WO2012009543A4 - Contraste amélioré pour microscope électronique confocal à balayage - Google Patents
Contraste amélioré pour microscope électronique confocal à balayage Download PDFInfo
- Publication number
- WO2012009543A4 WO2012009543A4 PCT/US2011/044019 US2011044019W WO2012009543A4 WO 2012009543 A4 WO2012009543 A4 WO 2012009543A4 US 2011044019 W US2011044019 W US 2011044019W WO 2012009543 A4 WO2012009543 A4 WO 2012009543A4
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detector
- sample
- image
- electron
- detecting
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/153—Correcting image defects, e.g. stigmators
- H01J2237/1534—Aberrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201180034572.6A CN102971824B (zh) | 2010-07-14 | 2011-07-14 | 用于扫描共焦电子显微镜的改进对比度 |
JP2013519830A JP5871440B2 (ja) | 2010-07-14 | 2011-07-14 | 走査共焦点電子顕微鏡のコントラストの向上 |
EP11807515.9A EP2593958B1 (fr) | 2010-07-14 | 2011-07-14 | Contraste amélioré pour microscope électronique confocal à balayage |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US36435510P | 2010-07-14 | 2010-07-14 | |
US61/364,355 | 2010-07-14 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2012009543A2 WO2012009543A2 (fr) | 2012-01-19 |
WO2012009543A3 WO2012009543A3 (fr) | 2012-04-12 |
WO2012009543A4 true WO2012009543A4 (fr) | 2012-06-07 |
Family
ID=45466186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2011/044019 WO2012009543A2 (fr) | 2010-07-14 | 2011-07-14 | Contraste amélioré pour microscope électronique confocal à balayage |
Country Status (5)
Country | Link |
---|---|
US (1) | US8405027B2 (fr) |
EP (1) | EP2593958B1 (fr) |
JP (1) | JP5871440B2 (fr) |
CN (1) | CN102971824B (fr) |
WO (1) | WO2012009543A2 (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2485239A1 (fr) | 2011-02-07 | 2012-08-08 | FEI Company | Procédé de centrage d'un élément optique dans un TEM comprenant un élément d'amélioration du contraste |
DE102012007868A1 (de) * | 2012-04-19 | 2013-10-24 | Carl Zeiss Microscopy Gmbh | Transmissionselektronenmikroskopiesystem |
EP2667399A1 (fr) | 2012-05-23 | 2013-11-27 | FEI Company | Plaque de phase améliorée pour TEM |
EP2704178B1 (fr) | 2012-08-30 | 2014-08-20 | Fei Company | Imagerie d'un échantillon dans un TEM équipé d'une plaque de phase |
JP2014082143A (ja) * | 2012-10-18 | 2014-05-08 | Hitachi High-Technologies Corp | 電子顕微鏡 |
DE102014212450B4 (de) * | 2014-06-27 | 2022-09-01 | Carl Zeiss Microscopy Gmbh | Verfahren zur Verbesserung der Auflösung von STEM-Abbildungen, Vorrichtung und Computerprogrammprodukt |
US9613779B2 (en) | 2015-11-12 | 2017-04-04 | Ningbo Focus-ebeam Instruments Inc. | Scanning transmission electron microscope with variable axis objective lens and detective system |
CN106908627B (zh) * | 2017-03-10 | 2019-10-01 | 中国科学院青海盐湖研究所 | 扫描极化力显微镜成像对比度的调控方法 |
JP6962757B2 (ja) * | 2017-09-15 | 2021-11-05 | 日本電子株式会社 | 測定方法および電子顕微鏡 |
EP3550585B1 (fr) * | 2018-04-05 | 2021-06-23 | FEI Company | Étude de spécimens dynamiques dans un microscope à particules chargées de transmission |
JP2020149767A (ja) * | 2019-03-11 | 2020-09-17 | 株式会社日立ハイテク | 荷電粒子線装置 |
WO2020214966A1 (fr) | 2019-04-19 | 2020-10-22 | Direct Electron, Lp | Appareil et procédé de comptage de plage dynamique élevée par des détecteurs pixelisés |
EP3956919A4 (fr) * | 2019-04-19 | 2023-06-07 | Direct Electron, LP | Système, appareil et procédé de détermination d'une composition élémentaire à l'aide de la technique 4d stem |
US10825644B1 (en) * | 2019-07-25 | 2020-11-03 | Fei Company | Corrector transfer optics for Lorentz EM |
JP6962979B2 (ja) * | 2019-09-12 | 2021-11-05 | 日本電子株式会社 | 暗視野像の取得方法 |
US11404241B2 (en) * | 2020-03-30 | 2022-08-02 | Fei Company | Simultaneous TEM and STEM microscope |
US11460419B2 (en) | 2020-03-30 | 2022-10-04 | Fei Company | Electron diffraction holography |
EP3929962A1 (fr) * | 2020-06-25 | 2021-12-29 | FEI Company | Procédé d'imagerie d'un échantillon à l'aide d'un microscope à particules chargées de transmission |
JP7083869B2 (ja) * | 2020-07-20 | 2022-06-13 | 日本電子株式会社 | 画像処理方法および画像処理装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3013467A (en) | 1957-11-07 | 1961-12-19 | Minsky Marvin | Microscopy apparatus |
US3908124A (en) * | 1974-07-01 | 1975-09-23 | Us Energy | Phase contrast in high resolution electron microscopy |
DE19510102C1 (de) | 1995-03-20 | 1996-10-02 | Rainer Dr Uhl | Konfokales Fluoreszenzmikroskop |
DE19680624D2 (de) | 1995-07-25 | 1998-08-20 | Nmi Univ Tuebingen | Verfahren und Vorrichtung zur Ionendünnung in einem hochauflösenden Transmissionselektronenmikroskop |
JP4069545B2 (ja) | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
JP2001006591A (ja) * | 1999-06-18 | 2001-01-12 | Jeol Ltd | 荷電粒子ビーム装置 |
JP4006165B2 (ja) * | 2000-04-21 | 2007-11-14 | 株式会社日立製作所 | 元素分析装置及び走査透過型電子顕微鏡並びに元素分析方法 |
US6548810B2 (en) * | 2001-08-01 | 2003-04-15 | The University Of Chicago | Scanning confocal electron microscope |
DE102004034970A1 (de) * | 2004-07-16 | 2006-02-02 | Carl Zeiss Jena Gmbh | Lichtrastermikroskop und Verwendung |
JP2006196236A (ja) * | 2005-01-12 | 2006-07-27 | Hitachi High-Technologies Corp | 電子顕微鏡及び観察方法 |
JP2007179753A (ja) * | 2005-12-27 | 2007-07-12 | Hitachi High-Technologies Corp | 走査透過電子顕微鏡、及び収差測定方法 |
DE102007009551B3 (de) | 2007-02-27 | 2008-08-21 | Ludwig-Maximilian-Universität | Vorrichtung für die konfokale Beleuchtung einer Probe |
JP2008270056A (ja) * | 2007-04-24 | 2008-11-06 | National Institute For Materials Science | 走査型透過電子顕微鏡 |
US7777185B2 (en) * | 2007-09-25 | 2010-08-17 | Ut-Battelle, Llc | Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope |
EP2063450A1 (fr) * | 2007-11-21 | 2009-05-27 | FEI Company | Procédé pour l'obtention d'une image de transmission de balayage d'un échantillon dans un appareil d'optique corpusculaire |
EP2091062A1 (fr) * | 2008-02-13 | 2009-08-19 | FEI Company | TEM avec correcteur d'aberrations et lame de phase |
-
2011
- 2011-07-14 EP EP11807515.9A patent/EP2593958B1/fr active Active
- 2011-07-14 WO PCT/US2011/044019 patent/WO2012009543A2/fr active Application Filing
- 2011-07-14 CN CN201180034572.6A patent/CN102971824B/zh active Active
- 2011-07-14 JP JP2013519830A patent/JP5871440B2/ja active Active
- 2011-07-14 US US13/182,992 patent/US8405027B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20120012747A1 (en) | 2012-01-19 |
US8405027B2 (en) | 2013-03-26 |
CN102971824B (zh) | 2016-01-13 |
EP2593958A2 (fr) | 2013-05-22 |
EP2593958B1 (fr) | 2019-02-20 |
EP2593958A4 (fr) | 2015-01-07 |
JP5871440B2 (ja) | 2016-03-01 |
WO2012009543A2 (fr) | 2012-01-19 |
WO2012009543A3 (fr) | 2012-04-12 |
CN102971824A (zh) | 2013-03-13 |
JP2013532883A (ja) | 2013-08-19 |
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