WO2011074438A1 - 可撓性基板の位置制御装置 - Google Patents
可撓性基板の位置制御装置 Download PDFInfo
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- WO2011074438A1 WO2011074438A1 PCT/JP2010/071868 JP2010071868W WO2011074438A1 WO 2011074438 A1 WO2011074438 A1 WO 2011074438A1 JP 2010071868 W JP2010071868 W JP 2010071868W WO 2011074438 A1 WO2011074438 A1 WO 2011074438A1
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- WIPO (PCT)
- Prior art keywords
- flexible substrate
- roller pair
- pair
- roller pairs
- clamping
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H20/00—Advancing webs
- B65H20/02—Advancing webs by friction roller
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/022—Registering, tensioning, smoothing or guiding webs transversely by tentering devices
- B65H23/025—Registering, tensioning, smoothing or guiding webs transversely by tentering devices by rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
- B65H23/0324—Controlling transverse register of web by acting on lateral regions of the web
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
- B65H23/032—Controlling transverse register of web
- B65H23/038—Controlling transverse register of web by rollers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2301/00—Handling processes for sheets or webs
- B65H2301/30—Orientation, displacement, position of the handled material
- B65H2301/32—Orientation of handled material
- B65H2301/323—Hanging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
- B65H2511/20—Location in space
- B65H2511/21—Angle
- B65H2511/214—Inclination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
- B65H2511/20—Location in space
- B65H2511/21—Angle
- B65H2511/216—Orientation, e.g. with respect to direction of movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2513/00—Dynamic entities; Timing aspects
- B65H2513/40—Movement
- B65H2513/41—Direction of movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/10—Handled articles or webs
- B65H2701/17—Nature of material
- B65H2701/175—Plastic
Definitions
- the present invention relates to a control device for the position in the width direction of a flexible substrate in an apparatus for transporting a strip-shaped flexible substrate and performing a process such as film formation on the substrate through the transport path.
- Patent Document 1 discloses a plurality of film formations arranged in the transport direction of the flexible substrate while intermittently transporting a strip-shaped flexible substrate (polyimide film) supplied from an unwinding roll at a predetermined pitch.
- An apparatus for manufacturing a thin film laminate is disclosed in which a plurality of thin films having different properties are stacked and formed as a unit on a flexible substrate.
- Such a thin film laminate manufacturing apparatus includes a type in which a film is formed while being transported in a horizontal position, that is, a width direction of the strip-shaped flexible substrate, and a vertical position, that is, a width direction of the strip-shaped flexible substrate.
- a type in which film formation is performed while transporting in the vertical direction has advantages such as a smaller installation area and less contamination of the substrate surface compared to the former.
- the number of film forming units increases and the transport span becomes longer. It becomes difficult to maintain the vertical position in the vertical width direction, that is, the conveyance height, against gravity only by the guide rollers on both sides of the section, and the surface of the flexible substrate may be wrinkled or the flexible substrate may be The tendency to hang down becomes remarkable.
- This apparatus is advantageous in that the flexible substrate is expanded in the vertical width direction to suppress tension wrinkles and heating wrinkles.
- this apparatus is immediately used for a reciprocal film forming process including conveyance of the flexible substrate in the reverse direction. Not applicable.
- the lifting force and the pulling force corresponding to the inclination angle (deflection angle) act in the reverse direction, which not only promotes wrinkling and loosening of the flexible substrate, but also pinching each This causes a problem that the flexible substrate is detached from the roller.
- the present invention has been made in view of the above-described problems, and an object of the present invention is to suppress the occurrence of drooping and wrinkles on a strip-like flexible substrate, enabling high-quality processing, and flexibility. It is an object of the present invention to provide a flexible substrate position control device that can handle conveyance of a conductive substrate in the reverse direction.
- the present invention provides: A position control device in a vertical width direction of a flexible substrate in a processing apparatus that transports a strip-shaped flexible substrate in a horizontal direction in a vertical posture and processes the substrate in the transport path, First and second upper clamping roller pairs capable of being fed while clamping the upper edge portion of the flexible substrate, and the first upper clamping roller pair has a rotational direction in the clamping portion that is the flexible substrate.
- the respective rotation shafts are inclined so as to have a declination that is obliquely upward with respect to the first transport direction, and the second upper sandwiching roller pair has a rotational direction in the sandwiching portion that is the first transport direction.
- the respective rotation shafts are inclined so as to have a declination that is obliquely upward with respect to the opposite second conveyance direction, and each of the first and second upper clamping roller pairs is rotatably supported and A support mechanism for supporting one of the rollers constituting the roller pair so that one of the rollers can contact or separate from the other, and an urging means for applying a clamping pressure to each of the roller pairs via the support mechanism;
- the first time when transporting in the first transport direction The upper and lower nip roller pairs are separated from each other, and the first upper and lower nip roller pairs are separated from each other during conveyance in the second conveyance direction, whereby the first and second upper nip roller pairs are activated / deactivated. And a switching means for switching between.
- the urging means includes first and second springs interposed in the support mechanism corresponding to the first and second upper clamping roller pairs, and a clamp between each upper clamping roller pair. It is preferable to include an urging force adjusting means for displacing the support point of each spring to adjust the pressure.
- the biasing force adjusting means includes a transmission mechanism that transmits the biasing force of each spring as a torque to the support mechanism, and a support point of each spring around a connection point of the transmission mechanism.
- the angular displacement of the support point by the rotational member includes an angular position that separates the pair of clamping rollers, so that the rotational member also serves as the switching unit.
- the switching means includes an operation member that can be alternately engaged with and disengaged from the movable portion of the support mechanism corresponding to the contact / separation operation of the first and second upper clamping roller pairs.
- the first and second upper clamping roller pairs are alternately separated from each other against the urging force of the first and second springs by rotation or reciprocation of the operation member. .
- the switching means includes an operation unit for an operator to manually operate the rotating member or the operating member, and the rotating member or the operating member at each switching position. It may further include holding means for holding. In this case, it is preferable that the switching unit further includes a detection unit that detects that the rotating member or the operation member is held at each switching position.
- first and second lower clamping roller pairs capable of being fed while sandwiching the lower edge of the flexible substrate, wherein the first lower clamping roller pair includes the first lower clamping roller pair.
- the first lower clamping roller pair includes the first lower clamping roller pair.
- the rotation direction of the clamping portion has a declination that is obliquely downward with respect to the first conveyance direction, respectively.
- the second lower holding roller pair is disposed at substantially the same position with respect to the conveying direction of the second upper holding roller and the flexible substrate, and the rotation direction of the holding unit is Are inclined such that each of them has a declination obliquely downward with respect to the second transport direction, and each of the first and second lower clamping roller pairs is rotatably supported, and One of the rollers constituting each roller pair is relative to the other or A support mechanism for supporting the two roller pairs so as to be able to contact and separate from each other, an urging means for applying a clamping force to each of the pair of rollers via the support mechanism, and the second at the time of transport in the first transport direction.
- the operation / non-operation of the first and second lower nip roller pairs is separated. It is preferable to further include switching means for switching the operation state.
- the present invention is a position control device in the width direction of a flexible substrate in a processing apparatus that conveys a belt-like flexible substrate and processes the substrate along its conveyance path.
- Each of the first and second side clamping roller pairs includes a pair of first and second side clamping rollers that can be fed while clamping each side edge in the width direction, and each of the first side clamping roller pairs has a flexible rotation direction in each clamping unit.
- the respective rotation shafts are inclined so as to have a declination outward in the width direction with respect to the first transport direction of the conductive substrate, and the second side clamping roller pair has a rotational direction in the clamping portion in the first direction.
- the respective rotation shafts are inclined so as to have a declination outward in the width direction with respect to the second conveyance direction opposite to the first conveyance direction, and the first and second side clamping roller pairs are Each roller is rotatably supported and constitutes a pair of rollers.
- a support mechanism for supporting one of the first and second rollers so as to be able to contact or separate from each other; an urging means for applying a clamping pressure to each of the roller pairs via the support mechanism; and the first transport
- the first and second side clamping roller pairs are separated from each other during conveyance in the direction, and the first and second side clamping roller pairs are separated from each other during conveyance in the second conveyance direction.
- switching means for switching the action / non-action state of each side clamping roller pair.
- the flexible substrate position control device applies the lifting force to the upper edge portion of the belt-like flexible substrate during the conveyance in the first conveyance direction.
- An upper sandwiching roller pair and a second upper sandwiching roller pair that applies a lifting force when transporting in the second transport direction opposite to the first transport direction, and separating either one of them
- the first and second transport directions i.e., forward / reverse bidirectional transport, can be achieved by a configuration including switching means for switching the operation / non-operation state of the first and second upper clamping roller pairs. It is possible to easily and quickly change the conveying direction while maintaining the setting of the deflection angle and the clamping pressure of the upper pair of clamping rollers 2.
- both the forward and reverse directions do not occur in the upper edge during the switching operation.
- the occurrence of drooping or wrinkles on the flexible substrate can be continuously suppressed under the same conditions, and the position in the vertical width direction can be kept constant, and high-quality processing can be performed at low cost.
- the urging means includes a first spring and a second spring interposed in the support mechanism corresponding to the first and second upper clamping roller pairs, and a clamp between each upper clamping roller pair.
- the above-described flexible substrate position control device capable of handling forward and reverse bidirectional transportation can be configured at low cost.
- the urging force adjusting means angularly displaces a transmission mechanism that transmits the urging force of each spring as a torque to the support mechanism, and a support point of each spring around a connection point with the transmission mechanism.
- the angular displacement of the support point by the rotation member includes an angular position that separates the pair of sandwiching rollers. Even when the elastic displacement of the spring is kept constant, the angular component of the urging force that contributes to the clamping pressure of each clamping roller pair, i.e., the component perpendicular to the rotational radius direction of the spring coupling point, is the angular displacement of the spring support point.
- the spring support point can be moved to the separation position of the nipping roller pair by a control operation and a series of operations, in addition to being able to increase and decrease gradually according to It is possible to switch the working / non-working state by separating the first or second upper nip roller pair only by making them, and the apparatus can be simplified as compared with the case where the switching mechanism is constructed separately from the urging force adjusting mechanism. .
- the switching means includes an operation member that can be alternately engaged with and disengaged from the movable portion of the support mechanism corresponding to the contact and separation operation of the first and second upper clamping roller pairs.
- the switching means configured to alternately separate the first and second upper clamping roller pairs against the urging force of the first and second springs by movement or reciprocation,
- the first and second upper nipping roller pairs corresponding to the transport direction can be switched by a simple operation of one system of operation members common to them, and the mechanism and drive system related to the switching means can be simplified.
- the switching unit includes an operation unit for an operator to manually operate the rotating member or the operating member, and a holding unit that holds the rotating member or the operating member at each switching position.
- the switching means can be configured at low cost. Especially for an apparatus that forms a film on a strip-shaped flexible substrate by a roll process, when the winding amount of the unwinding / winding roll is large and the reversal frequency in the forward / reverse transport direction is relatively low, Thus, it is possible to reduce the cost of additionally introducing a flexible substrate position control device that supports both forward and reverse bidirectional conveyance, which is advantageous.
- the switching unit further includes a detection unit that detects that the rotating member or the operation member is held at each switching position, thereby preventing a malfunction due to a human error related to the switching operation. .
- first and second lower clamping roller pairs capable of being fed while sandwiching the lower edge of the flexible substrate
- first lower clamping roller pair includes the first lower clamping roller pair.
- the upper clamping roller and the flexible substrate are arranged at substantially the same position with respect to the conveyance direction of the flexible substrate, and the rotation direction of the clamping portion has a declination that is obliquely downward with respect to the first conveyance direction
- the second lower holding roller pair is disposed at substantially the same position as the second upper holding roller and the flexible substrate in the conveyance direction, and the rotation direction of the clamping unit is the second conveyance direction.
- the first and second lower clamping roller pairs are rotatably supported, and one of the rollers constituting each roller pair is relative to the other or to each other. And a support mechanism that supports it so as to be able to come into contact with and away from, and through the support mechanism
- An urging means for applying a clamping pressure to each of the roller pairs, and the second lower clamping roller pair are separated from each other during conveyance in the first conveyance direction, and the second at the time of conveyance in the second conveyance direction.
- the first or second The belt-like flexible substrate is stretched in the up-down direction, that is, the width direction during the forward / reverse bidirectional transfer by the lifting force by the upper clamping roller pair and the pulling force by the first or second lower clamping roller pair, and Since the conveying direction can be changed while the stretched state is maintained, the occurrence of drooping or wrinkles on the flexible substrate can be further effectively suppressed, which is advantageous in performing high-quality processing.
- FIG.1 shows the position control apparatus of the flexible substrate which concerns on 1st Embodiment of this invention.
- FIG. 5 is a cross-sectional view taken along a line AA in FIG. It is a principal part top view which shows the position control apparatus of the flexible substrate which concerns on 1st Embodiment of this invention. It is the principal part top view (a) and principal part side sectional view (b) which show the modification which concerns on 1st Embodiment of this invention.
- FIG. 6 is a sectional side view (a) of a principal part showing a position control device for a flexible substrate according to a second embodiment of the present invention, a BB sectional view (b), and a CC sectional view (c).
- FIG. 7 is a sectional side view (a) of a principal part showing a position control device for a flexible substrate according to a third embodiment of the present invention, a BB sectional view (b), and a CC sectional view (c).
- FIG. 6 is a side sectional view (a) of a principal part showing a position control device for a flexible substrate according to a fourth embodiment of the present invention, and a sectional view taken along line BB (b).
- the thin film laminate manufacturing apparatus 11 has a strip-shaped flexible substrate 1 (plastic film) placed in the width of a common vacuum chamber 10 maintained at a predetermined degree of vacuum. A transport path for transporting in the horizontal direction with the direction set to the vertical direction is formed, and a plurality of film forming units 20 are arranged in parallel along the transport path. As shown by arrows F and R in the figure, this thin film laminate manufacturing apparatus 11 supports both forward and reverse bidirectional transports (first and second transport directions), and film forming units (20, 20 ,...) Are not shown in the figure, but feed rollers corresponding to forward and reverse bi-directional drive via guide rollers (idle rollers) for guiding the flexible substrate 1 over its entire width. And an unwinding / winding roll, a tension roller, and the like are disposed.
- Each film forming unit 20 is a vacuum vapor deposition unit for performing chemical vapor deposition (CVD) such as plasma CVD or physical vapor deposition (PVD) such as sputtering. Basically, both sides of the flexible substrate 1 are sandwiched. And an electrode 21 (a high-frequency electrode or target having a large number of source gas ejection holes on the surface) and a ground electrode 22 with a built-in heater.
- the film formation units 20 are arranged at an equal pitch along the conveyance path of the flexible substrate 1, and the electrode 21 and the ground electrode 22 of each film formation unit 20 are arranged.
- Each of the electrodes 21 and / or the ground electrode 22 advances and retreats to open and close the chamber when stopping the step conveyance corresponding to one unit, while being accommodated in a chamber opened toward the conveyance surface of the flexible substrate 1. Driven.
- Position control devices 30 and 30 'for extending in the vertical direction are provided.
- the upper unit 30 includes two pairs of upper clamping rollers 31 and 32 corresponding to the first and second transport directions F and R that can be sent out while clamping the upper edge of the flexible substrate 1. .
- the first upper clamping roller pair 31 corresponding to the first conveying direction F has a declination angle ⁇ in which the rotation direction in the clamping portion of the flexible substrate 1 is obliquely upward with respect to the conveying direction F.
- the second upper nip roller pair 32 corresponding to the second transport direction R has a declination angle ⁇ in which the rotation direction in the nip portion of the flexible substrate 1 is obliquely upward with respect to the transport direction R. have.
- Each declination ⁇ is basically set to the same angle.
- the lower unit 30 ′ is disposed at the same position as the upper unit 30 with respect to the conveyance directions F and R of the flexible substrate 1, and basically the upper clamping roller pairs 31 and 32 of the upper unit 30 are turned upside down. Two sets of lower clamping roller pairs 31 'and 32' are arranged.
- the first lower nipping roller pair 31 ′ corresponding to the first conveying direction F has a declination angle ⁇ in which the rotation direction in the nipping portion of the flexible substrate 1 is obliquely downward with respect to the conveying direction F.
- the second lower clamping roller pair 32 ′ corresponding to the second transport direction R has a declination angle ⁇ in which the rotation direction in the sandwiching portion of the flexible substrate 1 is obliquely downward with respect to the transport direction R.
- the respective deflection angles - ⁇ are basically set to the same angle, and the absolute values of the upper and lower deflection angles ⁇ are basically set to the same value.
- the deviation angle ⁇ of the lower unit 30 ′ can be set smaller than the deviation angle ⁇ of the upper unit 30.
- the first and second pair of upper and lower nipping rollers 31, 32, 31 'and 32' constituting the upper and lower units 30 and 30 ' are supported by a later-described support mechanism so as to be rotatable and to be able to contact and separate from each other.
- the pair of sandwiching rollers corresponding to one of the first and second transport directions F and R are brought into pressure contact with each other, so that the upper and lower edges of the flexible substrate 1 are sandwiched, and the other sandwiching roller The pair is separated and inactive.
- one of the rollers constituting each roller pair 31 ⁇ / b> A, 32 ⁇ / b> A is a fixed roller 33, 35, and the other is a movable roller 34, 36.
- the movable roller 34 of the first upper nip roller pair 31A is pressed against the fixed roller 33, and the movable roller 36 of the second upper nip roller pair 32A is pressed. Is separated from the fixed roller 35, so that, as shown in FIG. 2 (b), a slant corresponding to the declination angle ⁇ with respect to the first transport direction F is formed on the upper edge of the flexible substrate 1.
- the upward lifting force ⁇ acts.
- the movable roller 36 of the second upper nip roller pair 32A is moved to the fixed roller 35 as shown by a two-dot chain line in FIG.
- the movable roller 34 of the first upper clamping roller pair 31A is separated from the fixed roller 33, the first upper clamping roller pair 31A is separated from the upper edge of the flexible substrate 1 as shown by a broken line in FIG.
- a lifting force ⁇ directed obliquely upward corresponding to the declination angle ⁇ is applied to the second transport direction R.
- the rollers constituting each roller pair 31B, 32B are all movable rollers 34, 34, 36, 36, and the flexible substrate 1 is transported in the first transport direction F.
- the movable rollers 34 of the first upper clamping roller pair 31B are pressed against each other, and the movable rollers 36 of the second upper clamping roller pair 32B are separated from each other.
- a lifting force ⁇ directed obliquely upward with respect to the first transport direction F acts on the upper edge portion of the flexible substrate 1.
- the operation of switching the operation / non-operation state of the first and second upper clamping roller pairs 31A, 32A, 31B, and 32B is stopped when the conveyance directions F and R of the flexible substrate 1 are changed. Made in the state. At that time, after the other upper clamping roller pair (for example, 32A, 32B) is pressed, the one upper clamping roller pair (31A, 31B) is separated from the one upper clamping roller pair (31A, 31B). The other upper clamping roller pair (for example, 32A, 32B) takes over the clamping state with respect to the flexible substrate 1, thereby causing the first and second upper clamping roller pairs 31A, 32A, 31B, 32B during the switching operation. The position shift of the flexible substrate 1 can be prevented.
- the other upper clamping roller pair for example, 32A, 32B
- the first and second upper nipping roller pairs 31 and 32 of the position control device 130 are composed of fixed rollers 33 and 35 and movable rollers 34 and 36 that are supported by the support mechanism 40 so as to be able to contact and separate.
- each of the fixed rollers 33 and 35 is rotatably supported via a bearing on a support shaft provided at the tip (lower end) of the fixed support members 43 and 45, and is made of a metal roller. And a heat-resistant rubber covering portion attached to the peripheral surface.
- a ball bearing or an angular contact ball bearing capable of receiving an axial load is used.
- the movable rollers 34 and 36 are also rotatably supported by the movable support members 44 and 46 as described above.
- the fixed support members 43 and 45 are fixed at the base end portions (upper end portions) to the lower surfaces of the brackets 47 and 48 constituting the deflection angle adjusting means.
- the brackets 47 and 48 are fixed to the fixing plate of the main structural member 13 of the chamber structural unit divided for each film forming unit 20 via a shim, and each bracket depends on the thickness and / or number of shims.
- the mounting angles of 47 and 48 can be changed, whereby the deflection angle ⁇ of the fixed rollers 33 and 35 and the movable rollers 34 and 36 constituting each of the sandwiching roller pairs 31 and 32 can be adjusted.
- the movable support members 44 and 46 are fixed at the base end portions (upper end portions) to the shaft portions 53a and 54a of the extension arms 53 and 54, respectively.
- the shaft portions 53a and 54a are rotatably supported by support portions 41 and 42 fixed to the lower surfaces of the brackets 47 and 48 through bearings, and the movable support members 44 and 46 support the shaft portions 53a and 54a. As a center, it can swing integrally with the extension arms 53 and 54, so that the movable rollers 34 and 36 can individually contact and separate from the fixed rollers 33 and 35.
- the rollers 53b and 54b that engage with the tip ends of the crank arms 55 and 56 are rotatably attached to the upper ends of the extension arms 53 and 54, respectively.
- the crank arms 55 and 56 (output arms) are fixed to the lower end portions of the rotation shafts 57 and 58, respectively, and the crank arms 59 fixed to the upper end portions of the rotation shafts 57 and 58 that pass through the outside of the vacuum chamber 10.
- 60 (input arms) constitute urging force transmission mechanisms 51, 52.
- the rotating shafts 57 and 58 are provided with differential pressure inside and outside the vacuum chamber by seal bearings 57a and 58a that are airtightly attached to the ceiling panel 12 of the vacuum chamber 10 (chamber structure unit) via base plates 57b and 58b, O-rings, and the like. It is supported so that it can rotate freely.
- One ends of springs 63 and 64 are connected to the tip portions 59a and 60a of the crank arms 59 and 60 positioned outside the vacuum chamber 10, respectively, and the other ends of the springs 63 and 64 are adjusted screws 67 and 68, respectively.
- the tip portions 59a, 60a and 65a, 66a are rotatably supported by crank arms 55, 56 and drive arms 65, 66 via bearings (not shown).
- Each of the springs 63 and 64 is stretched between the distal end portions 59a and 60a of the crank arms 59 and 60 and the distal end portions 65a and 66a of the drive arms 65 and 66 in a previously extended state.
- the tension of the springs 63 and 64 can be adjusted by adjusting the degree of extension with 67 and 68. In accordance with this tension, as will be described later, the maximum value of the urging force that applies the clamping pressure to each pair of clamping rollers 31, 32 is determined.
- the drive arms 65 and 66 are fixed to the drive shafts of the actuators 71 and 72 at the base ends thereof.
- the actuators 71 and 72 are rotary actuators such as servo motors with built-in encoders.
- the drive shafts are placed on the upper plates 73 and 74 that are fixed above the base plates 57b and 58b via a support frame (not shown). (Strictly speaking, on the distal end portions 59a, 60a of the crank arms 59, 60 at the pivot arms 59, 60 corresponding to the case where the movable rollers 34, 36 contact the fixed rollers 33, 35 with zero contact pressure). They are mounted so that they face each other and have their axes aligned.
- Each actuator 71, 72 is driven by a control signal from a control unit (not shown), and constitutes a switching means for switching the three positions described below by rotating the driving arms 65, 66 as shown in FIG. is doing. That is, by the actuators 71 and 72, (A) The drive arms 65 and 66 are rotationally displaced between the minimum pressurization positions 65x and 66x (rotation origin) and the maximum pressurization positions 65y and 66y, and the urging force according to the angular displacement is a crank arm.
- the first nipping roller pair 31 corresponding to the first transport direction F is in the operating position, and the movable roller 34 is pressed against the fixed roller 33 while the second transport direction R is in the second transport direction R.
- the case where the corresponding second clamping roller pair 32 is in the inoperative position and the movable roller 36 is separated from the fixed roller 35 is shown.
- the drive arm 66 corresponding to the second nipping roller pair 32 is in a non-operating position 66z that is rotated and displaced counterclockwise with respect to the rotation origin (66x) and exceeds 180 degrees, and the spring 64
- the crank arm 60 is held at the reverse position 60z by the urging force.
- the crank arm 56 integrated with the crank arm 60 and the rotation shaft 58 is rotated and displaced in the clockwise direction in FIG. 6, and the extension arm 54 is tilted as shown by a two-dot chain line in FIG.
- the movable roller 36 is separated from the fixed roller 35.
- the conveyance direction is reversed and the film formation process is performed by the conveyance in the second conveyance direction R.
- the reversal operation is performed in the following procedure.
- the conveyance of the flexible substrate 1 in the first conveyance direction F is stopped, and the actuator 72 is operated in a state where the upper edge portion of the flexible substrate 1 is nipped by the first nipping roller pair 31.
- the drive arm 66 corresponding to the second clamping roller pair 32 is rotated clockwise in FIG. 6 until the operating position corresponding to the angular displacement of the driving arm 65 corresponding to the first clamping roller pair 31 at the time of stop. Move.
- the movable roller 36 of the second clamping roller pair 32 is brought into pressure contact with the fixed roller 35 with the same contact pressure as that of the movable roller 34 of the first clamping roller pair 31, and each of the first and second clamping roller pairs 31. , 32 sandwich the upper edge of the flexible substrate 1.
- the driving arm 65 corresponding to the first sandwiching roller pair 31 is rotated to the inoperative position 65z, and the movable roller 34 of the first sandwiching roller pair 31 is separated from the fixed roller 33, so that the flexible substrate It is possible to shift to the film forming process by transport in the second transport direction R while maintaining the transport height of 1.
- the actuator 71 is operated to rotate the drive arm 65 to the inoperative position 65 z, and the movable roller 34 of the clamping roller pair 31. Is moved away from the fixed roller 33, and then the drive arm 65 is rotationally displaced to the toggle position 65m.
- the support point (65a) of the spring 63 is on the non-operating position side with respect to the straight line connecting the connection point (59z) with the crank arm 59 and the rotation shaft 57, and is clamped by the urging force of the spring 63.
- the roller pair 31 is held in the non-operating position, and the movable roller 34 is still separated from the fixed roller 33, leaving a standby angle with respect to the thought point of the toggle mechanism.
- the thin film laminate manufacturing apparatus 11 includes the first and second sandwiching roller pairs between the film forming units 20 arranged in parallel along the conveyance path of the flexible substrate 1.
- the position control device 30 including 31 and 32 is disposed, it is not necessary that all the position control devices 30 can actively control the clamping pressure of the clamping roller pair 31 and 32 as described above.
- the upper position control device 30 (130) positioned substantially at the center of the conveyance span in the film forming unit can be positively controlled, and the other upper and lower position control devices 30, 30 ′ are connected to the pair of clamping rollers 31.
- 32 that is, a preset type that pre-adjusts the spring biasing force to an optimum value.
- FIG. 7 shows, as a modification of the first embodiment described above, a preset type urging force adjusting means 161 in which the actuator 71 in the urging force adjusting means 61 of the active position control device 130 is replaced with a handle 171 for manual operation. Show.
- This urging force adjusting means 161 has a drive arm 65 attached to a rotation shaft 171 a of a handle 171 rotatably supported by a bearing 175 so that the drive arm 65 can be rotated by the handle 171.
- a clamp 177 that can fix the rotation shaft 171a at an arbitrary angular position, the urging force of the spring 63 (64) can be adjusted in advance by a simple operation.
- the drive arm 65 is rotated to the inoperative position 65 z to move the movable roller 34 away from the fixed roller 33, thereby bringing the first nipping roller pair (31) into an inoperative state, while the second When the pair of nipping rollers (32) is in the operating state, it is possible to shift to a film forming process by transport in the second transport direction R.
- the inactive state the movable roller 34 separated from the fixed roller 33 is held at the separation position by the urging force of the spring 63 (64) as described above, but the handle 171 is fixed by the clamp 177 at that position. May be.
- a sector plate 65d is concentrically attached to the base of the drive arm 65, and the drive arm 65 is in an operating state (65x to 65y) on the lower surface of the upper plate 73 adjacent to the outer periphery of the sector plate 65d.
- FIGS. 8A to 8C show a position control device 230 according to the second embodiment of the present invention.
- the first and second upper clamping roller pairs 231 and 232 are fixedly supported by the support mechanism 240 so as to be able to contact and separate, and the movable rollers 34, 36.
- the movable support members 244 and 246 of the movable rollers 34 and 36 have base end portions (upper end portions) of which support portions 241 and 242 fixed to the lower surfaces of the brackets 247 and 248 via rotation shafts 244a and 246a. And is rotatably supported.
- This position control device 230 is a preset type that pre-adjusts the urging force of the springs 263, 264 with the adjusting screws 267, 268, and separately from these urging force adjusting means, the first and second upper clamping roller pairs 231, 231
- a switching device 261 that switches between 232 operating / non-operating states is provided.
- the switching device 261 includes first and second cams 251 and 252 that can be engaged and disengaged with the movable support members 244 and 246 of the first and second upper clamping roller pairs 231 and 232, and a cam shaft 250 common to them. It is comprised by the drive mechanism containing.
- the camshaft 250 passes between the fixed support members 243 and 245 and the movable support members 244 and 246 of the first and second upper clamping roller pairs 231 and 232, respectively, in the conveying direction F, It extends in parallel with R and is rotatably supported by a bracket 249 that is fixed to the lower ends of the main structural members 13 and 13 between the first and second cams 251 and 252.
- the first and second cams 251 and 252 are fixed to the camshaft 250 with a phase difference of 90 degrees from each other, or are integrally formed. As shown in FIGS.
- the top portion is provided with two top portions sandwiching the groove so that a stable engagement state with the movable support members 244 and 246 can be obtained.
- a sector gear 253 is fixed to the end portion of the cam shaft 250 on the first upper clamping roller pair 231 side.
- the sector gear 253 meshes with a pinion gear 254 fixed to one end of the intermediate shaft 255, and the other end of the intermediate shaft 255 is connected to the vacuum chamber 10 via a pair of bevel gears 256 and 257 and a rotating shaft 258.
- the rotation of an actuator (not shown) provided outside is transmitted.
- the first cam 251 when transporting in the first transport direction F, as shown in FIG. 8C, the first cam 251 is detached from the movable support member 244, and the movable roller 34 of the first upper clamping roller pair 231. Is in a working state by being pressed against the fixed roller 33, while the second cam 252 is engaged with the movable support member 246 as shown in FIG. 8B, and the second upper clamping roller pair 232 is movable.
- the roller 36 is in an inoperative state separated from the fixed roller 35, and a predetermined lifting force corresponding to the deflection angle ⁇ and the contact pressure is conveyed in the conveying direction F by the first upper clamping roller pair 231. Applied to the upper edge of the conductive substrate 1.
- the camshaft is connected via the drive mechanism (253 to 258).
- a switching operation is performed in which 250 is rotated 90 degrees clockwise from the state shown in FIGS.
- the first cam 251 is engaged with the movable support member 244, and the movable roller 34 of the first upper clamping roller pair 231 is separated from the fixed roller 33, thereby being inoperative.
- the cam 252 disengages upward from the movable support member 246, and the movable roller 36 of the second upper clamping roller pair 232 comes into contact with the fixed roller 35 to be in an operating state.
- a predetermined lifting force corresponding to the contact pressure is applied to the upper edge of the flexible substrate 1 that is transported in the transport direction R.
- the camshaft 250 is switched only by reciprocating alternately at two positions that are spaced at a predetermined angle (90 degrees in the illustrated example).
- a handle (lever) can be attached as in the modified example of the first embodiment, and the conveyance direction can be switched from the outside of the vacuum chamber 10 by manual operation.
- a holding mechanism for holding the handle (lever) at each rotational position corresponding to the operating / non-operating state and a sensor for detecting the holding state are provided, and an interlock system for the drive system of the manufacturing apparatus 11 should be provided. Is as described above.
- the cams 251 and 252 are configured so that the roller pair in the operating state is separated after the nipping by the roller pair in the inactive state is completed. .
- FIGS. 9A to 9C show a position control device 330 according to a third embodiment of the present invention.
- the position control device 330 corresponds to the second basic mode shown in FIG. 3, and the first and second upper clamping roller pairs 331 and 332 are supported by the support mechanism 340 so as to be able to contact and separate from each other.
- the movable support members 344, 344 and 346, 346 are fixed to the lower surfaces of the brackets 347, 348 at their base end portions (upper end portions).
- the support portions 341 and 342 are rotatably supported via rotation shafts 344a and 346a, and springs 363 and 364 are interposed between the movable support members 344, 344 and 346, 346 via adjustment screws 367, 368. Is stretched.
- the switching device 361 of the position control device 330 also includes the first and second cams 351 and 352 and the common cam shaft 350 as described above, but the two cams 351 and 352 are provided. Is different in that each has two cam peaks spaced 180 degrees apart so that both movable support members 344, 344 and 346, 346 can be engaged simultaneously. Furthermore, a lever 353 is fixed to the end of the camshaft 350 instead of a gear, and the tip of the lever 353 is rotatably connected to the lower end of the operation rod 354 via a shaft 353a. By reciprocating the operation rod 354 up and down, the operation / non-operation state of the first and second upper clamping roller pairs 331 and 332 can be switched.
- the operation rod 354 can be operated by an actuator or a manual operation handle (lever) disposed outside the vacuum chamber 10, and has a holding mechanism and a sensor at each of the upper and lower positions, and constitutes an interlock system for preventing erroneous operation.
- the possible points are the same as in the above embodiments.
- FIGS. 10A and 10B show a position control device 430 according to a fourth embodiment of the present invention.
- This position control device 430 is movable with the fixed rollers 33 and 35 supported by the support mechanism 440 so that the first and second upper clamping roller pairs 431 and 432 can come in contact with and separate from each other, as in the second embodiment.
- Each of the movable support members 444 and 446 is composed of rollers 34 and 36, and is supported by the support portions 441 and 442 so that the movable support members 444 and 446 are rotatable at their base end portions (upper end portions). Between the support member 443 (445), springs 463 and 464 are stretched via an adjustment screw (467) 468.
- each of the movable support members 444 and 446 has extending portions 451 and 452 extending upward beyond their rotation support points.
- the upper ends of the extending portions 451 and 452 extend upward through the notch portions (447a) 448a of the brackets 447 and 448, and reach into the recesses 414 defined on the lower surfaces of the main structural members 413 and 413.
- a through hole 458 that penetrates outside the vacuum chamber 10 along the joint portion of the main structural members 413 and 413 is formed in the concave portion 414, and the through hole 458 includes a circuit that constitutes the switching device 461.
- a moving shaft 454 is inserted.
- the rotation shaft 454 is rotatably supported by a bearing 456 and a seal bearing 457 provided in the through-hole 458, and a bidirectional shaft of the rotation shaft 454 is disposed at a lower end portion of the rotation shaft 454 located in the recess 414.
- the operation arm 453 that can be selectively engaged and disengaged is fixed to the upper ends of the extending portions 451 and 452 in accordance with the rotation operation.
- a handle 455 for pivoting the pivot shaft 454 is swingably connected to the upper end of the pivot shaft 454 located outside the vacuum chamber 10. Further, holding members 471 and 472 for locking the handle 455 at the respective positions are disposed at both ends of the rotation range of the handle 455.
- the rotation shaft 454 is rotated to the left in the drawing by the operation of the handle 455.
- the handle 455 is locked by the holding member 472.
- the operation arm 453 engages with the extension portion 452 of the movable support member 446 in the second upper clamping roller pair 432, and the extension portion 452.
- the movable roller 36 is separated from the fixed roller 35, and the second upper nip roller pair 432 becomes inoperative, and the first upper nip roller pair 431 in the active state makes contact with the deflection angle ⁇ .
- a predetermined lifting force corresponding to the pressure can be applied to the upper edge portion of the flexible substrate 1 transported in the transport direction F.
- the handle 455 is once lifted and then moved to the right in the figure.
- the operation arm 453 is detached from the extending portion 452
- the movable roller 36 of the second upper clamping roller pair 432 is pressed against the fixed roller 35, and both the first and second upper sides are moved.
- the upper edge portion of the flexible substrate 1 is sandwiched between the pair of sandwiching rollers 431 and 432.
- the operation arm 453 is engaged with the extension portion 451 of the movable support member 444 in the first upper clamping roller pair 431 and presses the extension portion 451.
- the movable roller 34 is separated from the fixed roller 33, the first upper clamping roller pair 431 becomes inactive, and the deflection angle ⁇ is set by the second upper clamping roller pair 432 that is already in operation.
- a predetermined lifting force corresponding to the contact pressure can be applied to the upper edge portion of the flexible substrate 1 transported in the transport direction R.
- Each of the holding members 471 and 472 is provided with a sensor for detecting that the handle 455 is held at the position, and an erroneous operation preventing interface corresponding to the transport directions F and R of the thin film laminate manufacturing apparatus 11 is provided.
- a locking system can also be provided.
- the rotation shaft 454 can be driven by an actuator as in the above embodiments.
- position control devices 430 between the film forming units 20 are connected to each other by a link mechanism, a plurality of position control devices 430 can be switched simultaneously by operating one handle 455. Further, if the rotation shaft 454 in the upper and lower position control device 430 is connected or made common, the upper and lower position control devices 430 can be switched simultaneously by operating the upper handle 455. The same applies to the case where the rotation shaft 454 is driven by an actuator.
- the position control devices 30 and 30 ′ are installed on the upper and lower sides between the adjacent units of the film forming units 20 arranged in parallel along the transport path of the flexible substrate 1.
- the case where one upper unit 30 at the center is controllable and the other is a preset type has been shown, a plurality of upper units 30 can be controlled simultaneously or individually.
- the position control devices 30 and 30 ′ can be installed every other unit, and the number of the film forming units 20 can be increased.
- the position control device can be configured with only the controllable upper unit 30. In the latter case, by controlling the gravity acting on the flexible substrate 1 and the lifting force of the upper unit 30 to be balanced, control to maintain the conveyance level of the flexible substrate is performed.
- the position control device according to the present invention is implemented in a thin film laminate manufacturing apparatus that performs a film forming process while stepping a flexible substrate.
- the control device can also be implemented in a continuous film formation type thin film laminate manufacturing apparatus that performs film formation while continuously conveying a flexible substrate.
- the position control device of the flexible substrate according to the present invention is not only a device for manufacturing a thin film laminate for a solar cell, but also a device for manufacturing a semiconductor thin film such as an organic EL, as well as painting, washing, drying, heat treatment,
- the present invention can be applied to a position control device in various processing apparatuses for a flexible substrate.
- the position control device for a flexible substrate according to the present invention when transporting the flexible substrate in the vertical direction (or inclined position) in the horizontal direction (including the oblique direction), causes the flexible substrate to be in the horizontal position. It can be carried out in each case of transporting in the horizontal direction, the vertical direction, or the oblique direction.
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Abstract
Description
帯状の可撓性基板を縦姿勢で横方向に搬送しその搬送経路にて前記基板に処理を行なう処理装置における可撓性基板の上下幅方向の位置制御装置であって、
前記可撓性基板の上側縁部を挟持しつつ送出可能な第1および第2の上側挟持ローラ対を備え、前記第1の上側挟持ローラ対は、挟持部における回転方向が前記可撓性基板の第1の搬送方向に対して斜上方に向かう偏角を有するようにそれぞれの回転軸が傾斜し、前記第2の上側挟持ローラ対は、挟持部における回転方向が前記第1の搬送方向と反対の第2の搬送方向に対して斜上方に向かう偏角を有するようにそれぞれの回転軸が傾斜しており、前記第1および第2の上側挟持ローラ対をそれぞれ回転可能に支持しかつ各ローラ対を構成するローラの一方が他方に対してまたは相互に接離可能となるように支持する支持機構と、前記支持機構を介して前記各ローラ対に挟圧力を付与する付勢手段と、前記第1の搬送方向への搬送時に前記第2の上側挟持ローラ対を離反させ、前記第2の搬送方向への搬送時に前記第1の上側挟持ローラ対を離反させることにより、前記第1および第2の上側挟持ローラ対の作用/不作用状態を切替える切替え手段と、をさらに備えたことを特徴とする。
図4~図6は、本発明に係る第1実施形態の位置制御装置130を示している。位置制御装置130の第1および第2の上側挟持ローラ対31,32は、支持機構40により接離可能に支持された固定ローラ33,35と可動ローラ34,36で構成されている。図5に示されるように、各固定ローラ33,35は、いずれも固定支持部材43,45の先端(下端)に設けた支軸にベアリングを介して回転自在に支持され、金属製のローラ本体と、その周面に被着された耐熱性のゴム被覆部で構成されている。ベアリングは、軸方向荷重を受圧可能なボールベアリングやアンギュラーコンタクトボールベアリングなどが用いられる。各可動ローラ34,36も、可動支持部材44,46に前記同様に回転自在に支持されている。
(a) 駆動アーム65,66を、最小加圧位置65x,66x(回動原点)と最大加圧位置65y,66yとの間で回動変位させ、その角変位に応じた付勢力がクランクアーム59,60を介して挟持ローラ対31,32に付加されるような作用位置(65x~65y,66x~66y)、
(b) クランクアーム59,60(55,56)を図中59z,60z(55z,56z)で示されるように強制的に反転させて挟持ローラ対31,32の可動ローラ34,36を固定ローラ33,35から離反させる不作用位置(65z,66z)、および、
(c) 図中右側の挟持ローラ対31に対してのみ示されているが、クランクアーム59,60が、加圧位置(59,60)と反転位置(59z,60z)の両方で保持され得る双安定状態とするトグル位置(65m)を切替え可能となっている。
図7は、上述した第1実施形態の変形例として、アクティブな位置制御装置130の付勢力調整手段61におけるアクチュエータ71を、手動操作用のハンドル171に置換したプリセットタイプの付勢力調整手段161を示している。
図8(a)~(c)は、本発明に係る第2実施形態の位置制御装置230を示している。この位置制御装置230においても、第1実施形態と同様に、第1および第2の上側挟持ローラ対231,232が、支持機構240により接離可能に支持された固定ローラ33,35と可動ローラ34,36で構成されている。各可動ローラ34,36の各可動支持部材244,246は、その基端部(上端部)において、ブラケット247,248の下面に固着された支持部241,242に回動軸244a,246aを介して回動自在に支持されている。
図9(a)~(c)は、本発明に係る第3実施形態の位置制御装置330を示している。この位置制御装置330は、図3に示した第2の基本的態様に相当しており、第1および第2の上側挟持ローラ対331,332が、支持機構340により相互に接離可能に支持された各一対の可動ローラ34,34および36,36で構成され、可動支持部材344,344および346,346は、それらの基端部(上端部)において、ブラケット347,348の下面に固着された支持部341,342に回動軸344a,346aを介して回動自在に支持され、各可動支持部材344,344および346,346の間に、調整ネジ367,368を介してスプリング363,364が張架されている。
図10(a)(b)は、本発明に係る第4実施形態の位置制御装置430を示している。この位置制御装置430は、先述した第2実施形態と同様に、第1および第2の上側挟持ローラ対431,432が、支持機構440により接離可能に支持された固定ローラ33,35と可動ローラ34,36で構成され、各可動支持部材444,446は、その基端部(上端部)において支持部441,442に回動自在に支持され、各可動支持部材444,446と対応する固定支持部材443(445)との間に、調整ネジ(467)468を介してスプリング463,464が張架されている。
10 真空室
11 薄膜積層体製造装置
13 主構造材
20 成膜ユニット
30,130,230,330,430 位置制御装置(上側ユニット)
30′ 位置制御装置(下側ユニット)
31,231,331,431 第1の上側挟持ローラ対
32,232,332,432 第2の上側挟持ローラ対
33,35 固定ローラ
34,36 可動ローラ
40,240,340,440 支持機構
43,45,243,245,445 固定支持部材
44,46,244,246,344,346,444,446 可動支持部材
47,48,247,248,347,348,447,448 ブラケット
51,52 付勢力伝達機構
53,54 延長アーム
61,62,161 付勢力調整手段(切替え手段)
63,64,263,264,363,364,463,464 スプリング(付勢手段)
65,66 駆動アーム(回動部材)
67,68,267,268,367,368,467,468 調整ネジ(付勢力調整手段)
69,69z センサ(検知手段)
171,455 ハンドル(操作部)
250,350 カム軸
251,252,351,352 カム(操作部材)
261,361,461 切替え装置(切替え手段)
451,452 延出部
453 操作アーム(操作部材)
454 回動軸
471,472 保持部材(センサ)
α,β 偏角
F,R 搬送方向
Claims (8)
- 帯状の可撓性基板を縦姿勢で横方向に搬送しその搬送経路にて前記基板に処理を行なう処理装置における可撓性基板の上下幅方向の位置制御装置であって、
前記可撓性基板の上側縁部を挟持しつつ送出可能な第1および第2の上側挟持ローラ対を備え、前記第1の上側挟持ローラ対は、挟持部における回転方向が前記可撓性基板の第1の搬送方向に対して斜上方に向かう偏角を有するようにそれぞれの回転軸が傾斜し、前記第2の上側挟持ローラ対は、挟持部における回転方向が前記第1の搬送方向と反対の第2の搬送方向に対して斜上方に向かう偏角を有するようにそれぞれの回転軸が傾斜しており、前記第1および第2の上側挟持ローラ対をそれぞれ回転可能に支持しかつ各ローラ対を構成するローラの一方が他方に対してまたは相互に接離可能となるように支持する支持機構と、前記支持機構を介して前記各ローラ対に挟圧力を付与する付勢手段と、前記第1の搬送方向への搬送時に前記第2の上側挟持ローラ対を離反させ、前記第2の搬送方向への搬送時に前記第1の上側挟持ローラ対を離反させることにより、前記第1および第2の上側挟持ローラ対の作用/不作用状態を切替える切替え手段と、をさらに備えたことを特徴とする可撓性基板の位置制御装置。 - 前記付勢手段は、前記第1および第2の上側挟持ローラ対に対応して前記支持機構に介装された第1および第2のスプリングと、前記各上側挟持ローラ対の挟圧力を調整すべく前記各スプリングの支持点を変位させる付勢力調整手段とを含むことを特徴とする請求項1に記載の可撓性基板の位置制御装置。
- 前記付勢力調整手段は、前記各スプリングの付勢力を前記支持機構にトルクとして伝達する伝達機構と、前記各スプリングの支持点を前記伝達機構との連結点の周りで角変位させる回動部材とを含み、前記回動部材による前記支持点の角変位が、前記挟持ローラ対を離反させる角位置を含むことで、前記回動部材が前記切替え手段を兼ねることを特徴とする請求項2に記載の可撓性基板の位置制御装置。
- 前記切替え手段は、前記第1および第2の上側挟持ローラ対の接離動作に対応した前記支持機構の可動部に交互に係脱可能な操作部材を含み、該操作部材の回動または往復動により、前記第1および第2のスプリングの付勢力に抗して前記第1および第2の上側挟持ローラ対を交互的に離反させるように構成されていることを特徴とする請求項2に記載の可撓性基板の位置制御装置。
- 前記切替え手段は、前記回動部材または前記操作部材を作業者が人為的に操作するための操作部と、前記回動部材または前記操作部材を各切替え位置で保持する保持手段とをさらに含むことを特徴とする請求項3または4に記載の可撓性基板の位置制御装置。
- 前記切替え手段は、前記回動部材または前記操作部材が各切替え位置で保持されていることを検知する検知手段をさらに含むことを特徴とする請求項5に記載の可撓性基板の位置制御装置。
- 前記可撓性基板の下側縁部を挟持しつつ送出可能な第1および第2の下側挟持ローラ対をさらに備え、前記第1の下側挟持ローラ対は、前記第1の上側挟持ローラと前記可撓性基板の搬送方向に対して略同位置に配設され、挟持部における回転方向が前記第1の搬送方向に対して斜下方に向かう偏角を有するようにそれぞれの回転軸が傾斜し、前記第2の下側挟持ローラ対は、前記第2の上側挟持ローラと前記可撓性基板の搬送方向に対して略同位置に配設され、挟持部における回転方向が前記第2の搬送方向に対して斜下方に向かう偏角を有するようにそれぞれの回転軸が傾斜しており、前記第1および第2の下側挟持ローラ対をそれぞれ回転可能に支持しかつ各ローラ対を構成するローラの一方が他方に対してまたは相互に接離可能となるように支持する支持機構と、前記支持機構を介して前記各ローラ対に挟圧力を付与する付勢手段と、前記第1の搬送方向への搬送時に前記第2の下側挟持ローラ対を離反させ、前記第2の搬送方向への搬送時に前記第1の下側挟持ローラ対を離反させることにより、前記第1および第2の下側挟持ローラ対の作用/不作用状態を切替える切替え手段と、をさらに備えたことを特徴とする請求項1~6の何れか一項に記載の可撓性基板の位置制御装置。
- 帯状の可撓性基板を搬送しその搬送経路にて前記基板に処理を行なう処理装置における可撓性基板の幅方向の位置制御装置であって、
前記可撓性基板の幅方向各側縁部をそれぞれ挟持しつつ送出可能な第1および第2の各側挟持ローラ対を備え、前記第1の各側挟持ローラ対は、それぞれの挟持部における回転方向が前記可撓性基板の第1の搬送方向に対して幅方向外方に向かう偏角を有するようにそれぞれの回転軸が傾斜し、前記第2の各側挟持ローラ対は、挟持部における回転方向が前記第1の搬送方向と反対の第2の搬送方向に対して幅方向外方に向かう偏角を有するようにそれぞれの回転軸が傾斜しており、前記第1および第2の各側挟持ローラ対をそれぞれ回転可能に支持しかつ各ローラ対を構成するローラの一方が他方に対してまたは相互に接離可能となるようにそれぞれ支持する支持機構と、前記支持機構を介して前記各ローラ対にそれぞれ挟圧力を付与する付勢手段と、前記第1の搬送方向への搬送時に前記第2の各側挟持ローラ対を離反させ、前記第2の搬送方向への搬送時に前記第1の各側挟持ローラ対を離反させることにより、前記第1および第2の各側挟持ローラ対の作用/不作用状態を切替える切替え手段と、をさらに備えたことを特徴とする可撓性基板の位置制御装置。
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JPH066127Y2 (ja) * | 1987-06-16 | 1994-02-16 | 富士ゼロックス株式会社 | 自動原稿送り装置 |
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JP2000118815A (ja) * | 1998-10-16 | 2000-04-25 | Kokusai Gijutsu Kaihatsu Kk | フィルム移送装置 |
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