KR20130122519A - Air purifier and humidifier - Google Patents

Abstract

This invention provides the air purification humidification apparatus which can make the water supply amount of clean water into the required and sufficient quantity with respect to the required gas component removal efficiency, while obtaining the required purification performance and the required humidification performance. The gas-liquid contact with the clean water W in the gas-liquid contact chamber 16 removes the water-soluble gas component in the air OA to be treated to purify the air OA to be treated, and further humidifies the air OA to be treated. Iii) An air purifying humidification apparatus comprising: a drainage detecting means 27 for detecting a drainage amount Lo of used clean water W 'discharged from the gas-liquid contacting chamber 16, The control means 29 is provided to adjust the water supply amount Li of the clean water W based on the detected discharge amount Lo of the discharge amount detecting means 27 to adjust the discharge amount Lo to the set discharge amount SLo.

Description

Air purification humidification device {AIR PURIFIER AND HUMIDIFIER}

TECHNICAL FIELD This invention relates to an air purification humidification apparatus. This air purification humidification apparatus is used for adjustment of the air supplied to the clean room for semiconductor manufacture.

In more detail, this air purification humidification apparatus is provided with the gas-liquid contact chamber. In this gas-liquid contacting chamber, air to be treated that is ventilated indoors is brought into gas-liquid contact with clean water.

By this gas-liquid contact, the water-soluble gas component in air to be processed is removed, and the air to be treated is purified. In addition, the air to be treated is humidified by this air purification.

Conventionally, the circulation water supply type apparatus shown by FIG. 1, FIG. 2 of patent document 1 is known as this kind of air purification humidification apparatus.

This circulating water-type apparatus is provided with the storage tank which catches used clean water discharged | emitted from a gas-liquid contact chamber (namely, clean water which absorbed the water-soluble gas component contained in the process target air), have.

By circulating and supplying the clean water extracted from this storage tank to a gas-liquid contact chamber, this supplied clean water and a process object air are made to gas-liquid contact in a gas-liquid contact chamber.

In this circulation water type device, part of the clean water is consumed for humidifying the air to be treated and disappears into the air to be treated.

In addition, the water-soluble gas component absorbed and removed from the air to be treated is carried into the storage tank together with the used clean water.

On the contrary, fresh clean water of a required amount is supplied to the storage tank from the clean water supply means.

By this replenishment, the concentration of the water-soluble gas component of the clean water circulated and supplied from the storage tank to the gas-liquid contact chamber is maintained at a predetermined value or lower (that is, maintained at a predetermined or higher cleanness).

On the other hand, the daily water supply type apparatus shown by FIG. 4 of following patent document 1 is also known.

In this work and water supply device, fresh clean water supplied from the clean water supply means is supplied to the gas-liquid contacting chamber routinely.

In contrast, all of the used clean water discharged from the gas-liquid contact chamber is discharged out of the apparatus.

And when the clean water supply means purifies raw water and produces | generates clean water, there exists also the apparatus of returning to the clean water supply means using the used clean water discharged from a gas-liquid contact chamber as a part of raw water, and a water supply type apparatus.

By the way, even if it is any air purification humidification apparatus of these circulation water supply type | work and a daily water supply type | formula, about the water supply amount of the clean water supplied to a gas-liquid contact chamber, the gas component removal efficiency required as a purification performance which removes a water-soluble gas component from the process target air is The necessary quantity for purification necessary to obtain is taken as a basic quantity.

Then, the required amount for humidification necessary for humidifying the air to be treated to a constant humidification state is a necessary amount of water plus the required amount for purification.

Therefore, in the case where the air to be treated is air with a change of state (change of air state before treatment) such as outside air, if the required amount for humidification necessary for the humidification changes due to the change of state, the gas-liquid contact chamber The amount of water needed for clean water also changes by the amount of water required for humidification.

However, in the conventional air purifying humidification apparatus, the constant large humidification design quantity which anticipated sufficient safety factor as the quantity for humidification is set, and the quantity which added this humidification design quantity to the required quantity for purification as a basic quantity as a design water quantity is designed water quantity. Was doing.

And the water supply amount constant operation which continuously supplies the clean water of this fixed design water supply amount to a gas-liquid contact chamber was performed.

That is, adjusting the water supply amount according to the change of the required amount for humidification was not performed.

In addition, in order to respond to the change in the required amount of humidification due to the change in the air state to be treated, for example, the air state before the processing of the air to be processed is detected, and the change in the air state to be processed is based on the detected air state. It is also conceivable to increase or decrease the water supply amount of the clean water to the gas-liquid contacting chamber by the amount of change in the required amount for humidification.

In this case, however, it is not clear whether or not the gas component has been removed at the required gas component removal efficiency, so that it is difficult to obtain a control result with good precision with respect to the gas component removal process.

Therefore, in the water supply amount adjustment based on the detected air state as described above, an adjustment error and the like tend to occur. Due to this adjustment error, if a condition in which the water supply for humidification of the adjustment water supply temporarily becomes insufficient for the actual amount of humidification required at each time point occurs, the shortage is used for purification of the adjustment water supply. It becomes the state which is replenished from water supply part, and a part of water purification part for purification is consumed for the humidification of the process object air with humidification water supply part.

As a result, the gas component removal efficiency (ie, the purification performance) is lower than the required value, resulting in a phenomenon that the treated air having the required degree of purification cannot be obtained.

In order to reliably avoid such a phenomenon, this kind of air purification humidification apparatus has conventionally performed the water supply amount constant operation which continuously supplies the clean water of the excessive constant design water supply amount to a gas-liquid contact chamber as mentioned above.

Japanese Patent Application Laid-Open No. 2000-279741

However, in the above water supply constant operation, since the clean water having an excessive design water supply is continuously supplied to the gas-liquid contact chamber, the pump power for sending the circulating clean water from the storage tank to the gas-liquid contact chamber is increased in the circulating water supply type, and the operating cost is increased. There was a growing problem.

In addition, since the used clean water discharges all used clean water discharged from the gas-liquid contact chamber out of the apparatus, the pump power for supplying fresh clean water to the gas-liquid contact chamber is increased, and the pure water supplied to the gas-liquid contact chamber ( The consumption amount of fresh clean water, such as water, has become large, and there existed a problem which operating cost became large by this.

In order to solve the problems as described above, the main problem of the present invention is to provide a water supply amount of clean water to the gas-liquid contact chamber while reliably and stably obtaining necessary purification performance and necessary humidification performance by performing rational water supply adjustment. It is an object of the present invention to provide an air purifying humidification apparatus capable of making it necessary and sufficient for the required gas component removal efficiency, thereby effectively reducing the running cost.

The 1st characteristic structure of this invention which concerns on an air purification humidification apparatus is

A gas-liquid contact chamber for gas-treating contacting the air to be treated to the room with clean water in a room,

As an air purifying humidification apparatus which purifies the process object by removing the water-soluble gas component in the process target air by gas-liquid contact with the clean water in this gas-liquid contact chamber,

Drainage detection means for detecting the drainage amount of the used clean water discharged from said gas-liquid contact chamber, and

And a control means for adjusting the water supply amount of the clean water to the gas-liquid contacting chamber based on the detected drainage amount of the water discharge amount detecting means to adjust the drainage amount to the set drainage amount.

That is, the gas component removal efficiency of this kind of air purifying humidifier is equal to the water quality of the clean water supplied to the gas-liquid contact chamber, and the quantity of water that contributes to the purification of the air to be treated and the air volume of the object to be treated in the water supply to the gas-liquid contact chamber. It is known that it is decided according to ratio (i.e., L / G value) of and.

However, in this type of air purifying humidification apparatus, as described above, if a condition in which the amount of water for humidification of the water supply to the gas-liquid contact chamber becomes insufficient for the actual amount of humidification necessary for each time point occurs, the shortage is The water supply amount is replenished from the water for purification and contributes to the insufficient amount of water contributing to the purification of the air to be treated.

On the contrary, if a state in which the amount of water for humidification of the water supply becomes excessive with respect to the actual amount of humidification required at each point in time, the excess amount contributes to the purification of the air to be treated together with the amount of water for purification in the water supply, and then the gas-liquid contact Ejected from the room.

That is, under the constant water supply, when the required amount for humidification changes according to the change in the state of the air to be treated, the quantity of water consumed for humidification of the air to be treated in the water supply amount preferentially equals to the actual required amount for humidification after the change. Self-adjustment, thereby changing the amount of water that is not consumed by humidification but contributes to the purification of the air to be treated (that is, the quantity discharged from the gas-liquid contact chamber after contributing to the purification).

On the other hand, in the air purification humidification apparatus of the said 1st characteristic structure, in the case of adjusting water supply amount based on a detected discharge amount, and adjusting a discharge amount to a preset discharge amount, the necessity for purification required for obtaining the gas component removal efficiency required as the preset discharge amount. Set the same quantity as the quantity.

Thereby, according to the said air purification humidification apparatus of the said 1st characteristic structure, even if the quantity of water consumed for humidification of water supply amount preferentially adjusts itself to the same quantity as the required quantity for humidification after a change according to the change of the quantity of water required for humidification, The amount of water that contributes to the purification of the heavy air to be treated (that is, the amount of water that becomes the amount of water discharged from the gas-liquid contacting chamber) can be maintained as the set required amount of purification for the set amount of water.

As a result, the gas component removal efficiency (purification performance) can be maintained at the required value irrespective of the change in the required amount of humidification due to the change in the air state to be treated, and the like, so that the degree of purification of the treated air can be maintained at the required purification degree. have. In addition, with respect to the humidification performance, the quantity of water consumed for humidification is maintained by first self-adjusting with respect to the change of the required quantity for humidification as mentioned above.

In addition, compared with the detection of air conditions such as humidity and temperature, the detection of the drainage is generally high in reliability in terms of detection accuracy, so that a detection error does not easily occur. Therefore, according to the above-described water supply amount adjustment based on the detected drainage amount, the gas component removal efficiency is less than the required value due to the problem in the water supply amount adjustment based on the detected air state, that is, the adjustment error. It can be reliably avoided.

From these, according to the air purifying humidification apparatus of the said 1st characteristic structure, the water supply constant operation which continuously supplies clean water of excessive design water supply quantity to a gas-liquid contact chamber, while obtaining the required purification performance and required humidification performance reliably and stably. Compared with the conventional apparatus employing the apparatus, the water supply amount of the clean water to the gas-liquid contact chamber can be effectively reduced to the required and sufficient amount with respect to the required gas component removal efficiency, thereby effectively reducing the operating cost of the apparatus.

As the set drainage amount, it is desirable to set a quantity which is somewhat larger than the required amount for purification in anticipation of some safety factor in reality. However, even in such a case, the operating cost can be significantly reduced as compared with the conventional apparatus which performs constant water supply.

Further, in order to maintain the necessary purification performance and the necessary humidification performance against the change in the required amount of humidification due to the change in the air state to be treated, the following water supply adjustment can also be considered.

That is, if there is an insufficient amount of water that contributes to the purification of the air to be treated in the water supply due to the change in the required amount of humidification, the water-soluble gas component concentration (ie, absorbed gas component concentration) of the used clean water discharged from the gas-liquid contacting chamber is also changed. do. Therefore, it is conceivable to detect the gas component concentration of the discharged clean water from the gas-liquid contact chamber and automatically adjust the water supply amount of the clean water to the gas-liquid contact chamber to maintain the gas component concentration of the discharged clean water at the set concentration based on the detected concentration. have.

However, the detection of the gas component concentration in water generally has low reliability in terms of detection accuracy, so that a detection error is likely to occur. Therefore, in the adjustment of the water supply amount based on the detection gas component concentration, the gas component removal efficiency is also reduced due to the adjustment error. It is easy to cause the phenomenon below the required value.

In this regard, according to the air purifying humidification device of the first characteristic configuration which adjusts the water supply amount based on the detected drainage amount, it is possible to more reliably avoid causing such a phenomenon as described above. It is possible to effectively reduce the water supply amount of the clean water while reliably and stably obtaining the necessary purification performance and the necessary humidification performance.

And the gas component removal efficiency (eta) here is represented by following Formula.

     η = (Cai―Cao) / Cai

 However, Cai: concentration of water-soluble gas component in the air to be treated before treatment

     Cao: The water-soluble gas component concentration of the air to be treated after the treatment

In the implementation of the first characteristic constitution, the contact method between the clean water and the air to be treated includes a method in which the clean water flows into the surface of the member for flowing down in the gas-liquid contact chamber so as to flow down into the water film state. Or a method of supplying clean water to a moisture-permeable or wet-permeable member disposed in a gas-liquid contact chamber, or a method of spraying clean water in a high-density state in a gas-liquid contact chamber, or these methods. Various contact methods, such as a combined method, can be employ | adopted.

The clean water used (fresh water supplied to the circulation system in the circulating water type, and fresh water supplied to the gas-liquid contacting chamber in the daily water supply type) has a substantially constant water quality such as pure water, purified water purified by ordinary water, or a filter. Various clean water can be used as long as it can be maintained. Moreover, you may make it use the various aqueous solution which added the chemical | medical agent as clean water.

The air purifying humidification device of the first characteristic configuration is particularly effective when the air to be treated changes in the air state before the treatment such as outside air. However, the air to be treated may be air which does not usually change or does not change much before the air condition, and even in this case, the air to be treated is effective in preparation for the change in the air state to be treated by any cause.

In addition, the cause of the change of the required amount of humidification is not limited to the change of the state of the air to be treated, and the change of the required amount of humidification by other causes may be used, and even in that case, the air purification humidification device of the first characteristic configuration According to the present invention, the required purification performance can be maintained stably.

The 2nd characteristic structure of this invention which concerns on an air purification humidification apparatus is

Air flow rate detection means for detecting the airflow amount of the air to be treated to the gas-liquid contact chamber,

The control means is configured to change the set drainage amount based on the detected ventilation amount of the airflow rate detection means.

That is, as described above, the gas component removal efficiency (purification performance) is L, which is a ratio between the quantity of water that is not consumed by humidification in the water supply amount (that is, the quantity of water to be drained) and the amount of air flow of the object air, as described above. It depends on the value of / G. Therefore, if the ventilation amount of the air to be treated (that is, the amount of air to be processed by the air to be treated) to the gas-liquid contact chamber is changed, the amount of humidification required for humidifying the air to be treated to a constant humidification state changes proportionally. In addition, the required amount for purification necessary to obtain the required gas component removal efficiency (purification performance) also changes with a constant correlation.

On the other hand, according to the said 2nd characteristic structure, when changing a set drainage amount based on a detection ventilation amount, it is a process object in each time point on the constant correlation which exists between the ventilation amount of the process object air, and the required quantity for purification. The amount of water (in reality, a certain amount of safety factor expected) equal to the required amount for purification corresponding to the ventilation amount of the air can be set as the drainage amount.

In this way, the quantity of water consumed for humidification of the air to be treated in the water supply amount is proportional to the change in the amount of humidification at each point in time, that is, proportional to the change in the amount of air flow. The amount of water that contributes to the purification of the air to be treated (the amount that becomes drainage) of the water supply is also allowed to be preferentially self-adjusted to the same quantity as the required amount of humidifying water). That is, it can be automatically changed to the same quantity as the required quantity for purification that changes with a constant correlation in accordance with the change in the ventilation amount.

As a result, the gas component removal efficiency (purification performance) can be maintained at the required value irrespective of the change in the ventilation amount of the air to be treated, so that the degree of purification of the treated air can be maintained at the required degree of purification, and the required humidification performance is also maintained. Can be.

In addition, as described above, the gas component concentration (absorption gas component concentration) of the discharged clean water from the gas-liquid contact chamber is detected, and the gas-liquid contact chamber is maintained at the set concentration based on the detected concentration. In the case of adjusting the water supply amount of the clean water, the gas component removal efficiency (purification performance) can be maintained at the required value and the necessary humidification performance can be maintained even with the change in the ventilation amount of the air to be treated alone.

However, as described above, however, the detection of the concentration of the gas component in water generally has low reliability in terms of detection accuracy, and thus a detection error is likely to occur.

However, according to the above-described configuration of changing the set drainage amount on the basis of the detected ventilation amount, since the reliability of the ventilation amount detection is high and adjustment errors do not easily occur, the gas component removal efficiency is less than the required value with respect to the change in the ventilation amount of the air to be treated. It can be more surely avoided to cause the phenomenon.

The 3rd characteristic structure of this invention which concerns on an air purification humidification apparatus is

As clean water supplied to the said gas-liquid contact chamber, it is set as the structure which supplies fresh clean water supplied from a clean water supply means to the said gas-liquid contact chamber routinely.

That is, the above-mentioned 1st characteristic structure or 2nd characteristic structure can be applied to both a circulating water supply type | work or the daily and water supply type air purification humidification apparatus. However, the daily and continuous supply of fresh clean water to the gas-liquid contact chamber and the water purification air purifying humidifier can generally obtain higher gas component removal efficiency as compared with the circulation water supply.

Moreover, in the above-mentioned 1st characteristic structure and 2nd characteristic structure, the gas component removal efficiency required also can be stably maintained also with respect to the change of the air state to be processed, or the change of ventilation amount as an effect.

This works together, and according to the third characteristic configuration in which the work-type air purification humidification device is applied, the air purification humidification device is particularly preferable when a high degree of purification is required as the required degree of purification of the treated air. can do.

The 4th characteristic structure of this invention which concerns on an air purification humidification apparatus is

The clean water supplied to the gas-liquid contact chamber is configured to supply a mixed water of used clean water discharged from the gas-liquid contact chamber with fresh clean water supplied from the clean water supply means to the gas-liquid contact chamber.

That is, the circulating water-type air purifying humidifier which only consumes fresh clean water as replenishing water has a small consumption of fresh clean water in essence compared with the work and water supply type.

Moreover, in the above-mentioned 1st characteristic structure and 2nd characteristic structure, as a effect, the power consumption of the pump which supplies clean water to a gas-liquid contact chamber can be reduced effectively.

This works together, and according to the fourth characteristic configuration in which the air purifying humidification device of the circulation water supply type is applied, the air purifying humidification device which is preferable in the case where the reduction in the running cost is particularly required for the gas component removal efficiency is preferred. can do.

The 5th characteristic structure of this invention which concerns on an air purification humidification apparatus is

The gas-liquid contact chamber is equipped with a flowing medium arranged in a transverse state with respect to the air passage of air, and a water supply header dropping clean water from above with respect to the flowing medium.

The downflow medium is formed by densely arranging a wave-shaped member in a vertical posture in which a plurality of inclined wave portions are formed, and inverting the inclination direction of the inclined wave portion for each adjacent wave-shaped member. I'm at a point.

That is, according to this fifth characteristic configuration, the gas-liquid can be efficiently contacted with the ventilation air and the clean water, and high performance can be obtained for each of the air purification performance and the air humidification performance.

1 is a view showing an air conditioning facility for a clean room.
2 is a view showing the configuration of an external tank.
3 is a perspective view showing a gas-liquid contacting portion.
4 is an explanatory diagram of a material resin in a gas-liquid contact portion.

1 shows the air conditioning equipment of the clean room. As shown in FIG. 1, the fan filter unit 2 is arranged in a matrix arrangement in the ceiling part of the target room 1 which is a clean room over the whole surface.

The air-conditioning air SA supplied to the ceiling chamber 4 by the air supply fan Fs through the air supply path 3 is purified by the high performance filter 2a provided in each fan filter unit 2, The air-conditioning air SA after this purification is blown down and supplied to each fan filter unit 2 indoors by the fan 2b of equipment. Thereby, the interior of the target room 1 is adjusted and maintained to the required cleanliness in the required temperature-humidity state.

The bottom lower chamber of the target chamber 1 receives a bottom RA chamber which receives air RA discharged from the room through the lattice bottom 5 in accordance with the indoor supply of the purifying air conditioning air SA by the fan filter unit 2. I assume (6).

The air conditioner SA is equipped with an external air conditioner 7 (air conditioner air conditioner) and an air conditioner 8. That is, the outside air OA guided through the outside air introduction path 9 by the outside air fan Fo is adjusted by the outside air conditioner 7, and the air conditioner OAs adjusted in this outside air conditioner 7 is relayed through the relay path 10. We guide to (8).

 In addition, a part of the exhaust air RA received in the bottom lower chamber 6 is guided to the air conditioner 8 through the ventilation path 11 by the ventilation fan Fr as the ventilation air RAs.

Then, the mixed air between these regulated outside air OAs and the ventilation air RAs is adjusted in the air conditioner 8 to adjust the temperature and humidity, and the controlled air in the air conditioner 8 is supplied to the target chamber via the air supply unit 3 as the air conditioning air SA. It supplies to the ceiling chamber 4 of 1).

Then, the remainder of the exhaust air RA received in the bottom lower chamber 6 (exhaust air RA equal to the amount of air OA received from the outside air introduction passage 9) is fed to the exhaust fan Fe through the exhaust passage 12. Discharge to outside.

As illustrated in FIG. 2, the outer tank 7 includes a filter 13, a preheater 14, a precooler 15, and a gas-liquid contactor sequentially from the upstream side in the ventilation direction of the outside air OA that is air to be treated. 16, a cooler 17 and a reheater 18 are incorporated.

That is, in this outer tank 7, as an adjustment process of outside air OA, the outside air OA guided through the outside air introduction path 9 is damped with the filter 13, and this damped outside air OA is winter-bound. ) Is preheated by a preheater 14, and preheated by a precooler 15 in summer, and these preheated or precooled outdoor air OA is contacted with clean water W and gas-liquid contact in the gas-liquid contactor 16 as an air purifying humidifier. It purifies by making it humidify and humidifies to near saturation according to the purification.

Then, by cooling the outside air OA purified and humidified in the gas-liquid contactor 16 to a predetermined temperature by the cooler 17, the outside air OA is cooled and dehumidified to a predetermined absolute humidity, and then the cooled air dehumidified outside air OA is again The hot air 18 is reheated to a predetermined temperature, and thus the temperature and humidity can be adjusted and the purified outside air OA is supplied to the air conditioner 8 through the relay path 10 as the regulated outside air OAs.

In the gas-liquid contactor 16, as shown in FIG. 3, the flow medium 19 arrange | positioned in the transverse state with respect to the ventilation path | route of the outside air OA in the outer shell machine 7, and it is upwards with respect to this flow medium 19 And a drain pan 21 for catching the water supply header 20 provided with a plurality of dropping holes 20a for dropping clean water W therefrom and the clean water W 'flowing down the flow medium 19.

The flowing-down medium 19 densely arranges the wave-shaped member 22 of the vertical posture in which the many inclined wave parts 22a were formed, and in this flowing-down medium 19, the adjacent wave-shaped member 22 is carried out. ), The inclination direction (ridgeline direction) of the inclined wave portion 22a is inverted.

That is, in this gas-liquid contactor 16, the clean water W is dripped from the dripping opening 20a of the water supply header 20 to the dropping medium 19, and many of the dripping clean water W flows in the dropping medium 19. The wave-like members 22 are allowed to be transferred to the surface of each of the wave-like members 22 to flow down into the water film state.

 Thereby, the water film state in the process of flowing out the outside air OA as the process object air which passes through the clearance gap between the wave-shaped members 22 as the gas-liquid contact chamber as an inside space which is the arrangement space of the downflow medium 19. Gas-liquid contact with the clean water W, and the gas-liquid contact removes the water-soluble gas component contained in the air OA to purify the air OA, and further humidifies the air OA to the saturation state.

As clean water W supplied dropwise from the downflow header 20 to the downflow medium 19, the pure water as fresh clean water supplied by the feed water pump Pw from the pure water generating device 23 as the clean water supply means through the water supply passage 24. W is supplied daily to the gas-liquid contactor 16.

The clean water W 'flowing down from the downflow medium 19 caught by the drain pan 21 (that is, the used clean water absorbing gas components) is discharged to the outside through the drainage path 25. That is, this gas-liquid contactor 16 is of a work type and a water supply type.

The water supply passage 24 from the pure water generator 23 is equipped with a water supply flow rate adjusting valve 26 for adjusting the water supply amount Li of the fresh clean water W (pure water) to the gas liquid contactor 16, and further, the gas liquid contactor 16 ), A drain flow meter 27 serving as a drainage amount detecting means for detecting the drainage amount Lo of the used clean water W '(used pure water) discharged from the gas-liquid contactor 16 is provided.

In addition, the air volume Gi of the outside air OA in the outside air conditioner 7 is changed due to the change in the air volume of the adjusted outdoor air OAs supplied from the outside air conditioner 7 to the air conditioner 8 in accordance with the use situation of the target chamber 1. In other words, the ventilation amount of the outside air OA in the gas-liquid contactor 16 changes. On the other hand, the outer tank 7 is equipped with the airflow meter 28 as a wind volume detection means which detects the ventilation amount Gi of external air OA.

And this external tank 7 has fresh clean water W (pure water) with respect to the gas-liquid contactor 16 based on the detected discharge amount Lo by these wastewater flowmeters 27 and the detected ventilation amount Gi by the air flow meter 28. A water supply controller 29 is provided as a control means for automatically adjusting the water supply amount Li of.

4 shows the material resin in the gas-liquid contactor 16. Each symbol in FIG. 4 represents the following various values.

Li: water supply of clean water W

Lo: drainage of used clean water W´

Lh: Humidification amount of outside air OAs after treatment with respect to outside air OA before treatment

Gi: Aeration of OA OA

Cwi: concentration of water-soluble gas component of feed fresh water W (≒ 0)

Cwo: Water-soluble gas component concentration of used clean water W´

Cai: concentration of water-soluble gas component of outside air OA before treatment

Cao: Water-soluble Gas Component Concentration of Outdoor OAs After Treatment

Here, in the case where the material balance in the gas-liquid contactor 16 is taken into consideration, the amount of material on the water and air sides entering the gas-liquid contactor 16 and the amount of material on the water-side and air sides exiting from the gas-liquid contact chamber 16 are the same. Equation 1 below holds.

Li × Cwi + Gi × Cai = Lo × Cwo + Gi × Cao + Lh × Cwi... (Equation 1)

In addition, since the quantity of water which reduced the humidification amount Lh from the water supply amount Li turns into the amount of discharge Lo, the following (equation 2) is established.

Li = Lh + Lo. (Equation 2)

Then, by substituting (Equation 2) into (Equation 1) and arranging (Equation 1), the following (Equation 3) can be obtained.

Lo x (Cwi-Cwo) = Gi x (Cao-Cai). (Equation 3)

On the other hand, the gas component removal efficiency (eta) which shows the purification performance with respect to the outdoor air OA of the gas-liquid contactor 16 is shown by following (equation 4).

η = (Cai-Cao) / Cai... (Equation 4)

When the above-mentioned (formula 3) is substituted into this (formula 4), gas component removal efficiency (eta) is represented by following (formula 5).

η = (Lo / Gi) x ((Cwi-Cwo) / Cai)... (Eq. 5)

The water-soluble gas component concentration Cwo of the used clean water W ′ in this expression (Equation 5) is the ratio of the equilibrium relationship between the water-soluble gas component and water and the drainage amount L of the used clean water W ′ with respect to the outside air flow Gi. Lo / Gi). When this ratio Lo / Gi becomes large (that is, when the drainage Lo becomes large when the outside air flow rate Gi is constant), the water-soluble gas component concentration Cwo of the used clean water W´ becomes small, and the gas component removal efficiency η increases in the increasing direction. Transition in a linear relationship.

Therefore, in <Equation 5>, the factor governing the gas component removal efficiency η is that the water-soluble gas component concentration Cai of the outside air OA and the water-soluble gas component concentration Cwi (공급 0) of the supplied clean water W which are fixed as inlet conditions of air and water. Except), Lo / Gi.

That is, the gas component removal efficiency η exhibiting purification performance is equal to the water quality of the clean water W supplied to the gas-liquid contactor 16 (that is, if Cwi is constant), and the purification of outside air OA in the water supply amount Li to the gas-liquid contactor 16 is performed. It depends on the L / G value, which is the ratio between the quantity of water (= quantity equal to the drainage Lo) and the quantity of air of the outside air OA (= airflow Gi).

On the other hand, in this type of gas-liquid contactor 16, the required amount of purification Lj necessary for obtaining the required gas component removal efficiency η for the outside air OA of the predetermined ventilation amount Gi is taken as the basic quantity, and the required amount of purification Lj for treatment is treated. It is necessary to make the water supply amount Li the quantity (Lj + Lh) which added the necessary quantity Lh for humidification required to humidify the external air OA to a constant humidification state.

Therefore, when the water supply amount Li is sufficient, the gas-liquid contactor 16 of this type can stably humidify the outdoor air OA to a substantially constant saturated state humidity (for example, 95% relative humidity) regardless of the state before the outdoor air OA treatment. Can be.

This means that under the constant water supply Li, when the required amount of humidification Lh for humidification changes according to the change in the state of the external air OA before the treatment, the quantity of water consumed for humidification of the external air OA in the water supply Li is the same as the actual required quantity for humidification Lh after the change. The amount of water that is not consumed by humidification but contributes to the purification of the outside air OA (that is, the amount of drainage Lo discharged from the gas-liquid contactor 16 after contributing to the purification) is changed. This means that the quantity of water (= Lo) causes a state (Lo &lt; Lj) which becomes insufficient with respect to the required amount of purification Lj described above, or a state (Lo &gt; Lj), which becomes excess.

On the other hand, the above-described water supply controller 29 is configured to execute the following (a) and (b) control as the water supply amount adjustment accordingly.

(A) By adjusting the water supply flow rate adjusting valve 26 based on the detected drainage amount Lo by the water flow meter 27 for drainage, the wastewater of the used clean water W ′ (used pure water) discharged from the gas-liquid contactor 16 is adjusted. Adjust the displacement Lo to the set displacement SLo.

(B) The set drainage amount SLo is changed in accordance with the detected ventilation amount Gi by the air flow meter 28. Specifically, the set drainage amount SLo is a reference amount of the required amount Lj for purification of the outside air volume Gi at each time point, and the set amount of water SLo is a quantity expected to be spared as necessary for the reference amount.

Here, the required amount of purification Lj for the outside air flow rate Gi at each time point is L / G, which is a device-specific constant (that is, a constant different from the contact coefficient, the required removal efficiency η, etc., depending on the device shape). When the value is α, Lj = α × Gi can be represented, and the water supply controller 29 determines the set discharge amount SLo at each time point based on such correlation data 30.

That is, irrespective of the change in the necessary amount of humidification Lh or the required amount of purification Lj due to the change in the air OA state or the air volume change, etc., as described above, the amount of water consumed for humidification in the water supply amount Li is used for humidification at each time point. Irrespective of being self-adjusted preferentially to the same quantity as the required quantity Lh, the quantity of water contributing to the purification of the outside air OA in the quantity of water Li (ie, the quantity of the quantity of water Lo) in the quantity of water Li is controlled by the above-mentioned (a) and (b). Is maintained at the same quantity as the required quantity Lj for purification at each time point. Thereby, while reducing the water supply amount Li of the fresh clean water W to the gas-liquid contactor 16 as much as possible, the necessary purification performance and the required humidification performance with respect to the outside air OA are obtained stably.

[Other Embodiments]

The following is another embodiment of the present invention.

In the above-mentioned embodiment, although the water supply amount control which adjusts the water supply amount Li so that wastewater Lo becomes set drainage volume SLo was shown to the example of applying the daily water supply type air purification humidification apparatus, the same water supply control was applied to the circulation water supply type air purification humidification apparatus. You may apply to.

Moreover, as shown in the above-mentioned embodiment, the air purification humidification apparatus which concerns on this invention is not limited to the usage form built-in in the external air conditioner 7, and the use form built-in and equipped with a normal air conditioner, In some cases, various usage forms, such as a single use form, can be adopted, without a combination with a cooler or a heater.

When the set discharge amount SLo is changed in accordance with the ventilation amount Gi of the air OA to be treated, the ventilation amount detection means is not limited to various air flow meters, and for example, the ventilation amount Gi is recognized based on the change instruction of the ventilation amount Gi. Various detection methods, such as the detection method mentioned above, can be adopted.

The air OA to be treated is not limited to the outside air, and air that requires purification and humidification treatment, such as air to be circulated and supplied to a clean room or discharged air from various equipment for recycling use, and purification according to humidification is required. Any air may be sufficient as it is air.

The air purifying and humidifying apparatus according to the present invention can be used in various fields requiring air purification and humidification, and in various fields requiring purifying air with humidification.

OA: Air to Process
W: fresh water
16: gas-liquid contact chamber
W´: used clean water
Lo: displacement
27: displacement detection means
Li: water supply
SLo: set displacement
29: control means
Gi: ventilation
28: air volume detection means
23: means of supplying clean water
19: flushing medium
20: water supply header
22a: warp breaking
22: wave-shaped member

Claims (5)

A gas-liquid contacting chamber for allowing the air to be treated to be ventilated into the room to contact clean water with gas-liquid,
As an air purifying humidification apparatus which purifies the process object by removing the water-soluble gas component in the process object air by the gas-liquid contact with the clean water in the said gas-liquid contact chamber, and humidifying the process object air,
Drainage detection means for detecting the drainage amount of the used clean water discharged from said gas-liquid contact chamber, and
Control means for adjusting the water supply amount of the clean water to the gas-liquid contacting chamber based on the detected water supply amount of the water discharge amount detecting means to adjust the water supply amount to the set drainage amount
Containing, air purification humidification device. The method of claim 1,
Air flow rate detection means for detecting the airflow amount of the air to be treated to the gas-liquid contact chamber,
The control means is configured to change the set drainage amount based on the detected ventilation amount of the airflow rate detection means. 3. The method according to claim 1 or 2,
An air purifying humidification device, wherein the clean water supplied to the gas-liquid contacting chamber is configured to supply fresh clean water supplied from a clean water supplying means to the gas-liquid contacting chamber routinely. 3. The method according to claim 1 or 2,
The purified water supplied to the said gas-liquid contact chamber WHEREIN: The air purification which consists of supplying the mixed liquid of the used clean water discharged | emitted from the said gas-liquid contact chamber and the fresh clean water supplied from the said clean-water supply means to the said gas-liquid contact chamber. Humidification device. 5. The method according to any one of claims 1 to 4,
The gas-liquid contact chamber is equipped with a flowing medium arranged in a transverse state with respect to the air passage of air, and a water supply header dropping clean water from above with respect to the flowing medium.
The downflow medium is configured by densely arranging a wave-shaped member in a vertical posture in which a plurality of inclined wave portions are formed, and inverting the inclination direction of the inclined wave portions for each adjacent wave-shaped member. The air purification humidification apparatus which makes it anti.

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