Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67011—Apparatus for manufacture or treatment
  • H01L21/67017—Apparatus for fluid treatment
  • H01L21/67063—Apparatus for fluid treatment for etching
  • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
  • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K13/00—Etching, surface-brightening or pickling compositions
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02002—Preparing wafers
  • H01L21/02005—Preparing bulk and homogeneous wafers
  • H01L21/02008—Multistep processes
  • H01L21/0201—Specific process step
  • H01L21/02019—Chemical etching

Definitions

• the invention relates to a method for the treatment of silicon substrates and a device suitable for this purpose.
• this involves the treatment of monocrystalline silicon wafers whose upper side and, advantageously, bottom side are also treated with etching solution for texturing.
• the invention has for its object to provide an aforementioned method and a corresponding device for the treatment of silicon substrates, which can be avoided with the problems of the prior art and in particular treated monocrystalline silicon wafer or textured on its upper side with possible Little effort.
• This object is achieved by a method having the features of claim 1 and a device having the features of claim 9.
• Advantageous and preferred embodiments of the invention are the subject of further claims and are explained in more detail below. Some of the features mentioned below are described only for the method or only for the device. However, they should be able to apply to both the process and the device independently. The wording of the claims is incorporated herein by express reference.
• etching solution is applied or sprayed on for the purpose of texturing the surface, which can be done by means of nozzles or swirl nozzles or similar dispensing devices.
• etching solution is repeatedly from one another, so seen both in time and in the direction of passage, brought from the top of the top of the silicon substrates. It remains on top and reacts with the silicon substrate or etches it for texturing. In this case, a few microns of the silicon substrate can be removed.
• an additive is contained in the etching solution which is selected from the group consisting of is selected from alcohol, surfactant or glycol and may include one or more thereof.
• This additive is contained in the etching solution with a small amount of at most several wt.%.
• such an additive causes, by reducing the surface tension of the etching solution, to reduce or even eliminate the adhesion of the gas bubbles from the reaction which results from treating the silicon surface with the etching solution.
• the gases produced by the etching reaction and the bubbles formed thereby interfere with the etching process, since they remain at the top and shield the area of the surface covered by them, so that less or even no more etching takes place here.
• wetting devices for example designed as nozzles or wave nozzles or similar dispensing devices, are provided one behind the other in the direction of passage of the substrates through the device. They make it possible to coat the substrates again with fresh chemistry at intervals of 1-300 seconds on the surface.
• the inventive method has the advantage that it brings far less constructive or mechanical effort and less unwanted impairment of the silicon substrate surface with it. Due to the small proportion of the additive in the etching solution, the etching effect is only minimally or not negatively influenced. At the same time, this small proportion is enough to cover the surface To reduce chenschreib in the etching solution so far that just the aforementioned undesirable bubbles do not adhere to the surface during the etching process.
• the additive can be additionally metered into the etching solution. In particular, this can happen over time, just before the etching solution is applied to the silicon substrate.
• the etching solution is collected in a kind of large storage tank or container, for example, a collection trough, from which it is removed for application to the silicon substrate.
• the additive is already introduced here, in particular a very volatile or easily evaporating additive such as alcohol, it can volatilize. For one, it is no longer available in the etching solution. On the other hand, it is an environmental problem and can both attack the device or be a burden for operators.
• the additive is added to the etching solution only there, where the etching solution is about to be applied to the silicon substrate.
• the additive can first be metered into a wetting device, for example in an elongated tube or a similar container which extends transversely across the transport path of the silicon substrates and with nozzles or the like. is provided, through which the etching solution is applied.
• the etching solution can be connected to a supply line for the etching solution via an additional opening for subsequent dosing to a connection of the wetting device.
• the additive is permanently replenished in the etching solution.
• This therefore relates to the etching solution applied by means of the wetting apparatus, so that the additive is in each case metered in according to the amount of the etching solution applied.
• the etching solution in the temporal progress of the etching or in the direction of passage of the silicon substrates more and more additive is added for an increasing amount of additive in the etching solution.
• the proportion of additive in the etching solution from the beginning of the etching to the end can greatly increase, for example, even double.
• the proportion of additive in the etching solution may advantageously be less than 1% by weight. It can be particularly advantageous between 0.3% by weight and 0.6% by weight, for example about 0.3% by weight. Even such a small amount of additive has proven in practice to be sufficient to significantly reduce the formation of bubbles for an improved etching result.
• an alkaline etching solution is used. It may have a small amount of NaOH and / or KOH, advantageously both together. This proportion is, for example, between 1% by weight and 10% by weight, advantageously just over 3% by weight.
• This proportion is, for example, between 1% by weight and 10% by weight, advantageously just over 3% by weight.
• the etching solution can be heated or heated prior to application to the silicon substrates.
• a heater can be arranged directly in a wetting device for the etching solution, for example as a conventional, electrically operated heating coil or tubular heater, IR radiator, microwave heating, induction heating or the like. Heating the etching solution can to a few ° C. over room temperature, for example 30 ° C to 80 ° C, preferably 40 ° C to 70 ° C.
• not only the upwardly facing top of the silicon substrates can be treated or textured with the etching solution, but also the downwardly facing bottom.
• This can be done by spraying from below or by one or more wetting rollers over which the silicon substrates run. These wetting rollers are at least as wide as a silicon substrate or wider and their outer surface is wetted with etching solution to transfer the etching solution to the lower surface of the silicon substrates.
• this is basically known from the prior art, see, for example, DE 102005062528 A1.
• the level of the etching solution in the basin can be set so high that it touches the surface of the substrates to be treated.
• FIG. 1 is a view of a system according to the invention seen in the direction of passage of the substrates and
• FIG. 2 is a side view of a part of the system of FIG. 1
• an inventive system 1 1 is shown as a device for the treatment of silicon wafers 13 as silicon substrates, in the direction of passage of these silicon wafer 13. They lie along a horizontal transport path, which is formed by transport rollers 15 on transport shafts 16 , Several silicon wafers 13 can be moved side by side through the system 1 1 and, as shown in FIG. 2, many in a row with a small distance.
• a surge pipe 18 is provided as a wetting device, which has a distance of a few centimeters from the upper side of the silicon wafer 13 and extends over the entire width of the transport path.
• Several surge pipes 18 in a row cover the transport path in length.
• the distance of the surge pipes 18 in Fig. 2 may for example be about 15 cm, but possibly also a little more or a little less or change in the course of the transport path.
• the surge pipe 18 has on its underside a plurality of surge nozzles 19, which may be formed as simple holes, openings or slots. Through them etching solution 21 can emerge and come on the top of the silicon wafer 13 and distribute there, as shown.
• a replenishment 24 is provided as a separate connection to the surge pipe 18.
• an additive mentioned above or several of them can be added or added to the etching solution 21 become. This can be done so shortly before the application of the etching solution 21 from the stilling pipe 18, that evaporation of the aforementioned volatile additives is kept very low or can be completely avoided. It can be clearly seen from FIG. 1 and from FIG. 2 with the collection trough 20 arranged below the transport rollers 15 that, of course, after the application of the etching solution 21 to the upper side of the silicon wafer 13, where it forms a continuous layer Also, etching solution 21 runs down or drips off.
• the additive may still perform its function of reducing surface tension in the etching solution 21 on the silicon wafer 13, it does not affect the entire system 1 1 so much. Volatile additives can be sucked out via suction pipes, which are arranged between the rollers.
• etching solution 21 may also be present in a small amount in the etching solution 21. This significantly reduces blistering when etching the surface of the wafer. Due to the additional metering 24 for the additive, it is now possible in particular to supply exactly the amount of additive or, for example, to alcohol or isopropanol, which is directly necessary for the chemical reaction on the surface of the silicon wafer 13.
• the back side of the silicon substrate can also be wetted with the etching solution 21 and etched.
• the transport rollers as described, for example, in DE 102007063202 A1 or in DE 102005062528 A1, can either be additionally sprayed with etching solution 21 on the underside or can be reinforced by covering the entire width of the wafers. caking transport rollers 15 just wetted and etched at the bottom.

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• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Materials Engineering (AREA)
• Organic Chemistry (AREA)
• Chemical Kinetics & Catalysis (AREA)
• General Chemical & Material Sciences (AREA)
• Weting (AREA)

Priority Applications (7)

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Citations (6)

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• 2009
  • 2009-12-23 DE DE102009060931A patent/DE102009060931A1/de not_active Withdrawn
• 2010
  • 2010-12-23 CN CN201080058796.6A patent/CN102696092B/zh active Active
  • 2010-12-23 WO PCT/EP2010/070651 patent/WO2011076920A1/de not_active Ceased
  • 2010-12-23 US US13/518,660 patent/US20120276749A1/en not_active Abandoned
  • 2010-12-23 TW TW099145640A patent/TWI544537B/zh active
  • 2010-12-23 EP EP10798338.9A patent/EP2517226B1/de active Active
  • 2010-12-23 MY MYPI2012002876A patent/MY164303A/en unknown
  • 2010-12-23 AU AU2010334764A patent/AU2010334764A1/en not_active Abandoned
  • 2010-12-23 JP JP2012545345A patent/JP5801821B2/ja active Active
  • 2010-12-23 KR KR1020187010026A patent/KR102012893B1/ko active Active
  • 2010-12-23 KR KR1020127016313A patent/KR20120101690A/ko not_active Ceased
  • 2010-12-23 CA CA2783211A patent/CA2783211A1/en not_active Abandoned

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