JP2002081691A - Apparatus and method for air cleaning and air conditioning - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus and a method for air cleaning and air conditioning for performing reductions in a humidifying energy and an air conditioning cost and improving removing performance of soluble gas impurities by removing the soluble gas impurities and humidifying in an atmospheric treating system, and a circulating air treating system in a CR and simultaneously controlling a humidifying amount in the atmospheric treating system to a minimum limit and mainly humidifying in the circulating air treating system in the CR. SOLUTION: The apparatus 10 for air cleaning and air conditioning of an annual cooling facility comprises an air washer capable of removing and humidifying the soluble gas in the atmosphere to be supplied into the room, an atmospheric treating air conditioner 31 for controlling a temperature, an air washer 13 capable of removing and humidifying soluble gas impurities in a circulating air circulating in the room, and a circulating air treating air conditioner 11 for controlling the temperature.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air purifying air-conditioning apparatus and an air purifying air-conditioning method, and more particularly to temperature adjustment, humidity adjustment and impurity removal for circulating air circulating in a room and outside air introduced into the room. The present invention relates to an air-purifying air-conditioning apparatus and an air-purifying air-conditioning method for purifying indoor air temperature, humidity, and purification while saving energy.

[0002]

2. Description of the Related Art Electronic device products such as semiconductors and liquid crystals maintain air temperature, humidity and room pressure constant, and control suspended particles in air to a limited cleanliness level (generally, US Federal Standard 209D). It is already known that it is manufactured in a clean environment, so-called clean room (hereinafter referred to as CR). In such an environment inside the CR, since a large amount of heat is generated from the electronic device manufacturing apparatus and equipment for keeping the air in the CR clean, the cooling load is applied even in winter.

Recently, strict control is required even in an environment with high cleanliness by reducing NH ₃ and SO ₂ gas (hereinafter referred to as “soluble gas impurities”) contained in air at a ppb level to a sub-ppb level. It has come to be.

[0004] The soluble gas impurity components in the CR are mixed with those brought into the CR by the outside air and those generated in the CR. In any case, the outside air treatment system (the inside of the CR while treating the outside air). One of the countermeasures is a reduction measure in the system introduced into the CR) and the circulating air processing system in the CR (system performing necessary processing while circulating the air in the CR).

Conventionally, in an outside air treatment system, humidification can be performed at the same time, and an air washer (water or the like is used as an absorbing liquid) which is inexpensive in running cost compared with a dry removal method (a chemical adsorption removal method using a chemical filter). A device that absorbs and removes soluble gas impurities in the air to be treated by liquid contact) is widely used.

[0006] On the other hand, in the circulating air treatment system in the CR, a chemical filter is mainly used for reasons such as difficulty in controlling the temperature and humidity and difficulty in securing an installation space, but an air washer is partially used. It has been proposed (JP-A-2000-332)
21, JP-A-2000-42338, etc.). Therefore, by combining these means, it is possible to purify the air to be treated by the air washer in the means optimal for removing soluble gas impurities, that is, in both the outside air treatment system and the CR circulating air treatment system. A high effect of reducing soluble gas impurities can be obtained.

[0007]

By the way, humidification during the humidification period from autumn to spring as in Japan has conventionally been performed in an outside air treatment system, and this outside air treatment system requires heating for humidification. Has become. That is, in the humidification period, heat energy for humidification is added in the outside air treatment system, humidification is performed to a predetermined dew point, and the humidification is supplied to the CR, which is an air-conditioned space.

This is because the temperature of the outside air during the humidification period is low, so that the processing air does not reach the predetermined dew point even if the air is simply brought into gas-liquid contact. In addition, as a result of heating the outside air, the enthalpy of the outside air which is processed and introduced into the CR increases,
There was a problem that the cooling capacity of the outside air in the CR circulating air treatment system was reduced. That is, the heating energy component is
At the same time, the originally existing cooling energy is lost, which results in consuming twice as much energy, which is a large waste of energy.

Furthermore, in an air purification air-conditioning system in which air washer processing is performed in an outside air processing system, an alkaline gas component is often contained as a soluble gas impurity component derived from amines (NH _X ) in a circulating air processing system in a CR. Tend to be. Therefore, when pure water is used as the absorption washing liquid of the air washer, the pH value is more alkaline than usual,
There is a problem that the performance of removing the alkaline gas component is reduced as compared with the outside air treatment system.

SUMMARY OF THE INVENTION An object of the present invention is to solve such a conventional problem. In the outside air treatment system and the CR circulating air treatment system, while removing and humidifying soluble gas impurities, the outside air treatment system is simultaneously operated. By controlling the humidification amount to a minimum and performing humidification mainly in the circulating air treatment system in the CR, humidification energy and air conditioning costs can be significantly reduced, and the removal performance of soluble gas impurities can be improved. An object of the present invention is to provide an air purification air conditioning apparatus and an air purification air conditioning method that are improved.

[0011]

SUMMARY OF THE INVENTION The present invention is an air purifying air conditioner, and has the following structure to solve the above technical problem. That is, the present invention provides an air purification air conditioner that is an annual cooling system, an external air processing air conditioner that includes an air washer capable of performing a removal process and a humidification process of a soluble gas impurity with respect to outside air supplied to a room and controls a temperature. And a circulating air processing air conditioner that is provided with an air washer capable of removing soluble gas impurities and humidifying the circulating air circulating in the room and controlling the temperature.

In the air purifying air-conditioning apparatus having such a configuration,
As a gas-liquid contacting means between water and the air to be treated, which is employed for humidifying the air to be treated in the humidifying and purifying section and for removing soluble gas impurity components contained in the air to be treated, a water spray means and a water absorbing or hydrophilic member are used. Eliminator can be used, and as this eliminator, a water-absorbing material having humidification performance and gas absorption performance can be used.

<Specific Configuration in the Present Invention> The air purification and air-conditioning apparatus of the present invention is composed of the essential components described above, but is established even when the components are specifically as follows. The specific component, the outside air processing air conditioner, as a preheat or reheat heat source of outside air in the humidification period,
It is characterized by utilizing the exhaust heat of the circulating air treatment air conditioner. This waste heat is mediated, for example, by a heat medium guided to an air conditioner.

As means for utilizing the exhaust heat in the clean room, mainly the production equipment and other air conditioning equipment, it is preferable to use water used for cooling and dehumidification in a circulating air treatment air conditioner. Further, in the air purifying air conditioner of the present invention, the room temperature is controlled by the processing air volume of the circulating air purifying air conditioner and the amount of chilled water for sending the indoor humidity to the circulating air purifying air conditioner. It is more preferable to provide a humidity control device provided in order to control the room temperature and the humidity independently by the room temperature control device and the humidity control device.

Further, in the air purifying air-conditioning apparatus of the present invention, the pH value of the water for removing soluble gas impurities in one or both of the air washer of the outside air processing air conditioner and the air washer of the circulating air processing air conditioner is adjusted to a predetermined range. It is also possible to further provide an ion component removing device for removing an excessively polar ion component to control the inside.

Further, the present invention relates to an air purification air conditioning method,
In order to solve the above-mentioned technical problem, the following configuration is provided. That is, the present invention provides an air conditioner having an air washer capable of removing and humidifying soluble gas impurities with respect to outside air supplied into a room and controlling the temperature, and a soluble gas impurity with respect to circulating air circulating in the room. Humidification by the outside air treatment air conditioner in the humidification period in the air purification air conditioner, which is an annual cooling system comprising an air washer capable of removing and humidifying treatment and a circulating air treatment air conditioner controlling the temperature The amount is kept to a minimum by performing low-temperature treatment within a range in which freezing of treated water can be prevented, and insufficient humidification during the humidification period is compensated for by humidification by an air washer of a circulating air treatment air conditioner.

In such an air purification air conditioning method of the present invention, it is preferable to use the exhaust heat of the circulating air processing air conditioner as a preheating or reheating heat source in the humidifying period in the outside air processing air conditioner. As means for utilizing the exhaust heat of the circulating air treatment air conditioner, it is preferable to use water used for cooling and dehumidifying the air in the clean room in the circulating air treatment air conditioner.

In addition, as a method of controlling the circulating air treatment air conditioner, the room temperature control is independently controlled by the amount of processing air in the circulating air treatment air conditioner and the humidity is independently controlled by the amount of cold water sent to the circulating air treatment air conditioner. Can be. Furthermore,
PH of the soluble gas impurity-removed water by removing excess polar ionic components in the soluble gas impurity-removed water in one or both of the air washer of the outside air processing air conditioner and the air washer of the circulating air processing air conditioner
It is also preferable to control the value within a predetermined range.

[0019]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of an air purifying air-conditioning apparatus and an air purifying air-conditioning method according to the present invention. (First Embodiment) FIG. 1 is a configuration explanatory view showing an air purification air-conditioning apparatus 10 according to a first embodiment of the present invention. The air purifying air-conditioning apparatus 10 includes a circulating air processing air conditioner 11 and an outside air processing air conditioner 31.
Is installed in a circulating air flow, that is, an air circulation system, and the latter outside air treatment air conditioner 31 introduces outside air into the air circulation system while performing necessary processing.

Here, the inside of the air circulation system includes, for example, a clean room (CR) building 50 having a three-layer structure and used for introducing a predetermined amount of fresh outside air used in a semiconductor manufacturing plant or the like. FIG. 1 shows the air purification air conditioner 1 described above.
0 is disposed in the air circulation system of a three-layer clean room (CR) building 50 to purify and air-condition the circulating air, and at the same time, the outside air treatment air conditioner 31 installed outside the air circulation system. 2 shows a specific arrangement structure when introducing outside air into the air circulation system.

Inside the CR building 50, a ceiling chamber 51, CR
52, a return plenum 53 that is below the floor of the CR, and a return shaft 54, and the circulating air processing air conditioner 11 that constitutes the air purification air-conditioning apparatus 10 described above is installed in the return plenum 53 (in this example, a space below the floor). Have been.

As shown in the enlarged view of FIG. 2, the main components of the circulating air processing air conditioner 11 are a chamber 12 for taking in and passing air to be processed, and humidifying air to be processed passing through the chamber 12. At the same time, a humidifying / purifying unit or air washer 13 for primary removal of soluble gas components, and a water circulating system 14 for spraying water into the chamber 12 for bringing the air to be treated into gas-liquid contact with the water in the air washer 13 And a cooling / dehumidifying / purifying unit 15 for cooling the air treated by the air washer 13 and for partially dehumidifying the moisture humidified by the air washer 13 and secondary removing the soluble gas component.

An air washer 13, which is a component of the circulating air treatment air conditioner 11, is a gas-liquid contact means between the air to be treated passing through the chamber 12 and water. As the gas-liquid contact method,
The means is not particularly limited, but in this embodiment, the water spray by the water spray means is combined with an eliminator made of a water-absorbing or hydrophilic material.

That is, the air washer 13 is provided with water spraying means 13a having a number of spray nozzles installed in the chamber 12, and provided downstream of the water spraying means 13a and formed of a water-absorbing or hydrophilic material. Eliminator 13b. As a result, a gas-liquid contact surface is formed on the sprayed water droplet surface and the surface of the eliminator 13b, and humidification of the air to be treated and primary removal of the soluble gas component contained in the air to be treated are performed. Examples of the material of the eliminator include a nonwoven fabric to which silica is attached and a three-dimensional network structure.

The water circulating system 14 is a means for continuously supplying water to a water spraying means 13a installed in the chamber 12, and is sprayed by the water spraying means 13a to form a gas-liquid mixture with the air to be treated. An absorption water storage tank 14a is provided in the chamber 12 to store the absorption liquid that has absorbed the soluble gas impurity component by contact. One end of a pipe 14b is connected to the absorbed water storage tank 14a to supply the collected absorbent to the water spraying means 13a again, and the other end of the pipe is connected to the water spraying means 13a, thereby circulating water. A system 14 is configured.

The piping 14b constituting the water circulation system 14 includes:
As shown in FIGS. 1 and 2, a circulation pump 14c is provided, and a pipe 14d communicating with the pure water plant 16 is connected downstream of the circulation pump 14c.
A part of the humidified and gas-absorbed water circulating in the inside 4 is returned to the pure water plant 16. The humidified and gas-absorbed water returned to the pure water plant 16 is regenerated in the pure water plant 16 and is again supplied to the absorbed water storage tank 14a of the water circulation system 14 via the supply pipe 14e.

A cooling / dehumidifying / purifying unit 15 is provided in the chamber 12 on the downstream side of the absorption water storage tank 14a, and the cooling / dehumidifying / purifying unit 15 is specifically constituted by a cooling / dehumidifying coil. The cooling / dehumidifying / purifying section 15 includes a cold water circulation system 17 (a cold water return pipe 17a and a cold water return pipe 17b).
) Circulates cold water, thereby dehumidifying the primary processing air passing through the cooling / dehumidifying / purifying unit 15.

At this time, dew condensation due to dehumidification is formed on the surface of the cooling and dehumidifying and purifying unit 15, for example, the cooling and dehumidifying coil, and soluble gas impurities remaining in the primary processing air due to gas-liquid contact between the dew and the passing air. The components are absorbed and removed (secondary removal). In the cooling / dehumidifying / purifying unit 15, the heat medium flowing through the cooling coil is not subjected to the conventional flow rate control for preventing dew condensation, but the flow rate control for dehumidification is performed so that the indoor humidity becomes a predetermined value. ing.

The upper, lower, and both sides of the chamber 12 on the downstream side of the cooling / dehumidifying / purifying section 15 are closed, while the flow path of the air to be processed is opened on the upstream side.
A blower 18 is installed in the downstream space 2.
The blower 18 blows the processing air that has flowed downstream in the chamber 12 to the outside of the chamber. As a result, when the blower 18 is operated, the air to be processed is introduced into the inside from one end opening of the chamber 12, and is sequentially processed through the air washer 13 and the cooling / dehumidifying / purifying unit 15. The air is sent from the downstream space to the outside, that is, to the return plenum 53 by the blower 18.

In this air purification air-conditioning apparatus 10, the cooling capacity is controlled by changing the amount of processing air. That is, based on the temperature of the air to be processed detected by the temperature sensor 19 installed in the CR 52 as shown in FIG. 1, a temperature control device and a humidity control device are integrally assembled or configured. The control device 20 controls the blowing amount of the blower 18. In this case, when the temperature of the air to be processed is higher than the set value, the air blowing amount is increased to increase the cooling capacity. On the other hand, when the temperature of the air to be processed is lower than the set value, the air blowing amount by the blower 18 is reduced. The cooling capacity is reduced by reducing (mainly air circulation by a fan filter unit described later).

In this air purification and air-conditioning apparatus 10, C
The amount of chilled water circulated by the chilled water circulation system 17 to the cooling / dehumidifying coil constituting the cooling / dehumidifying / purifying unit 15 is controlled via the temperature / humidity controller 20 so that the humidity of the humidity sensor 21 installed in the R52 is always constant. Thus, the cooling and dehumidifying temperature in the cooling and dehumidifying and purifying section 15 is controlled.

A distributed air supply header 23 is attached to an air outlet of the blower 18 via an air supply pipe 22, and the distributed air supply header 24 is arranged near a portion communicating with a return plenum 53 to a return shaft 54. The distributed air supply header 23 is formed by forming a large number of air holes on the peripheral surface of a hollow cylindrical body whose both ends are closed, and extends in the depth direction of the return plenum 53. The processing air blown from the blower 18 to the distributed air supply header 23 via the air supply pipe 22 is distributed and sent into the return plenum 53 from a number of air holes.

The air in the CR building 50 is
→ CR52 → return plenum 53 → and return shaft 54 → circulate in the flow returning to the ceiling chamber 51, dust is removed by the fan filter unit 55 installed in the ceiling chamber 51, and the CR52 downstream therefrom
Are maintained in the cleanest atmosphere.

The air in the CR 52 is introduced into the circulating air treatment air conditioner 11 installed in the return plenum 53, where the heat generated in the CR 52 is cooled, humidified during the humidification period, and brought in from the outside air. Alternatively, the soluble gas impurity component generated in the CR 52 is removed. C
In R52, since there is exhaust air from the manufacturing apparatus and the like, fresh outside air is always introduced through the outside air processing air conditioner 31 to replenish it.

In the air purifying air-conditioning apparatus 10 of the present invention, humidification is mainly performed by the circulating air processing air-conditioner 11 installed in the return plenum 53 of the CR building 50. Humidification is minimal. That is, in Japan, during the humidification period from autumn to spring, the amount of humidification in the outside air treatment air conditioner 31 is suppressed to the minimum by low-temperature treatment within a range where the treated water does not freeze, and the humidification amount in the humidification period is insufficient. Is performed by the above-described circulating air processing air conditioner 11 to make up for it.

In the outside air processing air conditioner 31, a pre-filter 32, a pre-heating coil 33, a medium-performance filter 34, a cooling coil 35, an air washer 36, The reheating coil 37, the blower 38, and the HEPA filter 39 are sequentially arranged toward the downstream side (the traveling direction of air).

The air washer 36 in the outside air processing air conditioner 31 has substantially the same configuration as the air washer 13 in the circulating air processing air conditioner 11 described above.
The water in the absorption water storage tank 40a is continuously supplied to the water spraying means by the circulation pump 40b constituting 0, and gas-liquid contact with the outside air is performed.

The outside air processing air conditioner 31 is installed outside the CR building 50 as shown in FIG. 1, and an introduction pipe 41 connected to the other end of the outside air processing air conditioner 31 is connected to the return plenum of the CR building 50. It is installed in the upstream space in 53, that is, on the upstream side of the circulating air processing air conditioner 11. As a result, as described above, the fresh outside air exhausted by the various manufacturing devices in the CR 52 is supplied to the outside air processing air conditioner 31.
Is introduced into the CR building 50 through the refrigeration system and supplied.

Next, the operation of the air purification air-conditioning apparatus 10 will be described. A part of the air in the CR building 50 is introduced into the circulating air processing air conditioner 11 of the air purification air-conditioning apparatus 10 while passing through the above-described circulation path, where the exhaust heat generated in the CR building 50 is processed. The temperature is controlled to a predetermined room temperature. Specifically, first, the air to be processed in the CR building 50 is introduced into the chamber 12 of the circulating air processing air conditioner 11 installed in the return plenum 53, and the air washer 1
3 and then brought into gas-liquid contact with pure water.

That is, in the chamber 12, pure water is continuously sprayed from the water spraying means 13a.
Enthalpy changes such as water humidification from the temperature and humidity of the introduced air, and a relative humidity of 75 to
Humidified to 85%. At the same time, in the air washer 13, due to gas-liquid contact between the air to be treated and pure water, a part of the soluble gas impurity component present in the air to be treated is dissolved in the pure water, and absorbed and removed (primary removal). Is done.

The sprayed pure water reaches the eliminator 13b provided on the downstream side and wets the elimination surface (surface blocking the airflow), where humidification and soluble gas impurities are absorbed and removed. The heat required for humidification (heat of vaporization) utilizes the heat of the introduced air. The pure water that has absorbed the soluble gas impurities in this way is stored in the absorbed water storage tank 14a and sprayed again from the water spraying unit 13a via the water circulation system 14. That is, in the pure water circulation system 14, pure water is continuously circulated by the circulation pump 14c.

While repeating this circulation, the concentration of soluble gas impurities in the pure water of the water circulation system 14 increases with time, and at the same time, the quality of the water tends to be acidic or alkaline. If the concentration of the soluble gas in the pure water is higher than a predetermined concentration, the gas absorption efficiency of the pure water deteriorates. Therefore, a predetermined amount of the pure water in the water circulation system 14 is returned to the pure water plant 16 from a drain pipe 14d. It is. The amount of water returned to the pure water plant 16 and the amount of humidified water continue to be replenished as new make-up water from the pure water plant 16 through the supply pipe 14e. Thereby, the concentration of the soluble gas impurity in the pure water is controlled to be substantially equal to or lower than a predetermined value.

Air humidified by the air washer 13 and primary air from which soluble gas impurity components have been removed (primary treated air)
Is then introduced into the cooling / dehumidifying / purifying unit 15, where it is dehumidified and the secondary removal of the soluble gas impurity components remaining without being removed by the air washer 13 described above is performed. The processing air cooled and dehumidified by the cooling and dehumidifying and purifying unit 15 is:
The air is blown to the distributed air supply header 23 by the blower 18,
Distributed air is supplied to the return plenum 53 near the return shaft 54 in the R ridge 50.

On the other hand, in the outside air processing air conditioner 31, dust is removed by a filter, soluble gas impurities are removed by an air washer 36, and the outside air whose temperature is controlled to a predetermined supply temperature is returned to the CR building 50. Plenum 5
Feed to 2. At this time, the air washer 3 during the humidification period
The humidification of the outside air at 6 is performed so that the pre-heating coil 33 has a minimum humidification amount within a range in which freezing due to a decrease in the processing temperature can be prevented.
To control the temperature of the air upstream from the air washer 36.

After the humidification, the temperature of the air drops, so that the inside of the CR 52 for supplying outside air is reheated by the reheating coil 37 so as not to become lower than the dew point temperature. Regarding the control of temperature and humidity by the circulating air processing air conditioner 11 in the circulating air processing system in the CR, the temperature is controlled by controlling the amount of processing air, and the humidity is controlled by controlling the amount of chilled water. Thus, higher control performance can be obtained.

Here, a method of controlling the temperature and humidity in the CR 52 will be described in more detail. The temperature in CR52 is CR
The temperature and humidity are monitored by the temperature sensor 19 installed in the inside 52, and the amount of air blown by the circulating air processing air conditioner 11 is feedback-controlled by the temperature and humidity control device 20 with respect to the set temperature. For example, when the temperature inside the CR 52 becomes higher than the set temperature, the air volume of the blower 18 is increased.

Since the blow-out temperature of the processing air is always lower than the set temperature (for example, when the set temperature and humidity are 23 ° C. and 45%, the blow-out temperature is 12 to 15 ° C.), when the air volume increases,
Cooling capacity increases and room temperature decreases. When the temperature inside the CR 52 is the set temperature, the air volume is maintained as it is. Conversely, when the temperature in the CR 52 becomes lower than the set temperature, the amount of air blown by the blower 18 is reduced (that is, air is mainly circulated by the blower attached to the fan filter unit 55 to circulate air). Let me
Reduce cooling capacity and raise room temperature.

Next, the flow of the air conditioning process for the outside air and the CR circulating air during the humidification period will be described with reference to the psychrometric chart shown in FIG. In the psychrometric chart of FIG. 3, each state point from point a to point k is shown, point a is a set condition in the CR 52, point b is the state of air in the space upstream of the return plenum 53, and point c is outside air mixing. Point d is the state of air after humidification and cleaning, point e is the state of air after cooling and dehumidification, point f is the state of air processed by the circulating air processing air conditioner 11, and point g is circulation. The state after mixing the air processed by the air processing air conditioner 11 and the circulating air, the point h is the state of the outside air, the point i is the state of the air after preheating upstream of the air washer in the outside air processing air conditioner, j
The point indicates the state of air after minimum humidification after the air washer in the outside air processing air conditioner, and the point k indicates the state of air after reheating at the outlet of the outside air processing air conditioner.

The low-temperature and low-humidity outside air (state point h) is preheated to the state point i by the preheating coil 33 and then the air washer 36.
Is humidified to the state point j. The preheating temperature at state point i (9 ° C. in this case) is the temperature at which the temperature at state point j does not freeze (0
(In this case, 2 ° C. or higher). The actual preheating temperature is determined individually according to the weather conditions in the installation area. The humidified air (state point j) is reheated by the reheating coil 37 to the state point k. The reheat temperature at the state point k is determined by the set dew point temperature in the CR 52 (for example, 23
° C, 45%, 10.5 ° C) or more. In this case, the temperature is set to 12 ° C. with a margin. The state point k is the condition of the supply air into the CR 52 of the outside air processing air conditioner 31.

In the CR circulating air treatment system, the state point a is the set temperature / humidity, which is the condition of the temperature / humidity sensor installation point in the CR 52. The air in the CR 52 rises to the state point b due to the heat load of the indoor manufacturing apparatus or the like, and is sent to the return plenum 53. In the return plenum 53, it is mixed with the processing outside air (state point k) to become a state point c. Part of the circulating air after mixing (state point c) is the circulating air processing air conditioner 1
1 and first humidified by the air washer 13 to reach the state point d.

Next, it is cooled and dehumidified by the cooling and dehumidifying and purifying section 15 to reach the state point e. The state point e is determined by the amount of humidification of the circulating air in the CR. If the amount of humidification is large, the amount of cold water is increased to reduce the amount of dehumidification. Conversely, when the humidification amount is small, the cooling water amount is reduced and the dehumidification amount is increased. The air temperature after dehumidification rises slightly due to the heat generated by the blower, the blowing friction, etc., and reaches the state point f.

When the processing air (state point f) of the circulating air processing air conditioner 11 and the circulating air (state point c) are mixed, a state point g is reached. The temperature rise from the state point g to the state point a is caused by heat generation of the fan filter unit 55 and the lighting fixture mounted on the ceiling in addition to the production apparatus in the CR building 50.

The outside air and CR in such a humidifier
As is clear from the air-conditioning processing flow of the internal circulation air, in the air purification air-conditioning apparatus 10 of the first embodiment, the humidification amount of the outside air processing air-conditioner in the humidification period is set within a range in which the freezing of the treated water can be prevented. By performing low-temperature treatment to minimize the amount of humidification, and supplementing the insufficient humidification during the humidification period with humidification by the air washer of the circulating air processing air conditioner, while performing optimal temperature and humidity adjustment and purification in the CR, It is possible to achieve a significant reduction in the heating energy required in the conventional outside air treatment system.

(Second Embodiment) FIG. 4 is an explanatory diagram of a configuration in a case where an air purification / air-conditioning apparatus 110 according to a second embodiment is installed in a CR building 50. The circulating air treatment air conditioner and the outside air treatment air conditioner constituting the air purification air conditioner 110 according to the second embodiment have substantially the same structure as that of the first embodiment, so that the same reference numerals are given and the detailed description thereof will be given. Description is omitted.

An air purification air conditioner 11 according to the second embodiment
0 is different from the air purification air-conditioning apparatus 10 of the first embodiment in that the cooling water return (water temperature 12 to 17 ° C.) of the chilled water circulation system in the circulating air processing air conditioner 11 It is used as a heat source for preheating and reheating outside air, or as precooling of outside air in a dehumidifying period.

As a specific configuration, a chiller 111 is installed, and a chilled water outlet of the chilled water 111 constitutes a chilled water circulation system 17 to the cooling / dehumidifying / purifying unit 15 of the circulating air processing air conditioner 11. 17a, connected to the cold water return pipe 17
b is connected to the cold water inlet of the refrigerator 111. The cold water return pipe 17b branches, and the branch pipe 112 is connected to the preheating coil 33 and the reheating coil 37 of the outside air processing air conditioner 31, and the cold water discharged from the cooling / dehumidifying / purifying unit 15 is supplied to the preheating coil 33 and the reheating coil. 37.

One end of a pipe 113 is connected to each of the cold water outlets of the preheating coil 33 and the reheating coil 37, and the other ends of these pipes are joined and directly connected to the cold water inlet of the refrigerator 111, or Cold water return pipe 17b (branch pipe 11
(A pipe section downstream of the second branch point). In addition, a valve can be provided at an appropriate position in the cold water circulation system 17 from the refrigerator 11 to the cooling / dehumidifying / purifying unit 15 and the outside air processing air conditioner 31.

With this configuration, it is possible to reduce the heating energy by using the exhaust heat of the CR 52 as a heating source in the humidifying period, and to pre-cool the air higher than the return cold water temperature in the dehumidifying period. By using the outside air, the temperature difference of the chilled water can be increased, and the power for water supply can be reduced. In addition, outside air treatment and C
The processing flow of the circulating air in the R ridge 50 is the same as that in the first embodiment, and a description thereof will be omitted.

(Third Embodiment) FIG. 5 is an explanatory diagram of a configuration in a case where an air purification air conditioner 210 according to a third embodiment is installed in a CR building 50. The circulating air treatment air conditioner and the outside air treatment air conditioner that constitute the air purification air conditioning device 210 according to the third embodiment have substantially the same structure as that of the first embodiment, and therefore are given the same reference numerals and detailed description thereof will be given. Description is omitted.

The air purification air conditioner 21 according to the third embodiment
The difference between the air purification air-conditioning apparatus 10 of the first embodiment and the air purification air-conditioning apparatus 10 of the first embodiment is that the pH value of the circulating water passing through the air washers 13 and 36 in the circulating air processing air conditioner 11 and the outside air processing air conditioner 31 falls within a predetermined range. That is, the pH control device 211 for controlling the air conditioning is incorporated into the air purification air conditioning device 210.

As a specific configuration, in the circulating air treatment air conditioner 11, a pH control device 21 is provided in parallel with a circulating pump 14c provided in a pipe 14b constituting a water circulating system 14.
1 is installed, and in the outside air treatment air conditioner 31, a pH control device 211 is installed in parallel with a circulation pump 40b that circulates water to the air washer 36 via an absorption water storage tank 14a constituting a water circulation system 40. I have.

In the meantime, the present inventors have added that, when the pH value of the circulating water passing through the air washer deviates from a predetermined range, the ionic component having the missing polarity is added as a pH adjuster to control the ionic component. , A technology that was developed. However, as the pH control device 211 used in the air purification air conditioner 210 of the present invention, a means completely opposite to the method of adding and controlling the ionic component of the insufficient polarity as a pH adjusting agent, that is, the excess one is used. By controlling the pH value within a predetermined range by separating and eliminating polar ions, the pH level is controlled and the circulating water contamination level is improved.

As a result, it is possible to control the performance of removing soluble gas impurities and to reduce the amount of water used (the amount of makeup water). Generally, the outside air contains a large amount of acid-based gas components, and therefore, the outside air treatment air conditioner 3 which is an outside air treatment system.
In 1, the pH value of the circulating water in the air washer 36 is biased toward the acidic side. Therefore, in such a case, the negative ion component (anion) contained in the circulating water is converted into the pH control device 211.
To control the pH value of the circulating water so as not to be largely biased toward the acidic side.

On the other hand, the air circulating in the CR building 50 tends to contain a large amount of an alkaline gas component such as ammonia gas. Therefore, the air washer 13 in the circulating air processing air conditioner 11 which is a circulating air processing system in the CR. In many cases, the pH value of the circulating water is biased toward the alkaline side. Therefore, the pH value of the circulating water is controlled so as not to be biased toward the alkaline side by separating and removing the positive ion component (cation) contained in the circulating water used for the air washer 13 by the pH control device 211.

The air purifying air-conditioning apparatus of the present invention is not limited by the type and form of each of the air washers 13 and 36 provided in the circulating air processing air conditioner 11 and the outside air processing air conditioner 31. This is because the presence or absence of the spray, the presence or absence of the filler for increasing the wetted surface, or the presence or absence of the water absorbing eliminator does not affect the effect of the present invention.

The positions of the blowers provided in the circulating air treatment air conditioner 11 and the outside air treatment air conditioner 31 do not affect the effects of the present invention, and the present invention is not limited by this. Such a blower is provided between the air washer 13 and the cooling / dehumidifying / purifying unit 15 or the most upstream portion in the circulating air processing air conditioner 11, and between the air washer 36 and the reheating coil 37 in the outside air processing air conditioner 31 or the most upstream portion. It may be installed in the department.

The method of controlling the air volume in the circulating air treatment air conditioner 11 is not limited to a method such as control of the number of revolutions by an inverter or control by an electric damper. Further, the control of the amount of cold water may be performed using either a two-way valve or a three-way valve, and the mounting position may be either on the outgoing side or on the return side of the cold water. The position of the temperature and humidity sensor is set in the CR 52 in the first embodiment described above,
Even if it is installed in any of the return plenum 53, the return shaft 54, and the ceiling chamber 51, the performance is not changed.

Further, the installation position of the circulating air treatment air conditioner 11 is determined by the return plenum 53 or the return shaft 54.
Either may be used. Further, the supply location of the outside air processed by the outside air processing air conditioner 31 to the CR building 50 is located upstream of the circulating air processing air conditioner 11 in the return plenum 53 in the first embodiment. It may be on the downstream side of the processing air conditioner 11, in the return shaft 54, or in the ceiling chamber 51.

In the air purifying air conditioner of the present invention, as shown in FIG. 1, a temperature sensor 42 is provided on the downstream side of the preheating coil 33 in the outside air processing air conditioner 31, and the preheating coil 33 is used by using the temperature sensor 42. It is also preferable to control the amount of heating so that the outside air passing through, for example, is always 9 ° C. Alternatively, instead of such means, it is also preferable to arrange a temperature sensor 42 in the absorption water storage tank 40a and control the heating amount of the preheating coil 33 so that the water temperature does not fall below, for example, 5 ° C.

In addition, a temperature sensor 42 is provided in an inlet pipe 41 for introducing the outside air dehumidified and purified by the outside air processing air conditioner 31 into the CR building 50, for example, at 12 ° C. (when the room temperature is 23 ° C. and the humidity is 45%, However, it is also preferable to control the temperature and humidity of the outside air blown out from the introduction pipe 41 so that the temperature varies depending on the design conditions of the clean room. Such an introduction pipe 4
The temperature / humidity control of the outside air blown out from 1 can prevent the occurrence of dew condensation at the discharge portion of the introduction pipe 41 protruding into the CR building 50.

[0071]

As described above, according to the air-purifying air-conditioning apparatus and the air-purifying air-conditioning method of the present invention, the air capable of removing soluble gas and humidifying air can be supplied to the outside air processing air-conditioner for introducing outside air into the room. A washer is also provided, and a similar air washer is also provided in the circulating air processing air conditioner that processes air circulating in the room, and the humidification period of the humidification period is suppressed to the minimum humidification amount that does not freeze with the outside air treatment system air washer, By mainly humidifying the air washer of the circulating air processing air conditioner, which can easily utilize the exhaust heat, it is possible to achieve a significant reduction in the heating energy conventionally required in the outside air processing system.

Further, according to the air purifying air-conditioning apparatus and the air purifying air-conditioning method of the present invention, at the same time as the above-mentioned drastic reduction of the heating energy, the cooling capacity of the supplied external air is increased by the reduction of the external air heating. Therefore, the cooling energy used in the circulating air processing air conditioner can also be saved.

Further, the concentration of the soluble gas component in the CR is also removed by the outside air treatment system and the circulating air treatment system in the CR, so that the maximum effect of reducing the soluble gas component can be obtained. In addition, since the return chilled water used in the circulating air processing air conditioner is used as the heating source at the time of minimum humidification in the outside air processing air conditioner, the exhaust heat in the CR can be used as a result. Further reductions in energy can be achieved.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a configuration in which an air purification air-conditioning apparatus according to a first embodiment of the present invention is installed in a three-layer clean room building into which a predetermined amount of fresh outside air is introduced.

FIG. 2 is a partial configuration explanatory view showing a circulating air processing air conditioner, which is a component of the air purification air conditioning device shown in FIG. 1, in an enlarged manner.

3 is an air line diagram showing an air conditioning process flow of outside air and CR circulating air in the humidification period by the air purification air conditioning apparatus shown in FIG.

FIG. 4 is a configuration explanatory view showing a state in which an air purification air-conditioning apparatus according to a second embodiment of the present invention is installed in a clean room building.

FIG. 5 is a configuration explanatory view showing a state in which an air purification air conditioner according to a third embodiment of the present invention is installed in a clean room building.

[Explanation of symbols]

 Reference Signs List 10 air purification air conditioner 11 circulating air treatment air conditioner 12 chamber 13 air washer (humidifying purification unit) 13a water spraying unit 13b eliminator 14 water circulation system 14a absorption water storage tank 14b piping 14c circulation pump 14d piping 14e piping 15 cooling dehumidifying purification unit 16 Pure water plant 17a Cold water circulating system outgoing pipe 17b Cold water circulating system return pipe 18 Blower 19 Temperature sensor 20 Temperature / humidity air flow controller 21 Humidity sensor 22 Air supply pipe 23 Distributed air supply header 31 Outside air processing air conditioner 32 Prefilter 33 Preheating coil 34 Medium Performance Filter 35 Cooling Coil 36 Air Washer 37 Reheat Coil 38 Blower 39 HEPA 40 Water Circulation System 40a Absorbed Water Storage Tank 40b Circulation Pump 41 Inlet Pipe 42 Temperature Sensor 50 Clean Room (CR) Building 51 Ceiling Chamber 52 clean room (CR) 53 Return plenum 54 return shaft 55 fan filter unit 110 air cleaning air conditioner (Second Embodiment) 111 refrigerator 112 branch pipe 113 pipe 210 the air purification air conditioner (Third Embodiment) 211 pH controller

Claims (10)

[Claims] 1. An air purification air conditioner as an annual cooling system, comprising an air washer capable of removing soluble gas impurities and humidifying the outside air supplied to the room, and controlling the temperature of the outside air, An air purification air-conditioning apparatus comprising: an air washer capable of removing soluble gas impurities and humidifying processing of circulating air circulating in the room; and a circulating air processing air conditioner for controlling temperature. 2. The air purification air conditioning system according to claim 1, wherein the outside air processing air conditioner uses exhaust heat of the circulating air processing air conditioner as a heat source for preheating or reheating outside air in a humidifying period. apparatus. 3. The air purification air-conditioning system according to claim 2, wherein water used for cooling and dehumidification in said circulating air processing air conditioner is used as means for utilizing exhaust heat of said circulating air processing air conditioner. apparatus. 4. A room temperature control device provided to control the room temperature by the processing air volume of the circulating air processing air conditioner, and a humidity control device provided to control room humidity by an amount of cold water sent to the circulating air processing air conditioner. The air purification air-conditioning apparatus according to any one of claims 1 to 3, further comprising a device, and controlling the room temperature and the humidity independently by the room temperature control device and the humidity control device. 5. A method for controlling the pH value of the water for removing soluble gas impurities in one or both of the air washer of the outside air treatment air conditioner and the air washer of the circulation air treatment air conditioner within a predetermined range. The air purification air conditioner according to any one of claims 1 to 4, further comprising an ion component removing device that removes an ion component having an excessive polarity. 6. An outside air treatment air conditioner which comprises an air washer capable of removing and humidifying soluble gas impurities with respect to outside air supplied into a room and controls temperature, and a soluble gas impurity with respect to circulating air circulating in the room. An air purification air conditioner, which is an annual cooling system comprising an air washer capable of removing and humidifying the air and controlling the temperature, and a circulating air processing air conditioner, The amount of humidification is suppressed to a minimum by performing low-temperature treatment within a range where freezing of the treated water can be prevented, and the insufficient humidification during the humidification period is supplemented by humidification by the air washer of the circulating air treatment air conditioner. Air purification air conditioning method. 7. The air purification air-conditioning method according to claim 6, wherein the exhaust heat of the circulating air processing air conditioner is used as a preheat or reheat heat source in the humidifying period of the external air processing air conditioner. 8. The air purification and air conditioning system according to claim 7, wherein water used for cooling and dehumidification in said circulating air processing air conditioner is used as means for utilizing exhaust heat of said circulating air processing air conditioner. Method. 9. The method for controlling the circulating air processing air conditioner includes controlling room temperature independently by the amount of processing air in the circulating air processing air conditioner and controlling humidity by the amount of cold water sent to the circulating air processing air conditioner. The air purification air conditioning method according to any one of claims 6 to 8, wherein: 10. The method for removing an excessively polar ion component in the soluble gas impurity removal treatment water in one or both of the air washer of the outside air treatment air conditioner and the air washer of the circulation air treatment air conditioner. The air purification air conditioning method according to any one of claims 6 to 9, wherein the pH value of the water for removing soluble gas impurities is controlled within a predetermined range.