JPH09303843A - Method for removing gaseous contamination component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To adjust room humidity or room temperature fitting to the reduction of room concentration of gaseous contamination components while eliminating the use of other devices such as a humidity adjustor and an air temperature adjustor. SOLUTION: Room air A1 in an object room 1 is guided to a cleaner 2 which air is brought into contact with clean water W in the cleaner 2 to remove gaseous contamination components with the absorption of the clean water W, and air A2 after cleaned is returned to the object chamber 1, whereby concentration of the gaseous contamination components in the object room 1 is reduced. In this case, the clean water W used for the cleaning in the cleaner 2 is cooled or heated with water temperature adjustment means 13 for its temperature adjustment. With the water temperature adjustment, room humidity xa or room temperature ta in the object room l is adjusted together with the reduction of the room concentration of the gaseous contaminated components by the cleaning.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gaseous pollutant component in the air (for example, ammonia ion, chlorine ion, etc.) which causes quality deterioration in the manufacture of semiconductor integrated circuits.
For details of the method for removing the, in-room air in the target room is guided to the cleaning device, and this air is contacted with the cleaning water in the cleaning device to remove the gaseous pollutant components in the air by absorption into the cleaning water, The present invention relates to a method for removing a gaseous pollutant which reduces the concentration of the gaseous pollutant in the inside of the target chamber by returning the air after the cleaning process to the target chamber.

[0002]

2. Description of the Related Art A method of removing gaseous pollutants in air by bringing air into contact with water is generally called a scrubber method. This scrubber method uses tap water as washing water, and There are water circulation type that uses tap water repeatedly for cleaning treatment while using tap water as water, or one that uses pure water as washing water. Conventionally, any scrubber method can be used as a cleaning device. The temperature and humidity of the air after the cleaning process sent out from the chamber are dependent on the temperature. Therefore, when returning the air after the cleaning process to the target chamber to reduce the indoor concentration of gaseous pollutant in the target chamber, Humidity for dehumidifying or humidifying the air returned from the washer to the target room or the room air in the target room (generally after reheating) to adjust the indoor humidity and room temperature of the target room. Seiki and cooling (generally cooling involving dehumidification) or air temperature regulator for heating has been separately needed. (See, for example, JP-A-5-44959)

[0003]

However, in the conventional type as described above, since a humidity controller and an air temperature controller are provided in addition to the washing machine, there is a problem that the equipment space is increased and the equipment cost is high. there were.

In view of the above situation, the main object of the present invention is to reduce the equipment space and equipment cost by performing rational temperature and humidity adjustment using a washer, and at the same time, to reduce gaseous pollution. In addition to reducing the indoor concentrations of components, it is possible to adjust the indoor humidity and room temperature of the target room.

[0005]

[Means for Solving the Problems]

[Invention of Claim 1] In the invention of Claim 1, the air introduced from the target chamber is brought into contact with cleaning water in a cleaning device, and gaseous pollutants in the air are removed by absorption into the cleaning water. In combination with, by adjusting the temperature by cooling or heating the wash water used in this washing treatment by the water temperature adjusting means,
The humidity and temperature of the air returned from the cleaning device to the target room is adjusted, and thereby the indoor humidity or room temperature of the target room is adjusted.

That is, when the air is brought into contact with water, the state of the air changes toward a saturated state at a temperature equal to the water temperature. Therefore, in the washing machine, the temperature of the washing water brought into contact with the air can be adjusted by cooling. For example, with the cleaning process, the absolute humidity and temperature of the air can be adjusted to a lower side as compared with the case where the water temperature adjustment by cooling is not performed, and with this, the indoor humidity or room temperature of the target room can be adjusted.

Further, if the temperature of the cleaning water to be brought into contact with the air in the cleaning device is adjusted by heating, the absolute humidity and temperature of the air are increased along with the cleaning process as compared with the case where the water temperature is not adjusted by the heating. The indoor humidity or room temperature of the target room can be adjusted with this.

That is, according to the invention of claim 1,
In addition to reducing the indoor concentration of gaseous pollutants by the cleaning process, the cleaning device can also be used as a humidity controller or air temperature controller, and adjusts the indoor humidity of the target room without the need for a separate humidity controller. Alternatively, the room temperature of the target room is adjusted without the need for a separate air temperature controller, and in some cases, the room humidity of the target room is reduced without the need for a separate humidity controller and air temperature controller. And you can adjust the room temperature.

Although it is necessary to add water temperature adjusting means for adjusting the temperature of the wash water by cooling or heating, comparing the humidity adjuster or the air temperature adjusting means with the water temperature adjusting means, even if the heat source device portion is the same, Compared to a humidity controller or an air temperature controller that adjusts air whose volume is larger than that of water, the water temperature adjustment means is a device that is small as a whole in terms of adjusting water. Only the equipment space can be reduced, and the equipment cost can be reduced.

[Invention of Claim 2] In the invention of Claim 2, the cleaning water is cooled or heated by the water temperature adjusting means to adjust the temperature, so that the absolute humidity of the air is first adjusted during the cleaning process. Then, following this, the air after the cleaning process is heated by an air temperature controller to adjust the temperature, and the adjusted air is returned to the target chamber.

That is, by individually adjusting the absolute humidity and temperature of the air returned from the cleaning device to the target chamber in this way, the indoor concentration of the gaseous pollutant can be reduced by the cleaning process, and the indoor humidity of the target chamber can be reduced. And adjust the room temperature individually.

That is, according to the invention of claim 2,
In the form in which the washing device is also used as the humidity adjuster, it is possible to eliminate the need for a separate equipment for the humidity adjuster, which can reduce the equipment space and the equipment cost. Further, since the indoor humidity and the indoor temperature can be individually adjusted, the indoor humidity adjustment target value and the indoor temperature adjustment target value can be freely set, respectively, and in this respect, it is highly adaptable to various user applications. The temperature and humidity adjustment function can be obtained.

[Invention according to claim 3] In the invention according to claim 3, in which a part of the circulating air that is taken out of the target chamber and returned to the target chamber is washed with a washer,
By cooling or heating the wash water by the water temperature adjusting means to adjust the temperature, the absolute humidity of a part of the air is adjusted in association with the washing process, whereby the absolute humidity of the circulating air returned to the target chamber, that is, the wash. Adjust the absolute humidity of the combined air of the treated air and the air bypassing the washer. Also,
On the downstream side of the cleaning device, the circulating air returned to the target chamber is heated or cooled by an air temperature controller to adjust the temperature.

That is, by individually adjusting the humidity and the temperature of the circulating air returned to the target chamber in this manner, the indoor concentration of the gaseous pollutant can be reduced by the cleaning process as in the case of the above-mentioned invention. In addition, the indoor humidity and the indoor temperature of the target room are individually adjusted.

That is, according to the invention of claim 3,
In the same manner as in the second aspect of the present invention, the humidity adjuster can also be used as the cleaning device, and it is possible to eliminate the need for a separate equipment for the humidity adjuster, which can reduce the equipment space and the equipment cost. . In addition, since the indoor humidity and the indoor temperature can be adjusted individually, the indoor humidity adjustment target value and the indoor temperature adjustment target value can be set freely, and in this respect, it is highly adaptable to various user applications. The temperature and humidity adjustment function can be obtained.

Moreover, since only a part of the circulating air is washed by the washing device, the washing device can be small in size for the amount of circulating air, which reduces the equipment space and The equipment cost can be reduced more effectively.

[Invention of Claim 4] In the invention of Claim 4, the cleaning water used for the air cleaning process is collected by the cleaning device, and the collected cleaning water is reused for the air cleaning process. In the circulating use of cleaning water, the collected cleaning water is the temperature adjustment target of the water temperature adjusting means, and by adjusting the water temperature of the collected cleaning water, the absolute humidity and temperature of the air are adjusted along with the cleaning process as described above. Adjust the indoor humidity or room temperature of the target room.

That is, according to the invention of claim 4,
Since the temperature of the wash water that is circulated is adjusted by the water temperature adjustment means, the heat loss associated with draining wash water is eliminated and the temperature It is possible to reduce the cooling amount and the heating amount required for the adjusting means, whereby the running cost can be reduced and energy saving can be effectively achieved.

[Invention of Claim 5] In the invention of Claim 5, the concentration of the trapped pollutant component in the trapped wash water gradually increases in the circulating use of the wash water. In contrast to the decrease in the absorption and removal effect of water, the concentration of the collected pollutant in the collected cleaning water is detected by the detection means, and based on this detected concentration, the fresh cleaning water is supplied to the cleaning water circulation system by the automatic replenishment means. By controlling it, the effect of absorbing and removing the gaseous pollutant component is kept high.

That is, according to the invention of claim 5,
By circulating the wash water, the consumption of wash water is reduced, and the required cooling amount and heating amount of the water temperature adjusting means are reduced as described above to reduce running costs and reduce gaseous pollution. The effect of absorbing and removing components can be kept high and stable.

[Invention of Claim 6] In the invention of Claim 6, when the amount of cleaning water to be brought into contact with air is changed in order to adjust the effect of absorbing and removing the gaseous pollutant, the humidity accompanying the cleaning process is changed. The adjustment effect and the air temperature adjustment effect also change, and the absolute humidity and temperature of the air after the cleaning process also change, while adjusting the absorption and removal effect for gaseous pollutant components and the air accompanying the cleaning process. Adjust the absolute humidity or temperature as follows.

That is, the concentration of the gaseous pollutant component in the air and the state value (humidity or temperature) of the air are detected by the detection means, whereas the concentration of the gaseous pollutant component detected by the control means is detected. Based on the above, by automatically adjusting the amount of wash water to be brought into contact with air, the necessary effect of absorbing and removing the gaseous pollutant is secured. Further, the control means automatically changes the target temperature of the water temperature adjustment by the water temperature adjusting means based on the detected state value of the air, so as to be independent of the absorption removal effect adjustment by the water amount adjustment described above, and the cleaning process. Ensure the necessary effect for adjusting the absolute humidity or temperature of the air.

That is, according to the invention of claim 6,
While stably obtaining the necessary effect as the absorption and removal effect of the gaseous pollutant, it is possible to stably obtain the necessary effect of adjusting the absolute humidity or temperature of the air accompanying the cleaning process. The reduction of the indoor concentration of the gaseous pollutant in the target room and the adjustment of the indoor humidity or the room temperature of the target room can be realized accurately and stably according to the required degree of each.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment] In FIG. 1, 1 is a target room used as a clean room, 2 is a cleaner for cleaning air A1 discharged from the target room 1 to an underfloor exhaust chamber 4 through a ventilation floor 3, and 5 is a cleaner. A vertical air passage for guiding the air A2 after the cleaning process to the ceiling air supply chamber 6, and 7 is a high performance for removing fine particles such as fine dust and fungi from the air A2 supplied from the ceiling air supply chamber 6 into the room of the target room 1. It is a filter, and forms a circulation air passage by the underfloor exhaust chamber 4, the vertical air passage 5, and the ceiling air supply chamber 6, and the air A1 taken out from the target chamber 1 is passed through the circulation air passage by the operation of the circulation fan 8. Then, the recirculating air conditioning is performed to return the target room 1 again.

The cleaning device 2 is provided with the exhaust air A1 from the target chamber 1.
Is contacted with the cleaning water W to remove the gaseous pollutant component in the air A1 by absorption into the cleaning water W. The air A2 cleaned by the cleaning device 2 is used in the target room in the above-mentioned circulation type air conditioning. By returning the value to 1, the concentration of the gaseous pollutant in the target room 1 is reduced.

The gaseous pollutant component to be removed causes quality deterioration in the manufacture of semiconductor integrated circuits, for example.
It is a gaseous chemical component in the air (that is, a gaseous chemical component that cannot be removed by the high-performance filter 7), such as ammonia ion, chlorine ion, sodium ion, calcium ion, etc., which interferes with the use as a clean room. For the components to be generated indoors in the target chamber 1 or to be brought into the target chamber 1 from the outside, the indoor concentration of the gaseous pollutant can be reduced by the cleaning process to make the interior of the target chamber 1 a clean room. Keep indoor conditions suitable for use.

The washer 2 adopts an air washer type, and its specific structure is the intake air A into the vessel.
1. A baffle plate group 9 that makes 1 a turbulent flow suitable for cleaning, a spray nozzle group 10 that sprays cleaning water W onto the passing air A1 to wash the passing air A1, and the air A after the washing processing.
Water drops remaining in 2 are captured and removed (so-called draining treatment)
The eliminator 11 is provided. Further, the washing water W used for the washing process by sprinkling water and the washing water tank 12 for collecting the water droplets of the washing water W captured by the eliminator 11 are provided.
A cleaning water circulation system is adopted in which the stored cleaning water W in the cleaning water tank 12 is supplied to the water spray nozzle group 10 by the circulation pump 12p and repeatedly used for the cleaning process of the air A1. In addition, 12 a is a makeup water channel for the washing water tank 12.

Room humidity xa and room temperature ta of the target room 1
For the adjustment, the cleaning system 2 is used as a humidity controller and an air temperature controller for the circulating air A1. Specifically, the stored cleaning water W in the cleaning water tank 12 is cooled or heated. Water temperature adjusting means 1 for adjusting temperature
3 is provided, and the temperature tw of the wash water W used in the washing process is adjusted by the water temperature adjusting means 13 as in the following examples (M1) to (M5), so that the water passes along with the washing process by sprinkling water. Adjust the absolute humidity and temperature of the air A1,
By returning the temperature-humidity-adjusted air A2 (that is, the air after the cleaning process) to the target room 1 in the circulation air conditioning, the indoor humidity xa and the room temperature ta of the target room 1 are adjusted.

In the present embodiment, the indoor humidity xa is expressed by absolute humidity, but instead of this, the indoor humidity may be expressed by relative humidity. In addition, the following (M1)
In FIGS. 2 and 3 (a) to (e) showing the adjustment example of (M5) on the wet air diagram, the point a is the indoor air A of the target room 1.
1 shows the state (humidity xa, temperature ta), point b shows the state (humidity xb, temperature tb) of the air A2 after the cleaning process,
The broken line arrow in the figure shows the state change (that is, the state change of the state) of the air A1 during the passage through the washer when the water temperature adjusting means 13 does not adjust the water temperature.

(M1) As shown in (a) of FIG. 2, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is tw1 (tw1 <dew point temperature tw2 of the indoor air A1, for example, 0 to 7). By adjusting the temperature to about 0 ° C.), the air A1 is cooled and dehumidified in accordance with the cleaning process to adjust the state from the point a to the state b, and the adjusted air A2 at the point b is returned to the target chamber 1. Therefore, the sensible heat cooling load Q in the target room 1
And the dehumidification load H, the indoor humidity xa and the indoor temperature ta of the target room 1 are adjusted / maintained within the target adjustment ranges.

(M2) As shown in FIG. 2B, the cleaning process is performed by cooling the cleaning water W by the water temperature adjusting means 13 and adjusting the water temperature tw to tw2 (the dew point temperature of the indoor air A1). Accordingly, the air A1 is cooled to adjust the state of the point a from the state of the point b, and the adjusted air A2 of the point b is returned to the target chamber 1, so that the sensible cooling load Q in the target chamber 1 The indoor humidity xa and the indoor temperature ta of the target room 1 are adjusted / maintained within the target adjustment range.

(M3) As shown in (c) of FIG. 2, the wash water W is cooled by the water temperature adjusting means 13 and the water temperature tw is changed to tw3 (tw2 <tw3 <water temperature tw0 in the case of the above-mentioned change in the course). By adjusting the cleaning process,
By cooling and humidifying the air A1 to adjust it from the state at the point a to the state at the point b, and returning the adjusted air A2 at the point b to the target chamber 1, the sensible heat cooling load Q and the humidification load H in the target chamber 1 are adjusted. On the other hand, the indoor humidity xa and the indoor temperature ta of the target room 1 are adjusted / maintained within the target adjustment range.

(M4) As shown in (d) of FIG. 3, the cleaning water W is heated by the water temperature adjusting means 13 to adjust the water temperature tw to tw4 (tw0 <tw4 <the temperature ta of the indoor air A1). With the cleaning process, the air A1 is cooled and humidified to adjust the state at the point a to the state at the point b.
By returning the point adjustment air A2 to the target room 1, the indoor humidity xa and the room temperature ta of the target room 1 are adjusted within the target adjustment range with respect to the sensible heat cooling load Q and the humidification load H in the target room 1. maintain.

(M5) As shown in (e) of FIG. 3, the washing water W is heated by the water temperature adjusting means 13 and the water temperature tw is adjusted to tw5 (ta <tw5). Air A1 is heated and humidified, and from the state of point a to b
Adjusted to the condition of the point, and the adjusted air A2 at the point b is adjusted to the target chamber 1
By returning to the above, the indoor humidity xa and the indoor temperature ta of the target chamber 1 are adjusted and maintained within the target adjustment ranges with respect to the sensible heat load Q and the humidification load H in the target chamber 1.

In the present embodiment, as the water temperature adjusting means 13, the heat medium R (for example, water or brine) cooled or heated by the heat source device 15 is circulated by the circulation pump 16 with respect to the heat exchanger 14 arranged in the wash water tank 12. By circulating and supplying the cleaning water W and the heat medium R in the heat exchanger 14, the cleaning water W is cooled or heated.

Further, by adjusting the water temperature of the wash water W, the target room 1
In adjusting the indoor humidity xa and the indoor temperature ta of the cleaning water W, the controller 18 controls the water temperature t of the cleaning water W based on the detection information of the water temperature sensor 17 that detects the water temperature tw of the cleaning water W.
The cooling output or heating output of the heat source device 15 is automatically adjusted so that w becomes the target temperature tww, and the indoor humidity xa
Based on the detection information of the humidity sensor 19 that detects the room temperature and the temperature sensor 20 that detects the room temperature ta, the room humidity xa
In order to keep the indoor temperature ta within the target adjustment range, the controller 18 sets the target temperature t in the water temperature adjustment.
Automatically change ww (for example, in the example of (M1) above,
(tww = tw1 is changed to tww = tw1 + α).

That is, by automatically changing and adjusting the target temperature tww of the water temperature adjustment by the water temperature adjusting means 13 based on the detected information of the indoor humidity xa and the indoor temperature ta, the indoor humidity xa is irrespective of the load change in the room. And room temperature ta
Is adjusted and maintained within the target adjustment range.

[Second Embodiment] FIG. 4 shows a modification of the equipment configuration shown in the first embodiment. The main change is that the air A2 after cleaning is heated. The point is that an air temperature controller 21 for adjusting the temperature is additionally provided.

That is, in the case shown in FIG. 4, the following (M
6) to (M9), the washing water W is cooled or heated by the water temperature adjusting means 13 to adjust the temperature, so that the washing device 2 can also be used as a humidity adjusting device. The absolute humidity of the air A1 is adjusted, and the air A2 after the cleaning process is heated by the air temperature adjuster 21 to adjust the temperature, and the adjusted air A3 is returned to the target chamber 1 in the circulation air conditioning.

That is, the air A returned to the target chamber 1 in this way
By individually adjusting the humidity and the temperature of No. 3, the indoor humidity xa and the indoor temperature ta of the target room 1 are individually adjusted together with the reduction of the indoor concentration of the gaseous pollutant due to the cleaning process.

In addition, in the adjustment examples of (M6) to (M9) below, in (a) to (d) of FIG.
Point a indicates the state of the indoor air A1 in the target room 1 (humidity xa, temperature ta), point b indicates the state of the air A2 after the cleaning process (humidity xb, temperature tb), and point c indicates the air temperature regulator. State of air A3 after temperature adjustment by 21 (humidity xc, temperature t
c) is shown. Further, as in the case of FIG. 2, the broken-line arrow in the figure shows the state change (that is, the state change of the air) of the air A1 during the passage through the washer when the water temperature adjustment means 13 does not adjust the water temperature.

(M6) As shown in FIG. 5A, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is tw1 (tw1 <dew point temperature tw2 of the indoor air A1, for example, 0 to 7). By adjusting the temperature to about 0 ° C.), the air A1 is dehumidified (cooled and dehumidified) along with the cleaning process to adjust the state of the point a to the state of the point b, and the air A2 after the cleaning process is emptied. Heating by temperature controller 21 (so-called reheat)
Then, the state of the point b is adjusted to the state of the point c, and the adjusted air A3 at the point c is returned to the target chamber 1, so that the sensible heat cooling load Q and the dehumidifying load H in the target chamber 1 are different from the target chamber 1 Indoor humidity xa and indoor temperature ta of the respective target values xaa,
Adjust and maintain taa.

(M7) As shown in FIG. 5B, the cleaning water W is cooled by the water temperature adjusting means 13 and the water temperature tw is adjusted to tw1 (tw1 <tw2), so that the cleaning process The air A1 is dehumidified (cooled and dehumidified) to adjust from the state of the point a to the state of the point b, and the air A2 after the cleaning process is heated (reheated) by the air temperature controller 21 to the state of the point b. To the state of point c, and adjust air A at this point c
By returning No. 3 to the target room 1, the indoor humidity xa and the room temperature ta of the target room 1 with respect to the sensible heat load Q and the dehumidification load H in the target room 1 are set to the respective target values xaa and taa.
Adjust and maintain.

(M8) As shown in (c) of FIG. 5, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is changed to tw3 (tw2 <tw3 <water temperature tw0 in the case of the above-mentioned change in the course). By adjusting the cleaning process,
The air A1 is humidified to adjust the state of the point a to the state of the point b, and the air A2 after the cleaning process is adjusted by the air temperature controller 2
By heating (reheating) by 1 to adjust from the state of the point b to the state of the point c, and returning the adjusted air A3 at the point c to the target chamber 1, the sensible heat load Q and the humidification load in the target chamber 1 For H, the indoor humidity xa and the indoor temperature ta of the target room 1 are adjusted / maintained to the respective target values xaa and taa.

(M9) As shown in (d) of FIG. 5, the washing water W is heated by the water temperature adjusting means 13 and the water temperature tw is adjusted to tw4 '(tw0 <tw4').
Along with the cleaning process, the air A1 is humidified to change the condition from point a to point b.
In addition, the air A2 after the cleaning process is heated (reheated) by the air temperature controller 21 to adjust from the state of the point b to the state of the point c, and the adjusted air A3 of the point c is adjusted. To the target room 1, the indoor humidity xa and the room temperature ta of the target room 1 are adjusted and maintained at the respective target values xaa and taa for the sensible heat load Q and the humidification load H in the target room 1. .

In the present embodiment, in adjusting the indoor humidity xa and the indoor temperature ta of the target room 1 by adjusting the water temperature of the wash water W and the air temperature adjustment by the air temperature adjuster 21, the water temperature of the wash water W is adjusted. Based on the detection information of the water temperature sensor 17 that detects tw, the controller 22 controls the water temperature t of the wash water W.
The cooling output or heating output of the heat source device 15 is automatically adjusted so that w becomes the target temperature tww, and the indoor humidity xa
Based on the detection information of the humidity sensor 19 that detects the temperature, the controller 22 automatically changes the target temperature tww in the water temperature adjustment so that the indoor humidity xa becomes the target value xaa (for example, in the example of (M6) above). , Tww = tw1
Is changed to tww = tw1 + α).

Further, based on the detection information of the temperature sensor 20 for detecting the room temperature ta, the room temperature ta is set to the target value taa.
Therefore, the controller 22 automatically adjusts the heating output of the air temperature adjuster 21 (in other words, automatically adjusts the adjusted temperature tc of the air by the air temperature adjuster 21).

That is, the target temperature tww for the water temperature adjustment by the water temperature adjusting means 13 is based on the detection information of the indoor humidity xa.
By automatically changing and adjusting the heating output of the air temperature regulator 21 based on the detection information of the indoor temperature ta, the indoor humidity xa and the indoor temperature regardless of the load change in the room. ta and target values xaa and taa
Adjust and maintain.

[Third Embodiment] FIG. 6 shows a modification of the equipment configuration shown in the second embodiment. The main changes are that the target room 1 is taken out again and then again. A part A1 ′ of the circulating air A1 returned to 1 is cleaned by the cleaning device 2, and the combined air A3 of the air A2 after the cleaning process and the air A1 ″ on the side bypassing the cleaning device 2 Is to be heated or cooled by the air temperature adjuster 21 to adjust the temperature.

That is, in the case shown in FIG. 6, the following (M
10) to (M14), the washing water W is cooled or heated by the water temperature adjusting means 13 to adjust the temperature, so that the washing device 2 can also be used as a humidity adjusting device. The absolute humidity of the partial air A1 ′ is adjusted, and thereby the absolute humidity of the combined air A3 of the air A2 after the cleaning process and the air A1 ″ on the side bypassing the cleaning device 2 is adjusted.
In addition, following this, the combined air A3 is supplied to the air temperature controller 21.
The temperature is adjusted by heating or cooling with this adjusted air A4
Is returned to the target room 1 in the circulation air conditioning.

That is, the air A returned to the target chamber 1 in this way
By individually adjusting the humidity and the temperature of No. 4, the indoor humidity xa and the indoor temperature ta of the target room 1 are individually adjusted together with the reduction of the indoor concentration of the gaseous pollutant due to the cleaning process.

Incidentally, the following adjustment examples (M10) to (M14) are shown on the moist air diagram in FIGS. 7 and 8 (A) to (E).
In the figure, point a indicates the state (humidity xa, temperature ta) of the indoor air A1 in the target room 1, and point b indicates the air A2 after the cleaning process.
Shows the state (humidity xb, temperature tb), and point c is the confluent air A
3 shows the state (humidity xc, temperature tc), and point d is the state of the air A4 after temperature adjustment by the air temperature regulator 21 (humidity x
d, temperature td). Further, as in the case of FIG. 2 and FIG. 4, the broken-line arrow in the figure indicates the state change of the air A1 ′ during the passage through the washer when the water temperature adjusting means 13 does not adjust the water temperature (that is, the state change of the event). ) Is shown.

(M10) As shown in (a) of FIG. 7, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is obtained.
Is adjusted to tw1 (tw1 <dew point temperature tw2 of the indoor air A1, for example, a temperature of about 0 to 7 ° C.) to dehumidify the passing partial air A1 ′ (cooling dehumidification) along with the cleaning process.
Then, the state of the point a is adjusted to the state of the point b, and the air A2 after the cleaning process at the point b and the air A on the bypass side of the cleaning device are adjusted.
By merging with 1 ", the merged air A at the point c
Get 3. Then, the combined air A3 is supplied to the air temperature controller 21.
By adjusting the state of the point c from the state of the point d to the state of the point d and returning the adjusted air A4 at the point d to the target chamber 1, with respect to the sensible heat cooling load Q and the dehumidifying load H in the target chamber 1,
The indoor humidity xa and the indoor temperature ta of the target room 1 are adjusted and maintained at the respective target values xaa and taa.

(M11) As shown in (b) of FIG. 7, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is obtained.
Is adjusted to tw1 (tw1 <tw2) so that the passing partial air A1 ′ is dehumidified (cooling dehumidification) along with the cleaning process.
Then, the state of the point a is adjusted to the state of the point b, and the air A2 after the cleaning process at the point b and the air A on the bypass side of the cleaning device are adjusted.
By merging with 1 ", the merged air A at the point c
Get 3. Then, the combined air A3 is supplied to the air temperature controller 21.
By heating (so-called reheating) to adjust from the state of the point c to the state of the point d, and returning the adjusted air A4 at the point d to the target chamber 1, the sensible heat cooling load Q and the dehumidifying load in the target chamber 1 For H, the indoor humidity xa and the indoor temperature t of the target room 1
a is adjusted and maintained at the respective target values xaa and taa.

(M12) As shown in (c) of FIG. 7, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw.
Is adjusted to tw1 (tw1 <tw2) so that the passing partial air A1 ′ is dehumidified (cooling dehumidification) along with the cleaning process.
Then, the state of the point a is adjusted to the state of the point b, and the air A2 after the cleaning process at the point b and the air A on the bypass side of the cleaning device are adjusted.
By merging with 1 ", the merged air A at the point c
Get 3. Then, the combined air A3 is supplied to the air temperature controller 21.
By heating (so-called reheating) to adjust from the state of the point c to the state of the point d, and returning the adjusted air A4 at the point d to the target chamber 1, the sensible heat load Q and the dehumidification load in the target chamber 1 For H, the indoor humidity xa and the indoor temperature t of the target room 1
a is adjusted and maintained at the respective target values xaa and taa.

(M13) As shown in (d) of FIG. 8, the wash water W is cooled by the water temperature adjusting means 13, and the water temperature tw is obtained.
Is adjusted to tw3 (tw2 <tw3 <water temperature tw0 in the case of the above-mentioned change in temperature), so that the passing partial air A1 ′ is humidified to adjust from the state of point a to the state of point b with the cleaning process. , Air A after the cleaning process at point b
2 and the air A1 ″ on the bypass side of the cleaner are merged to obtain a merged air A3 in the state of the point c. Then, the merged air A3 is heated (reheated) by the air temperature adjuster 21 and c
By adjusting the state of the point to the state of the point d and returning the adjusted air A4 at the point d to the target chamber 1, the indoor humidity of the target chamber 1 with respect to the sensible heat load Q and the humidification load H in the target chamber 1. xa and the room temperature ta are the target values xaa and taa, respectively.
Adjust and maintain.

(M14) As shown in (e) of FIG. 8, the wash water W is heated by the water temperature adjusting means 13 to obtain the water temperature tw.
Is adjusted to tw4 ′ (tw0 <tw4 ′) so that the passing partial air A1 ′ is humidified with a cleaning process.
By adjusting the state of the point to the state of the point b and merging the air A2 after the cleaning processing at the point b and the air A1 ″ on the bypass side of the cleaning device, the combined air A3 in the state of the point c is obtained. Then, the combined air A3 is heated (reheated) by the air temperature regulator 21 to adjust the state of the point c to the state of the point d,
By returning the adjusted air A4 at the point d to the target chamber 1,
With respect to the sensible heat load Q and the humidification load H in the target room 1, the indoor humidity xa and the room temperature ta of the target room 1 are adjusted and maintained at the respective target values xaa and taa.

In this embodiment, as the water temperature adjusting means 13, the wash water W is circulated between the wash water tank 12 and the heat source device 23, and the heat source device 23 directly cools or heats the wash water W. The format is adopted.

When adjusting the room humidity xa and the room temperature ta of the target room 1 by adjusting the water temperature of the wash water W and the air temperature adjustment by the air temperature adjuster 21, the wash water W
Based on the detection information of the water temperature sensor 17 that detects the water temperature tw, the device-side controller 24 automatically adjusts the cooling output or the heating output of the heat source device 23 so that the water temperature tw of the cleaning water W becomes the target temperature tww. , Air A after cleaning treatment
2 based on the detection information of the humidity sensor 25 that detects the absolute humidity xb of 2, the device side controller 24 sets the above-mentioned target temperature in the water temperature adjustment so that the absolute humidity xb of the air A2 after the cleaning process becomes the target value xbb. tww is automatically changed, and based on the detection information of the humidity sensor 26 that detects the indoor humidity xa of the target room 1, the target room side controller 27 sets the indoor humidity xa of the target room 1 to the target value xaa.
As described above, the absolute humidity target value xbb of the post-cleaning air A2 in the device-side controller 24 is automatically changed.

In short, the indoor humidity xa is a control operation in which the target room side controller 27 and the apparatus side controller 24 are combined.
The target temperature tww in the water temperature adjustment is automatically changed (for example, in the example of (M10), tww = tw1 is changed to tww = tw1 + α) so that the target value xaa becomes.

Then, regarding the air temperature adjustment, based on the detection information of the temperature sensor 20 for detecting the indoor temperature ta, the air temperature is controlled by the target room side controller 27 so that the indoor temperature ta becomes the target value taa. The heating output or the cooling output of the adjuster 21 is automatically adjusted (in other words, the adjusted temperature td of the air by the air temperature adjuster 21 is automatically adjusted).

That is, by automatically changing and adjusting the target temperature tww of the water temperature adjustment by the water temperature adjusting means 13 by the target room side controller 27 and the apparatus side controller 24 based on the detection information of the indoor humidity xa, By automatically adjusting the heating output or the cooling output of the air temperature adjuster 21 with the target room side controller 27 based on the detection information of the room temperature ta,
The indoor humidity xa and the indoor temperature ta are adjusted and maintained at the respective target values xaa and taa regardless of the load variation in the room.

[Fourth Embodiment] FIG. 9 shows the cleaning device 2 used in the above-described first to third embodiments, that is, the cleaning water W used for the cleaning process, and the collected cleaning water. With respect to the washer 2 in which the temperature of W is adjusted by the water temperature adjusting means 13 to be reused in the cleaning process involving the humidity adjustment and temperature adjustment of the air, the supply of the fresh cleaning water Ws to the cleaning water circulation system is collected. An example of what was controlled according to the quality of the wash water W is shown.

That is, in the cleaning device 2 shown in FIG. 9, the concentration pw of the collected pollutant component in the stored cleaning water W in the cleaning water tank 12
Is detected by the detecting means 28, and based on the detected concentration pw, the automatic replenishing means 29 controls the replenishment of the fresh washing water Ws from the replenishing water passage 12a to the washing water tank 12.

The automatic replenishing means 29 comprises an automatic valve 30 for opening / closing the replenishing water passage 12a and a valve controller 31 for opening / closing the automatic valve 30. The valve controller 31 is provided with the detecting means 28.
When the detected concentration pw by exceeds the allowable upper limit value, the automatic valve 3
0 is opened to start the replenishment of the fresh wash water Ws, and when a fixed time elapses, or when the amount of replenished water reaches a fixed amount, or again, the detected concentration pw by the detection means 28 is a predetermined value. Automatic valve 30
To close the supply of fresh wash water Ws.

Reference numeral 12b is an overflow pipe of the wash water tank 12.

[Fifth Embodiment] FIG. 10 shows the adjustment of the absorption and removal effect on the gaseous pollutant and the air accompanying the cleaning process in the water circulation type cleaning device 2 as used in the first and second embodiments. An example is shown in which the absolute humidity or temperature of A1 is adjusted independently.

That is, in the cleaning device 2 shown in FIG. 10, the concentration p of the gaseous pollutant component in the air A1 to be cleaned is p.
a and the state value of the air A1 (humidity xa in this example)
Is detected by the detection means 32 and 33, while the control means 34 detects the concentration pa of the gaseous pollutant component.
Based on the above, the amount of cleaning water W to be brought into contact with the air A1 in the cleaning device 2 is automatically adjusted, and the target temperature tww of the water temperature adjustment by the water temperature adjusting means 13 is automatically changed based on the detected state value xa of the air A1. Is done.

Specifically, the control means 34 includes a water amount side controller 35 for adjusting the amount of the washing water W sprinkled from the sprinkling nozzle group 10 by controlling the circulation pump 12p by an inverter, and a water temperature sensor 17. Detection temperature t of cleaning water W
A water temperature side controller 37 (corresponding to the controller 22 described above) that automatically adjusts the cooling output or the heating output of the heat source unit 36 in the water temperature adjusting means 13 so that the water temperature tw of the wash water W becomes the target temperature tww based on w. And the water amount side controller 35 determines that the concentration pa of the gaseous pollutant component in the air A1 is the target value p based on the detected concentration pa of the gaseous pollutant component.
The circulation pump 12p is inverter-controlled to automatically adjust the sprinkling amount of the wash water W so as to be aa.

Further, the water temperature side controller 37 is configured to automatically change the target temperature tww for water temperature adjustment based on the detected state value xa of the air A1 so that the state value xa of the air A1 becomes the target value xaa. .

In other words, regarding the effect of absorbing and removing the gaseous pollutant, the effect necessary for adjusting and maintaining the concentration pa of the gaseous pollutant in the air A1 at the target value paa by adjusting the amount of water sprinkling as described above. The effect of adjusting the absolute humidity and the temperature of the air independently of this is to adjust the state value xa of the air A1 to the target value xaa by adjusting the target temperature tww in the water temperature adjustment as described above. Ensure the effects needed to coordinate and maintain.

In this embodiment, the amount of cleaning water W to be brought into contact with the air A1 in the cleaning device 2 is automatically adjusted based on the detected concentration pa of the gaseous pollutant in the air A1 to be cleaned, and Although the target temperature tww for water temperature adjustment by the water temperature adjusting means 13 is automatically changed based on the detected state value xa of the air A1 to be cleaned, instead of this,
Based on the detected concentration of the gaseous pollutant component in the air after the cleaning process, the amount of the cleaning water W to be brought into contact with the air A1 in the cleaning device 2 is automatically adjusted, and the detected state value of the air after the cleaning process is set. The target temperature tww for the water temperature adjustment by the water temperature adjusting means 13 may be automatically changed based on (humidity or temperature).

[Another Embodiment] Next, another embodiment of the present invention will be listed. (1) Simple cleaning of the indoor humidity xa and the indoor temperature ta in the type as shown in FIG. 6 in which a part of the circulating air A1 that is taken out of the target chamber 1 and returned to the target chamber 1 is washed by the washer 2. As a simple adjusting method, the air temperature adjuster 21 is omitted, and in this equipment configuration, the water temperature adjusting means 1
By adjusting the water temperature tw of the wash water W by 3, the absolute humidity and temperature of the passing air A1 are adjusted to adjust the absolute humidity and temperature of the confluent air A3 to be returned to the target chamber 1. The humidity xa and the temperature ta may be adjusted within the target adjustment range.

(2) The air A1 is brought into contact with the wash water W,
The concrete structure of the cleaning device 2 that removes gaseous pollutants in the air by absorption into the cleaning water W can be modified in various ways, and the air-to-be-cleaned A1 can also be used as the air-water contact method.
On the other hand, instead of spraying or spraying the wash water W, a method of bubbling the air A1 to be washed into the wash water W may be adopted.

(3) As the washing water W, various kinds of water such as tap water, pure water, or an aqueous solution containing an appropriate chemical agent can be used. Further, instead of circulating the cleaning water W, it may be used temporarily.

(4) If the gaseous pollutant to be removed can be removed from the air by being absorbed in the cleaning water W, it can be removed from the air such as ammonia ion, chlorine ion, sodium ion, calcium ion and the like. Not limited to ions, any gaseous component may be used, and for example, an odor component may be used.

(5) In order to adjust the indoor humidity xa or the indoor temperature ta of the target room 1 by adjusting the cleaning water temperature tw by the water temperature adjusting means 13 together with the reduction of the indoor concentration of the gaseous pollutant by the cleaning process, The first embodiment described above shows a mode in which the indoor humidity xa and the room temperature ta of the target room 1 are adjusted by adjusting the cleaning water temperature tw, and the above-described second embodiment.
Through the third embodiment, by adjusting the wash water temperature tw,
Although the room humidity xa of the target room 1 is adjusted and the air temperature adjuster 21 is additionally provided for adjusting the room temperature ta, instead of this, the room temperature of the target room 1 is adjusted by adjusting the cleaning water temperature tw. It is also possible to adjust ta and additionally install a humidity adjuster for the indoor humidity xa.

(6) The specific construction of the water temperature adjusting means 13 for cooling or heating the wash water W to adjust the temperature can be changed in various ways. In order to adjust the indoor humidity xa or the indoor temperature ta, cleaning by heating is possible. If you do not need to adjust the water temperature tw,
Only the cleaning water temperature tw is adjusted by cooling, or when the cleaning water temperature tw is not adjusted by cooling, only the cleaning water temperature tw may be adjusted by heating. In addition, when the cleaning water W is cooled to near 0 ° C. by adjusting the cleaning water temperature tw by cooling, it is preferable to perform appropriate antifreezing control in parallel.

(7) When the air temperature adjusting device 21 is additionally provided, various types of air temperature adjusting device 21 can be adopted, and like the water temperature adjusting means 13, the air temperature adjusting device 2 can be used.
In No. 1 as well, when adjustment of the air temperature by cooling is not necessary for adjustment of the indoor humidity xa or the indoor temperature ta, only air temperature adjustment by heating is performed, or when air temperature adjustment by heating is unnecessary, A device that only adjusts the air temperature by cooling may be adopted.

(8) The target room 1 is not limited to a clean room, and is a room space that requires adjustment of the indoor humidity xa or the indoor temperature ta together with the reduction of the indoor concentration of gaseous pollutant. If so, the room space for various purposes can be set as the target room.

(9) By mixing an aromatic agent into the cleaning water W, the indoor concentration of the gaseous pollutant is reduced by the cleaning process, the indoor humidity xa and the indoor temperature ta are adjusted by adjusting the water temperature, and the scent air conditioning is performed in the room. You may give it.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a first embodiment.

FIG. 2 is a moist air diagram showing an example of temperature and humidity adjustment in the first embodiment.

FIG. 3 is a moist air diagram showing an example of temperature and humidity adjustment in the first embodiment.

FIG. 4 is an equipment configuration diagram showing a second embodiment.

FIG. 5 is a moist air diagram showing an example of temperature and humidity adjustment in the second embodiment.

FIG. 6 is an equipment configuration diagram showing a third embodiment.

FIG. 7 is a moist air diagram showing an example of temperature and humidity adjustment in the third embodiment.

FIG. 8 is a moist air diagram showing an example of temperature and humidity adjustment in the third embodiment.

FIG. 9 is an equipment configuration diagram showing a fourth embodiment.

FIG. 10 is an equipment configuration diagram showing a fifth embodiment.

[Explanation of symbols]

 1 Target room A1 Indoor air 2 Washer W Washing water 13 Water temperature adjusting means xa Indoor humidity ta Indoor temperature 21 Air temperature adjusting device pw Concentration of collected pollutant 28 Detection means Ws Fresh wash water 29 Automatic replenisher pa Pa Gaseous pollutant Concentration in the air xa Air state value (humidity) 32, 33 Detection means 34 Control means tww Target temperature for water temperature adjustment

Claims (6)

[Claims] 1. The indoor air of the target room is guided to a cleaning device, and this air is brought into contact with cleaning water in the cleaning device to remove gaseous pollutants in the air by absorption into the cleaning water, and after this cleaning treatment. Is a method for removing a gaseous pollutant component in which the concentration of a gaseous pollutant component in the room of the target chamber is reduced by returning the air of the step (3) to the target chamber, wherein the cleaning water used for the cleaning process in the cleaning device is adjusted in water temperature. A method for removing gaseous pollutant components, which cools or heats by means to adjust the temperature, and adjusts the water temperature to adjust the indoor humidity or room temperature of the target chamber as the indoor concentration of the gaseous pollutant components is reduced by the cleaning treatment. . 2. The air, which is washed by the washing device and returned to the target chamber, is heated by an air temperature regulator to adjust the temperature,
The method for removing gaseous pollutants according to claim 1, wherein the indoor temperature of the target room is adjusted by adjusting the air temperature and adjusting the indoor humidity by adjusting the water temperature. 3. A part of the circulating air that is taken out of the target chamber and returned to the target chamber is cleaned by the cleaning device, and the circulating air that is returned to the target chamber is provided downstream of the cleaning device. The gaseous pollutant component according to claim 1, wherein the temperature control is performed by heating or cooling with an air temperature controller, and by adjusting the air temperature, the indoor temperature of the target chamber is adjusted together with the indoor humidity adjustment by the water temperature adjustment. Removal method. 4. The cleaning device collects the cleaning water used in the cleaning process, and controls the temperature of the collected cleaning water by the water temperature adjusting means to reuse the cleaning water in the cleaning process.
The method for removing a gaseous pollutant described. 5. The concentration of the collected pollutant component in the collected cleaning water in the cleaning device is detected by a detection means, and based on the detected concentration, the supply of fresh cleaning water to the cleaning water circulation system of the cleaning device is automatically replenished. The method for removing gaseous pollutants according to claim 4, which is controlled by means. 6. The concentration of gaseous pollutants in air,
And the state value of the air is detected by the detection means, and the control means automatically adjusts the amount of cleaning water to be brought into contact with the air in the cleaning device based on the detected concentration of the gaseous pollutant component. The method for removing gaseous pollutant according to claim 1, 2, 3, 4 or 5, wherein the target temperature for water temperature adjustment by the water temperature adjusting means is automatically changed based on the detected air condition value.