KR101754311B1 - Air purifier and humidifier - Google Patents

Abstract

The present invention provides an air purifying and humidifying device capable of providing necessary and sufficient amount of water to be supplied to clean water while obtaining necessary purification performance and required humidifying performance. Liquid contact with the clean water W in the gas-liquid contact chamber 16 removes water-soluble gas components in the processing air OA to purify the processing air OA and also humidifies the processing air OA And a drain amount detecting means (27) for detecting a drain amount Lo of the used clean water (W ') discharged from the gas-liquid contact chamber (16) is provided in the air-cleaning and humidifying device And control means (29) for adjusting the water supply amount Li of the clean water W based on the detection drain amount Lo of the drainage amount detection means 27 to adjust the drain amount Lo to the set drainage amount SLo.

Description

{AIR PURIFIER AND HUMIDIFIER}

The present invention relates to an air purifying humidifying device. This air cleaning and humidifying device is used for adjusting air supplied to a clean room for semiconductor manufacturing.

More specifically, the air cleaning and humidifying device is provided with a gas-liquid contact chamber. In this gas-liquid contact chamber, air to be treated ventilated in the room is brought into gas-liquid contact with clean water.

This gas-liquid contact removes water-soluble gas components in the air to be treated and purifies the air to be treated. Further, the air to be treated is humidified by this air purification.

BACKGROUND ART [0002] Conventionally, as an air purifying and humidifying device of this kind, for example, a circulating water feeding device shown in Figs. 1 and 2 of Patent Document 1 is known.

This recirculating water supply type apparatus is provided with a storage tank for catching used clean water discharged from the gas-liquid contact chamber (that is, clean water absorbing water-soluble gas components contained in the air to be treated) have.

And the purified water withdrawn from the storage tank is circulated and supplied to the gas-liquid contact chamber, so that the supplied clean water and the air to be treated are brought into gas-liquid contact in the gas-liquid contact chamber.

In this apparatus of the circulating water type, a part of the purified water is consumed in the humidification of the air to be treated and disappears into the air to be treated.

Further, a water-soluble gas component absorbed and removed from the air to be treated is carried into the storage tank together with the used purified water.

In this regard, a fresh amount of fresh water is supplied from the clean water supply means to the storage tank.

With this supply, the concentration of the water-soluble gas component circulating and supplied from the storage tank to the gas-liquid contact chamber is maintained at a predetermined value or lower (that is, the cleanliness degree is maintained at a certain level or more).

On the other hand, for example, a device shown in Fig. 4 of Patent Document 1 and a (single) water-feeding type device is also known.

In this apparatus and the water supply type apparatus, fresh fresh water supplied from the clean water supply means is supplied to the gas-liquid contact chamber on a daily basis.

On the other hand, all of the used clean water discharged from the gas-liquid contact chamber is discharged to the outside of the apparatus.

In the case where the purified water supply means purifies raw water to generate purified water, there is also a device for returning the used clean water discharged from the gas-liquid contact chamber to the clean water supply means as a part of raw water and a water supply type.

As to the water supply amount of the clean water to be supplied to the gas-liquid contact chamber, any gas-component removal efficiency required as the purifying performance for removing the water-soluble gas component from the air to be treated The required amount of water required for purification (amount of water required) is taken as the basic quantity.

Then, the water supply amount required for the humidification necessary for humidifying the air to be treated up to a certain humidification condition is added to the necessary water quantity for the purification purpose.

Therefore, when the air to be treated is air having a state change (change in the state of the air before the treatment) such as the outside air, if the required amount for humidification necessary for the humidification changes due to the state change, The required amount of water supplied to the clean water changes by the amount of change in the required amount for humidification.

However, in the conventional air purifying and humidifying device, it is necessary to set a certain large design quantity for humidification in which a sufficient safety rate is expected as the quantity of humidification, and the quantity of the design for humidification is added to the required quantity for cleaning as the basic quantity, .

Then, the constant water amount constant operation is performed to continuously supply the constantly designed water amount of the clean water to the gas-liquid contact chamber continuously.

That is, the adjustment of the water supply amount was not carried out according to the change in the required amount of humidification.

In order to cope with a change in the required amount of humidification due to a change in the state of air to be treated, for example, it is necessary to detect the state of the air before the processing of the air to be treated, It is also conceivable to increase or decrease the amount of water supplied to the gas-liquid contact chamber by the amount of change in the required amount for humidification by the air-liquid contact chamber.

However, in this case, since it is unclear whether or not the gas component has been removed due to the necessary gas component removal efficiency, it is difficult to obtain a control result with a good precision with respect to the gas component removal process.

Therefore, adjustment of the water supply amount based on the detection air condition as described above tends to cause an adjustment error or the like. If there is a temporary shortage of the actual amount of humidification required at each time (point in time) due to the adjustment error, the amount of humidification water in the adjusted water supply becomes temporarily insufficient, A part of the water for purifying water is consumed for humidification of the air to be treated together with the water for humidification.

As a result, the gas component removal efficiency (that is, the purification performance) falls below the required value, resulting in a phenomenon in which the treated air with the required degree of purification can not be obtained.

In order to reliably avoid such a phenomenon, in the air cleaning and humidifying device of this kind, conventionally, the constant water supply amount constant operation is performed in which the above-mentioned clean water of a predetermined designed water supply amount is continuously supplied to the gas-liquid contact chamber.

Japanese Patent Application Laid-Open No. 2000-279741

However, in the constant water supply operation described above, since the clean water having an excessively designed water supply amount is continuously supplied to the gas-liquid contact chamber, in the circulating water supply type apparatus, the pump power for sending the circulating clean water from the reservoir tank to the gas- There has been a problem of increasing the size.

In addition, in the apparatus for daily water supply, since all of the used fresh water discharged from the gas-liquid contact chamber is discharged to the outside of the apparatus, not only the pump power for supplying fresh fresh water to the gas-liquid contact chamber is increased, The amount of fresh fresh water such as pure water is increased, thereby increasing the operation cost.

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a main object of the present invention is to provide an apparatus and a method for adjusting the amount of water supplied to a gas-liquid contact chamber, And it is an object of the present invention to provide an air cleaning and humidifying device capable of effectively reducing the operation cost by making it possible to make a necessary and sufficient amount of required gas component removal efficiency.

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In order to constitute the air purifying and humidifying device as described above, as a first reference configuration of the present invention,
And a gas-liquid contact chamber for bringing the object air to be ventilated into the room into contact with clean water in a room,
An air purifying and humidifying device for purifying the air to be treated by removing an aqueous gas component in the air to be treated by the gas-liquid contact with the clean water in the gas-liquid contact chamber,
And drainage amount detecting means for detecting a drainage amount of the used purified water discharged from the gas-liquid contact chamber,
And a control means for adjusting the water supply amount of the clean water to the gas-liquid contact chamber on the basis of the detected water discharge amount of the water discharge amount detection means and adjusting the water discharge amount to the set water discharge amount.
That is, when the quality of the purified water supplied to the gas-liquid contact chamber is the same, the gas-component removal efficiency of this type of air-cleaning and humidifying device is such that the quantity of water, which contributes to the purification of the air to be treated, (I.e., the L / G value).

However, in this type of air purifying humidifying device, if there occurs a state in which the water amount for humidification in the water supply amount to the gas-liquid contact chamber becomes insufficient for the actual humidification required quantity at each time point as described above, The amount of water contributing to the purification of the air to be treated is supplemented from the water quantity for purification in the water supply amount.

On the contrary, when a state in which the amount of water for humidification in the water supply amount becomes excessive with respect to the actual water amount for humidification at each time point is generated, the excess amount contributes to the purification of the air to be treated together with the water amount for purification in the water supply amount, Lt; / RTI >

That is, under a constant water feed rate, if the required amount of humidification varies depending on the state of the air to be treated or the like, the quantity of water to be humidified by the air to be treated in the water supply amount is preferentially The amount of water supplied to the purification of the air to be treated (that is, the quantity discharged from the gas-liquid contact chamber after contributing to the purification) changes without being consumed in the humidification of the water supply amount.

On the other hand, in the air cleaning and humidifying device of the first reference construction, the water supply amount is adjusted based on the detected water discharge amount to adjust the water discharge amount to the set water discharge amount, Set quantity such as quantity.

As a result, according to the air purification and humidification device of the first reference configuration, the amount of water used for humidification in the water supply amount is adjusted in priority to the required quantity for the humidification after the change according to the change in the required water amount for humidification, It is possible to maintain the quantity of water which contributes to the purification of the air to be treated (that is, the quantity which becomes the displacement quantity from the gas-liquid contact chamber) to the required quantity for the purification set as the set displacement quantity.

As a result, the gas component removal efficiency (purification performance) can be maintained at a desired value regardless of whether the required amount for humidification changes due to a change in the air condition to be treated or the like, have. With regard to the humidifying performance, the amount of water consumed for humidification is maintained by preferentially self-adjusting to the change in the required amount for humidification as described above.

In addition, the detection of the amount of displacement compared with the detection of the air condition, such as humidity or temperature, generally has high reliability in terms of detection accuracy and does not easily cause a detection error. Therefore, by adjusting the water supply amount based on the above-described detection displacement, it is also possible to cause the phenomenon that the gas component removal efficiency is lower than the required value due to a problem in the adjustment of the water supply amount based on the above-described detected air condition, It can be surely avoided.

From these, it can be seen from the above that, according to the air purification and humidification device of the first reference configuration, even when the necessary purification performance and necessary humidification performance are securely and stably obtained, the water supply amount constant operation for continuously supplying the excessively designed water supply amount of clean water to the gas- The water supply amount of the clean water to the gas-liquid contact chamber can be effectively reduced to a necessary and sufficient amount with respect to the required gas component removal efficiency, whereby the operation cost of the apparatus can be effectively reduced.

As the set drainage amount, it is preferable to set a certain amount of water somewhat larger than the necessary amount for purification in anticipation of a somewhat safe rate. However, even in this case, the operation cost can be greatly reduced as compared with the conventional apparatus that performs constant water supply operation.

Further, in order to maintain the required cleaning performance and necessary humidification performance for the required amount of humidification to change due to changes in the air condition to be treated, etc., the following water amount adjustment may be considered.

That is, when the amount of water to be supplied to purify the air to be treated in the water supply becomes excessive or small due to the change in the required amount for humidification, the concentration of the water-soluble gas component (that is, the concentration of the absorbed gas component) of the used clean water discharged from the gas- do. Therefore, it is conceivable to detect the gas component concentration of the discharge purified water from the gas-liquid contact chamber and automatically adjust the water supply amount of the clean water to the gas-liquid contact chamber so that the gas component concentration of the discharge clean water is maintained at the set concentration based on the detected concentration have.

However, in the detection of the concentration of the underwater gas component, the reliability in terms of detection accuracy is low, so that a detection error tends to occur. Therefore, in the adjustment of the water supply amount based on the detected gas component concentration, It is liable to cause a phenomenon that the required value is lowered.

In this regard, according to the air cleaning and humidifying device of the first reference construction for adjusting the water supply amount based on the detected displacement, as described above, it is possible to more reliably avoid occurrence of such a phenomenon, It is possible to reliably and stably obtain necessary purification performance and required humidification performance while effectively reducing the amount of water supplied to the clean water.

Here, the gas component removal efficiency? Described here is represented by the following equation.

     ? = (Cai-Cao) / Cai

 Cai: concentration of water-soluble gas component in the air to be treated before treatment

     Cao: concentration of water-soluble gas component in the air to be treated after treatment

In the implementation of the first reference configuration, the contact between the clean water and the air to be treated is performed in such a manner that the clean water flows in the gas-liquid contact chamber to the surface of the falling member and flows down in a water film state Or a method of supplying purified water to an air-permeable member having a water-containing or wetting property disposed in a gas-liquid contact chamber, a method of spraying clean water in a gas-liquid contact chamber at a high density, Various contact methods such as a combination method can be adopted.

The clean water used (fresh clean water supplied to the circulation in the circulating water system, fresh clean water supplied to the gas-liquid contact chamber in the daily water system) can be treated with pure water or purified water purified by a filter If it can be maintained, various kinds of clean water can be used. Further, various aqueous solutions to which chemicals are added as the clean water may be used.

The air cleaning and humidifying device of the first reference structure is particularly effective when the air to be treated is air whose air condition before the treatment such as outside air changes instantaneously. However, the air to be treated may be air that does not normally change, or does not change much, before the treatment, and even in this case, it is effective in terms of preparation for the change of the air condition to be treated for any reason.

The cause of the change in the required amount of humidification is not limited to the change in the state of the air to be treated but may be a change in the required amount for humidification due to other causes. The required purifying performance can be stably maintained.
As a second reference configuration of the present invention for constituting an air cleaning and humidifying device,
And air volume detecting means for detecting a ventilation amount of air to be treated with respect to the gas-liquid contact chamber,

The control means may change the set drain amount based on the detected ventilation amount of the air volume detecting means.

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That is, as described above, the gas component removal efficiency (purification performance) is the ratio of the quantity of water to be treated (that is, the quantity of water to be discharged) to the air volume of the air to be treated / G value. Therefore, when the amount of ventilation of the air to be treated (that is, the air flow rate of the processing air) to the gas-liquid contact chamber changes, the required amount for humidification required to humidify the air to be treated in a constant humidification state varies proportionally In addition, the required amount of purification required to obtain the required gas component removal efficiency (purification performance) also varies with a constant correlation.

On the other hand, according to the second reference configuration, when the set drainage amount is changed on the basis of the detected ventilation amount, on the basis of a constant correlation existing between the ventilation amount of the air to be treated and the necessary amount for purification, A quantity equal to the required quantity for the purification corresponding to the amount of ventilation of the air (a quantity in which a degree of safety is expected in actuality to some extent) can be set as the set displacement

As described above, the amount of water to be humidified by the air to be treated in the water supply amount is changed in proportion to the required amount for humidification at each time point (that is, proportional to the change in ventilation amount) (The amount of water to be discharged) contributing to the purification of the air to be treated in the water supply amount, the amount required for purification at each point of time That is, the necessary quantity for the purification which changes with a certain correlation according to the change in the ventilation amount).

As a result, the gas component removal efficiency (purification performance) can be maintained at a desired value regardless of the change in the amount of ventilation of the air to be treated, so that the degree of purification of the treated air can be maintained at a required degree of purification, .

As described above, the gas component concentration (absorbing gas component concentration) of the discharged clean water from the gas-liquid contact chamber is detected, and based on the detected concentration, the gas component concentration of the discharged clean water is maintained at the set concentration, In the case of adjusting the water supply amount of the clean water, the gas component removal efficiency (purification performance) can be maintained at a desired value and the necessary humidification performance can be maintained even with respect to the change in the ventilation amount of the air to be treated.

However, as described above, the detection of the concentration of the underwater gas component is generally low in reliability in terms of detection accuracy, and thus, a detection error is likely to occur.

However, according to the above configuration in which the set drainage amount is changed based on the detected ventilation amount, since the reliability of the ventilation amount detection is high and the adjustment error does not easily occur, Can be avoided more reliably.
Here, the first characteristic configuration of the present invention relating to the air-
And a gas-liquid contact chamber for bringing the object air to be ventilated into the room into gas-liquid contact with clean water in the room,
An air purifying and humidifying device for purifying the air to be treated by removing an aqueous gas component in the air to be treated by the gas-liquid contact with the clean water in the gas-liquid contact chamber,
And fresh fresh water supplied from the clean water supply means is temporarily and uniformly supplied to the gas-liquid contact chamber as clean water to be supplied to the gas-liquid contact chamber,
Liquid contact chamber is discharged from the gas-liquid contact chamber. When the amount of the purified water to be supplied to the gas-liquid contact chamber is constant, the amount of water required for humidification And a drainage flowmeter for detecting a drainage amount of the used purified water discharged from the gas-liquid contact chamber in a drainage passage in which the drainage amount is changed,
And a water feed flow rate adjusting valve for adjusting the water feed amount of the clean water to the gas-liquid contact chamber,
And a control means for adjusting the water supply flow rate adjusting valve based on the detected water discharge amount of the drainage flow meter to adjust the water discharge amount to a set water discharge amount,
Wherein the set drainage amount is set to a quantity equal to the required quantity for the purification required for obtaining a predetermined gas component removal efficiency in purifying the air to be treated.
That is, the operation of continuously supplying fresh fresh water to the gas-liquid contact chamber continuously and the water-cleaning type air humidification device of a water supply type can generally obtain a higher gas component removal efficiency than that of the circulating water supply type.
According to the first characteristic configuration described above, basically, the same operational effects as those of the first reference configuration can be obtained, and the required gas component removal efficiency can be stably maintained even with respect to the state change of the air to be treated have.

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According to the first characterizing feature of the present invention, the air purifying and humidifying device of the daily water supply type is applied to the air purifying and humidifying device so that the required purifying degree of the treated air can do.
A second characterizing feature of the present invention relating to the air purifying humidifier includes:
And air volume detecting means for detecting a ventilation amount of air to be treated with respect to the gas-liquid contact chamber,
The control means changes the set displacement amount in proportion to the change in the detected ventilation amount based on the detected ventilation amount of the air volume detection means.
This second characteristic configuration is substantially the same as the second reference configuration, and the same operational effects as those of the second reference configuration can be obtained.
A third characterizing feature of the present invention relating to the air cleaning /
The fresh water supply means is configured to generate fresh clean water to be supplied to the gas-liquid contact chamber by purifying raw water,
And a part of the used clean water discharged from the gas-liquid contact chamber is returned to the clean water supplying means as a part of the raw water.
A fifth characterizing feature of the present invention relating to the air purifying humidifier includes:
Wherein the gas-liquid contact chamber is provided with a flow-down medium arranged transversely with respect to a transverse ventilation path of air, and a water supply header for dropping clean water from above on the flow-down medium,
The flow-down medium includes a corrugated sheet-like member having an attitude along the transverse direction of the air in a longitudinal posture in which a plurality of inclined wave parts are formed, And the inclined direction of the inclined wave portion is reversed for each adjacent wave plate-like member.
That is, according to the fifth characterizing feature, the ventilation air and the clean water can be efficiently brought into gas-liquid contact, and high performance can be obtained for each of the air cleaning performance and the air humidifying performance.
A sixth characterizing feature of the present invention relating to the air cleaning /

The two water dropping media are arranged in the state of being arranged close to the lateral direction airflow direction of the air, and the water supply header is disposed above the minute gap between the two run-down media .

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1 is a view showing an air conditioning system for a clean room.
2 is a diagram showing a configuration of an external apparatus (an external apparatus).
3 is a perspective view showing a gas-liquid contact portion.
4 is an explanatory view of the material balance in the gas-liquid contact portion.

1 shows an air conditioning system of a clean room. As shown in Fig. 1, a fan filter unit 2 is arranged in a matrix arrangement on the entire surface of a ceiling portion of a target room 1 as a clean room.

The air conditioning air SA supplied to the ceiling chamber 4 by the air supply fan Fs through the air supply path 3 is purified by the high performance filter 2a equipped in each fan filter unit 2, The purified air for air conditioning SA is fed to the respective fan filter units 2 in a downward direction by a fan 2b of the equipment and supplied. Thereby, the room of the target room 1 is adjusted and maintained in a required degree of heat and humidity to a necessary degree of cleanliness.

The lower part of the bottom of the target chamber 1 is connected to the bottom of the chamber 1 for receiving the air RA discharged from the room through the lattice floor 5 in accordance with the indoor supply of the air for purification and air conditioning SA by the fan filter unit 2 (6).

An air conditioner 7 (air conditioner for outdoor air conditioning) and an air conditioner 8 are provided to generate the air conditioning air SA. That is, the outside air OA guided through the outside air introduction path 9 by the outside air fan Fo is adjusted by the outside air generator 7, and the conditioned outside air OAs in the outside air generator 7 is supplied to the air conditioner (8).

 Further, a part of the exhaust air RA received in the lower floor chamber 6 is guided to the air conditioner 8 through the ventilation path 11 by the ventilation fan Fr as the ventilation air RAs.

The mixed air of the conditioned outside air OAS and the ventilation air RAs is adjusted in the air conditioner 8 to adjust the temperature and humidity and the conditioned air in the air conditioner 8 is supplied to the target room 1 to the ceiling chamber 4 of the apparatus.

The remaining amount of the exhaust air RA received in the bottom chamber 6 (the amount of exhaust air RA equal to the amount of outside air OA from the outside air introduction path 9) is supplied to the exhaust fan Fe through the exhaust path 12 To the outside.

2, a filter 13, a pre-heater 14, an air cooler 15, a gas-liquid contactor (not shown), and a gas-liquid contactor (not shown) are arranged in this order from the upstream side in the ventilation direction of the outside air OA 16, a cooler 17, and a reheater 18.

That is, in the outer furnace 7, as the adjustment process of the outside air OA, the outside air OA guided through the outside air introducing path 9 is removed by the filter 13, and the thus- And the preheated or precooled outside air OA is sent to the gas-liquid contactor 16 as an air-cleaning and humidifying device through the gas-liquid contactor 16 with the clean water W And also humidifies to near saturation according to the purification.

Then, the outside air OA cleaned and humidified by the gas-liquid contactor 16 is cooled to a predetermined temperature by the cooler 17 to cool and dehumidify the outside air OA to a predetermined absolute humidity, The air is reheated to a predetermined temperature by the heat exchanger 18, and the purified outdoor air OA is supplied to the air conditioner 8 through the relay furnace 10 as the conditioned outdoor air OAs.

As shown in Fig. 3, the gas-liquid contactor 16 is provided with a flow-down medium 19 arranged transversely to the ventilation path of the outside air OA in the outer vessel 7, A water supply header 20 provided with a plurality of drop ports 20a for dropping the clean water W and a drain fan 21 for catching the clean water W 'flowing down the down streaming medium 19.
As shown in Fig. 3, the flow-down medium 19 has a plurality of oblique wave portions 22a formed in a vertical posture and viewed from a plane in a wavy plate-shaped member 22 having an attitude along the lateral direction airflow direction of the outside air OA (In the ridge direction) of the oblique wave portion 22a for each of the adjacent wavy plate-like members 22 is set to be smaller than that of the oblique wave portion 22a Inversion.

In addition, the two water dropping media 19 are arranged in the state of being close to each other in the lateral direction ventilation direction of the outside air OA, and the water supply header 20 is disposed above the small gap between the two flowing mediums 19 Respectively.

That is, in the gas-liquid contactor 16, the clean water W is dropped from the drop inlet 20a of the water supply header 20 into the down streaming medium 19, To be transferred to the surface of each of the wobble plate-shaped members 22 and to flow down in the water film state.

 As a result, the inside of the apparatus, which is the arrangement space of the flow-down medium 19, is used as the gas-liquid contact chamber, and the water film state (in the process of flowing the outside air OA as the processing air passing through the gap between the crush plate members 22) Liquid contact with the clean water W. By this gas-liquid contact, the water-soluble gas component contained in the outside air OA is removed to purify the outside air OA, and the outside air OA is also humidified to near the saturated state.

The purified water W to be dropped and supplied to the down streaming medium 19 from the downflow header 20 is purified water supplied from the pure water generator 23 as clean water supply means through the water feed path 24 via the feed water pump Pw as pure fresh water W is supplied to the gas-liquid contactor 16 on a routine basis.

The clean water W '(that is, the used purified water that has absorbed the gas component) flowing down from the flowing medium 19 caught by the drain pan 21 is discharged to the outside through the drainage path 25. That is, the gas-liquid contactor 16 is of a water-supply type.

The water supply passage 24 from the pure water generator 23 is provided with a water supply flow rate adjusting valve 26 for adjusting the water supply amount Li of fresh fresh water W (pure water) to the gas-liquid contactor 16, Is equipped with a drainage flow meter 27 serving as drainage amount detection means for detecting the drainage amount Lo of the used purified water W '(spent pure water) discharged from the gas-liquid contactor 16.

The amount of ventilation Gi of the outside air OA in the outside air pre-heater 7 is changed by the reason that the air volume of the adjusting outside air OAs supplied from the outside air oven 7 to the air conditioner 8 is changed in accordance with the use situation of the target room 1, (In other words, the amount of ventilation of the outside air OA in the gas-liquid contactor 16) changes. On the other hand, the air conditioner 28 as air volume detecting means for detecting the ventilation amount Gi of the outside air OA is equipped in the outer furnace 7.

Fresh fresh water W (pure water) is supplied to the gas-liquid contactor 16 based on the detected drain amount Lo by the drainage flow meter 27 and the detected ventilation amount Gi by the air flow meter 28, A water supply controller 29 is provided as a control means for automatically adjusting the water supply amount Li of the water supply system.

Fig. 4 shows the mass balance in the gas-liquid contactor 16. Fig. Each symbol in FIG. 4 represents the following various values.

Li: Water quantity of purified water W

Lo: Discharge of used clean water W '

Lh: Amount of humidification of outside air OAs after treatment for outside air OA before treatment

Gi: Ventilation of outside air OA

Cwi: water-soluble gas component concentration of the supply clean water W (? 0)

Cwo: Water-soluble gas component concentration of the used clean water W '

Cai: concentration of water-soluble gas component of outside air OA before treatment

Cao: concentration of water-soluble gas component in the outside air OAs after treatment

Here, in consideration of the material balance in the gas-liquid contactor 16, the amount of material on the water side and on the air side entering the gas-liquid contactor 16 is the same as the amount of material on the water side and air side from the gas-liquid contact chamber 16 The following equation (1) is established.

Li x Cwi + Gi x Cai = Lo x Cwo + Gi x Cao + Lh x Cwi ... (Equation 1)

In addition, since the amount of water supplied by reducing the amount of humidification Lh from the water supply amount Li becomes the displacement amount Lo, the following equation (2) is established.

Li = Lh + Lo ... (Equation 2)

Then, by substituting (Equation 2) into (Equation 1) and summarizing (Equation 1), the following Equation 3 can be obtained.

Lo × (Cwi-Cwo) = Gi × (Cao-Cai) ... (Equation 3)

On the other hand, the gas component removal efficiency? Indicating the purifying performance for the outside air OA of the gas-liquid contactor 16 is expressed by the following equation (4).

? = (Cai-Cao) / Cai ... (Equation 4)

Substituting (Equation 3) into (Equation 4), the gas component removal efficiency? Is expressed by the following (Equation 5).

? = (Lo / Gi) x ((Cwi-Cwo) / Cai) (Equation 5)

The water-soluble gas component concentration Cwo of the used clean water W 'in the formula (5) is calculated by the following equation: Cwo is the balance between the water-soluble gas component and water and the ratio of the displacement amount L of the used clean water W' Lo / Gi). When the ratio Lo / Gi becomes larger (that is, when the amount of outside air ventilation Gi is constant, the amount of drain Lo becomes larger), the water-soluble gas component concentration Cwo of the used clean water W 'becomes smaller and the gas component removal efficiency? (Linear) relationship.

Therefore, the factor that governs the gas component removal efficiency? In Equation (5) is that the water-soluble gas component concentration Cai of the outside air OA before the treatment fixed as the inlet condition of air and water and the water- ), It is Lo / Gi.

That is, the gas component removal efficiency? Indicating the purifying performance is determined by the purifying of the outside air OA among the water supply amount Li to the gas-liquid contactor 16 when the water quality of the clean water W supplied to the gas-liquid contactor 16 is the same (i.e., Cwi = Which is the ratio of the quantity of the air OA to the quantity of the outside air OA (= quantity equal to the displacement amount Lo) and the air flow rate of the outside air OA (= the air flow rate Gi).

On the other hand, in this kind of gas-liquid contactor 16, the necessary quantity Lj for purification necessary for obtaining the required gas component removal efficiency? With respect to the outside air OA having the predetermined ventilation amount Gi is set as the basic quantity, (Lj + Lh) to which the required amount Lh for humidification necessary for humidifying the outside air OA of the outside air OA to the constant humidification state is required to be the water supply amount Li.

Therefore, when the water supply amount Li is sufficient, in the gas-liquid contactor 16 of this type, the outside air OA is stably humidified to a substantially constant saturation state neighborhood humidity (for example, relative humidity of 95%) irrespective of the state before the treatment of the outside air OA .

This is because, when the required amount Lh for humidification changes in accordance with the change in the outside air OA state before the processing, etc., under the constant water supply amount Li, the quantity of water consumed for humidification of the outside air OA in the water supply amount Li is equal to the actual necessary humidification quantity Lh (That is, the amount of drain Lo discharged from the gas-liquid contactor 16 after contributing to the purification) which is not consumed in the humidification of the water supply amount Li but contributes to the purification of the outside air OA is changed, (Lo < Lj) or excess (Lo > Lj) in which the quantity (= Lo)

With respect to this, the above-mentioned water supply controller 29 is configured to execute the following (a) and (b) as the adjustment of the water supply amount accordingly.

(A) The water supply flow rate regulating valve 26 is adjusted based on the detection drain amount Lo by the drainage flow meter 27, so that the use amount of the used clean water W '(spent pure water) discharged from the gas-liquid contactor 16 Adjust the drain amount Lo to the set drain amount SLo.

(B) The set drain amount SLo is changed in accordance with the detected ventilation amount Gi by the air flow meter 28. [ More specifically, the set drainage amount SLo is set as the reference water quantity Lj for purification for the outside air ventilation volume Gi at each time point, and the water quantity SLo is set as the expected water amount for the reference water quantity, if necessary.

Here, the necessary purifying quantity Lj for the outside air ventilation quantity Gi at each time point (time point) is calculated by L / G (a constant that is different from the device specific contact coefficient and the demand removal efficiency eta etc.) And the feed controller 29 determines the set displacement SLo at each point of time based on the correlation data 30 as shown in Fig.

That is, regardless of whether the required quantity Lh for humidification or the necessary quantity Lj for purification is changed due to the change in the outside air OA state or the change in the air volume, the quantity of water consumed in humidification in the water supply quantity Li, (That is, a quantity equal to the amount of water Lo), which is contributed to the purification of the outside air OA among the water supply amount Li by the water supply amount control of (a) and (b) Is adjusted and maintained in the same quantity as the required amount Lj for purification at each time point. As a result, the required cleaning performance for the outside air OA and necessary humidifying performance can be stably obtained while minimizing the water supply amount Li of fresh fresh water W to the gas-liquid contactor 16 as much as possible.

[Other Embodiments]

Other embodiments of the present invention will be described next.

In the above-described embodiment, the water supply amount control for adjusting the water supply amount Li so that the drain amount Lo becomes the set drainage amount SLo is applied to the air purifying and humidifying device of the work water supply type. However, as a reference example, It may be applied to an air purifying and humidifying device.

The air purifying and humidifying device according to the present invention is not limited to the use form incorporated in the outer furnace 7 as shown in the above embodiment, In some cases, various forms of use can be employed, such as a mode of use in which the device is not used in combination with a cooler, a heater, or the like.

When the set drainage amount SLo is changed in accordance with the ventilation amount Gi of the air OA to be treated, the ventilation amount detection means is not limited to various air flow meters. For example, the ventilation amount Gi may be recognized based on a change command of the ventilation amount Gi , And a detection method in which a detection method is used.

The air OA to be treated is not limited to the outside air, but it is necessary to perform the purification treatment by humidification such as the air circulating in the clean room or the air required for the humidification treatment such as the exhaust air from various facilities for the purpose of using the recycle Any air can be used.

The air cleaning and humidifying device according to the present invention can be used in various fields requiring air purification and humidification, and in various fields requiring purification treatment of air with humidification.

OA: Air to be treated
W: Clean water
16: gas-liquid contact chamber
W': Used purified water
Lo: Displacement
27:
Li: water quantity
SLo: Set displacement
29: Control means
Gi: Ventilation rate
28: air volume detecting means
23: Clean water supply means
19: Flowing media
20: Water supply header
22a: inclined wave
22: wave plate member

Claims (6)

And a gas-liquid contact chamber for bringing the object air to be ventilated into the room into contact with clean water in a room,
An air purifying and humidifying device for purifying the air to be treated by removing an aqueous gas component in the air to be treated by the gas-liquid contact with the clean water in the gas-liquid contact chamber and for humidifying the air to be treated ,
And fresh fresh water supplied from the clean water supply means is temporarily and uniformly supplied to the gas-liquid contact chamber as clean water to be supplied to the gas-liquid contact chamber,
Liquid contact chamber is discharged from the gas-liquid contact chamber. When the amount of the purified water to be supplied to the gas-liquid contact chamber is constant, the amount of water required for humidification And a drainage flowmeter for detecting a drainage amount of the used purified water discharged from the gas-liquid contact chamber in a drainage passage in which the drainage amount is changed,
And a water feed flow rate adjusting valve for adjusting the water feed amount of the clean water to the gas-liquid contact chamber,
And a control means for adjusting the water supply flow rate adjusting valve based on the detected water discharge amount of the drainage flow meter to adjust the water discharge amount to a set water discharge amount,
Wherein the set amount of drainage is set to a quantity equal to the required quantity for the purification required to obtain a predetermined gas component removal efficiency in purifying the air to be treated. The method according to claim 1,
And air volume detecting means for detecting a ventilation amount of air to be treated with respect to the gas-liquid contact chamber,
Wherein the control means changes the set displacement amount in proportion to a change in the detected ventilation amount based on the detected ventilation amount of the air volume detection means. 3. The method according to claim 1 or 2,
The fresh water supply means is configured to generate fresh clean water to be supplied to the gas-liquid contact chamber by purifying raw water,
And a part of the used clean water discharged from the gas-liquid contact chamber is returned to the clean water supplying means as a part of the raw water. delete 3. The method according to claim 1 or 2,
Wherein the gas-liquid contact chamber is provided with a flow-down medium arranged transversely with respect to a transverse ventilation path of air, and a water supply header for dropping clean water from above on the flow-down medium,
The flow-down medium includes a corrugated sheet-like member having an attitude along the transverse direction of the air in a longitudinal posture in which a plurality of inclined wave parts are formed, And the inclined direction of the inclined wave portion is inverted for each adjacent wave-like member. 6. The method of claim 5,
The two water dropping media are arranged in the state of being arranged close to the transverse airflow direction of the air, and the water supply header is arranged in a position above the micro gap between the two downflow media, Humidifying device.

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