WO2011136054A1 - Dispositif de détection de position - Google Patents

Dispositif de détection de position Download PDF

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Publication number
WO2011136054A1
WO2011136054A1 PCT/JP2011/059422 JP2011059422W WO2011136054A1 WO 2011136054 A1 WO2011136054 A1 WO 2011136054A1 JP 2011059422 W JP2011059422 W JP 2011059422W WO 2011136054 A1 WO2011136054 A1 WO 2011136054A1
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WIPO (PCT)
Prior art keywords
detection elements
power supply
output terminal
moving direction
detection
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PCT/JP2011/059422
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English (en)
Japanese (ja)
Inventor
竜麿 堀
裕宜 横山
浩也 北川
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Tdk株式会社
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Priority to JP2012512773A priority Critical patent/JP5761181B2/ja
Publication of WO2011136054A1 publication Critical patent/WO2011136054A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders

Definitions

  • the present invention relates to a position detection device, and more particularly, to a detection element configured to generate a predetermined readout signal corresponding to a scale facing position when moving along a scale and a scale surface such as a magnetic scale or an optical scale.
  • the present invention relates to a position detection device to be used.
  • Some industrial equipment such as mounters include a position detection device that detects the position of an object using magnetism or a light beam in order to detect the position of the moving object.
  • FIG. 23A is a diagram showing a configuration of a position detection apparatus 10 of a type (magnetic type) that uses magnetism.
  • the position detection device 10 has a magnetic sensor 20 attached to a position detection target object (not shown) and a surface 30a extending in the moving direction of the object (hereinafter referred to as the x direction).
  • the surface 30a is provided with a magnetic scale 30 magnetized so that N poles and S poles appear alternately at equal intervals.
  • FIG. 23A also shows the strength of the magnetic field formed by the magnetic scale 30.
  • the strength of the magnetic field formed by the magnetic scale 30 is expressed as a sine wave having a wavelength of 2 ⁇ , where ⁇ is the width (length in the x direction) of each magnetic pole appearing on the surface 30a of the magnetic scale 30. Approximated.
  • the magnetic sensor 20 has four AMR (Anisotropic magnetoresistive) elements MRA to MRD, which are arranged at an interval of ⁇ / 4 along the x direction.
  • AMR Anaisotropic magnetoresistive
  • FIG. 23B is a diagram showing an electrical connection form of the AMR elements MRA to MRD.
  • the AMR element MRA and the AMR element MRC are half-bridge connected, and the AMR element MRB and the AMR element MRD are half-bridge connected.
  • There are two output signals from the magnetic sensor 20 one output signal Vsin is taken out from the connection point between the AMR element MRA and the AMR element MRC, and the other output signal Vcos is taken out from the connection point between the AMR element MRB and the AMR element MRD. .
  • An AMR element is an element whose resistance value changes depending on the strength of an applied magnetic field.
  • FIG. 23A also shows a change in the resistance value (read signal) of the AMR element when the AMR element moves in the x direction. As shown in the figure, the resistance value of the AMR element changes at a wavelength ⁇ that is half of the magnetic field formed by the magnetic scale 30.
  • FIG. 24 is a diagram showing changes in the resistance values R MRA to R MRD and the output signals Vsin and Vcos of the AMR elements MRA to MRD when the position detection target object moves in the x direction.
  • the resistance values R MRA to R MRD are shifted in phase by ⁇ / 4. This corresponds to the fact that the AMR elements MRA to MRD are arranged at intervals of ⁇ / 4 along the x direction.
  • the output signals Vsin and Vcos also change with the wavelength ⁇ , and their phases differ from each other by ⁇ / 4.
  • the output signals Vsin and Vcos are expressed by the following expressions (5) and (6), respectively.
  • the 0th-order term component of ⁇ is removed. Since the zero-order term component is known, it can be removed by subtraction processing. Note that it is not appropriate to use a filter to remove the 0th-order term component. This is because the position detection device needs to detect the position of a stationary object.
  • the position x of the object is obtained by the following equation (7) using the output signals Vsin and Vcos obtained as described above.
  • the read signal of the AMR element is a perfect sine wave, but it is not actually a perfect sine wave.
  • the read signals of the resistance values R MRA to R MRD are expressed by the following equations (8) to (11), respectively.
  • a 2, A 3, ⁇ is a constant.
  • the read signals of the resistance values R MRA to R MRD include harmonic components.
  • Patent Document 1 discloses a technique for removing odd-order harmonics.
  • the 0th-order component (DC component) of ⁇ remains in the output signals Vsin and Vcos.
  • the DC component can be removed by subtraction processing as described above, but can also be removed by using a full bridge connection. Therefore, the full bridge connection will be described below.
  • FIG. 25 is a diagram showing a specific connection form of the AMR elements MRA to MRD when a full bridge connection is applied to the magnetic sensor 20. As shown in the figure, when full bridge connection is performed, two sets of half bridges shown in FIG. 23B are prepared. The output from each set is input to the inverting input terminal and the non-inverting input terminal of the operational amplifier, respectively, and the output of the operational amplifier becomes the output signals Vsin and Vcos.
  • Vcc / 2 is removed from the output signals Vsin and Vcos. This indicates that the DC component is removed from the output signals Vsin and Vcos by performing the full bridge connection.
  • a detection element various elements other than the above-described AMR element are known.
  • a GMR (giant magnetomagnetoresistive) element can obtain a larger output than other detection elements. If a position detection device is configured using a GMR element, it is possible to obtain a larger output than when an AMR element is used.
  • the GMR element has a problem that its resistance value changes with the wavelength of the magnetic field formed by the magnetic scale 30 (twice that of the AMR element) at least as long as it is used in a normal manner. This means that a position detection apparatus using a GMR element can only obtain a resolution of 1/2 that of an apparatus using an AMR element. Thus, it is difficult to configure a position detection device using a GMR element, no matter how high the output is. Therefore, there is a need for a position detection device with higher resolution so that a GMR element can be used as the detection element.
  • a position detection device having higher resolution is required, the situation is the same in the type (optical type) position detection device using a light beam. That is, in the optical position detection device, a reflecting plate (optical scale) having a diffraction pattern formed on the surface is used instead of the magnetic scale, and the optical scale is irradiated with a light beam. An optical sensor is used instead of the magnetic sensor, and the optical sensor receives the light beam reflected by the optical scale. The amount of light received at this time is the same as the readout signal shown in equations (8) to (11), and the resolution decreases as the wavelength increases. Therefore, as for the optical position detection device, a position detection device having higher resolution is required as in the case of the position detection device using magnetism.
  • one of the objects of the present invention is to provide a position detection device having higher resolution.
  • a position detection device configured to have a scale having a first surface extending along a moving direction of an object to be position-detected, to be movable together with the object, and to the first.
  • a position acquisition means for acquiring the position of the position detection target object based on an output signal of the sensor, and the sensor is supplied with a first power supply potential.
  • a first power supply terminal, a second power supply terminal supplied with a second power supply potential different from the first power supply potential, first and second output terminals, and the first output terminal A first element connected between the first power supply terminal; a second element connected between the second power supply terminal and the first output terminal; and the second output.
  • a third terminal connected between the terminal and the first power supply terminal And a fourth element connected between the second power supply terminal and the second output terminal, wherein the first element includes the first output terminal and the first output terminal.
  • the third element includes a plurality of first detection elements connected in series between the power supply terminals and juxtaposed along the moving direction, and the third element includes the second output terminal and the first power supply.
  • a plurality of third detection elements connected in series with each other along the moving direction, and each of the first detection elements and each of the third detection elements is respectively When moving along the surface of 1 in the moving direction, it is configured to generate a predetermined readout signal corresponding to the position facing the scale, and the arrangement of the plurality of first detection elements in the moving direction is: At least the first-order component of the phase is removed from the voltage signal appearing at the first output terminal.
  • the arrangement of the plurality of third detection elements in the moving direction is determined so that at least a first-order component of a phase is removed from a voltage signal appearing at the second output terminal, and the position
  • the acquisition means calculates the position of the position detection target object based on a voltage signal appearing at the first output terminal and a voltage signal appearing at the second output terminal.
  • the second and higher harmonics become the fundamental wave. Therefore, it is possible to obtain a resolution that is at least twice that of the conventional position detection device.
  • “movement” means relative movement of the position detection target object and the scale. That is, for example, considering the ground surface as a reference, the scale may be fixed with respect to the ground surface, and the object may move with respect to the ground surface, or the object may be fixed with respect to the ground surface, and the scale may be It is also possible that both the object and the scale move in different directions with respect to the ground surface.
  • the power supply potential may be a constant voltage source potential or a constant current source potential.
  • the second element is connected in series between the second power supply terminal and the first output terminal, and a plurality of second elements arranged in parallel along the moving direction.
  • the fourth element includes a plurality of fourth detection elements connected in series between the second power supply terminal and the second output terminal and juxtaposed along the moving direction.
  • An arrangement of the plurality of second detection elements in the moving direction is determined such that at least a first-order component of a phase is removed from a voltage signal appearing at the first output terminal;
  • the arrangement of the fourth detection elements in the moving direction may be determined so that at least a first-order component of the phase is removed from the voltage signal appearing at the second output terminal. According to this, the temperature characteristics of the first to fourth elements can be made uniform.
  • the first element includes 2 n (n is a number selected from an arbitrary natural number) first detection elements, and the third element is 2
  • n 1
  • the 2 n first detection elements are each separated by ⁇ ⁇ / 2 from the first reference position in the movement direction.
  • n ⁇ 2 are arranged one by one at the first and second positions, respectively, 2 n separated from the first position by ⁇ ⁇ / 8... ⁇ ⁇ / 2 n + 1 in the moving direction.
  • -1 each at 1 position and 1 at 2 n-1 positions away from the second position by ⁇ ⁇ / 8 ... ⁇ ⁇ / 2 n + 1 in the moving direction, respectively.
  • a first predetermined distance Shifts each said 2 n pieces of the first detecting element in the direction of movement It may be placed in position. According to this, the second harmonic becomes the fundamental wave. Therefore, it is possible to obtain twice the resolution as compared with the conventional position detecting device.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • n ⁇ 2 the reference positions are further separated from each other by ⁇ ⁇ / 2 in the moving direction, and when n ⁇ 2, respectively, ⁇ ⁇ / 8 in the moving direction from the third position.
  • the 2 n fourth detection elements are the 2 n second detection elements. Each may be arranged at a position shifted by a second predetermined distance in the moving direction. According to this, the temperature characteristics of the first to fourth elements can be made uniform.
  • the first element includes 2 n (n is a number selected from an arbitrary natural number) first detection elements, and the third element is 2 It is composed of n third detection elements, and the arrangement of the 2 n first detection elements in the moving direction is other than a 2 k order component (k is a number selected from an arbitrary natural number) It is determined that n components selected from power-of-two components of 2 and 2 k P-order components (P is a prime number of 3 or more) are removed, and the 2 n third detection elements are The 2 n first detection elements may be arranged at positions shifted by a first predetermined distance in the moving direction. According to this, higher harmonics than the fundamental wave can be appropriately removed.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • the 2 The n second detection elements are arranged at positions where the 2 n first detection elements are shifted by a third predetermined distance in the movement direction
  • the 2 n fourth detection elements are:
  • Each of the 2 n second detection elements may be arranged at a position shifted by a second predetermined distance in the movement direction. According to this, the temperature characteristics of the first to fourth elements can be made uniform.
  • the second position is further separated from the first reference position by ⁇ / 2 in the moving direction, one at each of the fifth and sixth positions that are further separated by ⁇ ⁇ / 4 in the moving direction from the first position.
  • One in each of the seventh and eighth positions further away from the position in the moving direction by ⁇ ⁇ / 4, respectively, and when n ⁇ 3, the fifth position in the moving direction, respectively.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • l is a number selected from an arbitrary odd number
  • One from each of the second reference position and each of the ninth and tenth positions further ⁇ ⁇ / 4 in the movement direction from the third position further + ⁇ / 2 in the movement direction from the reference position.
  • n ⁇ 3 one is arranged at each of the eleventh and twelfth positions separated by ⁇ ⁇ / 4 in the moving direction from the fourth position separated by ⁇ / 2 in the moving direction, respectively.
  • the scale is a magnetic scale magnetized so that N poles and S poles alternately appear along the moving direction on the first surface, and the detection element is magnetic. It may be a resistance element. According to this, in the position detection device using magnetism, it becomes possible to obtain a resolution more than twice that of the conventional one. Therefore, even if a GMR element that can obtain only half the resolution of the AMR element is used, a resolution equivalent to or higher than that of the conventional one can be obtained, so that the GMR element can be used as the detection element.
  • the scale is a magnetic scale magnetized so that N poles and S poles alternately appear along the moving direction on the first surface, and the detection element is magnetic.
  • Each of the second and fourth elements may be a resistance element configured so as not to be affected by a magnetic field formed by the magnetic scale.
  • the magnetoresistive element may be any one of a GMR element, an AMR element, and a TMR element.
  • the scale may be an optical scale having a diffraction pattern formed on the first surface, and the detection element may be a light detection element. According to this, in the optical position detection device, it becomes possible to obtain a resolution that is at least twice that of the conventional one.
  • each of the second and fourth elements may be a constant current source.
  • the first power supply potential may be a ground potential.
  • a position detection apparatus configured to be movable with a scale having a first surface extending along a moving direction of an object to be detected, and the first object.
  • a position acquisition means for acquiring the position of the position detection target object based on an output signal of the sensor, and the sensor is supplied with a first power supply potential.
  • a first power supply terminal, a second power supply terminal supplied with a second power supply potential different from the first power supply potential, first and second output terminals, and the first output terminal A first element connected between the first power supply terminal; a second element connected between the second power supply terminal and the first output terminal; and the second output.
  • a third element connected between the terminal and the first power supply terminal; A fourth element connected between the second power supply terminal and the second output terminal, wherein the first element includes the first output terminal, the first power supply terminal, And a plurality of first detection elements juxtaposed along the moving direction, and the third element includes a connection between the second output terminal and the first power supply terminal.
  • Each of the first detection elements and the third detection elements is connected to the first surface of the first surface.
  • a predetermined readout signal is generated according to the opposing position of the scale, and the arrangement of the plurality of first detection elements in the moving direction is the first 2 k order term component of at least phase of the voltage signal appearing at the output terminal and the 2 k + k + 1 ⁇ N order term component (the number k is chosen among any natural number, N are positive integers) rest, the first 2 from the voltage signal at least a phase appearing at the output terminal of the m-order term component and 2 m +2
  • An m + 1 ⁇ Nth order component (m is a positive integer smaller than k) is determined to be removed, and the arrangement of the plurality of third detection elements in the moving direction is a voltage signal appearing at the second output terminal.
  • the position acquisition means calculates the position of the object to be detected based on the voltage signal appearing at the first output terminal and the voltage signal appearing at the second output terminal. Characteristic To. According to this, the 2 k order harmonic becomes the fundamental wave. Therefore, it is possible to obtain a resolution of 2 k times as compared with the conventional position detecting device.
  • the arrangement of the plurality of first detection elements in the moving direction also removes the 2 k +2 k + 1 ⁇ Nth order component of the phase from the voltage signal appearing at the first output terminal.
  • the arrangement of the plurality of third detection elements in the moving direction is determined so that the 2 k +2 k + 1 ⁇ Nth-order component of the phase is also removed from the voltage signal appearing at the second output terminal. It is good as well. According to this, higher harmonics than the fundamental wave can be appropriately removed.
  • a position detection apparatus configured to have a scale having a first surface extending along a movement direction of an object to be position-detected, movable with the object, and the first And a position acquisition means for acquiring a position of the position detection target object based on an output signal of the sensor, and the sensor is supplied with a first power supply potential.
  • a first power supply terminal, a second power supply terminal to which a second power supply potential different from the first power supply potential is supplied, first to fourth output terminals, and the first output terminal And a first element connected between the first power supply terminal, a second element connected between the second power supply terminal and the first output terminal, and the second power supply terminal.
  • a first subtracting circuit that outputs a voltage signal obtained by subtracting a voltage signal appearing at, and a voltage signal obtained by subtracting the voltage signal appearing at the fourth output terminal from the voltage signal appearing at the second output terminal.
  • a second subtracting circuit for outputting wherein the first element includes the first output terminal and the first power supply terminal.
  • a plurality of first detection elements connected in series between each other and arranged in the movement direction, wherein the third element is between the second output terminal and the first power supply terminal. And a plurality of third detection elements juxtaposed along the moving direction, and the fifth element is interposed between the third output terminal and the first power supply terminal.
  • a plurality of fifth detection elements connected in series and juxtaposed along the moving direction, and the seventh element is connected in series between the fourth output terminal and the first power supply terminal.
  • a plurality of seventh detection elements connected and juxtaposed along the moving direction, each of the first detection elements, each of the third detection elements, each of the fifth detection elements, and Each seventh detection element moves in the moving direction along the first surface
  • An arrangement for generating a predetermined readout signal in accordance with the opposing position of the scale, the arrangement of the plurality of first detection elements in the movement direction and the arrangement of the plurality of fifth detection elements in the movement direction Is determined so that at least the first-order component of the phase is removed from the output signal of the first subtracting circuit, and the arrangement of the plurality of third detection elements in the moving direction and the plurality of seventh detection elements are determined.
  • the arrangement of the elements in the moving direction is determined so that at least the first-order component of the phase is removed from the output signal of the second subtraction circuit, and the position acquisition means includes the output signal of the first subtraction circuit, The position of the position detection object is calculated based on the output signal of the second subtracting circuit. According to this, in the case of performing a full bridge connection, it becomes possible to obtain a resolution that is at least twice that of a conventional position detection device.
  • the second element is connected in series between the second power supply terminal and the first output terminal, and a plurality of second elements arranged in parallel along the moving direction.
  • the fourth element includes a plurality of fourth detection elements connected in series between the second power supply terminal and the second output terminal and juxtaposed along the moving direction.
  • the sixth element comprises a plurality of sixth detection elements connected in series between the second power supply terminal and the third output terminal and juxtaposed along the moving direction.
  • the eighth element includes a plurality of eighth detection elements connected in series between the second power supply terminal and the fourth output terminal and juxtaposed along the moving direction.
  • the plurality of second detection elements in the moving direction and the plurality of second detection elements 6 is arranged so that at least a first-order component of the phase is removed from the output signal of the first subtraction circuit, and the plurality of fourth detection elements are arranged in the movement direction.
  • the arrangement and the arrangement of the plurality of eighth detection elements in the moving direction may be determined so that at least a first-order component of the phase is removed from the output signal of the second subtracting circuit. According to this, the temperature characteristics of the first to eighth elements can be made uniform.
  • the first element includes 2 n (n is a number selected from an arbitrary natural number) first detection elements
  • the third element is 2 n third detection elements
  • the fifth element includes 2 n fifth detection elements
  • the seventh element includes 2 n seventh detection elements.
  • the 2 n first detection elements are 1 at 2 n positions separated from each other by ⁇ ⁇ / 2 ⁇ ⁇ / 8... ⁇ ⁇ / 2 n + 1 in the movement direction from the first reference position.
  • the 2 n third detection elements are arranged in a moving direction from the first reference position in the moving direction (2i 2 ⁇ 1) ⁇ / 4 (i 2 is selected from an arbitrary integer) number) not a one to distant third respectively ⁇ ⁇ / 2 ⁇ ⁇ / 8 ⁇ ⁇ ⁇ / 2 n + 1 apart the 2 n position in the moving direction from a reference position
  • the 2 n pieces of the fifth detector element (number i 4 is selected from among any integer) the first from the reference position in the moving direction (2i 4 -1) ⁇ / 2 disposed from the fifth reference position apart one on each ⁇ ⁇ / 2 ⁇ ⁇ / 8 ⁇ ⁇ ⁇ / 2 n + 1 apart the 2 n position in the moving direction, wherein the 2 n 7
  • the detection element of (2i 6 ⁇ 1) ⁇ / 2 + (2i 2 ⁇ 1) ⁇ / 4 (where i 6 is a number selected from an arbitrary integer) is away from the first reference position in the
  • one may be arranged at 2 n positions that are separated from each other by ⁇ ⁇ / 2 ⁇ ⁇ / 8... ⁇ ⁇ / 2 n + 1 in the moving direction from the seventh reference position. According to this, in the case of performing a full bridge connection, it becomes possible to obtain twice the resolution as compared with the conventional position detection device.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • 6 elements are composed of 2 n sixth detection elements
  • the eighth element is composed of 2 n eighth detection elements
  • the 2 n second detection elements are: ⁇ ⁇ from the first reference position in the moving direction from the second reference position that is (2i 1 ⁇ 1) ⁇ / 2 (i 1 is a number selected from any integer) in the moving direction from the first reference position.
  • ⁇ ⁇ / 2 n + 1 are arranged one by one at 2 n positions, and the 2 n eighth detection elements are moved from the first reference position to the moving direction by 2i 7 ⁇ / ⁇ ⁇ / 2 ⁇ ⁇ / 8... ⁇ in the moving direction from an eighth reference position separated by 2+ (2i 2 ⁇ 1) ⁇ / 4 (i 7 is a number selected from an arbitrary integer)
  • One piece may be arranged at 2 n positions that are separated by ⁇ / 2 n + 1 . According to this, the temperature characteristics of the first to eighth elements can be made uniform.
  • the first element includes 2 n (n is a number selected from an arbitrary natural number), and the third element is 2 n third detection elements, the fifth element includes 2 n fifth detection elements, and the seventh element includes 2 n seventh detection elements.
  • each element in the moving direction shift (number i 2 is to be selected from any integer) (2i 2 -1) ⁇ / 2 k + 1 Is disposed at a position, the 2 n pieces of the fifth detection element, wherein the 2 each n-number of the first detection element in the moving direction (2i 4 -1) ⁇ / 2 k (i 4 is an arbitrary integer arranged several) shifted by a position selected from among the detection elements of the 2 n pieces of seventh, respectively the 2 n pieces of the first detecting element in the moving direction (2i 6 -1) ⁇ / 2 k + (2i 2 ⁇ 1) ⁇ / 2 k + 1 (where i 6 is a number selected from an arbitrary integer) may be arranged at a shifted position. According to this, when full-bridge connection is performed, higher-order harmonics than the fundamental wave can be appropriately removed.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • 6 elements are composed of 2 n sixth detection elements
  • the eighth element is composed of 2 n eighth detection elements
  • the 2 n second detection elements are:
  • Each of the 2 n first detection elements is arranged at a position shifted by (2i 1 ⁇ 1) ⁇ / 2 k (i 1 is a number selected from an arbitrary integer) in the movement direction
  • the n fourth detection elements are (2i 3 ⁇ 1) ⁇ / 2 k + (2i 2 ⁇ 1) ⁇ / 2 k + 1 (i 3 ) in the moving direction, respectively, with respect to the 2 n first detection elements.
  • the detection element of the 2 n pieces of the sixth, the 2 n pieces of 2i each first detection element in the movement direction 5 ⁇ / 2 k (i 5 is a number selected from among an arbitrary integer) are arranged in a position shifted, the detecting element of the 2 n pieces of eighth,
  • Each of the 2 n first detection elements is shifted by 2i 7 ⁇ / 2 k + (2i 2 ⁇ 1) ⁇ / 2 k + 1 (i 7 is a number selected from an arbitrary integer) in the moving direction. It is good also as arrange
  • the first element includes 2 n (n is a number selected from any two or more natural numbers) first detection elements
  • the third element Comprises 2 n third sensing elements
  • the fifth element comprises 2 n fifth sensing elements
  • the seventh element comprises 2 n seventh sensing elements.
  • the n third detection elements are (2i 2 ⁇ 1) ⁇ / 8 (where i 2 is a number selected from an arbitrary integer) in the moving direction with respect to each of the 2 n first detection elements.
  • the 2 n pieces of the fifth detection element respectively the 2 n pieces of the first detecting element in the direction of movement 2i 4 -1) ⁇ / 4 ( i 4 is disposed at a position shifted by several) chosen from any integer
  • the detection element of the 2 n pieces of seventh said the 2 n first
  • Each detection element is arranged at a position shifted in the moving direction by (2i 6 ⁇ 1) ⁇ / 4 + (2i 2 ⁇ 1) ⁇ / 8 (i 6 is a number selected from an arbitrary integer). Also good. According to this, when full-bridge connection is performed, it becomes possible to obtain a resolution four times that of a conventional position detection device.
  • the second element includes 2 n second detection elements
  • the fourth element includes 2 n fourth detection elements
  • 6 elements are composed of 2 n sixth detection elements
  • the eighth element is composed of 2 n eighth detection elements
  • the 2 n second detection elements are:
  • Each of the 2 n first detection elements is arranged at a position shifted by (2i 1 ⁇ 1) ⁇ / 4 (i 1 is a number selected from an arbitrary integer) in the movement direction, and the 2 n fourth detection element pieces, the two respective n first detector element in the moving direction (2i 3 -1) ⁇ / 4 + (2i 2 -1) ⁇ / 8 (i 3 is an arbitrary integer arranged several) shifted by a position selected from among the detection elements of the 2 n pieces of the sixth, the 2 n pieces of the first detection element 2i 5 ⁇ / 4 to respectively to the moving direction (i 5 is a number selected from among an arbitrary integer) are arranged in a position shifted, the detecting element of the 2 n pieces of the eighth
  • a position detection apparatus configured to have a scale having a first surface extending along a movement direction of an object to be position-detected, movable with the object, and the first And a position acquisition means for acquiring a position of the position detection target object based on an output signal of the sensor, and the sensor is supplied with a first power supply potential.
  • a first power supply terminal, a second power supply terminal to which a second power supply potential different from the first power supply potential is supplied, first to fourth output terminals, and the first output terminal And a first element connected between the first power supply terminal, a second element connected between the second power supply terminal and the first output terminal, and the second power supply terminal.
  • a third element connected between the output terminal and the first power supply terminal.
  • a first subtracting circuit for outputting a voltage signal obtained by subtracting the voltage signal, and a voltage signal obtained by subtracting the voltage signal appearing at the fourth output terminal from the voltage signal appearing at the second output terminal.
  • a second subtracting circuit wherein the first element is between the first output terminal and the first power supply terminal.
  • Each of the seven detection elements moves in the movement direction along the first surface, and A plurality of first detection elements arranged in the movement direction and the plurality of fifth detection elements arranged in the movement direction; , At least the 2 k order component of the phase and the 2 k +2 k + 1 ⁇ N order component (k is a number selected from an arbitrary natural number, N is a positive integer) remain in the output signal of the first subtraction circuit, It is determined that at least the 2 m order component and the 2 m +2 m + 1 ⁇ N order component (m is a positive integer smaller than k) of the phase are removed from the voltage signal appearing at the first output terminal.
  • the arrangement of the three detection elements in the movement direction and the arrangement of the plurality of seventh detection elements in the movement direction include at least a 2 k- order component of phase and 2 k +2 k + 1 in the output signal of the second subtraction circuit.
  • ⁇ Nth order component is Ri, from the voltage signal appearing at the second output terminal of at least 2 m order term component and 2 m +2 m + 1 ⁇ N order term component of the phase is determined to be removed, the position acquiring means of the first subtractor circuit
  • the position of the position detection target object is calculated based on the output signal and the output signal of the second subtracting circuit. According to this, in the case of performing a full bridge connection, it becomes possible to obtain a resolution of 2 k times as compared with the conventional position detection device.
  • the arrangement of the plurality of first detection elements in the movement direction and the arrangement of the plurality of fifth detection elements in the movement direction are determined from the output signal of the first subtraction circuit.
  • 2 k +2 k + 1 ⁇ Nth order component is also removed
  • the arrangement of the plurality of third detection elements in the movement direction and the arrangement of the plurality of seventh detection elements in the movement direction are: It may be determined so that the 2 k +2 k + 1 ⁇ N-order component of the phase is also removed from the output signal of the second subtracting circuit. According to this, when full-bridge connection is performed, higher-order harmonics than the fundamental wave can be appropriately removed.
  • the second and higher harmonics become the fundamental wave. Therefore, it is possible to obtain a resolution that is at least twice that of the conventional position detection device.
  • a GMR element that can obtain only half the resolution of an AMR element is used, it is possible to obtain a resolution equal to or higher than the conventional one. Therefore, a GMR element can be used as the detection element.
  • (A) is a figure which shows the structure of the position detection apparatus by the 1st Embodiment of this invention.
  • (B) is a figure which shows the electrical connection form of the 1st thru
  • (A) is a figure which shows arrangement
  • (B) is a figure which shows arrangement
  • (A) is a figure which shows the 1st modification of the position detection apparatus by the 1st Embodiment of this invention.
  • (B) is a figure which shows the 2nd modification of the position detection apparatus by the 1st Embodiment of this invention. It is a figure which shows the electrical connection form of the 1st thru
  • (A) is a figure which shows arrangement
  • (B) is a figure which shows arrangement
  • FIG. 1 It is a figure which shows arrangement
  • FIG. 1 It is a figure which shows arrangement
  • FIG. 1 It is a figure which shows arrangement
  • B is a figure which shows arrangement
  • (A) is a figure which shows the specific example of arrangement
  • positioning of the GMR element in the case of setting n 1 in the 4th Embodiment of this invention.
  • (B) is a figure which shows the specific example of arrangement
  • positioning of the GMR element in case n 2 in the 4th Embodiment of this invention. It is a figure which shows the modification of the position of the GMR element in the case of using a 4th harmonic as a fundamental wave. It is a figure which shows the modification of arrangement
  • (B) is a figure which shows the specific connection form of the AMR element by the background art of this invention. It is a figure which shows the change of the resistance value of each AMR element and the output signal of a magnetic sensor when the object of a position detection object moves to a x direction in the position detection apparatus by the background art of this invention. It is a figure which shows the specific connection form of each AMR element at the time of applying a full bridge connection to the magnetic sensor by the background art of this invention.
  • FIG. 1A is a diagram showing a configuration of the position detection apparatus 1 according to the first embodiment of the present invention.
  • the position detection device 1 is a magnetic position detection device, and extends in the x direction (moving direction of the object) with a magnetic sensor 2 attached to an object (not shown) as a position detection target, as shown in FIG.
  • a magnetic scale 3 having a surface 3a and magnetized so that N poles and S poles appear alternately along the x direction on the surface 3a; and an object of position detection based on an output signal of the magnetic sensor 2.
  • a position acquisition unit 9 position acquisition means for acquiring a position in the x direction.
  • FIG. 1A also shows the strength of the magnetic field formed by the magnetic scale 3.
  • the strength of the magnetic field formed by the magnetic scale 3 is expressed as a sine wave having a wavelength of 2 ⁇ , where ⁇ is the width (length in the x direction) of each magnetic pole appearing on the surface 3a of the magnetic scale 3. Approximated. That is, it is preferable that the magnetic scale 3 itself has periodicity with respect to the strength of the magnetic field.
  • the magnetic sensor 2 includes first to fourth elements 4 A to 4 D.
  • first to fourth elements 4 A to 4 D are drawn as if they are arranged in the x direction, but this drawing is for convenience, and the actual arrangement of the first to fourth elements 4 A to 4 D Is different. The actual arrangement will be described in detail later.
  • FIG. 1B is a diagram showing an electrical connection form of the first to fourth elements 4 A to 4 D.
  • the first to fourth elements 4 A to 4 D are each composed of two GMR elements.
  • the first element 4 A is composed by two GMR elements 5 A1, 5 A2 (two of the first detection element)
  • the second element 4 B is two GMR elements 5 B1 , 5 B2 (two second detection elements)
  • the third element 4 C is constituted by two GMR elements 5 C1 , 5 C2 (two third detection elements)
  • the GMR element is an element whose resistance value changes depending on the strength of the applied magnetic field.
  • the GMR element is placed so that the pin direction (P direction shown in FIG. 1A) is parallel to the normal direction of the surface 3a, so that the GMR element is along the surface 3a.
  • the resistance value changes according to the facing position of the magnetic scale 3.
  • the wavelength of the change in the resistance value (read signal) of the GMR element is 2 ⁇ as shown in FIG. This is twice that of the AMR element (see FIG. 23A).
  • the readout signal of the GMR element is shown using Fourier series expansion, the following equation (16) is obtained.
  • R is the resistance value of the GMR element
  • ⁇ 2 ⁇ ⁇ x / 2 ⁇
  • a 0 , A 1 ,... are constants.
  • the Fourier series expansion of a periodic signal is the sum of a sine term and a cosine term as in the following equation (17).
  • the readout signal is expressed using only the sine term. This is because the read signal is an odd function.
  • the magnetic sensor 2 includes a power supply terminal 6 (first power supply terminal) to which a ground potential (first power supply potential) is supplied and a power supply potential Vcc (second power supply potential).
  • Power supply terminal 7 second power supply terminal
  • the GMR elements 5 A1 and 5 A2 are connected in series between the output terminal 8 a and the power supply terminal 6 in this order.
  • the GMR elements 5 B1 and 5 B2 are connected in series between the power supply terminal 7 and the output terminal 8 a in this order
  • the GMR elements 5 C1 and 5 C2 are connected in this order to the output terminal 8 b and the power supply terminal 6.
  • the GMR elements 5 D1 and 5 D2 are connected in series between the power supply terminal 7 and the output terminal 8 b in this order.
  • the voltage signal appearing at the output terminal 8a becomes one output signal Vsin of the magnetic sensor 2, and the voltage signal appearing at the output terminal 8b becomes the other output signal Vcos of the magnetic sensor 2.
  • the order of connection of the plurality of GMR elements constituting the element may be in any order.
  • the order of connection of the GMR elements 5 A1 and 5 A2 may be reversed.
  • the output signals Vsin and Vcos are expressed by the following equations (18) and (19), respectively.
  • R X x is A1, A2, etc.
  • the numerator of the output signal Vsin is a sum signal of the read signals of the GMR elements constituting the first element
  • the numerator of the output signal Vcos is the sum of the GMR elements constituting the third element. This is the sum signal of the read signals.
  • the denominator of the output signal Vsin is a sum signal of the read signals of the GMR elements constituting the first and second elements
  • the denominator of the output signal Vcos is the read of the GMR elements constituting the third and fourth elements. It becomes the sum signal of the signal.
  • each GMR element is such that when the output signals Vsin and Vcos are calculated, odd-order harmonics including the first-order component of ⁇ are removed, and second-order harmonics (second-order component of ⁇ ) are basically used. Decided to be a wave.
  • odd-order harmonics including the first-order component of ⁇
  • second-order harmonics second-order component of ⁇
  • FIG. 2A is a diagram showing the arrangement of the GMR elements 5 A1 and 5 A2 .
  • FIG. 2B is a diagram showing the arrangement of the GMR elements 5 B1 and 5 B2 .
  • the read signals of the GMR elements 5 A1 , 5 A2 , 5 B1 , and 5 B2 are expressed by the following equations (20) to (23), respectively.
  • Equation (18) Substituting Equations (20) to (23) into Equation (18), the output signal Vsin is obtained as in the following Equation (24).
  • odd-order harmonics including the first-order component of ⁇ disappear, and second-order harmonics (second-order component of ⁇ ) are fundamental. It has become a wave.
  • FIG. 3 is a diagram showing the arrangement of the GMR elements 5 C1 , 5 C2 , 5 D1 and 5 D2 .
  • the predetermined distance is not limited to + ⁇ / 4, and may be determined so that the phase of the output signal Vcos differs by an odd multiple of ⁇ / 2 compared to the phase of the output signal Vsin.
  • the predetermined distance (first predetermined distance) for the GMR elements 5 C1 and 5 C2 and the predetermined distance (second predetermined distance) for the GMR elements 5 D2 and 5 D2 may be different.
  • the read signals of the GMR elements 5 C1 , 5 C2 , 5 D1 , and 5 D2 are expressed as the following Expressions (25) to (28), respectively.
  • the position acquisition unit 9 uses the output signals Vsin and Vcos obtained as described above to calculate the position in the x direction of the object that is the position detection target. Specifically, the position x of the object is calculated by the following equation (30).
  • the position detection apparatus 1 realizes twice the resolution as compared with the conventional position detection apparatus. From another point of view, the same resolution as that obtained when the AMR elements shown in the equations (12) and (13) are used although the GMR elements are used. Therefore, according to the position detection device 1, it is possible to use a GMR element as a detection element for the position detection device.
  • FIG. 4A is a diagram illustrating a first modification of the position detection device 1 according to the first embodiment.
  • the second and fourth elements 4 B and 4 D are configured by resistance elements configured not to be affected by the magnetic field formed by the magnetic scale 3.
  • the “resistive element configured so as not to be affected by the magnetic field formed by the magnetic scale 3” may be a resistive element that does not have a magnetoresistive effect, or from a magnetic field formed by the magnetic scale 3. It may be a GMR element disposed at a magnetically shielded location.
  • the output signals Vsin and Vcos in this case are obtained as in the following equations (31) and (32), where R S is the resistance of the second and fourth elements 4 B and 4 D.
  • the first and third elements 4 A and 4 C and the second and fourth elements 4 B and 4 D are configured by GMR elements disposed at locations magnetically shielded from the magnetic field formed by the magnetic scale 3, the first and third elements
  • the temperature characteristics of the elements 4 A and 4 C and the second and fourth elements 4 B and 4 D can be made uniform.
  • the first and third elements 4 A and 4 D and the second and fourth elements 4 B and 4 D may not be configured as an integrated circuit. There is. Therefore, when it is necessary to make these into an integrated circuit and to make these temperature characteristics uniform, it is preferable to use the position detection device 1 according to the first embodiment.
  • FIG. 4B is a diagram illustrating a second modification of the position detection device 1 according to the first embodiment.
  • the second and fourth elements 4 B and 4 D are constituted by constant current sources.
  • the output signals Vsin and Vcos in this case are obtained as shown in the following equations (33) and (34), where I S is the current generated by the second and fourth elements 4 B and 4 D.
  • the odd-order harmonics including the first-order component of ⁇ disappear, and the second-order harmonics ( ⁇
  • the quadratic component is the fundamental wave. Therefore, it is possible to use a GMR element as a detection element for the position detection device. Moreover, if the wiring between elements becomes long, the wiring resistance may not be negligible. In such a case, it is preferable to use a constant current source.
  • FIG. 5 is a diagram showing an electrical connection form of the first to fourth elements 4 A to 4 D in the position detection apparatus 1 according to the second embodiment of the present invention.
  • the position detection apparatus 1 according to the present embodiment is different from the position detection apparatus 1 according to the first embodiment in that the first to fourth elements 4 A to 4 D are each composed of four GMR elements. The other points are common.
  • the position detection apparatus 1 according to the present embodiment will be described focusing on the differences.
  • the first element 4 A is composed of four GMR elements 5 A1 to 5 A4 (four first detection elements), and the second element 4 B Is constituted by four GMR elements 5 B1 to 5 B4 (four second detection elements), and the third element 4 C includes four GMR elements 5 C1 to 5 C4 (four third detection elements).
  • the fourth element 4 D is composed of four GMR elements 5 D1 to 5 D4 (four fourth detection elements).
  • GMR elements 5 A1 to 5 A4 are connected in series between output terminal 8a and power supply terminal 6 in this order, and GMR elements 5 B1 to 5 B4 are connected to power supply terminal 7 in this order.
  • the GMR elements 5 C1 to 5 C4 are connected in series between the output terminal 8a, the GMR elements 5 C1 to 5 C4 are connected in series between the output terminal 8 b and the power supply terminal 6, and the GMR elements 5 D1 to 5 D4 are connected in this order.
  • the power supply terminal 7 and the output terminal 8b are connected in series.
  • the output signals Vsin and Vcos are expressed by the following equations (35) and (36), respectively.
  • each GMR element is such that when the output signals Vsin and Vcos are calculated, the odd-order harmonics including the first-order component of ⁇ are removed, and the second-order harmonics (
  • the second-order term component of ⁇ is determined to be a fundamental wave.
  • it is determined so as to remove fourth-order harmonics (fourth-order component of ⁇ ).
  • FIG. 6A is a diagram showing the arrangement of GMR elements 5 A1 to 5 A4 .
  • FIG. 6B is a diagram showing the arrangement of the GMR elements 5 B1 to 5 B4 .
  • FIG. 7 is a diagram showing the arrangement of the GMR elements 5 C1 to 5 C4 and 5 D1 to 5 D4 .
  • this predetermined distance is not limited to + ⁇ / 4, and it may be determined so that the phase of the output signal Vcos differs from the phase of the output signal Vsin by an odd multiple of ⁇ / 2.
  • the predetermined distance (first predetermined distance) for GMR elements 5 C1 to 5 C4 and the predetermined distance (second predetermined distance) for GMR elements 5 D1 to 5 D4 may be different.
  • the position detection device 1 As understood from the equations (37) and (38), even in the output signals Vsin and Vcos according to the present embodiment, the odd-order harmonics including the first-order component of ⁇ disappear, and the second-order harmonics ( ⁇ Of the second-order term) is the fundamental wave. Therefore, the position detection device 1 according to the present embodiment also achieves twice the resolution as compared with the conventional position detection device. In addition, in the present embodiment, fourth-order harmonics (fourth-order component of ⁇ ) are also removed. Therefore, it is possible to obtain the position x more accurately than in the first embodiment.
  • FIGS. 8A and 8B are diagrams showing a modification of the position detection device 1 according to the second embodiment.
  • the first position P 1 is a position separated from the first reference position B 1 by + ⁇ / 2 + 2 ⁇ ⁇ i in the x direction
  • the second position P 2 is the first reference position B 1. It is a position away from 1 in the x direction by ⁇ / 2 + 2 ⁇ ⁇ i.
  • each GMR element is arranged in the x direction from the first position P 1 together, GMR elements one by one is disposed to two positions away respectively ⁇ [pi / 8 in x-direction from the second position P 2.
  • n in the case of 3, together with one by one from the first position P 1 to the four positions away respectively ⁇ ⁇ / 8 ⁇ ⁇ / 16 in the x-direction GMR element is disposed, a second position P One GMR element is also arranged at four positions spaced from each other by 2 in the x direction by ⁇ ⁇ / 8 ⁇ ⁇ / 16.
  • n 4
  • the one by one from the second position P 2 respectively ⁇ ⁇ / 8 ⁇ ⁇ / 16 ⁇ ⁇ / 32 distant eight positions in the x-direction GMR element is arranged.
  • odd-order harmonics including the first-order component of ⁇ disappear, and second-order harmonics ( ⁇ 2 Next-order component) can be used as the fundamental wave.
  • second-order harmonics ⁇ 2 Next-order component
  • one GMR element is placed at 2 n positions separated by ⁇ ⁇ / Y 1 ⁇ ⁇ / Y 2 ⁇ ⁇ / Y 3 ... ⁇ ⁇ / Y n in the x direction from the first reference position B 1.
  • Y 1 / second order, Y 2 / second order, Y 3 / second order,... Y n / second order waves are removed.
  • n 4 in FIG. 9
  • the position detection apparatus 1 according to the present embodiment is common to the position detection apparatus 1 according to the second embodiment in that the first to fourth elements 4 A to 4 D are each composed of four GMR elements. However, it differs from the position detection apparatus 1 according to the second embodiment in the physical arrangement of each GMR element. Specifically, the physical arrangement of each GMR element according to the present embodiment is such that when the output signals Vsin and Vcos are calculated, in addition to the odd-order harmonics including the first-order component of ⁇ , the second-order harmonics are included.
  • FIG. 10A is a diagram showing the arrangement of the GMR elements 5 A1 to 5 A4 in the position detection apparatus 1 according to the present embodiment.
  • FIG. 10B is a diagram showing the arrangement of the GMR elements 5 B1 to 5 B4 in the position detection device 1 according to the present embodiment.
  • the distance between the first reference position B 1 of the second reference position B 2 is generally an odd multiple of [pi / 2 k if the fundamental wave is 2 k harmonic .
  • the distance between the first reference position B 1 of the second reference position B 2 is an odd multiple of [pi / 2 there were.
  • the distance between the first reference position B 1 of the second reference position B 2 is an odd multiple of [pi / 4.
  • FIG. 11 is a diagram showing an arrangement of the GMR elements 5 C1 to 5 C4 and 5 D1 to 5 D4 in the position detection apparatus 1 according to the present embodiment.
  • this predetermined distance is not limited to + ⁇ / 8, and it may be determined so that the phase of the output signal Vcos differs by an odd multiple of ⁇ / 2 compared to the phase of the output signal Vsin.
  • the predetermined distance (first predetermined distance) for GMR elements 5 C1 to 5 C4 and the predetermined distance (second predetermined distance) for GMR elements 5 D1 to 5 D4 may be different.
  • the position detection device 1 in addition to the odd-order harmonics including the first-order component of ⁇ , the second-order harmonics ( ⁇ Of the second-order term) is also removed, and the fourth-order harmonic (fourth-order component of ⁇ ) is the fundamental wave. Therefore, the position detection device 1 according to the present embodiment achieves a resolution four times that of the conventional position detection device.
  • the first element 4 A is, 2 n pieces connected in series between the output terminal 8a and the power supply terminal 6 (n is an arbitrary natural number of 2 or more A description will be given assuming that the number of GMR elements is a number selected from among them.
  • the second element 4 B is the same by changing B 1 , P 1 , P 2 , and P 5 to P 8 to B 2 , P 3 , P 4 , and P 9 to P 12 in the following description. Generalization is applicable.
  • n ⁇ 3 is one by one from the position P 5 of the 5 to each ⁇ ⁇ / 16 ⁇ ⁇ ⁇ / 2 n + 1 apart 2 n-2 pieces of position in the x-direction GMR element is arranged, the sixth is arranged one not a GMR element one each ⁇ ⁇ / 16 ⁇ ⁇ ⁇ / 2 n + 1 apart 2 n-2 pieces of position from the position P 6 in the x direction, the position of the 7 One GMR element is arranged at each of 2 n ⁇ 2 positions ⁇ ⁇ / 16... ⁇ ⁇ / 2 n + 1 apart from P 7 in the x direction, and ⁇ 8 directions from the eighth position P 8 in the x direction.
  • ⁇ / 16... ⁇ ⁇ / 2 n + 1 GMR elements are arranged at 2 n ⁇ 2 positions apart from each other.
  • the second or fourth harmonic as the fundamental wave. Therefore, it is possible to obtain twice or four times the resolution as compared with the conventional position detecting device. From another point of view, even if a GMR element that can obtain only half the resolution of an AMR element is used, a resolution equivalent to or higher than that of the conventional one can be obtained, so that a GMR element can be used as a detection element. Become.
  • not only the second-order or fourth-order harmonics but also 2 k (k is a natural number) order harmonics can be the fundamental wave. Therefore, for example, by arranging the GMR element so that the 8th and 16th harmonics become the fundamental wave, higher resolution can be obtained.
  • harmonics other than the 2 k order cannot be fundamental waves. This is because the 2 k +2 k + 1 ⁇ Nth order component (N is an integer satisfying N ⁇ 0) is also removed by removing the 2 k order component.
  • N is an integer satisfying N ⁇ 0
  • Expression (41) represents the signal g ( ⁇ ) by a mathematical expression.
  • k 1 in the formula (42) is an integer.
  • ⁇ may be determined so as to satisfy Equation (42).
  • Equation (43) can be rewritten as the following equation (44).
  • ⁇ is determined from the equation (44) such that the m 0th- order term component is removed, in addition to the m 0th- order term component, the m Nth- order term component (N satisfies N ⁇ 0) expressed by the equation (45) (Integer) is also removed at the same time.
  • Table 1 specifically lists the order m N removed simultaneously for each value of m 0 .
  • ⁇ is determined so that the first-order term component is removed, all odd-order term components are removed.
  • ⁇ is determined such that the second-order term component is removed, the sixth-order term, the 10th-order term, the 14th-order term,... are removed. The same applies to the following.
  • the 2 k +2 k + 1 ⁇ Nth order component (N is an integer satisfying N ⁇ 0) is also removed by removing the 2 k order component.
  • the number represented by 2 k (1 + 2N) appearing in the equation (46) includes a total natural number less than 2 k + 1 .
  • the basic orders to be removed are 1, 4, 8, and the removed orders are 1, 3, 5, 7,..., 2N + 1 order, 4,12. , 20, 28,..., 8N + 4th order, 8, 24, 40, 56,.
  • the components to be removed are the following components: 1, 3, 4, 5, 7, 8, 9, 11,...
  • the 6th order component, the 10th order component and the like are not removed.
  • the orders to be removed are 1, 3, 5, 7,..., 2N + 1 order, 2, 6, 10, 14,..., 4N + second order, 8, 24, 40, 56,.
  • the removed components are 1, 2, 3, 5, 6, 7, 8, 9, 10, 11, 13,..., And the following components are not removed.
  • the “non-removable component” in question is, in short, the harmonic component that should be removed at the same time if the 2 k order used as the fundamental wave is removed, that is, the N k of the 2 k +2 k + 1 ⁇ Nth order component. ⁇ 1 part. Therefore, in order to appropriately remove the “component that is not removed”, the GMR element may be arranged so that the 2 k +2 k + 1 ⁇ Nth order component (N ⁇ 1) is removed.
  • N ⁇ 1 an example will be described.
  • FIG. 13 is a diagram showing a modification of the position of the GMR element in the case where the second harmonic is used as the fundamental wave.
  • n 3
  • a second position from P 2 one by one in four positions respectively ⁇ ⁇ / 8 ⁇ ⁇ / 12 apart in the x direction GMR element is arranged.
  • n a 4
  • GMR elements one by one is disposed to the second position P 2, respectively ⁇ ⁇ / 8 ⁇ ⁇ / 12 ⁇ ⁇ / 16 distant eight positions in the x-direction from.
  • n 4
  • 1, 3, 5, 7,..., 2N + 1 order 4, 12, 20, 28,..., 8N + 4th order, 6, 18, 30,.
  • the 8th, 24th, 40th, 56th,..., 16N + 8th order components are removed.
  • the arrangement sequence of GMR elements is ⁇ ⁇ / ⁇ (2 k +2 k + 1 ⁇ N) ⁇ 2 ⁇ .
  • An arrangement of ⁇ ⁇ / (2 k + 1 +2 k + 2 ⁇ N) may be added. By doing so, it becomes possible to suitably remove higher harmonics than the fundamental wave.
  • the basis is the arrangement capable of removing a power of two following components other than 2 k-order term component is there. 1 This is a plurality of positions away respectively ⁇ ⁇ / 2 1 ⁇ ⁇ ⁇ / 2 k ⁇ ⁇ / 2 k + 2 ⁇ ⁇ / 2 k + 3 ⁇ in the x direction from the first reference position B 1 This corresponds to arranging GMR elements one by one.
  • 2 k +2 k + 1 N is equal to 2 k (2N + 1). Therefore, if an arrangement capable of removing higher harmonics corresponding to odd multiples of the fundamental wave order 2 k is added to the basic arrangement, components other than the fundamental wave can be completely removed. However, in this arrangement, the removed orders may overlap, which is not efficient. For example, since 2 k ⁇ 9 can be written as 2 k ⁇ 3 ⁇ (2 ⁇ 1 + 1), it is automatically removed by an arrangement that removes the 2 k ⁇ 3 order harmonics.
  • An efficient arrangement that avoids such duplication is an arrangement that can remove higher-order harmonics corresponding to 2 k P (P is a prime number of 3 or more). In other words, if an arrangement capable of removing harmonics of the order corresponding to 2 kP is added to the basic arrangement, components other than the fundamental wave can be efficiently removed completely.
  • the number of GMR elements that can be arranged is limited. Therefore, if the first element 4 A is composed of 2 n GMR elements, a power-of-two component (2 0 , 2 1 ,..., 2 k ⁇ 1 , 2 other than the 2 k order component) k + 1 , 2 k + 2 , etc and 2 k P-order components (2 k ⁇ 3, 2 k ⁇ 5, 2 k ⁇ 7, 2 k ⁇ 11,...) An arrangement corresponding to the selected order may be adopted. In this selection, it is preferable to select a component having a large influence on the output signal.
  • the harmonic component having an even multiple of the fundamental wave order does not remain in the numerator of the output signal. Since such harmonic components have a small influence on the output signal, it is preferable not to select them and to preferentially select the harmonic components remaining in the molecule.
  • k 1, a power order component 2 other than the 2 k-order terms component 2 0, 2 2, 2 3, a., Tables in 2 k P
  • the resulting components are 2 1 ⁇ 3, 2 1 ⁇ 5, 2 1 ⁇ 7, 2 1 ⁇ 11,.
  • the even multiple of the order 2 of the fundamental wave is 4, 8, 12,.
  • the first element 4 A is moved in the x direction to + (2i 1 ⁇ 1) ⁇ / 2 k (i 1 is Arbitrary integer)
  • the second element 4 B is arranged at a shifted position, and the first element 4 A is shifted in the x direction by + (2i 2 ⁇ 1) ⁇ / 2 k + 1 + (i 2 is an arbitrary integer)
  • the third element 4 C is disposed at the position, and the fourth element 4 C is shifted to the position by shifting the third element 4 C by + (2i 3 ⁇ 1) ⁇ / 2 k (i 3 is an arbitrary integer) in the x direction.
  • D may be arranged.
  • FIG. 14A is a diagram showing a configuration of the position detection apparatus 1 according to the fourth embodiment of the present invention.
  • the position detection device 1 according to the present embodiment is different from the position detection device 1 according to the first embodiment in that the magnetic sensor 2 includes first to eighth elements 4 A to 4 H. .
  • the electrical connection form and physical arrangement of the first to eighth elements 4 A to 4 H will be described in detail.
  • FIG. 14B is a diagram showing an electrical connection form of the first to eighth elements 4 A to 4 H.
  • the first to eighth elements 4 A to 4 H are each composed of two GMR elements.
  • the first to fourth elements 4 A to 4 D are the same as those in the first embodiment.
  • the fifth element 4 E includes two GMR elements 5 E1 and 5 E2 (two fifth detection elements)
  • the sixth element 4 F includes two GMR elements 5 F1 and 5 F2
  • the seventh element 4 G is composed of two GMR elements 5 G1 and 5 G2 (two seventh detection elements)
  • the eighth element 4 H is It is constituted by two GMR elements 5 H1 and 5 H2 (two eighth detection elements).
  • the magnetic sensor 2 includes a power terminal 6 (first power terminal), a power terminal 7 (second power terminal), and output terminals 8a and 8b (first and second power terminals).
  • output terminals 8c and 8d third and fourth output terminals
  • subtractors 10 and 11 first and second subtraction circuits
  • the connections between the GMR elements 5 A1 , 5 A2 , 5 B1 , 5 B2 , 5 C1 , 5 C2 , 5 D1 , 5 D2 and the respective terminals are the same as in the first embodiment.
  • the GMR elements 5 E1 and 5 E2 are connected in series between the output terminal 8 c and the power supply terminal 6 in this order.
  • the GMR elements 5 F1 and 5 F2 are connected in series between the power supply terminal 7 and the output terminal 8 c in this order, and the GMR elements 5 G1 and 5 G2 are connected in this order to the output terminal 8 d and the power supply terminal 6.
  • the GMR elements 5 H1 and 5 H2 are connected in series between the power supply terminal 7 and the output terminal 8 d in this order.
  • the output terminal 8a is connected to the non-inverting input terminal of the subtractor 10
  • the output terminal 8b is connected to the non-inverting input terminal of the subtractor 11
  • the output terminal 8c is connected to the inverting input terminal of the subtractor 10
  • the output terminal 8d Is connected to the inverting input terminal of the subtractor 11.
  • the subtracter 10 outputs a voltage signal obtained by subtracting the voltage signal appearing at the output terminal 8c from the voltage signal appearing at the output terminal 8a, and this voltage signal becomes one output signal Vsin of the magnetic sensor 2.
  • the subtractor 11 outputs a voltage signal obtained by subtracting the voltage signal appearing at the output terminal 8d from the voltage signal appearing at the output terminal 8b, and this voltage signal becomes the other output signal Vcos of the magnetic sensor 2.
  • connection form is a full bridge connection similar to the connection form shown in FIG.
  • the arrangement of GMR elements for using a second harmonic as a fundamental wave in the case of performing full-bridge connection will be described as in the first embodiment.
  • the physical arrangement of each GMR element is such that when the output signals Vsin and Vcos are calculated, odd-order harmonics including the first-order component of ⁇ are removed, and second-order harmonics ( ⁇ Of the second-order term) is determined to be a fundamental wave.
  • the arrangement of the first to fourth elements 4 A to 4 D may be the same as the arrangement described in the first embodiment (the arrangement shown in FIGS. 2 and 3). That is, two GMR elements (GMR elements 5 A1 and 5 A2 ) constituting the first element 4 A are provided at two positions that are ⁇ ⁇ / 2 apart from the first reference position B 1 in the x direction. Just place them one by one.
  • One piece may be arranged at two positions separated by ⁇ ⁇ / 2 in the direction.
  • the GMR elements 5 C1 and 5 C2 constituting the third element 4 C may be arranged at positions where the GMR elements 5 A1 and 5 A2 are shifted by + (2i 2 ⁇ 1) ⁇ / 4 in the x direction.
  • the GMR elements 5 D1 and 5 D2 constituting the fourth element 4 D may be arranged at positions where the GMR elements 5 B1 and 5 B2 are shifted by + (2i 3 ⁇ 1) ⁇ / 2 in the x direction.
  • i 1 , i 2 , and i 3 are all numbers selected from arbitrary integers.
  • the intermediate position between the GMR element 5 C1 and the GMR element 5 C2 is referred to as “third reference position B 3 ”.
  • the third reference position B 3 is equal to B 1 + (2i 2 ⁇ 1) ⁇ / 4.
  • Two GMR elements (GMR elements 5 C1 and 5 C2 ) constituting the third element 4 C are arranged at two positions that are ⁇ ⁇ / 2 apart from the third reference position B 3 in the x direction. It will be arranged one by one.
  • An intermediate position between the GMR element 5 D1 and the GMR element 5 D2 is referred to as a “fourth reference position B 4 ”.
  • the fourth reference position B 4 becomes equal to B 1 + (2i 1 ⁇ 1) ⁇ / 2 + (2i 3 ⁇ 1) ⁇ / 2.
  • two GMR elements (GMR elements 5 D1 and 5 D2 ) constituting the fourth element 4 D are arranged at two positions that are ⁇ ⁇ / 2 apart from the fourth reference position B 4 in the x direction. It will be arranged one by one.
  • the fifth to eighth elements 4 E to 4 H may be arranged at positions shifted by a predetermined distance in the x direction from the first to fourth elements 4 A to 4 D , respectively. Specifically, if a position that is separated from the first reference position B 1 by + (2i 4 ⁇ 1) ⁇ / 2 in the x direction is a fifth reference position B 5 , the second element 4 E is formed. Two GMR elements (GMR elements 5 E1 and 5 E2 ) may be arranged one by one at two positions that are ⁇ ⁇ / 2 apart from the fifth reference position B 5 in the x direction.
  • two GMR elements may be arranged one by one at two positions spaced ⁇ ⁇ / 2 in the x direction from the sixth reference position B 6 .
  • an eighth element 4 H is configured by assuming that a position away from the first reference position B 1 by + 2i 7 ⁇ / 2 + (2i 2 ⁇ 1) ⁇ / 4 in the x direction is an eighth reference position B 8.
  • GMR elements 5 H1 and 5 H2 may be arranged one by one at two positions that are ⁇ ⁇ / 2 apart from the eighth reference position B 8 in the x direction.
  • i 4 to i 7 are all numbers selected from arbitrary integers.
  • Table 2 summarizes the arrangement of the first to eighth reference positions B 1 to B 8 starting from the first reference position B 1 .
  • the two GMR elements constituting each of the first to eighth elements 4 A to 4 H are placed at two positions ⁇ ⁇ / 2 away from the corresponding ones of the reference positions shown in the table in the x direction. By arranging them one by one, it becomes possible to use the second harmonic as the fundamental wave.
  • the second harmonic can be used as a fundamental wave. Further, since the full bridge connection is used, it is possible to obtain an output twice that of the case of the herb bridge connection, and furthermore, it is possible to remove the DC component from the output signals Vsin and Vcos.
  • the vertically long rectangles indicate individual GMR elements.
  • FIG. 15 (b), k 2 and shows a specific arrangement example of the GMR element when the elements 4 A ⁇ 4 H respective first to eighth constituted by two two GMR elements It is. Also in this figure, the vertically long rectangles indicate individual GMR elements.
  • the GMR elements can be arranged at different positions on the x-axis as shown in FIG.
  • the arrangement of the GMR element in the case of adopting the full bridge connection has been described.
  • an arrangement similar to the example shown in FIG. in this case, the first element 4 A arranged GMR element as shown in FIG. 12, further for the second to eighth element 4 B ⁇ 4 H, a first reference position B shown in FIG. 12 After replacing 1 with the reference positions B 2 to B 8 shown in Table 3, the GMR elements may be similarly arranged. This also makes it possible to use a 2 k- order harmonic as the fundamental wave.
  • the harmonics other than the 2 k order cannot be the fundamental wave, and the full bridge connection is the same as the half bridge connection. Therefore, it is sufficient to determine the arrangement of the GMR element for using the 2 kth order (k ⁇ 1) harmonic as the fundamental wave so that the 2 m order component (m is a positive integer smaller than k) is removed. .
  • the arrangement of GMR elements for appropriately removing higher-order harmonics than the fundamental wave may be the same as in the case of half-bridge connection. In other words, when the harmonic used as the fundamental wave is the 2 k order, if the GMR element is arranged so that the 2 k +2 k + 1 ⁇ Nth order component is removed, higher harmonics than the fundamental wave are also appropriately removed. It becomes possible.
  • each of the first to eighth elements 4 A to 4 H is configured by 2 n GMR elements, and a 2 k- order component (k is a number selected from an arbitrary natural number) as a fundamental wave.
  • a power-of-two order component other than the 2 k order component (2 0 , 2 1 ,..., 2 k ⁇ 1 , 2 k + 1 , 2 k + 2 ,.
  • 2 k P (P is a prime number greater than or equal to 3) (2 k ⁇ 3, 2 k ⁇ 5, 2 k ⁇ 7, 2 k ⁇ 11,...)
  • An arrangement corresponding to the selected order may be adopted by selecting the number.
  • the selection criteria may be the same as in the half-bridge connection.
  • the second to eighth elements 4 B to 4 H can be arranged in the same manner as the first element 4 A by using the reference positions shown in Table 3 instead of the first reference position B 1. Good.
  • the 2 k +2 k + 1 Nth order component is also removed by removing the 2 k order component, but the arrangement for removing these automatically removed components is arranged. That doesn't mean you can't.
  • the sixth-order term component is automatically removed.
  • FIG. I do not care.
  • the detection elements are arranged at different positions on the x-axis, but this is not always necessary.
  • the detection elements by arranging the detection elements side by side in the normal direction of the surface 3a, it is possible to obtain the same output as when the detection elements are arranged at different positions on the x-axis without impairing the phase relationship. Become.
  • the present invention is also applicable to the case where another type of magnetoresistive element such as an AMR element or a TMR (tunnel-magnetoresistive) element is used as the detection element. it can.
  • AMR element it is possible to obtain a higher resolution than that of a conventional position detection apparatus that similarly uses an AMR element.
  • the present invention can also be applied to the optical position detection device described above.
  • an optical scale having a diffraction pattern formed on the surface is used instead of the magnetic scale 3.
  • an optical sensor is used instead of the magnetic sensor 2, and the detection element is a photodetection element.
  • the optical sensor is moved along the surface of the optical scale, the amount of received light is the same signal as the GMR readout signal shown in equations (20) to (23).
  • even-order harmonics can be used as the fundamental wave in this signal. Therefore, even in an optical position detection device, it is possible to obtain a resolution that is at least twice that of the prior art.
  • FIG. 17 shows a modified example of the arrangement of the GMR elements shown in FIGS.
  • the physical arrangement order of the GMR elements is different from the example shown in FIGS. 2A and 2B, but the second harmonic is used as the fundamental wave.
  • the specific arrangement order may be determined in consideration of the ease of wiring.
  • the present invention provides an annular or curved scale (magnetic rotary encoder, optical rotary encoder). The same applies when used. That is, it can be applied to all measuring instruments having periodicity with respect to a certain physical property value.
  • FIGS. 18, 19, 20, and 21 show examples in which the same arrangement of GMR elements as in FIGS. 9, 12, 13, and 16 is applied to an annular encoder.
  • FIG. 22 shows an example in which the same arrangement of GMR elements as in FIGS. 15A and 15B is applied to an annular encoder. As shown in these drawings, the present invention is also applicable to an annular encoder.

Abstract

L'invention porte sur un dispositif de détection de position ayant une résolution encore plus élevée. Dans le dispositif de détection de position (1), un premier élément (4A) est connecté en série entre une première borne de sortie (8a) et une première borne d'alimentation électrique (6), et comprend 2n premiers éléments de détection disposés en apposition le long de la direction x, un troisième élément (4C) est connecté en série entre une seconde borne de sortie (8b) et la première borne d'alimentation électrique (6) et comprend 2n premiers éléments de détection disposés en apposition le long de la direction x, l'agencement des 2n premiers éléments de détection dans la direction x étant déterminé de telle sorte qu'au moins le terme de phase linéaire est enlevé du signal combiné des signaux lus respectifs desdits 2n premiers éléments de détection, et une unité d'acquisition de position (9) calcule la position d'un objet qui est le sujet d'une détection de position sur la base de la sortie de signal à partir de la première borne de terminal (8a) et la sortie de signal à partir de la seconde borne de sortie (8b).
PCT/JP2011/059422 2010-04-26 2011-04-15 Dispositif de détection de position WO2011136054A1 (fr)

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JP2017032394A (ja) * 2015-07-31 2017-02-09 Tdk株式会社 角度センサの補正装置および補正方法ならびに角度センサ
JP2017173325A (ja) * 2016-03-23 2017-09-28 アナログ・デヴァイシズ・グローバル 磁界検出器
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EP3907477A1 (fr) * 2020-05-06 2021-11-10 Dr. Johannes Heidenhain GmbH Dispositif magnétique de mesure de la position

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DE102021125964A1 (de) 2021-10-06 2023-04-06 Infineon Technologies Ag Ein Positionssensorsystem, ein optisches Linsensystem und eine Anzeige

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US10024691B2 (en) 2014-03-10 2018-07-17 Dmg Mori Seiki Co., Ltd. Position detecting device
US9733317B2 (en) * 2014-03-10 2017-08-15 Dmg Mori Seiki Co., Ltd. Position detecting device
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JP2017032394A (ja) * 2015-07-31 2017-02-09 Tdk株式会社 角度センサの補正装置および補正方法ならびに角度センサ
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