WO2011101934A1 - 混合ガス供給装置 - Google Patents
混合ガス供給装置 Download PDFInfo
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- WO2011101934A1 WO2011101934A1 PCT/JP2010/006261 JP2010006261W WO2011101934A1 WO 2011101934 A1 WO2011101934 A1 WO 2011101934A1 JP 2010006261 W JP2010006261 W JP 2010006261W WO 2011101934 A1 WO2011101934 A1 WO 2011101934A1
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- gas
- flow rate
- gas supply
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- mixed gas
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- 239000000203 mixture Substances 0.000 title abstract 4
- 239000007789 gas Substances 0.000 claims abstract description 306
- 238000000034 method Methods 0.000 claims abstract description 35
- 230000008569 process Effects 0.000 claims abstract description 33
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 26
- 238000009792 diffusion process Methods 0.000 claims description 52
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- 238000010586 diagram Methods 0.000 description 14
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- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87249—Multiple inlet with multiple outlet
Definitions
- the present invention relates to an improvement of a mixed gas supply device for a semiconductor manufacturing apparatus, and shortens a process time by enabling a plurality of gases to be switched and supplied quickly without causing backflow or backdiffusion.
- the present invention relates to a mixed gas supply apparatus that can reduce gas loss and downsize a mixed gas production apparatus.
- Japanese Patent No. 3442604 shows an example, and as shown in FIG. 18, when a plurality of gas types G 1 to G n are switched and supplied by operating the switching valves V 1 to V n , a.
- the supply line of the gas type with the minimum flow rate is arranged at the position farthest from the gas out part Go, or b.
- Orifices S 1 to Sn are provided so that the ratio of the passage area of each line L 1 to L n to the gas flow rate of each line is constant, or c.
- the change of the gas type by switching the switching valves V 1 to V n by increasing the flow rate of the gas type of the minimum flow rate by using the valve with the orifice OL as shown in FIG.
- the switching valves V 1 to V n in FIG. 18 are all orifice-type valves having the configuration shown in FIG. 19, and the lines L 1 to L n of the gas types G 1 to G n
- the switching valves V 1 to V n It is intended to prevent the backflow and back diffusion of gas that occurs during the switching operation.
- an orifice is provided in the flow path, a valve with a built-in orifice is used, or the orifice is a gasket-type orifice.
- the mixed gas supply device that connects the lines in parallel and supplies the mixed gas from each gas supply line to the location where the gas is used through the manifold.
- a configuration in which an orifice or a valve with a built-in orifice is used for the purpose of preventing backflow or back diffusion into the line is limited to the above-mentioned Patent No. 3442604, Patent No. 338777, and the like.
- the present invention has the above-mentioned problem in the mixed gas supply device for the conventional semiconductor manufacturing apparatus, that is, the small flow gas supply line is positioned upstream of the large flow gas supply line with respect to the gas out part Go.
- a mixed gas supply device that can effectively prevent the backflow and back diffusion of gas species, enhances the gas replacement performance of the gas supply system including the manifold, and significantly shortens the processing time. This is the main purpose of the invention.
- Inventors of the present application respond to the increase in the number of gas supply lines and the increase in the size of the shower plate, thereby speeding up the gas replacement and preventing gas back diffusion.
- the relationship between the position of the orifice and the action of preventing gas backflow and backdiffusion is confirmed by experiment, and then the arrangement of gas supply lines, manifold inner diameter, shower plate in the mixed gas supply device The relationship between the characteristics and the gas replacement time in the chamber was confirmed by experiments.
- the present invention was devised based on the results of each of the above-mentioned tests by the inventors of the present application, and provides a mixed gas supply device for a semiconductor manufacturing apparatus capable of speeding up gas replacement and preventing backflow and backdiffusion. It is to provide.
- the inventors of the present application defined gas backflow and backdiffusion related to gas replacement of the mixed gas supply apparatus as follows, and based on this, studied a countermeasure for suppressing backflow and backdiffusion.
- C Gas back-diffusion A phenomenon in which the gas in the large flow line diffuses into the small flow line when multiple gases are flowing at the same time.
- the reverse flow of gas that occurs during simultaneous opening and closing of the valve is basically a phenomenon that occurs because both valves are open at the same time during simultaneous opening and closing of the valve. It is related to. In order to prevent backflow, it is necessary to provide a time difference (day time) for opening and closing both valves.
- a time difference for opening and closing both valves.
- the valve is a pneumatically operated metal diaphragm valve (manufactured by Fujikin Co., Ltd.)
- an operating air pressure supply system if the pneumatic tube is 1000 mm long, the outer diameter is 3 mm ⁇ , and the supply pressure is 0.4 to 0.6 MPa, a delay time of about 40 msec is provided to completely eliminate the reverse flow of a. It has been confirmed that it can be prevented.
- FIG. 1 shows a gas diffusion test apparatus used for studying the above-described reverse flow of B and reverse diffusion of C, and the reverse diffusion phenomenon when Ar and a small flow rate He are simultaneously supplied using the test apparatus.
- GS 1 to GS 4 are gas supply ports
- RG is a pressure regulator
- PG is a pressure gauge
- F is a filter
- VS 1 to VS 4 are inlet side valves
- FCS is a pressure type flow rate control device.
- VO 1 to VO 4 are outlet side switching valves
- 1 is a manifold (inner diameter 4.4 mm ⁇ )
- 2 is a mixed gas outlet
- 3 is a mixed gas supply pipe (1/4 ′′ ⁇ 0.6 m)
- 4 is a regulating valve
- 5 is a process chamber (39.5 l)
- 6 is a vacuum pump
- 7 is a regulating valve
- 8 is a quadrupole mass spectrometer (Qmass, intake pressure 3.0 ⁇ 10 ⁇ 4 Pa)
- 9 is a pressure regulator
- CM is a pressure gauge (capacitance manometer, 100 Torr, 1 Torr)
- 10 is a two-way three-way valve
- 11 is a PC
- 12 is a solenoid valve
- 13 is a control device (PLC)
- 14 is an air tube (inner diameter 2.5 mm ⁇ 1 m) It is.
- the supply pressure to the gas supply port GS is 250 KPaG, and a metal diaphragm valve is used for the inlet side valve VS and the outlet side switching valve VO.
- Figure 2 illustrates the orifices of the installation location of the mixed gas supply device intended for the above discussion, Ar gas 140 sccm the He gas purge to the gas supply port GS 1, to the gas supply port GS 4 at a high flow rate line, He gas 1 to 10 sccm is supplied to the gas supply port GS 5 of the small flow rate line, the inlet side valves VS 1 to VS 3 are closed, the VS 4 to VS 5 are opened, the outlet side valves VO 1 to VO 3 are closed, and VO 4 to VO 5 are opened, He and Ar are simultaneously supplied for 1 minute under the condition that the pressure of the manifold 1 is 100 Torr, and then VO 4 and VO 5 are closed, and VS 1 and VO 1 are opened.
- VO 1 After sufficiently purging the junction with He, VO 1 was closed, VO 5 was opened, He of the small flow rate line was drawn into Qmass 8 in FIG. 1, and the Ar ion concentration in the He gas was measured.
- FIG. 3 shows the results of the Ar reverse diffusion test.
- Curve a shows a case where an orifice is provided at position A in FIG. 2
- curve b shows a case where an orifice is provided at position B
- curve C shows that This shows a case where an orifice is provided at position C, and it has been found that providing the orifice downstream of the outlet side valve VO is most effective in preventing back diffusion and back flow.
- the pressure type flow control device FCS is used as the flow control device for the large flow gas line because the gasket type orifice provided on the outlet side of the FCS is used as the orifice C. Therefore, it is needless to say that an orifice C may be provided on the downstream side (exit side) using the thermal flow rate control device MFC in the same manner as the small flow rate gas line.
- the small flow rate gas line is arranged on the downstream side (approximately 40 mm interval) in the immediate vicinity of the large flow rate gas line. It has been found that the reverse diffusion of the large flow rate gas into the small flow rate line can be effectively prevented by arranging the orifice on the downstream side of the outlet side valve VO 5 .
- the inventors of the present application prepare a test device using the mixed gas supply device as shown in FIG. The gas replacement characteristics in the chamber under various gas supply conditions were investigated.
- the same members as those in FIG. 1 are denoted by the same reference numerals, and the mixed gas supply pipe 3 is 3/8 ′′ ⁇ 1.2 m.
- the pseudo shower plate SP is interposed in the gas supply pipe 3. That is, the pseudo shower plate SP functions as a shower plate installed in the process chamber 5.
- An alternative that can be adjusted to an internal capacity of 137.8 cc and a pressure of 3, 50, 100 Torr is used.
- the process gas Ar from the gas supply port GS 1 and the carrier gas N 2 from the gas supply port GS 4 are supplied in the gas supply sequence as shown in FIG. 5, respectively, and are installed in the chamber 5 (internal volume 39.5 l). Gas displacement in the chamber 5 was measured by the quadrupole mass spectrometer 8.
- the measurement is performed using the internal pressure (3 Torr, 5 Torr, 100 Torr) of the pseudo shower plate SP, the inner diameter (4.4 mm ⁇ , 10 mm ⁇ ) of the manifold 1 and the flow rate of the process gas Ar (3 sccm, 5 sccm, 10 sccm) as parameters, respectively.
- the results shown in FIG. 8 (inner diameter 10 mm ⁇ of manifold 1) and FIG. 8 (inner diameter of manifold 1 4.4 mm ⁇ ) were obtained.
- FIG. 4 the same test was performed when the small flow rate gas line Ar was supplied from the gas supply port VO 4 and the carrier gas N 2 was supplied from the gas supply port VO 1 .
- FIG. 7 inner diameter of manifold 1 is 4.4 mm ⁇
- FIG. 9 inner diameter of manifold 1 is 10 mm ⁇
- the inventors of the present application have arranged the small flow rate gas supply line in the vicinity of the mixed gas outlet in the mixed gas supply device for semiconductor manufacturing equipment, and the outlet of the small flow rate gas supply line.
- a reverse diffusion preventing orifice having an appropriate diameter is provided at the end of the gas outlet of the side switching valve Vo, or the passage sectional area of a part of the outlet side gas passage of the flow control device is reduced instead of the orifice.
- the idea is that it is possible to cope with an increase in gas supply lines and an increase in the size and complexity of the shower plate by preventing reverse flow and reverse diffusion of the gas, and enabling high-speed gas replacement and gas reverse diffusion prevention. Based on this, a mixed gas supply device according to the present invention has been invented.
- a plurality of gas supply lines including the flow rate control device and the outlet side switching valve VO are arranged in parallel, and the gas outlets of the outlet side switching valves VO are connected to the manifold 1.
- the outlet side of the flow rate control apparatus and the inlet side of the outlet side switching valve VO are connected to each other.
- the outlet side connection fitting 22 and the mounting base 19 having the gas passage 19a of the flow rate control device are connected in an airtight manner, and a part of the flow path 24 of the outlet side connection fitting 22 or the outlet side switching valve VO and the manifold 1 are connected.
- a small hole portion 26 is provided in the flow path 25 that communicates with the mixed gas flow hole 20 to prevent back diffusion of other gases upstream of the outlet side switching valve VO or upstream of the flow rate control device.
- Mixed gas outlet 2 It is obtained by the basic configuration of the invention that enables high-speed gas replacement process chamber 6 coupled.
- the invention of claim 2 is the invention of claim 1, wherein the flow rate control device is a flow rate variable pressure type flow rate control device, and the flow path 28 of the outlet side connection fitting 22 is connected to a large-diameter horizontal passage 29 a.
- a small-diameter horizontal passage 29b and a small-diameter vertical passage 28a communicating these are formed, and the small hole portion 26 is provided in a part of the small-diameter vertical passage 28a.
- the invention of claim 3 is the invention of claim 1, wherein the flow rate control device is a flow rate variable pressure type flow rate control device, and the flow path 28 of the outlet side connection fitting 22 is connected to a large-diameter horizontal passage 29 a.
- a small-diameter horizontal passage 29b and a large-diameter vertical passage 28b communicating these are formed, and the small hole 26 is provided in a part of the small-diameter horizontal passage 29b.
- the process chamber 5 connected to the mixed gas outlet 2 is a process chamber 5 with a shower plate SP. is there.
- the outlet-side switching valve VO is a pneumatically operated valve that contacts and separates the valve body made of metal diaphragm from the valve seat. .
- a plurality of gas supply lines including the flow rate control device and the outlet side switching valve VO are arranged in parallel, the gas outlets of the outlet side switching valves VO are connected to the manifold 1, and the manifold In the mixed gas supply apparatus in which the gas supply line near the mixed gas outlet is used for supplying a small flow rate gas, the outlet side of the flow rate control device of the small flow rate gas supply line and the inlet side of the outlet side switching valve VO And the gas outlet side passage 27 of the outlet side switching valve VO and the manifold 1 are connected to the outlet side of the outlet side connecting valve VO through the mounting base 19 having the outlet side fitting 22 and the gas passage 19a.
- a reverse diffusion preventing orifice 30 is provided between the outlet side end of the gas outlet side passage 27 of the side switching valve VO and the inlet side of the gas flow path 25 communicating with the mixed gas flow passage 20 of the manifold 1 for airtightness.
- the basic configuration of the invention is that the connection and prevention of back diffusion of other gases upstream of the outlet side switching valve VO and the high-speed gas replacement of the process chamber 6 connected to the mixed gas outlet 2 of the manifold 1 are possible. It is a thing.
- the invention of claim 7 is the invention of claim 6, wherein the flow rate control device is a flow rate variable pressure type flow rate control device having a large flow rate orifice OL 1 and a small flow rate orifice OL 2, and the flow rate control device.
- the flow rate control range is 3 SCCM to 2000 SCCM and the inner diameter of the orifice 30 is 0.6 mm ⁇ .
- the invention of claim 8 is the invention of claim 6, wherein the orifice 30 is a gasket type orifice.
- the invention of claim 9 is the invention of claim 6, 7 or 8, wherein the process chamber 5 connected to the mixed gas outlet 2 is a process chamber 5 with a shower plate SP. is there.
- a tenth aspect of the invention is the invention according to the sixth, seventh or eighth aspect, wherein the outlet-side switching valve VO is a pneumatically operated valve in which a metal diaphragm valve body is brought into contact with or separated from a valve seat. .
- a small flow rate process gas supply line is provided at a position close to the mixed gas outlet 2 of the manifold of the mixed gas supply device, and the large flow rate gas supply line is provided upstream of the mixed gas outlet 2, that is, mixed. Since the process gas supply line is provided at a position away from the gas outlet 2, the conventional small flow rate process gas supply line is provided upstream of the large flow rate gas supply line, that is, at a position further away from the mixed gas outlet 2. Compared to the case, the gas replacement of the manifold portion can be performed more quickly. As a result, even if the pressure in the shower plate SP increases, that is, even if the shower plate is enlarged, the gas replacement time in the process chamber can be shortened, and the semiconductor productivity and gas utilization efficiency are significantly improved.
- a small hole portion 26 is provided in the flow path 24 in the outlet side connection fitting 22 of the pressure type flow control device, and the small hole portion 26 enables effective back diffusion of gas into the main body of the pressure type flow control device FCS. I try to prevent it. As a result, it is possible to effectively prevent the back diffusion of gas without causing a significant pressure loss and degrading the control characteristics of the pressure type flow rate control device FCS. It is possible to simplify the structure of the apparatus and facilitate assembly.
- a gasket type orifice 28 is provided between the outlet side end portion of the gas outlet side passage 27 of the outlet side switching valve VO and the inlet side portion of the gas flow path 25 communicating with the mixed gas flow passage 20 of the manifold 1. Gas to the upstream side of the outlet side switching valve VO is effectively prevented.
- FIG. 5 shows a supply sequence of the carrier gas N 2 and the process gas Ar in the test of FIG. The gas replacement characteristics when the inner diameter of the manifold is 4.4 mm ⁇ are shown (the small flow rate Ar line is upstream of the carrier gas).
- FIG. 3 is a structural diagram of a flow rate range variable pressure flow control device used in the mixed gas supply device according to the first embodiment and the second embodiment of the present invention.
- FIG. 16 is an explanatory diagram of a flow rate variable pressure type flow rate control device used in the mixed gas supply device of FIG. 15. It is a block diagram of a conventional mixed gas supply apparatus. It is sectional drawing which shows an example of the exit side switching valve used with the conventional mixed gas supply apparatus.
- FIG. 10 is a system diagram of the mixed gas supply apparatus according to the first embodiment of the present invention
- FIG. 11 is a schematic front view thereof.
- 10 and 11 GS 1 to GS n are gas supply ports
- RG is a pressure regulator
- PG is a pressure gauge
- F is a filter
- VS 1 to VS n are inlet side valves
- FCS is a pressure-type flow rate control.
- the devices, VO 1 to VOn are outlet side switching valves
- 1 is a manifold.
- the pressure type flow rate control device is used as the flow rate control device, but it goes without saying that the thermal type flow rate control device MFC may be used instead of the pressure type flow rate control device. It is.
- Reference numerals 15 to 19 denote mounting bases
- 21 denotes an inlet side coupling fitting of the pressure type flow control device
- 22 denotes an outlet side coupling fitting
- gas flowing in from the gas supply port GS passes through the flow path 23 of the inlet side coupling fitting 21.
- the gas that has flowed into the main body of the flow rate control device and has been controlled to a predetermined flow rate flows into the outlet side switching valve VO through the flow path 24 of the outlet side coupling fitting 22 and the flow path 19a of the mount 19.
- the gas flowing out from the outlet side switching valve VO flows into the mixed gas passage 20 through the flow path 25 of the manifold 1 and is supplied from the mixed gas outlet 2 to the process chamber.
- 5 is a process chamber
- SP is a shower plate provided in the process chamber 5
- 6 is a vacuum pump.
- the inner diameter of at least 1 to 5 mm long portion of the flow path 25 formed in the manifold 1 of the outlet side switching valve VO is a small hole portion 26 having a diameter of about 0.4 mm to 1.2 mm ⁇ .
- the function of the orifice for preventing back diffusion according to the small hole portion 26 is substituted.
- the length of the small hole 26 is optimally about 1 to 5 mm, and if it exceeds 5 mm, the pressure loss increases when the gas flow rate is large, and the secondary side pressure of the pressure type flow control device rises to increase the flow rate. The control range will be reduced.
- the same applies to the inner diameter of the small hole portion 26, and the inner diameter and length of the small hole portion 26 must be selected to values that do not adversely affect the control characteristics of the pressure type flow control device.
- the mounting bases 15 to 19 and the devices RG, F, VS, FCS, VO, and the like are detachably and airtightly connected as is well known, and similarly, the main body of the pressure type flow control device FCS is connected to the respective units.
- the metal fittings 21 and 22 are also attached and fixed detachably in an airtight manner.
- the pressure type flow control device FCS and other devices are all known, detailed description thereof is omitted.
- the small hole portion 26 is provided in the flow path 25 of the manifold 1, but the small hole portion 26 may be provided in a part of the flow path 24 of the outlet side connection fitting 22. Good. In this case, the back diffusion of gas into the main body of the pressure type flow control device FCS can be effectively prevented. Similarly, the small hole portion 26 can be provided in a part of the flow path 19 a of the mounting base 19.
- FIG. 12 is a structural diagram of a flow range variable pressure type flow control device used in the mixed gas supply device according to the first embodiment of the present invention and the second embodiment described later.
- FIGS. It is sectional drawing of an exit side connection metal fitting.
- This flow rate variable pressure type flow control device is known from Patent Document 6 and Patent Document 7, and is provided with a large flow orifice OL 1 and a small flow orifice OL 2 in the main body, and a solenoid valve. By switching the valve V by opening and closing the valve V by operating the EV, it is used for large flow (gas flows through both OL 1 and OL 2 ) or small flow (only OL 2 flows through gas) It is.
- the outlets of the orifices OL 1 and OL 2 of the flow range variable pressure type flow rate control device are connected to a gas passage provided in the connection fitting 22. That is, as shown in FIGS. 13 and 14, the gas passages of the connecting fitting 22 are formed in the vertical direction passages 28a or 28b, the large flow rate horizontal passages 29a communicating with the upper ends thereof, and the lower portions of the vertical passages 28a or 28b.
- the small flow rate horizontal passage 29b communicates with each other, and the lower ends of the vertical passages 28a and 28b serve as gas outlets.
- the lower end of the vertical passage 28a that is, the lower portion from the communicating portion in the small flow horizontal direction 29b has a small diameter (small hole portion 2b) having an inner diameter of 0.4 to 1.2 mm. This portion will prevent the back diffusion of gas in the same manner as the small hole portion 26 in FIG. 11, and the back diffusion of gas into the pressure type flow control device main body will be prevented. Become.
- the small flow rate horizontal passage 29b has a small inner diameter (small hole portion 26) of 0.4 to 1.2 mm ⁇ . In the same way as the small hole portion 26 in FIG.
- the inner diameter and the length of the small-diameter portion 26 are the same as those in the first embodiment shown in FIG. 11, and are small holes that do not adversely affect the control performance of the pressure type flow control device.
- the inner diameter is selected to be 0.4 to 1.2 mm ⁇ and the length is about 2 to 3 mm.
- FIG. 15 is a front view of a mixed gas supply apparatus according to a second embodiment of the present invention.
- A A small diameter portion is provided in the small diameter 24 in the flow path 24 of the outlet side connection fitting 22 of the pressure type flow rate control apparatus.
- B a point where no small hole is provided in the flow path 25 of the manifold 1, and
- 11 is different from the mixed gas supply apparatus according to the first embodiment of FIG. 11 only in that a gasket type orifice 30 is interposed between the side end portions and other points are completely the same as in the case of FIG. The same.
- the gasket type orifice 30 is inserted into the gap between the outlet side end portion of the gas outlet side passage 27 of the outlet side switching valve VO and the inlet side end portion of the gas passage 25 of the manifold 1, and the main body of the outlet side switching valve VO.
- the gasket type orifice 30 is interposed in an airtight manner by fixing the pressure between the manifold 1 and the manifold 1.
- the gasket type orifice 30 is used in the second embodiment of FIG. 15, the orifice itself may of course have any form.
- FIG. 16 is a diagram showing the relationship between the small flow rate He gas flow rate (SCCM) measured using the test apparatus of FIG. 2 with the orifice size 30 as a parameter and the reverse diffusion of Ar gas into He.
- SCCM small flow rate He gas flow rate
- Table 1 shows the upstream pressure P1 and the downstream pressure of the orifice OL1 when the variable flow pressure type flow control device shown in FIG. 17 is used as the pressure type flow control device in the mixed gas supply device of FIG. It shows the measured values of P2 and the diameter of the back diffusion preventing orifice 28.
- the diameter of the orifice 30 needs to be 0.4 mm ⁇ or more (for example, 0.6 mm ⁇ ).
- the diameter of the orifice 30 is set to 0.6 mm ⁇ , as is clear from FIG. 16, if the small flow rate He gas flow rate is 3 SCCM or more, the Ar ion intensity indicating back diffusion is 10 ⁇ 12 (A It can be seen that no de-diffusion occurs, that is, Ar de-diffusion can be prevented.
- the reverse diffusion of the gas can be effectively prevented, and the opening / closing speed of the outlet side switching valve is increased, so that both valves can be operated simultaneously.
- gas replacement in the chamber and manifold can be performed at a higher speed even when the shower plate capacity is large.
- the mixed gas supply apparatus according to the present invention can be applied to gas supply apparatuses of all kinds of semiconductor manufacturing apparatuses.
- GS 1 to GS 4 are gas supply ports
- RG is a pressure regulator
- PG is a pressure gauge
- F is a filter
- VS 1 to VS 4 are inlet side valves
- FCS is a pressure flow control device
- VO 1 to VO 4 are outlets Side switching valve
- 1 is a manifold
- 2 is a mixed gas outlet
- 3 is a mixed gas supply pipe
- 4 is a regulating valve
- 5 is a process chamber
- 6 is a vacuum pump
- 7 is a regulating valve
- 8 is a quadrupole mass spectrometer ( Qmass)
- 9 is a pressure regulator
- 10 is a two-way three-way valve
- 11 is a PC
- 12 is a solenoid valve
- 13 is a control device (PLC)
- 14 is an air tube
- 15 to 19 are mounting bases
- 15a to 19a are gas
- the flow path, 20 is a mixed gas flow hole of the manifold 1
- EV is a solenoid valve
- OL 1 is a large flow orifice
- OL 2 is a small flow orifice
- F is a filter
- CM is a pressure gauge (capacitance manometer)
- SP is a pseudo shower plate.
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Abstract
Description
しかし、上記特許発明の技術は、何れもガスアウト部Goに対して、小流量ガスラインを大流量ガスラインの上流側(ガスアウト部Goからより離れた箇所)に位置させることを基本としているため、プロセスガスが小流量の場合には、各ガス供給ラインを接合するマニホールド部のガス置換に長時間を必要とし、ガス置換の点から半導体製造におけるプロセス時間の大幅な短縮が図れないという問題がある。
イ 弁の同時開閉時のガスの逆流・・・同時に複数ラインのバルブを開閉したときに、バルブを開にしたラインのガスが、閉にしたラインのバルブの上流側に流れ込み、閉じ込められる現象。
ロ 弁の開時の逆流・・・定常状態で流れているガスに、別のガスを追加するためにそのバルブを開にしたときに、別のガスが先に流れているラインの上流に流れ込む現象(一度は逆流するが、徐々に押し出される)。
ハ ガスの逆拡散・・・同時に複数のガスを流しているときに、大流量ラインのガスが小流量ラインに拡散して入り込む現象。
また、逆拡散を抑制するためには、a.小流量ガスラインを、同時に流す大流量ガスの上流側になるべく離して設けること、b.小流量ガス流量を10sccm以上とすること、c.マニホールド部の圧力を低くすること、d.オリフィスが大きな逆拡散防止効果を有すること等が判明した。
尚、オリフィスの介設位置は、出口側弁VO5の下流側Aと、出口側弁VO5の上流側Bと、流量制御装置FCSの上流側Cの3箇所に替え、夫々の場合に付いてArイオン濃度を測定した。
図10及び図11に於いて、GS1~GSnはガス供給口、RGは圧力調整器、PGは圧力計、Fはフィルタ、VS1~VSnは入口側弁、FCSは圧力式流量制御装置、VO1~VOnは出口側切換弁、1はマニホールドである。尚、本実施例に於いては、流量制御装置として圧力式流量制御装置を用いているが、圧力式流量制御装置に替えて熱式流量制御装置MFCを使用するようにしても良いことは勿論である。
また、圧力式流量制御装置FCSやその他機器類は全て公知のものであるため、その詳細な説明は省略する。
この流量レンジ可変型圧力式流量制御装置は、特許文献6及び特許文献7により公知のものであり、本体内に大流量用オリフィスOL1と小流量用オリフィスOL2が設けられていて、電磁弁EVを操作して弁Vを開閉することにより、大流量用(OL1及びOL2の両方をガスが流通する)又は小流量用(OL2のみをガスが流通する)として、切換え利用するものである。
尚、オリフィス30の口径を0.6mmφとした場合には、図16からも明らかなように、小流量Heガス流量が3SCCM以上であれば、逆拡散を示すArイオン強度が10-12(A)のレベルになり、逆拡散が生じないこと即ちArの逆拡散を防止できることが判る。
Claims (10)
- 流量制御装置と出口側切換弁とから成る複数のガス供給ラインを並列状に配設し、各出口側切換弁のガス出口をマニホールドへ連絡すると共に、マニホールドの混合ガス出口に近い位置のガス供給ラインを小流量用ガスの供給用にした混合ガス供給装置に於いて、流量制御装置の出口側と出口側切換弁の入口側とを前記流量制御装置の出口側連結金具及びガス通路を有する取付台を介して気密に連結し、前記出口側連結金具の流路の一部及び又は前記出口側切換弁とマニホールドの混合ガス流通孔とを連通する流路に小孔部を設け、出口側切換弁の上流側又は流量制御装置の上流側への他のガスの逆拡散の防止とマニホールドの混合ガス出口に連結したプロセスチャンバの高速ガス置換を可能にしたことを特徴とする混合ガス供給装置。
- 流量制御装置を流量レンジ可変型圧力式流量制御装置とすると共に、前記出口側連結金具の流路を大径の水平方向通路と小径の水平方向通路とこれ等を連通する小径の垂直方向通路とから形成し、小径の垂直方向通路の一部に前記小孔部を設けるようにした請求項1に記載の混合ガス供給装置。
- 流量制御装置を流量レンジ可変型圧力式流量制御装置とすると共に、前記出口側連結金具の流路を大径の水平方向通路と小径の水平方向通路とこれ等を連通する大径の垂直方向通路とから形成し、小径の水平方向通路の一部に前記小孔を設けるようにした請求項2に記載の混合ガス供給装置。
- 混合ガス出口に連結したプロセスチャンバをシャワープレート付きのプロセスチャンバとするようにした請求項1、請求項2又は請求項3に記載の混合ガス供給装置。
- 出口側切換弁を金属ダイヤフラム製弁体を弁座に接・離させる空気圧作動型弁とした請求項1、請求項2又は請求項3に記載の混合ガス供給装置。
- 流量制御装置と出口側切換弁VOとから成る複数のガス供給ラインを並列状に配設し、各出口側切換弁VOのガス出口をマニホールドへ連絡すると共に、マニホールドの混合ガス出口に近い位置のガス供給ラインを小流量用ガスの供給用にした混合ガス供給装置に於いて、小流量ガス供給ラインの流量制御装置の出口側と出口側切換弁VOの入口側を前記流量制御装置の出口側連結金具及びガス通路を有する取付台を介して気密に連結すると共に、前記出口側切換弁VOのガス出口側通路とマニホールドを、当該出口側切換弁VOのガス出口側通路の出口側端部とマニホールドの混合ガス流通路に連通するガス通路の入口側端部との間に逆拡散防止用オリフィスを設けて気密に連結し、出口側切換弁VOの上流側への他のガスの逆拡散の防止とマニホールドの混合ガス出口に連結したプロセスチャンバの高速ガス置換を可能にしたことを特徴とする混合ガス供給装置。
- 流量制御装置を大流量用オリフィスOL1と小流量用オリフィスOL2を備えた流量レンジ可変型圧力式流量制御装置とすると共に、流量制御装置の流量制御範囲を3SCCM~2000SCCMに、オリフィスの内径を0.6mmφとするようにした請求項6に記載の混合ガス供給装置。
- オリフィスをガスケット型オリフィスとした請求項6又は請求項7に記載の混合ガス供給装置。
- 混合ガス出口に連結したプロセスチャンバをシャワープレートSP付きのプロセスチャンバとするようにした請求項6、請求項7又は請求項8に記載の混合ガス供給装置。
- 出口側切換弁VOを金属ダイヤフラム製弁体を弁座に接・離させる空気圧作動型弁とした請求項6、請求項7、請求項8又は請求項9に記載の混合ガス供給装置。
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