JP4616976B2 - Air purification air conditioner and air purification air conditioning method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air purification air-conditioning apparatus and an air purification air-conditioning method, and more specifically, while adjusting temperature, humidity adjustment, and impurity removal for each of circulating air circulating in the room and outside air introduced into the room while saving energy. The present invention relates to an air purification air-conditioning apparatus and an air purification air-conditioning method for performing the temperature, humidity and purification of indoor air.
[0002]
[Prior art]
Electronic device products such as semiconductors and liquid crystals have an environment in which air temperature and humidity and room pressure are kept constant, and suspended particles in the air are controlled to a limited cleanliness level (generally US Federal Standard 209D), so-called It is already known that it is manufactured in a clean room (hereinafter referred to as CR). In such an environment in the CR, since there is a large amount of heat generated from the electronic device manufacturing apparatus and devices for keeping the air in the CR clean, it is a cooling load even in winter.
[0003]
And recently, NH contained in the air at ppb level _Three Or SO ₂ Gas (hereinafter referred to as soluble gas impurities) has been reduced to the sub-ppb level, and strict management has been demanded even in environments with high cleanliness.
[0004]
Soluble gas impurity components in the CR are mixed with those brought into the CR by the outside air and those generated in the CR. In any case, the outside air treatment system (introducing into the CR while treating the outside air) System) and reduction measures in the circulating air treatment system in the CR (system that performs necessary treatment while circulating the air in the CR) are considered as one of the countermeasures.
[0005]
Conventionally, in an outdoor air treatment system, humidification can be performed at the same time, and the running cost is less expensive than dry-type removal methods (chemical adsorption removal method using chemical filters) An apparatus that absorbs and removes soluble gas impurities in the air to be treated has been widely used.
[0006]
On the other hand, in the circulating air treatment system in the CR, chemical filters are mainly used for reasons such as difficulty in controlling the temperature and humidity and difficulty in securing installation space, but some use of air washers has been proposed. (JP 2000-33221, JP 2000-42338, etc.). Therefore, by combining these means, it is possible to purify the air to be treated by the air washer in any of the optimum means for removing the soluble gas impurities, that is, in the outside air treatment system and the CR circulating air treatment system, High reduction effect of soluble gas impurities can be obtained.
[0007]
[Problems to be solved by the invention]
By the way, humidification in the humidification period from autumn to spring as in Japan has been conventionally performed in an outside air treatment system, and this outside air treatment system requires heating for humidification. In other words, humidification in the humidification period is performed by adding heat energy for humidification in the outside air treatment system, humidifying to a predetermined dew point, and supplying the air conditioning space to the CR.
[0008]
This is because the temperature of the outside air during the humidification period is low, and the treated air does not reach a predetermined dew point even if it is simply brought into gas-liquid contact with water. In addition, as a result of heating the outside air, the enthalpy of the outside air that is treated and introduced into the CR increases, and there is a problem that the cooling capacity of the outside air in the CR circulating air treatment system decreases. That is, the amount of heating energy is a wasteful use of a large amount of energy because the cooling energy originally present is lost, and twice as much energy is consumed.
[0009]
Furthermore, in an air purification air conditioning system in which an air washer treatment is performed in an outside air treatment system, amines (NH _X ) Etc., the alkaline gas component tends to increase as a soluble gas impurity component. Therefore, when pure water is used as an air washer absorption cleaning liquid, there is a problem that the pH value tends to be more alkaline than usual, and the alkaline gas component removal performance is lower than that of the outside air treatment system.
[0010]
An object of the present invention is to solve such a conventional problem, and at the same time as removing and humidifying soluble gas impurities in the outside air treatment system and the CR circulating air treatment system, the humidification in the outside air treatment system. Air that improves the removal performance of soluble gas impurities while achieving significant reduction in humidification energy and air conditioning cost by controlling the amount to the minimum and mainly performing humidification in the circulating air treatment system in the CR The object is to provide a purification air conditioning apparatus and an air purification air conditioning method.
[0011]
[Means for Solving the Problems]
The present invention is an air purification air conditioner, and has the following configuration in order to solve the above technical problem. That is, the present invention is an air purification air conditioner that is an annual cooling facility, and is provided with an outside air treatment air conditioner that includes an air washer capable of removing soluble gas impurities and humidifying the outside air supplied to the room and that controls the temperature. The circulation air processing air conditioner is provided with an air washer capable of removing soluble gas impurities and humidifying the circulating air circulating in the room and controlling the temperature.
[0012]
In the air purification air conditioner having such a configuration, gas-liquid contact between water and the air to be treated is used to humidify the air to be treated and remove soluble gas impurity components contained in the air to be treated in the humidification purification unit. As means, a water spray means and a water-absorbing or hydrophilic eliminator can be used, and as this eliminator, a water-absorbing material having humidification performance and gas absorption performance can be used.
[0013]
<Specific Configuration in the Present Invention>
The air purification air-conditioning apparatus of the present invention is composed of the above-described essential constituent elements, but it is established even when the constituent elements are specifically as follows. The specific component is characterized in that the outside air treatment air conditioner uses the exhaust heat of the circulating air treatment air conditioner as a preheat or reheat heat source of the outside air in the humidification period. This exhaust heat is mediated by, for example, a heat medium guided to the air conditioner.
[0014]
As means for using the exhaust heat in the clean room, mainly the production apparatus, and other air conditioning equipment, it is preferable to use water used for cooling and dehumidification in the circulating air treatment air conditioner. In the air purification air conditioner of the present invention, the room temperature is controlled by the room temperature control device provided to control the room temperature by the processing air volume of the circulating air purification air conditioner, and the indoor humidity is controlled by the amount of cold water sent to the circulating air purification air conditioner. It is more preferable to provide a humidity control device provided for the purpose, and to control the room temperature and the humidity independently by the room temperature control device and the humidity control device.
[0015]
Furthermore, in the air purification air conditioner of the present invention, the pH value of the soluble gas impurity removal treated water in one or both of the air washer of the outside air treatment air conditioner and the air washer of the circulating air treatment air conditioner is controlled within a predetermined range. It is also possible to further provide an ion component removing device for removing ion components having an excessive polarity.
[0016]
Furthermore, the present invention is an air purification air-conditioning method, and has the following configuration in order to solve the above technical problem. That is, the present invention provides an air-conditioning air conditioner that includes an air washer capable of removing and humidifying soluble gas impurities from outside air supplied to the room and controlling the temperature, and soluble gas impurities in circulating air circulating in the room. In an air purification air conditioner, which is an annual cooling facility comprising an air washer capable of removing water and humidifying, and a circulating air treatment air conditioner that controls temperature, the humidification in the outside air treatment air conditioner during the humidification period The amount is suppressed to the minimum amount by low-temperature treatment within a range in which the treated water can be prevented from being frozen, and the insufficient humidified component in the humidification period is supplemented by humidification by the air washer of the circulating air treatment air conditioner.
[0017]
In such an air purification air conditioning method of the present invention, it is preferable to use the exhaust heat of the circulating air treatment air conditioner as a preheat or reheat heat source in the humidification period in the outside air treatment air conditioner. Further, as means for utilizing the exhaust heat of the circulating air treatment air conditioner, it is preferable to use water used for cooling and dehumidifying the air in the clean room in the circulating air treatment air conditioner.
[0018]
As a control method for the circulating air treatment air conditioner, the room temperature control can be independently controlled by the amount of processing air in the circulating air treatment air conditioner and the amount of cold water sent to the circulating air treatment air conditioner. Further, the soluble gas impurity removal treated water is removed by removing excessive polar ion components in the soluble gas impurity removal treated water in one or both of the air washer of the outside air treatment air conditioner and the air washer of the circulating air treatment air conditioner. It is also preferable to control the pH value within a predetermined range.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the air purification air-conditioning apparatus and the air purification air-conditioning method of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1 is a configuration explanatory view showing an air purification air conditioner 10 according to a first embodiment of the present invention. The air purification air conditioner 10 includes a circulating air treatment air conditioner 11 and an outside air treatment air conditioner 31. The former circulation air treatment air conditioner 11 is installed in a circulating air flow, that is, an air circulation system, and the latter outside air treatment air conditioner. The machine 31 introduces outside air into the air circulation system while performing necessary processing.
[0020]
Here, the inside of the air circulation system can include, for example, a three-layered clean room (CR) ridge 50 used in a semiconductor manufacturing factory or the like into which a predetermined amount of fresh outside air is introduced. FIG. 1 shows that the circulating air treatment air conditioner 11 constituting the air purification air conditioner 10 described above is disposed in the air circulation system of a clean room (CR) building 50 having a three-layer structure to purify and air-condition the circulating air, and at the same time, the air circulation system. The specific arrangement | positioning structure in the case of introduce | transducing outside air into an air circulation system with the outside air processing air conditioner 31 installed outside is shown.
[0021]
The CR building 50 is partitioned into a ceiling chamber 51, CR52, a return plenum 53 below the floor of the CR, and a return shaft 54, and the circulating air treatment air conditioner 11 constituting the air purification air conditioner 10 described above is used as the return plenum. 53 (under the floor space in this example).
[0022]
As is apparent from the enlarged view of FIG. 2, the main structure of the circulating air treatment air conditioner 11 is a chamber 12 that takes in and passes the air to be treated, and the air to be treated that passes through the chamber 12 is humidified. A humidifying and purifying unit or primary air washer 13 for primary removal of soluble gas components, a water circulation system 14 for spraying water into the chamber 12 to bring the air to be treated into contact with water in the air washer 13, and an air A cooling / dehumidifying and purifying unit 15 that cools the air processed by the washer 13 and dehumidifies a part of the moisture humidified by the air washer 13 and performs secondary removal of soluble gas components.
[0023]
An air washer 13, which is a component of the circulating air treatment air conditioner 11, is a gas-liquid contact means between the air to be treated that passes through the chamber 12 and water. The means for the gas-liquid contact method is not particularly limited, but in this embodiment, the water spray by the water spray means and an eliminator made of a water-absorbing or hydrophilic material are combined.
[0024]
That is, the air washer 13 includes a water spraying means 13a having a large number of spray nozzles installed in the chamber 12, and an eliminator provided on the downstream side of the water spraying means 13a and made of a water-absorbing or hydrophilic material. 13b. As a result, a gas-liquid contact surface is formed on the sprayed water droplet surface and the surface of the eliminator 13b, and humidification of the air to be treated and primary absorption removal of soluble gas components contained in the air to be treated are performed. Examples of the material of the eliminator include, for example, a nonwoven fabric in which silica is attached and a three-dimensional network structure.
[0025]
The water circulation system 14 is means for continuously supplying water to the water spraying means 13a installed in the chamber 12, and is sprayed by the water spraying means 13a and is soluble by gas-liquid contact with the air to be treated. An absorption water storage tank 14a provided in the chamber 12 is provided to store the absorption liquid that has absorbed the gas impurity component. One end of a pipe 14b is connected to the absorbed water storage tank 14a to supply the collected liquid to the water spraying means 13a again, and the other end of the pipe is connected to the water spraying means 13a. A system 14 is configured.
[0026]
As shown in FIGS. 1 and 2, a circulation pump 14c is provided in the piping 14b constituting the water circulation system 14, and a piping 14d communicating with the pure water plant 16 is connected to the downstream side of the circulation pump 14c. A part of the humidified and gas absorbed water circulating in the water circulation system 14 is returned to the pure water plant 16. The humidified and gas-absorbed water returned to the pure water plant 16 is regenerated in the pure water plant 16, and is supplied again to the absorbed water storage tank 14a of the water circulation system 14 through the supply pipe 14e.
[0027]
A cooling / dehumidification / purification unit 15 is installed in the chamber 12 on the downstream side of the absorbed water storage tank 14a. Specifically, the cooling / dehumidification / purification unit 15 includes a cooling / dehumidification coil. Cold water is circulated in the cooling / dehumidification / purification unit 15 by a chilled water circulation system 17 (mainly composed of a chilled water return pipe 17a and a chilled water return pipe 17b). Is dehumidified.
[0028]
At this time, since dew condensation water is generated by dehumidification on the surface of the cooling dehumidification purification unit 15, for example, the cooling dehumidification coil, absorption of soluble gas impurity components remaining in the primary treatment air by gas-liquid contact between the dew condensation water and the passing air. Removal (secondary removal) is performed. The cooling / dehumidifying / purifying unit 15 performs flow control for dehumidification so that the humidity in the room becomes a predetermined value, not the conventional flow control for preventing condensation on the heat medium flowing through the cooling coil. ing.
[0029]
The upper surface, the lower surface, and both side portions of the chamber 12 on the downstream side of the cooling / dehumidifying / purifying unit 15 are closed, while the flow path of the air to be treated is opened on the upstream side, and the blower 18 is placed in the downstream space of the chamber 12. Is installed. The blower 18 blows the processing air that has flowed downstream in the chamber 12 to the outside of the chamber. Thus, when the blower 18 is actuated, the air to be treated is introduced into the inside through one end opening of the chamber 12, and sequentially passes through the air washer 13 and the cooling / dehumidifying / purifying portion 15 to be treated. The air is sent from the downstream space portion to the outside, that is, the return plenum 53 by the blower 18.
[0030]
In the air purification air conditioner 10, the cooling capacity is controlled by changing the processing air volume. That is, as shown in FIG. 1, based on the temperature of the air to be processed detected by the temperature sensor 19 installed in the CR 52, the temperature control device and the humidity control device are integrally assembled or configured. The control device 20 controls the air volume of the blower 18. In that case, when the temperature of the air to be treated is higher than the set value, the air flow rate is increased to increase the cooling capacity. On the other hand, when the temperature of the air to be treated is lower than the set value, the air flow rate by the blower 18 is increased. Reduce the cooling capacity (mainly air circulation by a fan filter unit described later).
[0031]
Further, in this air purification air conditioner 10, the cold water circulation system is connected to the cooling dehumidification coil constituting the cooling dehumidification purification unit 15 via the temperature / humidity control device 20 so that the humidity of the humidity sensor 21 installed in the CR 52 is always constant. The cooling / dehumidifying temperature in the cooling / dehumidifying / purifying unit 15 is controlled by controlling the amount of cold water circulated by the unit 17.
[0032]
A distributed air supply header 23 is attached to the air outlet of the blower 18 via an air supply pipe 22, and the distributed air supply header 24 is disposed in the vicinity of communication from the return plenum 53 to the return shaft 54. The distributed air supply header 23 has a large number of air supply holes formed on the peripheral surface of a hollow cylindrical body whose both ends are closed, and extends in the depth direction of the return plenum 53. The processing air blown from the blower 18 to the distributed supply header 23 via the air supply pipe 22 is distributed and supplied into the return plenum 53 through a number of supply holes.
[0033]
The air in the CR building 50 circulates in a flow returning to the ceiling chamber 51 → CR52 → return plenum 53 → and return shaft 54 → ceiling chamber 51, and dust is removed by the fan filter unit 55 installed in the ceiling chamber 51. The CR 52 downstream is maintained in the cleanest atmosphere.
[0034]
The air in the CR 52 is introduced into the circulating air treatment air conditioner 11 installed in the return plenum 53 and is brought from the cooling process of the exhaust heat generated in the CR 52 and humidification in the humidification period, and from outside air, or in the CR 52 The soluble gas impurity component generated in the step is removed. In CR52, since there is exhaust from the manufacturing apparatus or the like, fresh outside air is always introduced through the outside air processing air conditioner 31 to replenish it.
[0035]
In the air purification air conditioner 10 of the present invention, humidification is mainly performed by the circulating air treatment air conditioner 11 installed in the return plenum 53 of the CR building 50. Therefore, the humidification treatment by the outside air treatment air conditioner 31 shown in the present embodiment. Is minimal. That is, in Japan, during the humidification period from autumn to spring, the humidification amount in the outside air treatment air conditioner 31 is suppressed to a minimum amount by low-temperature treatment within a range where the treated water does not freeze, and the insufficient humidification component in the humidification period. Is supplemented by the above-described circulating air treatment air conditioner 11.
[0036]
In this outside air processing air conditioner 31, the pre-filter 32, the preheating coil 33, the medium performance filter 34, the cooling coil 35, the air washer 36, and the reheating coil are opened from the outside air inlet opening side at one end in the axial direction of the cylindrical housing. 37, the blower 38, and the HEPA filter 39 are sequentially arranged toward the downstream side (air travel direction).
[0037]
The air washer 36 in the outside air treatment air conditioner 31 has substantially the same configuration as the air washer 13 in the circulating air treatment air conditioner 11 described above, and is stored in the absorbed water storage tank 40a by the circulation pump 40b constituting the water circulation system 40. Water is continuously supplied to the water spraying means so as to make gas-liquid contact with the outside air.
[0038]
As shown in FIG. 1, the outside air processing air conditioner 31 is installed outside the CR building 50, and an introduction pipe 41 connected to the other end of the outside air processing air conditioner 31 is provided in the return plenum 53 of the CR building 50. The upstream space, that is, the upstream side of the circulating air treatment air conditioner 11 is installed. As a result, as described above, fresh outside air that has been exhausted by various manufacturing apparatuses and the like in the CR 52 is introduced into the CR building 50 via the outside air processing air conditioner 31 and replenished.
[0039]
Next, the operation of the air purification air conditioner 10 will be described. A part of the air in the CR building 50 is introduced into the circulating air processing air conditioner 11 of the air purification air conditioner 10 while passing through the above-described circulation path, and the exhaust heat generated in the CR building 50 is processed here. It is controlled to reach a predetermined room temperature. Specifically, first, the air to be treated in the CR building 50 is introduced into the chamber 12 of the circulating air treatment air conditioner 11 installed in the return plenum 53, passes through the air washer 13, and the pure water And gas-liquid contact.
[0040]
That is, in the chamber 12, pure water is continuously sprayed from the water spraying means 13a, comes into gas-liquid contact with the air to be treated flowing through the chamber 12, changes in enthalpy, such as being humidified by the temperature and humidity of the introduced air, and relative Humidified to 75-85% humidity. At the same time, a part of the soluble gas impurity component existing in the air to be treated is dissolved in the pure water by the gas-liquid contact between the air to be treated and the pure water in the air washer 13 and absorbed and removed (primary removal). Is done.
[0041]
The sprayed pure water reaches the eliminator 13b provided on the downstream side, wets the eliminator surface (surface that blocks the airflow), and humidification and soluble gas impurities are absorbed and removed there. In addition, the heat | fever (heat of vaporization) required for humidification utilizes the heat | fever which introduction air has. The pure water that has absorbed the soluble gas impurities in this way is collected in the absorbed water storage tank 14a and sprayed again from the water spraying means 13a through the water circulation system 14. That is, in the pure water circulation system 14, pure water is continuously circulated by the circulation pump 14c.
[0042]
While this circulation is repeated, the concentration of soluble gas impurities in the pure water of the water circulation system 14 increases with time, and at the same time, the water quality tends to be either acidic or alkaline. If the soluble gas concentration in the pure water is higher than the predetermined concentration, the gas absorption efficiency of the pure water is deteriorated. Therefore, a predetermined amount of the pure water in the water circulation system 14 is returned to the pure water plant 16 from the drain pipe 14d. It is. The amount of water returned to the pure water plant 16 and the amount of humidified water continue to be replenished as fresh water from the pure water plant 16 via the replenishment pipe 14e. As a result, the concentration of soluble gas impurities in pure water is controlled to be substantially equal to or lower than a predetermined value.
[0043]
The air that has been humidified by the air washer 13 and from which the soluble gas impurity components have been primarily removed (primary processing air) is then introduced into the cooling dehumidification purifying unit 15 where it is dehumidified and removed by the air washer 13 described above. Secondary removal of soluble gas impurity components remaining without being clogged is performed. The processing air cooled and dehumidified by the cooling and dehumidifying purification unit 15 is blown to the distributed supply header 23 by the blower 18 and is distributed and supplied to the return plenum 53 in the vicinity of the return shaft 54 in the CR building 50.
[0044]
On the other hand, in the outside air treatment air conditioner 31, dust is removed by a filter, soluble gas impurities are removed by an air washer 36, and outside air whose temperature is controlled so as to reach a predetermined supply air temperature is supplied to a return plenum 52 in the CR building 50. Supply. At this time, the temperature of the upstream air from the air washer 36 is controlled by the preheating coil 33 so that the outside air is humidified by the air washer 36 in the humidification period so that the amount of humidification becomes the minimum amount within a range in which freezing due to a decrease in the processing temperature can be prevented. .
[0045]
Since the air temperature decreases after humidification, reheating is performed by the reheating coil 37 so that the inside of the CR 52 that supplies the outside air does not fall below the dew point temperature. Regarding the temperature and humidity control by the circulating air treatment air conditioner 11 in the CR circulating air treatment system, the temperature is controlled by controlling the amount of processing air, and the humidity is controlled by controlling the amount of cold water. High control performance can be obtained.
[0046]
Here, a method for controlling the temperature and humidity in the CR 52 will be described in more detail. The temperature in the CR 52 is monitored by the temperature sensor 19 installed in the CR 52, and the air flow rate in the circulating air treatment air conditioner 11 is feedback-controlled by the temperature / humidity control device 20 with respect to the set temperature. For example, when the temperature in the CR 52 becomes higher than the set temperature, the air volume of the blower 18 is increased.
[0047]
Since the blowing temperature of the processing air is always lower than the set temperature (for example, the blowing temperature is 12 to 15 ° C. when the set temperature and humidity is 23 ° C. and 45%), the cooling capacity increases and the room temperature decreases when the air volume increases. . When the temperature in the CR 52 is the set temperature, the air volume is maintained as it is. Conversely, when the temperature in the CR 52 becomes lower than the set temperature, the amount of air blown by the blower 18 is reduced (that is, the air is circulated mainly by the air circulation by the blower attached to the fan filter unit 55). Lower the cooling capacity and raise the room temperature.
[0048]
Next, the air conditioning processing flow of the outside air and the circulating air in the CR in the humidification period will be described with reference to an air diagram shown in FIG. The air diagram of FIG. 3 shows each of the state points from point a to point k, point a is the setting condition in CR 52, point b is the state of air in the upstream space of return plenum 53, and point c is outside air mixing. The state of the circulating air after, point d is the state of air after humidification cleaning, point e is the state of air after cooling and dehumidification, point f is the state of air treated by the circulating air treatment air conditioner 11, point g is circulating The state after mixing of the air treated with the air treatment air conditioner 11 and the circulating air, h point is the state of the outside air, i point is the state of the air after preheating upstream of the air washer in the outside air treatment air conditioner, and j point is the outside air The air state after the minimum humidification after the air washer in the processing air conditioner, the k point indicates the air state after reheating at the outside air processing air conditioner outlet.
[0049]
The low-temperature, low-humidity outside air (state point h) is preheated to the state point i by the preheating coil 33 and then humidified to the state point j by the air washer 36. The preheating temperature at state point i (9 ° C. in this case) is set so that the temperature at state point j is not frozen (0 ° C. or higher, in this case, 2 ° C. or higher). The actual preheating temperature is determined individually according to the weather conditions in the installation area. The humidified air (state point j) is reheated by the reheating coil 37 to the state point k. The reheat temperature of the state point k is set to be equal to or higher than the set dew point temperature in the CR 52 (for example, 10.5 ° C. if 23 ° C. or 45%). In this case, the temperature is set to 12 ° C. with some margin. The state point k is a condition for supplying air into the CR 52 of the outside air processing air conditioner 31.
[0050]
In the CR circulating air processing system, the state point a is the set temperature and humidity, which is a condition of the temperature and humidity sensor installation point in the CR 52. The air in the CR 52 rises to the state point b due to a heat generation load of an indoor manufacturing apparatus or the like and is blown to the return plenum 53. In the return plenum 53, it is mixed with the processing outside air (state point k) to become the state point c. Part of the mixed circulating air (state point c) is introduced into the circulating air processing air conditioner 11 and is first humidified by the air washer 13 to reach the state point d.
[0051]
Next, it is cooled and dehumidified by the cooling and dehumidifying purification unit 15 to reach the state point e. The state point e is determined by the humidification amount of the circulating air in the CR, and when the humidification amount is large, the amount of cold water is increased to reduce the dehumidification amount. Conversely, when the amount of humidification is small, the amount of cold water is reduced and the amount of dehumidification is increased. The air temperature after dehumidification slightly rises to a state point f due to blower heat generation or blowing friction.
[0052]
When the processing air (state point f) and the circulating air (state point c) of the circulating air processing air conditioner 11 are mixed, the state point g is reached. The temperature rise from the state point g to the state point a is due to heat generated by the fan filter unit 55 and the lighting fixture mounted on the ceiling in addition to the production apparatus in the CR building 50.
[0053]
As is clear from the air conditioning processing flow of the outside air and the CR circulating air in the humidifier, in the air purification air conditioning apparatus 10 of the first embodiment, the humidification amount in the outside air processing air conditioner during the humidifying period is Optimum in the CR by reducing the amount to a minimum by treating it at a low temperature within the range that can prevent the treated water from being frozen, and supplementing the insufficient humidification during the humidification period with the air washer of the circulating air treatment air conditioner. It is possible to achieve a significant reduction in heating energy conventionally required in an outside air processing system while performing appropriate temperature and humidity adjustment and purification.
[0054]
(Second Embodiment)
FIG. 4 is an explanatory diagram of a configuration when the air purification air-conditioning apparatus 110 according to the second embodiment is installed on the CR building 50. Since the circulating air treatment air conditioner and the outside air treatment air conditioner constituting the air purification air conditioner 110 according to the second embodiment have substantially the same structure as that of the first embodiment, the same reference numerals are assigned to the details thereof. Description is omitted.
[0055]
The difference between the air purification air conditioner 110 according to the second embodiment and the air purification air conditioner 10 according to the first embodiment is that the cold water return (water temperature 12 to 17 ° C.) of the cold water circulation system in the circulating air treatment air conditioner 11 is This is a point of use as a heat source for preheating and reheating the outside air in the humidifying period in the outside air processing air conditioner 31 or as precooling of the outside air in the dehumidifying period.
[0056]
As a specific configuration, a refrigerator 111 is installed, and a chilled water outlet port of the refrigerator 111 is connected to a chilled water return pipe 17a constituting a chilled water circulation system 17 to a cooling / dehumidification purifying unit 15 of the circulating air treatment air conditioner 11. The cold water return pipe 17b is connected to the cold water inlet of the refrigerator 111. The cold water return pipe 17b is branched, the branch pipe 112 is connected to the preheating coil 33 and the reheating coil 37 of the outside air treatment air conditioner 31, and the cold water discharged from the cooling / dehumidifying and purifying unit 15 is supplied with the preheating coil 33 and the reheating coil. 37 to be sent.
[0057]
One end of a pipe 113 is connected to each cold water outlet of the preheating coil 33 and the reheating coil 37, and the other ends of these pipes are joined together and directly connected to the cold water inlet of the refrigerator 111 or a cold water return pipe. 17b (a pipe portion on the downstream side of the branch point of the branch pipe 112). In addition, a valve can be provided at an appropriate place in the cold water circulation system 17 from the refrigerator 11 to the cooling / dehumidifying / purifying unit 15 and the outside air processing air conditioner 31.
[0058]
With this configuration, it is possible to save heating energy by using the exhaust heat of the CR 52 as a heating source in the humidification period, and in the dehumidification period, outside air that has been pre-cooled with air higher than the return cold water temperature is used. By using it, the temperature difference of the cold water can be increased, and the reduction of water supply power can be achieved. In addition, since the processing flow of the outside air and the processing flow of the circulating air in the CR building 50 are the same as those in the first embodiment, description thereof will be omitted.
[0059]
(Third embodiment)
FIG. 5 is an explanatory diagram of a configuration when the air purification air-conditioning apparatus 210 according to the third embodiment is installed in the CR building 50. Since the circulating air treatment air conditioner and the outside air treatment air conditioner constituting the air purification air conditioner 210 according to the third embodiment have substantially the same structure as that of the first embodiment, the same reference numerals are attached to the details thereof. Description is omitted.
[0060]
The difference between the air purification air conditioner 210 according to the third embodiment and the air purification air conditioner 10 according to the first embodiment passes through the air washers 13 and 36 in the circulating air treatment air conditioner 11 and the outside air treatment air conditioner 31. That is, a pH control device 211 for controlling the pH value of the circulating water within a predetermined range is incorporated in the air purification air conditioner 210.
[0061]
As a specific configuration, in the circulating air treatment air conditioner 11, a pH controller 211 is installed in parallel with the circulation pump 14c provided in the pipe 14b constituting the water circulation system 14, and in the outside air treatment air conditioner 31, A pH controller 211 is installed in parallel with a circulation pump 40b that circulates water to the air washer 36 via an absorbed water storage tank 14a that constitutes the water circulation system 40.
[0062]
By the way, in the past, the inventors of the present invention have a technique in which, when the pH value of the circulating water passing through the air washer is deviated from a predetermined range, the ionic component having an insufficient polarity is added and controlled as a pH adjuster. Developed. However, as the pH control device 211 used in the air purification air-conditioning apparatus 210 of the present invention, a method that is completely opposite to the method of controlling by adding an ionic component having an insufficient polarity as a pH adjuster, that is, the excess one is used. By controlling the pH value within a predetermined range by separating and removing polar ions, the contamination level of the circulating water is improved simultaneously with the pH control.
[0063]
As a result, it is possible to achieve a reduction in the amount of water used (amount of makeup water) as well as control of the removal performance of soluble gas impurities. In general, there are many acid gas components in the outside air, and therefore the pH value of the circulating water in the air washer 36 in the outside air treatment air conditioner 31 that is the outside air treatment system is biased toward the acid side. Therefore, in such a case, the negative ion component (anion) contained in the circulating water is separated and removed by the pH control device 211 so that the pH value of the circulating water is controlled not to be largely biased to the acidic side.
[0064]
On the other hand, the air circulating in the CR building 50 tends to contain a large amount of alkaline gas components such as ammonia gas. Therefore, the air is circulated by the air washer 13 in the circulating air processing air conditioner 11 which is a circulating air processing system in the CR. The pH value of water is often biased toward the alkaline side. Therefore, the positive ion component (cation) contained in the circulating water used for the air washer 13 is separated and removed by the pH controller 211 so that the pH value of the circulating water is controlled not to be biased toward the alkaline side.
[0065]
In addition, the air purification air conditioner of this invention is not limited by the system and form of each air washer 13 and 36 provided in the circulating air processing air conditioner 11 and the outside air processing air conditioner 31. This is because the presence / absence of spraying, the presence / absence of a filler for increasing the wetted surface, the presence / absence of a water-absorbing eliminator, etc. do not affect the effect of the present invention.
[0066]
Moreover, since the position of the air blower provided in the circulating air processing air conditioner 11 and the outside air processing air conditioner 31 does not affect the effect of the present invention, the present invention is not limited to this. Such a blower is provided between the air washer 13 and the cooling / dehumidifying / purifying unit 15 in the circulating air treatment air conditioner 11 and between the air washer 36 and the reheating coil 37 and the most upstream in the outside air treatment air conditioner 31. It may be installed in the section.
[0067]
The air volume control method in the circulating air treatment air conditioner 11 is not limited in its method, such as rotation speed control by an inverter or control by an electric damper. Further, the control of the amount of cold water may use either a two-way valve or a three-way valve, and the mounting position may be either the outgoing side or the return side of the cold water. The temperature / humidity sensor is installed in the CR 52 in the above-described first embodiment. However, the temperature / humidity sensor does not change the performance even if installed in any of the return plenum 53, the return shaft 54, and the ceiling chamber 51.
[0068]
Furthermore, the installation position of the circulating air treatment air conditioner 11 may be either the return plenum 53 or the return shaft 54. Furthermore, the supply location of the outside air processed by the outside air processing air conditioner 31 to the CR building 50 is upstream of the circulating air processing air conditioner 11 in the return plenum 53 in the first embodiment described above. It may be on the downstream side of the processing air conditioner 11 or in the return shaft 54 or the ceiling chamber 51.
[0069]
In the air purification air conditioner of the present invention, as shown in FIG. 1, a temperature sensor 42 is provided on the downstream side of the preheating coil 33 in the outside air processing air conditioner 31, and the temperature sensor 42 is used to pass through the preheating coil 33. It is also preferable to control the heating amount so that the outside air is always 9 ° C., for example. Alternatively, in place of such means, it is also preferable to dispose the temperature sensor 42 in the absorbed water storage tank 40a and control the heating amount of the preheating coil 33 so that the water temperature does not fall below 5 ° C., for example.
[0070]
In addition, a temperature sensor 42 is provided in the introduction pipe 41 for introducing the outside air dehumidified and purified by the outside air treatment air conditioner 31 into the CR building 50, for example, at 12 ° C. (room temperature 23 ° C., humidity 45%. However, It is also preferable to control the temperature and humidity of the outside air blown from the introduction pipe 41 so as to be different depending on the clean room design conditions. Such temperature / humidity control of the outside air blown from the introduction pipe 41 can prevent the occurrence of condensation at the discharge portion of the introduction pipe 41 protruding into the CR building 50.
[0071]
【The invention's effect】
As described above, according to the air purification air conditioning apparatus and the air purification air conditioning method of the present invention, the outside air treatment air conditioner that introduces the outside air into the room is provided with an air washer capable of removing soluble gases and humidifying, and A similar air washer is also installed in the circulating air treatment air conditioner that treats the air circulating in the room, and it is easy to use the exhaust heat by suppressing the humidification during the humidification period to the minimum humidification amount that does not freeze with the air washer of the outside air treatment system. By mainly performing humidification with an air washer of a simple circulating air treatment air conditioner, it is possible to achieve a significant reduction in heating energy conventionally required in an outside air treatment system.
[0072]
Further, according to the air purification air-conditioning apparatus and the air purification air-conditioning method of the present invention, since the cooling capacity of the supplied outside air is increased by the amount of reducing the heating of the outside air at the same time as the above-described significant reduction of the heating energy, the circulating air The cooling energy used in the processing air conditioner can also be saved.
[0073]
Furthermore, since the soluble gas component concentration in the CR is also removed by the outside air processing system and the CR circulating air processing system, the maximum effect of reducing the soluble gas component can be obtained. In addition, since the return cold water used in the circulating air treatment air conditioner is used as the heat source during the minimum humidification in the outside air treatment air conditioner, the exhaust heat in the CR can be used as a result. Further energy savings can be achieved.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a configuration in which an air purification air conditioner according to a first embodiment of the present invention is installed in a clean room building having a three-layer structure into which a predetermined amount of fresh outside air is introduced.
FIG. 2 is a partial configuration explanatory view showing an enlarged circulating air treatment air conditioner that is a component of the air purification air conditioner shown in FIG. 1;
FIG. 3 is an air diagram showing an air conditioning process flow of outside air and circulating air in the CR during the humidification period by the air purification air conditioner shown in FIG. 1;
FIG. 4 is a configuration explanatory view showing an air purification air conditioner according to a second embodiment of the present invention installed in a clean room building.
FIG. 5 is a configuration explanatory view showing an air purification air conditioner according to a third embodiment of the present invention installed in a clean room building.
[Explanation of symbols]
10 Air purification air conditioner
11 Circulating air treatment air conditioner
12 chambers
13 Air washer (humidification purification section)
13a Water spray means
13b Eliminator
14 Water circulation system
14a Absorption water storage tank
14b Piping
14c Circulation pump
14d piping
14e piping
15 Cooling dehumidification purification section
16 Pure water plant
17a Outward piping for cold water circulation system
17b Return pipe for cold water circulation system
18 Blower
19 Temperature sensor
20 Temperature / humidity air volume control device
21 Humidity sensor
22 Air pipe
23 Distributed air supply header
31 Outside air processing air conditioner
32 Prefilter
33 Preheating coil
34 Medium performance filter
35 Cooling coil
36 Air Washer
37 Reheating coil
38 Blower
39 HEPA
40 Water circulation system
40a Absorption water storage tank
40b Circulation pump
41 Introduction pipe
42 Temperature sensor
50 Clean Room (CR) Building
51 Ceiling chamber
52 Clean Room (CR)
53 Return Plenum
54 Return shaft
55 Fan filter unit
110 Air purification air conditioner (second embodiment)
111 refrigerator
112 branch pipe
113 Piping
210 Air purification air conditioner (Third embodiment)
211 pH controller

Claims (6)

In the air purification air conditioner, which is an annual cooling facility,
An outside air treatment air conditioner that is equipped with an air washer capable of removing soluble gas impurities and humidifying the outside air supplied to the room and controlling the temperature;
A circulating air treatment air conditioner for controlling the temperature of the circulating air circulating in the room, with an air washer capable of removing soluble gas impurities and a humidifying treatment;
The outside air treatment air conditioner is a low temperature treatment of the outside air within a range in which the treated water is not lowered from the temperature preheated by the preheating coil provided in the outside air treatment air conditioner to the temperature at which the treated water is frozen by humidification. , Keep the amount of humidification to a minimum,
The circulating air treatment air conditioner is characterized by supplementing a deficient amount of humidification with respect to a target value of humidification in the entire air purification air conditioner with humidification by the air washer of the circulating air treatment air conditioner.
Air purification air conditioner.   A room temperature control device provided to perform room temperature control by the processing air volume of the circulating air treatment air conditioner and a humidity control device provided to perform indoor humidity by the amount of cold water sent to the circulating air treatment air conditioner are provided. The air purification air conditioner according to claim 1, wherein the room temperature control device and the humidity control device independently control room temperature and humidity.   Ions of excessive polarity to control the pH value of the soluble gas impurity removal treated water in one or both of the air washer of the outside air treatment air conditioner and the air washer of the circulating air treatment air conditioner within a predetermined range The air purification air conditioner according to claim 1 or 2, further comprising an ion component removing device for removing the component. In the air purification air conditioner as described in any one of Claim 1 to 3,
The humidification amount in the previous Kigaiki process air conditioner, low temperature outside air in the range of treated water by the humidifier from the preheating temperature by the preheating coil provided in the outer air treatment air conditioner before humidification does not drop to a temperature at which freezing The air purification air-conditioning is characterized in that it is suppressed to a minimum amount by processing, and the humidification amount that is insufficient with respect to the target humidification value in the entire air purification air-conditioning apparatus is supplemented by humidification by the air washer of the circulating air treatment air-conditioner Method.   The air purification air conditioning method according to claim 4, wherein exhaust heat of the circulating air treatment air conditioner is used as an outside air preheat or reheat heat source in a humidifying period in the outside air treatment air conditioner.   6. The air purification air conditioning method according to claim 5, wherein water used for cooling and dehumidification in the circulating air treatment air conditioner is used as means for utilizing the exhaust heat of the circulating air treatment air conditioner.

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