WO2011148745A1 - 空気浄化加湿装置 - Google Patents

空気浄化加湿装置 Download PDF

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Publication number
WO2011148745A1
WO2011148745A1 PCT/JP2011/059849 JP2011059849W WO2011148745A1 WO 2011148745 A1 WO2011148745 A1 WO 2011148745A1 JP 2011059849 W JP2011059849 W JP 2011059849W WO 2011148745 A1 WO2011148745 A1 WO 2011148745A1
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Prior art keywords
amount
air
water
gas
liquid contact
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Ceased
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PCT/JP2011/059849
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English (en)
French (fr)
Japanese (ja)
Inventor
小川昌幸
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Taikisha Ltd
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Taikisha Ltd
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Priority to KR1020127031502A priority Critical patent/KR101754311B1/ko
Priority to CN201180025759.XA priority patent/CN102933910B/zh
Publication of WO2011148745A1 publication Critical patent/WO2011148745A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00—Air-humidification, e.g. cooling by humidification
    • F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air
    • F24F6/04—Air-humidification, e.g. cooling by humidification by evaporation of water in the air using stationary unheated wet elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4508—Gas separation or purification devices adapted for specific applications for cleaning air in buildings

Definitions

  • the present invention relates to an air purification humidifier.
  • This air purification humidifier is used for adjusting the air supplied to a clean room for semiconductor manufacturing. More specifically, this air purification humidifier has a gas-liquid contact chamber. In this gas-liquid contact chamber, the air to be treated that is ventilated in the room is brought into gas-liquid contact with clean water. By this gas-liquid contact, the water-soluble gas component in the processing target air is removed, and the processing target air is purified. Further, the air to be treated is humidified along with this air purification.
  • This circulating water supply type apparatus includes a storage tank that receives used clean water discharged from the gas-liquid contact chamber (that is, clean water that has absorbed water-soluble gas components contained in the air to be treated). The clean water taken out from the storage tank is circulated and supplied to the gas-liquid contact chamber, whereby the supplied clean water and the processing target air are brought into gas-liquid contact in the gas-liquid contact chamber.
  • this circulating water supply type device a part of the clean water is spent on humidifying the processing target air and carried away to the processing target air. Further, the water-soluble gas component absorbed and removed from the air to be treated is brought into the storage tank together with the used clean water. In response to these matters, a necessary amount of fresh clean water is supplied to the storage tank from the clean water supply means. By this replenishment, the concentration of the water-soluble gas component of clean water circulated from the storage tank to the gas-liquid contact chamber is kept below a certain value (that is, kept at a certain degree of cleanliness).
  • a single supercharged water type apparatus shown in FIG.
  • fresh clean water supplied from the clean water supply means is temporarily supplied to the gas-liquid contact chamber.
  • all used clean water discharged from the gas-liquid contact chamber is discharged outside the apparatus.
  • the clean water supply means purifies the raw water to generate clean water
  • the single supercharging water type that returns the used clean water discharged from the gas-liquid contact chamber to the clean water supply means as a part of the raw water
  • the purification performance for removing water-soluble gas components from the air to be treated is defined as the basic water amount. Then, the required amount of water is obtained by adding the necessary amount of water for humidification necessary to humidify the air to be treated to a constant humidified state to the amount of necessary water for purification.
  • the air to be treated is air having a change in state such as outside air (change in the pre-treatment air state)
  • the necessary water amount for humidification required for the humidification changes due to the change in the state
  • the air-liquid contact chamber The required amount of clean water is also changed by the change in the required amount of water for humidification.
  • a certain large design water amount for humidification with a sufficient safety factor as the amount of water for humidification was set, and this design water amount for humidification was added to the necessary water amount for purification as the basic water amount.
  • the amount of water was the design water supply.
  • a constant water supply amount operation is performed in which clean water of this constant design water supply amount is continuously supplied to the gas-liquid contact chamber. That is, the amount of water supply was not adjusted according to the change in the required amount of water for humidification.
  • the state of the air to be treated is detected based on the detected air state. It is also conceivable to increase or decrease the amount of clean water supplied to the gas-liquid contact chamber by the amount of change in the required amount of humidifying water due to the change. However, in this case, since it is unclear whether the gas component has been removed with the required gas component removal efficiency, it is difficult to obtain an accurate control result for the gas component removal process.
  • this type of air purification humidifier has conventionally performed a constant water supply amount operation for continuously supplying an excessively constant amount of clean water supply to the gas-liquid contact chamber as described above. It was.
  • the main problem of the present invention is to supply clean water to the gas-liquid contact chamber while reliably and stably obtaining the required purification performance and the required humidification performance by adjusting the rational water supply amount. It is an object of the present invention to provide an air purification humidifier capable of making the amount necessary and sufficient for the required gas component removal efficiency, thereby effectively reducing the operation cost.
  • the first characteristic configuration of the present invention relating to an air purification humidifier is: Provided with a gas-liquid contact chamber for bringing the air to be treated that is ventilated indoors into contact with clean water in the room,
  • This is an air purification humidifier that purifies the processing target air by removing water-soluble gas components in the processing target air by gas-liquid contact with clean water in the gas-liquid contact chamber, and humidifies the processing target air.
  • a control means is provided for adjusting the amount of clean water supplied to the gas-liquid contact chamber on the basis of the detected amount of discharged water by the amount of discharged water detecting means to adjust the amount of discharged water to a set amount of discharged water.
  • the gas component removal efficiency of this type of air purification humidifier contributes to the purification of the air to be treated within the amount of water supplied to the gas-liquid contact chamber if the quality of the clean water supplied to the gas-liquid contact chamber is the same. It is known that it is determined by the ratio (that is, L / G value) between the amount of water to be processed and the air volume of the air to be treated.
  • the excess amount is treated together with the amount of water for purification in the amount of water supply. After contributing to the purification of air, it is discharged from the gas-liquid contact chamber.
  • the amount of water consumed for humidification of the treatment target air is equal to the actual required water amount for humidification after the change.
  • the amount of water that contributes to the purification of the air to be treated without being consumed for humidification ie, that contributes to the purification and is discharged from the gas-liquid contact chamber. The amount of water) changes.
  • the air purification humidifier of the first characteristic configuration described above by adjusting the water supply amount based on the detected drainage amount and adjusting the drainage amount to the set drainage amount, the required gas component removal efficiency is obtained as the set drainage amount.
  • the amount of water equal to the amount of water necessary for purification is set in advance.
  • the amount of water consumed for humidification of the water supply amount due to a change in the amount of water required for humidification is preferentially given to the amount of water equal to the amount of water required for humidification after the change.
  • the amount of water that contributes to purification of the air to be treated ie, the amount of water that becomes the amount of drainage from the gas-liquid contact chamber
  • the amount of water that becomes the amount of drainage from the gas-liquid contact chamber is maintained at the required amount of water for purification that is set as the set amount of drainage. be able to.
  • the gas component removal efficiency (purification performance) can be maintained at the required value regardless of changes in the amount of water required for humidification due to changes in the state of the air to be treated. Can be maintained at the required degree of purification. Further, the humidification performance is maintained by preferentially adjusting the amount of water consumed for humidification with respect to the change in the required amount of water for humidification as described above.
  • the detection of the amount of discharged water is generally more reliable in terms of detection accuracy than the detection of air conditions such as humidity and temperature, and detection errors are unlikely to occur. Therefore, if the water supply amount adjustment is based on the detected wastewater amount as described above, the problem with the water supply amount adjustment based on the detected air condition described above, that is, the situation where the gas component removal efficiency falls below the required value due to an adjustment error or the like. Invitation can be avoided more reliably.
  • the purified water with an excessive design water supply amount can be brought into gas-liquid contact while ensuring the required purification performance and the required humidification performance reliably and stably.
  • the amount of clean water supplied to the gas-liquid contact chamber is effectively reduced to the required and sufficient amount for the required gas component removal efficiency. This can effectively reduce the operating cost of the apparatus.
  • the following water supply amount adjustment is also conceivable. That is, if the amount of water that contributes to the purification of the air to be treated out of the water supply amount due to a change in the amount of water necessary for humidification occurs, the concentration of water-soluble gas components in the used clean water discharged from the gas-liquid contact chamber (i.e. , Absorption gas component concentration) also changes.
  • the gas component concentration of the discharged clean water from the gas-liquid contact chamber is detected, and the amount of clean water supplied to the gas-liquid contact chamber is set so as to maintain the gas component concentration of the discharged clean water at the set concentration based on the detected concentration. It is possible to adjust automatically.
  • the air purification / humidification device having the first characteristic configuration that adjusts the amount of water supply based on the detected amount of wastewater can more reliably avoid such a situation as described above.
  • the amount of clean water supplied can be effectively reduced while reliably and stably obtaining the required purification performance and required humidification performance.
  • Cai concentration of water-soluble gas component in the air to be treated before treatment
  • Cao concentration of water-soluble gas component in the air to be treated after treatment
  • the contact method between the clean water and the air to be treated is a method in which the clean water is transferred to the surface of the flow-down member in the gas-liquid contact chamber to flow down in a water film state,
  • a method of supplying clean water to a breathable member with moisture content and wettability placed in the contact chamber, or a method of spraying clean water in a high-density state in the gas-liquid contact chamber, or a method combining these methods Various contact methods can be employed.
  • the clean water to be used (fresh water supplied to the circulation system in the circulating water supply system, fresh clean water supplied to the gas-liquid contact chamber in the single-supercharging water system) is purified water, purified water purified with a filter, etc.
  • Various clean waters can be used as long as they can maintain a substantially constant water quality. Moreover, you may make it use the various aqueous solution which added the chemical
  • the air purification humidifier having the first characteristic configuration is particularly effective when air for which the air state before processing such as outside air changes every moment is used as processing target air.
  • the air to be treated may be air in which the air state before the treatment does not normally change or does not change so much, and even in that case, it is effective in the sense of preparing for a change in the state of the air to be treated due to some cause.
  • the cause of the change in the required amount of water for humidification is not limited to the change in the state of the air to be treated, but may be a change in the required amount of water for humidification due to other causes. Therefore, the required purification performance can be stably maintained with this air purification humidifier.
  • the second characteristic configuration of the present invention relating to the air purification humidifier is: An air volume detecting means for detecting an air flow volume of the air to be processed with respect to the gas-liquid contact chamber;
  • the control means is configured to change the set drainage amount based on the detected ventilation amount of the air volume detection means.
  • the gas component removal efficiency is the ratio of the amount of water that contributes to the purification of the air to be treated (that is, the amount of water to be drained) and the air volume of the air to be treated without spending humidification, as described above. It is determined by the L / G value. Therefore, when the flow rate of the processing target air to the gas-liquid contact chamber (that is, the processing air volume of the processing target air) changes, the required amount of water for humidification required to humidify the processing target air to a constant humidification state changes proportionally. In addition, the necessary amount of water for purification necessary for obtaining the required gas component removal efficiency (purification performance) also changes with a certain correlation.
  • the set drainage amount is changed based on the detected ventilation amount, and the respective correlations exist between the ventilation amount of the air to be treated and the necessary water amount for purification.
  • the amount of water that is equal to the required amount of water for purification corresponding to the amount of ventilation of the air to be treated at the time (practically, the amount of water that allows for a certain degree of safety factor) is set as the set amount of drainage.
  • the amount of water consumed for humidifying the air to be treated out of the amount of water supplied is the amount of water required for humidification at each point in time (i.e., with the change in the amount of air flow, as described above).
  • the amount of water that contributes to the purification of the air to be treated (the amount of water that becomes the amount of drainage) is also at each point in time while allowing the self-adjustment to preferentially adjust to the amount of water that is equal to the proportionally required amount of water for humidification)
  • the amount of water required for purification (that is, the amount of water required for purification that changes with a certain correlation as the amount of ventilation changes) can be automatically changed.
  • the gas component removal efficiency (purification performance) can be maintained at a required value regardless of the change in the air flow rate of the processing target air, and the degree of purification of the processed air can be maintained at the required degree of purification.
  • the required humidification performance can be maintained.
  • the gas component concentration (absorbed gas component concentration) of the discharged clean water from the gas-liquid contact chamber is detected, and the gas liquid concentration is maintained based on the detected concentration.
  • the gas component removal efficiency (purification performance) can be maintained at the required value and the required humidification performance can be maintained even when the flow rate of the target air is changed. can do.
  • the detection of the concentration of the underwater gas component is generally low in reliability in terms of detection accuracy and easily causes a detection error.
  • the reliability of the ventilation rate detection is high and adjustment errors are unlikely to occur. Inviting a situation below the required value can be avoided more reliably.
  • the third characteristic configuration of the present invention relating to the air purification humidifier is As clean water supplied to the gas-liquid contact chamber, fresh clean water supplied from clean water supply means is temporarily supplied to the gas-liquid contact chamber.
  • the first characteristic configuration and the second characteristic configuration described above can be applied to either a circulating water supply type or a single supercharged water purification humidifier.
  • a single supercharging water purifying / humidifying device that temporarily and continuously supplies fresh clean water to the gas-liquid contact chamber can generally obtain higher gas component removal efficiency than a circulating water supply type.
  • the required gas component removal efficiency can be stably maintained even with respect to a change in the state of the air to be treated and a change in the amount of ventilation.
  • the third characteristic configuration that applies to the single-supercharged air purification humidifier is particularly suitable when a high degree of purification is required as the required degree of purification of the treated air.
  • a suitable air purification humidifier can be obtained.
  • the fourth characteristic configuration of the present invention relating to the air purification humidifier is As clean water to be supplied to the gas-liquid contact chamber, mixed water of used clean water discharged from the gas-liquid contact chamber and fresh clean water supplied from clean water supply means is supplied to the gas-liquid contact chamber. It is in the point which is made into composition.
  • a circulating water supply type air purification humidifier that only consumes fresh clean water as makeup water consumes essentially less fresh clean water than a single supercharged type.
  • the power consumption of the pump that supplies clean water to the gas-liquid contact chamber can be effectively reduced.
  • the fourth characteristic configuration for which the circulating water supply type air purification humidifier is applied is particularly required to reduce the operating cost in preference to the gas component removal efficiency.
  • a suitable air purification humidifier can be obtained.
  • the fifth characteristic configuration of the present invention relating to the air purification humidifier is:
  • the gas-liquid contact chamber is equipped with a flow-down medium arranged transversely to the air ventilation path, and a water supply header that drops clean water from above on the flow-down medium, This falling medium is formed by closely arranging corrugated members in a vertical posture in which a large number of inclined wave portions are formed, and the inclination direction of the inclined wave portions is reversed for each adjacent corrugated member.
  • the ventilation air and the clean water can be efficiently brought into gas-liquid contact, and high performance can be obtained for each of the air purification performance and the air humidification performance.
  • FIG. 1 is a diagram showing air conditioning equipment for a clean room.
  • FIG. 2 is a diagram showing the configuration of the external air conditioner.
  • FIG. 3 is a perspective view showing the gas-liquid contact portion.
  • FIG. 4 is an explanatory diagram of the material balance at the gas-liquid contact portion.
  • FIG. 1 shows a clean room air conditioning system.
  • fan filter units 2 are arranged side by side in a matrix arrangement across the entire surface of the ceiling of the target room 1 that is a clean room.
  • the air conditioning air SA supplied to the ceiling chamber 4 by the air supply fan Fs through the air supply path 3 is purified by the high performance filter 2a provided in each fan filter unit 2, and the air conditioning air SA after purification is purified by the fan filter.
  • the fan 2b installed in the unit 2 is blown out and supplied indoors. Thereby, the interior of the target room 1 is adjusted and maintained at a required cleanliness in a required temperature and humidity state.
  • the lower floor of the target room 1 is an under-floor chamber 6 that receives the air RA discharged from the room through the lattice floor 5 as the purified air conditioning air SA is supplied by the fan filter unit 2.
  • An air conditioner 7 air conditioner for adjusting outside air
  • an air conditioner 8 are provided for generating the air SA for air conditioning. That is, the outside air OA guided through the outside air introduction path 9 by the outside air fan Fo is adjusted by the outside air conditioner 7, and the adjusted outside air OAs in the outside air conditioner 7 is led to the air conditioner 8 through the relay path 10. Further, a part of the exhaust air RA received in the underfloor chamber 6 is led to the air conditioner 8 through the return air path 11 by the return air fan Fr as the return air RAs.
  • the temperature and humidity of the mixed air of the adjusted outside air OAs and the return air RAs are adjusted in the air conditioner 8, and the adjusted air in the air conditioner 8 is used as the air conditioning air SA through the air supply path 3 and the ceiling of the target room 1. Supply to chamber 4.
  • exhaust air RA received in the underfloor chamber 6 (exhaust air RA in an amount equal to the intake amount of the external air OA from the external air introduction passage 9) is exhausted to the outside through the exhaust passage 12 by the exhaust fan Fe.
  • the external air conditioner 7 includes a filter 13, a preheater 14, a precooler 15, a gas-liquid contactor 16, and a cooler 17 in order from the upper side in the ventilation direction of the outside air OA that is the processing target air.
  • the reheater 18 is installed.
  • the outside air OA guided through the outside air introduction path 9 is removed by the filter 13, and the removed outside air OA is preheated by the preheater 14 in the winter, and in the summer Is precooled by the precooler 15 and purified by bringing the preheated or precooled outside air OA into contact with the clean water W in the gas-liquid contactor 16 serving as an air purification humidifier, and saturated with the purification. Humidify close.
  • the outside air OA purified and humidified in the gas-liquid contactor 16 is cooled to a predetermined temperature by the cooler 17, so that the outside air OA is cooled and dehumidified to a predetermined absolute humidity.
  • the heater 18 is reheated to a predetermined temperature, and the temperature / humidity adjusted and purified outside air OA is supplied to the air conditioner 8 through the relay path 10 as adjusted outside air OAs.
  • the gas-liquid contactor 16 is provided with a flow-down medium 19 arranged in a state transverse to the ventilation path of the external air OA in the external air conditioner 7, and clean water W from above on the flow-down medium 19.
  • a water supply header 20 provided with a plurality of dripping openings 20 a and a drain pan 21 that receives the flowing clean water W ′ below the flowing medium 19 are provided.
  • the falling media 19 is a densely arranged corrugated plate-like member 22 in a vertical posture in which a large number of inclined wave portions 22 a are formed.
  • the inclined wave portions are provided for each adjacent wave plate-like member 22.
  • the inclination direction (ridge line direction) of 22a is reversed.
  • the clean water W is dropped from the dropping port 20 a of the water supply header 20 to the flowing-down medium 19, so that the dripped clean water W is supplied to each of the many corrugated plate-like members 22 in the flowing-down medium 19. It is transmitted to the surface and allowed to flow down in the form of a water film.
  • the inside of the vessel which is the space where the falling media 19 is arranged, is used as a gas-liquid contact chamber, and the outside air OA as the processing target air passing through the gap between the corrugated plates 22 is cleaned in the water film state in the process of flowing
  • the water W is brought into gas-liquid contact, and by this gas-liquid contact, the water-soluble gas component contained in the outside air OA is removed to purify the outside air OA, and the outside air OA is humidified to near saturation.
  • the clean water W dropped from the flow header 20 to the flow medium 19 is pure water W as fresh clean water supplied from the pure water generator 23 as the clean water supply means through the water supply path 24 by the feed pump Pw.
  • the liquid contactor 16 is temporarily supplied.
  • the flowing clean water W ′ that is, the used clean water that has absorbed the gas component
  • received from the draining medium 19 received by the drain pan 21 is discharged to the outside through the drainage channel 25. That is, this gas-liquid contactor 16 is of a supercharged water type.
  • the water supply path 24 from the pure water generator 23 is equipped with a water supply flow rate adjustment valve 26 that adjusts the water supply amount Li of fresh clean water W (pure water) for the gas-liquid contactor 16, and the gas-liquid contactor 16
  • a drainage flow meter 27 serving as a drainage amount detecting means for detecting a drainage amount Lo of the used clean water W ′ (used pure water) discharged from the gas-liquid contactor 16 is provided in the drainage channel 25 from the gas-liquid contactor 16.
  • the flow rate Gi of the outside air OA in the outside air conditioner 7 (in other words, the air amount of the adjusted outside air OAs supplied from the outside air conditioner 7 to the air conditioner 8 is changed according to the usage state of the target room 1. Then, the amount of outside air OA in the gas-liquid contactor 16 changes.
  • the external air conditioner 7 is equipped with an air flow meter 28 as an air flow detecting means for detecting the air flow amount Gi of the outside air OA.
  • the external air conditioner 7 is supplied with a water supply amount Li of fresh clean water W (pure water) to the gas-liquid contactor 16 based on the detected drainage amount Lo by the drainage flow meter 27 and the detected ventilation amount Gi by the airflow meter 28.
  • a water supply controller 29 is provided as a control means for automatic adjustment.
  • FIG. 4 shows the material balance in the gas-liquid contactor 16. Each symbol in the figure indicates the following values.
  • Li Supply amount of clean water
  • W Lo Drainage amount of used clean water
  • W ′ Drainage amount of used clean water
  • W ′ Drainage amount of used clean water
  • Gi Aeration amount of outside air OA
  • Cwi Water solubility of supplied clean water
  • Cwo Water-soluble gas component concentration of used clean water
  • W ′ Cai: Water-soluble gas component concentration of outside air OA before treatment
  • Cao Water-soluble gas component concentration of outside air OAs after treatment
  • the gas component removal efficiency ⁇ representing the purification performance of the gas-liquid contactor 16 with respect to the outside air OA is expressed by the following (formula 4).
  • ⁇ (Cai ⁇ Cao) / Cai (Equation 4)
  • the water-soluble gas component concentration Cwo of the used clean water W ′ in (Equation 5) is the equilibrium relationship between the water-soluble gas component and water, and the ratio of the waste water amount L of the used clean water W ′ to the outside air flow rate Gi. Determined by (Lo / Gi).
  • Lo / Gi the ratio of the waste water amount L of the used clean water W ′ to the outside air flow rate Gi.
  • the factors governing the gas component removal efficiency ⁇ in ⁇ Formula 5> are the water-soluble gas component concentration Cai of the outside air OA before treatment fixed as the air and water inlet conditions and the water-soluble gas component of the supplied clean water W Excluding the density Cwi ( ⁇ 0), it is Lo / Gi.
  • this type of gas-liquid contactor 16 the necessary amount of water for purification Lj required to obtain the required gas component removal efficiency ⁇ for the outside air OA with the predetermined ventilation amount Gi is used as the basic amount of water, and the required amount of water for purification Lj is obtained.
  • the amount of water (Lj + Lh) obtained by adding the necessary amount Lh of humidification necessary for humidifying the outside air OA to be treated to a constant humidification state needs to be set as the water supply amount Li. Therefore, when the water supply amount Li is sufficient, this type of gas-liquid contactor 16 stabilizes the outside air OA to a substantially constant humidity near the saturated state (for example, relative humidity 95%) regardless of the state before the treatment of the outside air OA. Can be humidified.
  • the water supply controller 29 is configured to execute the following controls (a) and (b) as a water supply amount adjustment.
  • the set drainage amount SLo is changed according to the detected ventilation amount Gi by the air flow meter 28. Specifically, for the set drainage amount SLo, the required amount of water for purification Lj with respect to the outdoor air flow rate Gi at each time point is set as a reference water amount, and the amount of water with an allowance for the reference water amount is set as the set drainage amount SLo.
  • the required amount of water Lj for purification with respect to the outside air flow rate Gi at each time point is an L / G value that is a constant inherent to the apparatus (that is, a constant that varies depending on the contact coefficient or the required removal efficiency ⁇ depending on the apparatus shape).
  • Lj ⁇ ⁇ Gi
  • the water supply controller 29 determines the set drainage amount SLo at each time point based on the correlation data 30.
  • the amount of water consumed for humidification in the water supply amount Li as described above Regardless of being preferentially self-adjusted to the amount of water equal to the required amount of water for humidification Lh, the amount of water that contributes to the purification of the outside air OA in the amount of water Li (ie, (b)) (i), (b) , The amount of water equal to the amount of drainage Lo) is adjusted and maintained to be equal to the amount of water Lj required for purification at each time point.
  • the required purification performance and the required humidification performance for the outside air OA are stably obtained while reducing the water supply amount Li of the fresh clean water W to the gas-liquid contactor 16 as much as possible.
  • the air purification humidifier according to the present invention is not limited to the usage mode incorporated in the external air conditioner 7 as shown in the above-described embodiment, but the usage mode incorporated in the normal air conditioner or cooling depending on the case.
  • Various usage forms such as a usage form used alone without a combination with a heater or a heater can be adopted.
  • the ventilation amount detection means is not limited to various anemometers, and recognizes the ventilation amount Gi based on, for example, a change instruction of the ventilation amount Gi.
  • Various detection systems such as a detection system can be used.
  • the air OA to be treated is not limited to the outside air, but air that requires purification and humidification, such as air that is circulated and supplied to a clean room or exhausted from various facilities intended for recycling, or is accompanied by humidification Any air may be used as long as it requires purification treatment.
  • the air purification humidifier according to the present invention can be used in various fields that require air purification treatment and humidification treatment, or in various fields that require air purification treatment with humidification.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Gas Separation By Absorption (AREA)
  • Central Air Conditioning (AREA)
  • Air Humidification (AREA)
  • Air Conditioning Control Device (AREA)
PCT/JP2011/059849 2010-05-24 2011-04-21 空気浄化加湿装置 Ceased WO2011148745A1 (ja)

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JP5936562B2 (ja) * 2013-02-13 2016-06-22 三菱日立パワーシステムズ株式会社 復水器、これを備えている多段圧復水器、復水器に用いる再熱モジュール
JP6384706B2 (ja) * 2013-12-26 2018-09-05 清水建設株式会社 クリーンルーム用空調システム
JP6971126B2 (ja) * 2017-11-09 2021-11-24 株式会社竹中工務店 外気処理装置
CN108361879A (zh) * 2018-05-04 2018-08-03 苏州瑞之弘空气净化有限公司 一种无尘室供气装置
JP6748686B2 (ja) * 2018-10-02 2020-09-02 日揮株式会社 モジュール、モジュール化施設、およびモジュール化施設の建設方法
KR101968163B1 (ko) * 2019-01-23 2019-04-11 (주)엠티코리아 폐열 재활용을 위한 탈부착식 기화식 가습기
CN110219719B (zh) * 2019-05-22 2023-12-01 东莞理工学院城市学院 等压差润湿表面尾气颗粒吸附净化装置
CN113091239B (zh) * 2021-03-09 2022-10-28 青岛海尔空调器有限总公司 用于控制空调器的方法及装置、空调器

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KR20130122519A (ko) 2013-11-07
KR101754311B1 (ko) 2017-07-06
CN102933910B (zh) 2015-11-25
JP5302931B2 (ja) 2013-10-02
CN102933910A (zh) 2013-02-13
JP2011247454A (ja) 2011-12-08

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