WO2011148745A1 - Air purifier and humidifier - Google Patents

Air purifier and humidifier Download PDF

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Publication number
WO2011148745A1
WO2011148745A1 PCT/JP2011/059849 JP2011059849W WO2011148745A1 WO 2011148745 A1 WO2011148745 A1 WO 2011148745A1 JP 2011059849 W JP2011059849 W JP 2011059849W WO 2011148745 A1 WO2011148745 A1 WO 2011148745A1
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WIPO (PCT)
Prior art keywords
amount
air
water
gas
liquid contact
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Application number
PCT/JP2011/059849
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French (fr)
Japanese (ja)
Inventor
小川昌幸
Original Assignee
株式会社大気社
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Application filed by 株式会社大気社 filed Critical 株式会社大気社
Priority to KR1020127031502A priority Critical patent/KR101754311B1/en
Priority to CN201180025759.XA priority patent/CN102933910B/en
Publication of WO2011148745A1 publication Critical patent/WO2011148745A1/en

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F6/00Air-humidification, e.g. cooling by humidification
    • F24F6/02Air-humidification, e.g. cooling by humidification by evaporation of water in the air
    • F24F6/04Air-humidification, e.g. cooling by humidification by evaporation of water in the air using stationary unheated wet elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2259/00Type of treatment
    • B01D2259/45Gas separation or purification devices adapted for specific applications
    • B01D2259/4508Gas separation or purification devices adapted for specific applications for cleaning air in buildings

Definitions

  • the present invention relates to an air purification humidifier.
  • This air purification humidifier is used for adjusting the air supplied to a clean room for semiconductor manufacturing. More specifically, this air purification humidifier has a gas-liquid contact chamber. In this gas-liquid contact chamber, the air to be treated that is ventilated in the room is brought into gas-liquid contact with clean water. By this gas-liquid contact, the water-soluble gas component in the processing target air is removed, and the processing target air is purified. Further, the air to be treated is humidified along with this air purification.
  • This circulating water supply type apparatus includes a storage tank that receives used clean water discharged from the gas-liquid contact chamber (that is, clean water that has absorbed water-soluble gas components contained in the air to be treated). The clean water taken out from the storage tank is circulated and supplied to the gas-liquid contact chamber, whereby the supplied clean water and the processing target air are brought into gas-liquid contact in the gas-liquid contact chamber.
  • this circulating water supply type device a part of the clean water is spent on humidifying the processing target air and carried away to the processing target air. Further, the water-soluble gas component absorbed and removed from the air to be treated is brought into the storage tank together with the used clean water. In response to these matters, a necessary amount of fresh clean water is supplied to the storage tank from the clean water supply means. By this replenishment, the concentration of the water-soluble gas component of clean water circulated from the storage tank to the gas-liquid contact chamber is kept below a certain value (that is, kept at a certain degree of cleanliness).
  • a single supercharged water type apparatus shown in FIG.
  • fresh clean water supplied from the clean water supply means is temporarily supplied to the gas-liquid contact chamber.
  • all used clean water discharged from the gas-liquid contact chamber is discharged outside the apparatus.
  • the clean water supply means purifies the raw water to generate clean water
  • the single supercharging water type that returns the used clean water discharged from the gas-liquid contact chamber to the clean water supply means as a part of the raw water
  • the purification performance for removing water-soluble gas components from the air to be treated is defined as the basic water amount. Then, the required amount of water is obtained by adding the necessary amount of water for humidification necessary to humidify the air to be treated to a constant humidified state to the amount of necessary water for purification.
  • the air to be treated is air having a change in state such as outside air (change in the pre-treatment air state)
  • the necessary water amount for humidification required for the humidification changes due to the change in the state
  • the air-liquid contact chamber The required amount of clean water is also changed by the change in the required amount of water for humidification.
  • a certain large design water amount for humidification with a sufficient safety factor as the amount of water for humidification was set, and this design water amount for humidification was added to the necessary water amount for purification as the basic water amount.
  • the amount of water was the design water supply.
  • a constant water supply amount operation is performed in which clean water of this constant design water supply amount is continuously supplied to the gas-liquid contact chamber. That is, the amount of water supply was not adjusted according to the change in the required amount of water for humidification.
  • the state of the air to be treated is detected based on the detected air state. It is also conceivable to increase or decrease the amount of clean water supplied to the gas-liquid contact chamber by the amount of change in the required amount of humidifying water due to the change. However, in this case, since it is unclear whether the gas component has been removed with the required gas component removal efficiency, it is difficult to obtain an accurate control result for the gas component removal process.
  • this type of air purification humidifier has conventionally performed a constant water supply amount operation for continuously supplying an excessively constant amount of clean water supply to the gas-liquid contact chamber as described above. It was.
  • the main problem of the present invention is to supply clean water to the gas-liquid contact chamber while reliably and stably obtaining the required purification performance and the required humidification performance by adjusting the rational water supply amount. It is an object of the present invention to provide an air purification humidifier capable of making the amount necessary and sufficient for the required gas component removal efficiency, thereby effectively reducing the operation cost.
  • the first characteristic configuration of the present invention relating to an air purification humidifier is: Provided with a gas-liquid contact chamber for bringing the air to be treated that is ventilated indoors into contact with clean water in the room,
  • This is an air purification humidifier that purifies the processing target air by removing water-soluble gas components in the processing target air by gas-liquid contact with clean water in the gas-liquid contact chamber, and humidifies the processing target air.
  • a control means is provided for adjusting the amount of clean water supplied to the gas-liquid contact chamber on the basis of the detected amount of discharged water by the amount of discharged water detecting means to adjust the amount of discharged water to a set amount of discharged water.
  • the gas component removal efficiency of this type of air purification humidifier contributes to the purification of the air to be treated within the amount of water supplied to the gas-liquid contact chamber if the quality of the clean water supplied to the gas-liquid contact chamber is the same. It is known that it is determined by the ratio (that is, L / G value) between the amount of water to be processed and the air volume of the air to be treated.
  • the excess amount is treated together with the amount of water for purification in the amount of water supply. After contributing to the purification of air, it is discharged from the gas-liquid contact chamber.
  • the amount of water consumed for humidification of the treatment target air is equal to the actual required water amount for humidification after the change.
  • the amount of water that contributes to the purification of the air to be treated without being consumed for humidification ie, that contributes to the purification and is discharged from the gas-liquid contact chamber. The amount of water) changes.
  • the air purification humidifier of the first characteristic configuration described above by adjusting the water supply amount based on the detected drainage amount and adjusting the drainage amount to the set drainage amount, the required gas component removal efficiency is obtained as the set drainage amount.
  • the amount of water equal to the amount of water necessary for purification is set in advance.
  • the amount of water consumed for humidification of the water supply amount due to a change in the amount of water required for humidification is preferentially given to the amount of water equal to the amount of water required for humidification after the change.
  • the amount of water that contributes to purification of the air to be treated ie, the amount of water that becomes the amount of drainage from the gas-liquid contact chamber
  • the amount of water that becomes the amount of drainage from the gas-liquid contact chamber is maintained at the required amount of water for purification that is set as the set amount of drainage. be able to.
  • the gas component removal efficiency (purification performance) can be maintained at the required value regardless of changes in the amount of water required for humidification due to changes in the state of the air to be treated. Can be maintained at the required degree of purification. Further, the humidification performance is maintained by preferentially adjusting the amount of water consumed for humidification with respect to the change in the required amount of water for humidification as described above.
  • the detection of the amount of discharged water is generally more reliable in terms of detection accuracy than the detection of air conditions such as humidity and temperature, and detection errors are unlikely to occur. Therefore, if the water supply amount adjustment is based on the detected wastewater amount as described above, the problem with the water supply amount adjustment based on the detected air condition described above, that is, the situation where the gas component removal efficiency falls below the required value due to an adjustment error or the like. Invitation can be avoided more reliably.
  • the purified water with an excessive design water supply amount can be brought into gas-liquid contact while ensuring the required purification performance and the required humidification performance reliably and stably.
  • the amount of clean water supplied to the gas-liquid contact chamber is effectively reduced to the required and sufficient amount for the required gas component removal efficiency. This can effectively reduce the operating cost of the apparatus.
  • the following water supply amount adjustment is also conceivable. That is, if the amount of water that contributes to the purification of the air to be treated out of the water supply amount due to a change in the amount of water necessary for humidification occurs, the concentration of water-soluble gas components in the used clean water discharged from the gas-liquid contact chamber (i.e. , Absorption gas component concentration) also changes.
  • the gas component concentration of the discharged clean water from the gas-liquid contact chamber is detected, and the amount of clean water supplied to the gas-liquid contact chamber is set so as to maintain the gas component concentration of the discharged clean water at the set concentration based on the detected concentration. It is possible to adjust automatically.
  • the air purification / humidification device having the first characteristic configuration that adjusts the amount of water supply based on the detected amount of wastewater can more reliably avoid such a situation as described above.
  • the amount of clean water supplied can be effectively reduced while reliably and stably obtaining the required purification performance and required humidification performance.
  • Cai concentration of water-soluble gas component in the air to be treated before treatment
  • Cao concentration of water-soluble gas component in the air to be treated after treatment
  • the contact method between the clean water and the air to be treated is a method in which the clean water is transferred to the surface of the flow-down member in the gas-liquid contact chamber to flow down in a water film state,
  • a method of supplying clean water to a breathable member with moisture content and wettability placed in the contact chamber, or a method of spraying clean water in a high-density state in the gas-liquid contact chamber, or a method combining these methods Various contact methods can be employed.
  • the clean water to be used (fresh water supplied to the circulation system in the circulating water supply system, fresh clean water supplied to the gas-liquid contact chamber in the single-supercharging water system) is purified water, purified water purified with a filter, etc.
  • Various clean waters can be used as long as they can maintain a substantially constant water quality. Moreover, you may make it use the various aqueous solution which added the chemical
  • the air purification humidifier having the first characteristic configuration is particularly effective when air for which the air state before processing such as outside air changes every moment is used as processing target air.
  • the air to be treated may be air in which the air state before the treatment does not normally change or does not change so much, and even in that case, it is effective in the sense of preparing for a change in the state of the air to be treated due to some cause.
  • the cause of the change in the required amount of water for humidification is not limited to the change in the state of the air to be treated, but may be a change in the required amount of water for humidification due to other causes. Therefore, the required purification performance can be stably maintained with this air purification humidifier.
  • the second characteristic configuration of the present invention relating to the air purification humidifier is: An air volume detecting means for detecting an air flow volume of the air to be processed with respect to the gas-liquid contact chamber;
  • the control means is configured to change the set drainage amount based on the detected ventilation amount of the air volume detection means.
  • the gas component removal efficiency is the ratio of the amount of water that contributes to the purification of the air to be treated (that is, the amount of water to be drained) and the air volume of the air to be treated without spending humidification, as described above. It is determined by the L / G value. Therefore, when the flow rate of the processing target air to the gas-liquid contact chamber (that is, the processing air volume of the processing target air) changes, the required amount of water for humidification required to humidify the processing target air to a constant humidification state changes proportionally. In addition, the necessary amount of water for purification necessary for obtaining the required gas component removal efficiency (purification performance) also changes with a certain correlation.
  • the set drainage amount is changed based on the detected ventilation amount, and the respective correlations exist between the ventilation amount of the air to be treated and the necessary water amount for purification.
  • the amount of water that is equal to the required amount of water for purification corresponding to the amount of ventilation of the air to be treated at the time (practically, the amount of water that allows for a certain degree of safety factor) is set as the set amount of drainage.
  • the amount of water consumed for humidifying the air to be treated out of the amount of water supplied is the amount of water required for humidification at each point in time (i.e., with the change in the amount of air flow, as described above).
  • the amount of water that contributes to the purification of the air to be treated (the amount of water that becomes the amount of drainage) is also at each point in time while allowing the self-adjustment to preferentially adjust to the amount of water that is equal to the proportionally required amount of water for humidification)
  • the amount of water required for purification (that is, the amount of water required for purification that changes with a certain correlation as the amount of ventilation changes) can be automatically changed.
  • the gas component removal efficiency (purification performance) can be maintained at a required value regardless of the change in the air flow rate of the processing target air, and the degree of purification of the processed air can be maintained at the required degree of purification.
  • the required humidification performance can be maintained.
  • the gas component concentration (absorbed gas component concentration) of the discharged clean water from the gas-liquid contact chamber is detected, and the gas liquid concentration is maintained based on the detected concentration.
  • the gas component removal efficiency (purification performance) can be maintained at the required value and the required humidification performance can be maintained even when the flow rate of the target air is changed. can do.
  • the detection of the concentration of the underwater gas component is generally low in reliability in terms of detection accuracy and easily causes a detection error.
  • the reliability of the ventilation rate detection is high and adjustment errors are unlikely to occur. Inviting a situation below the required value can be avoided more reliably.
  • the third characteristic configuration of the present invention relating to the air purification humidifier is As clean water supplied to the gas-liquid contact chamber, fresh clean water supplied from clean water supply means is temporarily supplied to the gas-liquid contact chamber.
  • the first characteristic configuration and the second characteristic configuration described above can be applied to either a circulating water supply type or a single supercharged water purification humidifier.
  • a single supercharging water purifying / humidifying device that temporarily and continuously supplies fresh clean water to the gas-liquid contact chamber can generally obtain higher gas component removal efficiency than a circulating water supply type.
  • the required gas component removal efficiency can be stably maintained even with respect to a change in the state of the air to be treated and a change in the amount of ventilation.
  • the third characteristic configuration that applies to the single-supercharged air purification humidifier is particularly suitable when a high degree of purification is required as the required degree of purification of the treated air.
  • a suitable air purification humidifier can be obtained.
  • the fourth characteristic configuration of the present invention relating to the air purification humidifier is As clean water to be supplied to the gas-liquid contact chamber, mixed water of used clean water discharged from the gas-liquid contact chamber and fresh clean water supplied from clean water supply means is supplied to the gas-liquid contact chamber. It is in the point which is made into composition.
  • a circulating water supply type air purification humidifier that only consumes fresh clean water as makeup water consumes essentially less fresh clean water than a single supercharged type.
  • the power consumption of the pump that supplies clean water to the gas-liquid contact chamber can be effectively reduced.
  • the fourth characteristic configuration for which the circulating water supply type air purification humidifier is applied is particularly required to reduce the operating cost in preference to the gas component removal efficiency.
  • a suitable air purification humidifier can be obtained.
  • the fifth characteristic configuration of the present invention relating to the air purification humidifier is:
  • the gas-liquid contact chamber is equipped with a flow-down medium arranged transversely to the air ventilation path, and a water supply header that drops clean water from above on the flow-down medium, This falling medium is formed by closely arranging corrugated members in a vertical posture in which a large number of inclined wave portions are formed, and the inclination direction of the inclined wave portions is reversed for each adjacent corrugated member.
  • the ventilation air and the clean water can be efficiently brought into gas-liquid contact, and high performance can be obtained for each of the air purification performance and the air humidification performance.
  • FIG. 1 is a diagram showing air conditioning equipment for a clean room.
  • FIG. 2 is a diagram showing the configuration of the external air conditioner.
  • FIG. 3 is a perspective view showing the gas-liquid contact portion.
  • FIG. 4 is an explanatory diagram of the material balance at the gas-liquid contact portion.
  • FIG. 1 shows a clean room air conditioning system.
  • fan filter units 2 are arranged side by side in a matrix arrangement across the entire surface of the ceiling of the target room 1 that is a clean room.
  • the air conditioning air SA supplied to the ceiling chamber 4 by the air supply fan Fs through the air supply path 3 is purified by the high performance filter 2a provided in each fan filter unit 2, and the air conditioning air SA after purification is purified by the fan filter.
  • the fan 2b installed in the unit 2 is blown out and supplied indoors. Thereby, the interior of the target room 1 is adjusted and maintained at a required cleanliness in a required temperature and humidity state.
  • the lower floor of the target room 1 is an under-floor chamber 6 that receives the air RA discharged from the room through the lattice floor 5 as the purified air conditioning air SA is supplied by the fan filter unit 2.
  • An air conditioner 7 air conditioner for adjusting outside air
  • an air conditioner 8 are provided for generating the air SA for air conditioning. That is, the outside air OA guided through the outside air introduction path 9 by the outside air fan Fo is adjusted by the outside air conditioner 7, and the adjusted outside air OAs in the outside air conditioner 7 is led to the air conditioner 8 through the relay path 10. Further, a part of the exhaust air RA received in the underfloor chamber 6 is led to the air conditioner 8 through the return air path 11 by the return air fan Fr as the return air RAs.
  • the temperature and humidity of the mixed air of the adjusted outside air OAs and the return air RAs are adjusted in the air conditioner 8, and the adjusted air in the air conditioner 8 is used as the air conditioning air SA through the air supply path 3 and the ceiling of the target room 1. Supply to chamber 4.
  • exhaust air RA received in the underfloor chamber 6 (exhaust air RA in an amount equal to the intake amount of the external air OA from the external air introduction passage 9) is exhausted to the outside through the exhaust passage 12 by the exhaust fan Fe.
  • the external air conditioner 7 includes a filter 13, a preheater 14, a precooler 15, a gas-liquid contactor 16, and a cooler 17 in order from the upper side in the ventilation direction of the outside air OA that is the processing target air.
  • the reheater 18 is installed.
  • the outside air OA guided through the outside air introduction path 9 is removed by the filter 13, and the removed outside air OA is preheated by the preheater 14 in the winter, and in the summer Is precooled by the precooler 15 and purified by bringing the preheated or precooled outside air OA into contact with the clean water W in the gas-liquid contactor 16 serving as an air purification humidifier, and saturated with the purification. Humidify close.
  • the outside air OA purified and humidified in the gas-liquid contactor 16 is cooled to a predetermined temperature by the cooler 17, so that the outside air OA is cooled and dehumidified to a predetermined absolute humidity.
  • the heater 18 is reheated to a predetermined temperature, and the temperature / humidity adjusted and purified outside air OA is supplied to the air conditioner 8 through the relay path 10 as adjusted outside air OAs.
  • the gas-liquid contactor 16 is provided with a flow-down medium 19 arranged in a state transverse to the ventilation path of the external air OA in the external air conditioner 7, and clean water W from above on the flow-down medium 19.
  • a water supply header 20 provided with a plurality of dripping openings 20 a and a drain pan 21 that receives the flowing clean water W ′ below the flowing medium 19 are provided.
  • the falling media 19 is a densely arranged corrugated plate-like member 22 in a vertical posture in which a large number of inclined wave portions 22 a are formed.
  • the inclined wave portions are provided for each adjacent wave plate-like member 22.
  • the inclination direction (ridge line direction) of 22a is reversed.
  • the clean water W is dropped from the dropping port 20 a of the water supply header 20 to the flowing-down medium 19, so that the dripped clean water W is supplied to each of the many corrugated plate-like members 22 in the flowing-down medium 19. It is transmitted to the surface and allowed to flow down in the form of a water film.
  • the inside of the vessel which is the space where the falling media 19 is arranged, is used as a gas-liquid contact chamber, and the outside air OA as the processing target air passing through the gap between the corrugated plates 22 is cleaned in the water film state in the process of flowing
  • the water W is brought into gas-liquid contact, and by this gas-liquid contact, the water-soluble gas component contained in the outside air OA is removed to purify the outside air OA, and the outside air OA is humidified to near saturation.
  • the clean water W dropped from the flow header 20 to the flow medium 19 is pure water W as fresh clean water supplied from the pure water generator 23 as the clean water supply means through the water supply path 24 by the feed pump Pw.
  • the liquid contactor 16 is temporarily supplied.
  • the flowing clean water W ′ that is, the used clean water that has absorbed the gas component
  • received from the draining medium 19 received by the drain pan 21 is discharged to the outside through the drainage channel 25. That is, this gas-liquid contactor 16 is of a supercharged water type.
  • the water supply path 24 from the pure water generator 23 is equipped with a water supply flow rate adjustment valve 26 that adjusts the water supply amount Li of fresh clean water W (pure water) for the gas-liquid contactor 16, and the gas-liquid contactor 16
  • a drainage flow meter 27 serving as a drainage amount detecting means for detecting a drainage amount Lo of the used clean water W ′ (used pure water) discharged from the gas-liquid contactor 16 is provided in the drainage channel 25 from the gas-liquid contactor 16.
  • the flow rate Gi of the outside air OA in the outside air conditioner 7 (in other words, the air amount of the adjusted outside air OAs supplied from the outside air conditioner 7 to the air conditioner 8 is changed according to the usage state of the target room 1. Then, the amount of outside air OA in the gas-liquid contactor 16 changes.
  • the external air conditioner 7 is equipped with an air flow meter 28 as an air flow detecting means for detecting the air flow amount Gi of the outside air OA.
  • the external air conditioner 7 is supplied with a water supply amount Li of fresh clean water W (pure water) to the gas-liquid contactor 16 based on the detected drainage amount Lo by the drainage flow meter 27 and the detected ventilation amount Gi by the airflow meter 28.
  • a water supply controller 29 is provided as a control means for automatic adjustment.
  • FIG. 4 shows the material balance in the gas-liquid contactor 16. Each symbol in the figure indicates the following values.
  • Li Supply amount of clean water
  • W Lo Drainage amount of used clean water
  • W ′ Drainage amount of used clean water
  • W ′ Drainage amount of used clean water
  • Gi Aeration amount of outside air OA
  • Cwi Water solubility of supplied clean water
  • Cwo Water-soluble gas component concentration of used clean water
  • W ′ Cai: Water-soluble gas component concentration of outside air OA before treatment
  • Cao Water-soluble gas component concentration of outside air OAs after treatment
  • the gas component removal efficiency ⁇ representing the purification performance of the gas-liquid contactor 16 with respect to the outside air OA is expressed by the following (formula 4).
  • (Cai ⁇ Cao) / Cai (Equation 4)
  • the water-soluble gas component concentration Cwo of the used clean water W ′ in (Equation 5) is the equilibrium relationship between the water-soluble gas component and water, and the ratio of the waste water amount L of the used clean water W ′ to the outside air flow rate Gi. Determined by (Lo / Gi).
  • Lo / Gi the ratio of the waste water amount L of the used clean water W ′ to the outside air flow rate Gi.
  • the factors governing the gas component removal efficiency ⁇ in ⁇ Formula 5> are the water-soluble gas component concentration Cai of the outside air OA before treatment fixed as the air and water inlet conditions and the water-soluble gas component of the supplied clean water W Excluding the density Cwi ( ⁇ 0), it is Lo / Gi.
  • this type of gas-liquid contactor 16 the necessary amount of water for purification Lj required to obtain the required gas component removal efficiency ⁇ for the outside air OA with the predetermined ventilation amount Gi is used as the basic amount of water, and the required amount of water for purification Lj is obtained.
  • the amount of water (Lj + Lh) obtained by adding the necessary amount Lh of humidification necessary for humidifying the outside air OA to be treated to a constant humidification state needs to be set as the water supply amount Li. Therefore, when the water supply amount Li is sufficient, this type of gas-liquid contactor 16 stabilizes the outside air OA to a substantially constant humidity near the saturated state (for example, relative humidity 95%) regardless of the state before the treatment of the outside air OA. Can be humidified.
  • the water supply controller 29 is configured to execute the following controls (a) and (b) as a water supply amount adjustment.
  • the set drainage amount SLo is changed according to the detected ventilation amount Gi by the air flow meter 28. Specifically, for the set drainage amount SLo, the required amount of water for purification Lj with respect to the outdoor air flow rate Gi at each time point is set as a reference water amount, and the amount of water with an allowance for the reference water amount is set as the set drainage amount SLo.
  • the required amount of water Lj for purification with respect to the outside air flow rate Gi at each time point is an L / G value that is a constant inherent to the apparatus (that is, a constant that varies depending on the contact coefficient or the required removal efficiency ⁇ depending on the apparatus shape).
  • Lj ⁇ ⁇ Gi
  • the water supply controller 29 determines the set drainage amount SLo at each time point based on the correlation data 30.
  • the amount of water consumed for humidification in the water supply amount Li as described above Regardless of being preferentially self-adjusted to the amount of water equal to the required amount of water for humidification Lh, the amount of water that contributes to the purification of the outside air OA in the amount of water Li (ie, (b)) (i), (b) , The amount of water equal to the amount of drainage Lo) is adjusted and maintained to be equal to the amount of water Lj required for purification at each time point.
  • the required purification performance and the required humidification performance for the outside air OA are stably obtained while reducing the water supply amount Li of the fresh clean water W to the gas-liquid contactor 16 as much as possible.
  • the air purification humidifier according to the present invention is not limited to the usage mode incorporated in the external air conditioner 7 as shown in the above-described embodiment, but the usage mode incorporated in the normal air conditioner or cooling depending on the case.
  • Various usage forms such as a usage form used alone without a combination with a heater or a heater can be adopted.
  • the ventilation amount detection means is not limited to various anemometers, and recognizes the ventilation amount Gi based on, for example, a change instruction of the ventilation amount Gi.
  • Various detection systems such as a detection system can be used.
  • the air OA to be treated is not limited to the outside air, but air that requires purification and humidification, such as air that is circulated and supplied to a clean room or exhausted from various facilities intended for recycling, or is accompanied by humidification Any air may be used as long as it requires purification treatment.
  • the air purification humidifier according to the present invention can be used in various fields that require air purification treatment and humidification treatment, or in various fields that require air purification treatment with humidification.

Abstract

Provided is an air purifier and humidifier that is capable of obtaining the necessary purification performance and the necessary humidification performance while providing a necessary and adequate supply volume of clean water for the required gas component removal efficiency. The air purifier and humidifier purifies the air to be processed (OA) by removing the soluble gas components in the air to be processed (OA), and humidifies the air to be processed (OA), through gas-liquid contact with clean water (W) in a gas-liquid contact chamber (16). The air purifier and humidifier is equipped with: a means for detecting the amount of wastewater (27), which detects the amount of wastewater (Lo) in the used clean water (W') that is to be discharged from the gas-liquid contact chamber (16); and a control means (29), which adjusts the supply volume (Li) of clean water (W) to the gas-liquid contact chamber (16) on the basis of the amount of wastewater (Lo) detected by the means for detecting the amount of wastewater (27), and adjusts the amount of wastewater (Lo) to a set amount of wastewater (SLo).

Description

空気浄化加湿装置Air purification humidifier
 本発明は空気浄化加湿装置に関する。この空気浄化加湿装置は半導体製造用のクリーンルームに供給する空気の調整などに用いる。
 さらに詳しく言えば、この空気浄化加湿装置は気液接触室を備えている。この気液接触室では、室内に通風される処理対象空気を清浄水と気液接触させる。
 この気液接触により、処理対象空気中における水溶性のガス成分が除去され、処理対象空気は浄化される。また、この空気浄化に伴い処理対象空気は加湿される。
The present invention relates to an air purification humidifier. This air purification humidifier is used for adjusting the air supplied to a clean room for semiconductor manufacturing.
More specifically, this air purification humidifier has a gas-liquid contact chamber. In this gas-liquid contact chamber, the air to be treated that is ventilated in the room is brought into gas-liquid contact with clean water.
By this gas-liquid contact, the water-soluble gas component in the processing target air is removed, and the processing target air is purified. Further, the air to be treated is humidified along with this air purification.
 従来、この種の空気浄化加湿装置として、例えば特許文献1の図1,図2に示される循環給水式の装置が知られている。
 この循環給水式の装置は、気液接触室から排出される使用済み清浄水(即ち、処理対象空気に含まれる水溶性のガス成分を吸収した清浄水)を受け止める貯留タンクを備えている。
 この貯留タンクから取り出した清浄水を気液接触室に循環供給することにより、この供給清浄水と処理対象空気とを気液接触室で気液接触させる。
Conventionally, as this type of air purification humidifier, for example, a circulating water supply type device shown in FIGS. 1 and 2 of Patent Document 1 is known.
This circulating water supply type apparatus includes a storage tank that receives used clean water discharged from the gas-liquid contact chamber (that is, clean water that has absorbed water-soluble gas components contained in the air to be treated).
The clean water taken out from the storage tank is circulated and supplied to the gas-liquid contact chamber, whereby the supplied clean water and the processing target air are brought into gas-liquid contact in the gas-liquid contact chamber.
 この循環給水式の装置では、清浄水の一部が処理対象空気の加湿に費やされて処理対象空気に持ち去られる。
 また、処理対象空気から吸収除去した水溶性のガス成分が使用済み清浄水とともに貯留タンクに持ち込まれる。
 これらのことに対して、清浄水供給手段から必要量の新鮮清浄水を貯留タンクに補給する。
 この補給により、貯留タンクから気液接触室に循環供給する清浄水の水溶性ガス成分濃度を一定値以下に保つ(即ち、一定以上の清浄度に保つ)。
In this circulating water supply type device, a part of the clean water is spent on humidifying the processing target air and carried away to the processing target air.
Further, the water-soluble gas component absorbed and removed from the air to be treated is brought into the storage tank together with the used clean water.
In response to these matters, a necessary amount of fresh clean water is supplied to the storage tank from the clean water supply means.
By this replenishment, the concentration of the water-soluble gas component of clean water circulated from the storage tank to the gas-liquid contact chamber is kept below a certain value (that is, kept at a certain degree of cleanliness).
 また一方、例えば同特許文献1の図4に示される一過給水式の装置も知られている。
 この一過給水式の装置では、清浄水供給手段から供給される新鮮清浄水を気液接触室に一過的に供給する。
 これに対し、気液接触室から排出される使用済み清浄水は全て装置外に排出する。
On the other hand, for example, a single supercharged water type apparatus shown in FIG.
In this single supercharged water type apparatus, fresh clean water supplied from the clean water supply means is temporarily supplied to the gas-liquid contact chamber.
On the other hand, all used clean water discharged from the gas-liquid contact chamber is discharged outside the apparatus.
 なお、清浄水供給手段が原水を浄化して清浄水を生成するものである場合、気液接触室から排出される使用済み清浄水を原水の一部として清浄水供給手段に戻す一過給水式の装置もある。 In addition, when the clean water supply means purifies the raw water to generate clean water, the single supercharging water type that returns the used clean water discharged from the gas-liquid contact chamber to the clean water supply means as a part of the raw water There is also a device.
 ところで、これら循環給水式及び一過給水式のいずれの空気浄化加湿装置にしても、気液接触室に供給する清浄水の給水量については、処理対象空気から水溶性ガス成分を除去する浄化性能として所要のガス成分除去効率を得るのに必要な浄化用必要水量を基本水量とする。
 そして、処理対象空気を一定加湿状態まで加湿するのに必要な加湿用必要水量を上記浄化用必要水量に加えた水量が必要な給水量になる。
By the way, in any of the circulating water supply type and the single supercharging water type air purification humidifiers, with respect to the amount of clean water supplied to the gas-liquid contact chamber, the purification performance for removing water-soluble gas components from the air to be treated The required amount of water for purification necessary for obtaining the required gas component removal efficiency is defined as the basic water amount.
Then, the required amount of water is obtained by adding the necessary amount of water for humidification necessary to humidify the air to be treated to a constant humidified state to the amount of necessary water for purification.
 したがって、処理対象空気が外気などの状態変化(処理前空気状態の変化)のある空気である場合、その状態変化が原因で上記加湿に必要な加湿用必要水量が変化すると、気液接触室に対する清浄水の必要給水量も加湿用必要水量の変化分だけ変化する。
 しかし、従来の空気浄化加湿装置では、加湿用の水量として十分な安全率を見込んだ一定の大きな加湿用設計水量を設定し、この加湿用設計水量を基本水量としての浄化用必要水量に加えた水量を設計給水量としていた。
 そして、この一定設計給水量の清浄水を気液接触室に連続供給する給水量一定運転を行なうようにしていた。
 つまり、加湿用必要水量の変化に応じて給水量を調整することは行なっていなかった。
Therefore, when the air to be treated is air having a change in state such as outside air (change in the pre-treatment air state), if the necessary water amount for humidification required for the humidification changes due to the change in the state, the air-liquid contact chamber The required amount of clean water is also changed by the change in the required amount of water for humidification.
However, in the conventional air purification humidifier, a certain large design water amount for humidification with a sufficient safety factor as the amount of water for humidification was set, and this design water amount for humidification was added to the necessary water amount for purification as the basic water amount. The amount of water was the design water supply.
Then, a constant water supply amount operation is performed in which clean water of this constant design water supply amount is continuously supplied to the gas-liquid contact chamber.
That is, the amount of water supply was not adjusted according to the change in the required amount of water for humidification.
 ちなみに、処理対象空気の状態変化に原因する加湿用必要水量の変化に対応するには、例えば、処理対象空気の処理前の空気状態を検出し、その検出空気状態に基づき、処理対象空気の状態変化による加湿用必要水量の変化分だけ、気液接触室に対する清浄水の給水量を増減調整することも考えられる。
 しかし、この場合、必要なガス成分除去効率でガス成分が除去されたかどうかは不明であるため、ガス成分の除去処理について精度のよい制御結果が得難いものになる。
Incidentally, in order to cope with the change in the amount of water required for humidification caused by the change in the state of the air to be treated, for example, the state of the air to be treated is detected based on the detected air state. It is also conceivable to increase or decrease the amount of clean water supplied to the gas-liquid contact chamber by the amount of change in the required amount of humidifying water due to the change.
However, in this case, since it is unclear whether the gas component has been removed with the required gas component removal efficiency, it is difficult to obtain an accurate control result for the gas component removal process.
 この為、上記の如き検出空気状態に基づく給水量調整では調整誤差などが生じ易い。この調整誤差が原因で、調整給水量のうちの加湿用水量分が各時点の実際の加湿用必要水量に対して一時的にせよ不足になる状態が生じると、その不足分が調整給水量のうちの浄化用水量分から補われる状態になり、浄化用水量分の一部が加湿用水量分とともに処理対象空気の加湿に費やされてしまう。
 このことで、ガス成分除去効率(即ち、浄化性能)が所要値を下回る状態になって、必要な浄化度の処理済み空気が得られなくなる事態を招く。
For this reason, adjustment errors and the like are likely to occur in the water supply amount adjustment based on the detected air state as described above. Due to this adjustment error, if the amount of humidification water in the adjusted water supply becomes temporarily insufficient compared to the actual amount of water required for humidification at each point in time, the shortage will be the amount of adjustment water supply. The amount of the water for purification is compensated, and a part of the amount of water for purification is consumed for humidifying the air to be treated together with the amount of water for humidification.
As a result, the gas component removal efficiency (i.e., purification performance) falls below a required value, resulting in a situation in which treated air having a required degree of purification cannot be obtained.
 このような事態を確実に回避するため、この種の空気浄化加湿装置では、従来、上記の如く過大な一定設計給水量の清浄水を気液接触室に連続供給する給水量一定運転を行なっていた。 In order to avoid such a situation with certainty, this type of air purification humidifier has conventionally performed a constant water supply amount operation for continuously supplying an excessively constant amount of clean water supply to the gas-liquid contact chamber as described above. It was.
特開2000-279741号公報JP 2000-279741 A
 しかし、上記の給水量一定運転では、過大な設計給水量の清浄水を気液接触室に連続して供給するため、循環給水式の装置では、貯留タンクから気液接触室に循環清浄水を送るポンプ動力が嵩んで運転コストが嵩む問題があった。 However, in the above-described constant water supply operation, since an excessively designed amount of clean water is continuously supplied to the gas-liquid contact chamber, in the circulating water supply system, circulating clean water is supplied from the storage tank to the gas-liquid contact chamber. There was a problem that the pump power to be sent increased and the operation cost increased.
 また、一過給水式の装置では、気液接触室から排出される使用済み清浄水の全てを装置外に排出するため、新鮮清浄水を気液接触室に供給するポンプ動力が嵩むだけでなく、気液接触室に供給する純水などの新鮮清浄水の消費量が嵩み、そのことで運転コストが一層嵩む問題があった。 In addition, in a single supercharged water type device, since all of the used clean water discharged from the gas-liquid contact chamber is discharged outside the device, the pump power for supplying fresh clean water to the gas-liquid contact chamber is not only increased. In addition, the consumption of fresh clean water such as pure water supplied to the gas-liquid contact chamber is increased, which causes a problem that the operation cost is further increased.
 この実情に鑑み、本発明の主たる課題は、合理的な給水量調整を行なうことで、所要の浄化性能及び所要の加湿性能を確実かつ安定的に得ながら、気液接触室に対する清浄水の給水量を、要求されるガス成分除去効率に対して必要かつ十分な量にすることができるようにし、そのことで運転コストを効果的に低減できる空気浄化加湿装置を提供する点にある。 In view of this situation, the main problem of the present invention is to supply clean water to the gas-liquid contact chamber while reliably and stably obtaining the required purification performance and the required humidification performance by adjusting the rational water supply amount. It is an object of the present invention to provide an air purification humidifier capable of making the amount necessary and sufficient for the required gas component removal efficiency, thereby effectively reducing the operation cost.
 空気浄化加湿装置に係る本発明の第1の特徴構成は、
 室内に通風する処理対象空気を室内で清浄水と気液接触させる気液接触室を備え、
 この気液接触室での清浄水との気液接触により、処理対象空気中における水溶性のガス成分を除去して処理対象空気を浄化するとともに、処理対象空気を加湿する空気浄化加湿装置であって、
 前記気液接触室から排出される使用済み清浄水の排水量を検出する排水量検出手段を備えるとともに、
 前記気液接触室に対する清浄水の給水量を前記排水量検出手段の検出排水量に基づき調整して前記排水量を設定排水量に調整する制御手段を備える点にある。
The first characteristic configuration of the present invention relating to an air purification humidifier is:
Provided with a gas-liquid contact chamber for bringing the air to be treated that is ventilated indoors into contact with clean water in the room,
This is an air purification humidifier that purifies the processing target air by removing water-soluble gas components in the processing target air by gas-liquid contact with clean water in the gas-liquid contact chamber, and humidifies the processing target air. And
With a wastewater amount detecting means for detecting the amount of used clean water discharged from the gas-liquid contact chamber,
A control means is provided for adjusting the amount of clean water supplied to the gas-liquid contact chamber on the basis of the detected amount of discharged water by the amount of discharged water detecting means to adjust the amount of discharged water to a set amount of discharged water.
 つまり、この種の空気浄化加湿装置のガス成分除去効率は、気液接触室に供給する清浄水の水質が同じであれば、気液接触室に対する給水量のうちで処理対象空気の浄化に寄与する水量と処理対象空気の風量との比(即ち、L/G値)によって決まることが知られている。 That is, the gas component removal efficiency of this type of air purification humidifier contributes to the purification of the air to be treated within the amount of water supplied to the gas-liquid contact chamber if the quality of the clean water supplied to the gas-liquid contact chamber is the same. It is known that it is determined by the ratio (that is, L / G value) between the amount of water to be processed and the air volume of the air to be treated.
 しかし、この種の空気浄化加湿装置では、前述の如く、気液接触室に対する給水量のうちの加湿用水量分が各時点における実際の加湿用必要水量に対して不足になる状態が生じると、その不足分は給水量のうちの浄化用水量分から補われ、処理対象空気の浄化に寄与する水量が不足する状態になる。 However, in this type of air purification humidifier, as described above, when a state occurs in which the amount of water for humidification out of the amount of water supplied to the gas-liquid contact chamber becomes insufficient with respect to the actual amount of water required for humidification at each time point, The shortage is supplemented from the amount of water for purification in the amount of water supplied, and the amount of water contributing to the purification of the air to be treated is insufficient.
 また逆に、給水量のうちの加湿用水量分が各時点における実際の加湿用必要水量に対して過剰になる状態が生じると、その過剰分は給水量のうちの浄化用水量分とともに処理対象空気の浄化に寄与した上で気液接触室から排出される。 On the other hand, if the amount of water for humidification out of the amount of water supply becomes excessive with respect to the actual amount of water required for humidification at each time point, the excess amount is treated together with the amount of water for purification in the amount of water supply. After contributing to the purification of air, it is discharged from the gas-liquid contact chamber.
 即ち、一定給水量の下では、処理対象空気の状態変化などによって加湿用必要水量が変化すると、給水量のうち処理対象空気の加湿に費やされる水量が変化後における実際の加湿用必要水量と等しい水量に優先的に自己調整されてしまい、そのことで、給水量のうち加湿に費やされることなく処理対象空気の浄化に寄与する水量(即ち、浄化に寄与した上で気液接触室から排出される水量)の方が変化する。 That is, under the constant water supply amount, when the required water amount for humidification changes due to a change in the state of the treatment target air, the amount of water consumed for humidification of the treatment target air is equal to the actual required water amount for humidification after the change. As a result, the amount of water that contributes to the purification of the air to be treated without being consumed for humidification (ie, that contributes to the purification and is discharged from the gas-liquid contact chamber). The amount of water) changes.
 これらのことに対し、上記第1特徴構成の空気浄化加湿装置では、検出排水量に基づき給水量を調整して排水量を設定排水量に調整することにおいて、その設定排水量として所要のガス成分除去効率を得るのに必要な浄化用必要水量と等しい水量を設定しておく。
 このことで、上記第1特徴構成の空気浄化加湿装置によれば、加湿用必要水量の変化により給水量のうち加湿に費やされる水量が変化後の加湿用必要水量と等しい水量に優先的に自己調整されることに対しても、給水量のうち処理対象空気の浄化に寄与する水量(即ち、気液接触室からの排水量となる水量)を設定排水量として設定された浄化用必要水量に維持することができる。
On the other hand, in the air purification humidifier of the first characteristic configuration described above, by adjusting the water supply amount based on the detected drainage amount and adjusting the drainage amount to the set drainage amount, the required gas component removal efficiency is obtained as the set drainage amount. The amount of water equal to the amount of water necessary for purification is set in advance.
Thus, according to the air purification humidifier of the first characteristic configuration, the amount of water consumed for humidification of the water supply amount due to a change in the amount of water required for humidification is preferentially given to the amount of water equal to the amount of water required for humidification after the change. Even with the adjustment, the amount of water that contributes to purification of the air to be treated (ie, the amount of water that becomes the amount of drainage from the gas-liquid contact chamber) of the amount of water supply is maintained at the required amount of water for purification that is set as the set amount of drainage. be able to.
 これにより、処理対象空気の状態変化などが原因で加湿用必要水量が変化することにかかわらず、ガス成分除去効率(浄化性能)を所要値に維持することができて、処理済み空気の浄化度を必要浄化度に維持することができる。また、加湿性能については、加湿に費やされる水量が上記の如く加湿用必要水量の変化に対し優先的に自己調整されることで維持される。 As a result, the gas component removal efficiency (purification performance) can be maintained at the required value regardless of changes in the amount of water required for humidification due to changes in the state of the air to be treated. Can be maintained at the required degree of purification. Further, the humidification performance is maintained by preferentially adjusting the amount of water consumed for humidification with respect to the change in the required amount of water for humidification as described above.
 そしてまた、湿度や温度といった空気状態の検出に比べ排水量の検出は一般に検出精度面での信頼性が高く検出誤差が生じ難い。したがって、上記の如き検出排水量に基づく給水量調整であれば、先述した検出空気状態に基づく給水量調整での問題、即ち、調整誤差などに原因してガス成分除去効率が所要値を下回る事態を招くといったことも一層確実に回避することができる。 In addition, the detection of the amount of discharged water is generally more reliable in terms of detection accuracy than the detection of air conditions such as humidity and temperature, and detection errors are unlikely to occur. Therefore, if the water supply amount adjustment is based on the detected wastewater amount as described above, the problem with the water supply amount adjustment based on the detected air condition described above, that is, the situation where the gas component removal efficiency falls below the required value due to an adjustment error or the like. Invitation can be avoided more reliably.
 これらのことから、上記第1特徴構成の空気浄化加湿装置によれば、所要の浄化性能及び所要の加湿性能を確実かつ安定的に得ながらも、過大な設計給水量の清浄水を気液接触室に連続供給する給水量一定運転を採用する従来装置に比べ、気液接触室に対する清浄水の給水量を、要求されるガス成分除去効率に対して必要かつ十分な量に効果的に低減することができ、そのことで装置の運転コストを効果的に低減することができる。 For these reasons, according to the air purification / humidification device having the first characteristic configuration described above, the purified water with an excessive design water supply amount can be brought into gas-liquid contact while ensuring the required purification performance and the required humidification performance reliably and stably. Compared to conventional equipment that uses constant feed water supply to the chamber, the amount of clean water supplied to the gas-liquid contact chamber is effectively reduced to the required and sufficient amount for the required gas component removal efficiency. This can effectively reduce the operating cost of the apparatus.
 なお、設定排水量としては、現実的には多少の安全率を見込んで浄化用必要水量よりもある程度大きい水量を設定するのが望ましい。しかし、その場合でも給水量一定運転を行なう従来装置に比べ運転コストは大幅に低減することができる。 It should be noted that, as a set drainage amount, it is desirable to set a water amount that is somewhat larger than the necessary water amount for purification in consideration of a certain safety factor. However, even in that case, the operating cost can be greatly reduced as compared with the conventional apparatus that performs the operation with a constant water supply amount.
 ちなみに、処理対象空気の状態変化などに原因して加湿用必要水量が変化することに対し所要の浄化性能及び所要の加湿性能を維持するには、次のような給水量調整も考えられる。
 即ち、加湿用必要水量の変化で給水量のうちの処理対象空気の浄化に寄与する水量に過不足が生じると、気液接触室から排出される使用済み清浄水の水溶性ガス成分濃度(即ち、吸収ガス成分濃度)も変化する。従って、気液接触室からの排出清浄水のガス成分濃度を検出し、その検出濃度に基づき排出清浄水のガス成分濃度を設定濃度に維持するように気液接触室に対する清浄水の給水量を自動調整することが考えられる。
Incidentally, in order to maintain the required purification performance and the required humidification performance against the change in the required amount of water for humidification caused by the change in the state of the air to be treated, the following water supply amount adjustment is also conceivable.
That is, if the amount of water that contributes to the purification of the air to be treated out of the water supply amount due to a change in the amount of water necessary for humidification occurs, the concentration of water-soluble gas components in the used clean water discharged from the gas-liquid contact chamber (i.e. , Absorption gas component concentration) also changes. Therefore, the gas component concentration of the discharged clean water from the gas-liquid contact chamber is detected, and the amount of clean water supplied to the gas-liquid contact chamber is set so as to maintain the gas component concentration of the discharged clean water at the set concentration based on the detected concentration. It is possible to adjust automatically.
 しかしながら、水中ガス成分濃度の検出は一般に検出精度面での信頼性が低く検出誤差を生じ易く、このため、検出ガス成分濃度に基づく給水量調整では、やはり調整誤差などが原因でガス成分除去効率が所要値を下回る事態を招き易い。
 この点、検出排水量に基づき給水量を調整する上記第1特徴構成の空気浄化加湿装置であれば、前述の通り、そのような事態を招くことを一層確実に回避することができ、そのことで、所要の浄化性能及び所要の加湿性能を確実かつ安定的に得ながら、清浄水の給水量を効果的に低減することができる。
However, detection of the gas component concentration in water is generally not reliable in terms of detection accuracy, and detection errors are likely to occur. Therefore, in the adjustment of the water supply amount based on the detected gas component concentration, the gas component removal efficiency is still caused by the adjustment error. It is easy to invite a situation that is below the required value.
In this regard, as described above, the air purification / humidification device having the first characteristic configuration that adjusts the amount of water supply based on the detected amount of wastewater can more reliably avoid such a situation as described above. The amount of clean water supplied can be effectively reduced while reliably and stably obtaining the required purification performance and required humidification performance.
 なお、ここで言うガス成分除去効率ηは次式で表されるものである。
     η=(Cai-Cao)/Cai
   但し、Cai:処理前の処理対象空気の水溶性ガス成分濃度
      Cao:処理後の処理対象空気の水溶性ガス成分濃度
The gas component removal efficiency η referred to here is expressed by the following equation.
η = (Cai−Cao) / Cai
However, Cai: concentration of water-soluble gas component in the air to be treated before treatment Cao: concentration of water-soluble gas component in the air to be treated after treatment
 上記第1特徴構成の実施において、清浄水と処理対象空気との接触方式については、気液接触室において清浄水を流下用部材の表面に伝わらせて水膜状態で流下させる方式や、気液接触室に配置した含水性や濡れ性を備える通気性部材に清浄水を供給する方式、あるいはまた、気液接触室において清浄水を高密度状態で散水する方式や、それらの方式を組み合わせた方式など、種々の接触方式を採用することができる。 In the implementation of the first characteristic configuration, the contact method between the clean water and the air to be treated is a method in which the clean water is transferred to the surface of the flow-down member in the gas-liquid contact chamber to flow down in a water film state, A method of supplying clean water to a breathable member with moisture content and wettability placed in the contact chamber, or a method of spraying clean water in a high-density state in the gas-liquid contact chamber, or a method combining these methods Various contact methods can be employed.
 使用する清浄水(循環給水式では循環系に補給する新鮮清浄水、一過給水式では気液接触室に供給する新鮮清浄水)は純水や一般上水あるいはフィルタ等で浄化した浄化水など、ほぼ一定な水質を維持できるものでれば、種々の清浄水を使用することができる。また、清浄水として薬品を添加した各種水溶液を使用するようにしてもよい。 The clean water to be used (fresh water supplied to the circulation system in the circulating water supply system, fresh clean water supplied to the gas-liquid contact chamber in the single-supercharging water system) is purified water, purified water purified with a filter, etc. Various clean waters can be used as long as they can maintain a substantially constant water quality. Moreover, you may make it use the various aqueous solution which added the chemical | medical agent as clean water.
 第1特徴構成の空気浄化加湿装置は、外気など処理前の空気状態が刻々と変化する空気を処理対象空気とする場合に特に有効である。しかし、処理対象空気は処理前の空気状態が通常は変化しない、あるいは、それほど変化しない空気であってもよく、その場合でも何らかの原因による処理対象空気の状態変化に備える意味で有効である。 The air purification humidifier having the first characteristic configuration is particularly effective when air for which the air state before processing such as outside air changes every moment is used as processing target air. However, the air to be treated may be air in which the air state before the treatment does not normally change or does not change so much, and even in that case, it is effective in the sense of preparing for a change in the state of the air to be treated due to some cause.
 また、加湿用必要水量の変化の原因は処理対象空気の状態変化に限られるものではなく、それ以外の原因による加湿用必要水量の変化であってもよく、その場合にも、第1特徴構成の空気浄化加湿装置であれば所要の浄化性能を安定的に維持することができる。 In addition, the cause of the change in the required amount of water for humidification is not limited to the change in the state of the air to be treated, but may be a change in the required amount of water for humidification due to other causes. Therefore, the required purification performance can be stably maintained with this air purification humidifier.
 空気浄化加湿装置に係る本発明の第2特徴構成は、
 前記気液接触室に対する処理対象空気の通風量を検出する風量検出手段を備え、
 前記制御手段は、この風量検出手段の検出通風量に基づいて前記設定排水量を変更する構成にしてある点にある。
The second characteristic configuration of the present invention relating to the air purification humidifier is:
An air volume detecting means for detecting an air flow volume of the air to be processed with respect to the gas-liquid contact chamber;
The control means is configured to change the set drainage amount based on the detected ventilation amount of the air volume detection means.
 つまり、ガス成分除去効率(浄化性能)は前述の如く給水量のうち加湿に費やされることなく処理対象空気の浄化に寄与する水量(即ち、排水量となる水量)と処理対象空気の風量との比であるL/G値によって決まる。従って、気液接触室に対する処理対象空気の通風量(即ち、処理対象空気の処理風量)が変化すると、処理対象空気を一定加湿状態に加湿するのに必要な加湿用必要水量が比例的に変化することに加え、所要のガス成分除去効率(浄化性能)を得るのに必要な浄化用必要水量も一定の相関をもって変化する。 That is, the gas component removal efficiency (purification performance) is the ratio of the amount of water that contributes to the purification of the air to be treated (that is, the amount of water to be drained) and the air volume of the air to be treated without spending humidification, as described above. It is determined by the L / G value. Therefore, when the flow rate of the processing target air to the gas-liquid contact chamber (that is, the processing air volume of the processing target air) changes, the required amount of water for humidification required to humidify the processing target air to a constant humidification state changes proportionally. In addition, the necessary amount of water for purification necessary for obtaining the required gas component removal efficiency (purification performance) also changes with a certain correlation.
 このことに対し、上記第2特徴構成であれば、検出通風量に基づき設定排水量を変更するのに、処理対象空気の通風量と浄化用必要水量との間に存在する一定の相関上で各時点における処理対象空気の通風量に対応する浄化用必要水量と等しい水量(現実的にはある程度の安全率を見込んだ水量)を設定排水量とする。
 このようにしておけば、処理対象気体の通風量の変化に対し、給水量のうち処理対象空気の加湿に費やされる水量が前述の如く各時点の加湿用必要水量(即ち、通風量変化に伴い比例的に変化する加湿用必要水量)と等しい水量に優先的に自己調整されることを許しながら、給水量のうち処理対象空気の浄化に寄与する水量(排水量となる水量)の方も各時点の浄化用必要水量(即ち、通風量変化に伴い一定の相関をもって変化する浄化用必要水量)に等しい水量に自動的に変更することができる。
On the other hand, in the case of the second characteristic configuration described above, the set drainage amount is changed based on the detected ventilation amount, and the respective correlations exist between the ventilation amount of the air to be treated and the necessary water amount for purification. The amount of water that is equal to the required amount of water for purification corresponding to the amount of ventilation of the air to be treated at the time (practically, the amount of water that allows for a certain degree of safety factor) is set as the set amount of drainage.
In this way, the amount of water consumed for humidifying the air to be treated out of the amount of water supplied is the amount of water required for humidification at each point in time (i.e., with the change in the amount of air flow, as described above). The amount of water that contributes to the purification of the air to be treated (the amount of water that becomes the amount of drainage) is also at each point in time while allowing the self-adjustment to preferentially adjust to the amount of water that is equal to the proportionally required amount of water for humidification) The amount of water required for purification (that is, the amount of water required for purification that changes with a certain correlation as the amount of ventilation changes) can be automatically changed.
 このことにより、処理対象空気の通風量変化にかかわらず、ガス成分除去効率(浄化性能)を所要値に維持することができて、処理済み空気の浄化度を必要浄化度に維持することができ、また、所要の加湿性能も維持することができる。 As a result, the gas component removal efficiency (purification performance) can be maintained at a required value regardless of the change in the air flow rate of the processing target air, and the degree of purification of the processed air can be maintained at the required degree of purification. In addition, the required humidification performance can be maintained.
 ちなみに、前述の如く気液接触室からの排出清浄水のガス成分濃度(吸収ガス成分濃度)を検出し、その検出濃度に基づき排出清浄水のガス成分濃度を設定濃度に維持するように気液接触室に対する清浄水の給水量を調整する場合では、それだけで処理対象空気の通風量の変化に対してもガス成分除去効率(浄化性能)を所要値に維持するとともに、所要の加湿性能を維持することができる。 Incidentally, as described above, the gas component concentration (absorbed gas component concentration) of the discharged clean water from the gas-liquid contact chamber is detected, and the gas liquid concentration is maintained based on the detected concentration. When adjusting the amount of clean water supplied to the contact chamber, the gas component removal efficiency (purification performance) can be maintained at the required value and the required humidification performance can be maintained even when the flow rate of the target air is changed. can do.
 しかし、これも前述の通り水中ガス成分濃度の検出は一般に検出精度面での信頼性が低くて検出誤差を生じ易い。
 しかし、検出通風量に基づき設定排水量を変更する上記構成であれば、通風量検出の信頼性が高くて調整誤差が生じ難いことから、処理対象空気の通風量変化に対してガス成分除去効率が所要値を下回る事態を招くことを一層確実に回避することができる。
However, as described above, the detection of the concentration of the underwater gas component is generally low in reliability in terms of detection accuracy and easily causes a detection error.
However, with the above configuration in which the set drainage amount is changed based on the detected ventilation rate, the reliability of the ventilation rate detection is high and adjustment errors are unlikely to occur. Inviting a situation below the required value can be avoided more reliably.
 空気浄化加湿装置に係る本発明の第3の特徴構成は、
 前記気液接触室に供給する清浄水として、清浄水供給手段から供給される新鮮清浄水を一過的に前記気液接触室に供給する構成にしてある点にある。
The third characteristic configuration of the present invention relating to the air purification humidifier is
As clean water supplied to the gas-liquid contact chamber, fresh clean water supplied from clean water supply means is temporarily supplied to the gas-liquid contact chamber.
 つまり、前記の第1特徴構成や第2特徴構成は循環給水式あるいは一過給水式の空気浄化加湿装置のいずれにも適用できる。しかし、新鮮清浄水を気液接触室に一過的に連続供給する一過給水式の空気浄化加湿装置は、循環給水式のものに比べ一般的により高いガス成分除去効率を得ることができる。 That is, the first characteristic configuration and the second characteristic configuration described above can be applied to either a circulating water supply type or a single supercharged water purification humidifier. However, a single supercharging water purifying / humidifying device that temporarily and continuously supplies fresh clean water to the gas-liquid contact chamber can generally obtain higher gas component removal efficiency than a circulating water supply type.
 また、前記の第1特徴構成や第2特徴構成では、その効果として、処理対象空気の状態変化や通風量変化に対しても所要のガス成分除去効率を安定的に維持することができる。 Further, in the first feature configuration and the second feature configuration, the required gas component removal efficiency can be stably maintained even with respect to a change in the state of the air to be treated and a change in the amount of ventilation.
 これらのことが相俟って、一過給水式の空気浄化加湿装置を適用対象とする上記第3特徴構成であれば、処理済み空気の必要浄化度として高い浄化度が要求される場合に特に好適な空気浄化加湿装置にすることができる。 In combination with these, the third characteristic configuration that applies to the single-supercharged air purification humidifier is particularly suitable when a high degree of purification is required as the required degree of purification of the treated air. A suitable air purification humidifier can be obtained.
 空気浄化加湿装置に係る本発明の第4特徴構成は、
 前記気液接触室に供給する清浄水として、前記気液接触室から排出される使用済み清浄水と清浄水供給手段から供給される新鮮清浄水との混合水を前記気液接触室に供給する構成にしてある点にある。
The fourth characteristic configuration of the present invention relating to the air purification humidifier is
As clean water to be supplied to the gas-liquid contact chamber, mixed water of used clean water discharged from the gas-liquid contact chamber and fresh clean water supplied from clean water supply means is supplied to the gas-liquid contact chamber. It is in the point which is made into composition.
 つまり、新鮮清浄水を補給水として消費するだけの循環給水式の空気浄化加湿装置は、一過給水式ものに比べ本質的に新鮮清浄水の消費量が少ない。 In other words, a circulating water supply type air purification humidifier that only consumes fresh clean water as makeup water consumes essentially less fresh clean water than a single supercharged type.
 また、前記の第1特徴構成や第2特徴構成では、その効果として、気液接触室に清浄水を供給するポンプの消費動力を効果的に低減することができる。 In the first feature configuration and the second feature configuration, the power consumption of the pump that supplies clean water to the gas-liquid contact chamber can be effectively reduced.
 これらのことが相俟って、循環給水式の空気浄化加湿装置を適用対象とする上記第4特徴構成であれば、運転コストの低コスト化がガス成分除去効率に優先して特に要求される場合に好適な空気浄化加湿装置にすることができる。
 空気浄化加湿装置に係る本発明の第5特徴構成は、
 前記気液接触室には、空気の通風経路に対して横断状態に配置した流下メディア、及び、この流下メディアに対して上方から清浄水を滴下する給水ヘッダを装備し、
 この流下メディアは、多数の傾斜波部を形成した縦姿勢の波板状部材を密に並設して構成し、隣り合う波板状部材ごとに前記傾斜波部の傾斜方向を反転させてある点にある。
 つまり、この第5特徴構成によれば、通風空気と清浄水とを効率良く気液接触させることができて、空気浄化性能及び空気加湿性能の夫々について高い性能を得ることができる。
In combination with these, the fourth characteristic configuration for which the circulating water supply type air purification humidifier is applied is particularly required to reduce the operating cost in preference to the gas component removal efficiency. In this case, a suitable air purification humidifier can be obtained.
The fifth characteristic configuration of the present invention relating to the air purification humidifier is:
The gas-liquid contact chamber is equipped with a flow-down medium arranged transversely to the air ventilation path, and a water supply header that drops clean water from above on the flow-down medium,
This falling medium is formed by closely arranging corrugated members in a vertical posture in which a large number of inclined wave portions are formed, and the inclination direction of the inclined wave portions is reversed for each adjacent corrugated member. In the point.
In other words, according to the fifth feature configuration, the ventilation air and the clean water can be efficiently brought into gas-liquid contact, and high performance can be obtained for each of the air purification performance and the air humidification performance.
図1はクリーンルームに対する空調設備を示す図である。FIG. 1 is a diagram showing air conditioning equipment for a clean room. 図2は外調機の構成を示す図である。FIG. 2 is a diagram showing the configuration of the external air conditioner. 図3は気液接触部を示す斜視図である。FIG. 3 is a perspective view showing the gas-liquid contact portion. 図4は気液接触部での物質収支の説明図である。FIG. 4 is an explanatory diagram of the material balance at the gas-liquid contact portion.
 図1はクリーンルームの空調設備を示す。同図1に示すように、クリーンルームである対象室1の天井部には、その全面にわたらせてファンフィルタユニット2を行列配置で並設してある。
 給気路3を通じて給気ファンFsにより天井チャンバ4に供給される空調用空気SAを各ファンフィルタユニット2に装備の高性能フィルタ2aにより浄化し、この浄化後の空調用空気SAを各ファンフィルタユニット2に装備のファン2bにより室内に下向きに吹き出し供給する。これにより、対象室1の室内を所要の温湿度状態で所要の清浄度に調整維持する。
FIG. 1 shows a clean room air conditioning system. As shown in FIG. 1, fan filter units 2 are arranged side by side in a matrix arrangement across the entire surface of the ceiling of the target room 1 that is a clean room.
The air conditioning air SA supplied to the ceiling chamber 4 by the air supply fan Fs through the air supply path 3 is purified by the high performance filter 2a provided in each fan filter unit 2, and the air conditioning air SA after purification is purified by the fan filter. The fan 2b installed in the unit 2 is blown out and supplied indoors. Thereby, the interior of the target room 1 is adjusted and maintained at a required cleanliness in a required temperature and humidity state.
 対象室1の床下部は、ファンフィルタユニット2による浄化空調用空気SAの室内供給に伴い格子床5を通じて室内から排出される空気RAを受け入れる床下チャンバ6にしてある。 The lower floor of the target room 1 is an under-floor chamber 6 that receives the air RA discharged from the room through the lattice floor 5 as the purified air conditioning air SA is supplied by the fan filter unit 2.
 空調用空気SAの生成には外調機7(外気調整用空調機)及び空調機8を装備してある。即ち、外気ファンFoにより外気導入路9を通じて導かれる外気OAを外調機7により調整し、この外調機7での調整外気OAsを中継路10を通じ空調機8に導く。
 また、床下チャンバ6に受け入れた排出空気RAの一部を還気空気RAsとして還気ファンFrにより還気路11を通じ空調機8に導く。
An air conditioner 7 (air conditioner for adjusting outside air) and an air conditioner 8 are provided for generating the air SA for air conditioning. That is, the outside air OA guided through the outside air introduction path 9 by the outside air fan Fo is adjusted by the outside air conditioner 7, and the adjusted outside air OAs in the outside air conditioner 7 is led to the air conditioner 8 through the relay path 10.
Further, a part of the exhaust air RA received in the underfloor chamber 6 is led to the air conditioner 8 through the return air path 11 by the return air fan Fr as the return air RAs.
 そして、これら調整外気OAsと還気空気RAsとの混合空気を空調機8において温湿度調整し、この空調機8での調整空気を上記空調用空気SAとして給気路3を通じ対象室1の天井チャンバ4に供給する。 Then, the temperature and humidity of the mixed air of the adjusted outside air OAs and the return air RAs are adjusted in the air conditioner 8, and the adjusted air in the air conditioner 8 is used as the air conditioning air SA through the air supply path 3 and the ceiling of the target room 1. Supply to chamber 4.
 なお、床下チャンバ6に受け入れた排出空気RAの残部(外気導入路9からの外気OAの取り入れ量に等しい量の排出空気RA)は排気路12を通じて排気ファンFeにより外部に排出する。 The remainder of the exhaust air RA received in the underfloor chamber 6 (exhaust air RA in an amount equal to the intake amount of the external air OA from the external air introduction passage 9) is exhausted to the outside through the exhaust passage 12 by the exhaust fan Fe.
 外調機7には、図2に示すように、処理対象空気である外気OAの通風方向において上手側から順に、フィルタ13、予熱器14、予冷器15、気液接触器16、冷却器17、再熱器18を内装してある。 As shown in FIG. 2, the external air conditioner 7 includes a filter 13, a preheater 14, a precooler 15, a gas-liquid contactor 16, and a cooler 17 in order from the upper side in the ventilation direction of the outside air OA that is the processing target air. The reheater 18 is installed.
 つまり、この外調機7では外気OAの調整処理として、外気導入路9を通じて導かれる外気OAをフィルタ13により除塵し、この除塵した外気OAを冬季には予熱器14で予熱し、また、夏季には予冷器15で予冷し、これら予熱又は予冷した外気OAを空気浄化加湿装置としての気液接触器16において清浄水Wと気液接触させることで浄化し、また、その浄化に伴い飽和状態近くまで加湿する。 That is, in the outside air conditioner 7, as the adjustment process of the outside air OA, the outside air OA guided through the outside air introduction path 9 is removed by the filter 13, and the removed outside air OA is preheated by the preheater 14 in the winter, and in the summer Is precooled by the precooler 15 and purified by bringing the preheated or precooled outside air OA into contact with the clean water W in the gas-liquid contactor 16 serving as an air purification humidifier, and saturated with the purification. Humidify close.
 そして、気液接触器16において浄化及び加湿した外気OAを冷却器17により所定温度まで冷却することで、その外気OAを所定絶対湿度まで冷却除湿し、続いて、この冷却除湿した外気OAを再熱器18により所定温度まで再熱し、このように温湿度調整するとともに浄化した外気OAを調整外気OAsとして中継路10を通じ空調機8に供給する。 Then, the outside air OA purified and humidified in the gas-liquid contactor 16 is cooled to a predetermined temperature by the cooler 17, so that the outside air OA is cooled and dehumidified to a predetermined absolute humidity. The heater 18 is reheated to a predetermined temperature, and the temperature / humidity adjusted and purified outside air OA is supplied to the air conditioner 8 through the relay path 10 as adjusted outside air OAs.
 気液接触器16には、図3に示すように、外調機7における外気OAの通風経路に対して横断状態に配置する流下メディア19、この流下メディア19に対して上方から清浄水Wを滴下する複数の滴下口20aを設けた給水ヘッダ20、及び、流下メディア19の下方で流下清浄水W′を受け止めるドレンパン21を装備してある。 As shown in FIG. 3, the gas-liquid contactor 16 is provided with a flow-down medium 19 arranged in a state transverse to the ventilation path of the external air OA in the external air conditioner 7, and clean water W from above on the flow-down medium 19. A water supply header 20 provided with a plurality of dripping openings 20 a and a drain pan 21 that receives the flowing clean water W ′ below the flowing medium 19 are provided.
 流下メディア19は、多数の傾斜波部22aを形成した縦姿勢の波板状部材22を密に並設したものであり、この流下メディア19では、隣り合う波板状部材22ごとに傾斜波部22aの傾斜方向(稜線方向)を反転させてある。 The falling media 19 is a densely arranged corrugated plate-like member 22 in a vertical posture in which a large number of inclined wave portions 22 a are formed. In the falling media 19, the inclined wave portions are provided for each adjacent wave plate-like member 22. The inclination direction (ridge line direction) of 22a is reversed.
 つまり、この気液接触器16では、給水ヘッダ20の滴下口20aから流下メディア19に清浄水Wを滴下することで、その滴下清浄水Wを流下メディア19における多数の波板状部材22夫々の表面に伝わらせて水膜状態で流下させる。
 これにより、流下メディア19の配置空間である器内を気液接触室として、波板状部材22どうしの間の間隙を通過する処理対象空気としての外気OAを流下過程にある水膜状態の清浄水Wと気液接触させ、この気液接触により、外気OAに含まれる水溶性のガス成分を除去して外気OAを浄化するとともに、その外気OAを飽和状態近くまで加湿する。
That is, in this gas-liquid contactor 16, the clean water W is dropped from the dropping port 20 a of the water supply header 20 to the flowing-down medium 19, so that the dripped clean water W is supplied to each of the many corrugated plate-like members 22 in the flowing-down medium 19. It is transmitted to the surface and allowed to flow down in the form of a water film.
As a result, the inside of the vessel, which is the space where the falling media 19 is arranged, is used as a gas-liquid contact chamber, and the outside air OA as the processing target air passing through the gap between the corrugated plates 22 is cleaned in the water film state in the process of flowing The water W is brought into gas-liquid contact, and by this gas-liquid contact, the water-soluble gas component contained in the outside air OA is removed to purify the outside air OA, and the outside air OA is humidified to near saturation.
 流下ヘッダ20から流下メディア19に滴下供給する清浄水Wとしては、清浄水供給手段としての純水発生装置23から給水路24を通じて給水ポンプPwにより供給される新鮮清浄水としての純水Wを気液接触器16に対して一過的に供給する。
 ドレンパン21により受け止めた流下メディア19からの流下清浄水W′(即ち、ガス成分を吸収した使用済み清浄水)は排水路25を通じて外部に排出する。即ち、この気液接触器16は一過給水式のものにしてある。
The clean water W dropped from the flow header 20 to the flow medium 19 is pure water W as fresh clean water supplied from the pure water generator 23 as the clean water supply means through the water supply path 24 by the feed pump Pw. The liquid contactor 16 is temporarily supplied.
The flowing clean water W ′ (that is, the used clean water that has absorbed the gas component) received from the draining medium 19 received by the drain pan 21 is discharged to the outside through the drainage channel 25. That is, this gas-liquid contactor 16 is of a supercharged water type.
 純水発生装置23からの給水路24には、気液接触器16に対する新鮮清浄水W(純水)を給水量Liを調整する給水流量調整弁26を装備し、また、気液接触器16からの排水路25には、気液接触器16から排出される使用済み清浄水W′(使用済み純水)の排水量Loを検出する排水量検出手段としての排水流量計27を装備してある。 The water supply path 24 from the pure water generator 23 is equipped with a water supply flow rate adjustment valve 26 that adjusts the water supply amount Li of fresh clean water W (pure water) for the gas-liquid contactor 16, and the gas-liquid contactor 16 A drainage flow meter 27 serving as a drainage amount detecting means for detecting a drainage amount Lo of the used clean water W ′ (used pure water) discharged from the gas-liquid contactor 16 is provided in the drainage channel 25 from the gas-liquid contactor 16.
 さらにまた、対象室1の使用状況に応じて外調機7から空調機8に供給する調整外気OAsの風量が変更されるなどのことで、外調機7における外気OAの通風量Gi(換言すれば、気液接触器16における外気OAの通風量)は変化する。これに対し、外調機7には、外気OAの通風量Giを検出する風量検出手段としての風量計28を装備してある。 Furthermore, the flow rate Gi of the outside air OA in the outside air conditioner 7 (in other words, the air amount of the adjusted outside air OAs supplied from the outside air conditioner 7 to the air conditioner 8 is changed according to the usage state of the target room 1. Then, the amount of outside air OA in the gas-liquid contactor 16 changes. On the other hand, the external air conditioner 7 is equipped with an air flow meter 28 as an air flow detecting means for detecting the air flow amount Gi of the outside air OA.
 そして、この外調機7には、これら排水流量計27による検出排水量Lo及び風量計28による検出通風量Giに基づき、気液接触器16に対する新鮮清浄水W(純水)の給水量Liを自動調整する制御手段としての給水制御器29を装備してある。 The external air conditioner 7 is supplied with a water supply amount Li of fresh clean water W (pure water) to the gas-liquid contactor 16 based on the detected drainage amount Lo by the drainage flow meter 27 and the detected ventilation amount Gi by the airflow meter 28. A water supply controller 29 is provided as a control means for automatic adjustment.
 図4は気液接触器16での物質収支を示している。図中における各符号は次の諸値を示すものである。
  Li:清浄水Wの給水量
  Lo:使用済み清浄水W′の排水量
  Lh:処理前の外気OAに対する処理後の外気OAsの加湿量
  Gi:外気OAの通風量
  Cwi:供給清浄水Wの水溶性ガス成分濃度(≒0)
  Cwo:使用済み清浄水W′の水溶性ガス成分濃度
  Cai:処理前の外気OAの水溶性ガス成分濃度
  Cao:処理後の外気OAsの水溶性ガス成分濃度
FIG. 4 shows the material balance in the gas-liquid contactor 16. Each symbol in the figure indicates the following values.
Li: Supply amount of clean water W Lo: Drainage amount of used clean water W ′ Lh: Amount of humidification of outside air OAs after treatment to outside air OA before treatment Gi: Aeration amount of outside air OA Cwi: Water solubility of supplied clean water W Gas component concentration (≒ 0)
Cwo: Water-soluble gas component concentration of used clean water W ′ Cai: Water-soluble gas component concentration of outside air OA before treatment Cao: Water-soluble gas component concentration of outside air OAs after treatment
 ここで、気液接触器16での物質収支を考えた場合、気液接触器16に入る水側及び空気側の物質量と気液接触室16から出る水側及び空気側の物質量とは等しいことから次の(式1)が成立する。
 Li×Cwi+Gi×Cai=Lo×Cwo+Gi×Cao+Lh×Cwi
                                ………(式1)
Here, when the material balance in the gas-liquid contactor 16 is considered, the water-side and air-side substance amounts entering the gas-liquid contactor 16 and the water-side and air-side substance amounts exiting from the gas-liquid contact chamber 16 are: Since they are equal, the following (Formula 1) holds.
Li × Cwi + Gi × Cai = Lo × Cwo + Gi × Cao + Lh × Cwi
......... (Formula 1)
 また、給水量Liから加湿量Lhを減じた水量が排水量Loになることから次の(式2)が成立する。
 Li=Lh+Lo  ………(式2)
Further, since the water amount obtained by subtracting the humidification amount Lh from the water supply amount Li becomes the drainage amount Lo, the following (Expression 2) is established.
Li = Lh + Lo (Equation 2)
 そして、(式2)を(式1)に代入して(式1)を整理すると次の(式3)が得られる。
 Lo×(Cwi-Cwo)=Gi×(Cao-Cai) ………(式3)
Then, by substituting (Equation 2) into (Equation 1) and rearranging (Equation 1), the following (Equation 3) is obtained.
Lo × (Cwi−Cwo) = Gi × (Cao−Cai) (Equation 3)
 これに対し、気液接触器16の外気OAに対する浄化性能を表すガス成分除去効率ηは次の(式4)で示される。
 η=(Cai-Cao)/Cai ………(式4)
On the other hand, the gas component removal efficiency η representing the purification performance of the gas-liquid contactor 16 with respect to the outside air OA is expressed by the following (formula 4).
η = (Cai−Cao) / Cai (Equation 4)
 この(式4)に上記の(式3)を代入すると、ガス成分除去効率ηは次の(式5)で表される。
 η=(Lo/Gi)×((Cwi-Cwo)/Cai)………(式5)
By substituting (Equation 3) into (Equation 4), the gas component removal efficiency η is expressed by the following (Equation 5).
η = (Lo / Gi) × ((Cwi−Cwo) / Cai) (Equation 5)
 この(式5)における使用済み清浄水W′の水溶性ガス成分濃度Cwoは、水溶性ガス成分と水との平衡関係、及び、外気通風量Giに対する使用済み清浄水W′の排水量Lの比(Lo/Gi)によって決定される。この比Lo/Giが大きくなる(即ち、外気通風量Giが一定の場合は排水量Loが大きくなる)と、使用済み清浄水W′の水溶性ガス成分濃度Cwoが小さくなり、ガス成分除去効率ηは上昇する方向に線形関係で推移する。 The water-soluble gas component concentration Cwo of the used clean water W ′ in (Equation 5) is the equilibrium relationship between the water-soluble gas component and water, and the ratio of the waste water amount L of the used clean water W ′ to the outside air flow rate Gi. Determined by (Lo / Gi). When the ratio Lo / Gi increases (that is, the drainage amount Lo increases when the outside air flow rate Gi is constant), the water-soluble gas component concentration Cwo of the used clean water W ′ decreases, and the gas component removal efficiency η Changes in a linear relationship in the upward direction.
 従って、〈式5〉においてガス成分除去効率ηを支配する要因は、空気と水の入口条件として固定される処理前の外気OAの水溶性ガス成分濃度Caiと供給清浄水Wの水溶性ガス成分濃度Cwi(≒0)とを除けば、Lo/Giである。 Therefore, the factors governing the gas component removal efficiency η in <Formula 5> are the water-soluble gas component concentration Cai of the outside air OA before treatment fixed as the air and water inlet conditions and the water-soluble gas component of the supplied clean water W Excluding the density Cwi (≈0), it is Lo / Gi.
 つまり、浄化性能を示すガス成分除去効率ηは、気液接触器16に供給する清浄水Wの水質が同じ(即ち、Cwi=一定)であれば、気液接触器16に対する給水量Liのうちで外気OAの浄化に寄与する水量(=排水量Loに等しい水量)と外気OAの風量(=通風量Gi)との比であるL/G値によって決まる。 In other words, the gas component removal efficiency η indicating the purification performance is equal to the water supply amount Li for the gas-liquid contactor 16 if the quality of the clean water W supplied to the gas-liquid contactor 16 is the same (that is, Cwi = constant). Therefore, it is determined by the L / G value which is the ratio of the amount of water contributing to the purification of the outside air OA (= the amount of water equal to the amount of drainage Lo) and the amount of the outside air OA (= the amount of ventilation Gi).
 一方、この種の気液接触器16では、所定通風量Giの外気OAについて所要のガス成分除去効率ηを得るのに必要な浄化用必要水量Ljを基本水量とし、その浄化用必要水量Ljに対し処理対象の外気OAを一定加湿状態まで加湿するのに必要な加湿用必要水量Lhを加えた水量(Lj+Lh)を給水量Liとする必要がある。
 したがって、給水量Liが十分である場合、この種の気液接触器16では外気OAの処理前の状態にかかわらず外気OAを概ね一定の飽和状態近傍湿度(例えば、相対湿度95%)まで安定的に加湿することができる。
On the other hand, in this type of gas-liquid contactor 16, the necessary amount of water for purification Lj required to obtain the required gas component removal efficiency η for the outside air OA with the predetermined ventilation amount Gi is used as the basic amount of water, and the required amount of water for purification Lj is obtained. On the other hand, the amount of water (Lj + Lh) obtained by adding the necessary amount Lh of humidification necessary for humidifying the outside air OA to be treated to a constant humidification state needs to be set as the water supply amount Li.
Therefore, when the water supply amount Li is sufficient, this type of gas-liquid contactor 16 stabilizes the outside air OA to a substantially constant humidity near the saturated state (for example, relative humidity 95%) regardless of the state before the treatment of the outside air OA. Can be humidified.
 このことは、一定給水量Liの下では、処理前の外気OAの状態変化などによって加湿用必要水量Lhが変化すると、給水量Liのうち外気OAの加湿に費やされる水量が変化後における実際の加湿用必要水量Lhと等しい水量に優先的に自己調整されてしまい、そのことで、給水量Liのうち加湿に費やされることなく外気OAの浄化に寄与する水量(即ち、浄化に寄与した上で気液接触器16から排出される排水量Lo)の方が変化して、その浄化用の水量(=Lo)が上記の浄化用必要水量Ljに対し不足になる状態(Lo<Lj)や過剰になる状態(Lo>Lj)を招くことを意味する。 This is because, under the constant water supply amount Li, when the required water amount Lh for humidification changes due to a change in the state of the outside air OA before processing, the actual amount of water spent for humidifying the outside air OA in the water supply amount Li is changed. The amount of water that is preferentially adjusted to the amount of water equal to the required amount of water for humidification Lh is preferentially adjusted. The amount of waste water Lo) discharged from the gas-liquid contactor 16 changes, and the amount of water for purification (= Lo) becomes insufficient with respect to the amount of water Lj for purification (Lo <Lj) or excessively. This means inviting a state (Lo> Lj).
 これらのことに対し、前記の給水制御器29は、それによる給水量調整として次の(イ),(ロ)の制御を実行する構成にしてある。 For these things, the water supply controller 29 is configured to execute the following controls (a) and (b) as a water supply amount adjustment.
 (イ)排水用流量計27による検出排水量Loに基づき給水流量調整弁26を調整することで、気液接触器16からの排出される使用済み清浄水W′(使用済み純水)の排水量Loを設定排水量SLoに調整する。 (A) By adjusting the feed water flow rate adjustment valve 26 based on the detected drainage amount Lo by the drainage flow meter 27, the drainage amount Lo of the used clean water W ′ (used pure water) discharged from the gas-liquid contactor 16 Is adjusted to the set drainage amount SLo.
 (ロ)風量計28による検出通風量Giに応じて設定排水量SLoを変更する。具体的には、設定排水量SLoは各時点の外気通風量Giに対する浄化用必要水量Ljを基準水量とし、その基準水量に対して必要に応じ余裕を見込んだ水量を設定排水量SLoとする。 (B) The set drainage amount SLo is changed according to the detected ventilation amount Gi by the air flow meter 28. Specifically, for the set drainage amount SLo, the required amount of water for purification Lj with respect to the outdoor air flow rate Gi at each time point is set as a reference water amount, and the amount of water with an allowance for the reference water amount is set as the set drainage amount SLo.
 ここで、各時点の外気通風量Giに対する浄化用必要水量Ljは、装置固有の定数(即ち、装置形状による接触係数や要求除去効率ηなどで異なる定数)であるL/G値をαとした場合にLj=α×Giで表すことができ、給水制御器29は、このような相関データ30に基づき各時点における設定排水量SLoを決定する。 Here, the required amount of water Lj for purification with respect to the outside air flow rate Gi at each time point is an L / G value that is a constant inherent to the apparatus (that is, a constant that varies depending on the contact coefficient or the required removal efficiency η depending on the apparatus shape). In this case, Lj = α × Gi, and the water supply controller 29 determines the set drainage amount SLo at each time point based on the correlation data 30.
 つまり、外気OAの状態変化や風量変化などで加湿用必要水量Lhや浄化用必要水量Ljが変化することにかかわらず、また、前述の如く給水量Liのうち加湿に費やされる水量が各時点における加湿用必要水量Lhと等しい水量に優先的に自己調整されることにかかわらず、上記(イ),(ロ)の給水量制御により、給水量Liのうち外気OAの浄化に寄与する水量(即ち、排水量Loに等しい水量)を各時点における浄化用必要水量Ljと等しい水量に調整維持する。これにより、気液接触器16に対する新鮮清浄水Wの給水量Liを極力節減しながら、外気OAに対する所要の浄化性能及び所要の加湿性能を安定的に得る。 That is, regardless of whether the required amount of water for humidification Lh or the required amount of water for purification Lj changes due to a change in the state of the outside air OA or a change in the air volume, the amount of water consumed for humidification in the water supply amount Li as described above Regardless of being preferentially self-adjusted to the amount of water equal to the required amount of water for humidification Lh, the amount of water that contributes to the purification of the outside air OA in the amount of water Li (ie, (b)) (i), (b) , The amount of water equal to the amount of drainage Lo) is adjusted and maintained to be equal to the amount of water Lj required for purification at each time point. Thereby, the required purification performance and the required humidification performance for the outside air OA are stably obtained while reducing the water supply amount Li of the fresh clean water W to the gas-liquid contactor 16 as much as possible.
 〔別実施形態〕
 次の本発明の別の実施形態を列記する。
 前述の実施形態では、排水量Loが設定排水量SLoになるように給水量Liを調整する給水量制御を一過給水式の空気浄化加湿装置に適用した例を示したが、同様の給水量制御を循環給水式の空気浄化加湿装置に適用してもよい。
[Another embodiment]
Next, another embodiment of the present invention will be listed.
In the above-described embodiment, the example of applying the water supply amount control for adjusting the water supply amount Li so that the drainage amount Lo becomes the set wastewater amount SLo is applied to the single-supercharging water purification humidifier, but the same water supply amount control is performed. The present invention may be applied to a circulating water supply type air purification humidifier.
 また、本発明による空気浄化加湿装置は、前述の実施形態で示したように外調機7に組み込み装備する使用形態に限らず、通常の空調機に組み込み装備する使用形態や、場合によっては冷却器や加熱器などとの組み合わせのない状態で単独使用する使用形態など、種々の使用形態を採ることができる。 In addition, the air purification humidifier according to the present invention is not limited to the usage mode incorporated in the external air conditioner 7 as shown in the above-described embodiment, but the usage mode incorporated in the normal air conditioner or cooling depending on the case. Various usage forms such as a usage form used alone without a combination with a heater or a heater can be adopted.
 処理対象空気OAの通風量Giに応じて設定排水量SLoを変更する場合、通風量検出手段としては、種々の風量計に限らず、例えば通風量Giの変更指令に基づいて通風量Giを認知する検出方式のものなど、種々の検出方式のものを採用することができる。 When the set drainage amount SLo is changed according to the ventilation amount Gi of the processing target air OA, the ventilation amount detection means is not limited to various anemometers, and recognizes the ventilation amount Gi based on, for example, a change instruction of the ventilation amount Gi. Various detection systems such as a detection system can be used.
 処理対象空気OAは外気に限られるものではなく、クリーンルームに循環供給する空気やリサイクル使用を目的とする各種設備からの排出空気など、浄化処理と加湿処理とを要する空気、あるいはまた、加湿を伴う浄化処理を要する空気であれば、どのような空気であってもよい。 The air OA to be treated is not limited to the outside air, but air that requires purification and humidification, such as air that is circulated and supplied to a clean room or exhausted from various facilities intended for recycling, or is accompanied by humidification Any air may be used as long as it requires purification treatment.
 本発明による空気浄化加湿装置は、空気の浄化処理と加湿処理とを要する各種分野、あるいはまた、加湿を伴う空気の浄化処理を要する各種分野において使用することができる。 The air purification humidifier according to the present invention can be used in various fields that require air purification treatment and humidification treatment, or in various fields that require air purification treatment with humidification.
 OA     処理対象空気
 W      清浄水
 16     気液接触室
 W′     使用済み清浄水
 Lo     排水量
 27     排水量検出手段
 Li     給水量
 SLo    設定排水量
 29     制御手段
 Gi     通風量
 28     風量検出手段
 23     清浄水供給手段
 19     流下メディア
 20     給水ヘッダ
 22a    傾斜波部
 22     波板状部材
OA Air to be treated W Clean water 16 Gas-liquid contact chamber W 'Used clean water Lo Drainage volume 27 Drainage volume detection means Li Water supply volume SLO Set drainage volume 29 Control means Gi Ventilation volume 28 Airflow volume detection means 23 Clean water supply means 19 Flowing media 20 Water supply Header 22a Inclined wave part 22

Claims (5)

  1.  室内に通風する処理対象空気を室内で清浄水と気液接触させる気液接触室を備え、
     この気液接触室での清浄水との気液接触により、処理対象空気中における水溶性のガス成分を除去して処理対象空気を浄化するとともに、処理対象空気を加湿する空気浄化加湿装置であって、
     前記気液接触室から排出される使用済み清浄水の排水量を検出する排水量検出手段を備えるとともに、
     前記気液接触室に対する清浄水の給水量を前記排水量検出手段の検出排水量に基づき調整して前記排水量を設定排水量に調整する制御手段を備える空気浄化加湿装置。
    Provided with a gas-liquid contact chamber for bringing the air to be treated that is ventilated indoors into contact with clean water in the room,
    This is an air purification humidifier that purifies the processing target air by removing water-soluble gas components in the processing target air by gas-liquid contact with clean water in the gas-liquid contact chamber, and humidifies the processing target air. And
    With a wastewater amount detecting means for detecting the amount of used clean water discharged from the gas-liquid contact chamber,
    An air purification humidifier comprising control means for adjusting a supply amount of clean water to the gas-liquid contact chamber based on a detected drainage amount of the drainage amount detection means to adjust the drainage amount to a set drainage amount.
  2.  前記気液接触室に対する処理対象空気の通風量を検出する風量検出手段を備え、
     前記制御手段は、この風量検出手段の検出通風量に基づいて前記設定排水量を変更する構成にしてある請求項1記載の空気浄化加湿装置。
    An air volume detecting means for detecting an air flow volume of the air to be processed with respect to the gas-liquid contact chamber;
    The air purification humidifier according to claim 1, wherein the control means is configured to change the set drainage amount based on the detected air flow rate of the air volume detection means.
  3.  前記気液接触室に供給する清浄水として、清浄水供給手段から供給される新鮮清浄水を一過的に前記気液接触室に供給する構成にしてある請求項1又は2記載の空気浄化加湿装置。 The air purification humidification according to claim 1 or 2, wherein fresh clean water supplied from clean water supply means is temporarily supplied to the gas-liquid contact chamber as the clean water supplied to the gas-liquid contact chamber. apparatus.
  4.  前記気液接触室に供給する清浄水として、前記気液接触室から排出される使用済み清浄水と清浄水供給手段から供給される新鮮清浄水との混合水を前記気液接触室に供給する構成にしてある請求項1又は2記載の空気浄化加湿装置。 As clean water to be supplied to the gas-liquid contact chamber, mixed water of used clean water discharged from the gas-liquid contact chamber and fresh clean water supplied from clean water supply means is supplied to the gas-liquid contact chamber. The air purification humidifier according to claim 1 or 2, wherein the air purification humidifier is configured.
  5.  前記気液接触室には、空気の通風経路に対して横断状態に配置した流下メディア、及び、この流下メディアに対して上方から清浄水を滴下する給水ヘッダを装備し、
     この流下メディアは、多数の傾斜波部を形成した縦姿勢の波板状部材を密に並設して構成し、隣り合う波板状部材ごとに前記傾斜波部の傾斜方向を反転させてある請求項1~4のいずれか1項に記載の空気浄化加湿装置。
    The gas-liquid contact chamber is equipped with a flowing-down medium arranged transversely to the air ventilation path, and a water supply header for dropping clean water from above on the flowing medium,
    This falling medium is formed by closely arranging corrugated members in a vertical posture in which a large number of inclined wave portions are formed, and the inclination direction of the inclined wave portions is reversed for each adjacent corrugated member. The air purification humidifier according to any one of claims 1 to 4.
PCT/JP2011/059849 2010-05-24 2011-04-21 Air purifier and humidifier WO2011148745A1 (en)

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