WO2012056943A1 - 焦電センサアレイ及び焦電型赤外線検出装置 - Google Patents
焦電センサアレイ及び焦電型赤外線検出装置 Download PDFInfo
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- WO2012056943A1 WO2012056943A1 PCT/JP2011/073932 JP2011073932W WO2012056943A1 WO 2012056943 A1 WO2012056943 A1 WO 2012056943A1 JP 2011073932 W JP2011073932 W JP 2011073932W WO 2012056943 A1 WO2012056943 A1 WO 2012056943A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
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- the present invention relates to a pyroelectric sensor array and a pyroelectric infrared detector that detect infrared rays incident on a pyroelectric body by a potential induced on the surface of the pyroelectric body.
- This type of pyroelectric infrared detector generally includes a circuit board and a pyroelectric sensor array mounted on the circuit board.
- the pyroelectric sensor array is composed of a pyroelectric plate and a plurality of pyroelectric sensors (pyroelectric elements) formed on the pyroelectric plate.
- the infrared detection sensitivity (detection sensitivity) of the pyroelectric element may vary due to the arrangement of the pyroelectric element.
- an infrared sensor element (pyroelectric element) disposed near the center of a pyroelectric plate is more infrared than an infrared sensor element disposed near an end of the pyroelectric plate.
- the heat generated by the heat is likely to escape (i.e., the thermal resistance tends to be small), thereby varying the detection sensitivity of the infrared sensor element.
- variation in thermal resistance is achieved by making the cross-sectional size of the solder bump connecting the infrared sensor element and the circuit board different between the vicinity of the end of the pyroelectric plate and the vicinity of the center.
- variation in detection sensitivity can be reduced.
- the pyroelectric infrared detection device disclosed in Patent Document 1 reduces variations in detection sensitivity by impairing thermal insulation between the pyroelectric plate and the circuit board. More specifically, variations in detection sensitivity are reduced by releasing heat generated in the pyroelectric plate mainly from the vicinity of the end portion to the circuit board. Therefore, the detection sensitivity of the entire pyroelectric plate is lowered.
- the detection sensitivity of the pyroelectric element is greatly affected by the capacitance of the circuit board.
- the circuit board includes a potential detection circuit formed outside the pyroelectric plate, and a conductor pattern that connects the connection electrode of the pyroelectric element and the potential detection circuit.
- the length of the central conductor pattern connecting the pyroelectric element near the center of the pyroelectric plate and the potential detection circuit is the end connecting the pyroelectric element near the end of the pyroelectric plate and the potential detection circuit. It becomes longer than the length of the conductor pattern. For this reason, the electrostatic capacitance which arises in the conductor pattern of a center part is larger than the electrostatic capacitance which arises in the conductor pattern of an edge part. In other words, different electrostatic capacities are generated between the pyroelectric elements near the end of the pyroelectric plate and the pyroelectric elements near the center, thereby varying the detection sensitivity of the pyroelectric elements.
- the time response characteristic until the potential of the connection electrode of the pyroelectric element reaches a steady state also varies. Even if the above-described variation in detection sensitivity is adjusted by a complicated operation in which the amplification factor of the potential detection circuit is individually set, the time response characteristic cannot be adjusted.
- the object of the present invention is to reduce variations in detection sensitivity and time response characteristics due to the arrangement of pyroelectric elements on the pyroelectric plate without impairing the thermal insulation between the pyroelectric plate and the circuit board.
- a pyroelectric sensor array and a pyroelectric infrared detector are provided.
- a pyroelectric sensor array attachable to a circuit board, comprising a pyroelectric plate and a plurality of pyroelectric elements formed on the pyroelectric plate,
- the pyroelectric plate has a connection surface placed on the circuit board;
- the plurality of pyroelectric elements includes an edge pyroelectric element disposed at an edge of the pyroelectric plate in a predetermined arrangement direction and a central pyroelectric element disposed at a central portion of the pyroelectric plate.
- Each of the plurality of pyroelectric elements comprises two adjacent connection electrodes formed on the connection surface, A pyroelectric sensor array is provided in which a capacitance between the two connection electrodes of the edge pyroelectric element is larger than a capacitance between the two connection electrodes of the central pyroelectric element.
- a pyroelectric infrared detector comprising the pyroelectric sensor array and a circuit board to which the pyroelectric sensor array is attached,
- the circuit board includes a mounting portion on which the connection surface of the pyroelectric sensor array is placed, a plurality of potential detection circuits provided outside the mounting portion, a ground portion, a plurality of conductor patterns, and a plurality of grounds.
- the conductor pattern electrically connects one of the two connection electrodes and the potential detection circuit
- the ground conductor pattern connects the other of the two connection electrodes and the ground portion.
- the capacitance between the two connection electrodes of the pyroelectric element arranged at the edge of the pyroelectric plate is used to connect the two connections of the pyroelectric element arranged in the center of the pyroelectric plate.
- FIG. 1 is an exploded perspective view showing a pyroelectric infrared detection device according to a first embodiment of the present invention.
- the mounting portion of the circuit board on which the pyroelectric sensor array is mounted is indicated by a two-dot chain line. It is a top view which shows the light-receiving surface of the pyroelectric sensor array of FIG. It is a top view which shows the connection surface of the pyroelectric sensor array of FIG. It is a top view which shows the connection surface of the pyroelectric sensor array by the 2nd Embodiment of this invention. It is a top view which shows the light-receiving surface of the pyroelectric sensor array by the 3rd Embodiment of this invention.
- FIG. 12A shows a connection electrode group arranged in the central portion (part indicated by a broken line A in FIG. 11).
- FIG. 12B shows a group of connection electrodes arranged at the edge (part indicated by a broken line B in FIG. 11).
- the pyroelectric infrared detector As shown in FIG. 1, the pyroelectric infrared detector according to the first embodiment of the present invention includes a pyroelectric sensor array 1 and a circuit board 4 to which the pyroelectric sensor array 1 is attached. In other words, the pyroelectric sensor array 1 is configured to be attachable to the circuit board 4.
- the pyroelectric sensor array 1 includes a pyroelectric plate 10 made of a pyroelectric body and a plurality of edge pyroelectric elements (pyroelectric elements) formed on the pyroelectric plate 10. ) 20 and a plurality of central pyroelectric elements (pyroelectric elements) 30.
- the pyroelectric plate 10 according to the present embodiment is formed in a flat plate shape extending in two directions (first direction and second direction) orthogonal to each other. Specifically, the pyroelectric plate 10 includes a rectangular light receiving surface 11 that receives infrared rays and a rectangular connection surface 12 that is placed on the circuit board 4, and the light receiving surface 11 and the connection surface 12. And extend in parallel with each other along the first direction and the second direction.
- the pyroelectric plate 10 according to the present embodiment has end portions 13 at both ends in the vertical direction (second direction) of FIGS. 2 and 3.
- the pyroelectric element 20 is disposed in the vicinity of the end 13 in the second direction (arrangement direction), and the pyroelectric element 30 is intermediate in the arrangement direction. Placed in the part.
- the pyroelectric element 20 is arranged at the edge of the pyroelectric plate 10
- the pyroelectric element 30 is arranged at the center of the pyroelectric plate 10.
- two pyroelectric elements 20 are formed in the vicinity of each end portion 13, and four pyroelectric elements 30 are formed in an intermediate portion between the two end portions 13.
- each of the pyroelectric element 20 and the pyroelectric element 30 is formed on the light receiving electrode group 25 formed on the light receiving surface 11 of the pyroelectric plate 10 and the connection surface 12. It is formed from the connection electrode group 21, and a part of the pyroelectric plate 10 sandwiched between the light receiving electrode group 25 and the connection electrode group 21, thereby functioning as a pyroelectric sensor.
- the light receiving electrode group 25 includes two rectangular light receiving electrodes 26 and a connection pattern 28 made of a conductor and connecting the two light receiving electrodes 26 to each other.
- the two light receiving electrodes 26 of the light receiving electrode group 25 are electrically connected by the connection pattern 28.
- connection electrode group 21 includes a rectangular first connection electrode (connection electrode) 22 and a rectangular second connection electrode (connection electrode) 23.
- the connection electrode 22 and the connection electrode 23 are opposed to each other in a first direction (left-right direction in FIG. 3) parallel to the connection surface 12.
- the connection electrode 22 and the connection electrode 23 each have an opposing side 221 and an opposing side 231 extending along the second direction, and the opposing side 221 and the opposing side 231 are mutually in the first direction.
- each of the pyroelectric element 20 and the pyroelectric element 30 includes adjacent connection electrodes 22 and 23 (that is, two connection electrodes) formed on the connection surface 12.
- connection electrode 22 and the light receiving electrode 26 are formed so as to face each other with the pyroelectric plate 10 interposed therebetween.
- connection electrode 23 and the light receiving electrode 26 are formed to face each other with the pyroelectric plate 10 interposed therebetween.
- each of the pyroelectric elements 20 and 30 according to the present embodiment functions as a so-called dual-type pyroelectric sensor. Accordingly, when one of the light receiving electrodes 26 is irradiated with infrared rays, a potential is generated between the connection electrode 22 and the connection electrode 23. At this time, the opposing side 221 and the opposing side 231 function as a capacitor between the connection electrode 22 and the connection electrode 23. In other words, the opposing sides 221 and 231 are portions that generate capacitance in the connection electrodes 22 and 23 (that is, two connection electrodes).
- the area of the connection electrodes 22 and 23 of the pyroelectric element 20 (that is, the connection electrode at the edge) is the same as the connection electrodes 22 and 23 of the pyroelectric element 30 (that is, the connection electrode at the center) Is larger than the area. More specifically, according to the present embodiment, the length of the opposing side 221 (or the opposing side 231) of the pyroelectric element 20 is greater than the length of the opposing side 221 (or the opposing side 231) of the pyroelectric element 30. Too long.
- connection electrodes 22 and 23 of the pyroelectric element 20 is longer than the length of the connection electrodes 22 and 23 of the pyroelectric element 30 in the second direction orthogonal to the first direction and parallel to the connection surface 12. long. Therefore, the capacitance between the connection electrode 22 and the connection electrode 23 of the pyroelectric element 20 is larger than the capacitance between the connection electrode 22 and the connection electrode 23 of the pyroelectric element 30.
- the circuit board 4 includes a board-side connection surface 42 that faces the connection surface 12 of the pyroelectric sensor array 1.
- the board-side connection surface 42 is provided with a mounting portion 44 on which the connection surface 12 is placed.
- the circuit board 4 further includes a plurality of potential detection circuits 80, a ground portion (not shown), a plurality of circuit-side first electrodes (circuit-side electrodes) 52, and a plurality of circuit-side second electrodes (circuit-side electrodes). ) 56, a plurality of conductor patterns 60, and a plurality of ground conductor patterns 62.
- the potential detection circuit 80 is a circuit for detecting the potential generated in each of the pyroelectric elements 20 and 30, and is provided outside the mounting portion 44.
- the potential detection circuit 80 is located outside the pyroelectric sensor array 1. According to the present embodiment, four potential detection circuits 80 are arranged in the vicinity of the two end portions 13 of the pyroelectric sensor array 1.
- the circuit side electrodes 52 and 56 are formed at positions corresponding to the connection electrodes 22 and 23 of the connection surface 12, respectively. More specifically, according to the present embodiment, eight circuit-side electrode groups (electrode pairs) 50 including the circuit-side electrode 52 and the circuit-side electrode 56 are formed, and each of the electrode pairs 50 includes: It corresponds to the pyroelectric element 20 or the pyroelectric element 30.
- the connection electrode 22 is positioned on the corresponding circuit side electrode 52
- the connection electrode 23 is positioned on the corresponding circuit side electrode 56.
- the conductor pattern 60 electrically connects the circuit side electrode 52 and the potential detection circuit 80, and the ground conductor pattern 62 includes the circuit side electrode 56 and a ground portion (not shown). ) And are electrically connected.
- the conductor pattern 60 connected to the circuit side electrode 52 located at the center of the circuit board 4 (that is, corresponding to the pyroelectric element 30) is located near the potential detection circuit 80 of the circuit board 4 (that is, the pyroelectric element 30). It is drawn longer than the conductor pattern 60 connected to the circuit side electrode 52 (corresponding to the electric element 20).
- an adhesive for example, solder paste, or mainly containing conductive powder and a binder
- the connecting surface 12 is placed on the mounting portion 44 so that the connecting surface 12 extends in parallel with the mounting portion 44 with a predetermined gap.
- the connection electrodes 22 and 23 are positioned and temporarily fixed so that the connection electrodes 22 and 23 are located immediately above the corresponding circuit side electrodes 52 and 56.
- the connection electrodes 22 and 23 are electrically connected and fixed to the corresponding circuit side electrodes 52 and 56.
- a solder paste is used as an adhesive, it can be connected and fixed by reflow.
- a conductive adhesive is used as the adhesive, it can be connected and fixed by a curing process, for example.
- the pyroelectric sensor array 1 and the circuit board 4 are electrically connected by the operation as described above.
- the conductor pattern 60 is connected to the connection electrode 22 (that is, the connection electrodes 22 and 23).
- the connection electrode 22 that is, the connection electrodes 22 and 23.
- the potential detection circuit 80 are electrically connected to each other, and the ground conductor pattern 62 includes a connection electrode 23 (that is, the other of the connection electrodes 22 and 23) and a ground portion (not shown).
- the conductor pattern 60 and the ground conductor pattern 62 function as a capacitor, and the circuit side electrode 52 and the circuit side electrode 56.
- a first electrostatic capacitance caused by the conductor pattern 60 and the ground conductor pattern 62 is generated.
- the electrode pair 50 including the circuit side electrode 52 and the circuit side electrode 56 has a first capacitance in the connected state.
- the length of the conductor pattern 60 that electrically connects the connection electrode 22 of the pyroelectric element 20 and the potential detection circuit 80 is the length of the conductor pattern that electrically connects the connection electrode 22 of the pyroelectric element 30 and the potential detection circuit 80. Shorter than 60 lengths. Accordingly, the first capacitance of the electrode pair 50 corresponding to the pyroelectric element 20 is smaller than the first capacitance of the electrode pair 50 corresponding to the pyroelectric element 30. That is, the first capacitance varies.
- connection electrode 22 and the connection electrode 23 As described above, a capacitance is also generated between the connection electrode 22 and the connection electrode 23. Therefore, in the connected state, a second capacitance caused by the connection electrode 22 and the connection electrode 23 is generated between the circuit side electrode 52 and the circuit side electrode 56.
- the electrode pair 50 has a total capacitance due to both the first capacitance and the second capacitance.
- variations in the first capacitance can be offset. More specifically, according to the present embodiment, the length of the opposing sides 221 and 231 of the pyroelectric element 30 is shortened (that is, the area of the connection electrodes 22 and 23 is reduced), thereby the electrode pair 50.
- the variation in the total capacitance of the pyroelectric elements 20 and 30 can be reduced or offset, and thereby the variations in the infrared detection sensitivity (detection sensitivity) and the time response characteristics of the pyroelectric elements 20 and 30 can be reduced.
- the detection sensitivity can be leveled by intentionally varying the total capacitance. More specifically, if the total capacitance of the electrode pair 50 corresponding to the pyroelectric element 20 is adjusted to be larger than the total capacitance of the electrode pair 50 corresponding to the pyroelectric element 30 in the connected state. Good. However, when adjusting in this way, it is necessary to consider the influence on the time response characteristics.
- the thermal insulation between the pyroelectric sensor array 1 and the circuit board 4 can be enhanced by connecting the connection electrodes 22 and 23 and the circuit side electrodes 52 and 56 with a conductive adhesive. Therefore, the detection sensitivity can be further improved.
- the pyroelectric infrared detection device As understood from FIG. 4, the pyroelectric infrared detection device according to the second embodiment of the present invention is a circuit board (not shown) configured similarly to the circuit board 4 according to the first embodiment. And a pyroelectric sensor array 1a mounted on a circuit board.
- the pyroelectric sensor array 1a is formed in a flat plate shape like the pyroelectric sensor array 1. Specifically, the pyroelectric sensor array 1a includes a pyroelectric plate 10 configured in the same manner as in the first embodiment.
- the pyroelectric plate 10 is formed with eight edge pyroelectric elements (pyroelectric elements) 20a and four central pyroelectric elements (pyroelectric elements) 30a.
- the pyroelectric elements 20a and 30a are , And are arranged along a predetermined arrangement direction (second direction). Specifically, the pyroelectric element 20a is arranged in the vicinity of the end 13 of the pyroelectric plate 10 in the arrangement direction (that is, the edge of the pyroelectric plate 10), and the pyroelectric element 30a is focused in the arrangement direction. It arrange
- Each of the pyroelectric elements 20a and 30a is formed on the connection surface 12 and a light receiving electrode group (not shown) formed on the light receiving surface 11, similarly to the pyroelectric elements 20 and 30 according to the first embodiment. A part of the pyroelectric plate 10 is sandwiched between the connection electrode group 21a.
- connection electrode group 21a has a first connection electrode (connection electrode) 22a and a second connection electrode (connection electrode) 23a that face each other in the first direction.
- connection electrode 22a and the connection electrode 23a each have an opposing side 221a and an opposing side 231a that extend in parallel to each other along the second direction.
- the connection electrode 22a is a portion that is electrically connected to a potential detection circuit (not shown) formed on the circuit board in a connection state where the pyroelectric sensor array 1a and the circuit board (not shown) are connected.
- the connection electrode 23a is a part that is electrically connected to a grounding part (not shown) formed on the circuit board in the connected state. As understood from the above description, an electrostatic capacitance is generated between the opposing side 221a and the opposing side 231a in the connected state.
- the opposing side 221a (opposing side 231a) of the pyroelectric element 20 is longer than the opposing side 221a (opposing side 231a) of the pyroelectric element 30 as in the first embodiment. Furthermore, the distance (D20a) between the opposing side 221a and the opposing side 231a of the pyroelectric element 20 is shorter than the distance (D30a) between the opposing side 221a and the opposing side 231a of the pyroelectric element 30.
- the distance (interval) between the connection electrode 22a and the connection electrode 23a in the vicinity of the edge of the pyroelectric plate 10 is equal to the connection electrode 22a and the connection electrode 23a at the center of the pyroelectric plate 10. Shorter than the distance (interval). As the distance between the connection electrodes 22a and 23a decreases, the capacitance increases. Therefore, the capacitance generated in the pyroelectric element 20a disposed in the vicinity of the edge of the pyroelectric plate 10 is larger than the capacitance generated in the pyroelectric element 30a disposed in the central portion of the pyroelectric plate 10. .
- the first electrode is formed by adjusting the distance between the portions (opposing sides 221a and 231a) that generate capacitance in the connection electrodes 22a and 23a of the pyroelectric elements 20a and 30a. Similar to the embodiment, the variation in the total capacitance can be reduced or offset.
- the pyroelectric infrared detecting device includes a circuit board 4b and a pyroelectric sensor array 1b mounted on the circuit board 4b. Yes.
- the pyroelectric sensor array 1b is formed in a flat plate shape like the pyroelectric sensor arrays 1 and 1a.
- the pyroelectric plate 10 is formed with four edge pyroelectric elements (pyroelectric elements) 20b and two central pyroelectric elements (pyroelectric elements) 30b.
- the pyroelectric elements 20b and 30b are arranged along a predetermined arrangement direction (second direction).
- the two pyroelectric elements 20b are arranged adjacent to each other in the first direction in the vicinity of the end 13 in the arrangement direction of the pyroelectric plate 10, and the pyroelectric body
- Two pyroelectric elements 30b are arranged adjacent to each other in the first direction at the center in the arrangement direction of the plate 10.
- the pyroelectric elements 20b and 30b are sandwiched between the light receiving electrode group 25b formed on the light receiving surface 11, the connection electrode group 21b formed on the connection surface 12, and the light receiving electrode group 25b and the connection electrode group 21b. And a part of the pyroelectric plate 10.
- the light receiving electrode group 25b includes four light receiving electrodes 26 located at four corners of a virtual rectangle and four connection patterns 28 made of conductors. .
- the connection pattern 28 connects two adjacent light receiving electrodes 26 to each other. In other words, the four light receiving electrodes 26 of the light receiving electrode group 25 are electrically connected by the connection pattern 28.
- connection electrode group 21b has two first connection electrodes (connection electrodes) 22b and two second connection electrodes (connection electrodes) 23b.
- the connection electrode 22b is a part that is electrically connected to a potential detection circuit (not shown) formed on the circuit board 4b in a connection state where the pyroelectric sensor array 1b and the circuit board 4b are connected.
- the electrode 23b is a part that is electrically connected to a ground part (not shown) formed on the circuit board 4b in the connected state.
- Each of the connection electrodes 22b and 23b is disposed so as to face the light receiving electrode 26 through the pyroelectric plate 10, and the connection electrode 22b and the connection electrode 23b face each other in the second direction parallel to the connection surface 12. is doing.
- the connection electrode 22b and the connection electrode 23b each have an opposing side 221b and an opposing side 231b that extend in parallel to each other along the first direction.
- connection electrode 22b of the pyroelectric element 20b includes a comb tooth pattern 222b extending along the second direction from the opposite side 221b.
- connection electrode 23b of the pyroelectric element 20b includes a comb tooth pattern 232b extending from the opposite side 231b along the second direction.
- each of the connection electrodes 22b and 23b of the pyroelectric element 20b includes a comb tooth pattern 222b or 232b extending in the second direction toward the opposite connection electrode 23b or 22b.
- the comb-tooth patterns 222b and 232b are not provided on the connection electrodes 22b and 23b of the pyroelectric element 30b.
- Each of the comb-tooth patterns 222b and 232b according to the present embodiment is formed by three conductor patterns (comb teeth), and the comb-tooth pattern 222b and the comb-tooth pattern 232b are provided between one comb tooth and the other. It is combined so that the comb teeth can enter.
- the comb tooth pattern 222b of the connection electrode 22b that is, one of the two connection electrodes 22b and 23b
- the comb tooth pattern 232b of the connection electrode 23b that is, the other of the two connection electrodes 22b and 23b. Is opposed to the first direction perpendicular to the second direction and parallel to the connection surface 12.
- the capacitance in the connected state, a capacitance is generated between the opposing side 221b and the opposing side 231b, and a larger electrostatic capacitance is generated between the comb tooth pattern 222b and the comb tooth pattern 232b. Capacity is generated.
- the comb-teeth pattern 222b and the comb-teeth pattern 232b are the closest parts in the connection electrode 22b and the connection electrode 23b. Therefore, the capacitance can be further increased by increasing the area defined by the comb tooth pattern 222b and the comb tooth pattern 232b. More specifically, for example, the capacitance can be further increased by increasing the number of comb teeth or increasing the length of the comb teeth. As described above, by providing the comb-tooth patterns 222b and 232b only on the pyroelectric element 20b, the variation in the total capacitance can be reduced or offset as in the first embodiment.
- the circuit board 4b is formed with a circuit side electrode group 50b corresponding to each of the pyroelectric elements 20b and 30b.
- the circuit side electrode group 50b includes two circuit side first electrodes (circuit side electrodes) 52 and 53 and two circuit side second electrodes (circuit side electrodes) 56 and 57.
- the circuit side electrodes 52 and 53 are electrically connected to two potential detection circuits (not shown), respectively, and are electrically connected to the two connection electrodes 22b in the connected state.
- the circuit side electrodes 56 and 57 are electrically connected to a ground portion (not shown), and are electrically connected to the two connection electrodes 23b in the connected state.
- so-called quad-type pyroelectric sensors are formed by the pyroelectric elements 20b and 30b, respectively.
- the circuit-side electrodes 52 and 53 are composed of one end of a high resistance R1 and an FET (Field effect transistor). Connected to the gate of the FET 1, the circuit side electrodes 56 and 57 are connected to the other end of the high resistance R 1 and the grounding portion. Further, a large electrostatic capacitance C1 corresponding to the gap between the comb-tooth pattern 222b and the comb-tooth pattern 232b is generated between the circuit-side electrode 52 and the circuit-side electrode 56 of the pyroelectric element 20b.
- FET Field effect transistor
- a capacitance C1 is also generated between the circuit side electrode 53 and the circuit side electrode 57 of the pyroelectric element 20b.
- the pyroelectric element 20 functions as two dual pyroelectric sensors that are electrically connected to the light receiving electrode 26.
- the FET 1 can detect if infrared rays are incident on any one of the four light receiving electrodes 26.
- the circuit shown in FIG. 8 (b) is obtained by adding a high resistance R2 and FET 2 to the circuit of FIG. 8 (a).
- the circuit side electrode 57 is connected to one end of the high resistance R 2 and the gate of the FET 2, and the other end of the high resistance R 2 is connected to the circuit side electrode 56. Further, a capacitance C2 is generated between the circuit side electrode 56 and the circuit side electrode 57 (see the arrangement in FIG. 7).
- the infrared incident range can be widened. More specifically, for example, even when infrared rays are simultaneously incident on both the light receiving electrode 26 corresponding to the circuit side electrode 53 and the light receiving electrode 26 corresponding to the circuit side electrode 57, it can be detected by the FET2.
- FIG. 8C is obtained by adding a high resistance R3 and an FET 3 to the circuit of FIG. 8A.
- the circuit side electrode 53 is connected to one end of the high resistance R 3 and the gate of the FET 3, and the other end of the high resistance R 3 is connected to the circuit side electrode 56.
- a capacitance C3 is generated between the circuit side electrode 53 and the circuit side electrode 56.
- the potential of the pyroelectric sensor can be detected using electronic components other than the FET.
- the potential can be detected by using a high input impedance potential detecting element using an OP amplifier.
- the pyroelectric infrared detection device according to the fourth embodiment of the present invention is configured in the same manner as the pyroelectric infrared detection device according to the already described embodiment. More specifically, the pyroelectric infrared detection device according to the fourth embodiment includes a flat pyroelectric sensor array 1c and a circuit board (not shown) on which the pyroelectric sensor array 1c is mounted. ing.
- the pyroelectric plate 10 according to the fourth embodiment has a first region and a second region having a virtual line (IL) in FIG. 9 as a boundary line.
- IL virtual line
- the first region of the pyroelectric plate 10 has two edge pyroelectric elements (pyroelectric elements) 20c and one central pyroelectric element (pyroelectric element) 30c.
- the pyroelectric element 30c is formed and disposed between the two pyroelectric elements 20c in a predetermined arrangement direction (second direction).
- Each of the pyroelectric elements 20c and 30c includes a light receiving electrode group (not shown) formed on the light receiving surface 11 and a connection electrode group 21c formed on the connection surface 12 as in the embodiment described above. I have.
- connection electrode group 21c has two pairs of a first connection electrode (connection electrode) 22c and a second connection electrode (connection electrode) 23c, as in the third embodiment.
- the connection electrode 22c and the connection electrode 23c face each other in the first direction parallel to the connection surface 12, as in the first and second embodiments.
- the connection electrode 22c is a portion that is electrically connected to a potential detection circuit (not shown) formed on the circuit board in a connection state where the pyroelectric sensor array 1c and the circuit board (not shown) are connected.
- the connection electrode 23c is a part that is electrically connected to a grounding part (not shown) formed on the circuit board in the connected state.
- connection electrodes 22c and 23c are provided with extension patterns 223c and 233c, respectively.
- the extension pattern 223c (extension pattern 233c) is derived from the connection electrode 22c (connection electrode 23c) and extends along the outer periphery of the connection electrode 22c (connection electrode 23c).
- a facing portion 224c (facing portion 234c) extending in parallel is formed.
- the extension pattern 223c (extension pattern 233c) extends from the connection electrode 22c (connection electrode 23c) so as to go around the connection electrode 22c (connection electrode 23c), and is partially opposed in the first direction. ing.
- an electrostatic capacitance is generated between the facing portion 224c of the extension pattern 223c and the facing portion 234c of the extension pattern 233c in the connected state.
- connection electrode 22c extension electrode 23c
- connection electrode 23c connection electrode 23c
- the extension pattern 223c (extension pattern 233c) of the connection electrode 22c (connection electrode 23c) of the pyroelectric element 30c is the connection electrode 22c (connection electrode 23c). It is formed by cutting off a conductor pattern extending so as to be folded along the outer periphery of the wire. Thereby, the cut piece 225c (cut piece 235c) is formed in the vicinity of the extension pattern 223c (extension pattern 233c) of the pyroelectric element 30c.
- the areas of the extension patterns 223c and 233c of the pyroelectric element 20c are larger than the areas of the extension patterns 223c and 233c of the pyroelectric element 30c.
- the lengths of the facing portions 224c and 234c of the pyroelectric element 20c are longer than the lengths of the facing portions 224c and 234c of the pyroelectric element 30c.
- the lengths of the opposing portions of the extension patterns 223c and 233c of the pyroelectric element 20c are longer than the lengths of the opposing portions of the extension patterns 223c and 233c of the pyroelectric element 30c.
- the distance between the connection electrode 22c and the connection electrode 23c of the pyroelectric element 20c is smaller than the distance between the connection electrode 22c and the connection electrode 23c of the pyroelectric element 30c.
- the distance (D20c) between the facing portion 224c and the facing portion 234c of the pyroelectric element 20 is shorter than the distance (D30c) between the facing portion 224c and the facing portion 234c of the pyroelectric element 30.
- the distance between the opposing portions of the extension patterns 223c and 233c of the pyroelectric element 20 is shorter than the distance between the opposing portions of the extension patterns 223c and 233c of the pyroelectric element 30.
- the capacitance generated in the pyroelectric element 20c disposed in the vicinity of the edge of the pyroelectric plate 10 is larger than the capacitance generated in the pyroelectric element 30c disposed in the central portion of the pyroelectric plate 10. can do.
- the present embodiment can provide the same effects as those of the first to third embodiments.
- the mutual electric field interference in the connection electrodes 22c and 23c of the pyroelectric element 30c is shielded by the cut pieces 225c and 235c insulated from both the connection electrodes 22c and 23c, and thereby the potential.
- Mutual interference potential interference
- the cut pieces 225c and 235c according to the present embodiment form a long conductor pattern similar to the extension pattern 223c (extension pattern 233c) of the pyroelectric element 20c on the connection electrode 22c (connection electrode 23c) of the pyroelectric element 30c.
- the tip portion can be formed by, for example, cutting by laser trimming.
- the cut pieces 225c and 235c may be formed by a method other than partially cutting the conductor pattern.
- the extension pattern 223c, the extension pattern 233c, the cut piece 225c, and the cut piece 235c may be formed as separate patterns. By doing in this way, the cut pieces 225c and 235c can be formed by a simpler process. However, the detection sensitivity distribution can be made more uniform if the conductor pattern is formed by partially separating the pattern.
- the second region of the pyroelectric plate 10 includes two edge pyroelectric elements (pyroelectric elements) formed in the same manner as the first region and one central pyroelectric element.
- An element pyroelectric element
- Three connection electrode groups 21 d corresponding to the above three pyroelectric elements are formed in the second region of the connection surface 12.
- connection electrode group 21d is configured similarly to the connection electrode group 21c. More specifically, the connection electrode group 21d includes two first connection electrodes (connection electrodes) 22d and two second connection electrodes (connection electrodes) 23d that face each other in the first direction.
- the connection electrodes 22d and 23d include extension patterns 223d and 233d derived so as to circulate around the connection electrodes 22d and 23d, respectively. Further, in the vicinity of the connection electrodes 22d and 23d formed in the central portion in the arrangement direction (second direction) of the pyroelectric plate 10, cut pieces 225d and 235d separated from the extension patterns 223d and 233d are formed, respectively. ing.
- the areas of the extension patterns 223d and 233d formed in the vicinity of the end portion 13 of the pyroelectric plate 10 are the same as those of the extension patterns 223d and 233d formed in the central portion of the pyroelectric plate 10. It is wider than the area. Specifically, the lengths of the opposing portions of the extension patterns 223d and 233d formed in the vicinity of the end portion 13 of the pyroelectric plate 10 are equal to the lengths of the extension patterns 223d and 233d formed in the central portion of the pyroelectric plate 10. It is longer than the length of the part to be performed.
- connection electrode 22d formed near the end 13 of the pyroelectric plate 10 and the connection electrode 23d is such that the connection electrode 22d and the connection electrode 23d formed at the center of the pyroelectric plate 10 Less than the distance between.
- the configuration of the second region can provide the same effect as the configuration of the first region.
- a shield pattern (electric field shield) 16d is provided between the connection electrode 22d and the connection electrode 23d.
- the electric field shield 16d is formed so as to go around each of the connection electrode 22d and the connection electrode 23d.
- the electric field shield 16d includes a portion extending around the outside of the extension patterns 223d and 233d (that is, outside the connection electrode group 21d), a portion extending between the extension pattern 223d and the extension pattern 233d, and two extension patterns. 223d (extension pattern 233d).
- the electric field shield 16d By forming the electric field shield 16d described above, similar to the case where the cut pieces 225c and 235c are formed, it is generated between the connection electrode 22d and the connection electrode 23d and between the two connection electrodes 22d (connection electrode 23d). Potential interference can be suppressed.
- connection surface 12 for example, a ground electrode 14d connected to a ground portion (not shown) of a circuit board is formed.
- the electric field shield 16d is grounded, thereby preventing noise of the connection electrodes 22d and 23d due to an external electric field.
- different conductor patterns are formed in the first region and the second region of the connection surface 12.
- the first region and the second region may be formed similarly.
- the pyroelectric infrared detection device includes a pyroelectric sensor array (not shown) including the pyroelectric plate 10, and a pyroelectric sensor array. And a circuit board 4c to be mounted.
- the circuit board 4 c includes a mounting portion 44 on which the pyroelectric plate 10 is mounted, a potential detection circuit 80 of 12, a grounding portion (not shown), 8 Two circuit side first electrodes (circuit side electrodes) 52, four circuit side first electrodes (circuit side electrodes) 52c, eight circuit side second electrodes (circuit side electrodes) 56, and four circuit side second electrodes.
- An electrode (circuit side electrode) 56c, eight conductor patterns 60, four conductor patterns 60c, and one ground conductor pattern 62 are provided.
- the circuit board 4 c according to the present embodiment is configured as a mirror object with respect to the ground conductor pattern 62.
- the circuit side electrodes 52, 52c, 56 and 56c are formed at positions corresponding to connection electrodes (not shown) formed on the connection surface of the pyroelectric plate 10, respectively.
- the pyroelectric sensor array and the circuit board 4c are electrically connected to the corresponding connection electrodes in the connected state.
- eight electrode pairs including the circuit side electrode 52 and the circuit side electrode 56 are formed. This electrode pair corresponds to a pyroelectric element (not shown) formed near the end 13 of the pyroelectric plate 10.
- four electrode pairs including the circuit side electrode 52c and the circuit side electrode 56c are formed. This electrode pair corresponds to a pyroelectric element (not shown) formed at the center of the pyroelectric plate 10.
- the circuit side electrodes 52 and 52c are electrically connected to the corresponding potential detection circuit 80 by the conductor patterns 60 and 60c, respectively.
- the conductor pattern 60c electrically connects the connection electrode (not shown) of the central pyroelectric element (not shown) of the pyroelectric plate 10 and the potential detection circuit 80.
- Reference numeral 60 denotes an electrical connection between a connection electrode (not shown) of an edge pyroelectric element (not shown) of the pyroelectric plate 10 and the potential detection circuit 80.
- the circuit-side electrodes 56 and 56 c are electrically connected to a ground portion (not shown) by the ground conductor pattern 62.
- the distance from one conductor pattern 60c to another conductor pattern 60c, conductor pattern 60 and ground conductor pattern 62 is one conductor pattern 60 to another conductor pattern 60, conductor pattern 60c. And the distance to the ground conductor pattern 62 is longer.
- three potential detection circuits 80 are arranged at each of the four corners of the rectangular circuit board, and one conductor pattern 60c, two conductor patterns 60, and However, each extends in a line toward the three potential detection circuits 80.
- the above-described conductor pattern 60c extends near the edge of the circuit board 4c, and is designed so that the distance between the adjacent conductor patterns 60 is long. More specifically, the distance between the two conductor patterns 60 adjacent to each other is narrowed to increase the distance between the conductor pattern 60 c and the conductor pattern 60.
- the capacitance generated in the circuit-side electrode 52c in the connected state can be reduced.
- the capacitance of the pyroelectric sensor is generated not only by the connection electrodes of the pyroelectric plate 10, but also by the conductor patterns 60 and 60c of the circuit board 4c being drawn long. Capacitance can be reduced by separating the conductor pattern 60c electrically connected to a connection electrode (not shown) at the center of the pyroelectric plate 10 from other conductors on the circuit board 4c.
- the four circuit side electrodes 56 have a circuit side shield pattern 66c.
- the circuit side shield pattern 66c is derived from the circuit side electrode 56, and one circuit side shield pattern 66c is located between the conductor pattern 60c and the conductor pattern 60, and the other one circuit side shield pattern 66c. Is located between the two conductor patterns 60.
- the pyroelectric infrared detector according to the sixth embodiment of the present invention includes a pyroelectric sensor array 1e formed in a dome shape and a circuit on which the pyroelectric sensor array 1e is mounted. And a substrate (not shown).
- the pyroelectric sensor array 1e includes a pyroelectric plate 10e made of a pyroelectric body, a plurality of edge pyroelectric elements (pyroelectric elements) 20e formed on the pyroelectric plate 10e, and And a plurality of central pyroelectric elements (pyroelectric elements) 30e.
- the pyroelectric plate 10e is formed in a dome shape with a raised central portion.
- the pyroelectric plate 10 includes, for example, a convex light receiving surface 11e that receives infrared rays, and a connection surface 12e that is opposite to the light receiving surface 11e and is placed on a circuit board (not shown). Have.
- the pyroelectric plate 10e has an end portion (peripheral portion) 13e on the periphery in the radial direction.
- the pyroelectric element 20e is disposed in the vicinity of the end 13e in the radial direction, and the pyroelectric element 30e is disposed in the vicinity of the center in the radial direction.
- the arrangement direction of the pyroelectric elements 20e and 30e is the radial direction of the pyroelectric plate 10e.
- each of the pyroelectric elements 20e and 30e includes a connection electrode group 21e.
- the connection electrode group 21e has two pairs of a first connection electrode (connection electrode) 22e and a second connection electrode (connection electrode) 23e that face each other in a first direction substantially parallel to the connection surface 12.
- the connection electrode 22e is connected to the pyroelectric sensor array 1e and the circuit board (not shown), and is connected to a potential detection circuit (not shown) formed on the circuit board. ),
- the connection electrode 23e is a portion that is electrically connected to a ground portion (not shown) formed on the circuit board in the connected state.
- the extension patterns 223e and 233e are formed on the connection electrodes 22e and 23e, respectively.
- the lengths of the extension patterns 223e and 233e formed on the connection electrode group 21e at the periphery of the pyroelectric plate 10e are the same as the lengths of the extension patterns 223e and 233e formed on the connection electrode group 21e at the center of the pyroelectric plate 10e. Longer than the length. Therefore, the capacitance of the connection electrode group 21e arranged at the peripheral portion of the pyroelectric plate 10e can be made larger than the capacitance of the connection electrode group 21e arranged at the central portion of the pyroelectric plate 10e. it can.
- the thermal insulation between the pyroelectric sensor array 1e and the circuit board (not shown) is impaired as in the already described embodiment. Therefore, variations in capacitance can be reduced or canceled, and variations in infrared detection sensitivity (detection sensitivity) and time response characteristics of the pyroelectric elements 20e and 30e can be reduced.
- the present invention is based on Japanese Patent Application No. 2010-238221 filed with the Japan Patent Office on October 25, 2010, the contents of which are incorporated herein by reference.
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Abstract
Description
回路基板に取り付け可能であり、焦電体板と、前記焦電体板に形成された複数の焦電素子とを備える焦電センサアレイであって、
前記焦電体板は、前記回路基板の上に置かれる接続面を有しており、
前記複数の焦電素子は、所定の配置方向において前記焦電体板の縁部に配置された縁部焦電素子と前記焦電体板の中央部に配置された中央部焦電素子とからなり、前記複数の焦電素子の夫々は、前記接続面上に形成された隣り合う2つの接続電極を備えており、
前記縁部焦電素子の前記2つの接続電極間の静電容量は、前記中央部焦電素子の前記2つの接続電極間の静電容量よりも大きい
焦電センサアレイを提供する。
前記焦電センサアレイと、前記焦電センサアレイが取り付けられる回路基板とを備える焦電型赤外線検出装置であって、
前記回路基板は、前記焦電センサアレイの前記接続面が置かれる搭載部と、前記搭載部の外側に設けられた複数の電位検出回路と、接地部と、複数の導体パターンと、複数の接地導体パターンとを備えており、
前記導体パターンは、前記2つの接続電極のうちの一方と前記電位検出回路とを電気的に接続しており、前記接地導体パターンは、前記2つの接続電極のうちの他方と前記接地部とを電気的に接続している
焦電型赤外線検出装置が得られる。
図1に示されるように、本発明の第1の実施の形態による焦電型赤外線検出装置は、焦電センサアレイ1と、焦電センサアレイ1が取り付けられる回路基板4とを備えている。換言すれば、焦電センサアレイ1は、回路基板4に取り付け可能に構成されている。
図4から理解されるように、本発明の第2の実施の形態による焦電型赤外線検出装置は、第1の実施の形態による回路基板4と同様に構成された回路基板(図示せず)と、回路基板に搭載される焦電センサアレイ1aとを備えている。
図5乃至図7に示されるように、本発明の第3の実施の形態による焦電型赤外線検出装置は、回路基板4bと、回路基板4bに搭載される焦電センサアレイ1bとを備えている。焦電センサアレイ1bは、焦電センサアレイ1及び1aと同様に、平板状に形成されている。
図9から理解されるように、本発明の第4の実施の形態による焦電型赤外線検出装置は、既に説明した実施の形態による焦電型赤外線検出装置と同様に構成されている。より具体的には、第4の実施の形態による焦電型赤外線検出装置は、平板状の焦電センサアレイ1cと、焦電センサアレイ1cが搭載される回路基板(図示せず)とを備えている。第4の実施の形態による焦電体板10は、図9の仮想線(IL)を境界線とする第1領域と第2領域とを有している。
図10から理解されるように、本発明の第5の実施の形態による焦電型赤外線検出装置は、焦電体板10を備える焦電センサアレイ(図示せず)と、焦電センサアレイが搭載される回路基板4cとを備えている。
図11から理解されるように、本発明の第6の実施の形態による焦電型赤外線検出装置は、ドーム状に形成された焦電センサアレイ1eと、焦電センサアレイ1eが搭載される回路基板(図示せず)とを備えている。
10,10e 焦電体板
11,11e 受光面
12,12e 接続面
13 端部
13e 端部(周縁部)
14d 接地電極
16d シールドパターン(電界シールド)
20,20a,20b,20c,20e 縁部焦電素子(焦電素子)
21,21a,21b,21c,21d,21e 接続電極群
22,22a,22b,22c,22d,22e 第1接続電極(接続電極)
23,23a,23b,23c,23d,23e 第2接続電極(接続電極)
221,221a,221b (第1接続電極の)対向辺
231,231a,231b (第2接続電極の)対向辺
222b,232b 櫛歯パターン
223c,223d,223e (第1接続電極の)延長パターン
233c,233d,233e (第2接続電極の)延長パターン
224c,234c 対向部
225c,225d,235c,235d 切断片
25,25b 受光電極群
26 受光電極
28 接続パターン
30,30a,30b,30c,30e 中央部焦電素子(焦電素子)
4,4b,4c 回路基板
42 基板側接続面
44 搭載部
50 回路側電極群(電極対)
50b 回路側電極群
52,52c,53 回路側第1電極(回路側電極)
56,56c,57 回路側第2電極(回路側電極)
60,60c 導体パターン
62 接地導体パターン
66c 回路側シールドパターン
80 電位検出回路
Claims (15)
- 回路基板に取り付け可能であり、焦電体板と、前記焦電体板に形成された複数の焦電素子とを備える焦電センサアレイであって、
前記焦電体板は、前記回路基板の上に置かれる接続面を有しており、
前記複数の焦電素子は、所定の配置方向において前記焦電体板の縁部に配置された縁部焦電素子と前記焦電体板の中央部に配置された中央部焦電素子とからなり、前記複数の焦電素子の夫々は、前記接続面上に形成された隣り合う2つの接続電極を備えており、
前記縁部焦電素子の前記2つの接続電極間の静電容量は、前記中央部焦電素子の前記2つの接続電極間の静電容量よりも大きい
焦電センサアレイ。 - 請求項1記載の焦電センサアレイであって、
前記縁部焦電素子の前記2つの接続電極において前記静電容量を生じさせる部位の長さは、前記中央部焦電素子の前記2つの接続電極において前記静電容量を生じさせる部位の長さよりも長い
焦電センサアレイ。 - 請求項1又は請求項2に記載の焦電センサアレイであって、
前記縁部焦電素子の前記2つの接続電極において前記静電容量を生じさせる部位の間の距離は、前記中央部焦電素子の前記2つの接続電極において前記静電容量を生じさせる部位の間の距離よりも短い
焦電センサアレイ。 - 請求項1乃至請求項3のいずれかに記載の焦電センサアレイであって、
前記2つの接続電極は、前記接続面と平行な第1方向において対向しており、
前記第1方向と直交し前記接続面と平行な第2方向において、前記縁部焦電素子の前記2つの接続電極の長さは、前記中央部焦電素子の前記2つの接続電極の長さよりも長い
焦電センサアレイ。 - 請求項4記載の焦電センサアレイであって、
前記第1方向において、前記縁部焦電素子の前記2つの接続電極の距離は、前記中央部焦電素子の前記2つの接続電極の距離よりも短い
焦電センサアレイ。 - 請求項1乃至請求項3のいずれかに記載の焦電センサアレイであって、
前記2つの接続電極は、前記接続面と平行な第2方向において対向しており、
前記縁部焦電素子の前記2つの接続電極の夫々は、対向する接続電極に向かって前記第2方向に沿って延びる櫛歯パターンを備えており、前記2つの接続電極の一方の櫛歯パターンと前記2つの接続電極の他方の櫛歯パターンとは、前記第2方向と直交し前記接続面と平行な第1方向において対向している
焦電センサアレイ。 - 請求項1乃至請求項3のいずれかに記載の焦電センサアレイであって、
前記2つの接続電極は、前記接続面と平行な第1方向において対向しており、
前記2つの接続電極は、前記接続電極から前記接続電極を周回するようにして延び前記第1方向において部分的に対向する延長パターンを夫々備えており、
前記縁部焦電素子の前記延長パターンにおける対向する部分の長さは、前記中央部焦電素子の前記延長パターンにおける対向する部分の長さよりも長い
焦電センサアレイ。 - 請求項7記載の焦電センサアレイであって、
前記第1方向において、前記縁部焦電素子の前記延長パターンにおける対向する部分の間の距離は、前記中央部焦電素子の前記延長パターンにおける対向する部分の間の距離よりも短い
焦電センサアレイ。 - 請求項1乃至請求項8のいずれかに記載の焦電センサアレイであって、
前記2つの接続電極の間に電界シールドが設けられている
焦電センサアレイ。 - 請求項9記載の焦電センサアレイであって、
前記電界シールドは、前記2つの接続電極の夫々を周回するように形成されている
焦電センサアレイ。 - 請求項1乃至請求項10のいずれかに記載の焦電センサアレイであって、
前記焦電体板は、互いに直交する2方向に延びる平板状に形成されており、
前記配置方向は、前記2方向のうちの一方であり、
前記縁部焦電素子は、前記配置方向における端部近傍に配置されており、前記中央部焦電素子は、前記配置方向における中間部近傍に配置されている
焦電センサアレイ。 - 請求項1乃至請求項10のいずれかに記載の焦電センサアレイであって、
前記焦電体板は、ドーム状に形成されており、
前記配置方向は、前記焦電体板の径方向であり、
前記縁部焦電素子は、前記配置方向における周縁部近傍に配置されており、前記中央部焦電素子は、前記配置方向における中心部近傍に配置されている
焦電センサアレイ。 - 請求項1乃至請求項12のいずれかに記載の焦電センサアレイと、前記焦電センサアレイが取り付けられる回路基板とを備える焦電型赤外線検出装置であって、
前記回路基板は、前記焦電センサアレイの前記接続面が置かれる搭載部と、前記搭載部の外側に設けられた複数の電位検出回路と、接地部と、複数の導体パターンと、複数の接地導体パターンとを備えており、
前記導体パターンは、前記2つの接続電極のうちの一方と前記電位検出回路とを電気的に接続しており、前記接地導体パターンは、前記2つの接続電極のうちの他方と前記接地部とを電気的に接続している
焦電型赤外線検出装置。 - 請求項13記載の焦電型赤外線検出装置であって、
前記縁部焦電素子の前記接続電極と前記電位検出回路とを電気的に接続する導体パターンの長さは、前記中央部焦電素子の前記接続電極と前記電位検出回路とを電気的に接続する導体パターンの長さよりも短い
焦電型赤外線検出装置。 - 請求項13又は請求項14記載の焦電型赤外線検出装置であって、
前記中央部焦電素子の前記接続電極と前記電位検出回路とを電気的に接続する導体パターンから、他の前記導体パターン及び前記接地導体パターンまでの間の距離は、前記縁部焦電素子の前記接続電極と前記電位検出回路とを電気的に接続する導体パターンから、他の前記導体パターン及び前記接地導体パターンまでの間の距離よりも長い
焦電型赤外線検出装置。
Priority Applications (4)
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US13/881,354 US8766187B2 (en) | 2010-10-25 | 2011-10-18 | Pyroelectric sensor array and pyroelectric infrared detection device |
JP2012540787A JP5901533B2 (ja) | 2010-10-25 | 2011-10-18 | 焦電センサアレイ及び焦電型赤外線検出装置 |
CN201180050560.2A CN103229028B (zh) | 2010-10-25 | 2011-10-18 | 热释电传感器阵列以及热释电型红外线检测装置 |
KR1020137012845A KR20140022765A (ko) | 2010-10-25 | 2011-10-18 | 초전 센서 어레이 및 초전형 적외선 검출 장치 |
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WO2012056943A1 true WO2012056943A1 (ja) | 2012-05-03 |
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PCT/JP2011/073932 WO2012056943A1 (ja) | 2010-10-25 | 2011-10-18 | 焦電センサアレイ及び焦電型赤外線検出装置 |
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US (1) | US8766187B2 (ja) |
JP (1) | JP5901533B2 (ja) |
KR (1) | KR20140022765A (ja) |
CN (1) | CN103229028B (ja) |
TW (1) | TWI507667B (ja) |
WO (1) | WO2012056943A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017221718A1 (ja) * | 2016-06-23 | 2017-12-28 | 株式会社村田製作所 | 赤外線検出素子、および、赤外線検出装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8916824B2 (en) * | 2011-10-31 | 2014-12-23 | Seiko Epson Corporation | Pyroelectric light detector, pyroelectric light detecting device, and electronic device |
JP6377153B2 (ja) * | 2013-06-25 | 2018-08-22 | デジタルダイレクト・アイアール、インク | サイドスキャン赤外線撮像装置 |
CN105910719B (zh) * | 2016-04-08 | 2018-08-10 | 电子科技大学 | 一种应用于热释电探测器的测试电路 |
DE102017102833A1 (de) * | 2017-01-18 | 2018-07-19 | Heimann Sensor Gmbh | Hochauflösendes Thermopile Infrarot Sensorarray |
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- 2011-10-18 WO PCT/JP2011/073932 patent/WO2012056943A1/ja active Application Filing
- 2011-10-18 CN CN201180050560.2A patent/CN103229028B/zh active Active
- 2011-10-18 US US13/881,354 patent/US8766187B2/en active Active
- 2011-10-18 KR KR1020137012845A patent/KR20140022765A/ko not_active Application Discontinuation
- 2011-10-18 JP JP2012540787A patent/JP5901533B2/ja active Active
- 2011-10-24 TW TW100138484A patent/TWI507667B/zh active
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JPH04198724A (ja) * | 1990-11-28 | 1992-07-20 | Matsushita Electric Ind Co Ltd | 焦電型リニアアレイ赤外検出素子 |
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JPH06186082A (ja) * | 1992-12-22 | 1994-07-08 | Murata Mfg Co Ltd | 赤外線センサ装置 |
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WO2017221718A1 (ja) * | 2016-06-23 | 2017-12-28 | 株式会社村田製作所 | 赤外線検出素子、および、赤外線検出装置 |
US10823620B2 (en) | 2016-06-23 | 2020-11-03 | Murata Manufacturing Co., Ltd. | Infrared detection element and infrared detection device |
Also Published As
Publication number | Publication date |
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TW201229470A (en) | 2012-07-16 |
JPWO2012056943A1 (ja) | 2014-05-12 |
US20130221220A1 (en) | 2013-08-29 |
US8766187B2 (en) | 2014-07-01 |
JP5901533B2 (ja) | 2016-04-13 |
CN103229028A (zh) | 2013-07-31 |
KR20140022765A (ko) | 2014-02-25 |
CN103229028B (zh) | 2016-02-10 |
TWI507667B (zh) | 2015-11-11 |
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