 3, wobei die elektrisch leitfähige Schicht aus mehreren Schichten besteht.
Das Halbleiterbauelement nach einem der Ansprüche 1 bis 4, wobei zwischen Halbleiter (1 1) und leitfähiger Schicht eine Fügeschicht (14) befindlich ist.
Das Halbleiterbauelement nach einem der Ansprüche 1 bis 5, wobei die elektrisch leitfähige Schicht zumindest einen Teil der aktiven Bereiche des Halbleiters (1 1) abdeckt.
7. Das Halbleiterbauelement nach einem der Ansprüche 1 bis 6, wobei die elektrisch leitfähige Schicht einen oder mehrere zusätzlichen Kontakte aufweist.
8. Ein Verfahren zur Kontaktierung eines Halbleiters (11), dadurch
gekennzeichnet, dass auf der Oberfläche des Halbleiters (11) zumindest teilweise eine elektrisch leitfähige Schicht angeordnet wird und dass anschließend eine Verdrahtung erfolgt, wobei der thermische
Ausdehnungskoeffizient der elektrisch leitfähigen Schicht zwischen dem des Halbleiters (1 1) und dem des Materials für die Verdrahtung liegt.
9. Das Verfahren nach Anspruch 8, wobei die Verdrahtung mittels Drahtbonden oder Bändchenbonden erfolgt.
10. Das Verfahren nach Anspruch 8 oder 9, wobei als elektrisch leitfähige
Schicht eine Metallfolie (12) verwendet wird.
1 1. Das Verfahren nach einem der Ansprüche 8 bis 10, wobei der Halbleiter (11) auf einem Schaltungsträger (10) angeordnet wird und wobei zwischen dem Halbleiter (11) und dem Schaltungsträger (10) Fügematerial angeordnet und/oder eine Fügeschicht (14) ausgebildet wird.
12. Das Verfahren nach einem der Ansprüche 8 bis 1 1 , wobei zwischen der elektrisch leitfähigen Schicht und dem Halbleiter (1 1) Fügematerial angeordnet und/oder eine Fügeschicht (14) ausgebildet wird.
PCT/EP2011/069280 2010-12-06 2011-11-03 Halbleiterbauelement mit erhöhter stabilität gegenüber thermomechanischen einflüssen sowie verfahren zur kontaktierung eines halbleiters WO2012076259A1 (de)

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