JPH0544959A - Air purifying conditioning device - Google Patents
Air purifying conditioning deviceInfo
- Publication number
- JPH0544959A JPH0544959A JP22357291A JP22357291A JPH0544959A JP H0544959 A JPH0544959 A JP H0544959A JP 22357291 A JP22357291 A JP 22357291A JP 22357291 A JP22357291 A JP 22357291A JP H0544959 A JPH0544959 A JP H0544959A
- Authority
- JP
- Japan
- Prior art keywords
- air
- pure water
- ionizer
- temperature
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Central Air Conditioning (AREA)
- Electrostatic Separation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は，クリーンルーム等のよ
うに清浄空気を必要とする設備に有利に適用できる空気
浄化調和装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air purifying and conditioning device that can be advantageously applied to equipment that requires clean air such as a clean room.
【０００２】[0002]
【従来の技術】空気の温度と湿度を調節する空気調和に
空気の清浄機能を具備させるためには一般にフイルタが
用いられる。高性能フイルタ（HEPAフイルタやULPAフイ
ルタ)を用いれば空気中の同伴する粒子を意図する清浄
度まで捕集することができる。しかし，ガス成分やガス
成分に近い微小粒子の捕集まではフイルタでは捕集でき
ない。2. Description of the Related Art A filter is generally used to provide an air conditioner for controlling the temperature and humidity of air with a function of cleaning air. A high-performance filter (HEPA filter or ULPA filter) can be used to collect entrained particles in the air up to the intended cleanliness. However, the filter cannot collect gas components or even minute particles close to the gas components.
【０００３】かようなフイルタの捕集機能では除去でき
ないガス成分や微小粒子 (本明細書ではこれを総合して
「不純物ガス」と呼ぶことにする)を除去するには, 吸
着剤(例えば活性炭) に吸着させる方式と，スクラバー
方式が良く知られている。In order to remove gas components and fine particles (which are collectively referred to as “impurity gas” in this specification) that cannot be removed by such a filter collection function, an adsorbent (for example, activated carbon) is used. ) And the scrubber method are well known.
【０００４】[0004]
【発明が解決しようとする課題】吸着剤を用いる方式は
空気調和器内に設置可能であり，取り付けも簡単で設備
構成も単純であるという利点があるが，処理時間の経過
と共に吸着剤の能力が低下するので，必要な吸着能力を
維持させるためには，定期的な吸着剤の交換や再生を必
要とする。特に, 最近の高度クリーンルームのように不
純物ガスまでもほぼ完全に除去した超清浄域を必要とす
る場合に，吸着能力の経時的な低下が起きることは問題
がある。また，この方式では空気調和器に組み込んださ
いに圧力損失が大きくなり，送風機動力を多く必要とす
るという問題を伴う。The method using an adsorbent has the advantage that it can be installed in an air conditioner, is easy to install, and has a simple equipment configuration. Therefore, in order to maintain the required adsorption capacity, it is necessary to replace or regenerate the adsorbent on a regular basis. In particular, when the ultra-clean area where almost all impurities are removed is required as in the recent advanced clean room, the adsorption capacity decreases over time, which is a problem. In addition, this method has a problem that the pressure loss becomes large when it is installed in the air conditioner, and a large amount of fan power is required.
【０００５】他方，通常のスクラバー方式は空気流れと
水または薬品の液滴とを接触させて空気中の不純物ガス
をこの液滴に吸収させ，この液滴を空気流から分離する
ものであるが，不純物ガスを空気流から完全に分離する
ことは困難であり，高度に浄化された空気を得ることは
できない。また，特殊なスクラバー方式として液滴を帯
電させ，塵埃粒子を静電気力によって液滴に吸着させる
方式のものもあるが，塵埃粒子を吸着した液滴は重力に
よって沈降分離されるものであるから，やはり高度に浄
化された空気を安定して得ることは困難である。そし
て，いずれのスクラバー方式でも多量の水を必要とし，
また水の水質も水道水程度を対象としており，クリーン
ルーム等のように清浄空気を必要とする設備では適用で
きない。On the other hand, the usual scrubber system is that the air stream is brought into contact with the droplets of water or chemicals to absorb the impurity gas in the air into the droplets and separate the droplets from the air stream. However, it is difficult to completely separate the impurity gas from the air flow, and highly purified air cannot be obtained. There is also a special scrubber method in which the droplets are charged and dust particles are adsorbed to the droplets by an electrostatic force. However, since the droplets adsorbing the dust particles are settled and separated by gravity, After all, it is difficult to stably obtain highly purified air. And any scrubber system requires a lot of water,
The quality of water is also targeted for tap water, and cannot be applied to equipment that requires clean air, such as clean rooms.
【０００６】一方，クリーンルームでは空気の温湿度調
節も重要な要素であり，このための空気調和器を必要と
する。この空気調和器にはクリーンルーム内に取入れる
新鮮な外気を処理する外調器と，クリーンルーム内を循
環する空気を再処理する一般空気調和器と設けられる
が，いずれにしても，これらの空気調和器において，HE
PAフイルタでは除去しきれない空気中の不純物ガスを除
去することができれば，省設備的に高度なクリーンルー
ムを構築することができる。On the other hand, in a clean room, controlling the temperature and humidity of air is also an important factor, and an air conditioner for this purpose is required. This air conditioner is equipped with an air conditioner that treats the fresh outside air that is taken into the clean room and a general air conditioner that reprocesses the air circulating in the clean room. HE
If it is possible to remove the impurity gas in the air that cannot be completely removed by the PA filter, it is possible to construct a sophisticated clean room in terms of equipment saving.
【０００７】本発明は，このような課題の解決を目的と
したものである。The present invention is intended to solve such a problem.
【０００８】[0008]
【課題を解決するための手段】本発明によれば，空気取
入口から空気吐出口に至るケーシング内の空気通路にお
いて，イオナイザ，純水噴霧装置および電気集塵機を空
気の流れの順に配置してなる空気浄化部と，この空気浄
化部を通過した空気を調温するための熱交換器とを設置
した空気浄化調和装置を提供する。そのさい，イオナイ
ザは紫外線照射装置と置換または併用することができ
る。また純水噴霧装置の前にオゾン発生器を取り付けて
もよい。使用する純水は比抵抗が10×104Ω・cm以上の
ものを用いる。空気を調温するための熱交換器は空気冷
却器と空気加熱器とで構成し，空気冷却器で空気の露点
調節を行い，空気加熱器で空気の乾球温度調節を行う。According to the present invention, an ionizer, a pure water spray device and an electrostatic precipitator are arranged in the order of air flow in an air passage in a casing from an air intake port to an air discharge port. Provided is an air purification and conditioning device equipped with an air purification unit and a heat exchanger for controlling the temperature of air that has passed through the air purification unit. In that case, the ionizer can be replaced or used together with the ultraviolet irradiation device. An ozone generator may be attached in front of the pure water spraying device. Use pure water with a specific resistance of 10 × 10 4 Ω · cm or more. The heat exchanger for controlling the temperature of the air consists of an air cooler and an air heater. The air cooler controls the dew point of the air and the air heater controls the dry-bulb temperature of the air.
【０００９】[0009]
【作用】純粋にH2Oからなる純水は比抵抗が高い。比抵
抗が10×104Ω・cm以上のものでは，これを噴霧すると
微細な水滴の表面には静電気が生じ易く, その純水ミス
トは電荷を帯びる。したがって，電気集塵機を通過する
さいに，純水ミストは効率よく集塵電極に電気的に吸着
捕集される。[Function] Pure water consisting of pure H 2 O has a high specific resistance. If the specific resistance is 10 × 10 4 Ω · cm or more, when sprayed, static electricity is easily generated on the surface of fine water droplets, and the pure water mist is charged. Therefore, when passing through the electrostatic precipitator, the pure water mist is efficiently adsorbed and collected by the dust collecting electrode.
【００１０】純水ミストが有する静電気はイオン化され
た不純物ガスを吸収する作用を供する。このため，イオ
ナイザを通過してイオン化した不純物ガスは純水ミスト
に静電気的に吸着され易くなる。したがって，空気中に
微量に同伴する不純物ガスでもその殆んどを純水ミスト
に捕集できる。そのさい，純水ミストの電荷量は空気中
の不純物ガスの電荷量と比較すると格段に多いため，不
純物ガスが純水ミストに吸着したとしても純水ミストに
は余分の電荷が残存する。このため純水ミストの集塵電
極への吸着能力は大きく低下することはない。The static electricity of the pure water mist serves to absorb the ionized impurity gas. Therefore, the impurity gas ionized by passing through the ionizer is easily electrostatically adsorbed by the pure water mist. Therefore, most of the impurity gas that is entrained in the air can be collected in the pure water mist. At that time, the charge amount of the pure water mist is remarkably larger than the charge amount of the impurity gas in the air. Therefore, even if the impurity gas is adsorbed by the pure water mist, an extra charge remains in the pure water mist. Therefore, the ability of the pure water mist to be adsorbed on the dust collecting electrode does not decrease significantly.
【００１１】不純物ガスをイオン化するためには，イオ
ナイザの他に紫外線照射によっても行うことができ，こ
の場合も同様の作用が供される。In order to ionize the impurity gas, it is possible to perform irradiation with ultraviolet rays in addition to the ionizer, and in this case, the same action is provided.
【００１２】空気中に純水ミストを噴霧することは空気
中の湿分を高めることになるが，この高湿空気を熱交換
器で調温調湿するさい，この熱交換器を空気冷却器と空
気加熱器で構成しておけば，まず空気冷却器において，
本空気浄化調和装置から吹出す空気を必要な露点となる
ように冷却除湿し，空気加熱器で該露点制御を行った空
気を必要な温度にまで昇温することができる。この冷却
除湿時に不純物ガスを含んだ純水ミストの一部がさらに
除去され，必要な温湿度に調和された浄化調和空気を本
発明装置から吹出すことができる。Although spraying pure water mist into the air increases the moisture content in the air, when the high humidity air is temperature-controlled by a heat exchanger, this heat exchanger is used as an air cooler. And an air heater, first, in the air cooler,
It is possible to cool and dehumidify the air blown out from the present air purifying and conditioning device so that the dew point becomes a required dew point, and raise the dew point-controlled air by the air heater to a required temperature. During the cooling and dehumidifying, part of the pure water mist containing the impurity gas is further removed, and purified conditioned air conditioned to the required temperature and humidity can be blown out from the device of the present invention.
【００１３】[0013]
【実施例】図１は本発明装置の一実施例を示したもので
あり，一つのケーシング１の一方の側壁に空気取入口２
を，他方の側壁に空気吐出口３を設け，送風機14を内装
することによって，空気取入口２から空気吐出口３に通
ずる空気通路がケーシング１内に形成される。このケー
シング１内の空気空路において，その上流側に不純物ガ
スを除去するための空気浄化部を形成し，その下流側に
空気の温湿度を調節する熱交換部を形成する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the device of the present invention, in which an air inlet 2 is provided on one side wall of a casing 1.
By providing the air discharge port 3 on the other side wall and installing the blower 14 therein, an air passage communicating from the air intake port 2 to the air discharge port 3 is formed in the casing 1. In the air passage in the casing 1, an air purification unit for removing impurity gas is formed on the upstream side, and a heat exchange unit for adjusting the temperature and humidity of the air is formed on the downstream side.
【００１４】空気浄化部は，イオナイザ４，純水噴霧装
置５および電気集塵機６を空気の流れの順に配置するこ
とによって構成されており，熱交換部は，空気冷却器７
および空気加熱器８を順に配置することによって構成さ
れている。The air purification section is constructed by arranging the ionizer 4, the pure water spraying device 5 and the electrostatic precipitator 6 in the order of air flow, and the heat exchange section is the air cooler 7
And the air heater 8 are sequentially arranged.
【００１５】空気浄化部のイオナイザ４は，高電圧が印
加されるエミッタ９（針状電極）を空気流れを横切るよ
うに多数配設した通常のものであり，このエミッタ９で
のコロナ放電を有利に行わせるために，各エミッタに対
向する位置に対極を設けておいてもよい。またエミッタ
での放電に伴ってエミッタから金属または金属酸化物の
微粒子が放出することがあるが，これを避けるためにエ
ミッタをセラミック製の絶縁材料で被覆しておくのも有
利である。このようなイオナイザは同一出願人に係る特
願平1-265190号, 特願平1-265189号に提案した。The ionizer 4 of the air purifying unit is a normal one in which a large number of emitters 9 (needle-shaped electrodes) to which a high voltage is applied are arranged so as to cross the air flow. A counter electrode may be provided at a position facing each emitter in order to perform the above. Further, fine particles of metal or metal oxide may be emitted from the emitter due to discharge at the emitter, and in order to avoid this, it is also advantageous to coat the emitter with a ceramic insulating material. Such ionizers have been proposed in Japanese Patent Application Nos. 1-265190 and 1-265189, which belong to the same applicant.
【００１６】イオナイザ４は直流印加方式，交流印加方
式，パルス式のもの等いずれでもよいが，交流印加式の
ものが特に好適である。図示の例では交流印加方式のも
のが使用されており，このためにエミッタ９は交流高圧
電源10に接続されている。The ionizer 4 may be of a DC application type, an AC application type, a pulse type, or the like, but an AC application type is particularly preferable. In the illustrated example, an alternating current type is used, and therefore the emitter 9 is connected to an alternating high voltage power supply 10.
【００１７】純水噴霧装置５は，イオナイザ４を通過し
た空気流に純水を噴霧し，微細な純水ミストを分散させ
るものであり，純水槽11内の純水をポンプ12によって，
噴霧ノズル13に導くようにしたものである。純水ミスト
が空気流の全体に噴霧されるように, 多数の噴霧ノズル
13を気流を横切る方向に二次元的な広がりをもって配置
するのがよい。この純水は比抵抗が10×104Ω・cm以上,
好ましくは 100×104Ω・cm以上の高度な純水を準備す
る。本発明装置をクリーンルームの空気浄化と調和に適
用する場合には，クリーンルーム内の作業の種類 (例え
ば半導体製造等) によってはかような純水が使用される
ことがあるので, これを本発明装置に分配供給すればよ
い。The pure water spraying device 5 sprays pure water on the air flow passing through the ionizer 4 to disperse fine pure water mist. The pure water in the pure water tank 11 is pumped by the pump 12.
It is configured to lead to the spray nozzle 13. Multiple spray nozzles so that the pure water mist is sprayed over the air flow.
It is advisable to arrange 13 with a two-dimensional spread across the air flow. This pure water has a specific resistance of 10 × 10 4 Ω · cm or more,
It is preferable to prepare highly pure water of 100 × 10 4 Ω · cm or more. When the device of the present invention is applied to the air purification and harmony of a clean room, such pure water may be used depending on the type of work in the clean room (for example, semiconductor manufacturing). It can be distributed and supplied to.
【００１８】電気集塵機６は，プラス側電極板15とマイ
ナス側電極板16を交互に配置したものであり，これら電
極板15と16は直流高圧電源装置17に接続されている。ま
たこれら電極板15と16は空気流れに抵抗を与えないよう
に，ケーシング１内において空気流れ方向に平行に配置
されている。電極板15と16には，前記作用の項で説明し
たように，電荷を帯び且つ不純物ガスを吸収した純水ミ
ストが吸着捕集されるが，その捕集量が多くなり, 重力
に抗しきれないような大きさになると, 水滴となって自
然に電極板から落下する。この水滴の落下に伴い, 水滴
中の不純物ガスも落下する。この落下を助成するため
に，定期的に純水を電極板15と16に噴射して電極板を洗
浄するようにすることもできる。The electrostatic precipitator 6 comprises positive side electrode plates 15 and negative side electrode plates 16 arranged alternately, and these electrode plates 15 and 16 are connected to a DC high-voltage power supply device 17. The electrode plates 15 and 16 are arranged in the casing 1 in parallel with the air flow direction so as not to give a resistance to the air flow. As described in the section of the above-mentioned action, the pure water mist which has an electric charge and absorbs the impurity gas is adsorbed and collected on the electrode plates 15 and 16, but the collected amount becomes large and the pure water mist resists gravity. If it becomes too large to be cut off, it will drop into water drops naturally from the electrode plate. With this drop of water drops, the impurity gas in the water drops also drops. In order to assist this drop, it is possible to periodically spray pure water onto the electrode plates 15 and 16 to clean the electrode plates.
【００１９】以上の構成になる空気浄化部の下流側には
空気の温湿度を調節するための空気冷却器７と空気加熱
器８が配置されるが，空気冷却器７は冷水が通水するフ
イン付熱交換コイルからなり，空気加熱器８は温水が通
水するフイン付熱交換コイルからなる。この空気加熱器
８は電気ヒータであってもよい。An air cooler 7 and an air heater 8 for adjusting the temperature and humidity of the air are arranged on the downstream side of the air purifying unit having the above-described structure, and cold water flows through the air cooler 7. The heat exchanger coil has fins, and the air heater 8 is a heat exchanger coil having fins through which hot water flows. The air heater 8 may be an electric heater.
【００２０】空気冷却器７では，空気吐出口３から吐出
して負荷側に供給される空気の必要露点となるように過
冷却する。これによって，空気冷却器７の表面では空気
中の湿分が凝縮しドレンが発生するが，そのさい，電気
集塵機で捕集しきれなかった純水ミストも同時にドレン
中の入る。このドレンの捕集はドレンパン18によって行
うが，このドレンパン18は純水噴霧装置５での純水の噴
霧滴と捕集と共用させることができる。The air cooler 7 supercools the air discharged from the air discharge port 3 and supplied to the load side to a required dew point. As a result, moisture in the air is condensed on the surface of the air cooler 7 to generate a drain, and at the same time, pure water mist that could not be collected by the electrostatic precipitator also enters the drain. The drain pan 18 collects the drain, and the drain pan 18 can be used both as a spray droplet of pure water in the pure water spray device 5 and as a collector.
【００２１】空気冷却器７で必要な露点にまで除湿され
且つ冷却された空気は，次の空気加熱器８で必要な乾球
温度にまで再加熱する。したがって，空気冷却器７を上
流側に，空気加熱器８を下流側に設置することが必要で
ある。The air dehumidified and cooled to the required dew point in the air cooler 7 is reheated to the required dry-bulb temperature in the next air heater 8. Therefore, it is necessary to install the air cooler 7 on the upstream side and the air heater 8 on the downstream side.
【００２２】図２は，紫外線照射器20を純水噴霧装置５
の上流側に設置した以外は，図１の装置と同じものを示
す。具体的に紫外線ランプをケーシング１内に配置す
る。これによる紫外線照射によって不純物ガスの荷電が
なされ，その粒子化が促進され除去効率を高めることが
できる。紫外線照射器20は図２のようにイオナイザ４と
併用して用いることもできるが，イオナイザ４と置換し
て用いることも可能である。In FIG. 2, the ultraviolet irradiator 20 is used as a pure water spray device 5.
1 shows the same device as that of FIG. 1 except that it is installed on the upstream side of. Specifically, an ultraviolet lamp is arranged in the casing 1. The irradiation of ultraviolet rays in this way charges the impurity gas, promotes the formation of particles thereof, and improves the removal efficiency. The ultraviolet irradiator 20 can be used in combination with the ionizer 4 as shown in FIG. 2, but can also be used in place of the ionizer 4.
【００２３】図３は，オゾン発生器21を純水噴霧装置５
の上流側に設置した以外は，図１の装置と同じものを示
す。これは，オゾン濃度の高い空気をノズルから噴射し
てもよいし，コロナ放電をより強くすることによってオ
ゾンを発生させてもよい。このようにしてオゾンを供給
すると，不純物ガスが粒子化が促進され，不純物ガスの
除去効率を高めることができる。In FIG. 3, the ozone generator 21 is replaced with the pure water spraying device 5
1 shows the same device as that of FIG. 1 except that it is installed on the upstream side of. For this, air with a high ozone concentration may be jetted from a nozzle, or ozone may be generated by making corona discharge stronger. When ozone is supplied in this way, the impurity gas is promoted to form particles, and the impurity gas removal efficiency can be increased.
【００２４】図４は，本発明の空気浄化調和装置をクリ
ーンルームに適用する場合の設置例を示したものであ
る。図示の例では, クリーンルーム内空間22に天井面に
張り渡したHEPAフイルタ層23から清浄空気が吹き出さ
れ, 空間22内の空気は多孔床の床下空間24および空気通
路25を経て天井裏26に循環される通常の垂直層流型クリ
ーンルームの例を示している。FIG. 4 shows an installation example when the air purification conditioner of the present invention is applied to a clean room. In the example shown in the figure, clean air is blown out from the HEPA filter layer 23 stretched over the ceiling surface in the clean room space 22, and the air in the space 22 circulates to the ceiling 26 via the underfloor space 24 of the perforated floor and the air passage 25. The example of the normal vertical laminar flow type clean room is shown.
【００２５】この場合, 本発明の浄化空調装置27を空気
通路25に設置することにより，HEPAフイルタ層23でも除
去しきれないような不純物ガスを同伴した空気を浄化し
且つ必要な温湿度に調和することができる。In this case, by installing the purification air conditioner 27 of the present invention in the air passage 25, the air accompanied with the impurity gas that cannot be removed even by the HEPA filter layer 23 is purified and the temperature and humidity are adjusted to the required level. can do.
【００２６】また, クリーンルーの循環空気の処理のほ
かに，系外から新たな空気をクリーンルーム内に供給す
る空気路28に本発明の浄化空調装置29を設置することに
よって，この導入空気中の不純物ガスを除去し，且つこ
の空気の温湿度を必要な状態に調節することができる。
すなわち, 外調機に代えて本発明の浄化空調装置29を用
いることによって，外気中に同伴する不純物ガスを除去
することができる。In addition to the treatment of the circulating air in the clean route, the purification air conditioner 29 of the present invention is installed in the air passage 28 for supplying new air from outside the system into the clean room. Impurity gas can be removed and the temperature and humidity of this air can be adjusted to the required state.
That is, by using the purification air conditioner 29 of the present invention instead of the external air conditioner, the impurity gas entrained in the outside air can be removed.
【００２７】[0027]
【発明の効果】本発明装置はパッケージ化されており，
通常の空気調和器と同様に設置が自由である。このた
め，空気の浄化が特に必要なクリーンルーム等の個別設
備に自由に取り付けができる。The device of the present invention is packaged,
It can be installed just like an ordinary air conditioner. Therefore, it can be freely installed in individual equipment such as a clean room where air purification is especially required.
【００２８】そして本発明装置の空気浄化は，噴霧され
た純水ミストが具有する静電気を利用するものであるか
ら，純水による不純物質の洗浄と合わせて, 静電気的に
不純物ガスが吸着しこれを電気集塵機で効率よく捕集で
きる。加えて, 不純物ガスに荷電が付与されるので，純
水ミストに不純物ガスが吸収される効率も高い。Since the air purification of the device of the present invention utilizes the static electricity of the sprayed pure water mist, the impurity gas is electrostatically adsorbed and absorbed in addition to the cleaning of impurities with pure water. Can be efficiently collected by an electric dust collector. In addition, since the impurity gas is charged, the efficiency of absorbing the impurity gas in the pure water mist is high.
【００２９】純水による空気の洗浄排液, 電気集塵機で
捕集された純水ミストの水滴, 空気冷却器でのドレンは
いずれも空気中に同伴する不純物質や不純物ガスを含有
することになり，総合的な空気洗浄ができるし，これら
の処理後の液はまとめて排液処理することができる。The cleaning and draining of air with pure water, the water droplets of pure water mist collected by the electrostatic precipitator, and the drain in the air cooler all contain impurities and impurity gases entrained in the air. The air can be comprehensively cleaned, and the liquids after these treatments can be collectively discharged.
【００３０】特に電気集塵極では濡れた状態で不純物ガ
スが捕集され, これが集積することによって水滴として
落下除去できる。このため，集塵極は常に更新された状
態となり，付着粉塵の電極表面からの除去も自動的に,
或いは純水噴射の洗浄によって効率よく行うことができ
る。Particularly, in the electrostatic precipitator, the impurity gas is collected in a wet state, and the accumulated impurity gas can be dropped and removed as a water droplet. For this reason, the dust collection electrode is always updated, and the adhered dust is automatically removed from the electrode surface.
Alternatively, it can be efficiently performed by washing with pure water.
【図１】本発明の空気浄化調和装置の実施例を示す略断
面図である。FIG. 1 is a schematic cross-sectional view showing an embodiment of an air purification conditioner of the present invention.
【図２】本発明の空気浄化調和装置の他の実施例を示す
略断面図である。FIG. 2 is a schematic cross-sectional view showing another embodiment of the air purification conditioner of the present invention.
【図３】本発明の空気浄化調和装置の更に他の実施例を
示す略断面図である。FIG. 3 is a schematic sectional view showing still another embodiment of the air purification conditioner of the present invention.
【図４】本発明の空気浄化調和装置をクリーンルームに
設置した例を示すクリーンルーム設備の略断面図であ
る。FIG. 4 is a schematic cross-sectional view of clean room equipment showing an example in which the air purification conditioner of the present invention is installed in a clean room.
１ ケーシング ２ 空気吸込口 ３ 空気吐出口 ４ イオナイザ ５ 純水噴霧装置 ６ 電気集塵器 ７ 空気冷却器 ８ 空気加熱器 ９ エミッタ 13 純水噴霧ノズル 15,16 集塵電極 18 ドレンパン 27,29 空気浄化調和装置 1 Casing 2 Air inlet 3 Air outlet 4 Ionizer 5 Pure water spraying device 6 Electrostatic precipitator 7 Air cooler 8 Air heater 9 Emitter 13 Pure water spraying nozzle 15,16 Dust collecting electrode 18 Drain pan 27,29 Air purification Harmony device
Claims (6)
ング内の空気通路において，イオナイザ，純水噴霧装置
および電気集塵機を空気の流れの順に配置してなる空気
浄化部と，この空気浄化部を通過した空気を調温するた
めの熱交換器とを設置した空気浄化調和装置。1. An air purifying section in which an ionizer, a pure water spraying apparatus and an electrostatic precipitator are arranged in the order of air flow in an air passage in a casing from an air intake to an air outlet, and the air purifying section. An air purification conditioner equipped with a heat exchanger for controlling the temperature of the passing air.
ング内の空気通路において，イオナイザ，オゾン発生
器，純水噴霧装置および電気集塵機を空気の流れの順に
配置してなる空気浄化部と，この空気浄化部を通過した
空気を調温するための熱交換器とを設置してなる空気浄
化調和装置。2. An air purifying section in which an ionizer, an ozone generator, a pure water spraying device and an electrostatic precipitator are arranged in the order of air flow in an air passage in the casing from the air intake to the air discharge. An air purification conditioner equipped with a heat exchanger for controlling the temperature of the air that has passed through the air purification unit.
は併用されている請求項１または２に記載の空気浄化調
和装置。3. The air purification conditioner according to claim 1, wherein the ionizer is replaced with or combined with an ultraviolet irradiation device.
のである請求項１，２または３に記載の空気浄化調和装
置。4. The air purification conditioner according to claim 1, wherein the pure water has a specific resistance of 10 × 10 4 Ω · cm or more.
冷却器と空気加熱器とからなり，該空気冷却器で空気の
露点調節を行い，空気加熱器で空気の乾球温度調節を行
う請求項１，２，３または４に記載の空気浄化調和装
置。5. The heat exchanger for controlling the temperature of air comprises an air cooler and an air heater, the air cooler adjusts the dew point of the air, and the air heater adjusts the dry-bulb temperature of the air. The air purification conditioner according to claim 1, 2, 3, or 4.
クリーンルームにおける該HEPAフイルタ層通過前の空気
路に連結される請求項１，２，３，４または５に記載の
空気浄化調和装置。6. The air purification conditioner according to claim 1, 2, 3, 4, or 5, wherein the air discharge port is connected to an air passage before passing through the HEPA filter layer in a clean room provided with the HEPA filter layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22357291A JP2910946B2 (en) | 1991-08-09 | 1991-08-09 | Air purification harmony device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22357291A JP2910946B2 (en) | 1991-08-09 | 1991-08-09 | Air purification harmony device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0544959A true JPH0544959A (en) | 1993-02-23 |
| JP2910946B2 JP2910946B2 (en) | 1999-06-23 |
Family
ID=16800267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22357291A Expired - Fee Related JP2910946B2 (en) | 1991-08-09 | 1991-08-09 | Air purification harmony device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2910946B2 (en) |
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