JP4845909B2 - 空気洗浄器 - Google Patents
空気洗浄器 Download PDFInfo
- Publication number
- JP4845909B2 JP4845909B2 JP2008057998A JP2008057998A JP4845909B2 JP 4845909 B2 JP4845909 B2 JP 4845909B2 JP 2008057998 A JP2008057998 A JP 2008057998A JP 2008057998 A JP2008057998 A JP 2008057998A JP 4845909 B2 JP4845909 B2 JP 4845909B2
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- JP
- Japan
- Prior art keywords
- pure water
- cleaning liquid
- air
- treated
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 claims description 110
- 238000004140 cleaning Methods 0.000 claims description 86
- 239000000126 substance Substances 0.000 claims description 32
- 239000013076 target substance Substances 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 26
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims description 9
- 238000010790 dilution Methods 0.000 claims description 6
- 239000012895 dilution Substances 0.000 claims description 6
- 238000007865 diluting Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 158
- 238000002203 pretreatment Methods 0.000 description 15
- 238000011084 recovery Methods 0.000 description 13
- 230000003749 cleanliness Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000011221 initial treatment Methods 0.000 description 5
- 238000011282 treatment Methods 0.000 description 4
- 239000003344 environmental pollutant Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 231100000719 pollutant Toxicity 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Images
Landscapes
- Gas Separation By Absorption (AREA)
Description
12A 第1洗浄部
12B 第2洗浄部
21 循環管
23 希釈純水管
29 排出管
32 流量調整弁
33 ボールタップ
36 電気伝導率計
39 排水遮断弁
PA 処理前空気
QA 1次処理空気
mw 混合純水
sw1 供給循環純水
sw2 供給新鮮純水
tw1 処理済循環純水
tw2 処理済新鮮純水
w1 循環純水
w2 新鮮純水
w3 希釈純水
Claims (2)
- 除去対象物質を含有する被処理空気に第1の洗浄液を接触させる上流側気液接触部と;
前記上流側気液接触部を通過した前記被処理空気に、前記被処理空気に接触していない第2の洗浄液を接触させる下流側気液接触部と;
前記下流側気液接触部で前記被処理空気から前記除去対象物質を奪った前記第2の洗浄液である第2の処理済洗浄液中の前記除去対象物質の濃度を検出する検出器と;
前記上流側気液接触部で前記被処理空気から前記除去対象物質を奪った前記第1の洗浄液である第1の処理済洗浄液と、前記第2の処理済洗浄液とを含んだ混合洗浄液を、前記第1の洗浄液として前記上流側気液接触部に供給する循環管と;
前記検出器の検出結果が所定の範囲に収束するように前記混合洗浄液中の前記除去対象物質の濃度を希釈する混合洗浄液希釈手段とを備える;
空気洗浄器。 - 前記混合洗浄液希釈手段が、
前記第1の処理済洗浄液を前記第2の処理済洗浄液に混合させずに系外に排出する排出管と、
前記排出管に配設され、前記検出器の検出結果に応じて系外に排出する前記第1の処理済洗浄液の量を調節するバルブと、
前記被処理空気に接触していない第3の洗浄液を前記混合洗浄液に供給する供給管とを含んで構成された;
請求項1に記載の空気洗浄器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008057998A JP4845909B2 (ja) | 2008-03-07 | 2008-03-07 | 空気洗浄器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008057998A JP4845909B2 (ja) | 2008-03-07 | 2008-03-07 | 空気洗浄器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009213961A JP2009213961A (ja) | 2009-09-24 |
JP4845909B2 true JP4845909B2 (ja) | 2011-12-28 |
Family
ID=41186416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008057998A Active JP4845909B2 (ja) | 2008-03-07 | 2008-03-07 | 空気洗浄器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4845909B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7439216B2 (ja) | 2013-10-08 | 2024-02-27 | ゾエティス・サービシーズ・エルエルシー | 選択的卵内注射のための蠕動ポンプ組立体、ならびに関連するシステム及び方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5302931B2 (ja) * | 2010-05-24 | 2013-10-02 | 株式会社大気社 | 空気浄化加湿装置 |
JP5276074B2 (ja) * | 2010-10-05 | 2013-08-28 | 斉藤 時男 | ハイブリット噴霧システム。 |
CN104258705A (zh) * | 2014-09-18 | 2015-01-07 | 天津市嘉腾环保设备有限公司 | 一种氮氧化物废气治理工艺方法以及设备 |
JP6746739B1 (ja) * | 2019-02-27 | 2020-08-26 | 新菱冷熱工業株式会社 | 空気中汚染物質の除去システム |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001096123A (ja) * | 1999-09-29 | 2001-04-10 | Sanki Eng Co Ltd | エアワッシャ |
JP4514970B2 (ja) * | 2001-02-01 | 2010-07-28 | 高砂熱学工業株式会社 | 不純物除去装置 |
JP4168163B2 (ja) * | 2003-01-16 | 2008-10-22 | 株式会社テクノ菱和 | ガス不純物の除去システム |
JP2005013791A (ja) * | 2003-06-24 | 2005-01-20 | Ricoh Elemex Corp | 空気清浄機、給排水制御方法および含浸部給水制御方法 |
-
2008
- 2008-03-07 JP JP2008057998A patent/JP4845909B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7439216B2 (ja) | 2013-10-08 | 2024-02-27 | ゾエティス・サービシーズ・エルエルシー | 選択的卵内注射のための蠕動ポンプ組立体、ならびに関連するシステム及び方法 |
Also Published As
Publication number | Publication date |
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JP2009213961A (ja) | 2009-09-24 |
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