WO2011071231A2 - Dispositif d'adhésion de film et procédé d'adhésion - Google Patents

Dispositif d'adhésion de film et procédé d'adhésion Download PDF

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Publication number
WO2011071231A2
WO2011071231A2 PCT/KR2010/006110 KR2010006110W WO2011071231A2 WO 2011071231 A2 WO2011071231 A2 WO 2011071231A2 KR 2010006110 W KR2010006110 W KR 2010006110W WO 2011071231 A2 WO2011071231 A2 WO 2011071231A2
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WO
WIPO (PCT)
Prior art keywords
film
substrate
adsorption plate
adsorbed
plate
Prior art date
Application number
PCT/KR2010/006110
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English (en)
Korean (ko)
Other versions
WO2011071231A3 (fr
Inventor
한동희
Original Assignee
Han Dong Hee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090121246A external-priority patent/KR101085585B1/ko
Priority claimed from KR1020100018779A external-priority patent/KR101126685B1/ko
Application filed by Han Dong Hee filed Critical Han Dong Hee
Priority to JP2012541928A priority Critical patent/JP5468142B2/ja
Priority to CN201080055049.7A priority patent/CN102656508B/zh
Publication of WO2011071231A2 publication Critical patent/WO2011071231A2/fr
Publication of WO2011071231A3 publication Critical patent/WO2011071231A3/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Definitions

  • the present invention relates to an apparatus and method for attaching a film to a substrate for a flat panel display panel. More particularly, the film can be stably attached to a substrate while maintaining a uniform contact pressure of the film.
  • a film attaching device and a film attaching method are possible.
  • liquid crystal displays have been widely used in industry, and films for various uses are attached to substrates for flat panel displays such as liquid crystal displays in the manufacturing process.
  • An example of an apparatus for attaching a film to a substrate for a flat panel display panel is as follows.
  • a loading plate is installed in the film supply unit, and the loading plate rotates at a predetermined angle.
  • the loading plate transfers the supplied film to the attachment position while rotating horizontally or vertically with the bottom surface by the rotary motor.
  • an attachment roller for pressing the film toward the substrate at the attachment position of the substrate and the film.
  • the substrate is supplied in a straight line, and the film supplied to the loading plate is transferred to the attachment position while rotating in a horizontal or vertical direction at intervals of 90 ° while undergoing a process such as removing a protective sheet.
  • the conventional film attaching device has a configuration that the film is in contact with the substrate being supplied while the substrate is supplied in a straight line, the configuration of the device is relatively complicated, it is difficult to implement a compact device.
  • the present invention is to improve this problem, it is possible to maintain a uniform attachment position and pressure during the attachment of the substrate and the film, so as not to intervene bubbles on the attachment surface and occupy the individual parts installed for the attachment of the film
  • An object of the present invention is to provide a film attaching device and a film attaching method using the same.
  • a film attaching apparatus wherein a substrate adsorption plate on which a substrate is adsorbed and a substrate adsorption plate are movably mounted and rotated to move the substrate adsorption plate to an attachment position.
  • Substrate adsorption unit having a table, for transporting the film to move the film adsorption plate to the attachment position so that the film adsorption plate on which the film to be attached to the substrate is adsorbed and the film adsorption plate is mounted and the film adsorption plate faces the substrate adsorption plate
  • a film adsorption unit having a film adsorption plate tilting device mounted on a turntable and the film transporting rotation table and moving the film adsorption plate moved to the attachment position toward the substrate adsorption plate, and the film adsorption plate moved to the attachment position is tilted to The peel adsorbed on the film adsorption plate
  • the substrate adsorption plate transfer device, the substrate adsorption plate, and the film adsorption plate to move the substrate adsorption plate so that the film is gradually attached to the substrate from one end to the other end when one end of the substrate is attached to the substrate adsorbed on the substrate adsorption plate.
  • One or more vacuum pumps for
  • the substrate adsorption plate conveying apparatus includes a movable member for moving the substrate adsorption plate by applying an external force to the substrate adsorption plate and a movable member driving device for driving the movable member.
  • Film attaching apparatus may further include a support member mounted to the rotating table for transporting the substrate for supporting the substrate suction plate so as to slide.
  • the film attachment device further includes a support member transport apparatus installed on the substrate transport rotating table and applying an external force to the support member to move the support member in and outward of the substrate transport rotating table. It may include.
  • a plurality of substrate adsorption plates may be arranged at regular intervals on the substrate transporting rotation table, and a plurality of film adsorption plates may be arranged at regular intervals on the film transporting rotation table.
  • the film attachment device further includes a hinge device mounted on the film transport rotating table to rotatably support the film adsorption plate, wherein the film adsorption plate is rotated about the hinge device to be tilted. Can be.
  • the film attaching apparatus further includes a pressure roller installed on the film adsorption plate to press the film toward the substrate when the film adsorbed on the film adsorption plate contacts the substrate adsorbed on the substrate adsorption plate. can do.
  • a film attachment device wherein a pressure roller for pressing the film toward the substrate when the film disposed at the attachment position and adsorbed on the film adsorption plate contacts the substrate adsorbed on the substrate adsorption plate and the apparatus may further include a film pressurizing apparatus having a pressurizing roller conveying apparatus for advancing the pressurizing roller in a direction of pressing the film and retreating in a direction falling from the film.
  • a film attachment device for supplying the substrate to the substrate adsorption plate, a substrate unloading device for separating the substrate from which the film is attached, from the substrate adsorption plate, and the film It may further include a film supply device for supplying to the film adsorption unit.
  • an apparatus for attaching a film includes: a substrate adsorption unit having a substrate adsorption plate on which a substrate is adsorbed, and a support member for slidably supporting the substrate adsorption plate, and a film to be attached to the substrate.
  • a film adsorption unit having a film adsorption plate to be adsorbed and a film adsorption plate tilting device for tilting the film adsorption plate toward the substrate adsorption plate, a substrate adsorption plate transfer device and the substrate adsorption plate arranged at an attachment position where the substrate adsorption plate and the film adsorption plate face each other;
  • At least one vacuum pump for providing a vacuum pressure to the film adsorption plate.
  • the substrate adsorption plate transporting device moves the substrate adsorption plate when the film adsorption plate is tilted so that one end of the film adsorbed to the film adsorption plate is attached to the substrate adsorbed on the substrate adsorption plate, and thus the film is moved from one end to the other end. Allow for progressive attachment to the substrate.
  • Method for attaching a film for achieving the above object, (a) adsorbing the substrate on the substrate adsorption plate, (b) adsorbing the film on the film adsorption plate, (c) to the film adsorption plate Tilting the film adsorption plate toward the substrate adsorption plate such that one end of the adsorbed film is attached to the substrate adsorbed on the substrate adsorption plate, (d) linearly moving the substrate adsorption plate with the substrate adsorption plate transfer device disposed at the attachment position Progressively attaching the film to the substrate from one end to the other end.
  • the step (d) may include pressing the film adsorbed on the film adsorption plate toward the substrate adsorbed on the substrate adsorption plate with a pressure roller.
  • a method of attaching a film may include moving the substrate adsorption plate to an attachment position before the step (c), and allowing the substrate adsorbed on the substrate adsorption plate and the film adsorbed on the film adsorption plate to face each other.
  • the method may further include moving the film suction plate to the attachment position.
  • the substrate adsorption plate to which the substrate is adsorbed is linearly moved, and the film adsorption plate to which the film is adsorbed is tilted toward the substrate adsorption plate to attach the film to the substrate, thereby occupying the substrate and the components for supplying and transporting the film Space and operating range can be reduced. Therefore, a compact structure is possible and a large number of parts can be installed in the same space. In addition, the transport time of the substrate and the film can be shortened, the productivity can be greatly improved, and the structure is simplified, so that the failure rate of the device can be reduced.
  • the film attachment device moves the substrate adsorption plate to which the substrate is adsorbed linearly, and the film adsorption plate to which the film is adsorbed is tilted toward the substrate adsorption plate to attach the film to the substrate, so that the film is gradually attached to the substrate from one end to the other end. I can attach it. Therefore, the film can be stably attached to the substrate without bubbles or the like interfering with the attachment surface between the substrate and the film.
  • the film attachment device can move all the substrate adsorption plate moved to the attachment position by using one substrate adsorption plate transfer device disposed at the attachment position, and uses one film pressing device installed at the attachment position.
  • the films adsorbed on the plurality of film adsorption plates can be sequentially pressed toward the substrate adsorption plates, thereby reducing the number of parts and reducing the installation cost.
  • FIG. 1 is a plan view schematically showing a film attachment device according to an embodiment of the present invention.
  • Figure 2 shows the substrate adsorption unit and substrate adsorption plate transport apparatus of the film attachment apparatus according to an embodiment of the present invention.
  • Figure 3 shows a film adsorption unit and a film feeder of the film applying apparatus according to an embodiment of the present invention.
  • Figure 6 is a plan view schematically showing a film attachment device according to another embodiment of the present invention.
  • film adsorption plate 122 film adsorption plate tilting device
  • substrate unloading device 180 film supply device
  • FIG. 1 is a plan view schematically showing a film attachment device according to an embodiment of the present invention.
  • the film attachment device 100 includes a substrate adsorption unit 110 for transporting the substrates S (see FIG. 2) one by one to the attachment position P1.
  • a substrate adsorption unit 110 for transporting the substrates S (see FIG. 2) one by one to the attachment position P1.
  • It includes a substrate adsorption plate for conveying device 140 and a vacuum pump 150 for providing a vacuum pressure.
  • the attachment position P1 is a position where the substrate S and the film F face each other and are bonded to each other.
  • the film attachment device 100 is a substrate loading device 160 for supplying the substrate S one by one to the substrate adsorption plate 111, the substrate (F) is attached to the film (S)
  • the film supply device 180 for supplying the substrate unloading device 170 and the film F for separating the substrate from the substrate adsorption plate 111 to the film adsorption plate 121 provided in the film adsorption unit 120 one by one. Include.
  • the substrate adsorption unit 110 includes a plurality of substrate adsorption plates 111 on which the substrate S is adsorbed, and a plurality of substrate adsorption plates 111 that can be slidably moved in the vertical direction. It includes a support member 112, a plurality of support member transport apparatus 113 for linearly moving the support member 112 and the substrate transport rotary table 114.
  • the plurality of substrate suction plates 111, the plurality of support members 112, and the plurality of support member transport apparatuses 113 are mounted on the substrate transport rotary table 114.
  • the substrate transport rotation table 114 may be rotated at an angle by an actuator that provides a rotational force such as a motor (not shown).
  • the plurality of substrate adsorption plates 111 are arranged to form a predetermined angle on the substrate transport rotating table 114. Although the number of substrate adsorption plates 111 is shown in the figure, and they are arranged at intervals of 90 °, the number or arrangement intervals of the substrate adsorption plates 111 may be variously changed.
  • the substrate adsorption plate 111 may move in and out of the substrate transport rotating table 114 together with the support member 112 by the support member transport apparatus 113, and move up and down in a state of being coupled to the support member 112. Can be.
  • a plurality of adsorption holes 115 are provided on the front surface of the substrate adsorption plate 111 so as to adsorb the substrate S at a vacuum pressure.
  • the substrate adsorption plate 111 may be connected to the vacuum pump 150 through a tube, and the vacuum pressure generated in the vacuum pump 150 may be provided to the plurality of adsorption holes 115 through the tube, so that the substrate S may be the substrate adsorption plate. Adsorbed on the front surface of the (111).
  • the control valve 151 for adjusting the vacuum pressure may be installed in the tube connecting the substrate adsorption plate 111 and the vacuum pump 150.
  • the support member 112 supports the substrate adsorption plate 111 to be slidably moved in the vertical direction.
  • the support member 112 is provided with a guide rail 116 extending in the vertical direction, and a guide groove 117 into which the guide rail 116 is inserted is provided at the rear surface of the substrate adsorption plate 111. Therefore, when the substrate adsorption plate 111 receives an external force from the substrate adsorption plate transporting device 140, the substrate adsorption plate 111 linearly moves along the guide rail 116.
  • the coupling structure of the substrate adsorption plate 111 and the support member 112 is not limited to this structure, and the substrate adsorption plate 111 may be changed to various structures in which the substrate suction plate 111 may slide.
  • the support member 112 is coupled to the support member transport apparatus 113 coupled to the rotating table 114 for substrate transport.
  • the support member conveying apparatus 113 applies an external force to the support member 112 to advance the support member 112 toward the film adsorption plate 121 positioned at the attachment position P1 or to retreat in the opposite direction. Therefore, the substrate adsorption plate 111 on which the substrate S is adsorbed can also move along the support member 112 in the inward and outward direction of the substrate transport rotating table 114.
  • various linear actuators capable of providing a linear movement force to the support member 112 may be used.
  • the substrate adsorption unit 110 has a loading position P2, an attachment position P1, and an unloading of the substrates S adsorbed onto the plurality of substrate adsorption plates 111 by rotation of the base transport rotation table 123. Carried to position P3.
  • the substrate loading device 160 supplies one substrate S to the substrate adsorption plate 111 so that one substrate S is adsorbed onto the substrate adsorption plate 111. do.
  • substrate unloading apparatus 170 separates the substrate S on which the film F is attached from the substrate adsorption plate 111. Since the substrate loading apparatus 160 or the substrate unloading apparatus 170 may have a variety of structures capable of supplying the substrates S to the substrate adsorption plate 111 one by one or separating the substrate S from the substrate adsorption plate 111. The detailed description thereof will be omitted.
  • the film adsorption unit 120 tilts the plurality of film adsorption plates 121 and the film adsorption plates 121 to which the film F to be attached to the substrate S is adsorbed.
  • the plurality of film adsorption plates 121 and the plurality of film adsorption plate tilting devices 122 are mounted on the film transport rotary table 123.
  • the film transport rotary table 123 may be rotated by a predetermined angle by an actuator providing a rotational force such as a motor (not shown).
  • the plurality of film suction plates 121 are arranged to form a predetermined angle on the film transport rotating table 123. Although the number of substrate adsorption plates 111 is shown in the figure, and these are arranged at intervals of 90 °, the number or arrangement intervals of the film adsorption plates 121 may be variously changed.
  • the film adsorption plate 121 is rotatably coupled to the hinge device 124 whose lower end is coupled to the rotating table 123 for film transport.
  • the film adsorption plate tilting device 122 pushes or pulls the film adsorption plate 121
  • the film adsorption plate 121 may be tilted by rotating at an angle about the hinge device 124.
  • the film adsorption plate 121 is inclined such that its upper end approaches the substrate adsorption plate 111 positioned at the attachment position P1
  • one end of the film F adsorbed onto the film adsorption plate 121 is adsorbed onto the substrate adsorption plate 111. It may be attached to the substrate (S).
  • the end of the film adsorption plate tilting device 122 is coupled to the film adsorption plate 121.
  • the film adsorption plate tilting device 122 may use various types of actuators capable of pushing or pulling the film adsorption plate 121.
  • the hinge device is provided on the upper side of the film adsorption plate, so that the film adsorption plate may be configured to tilt the upper side of the film adsorption plate by the operation of the film adsorption plate tilting device.
  • a plurality of adsorption holes 125 are provided on the front surface of the film adsorption plate 121 so as to adsorb the film F at a vacuum pressure.
  • the film adsorption plate 121 may be connected to the vacuum pump 150 through a tube, and the vacuum pressure generated in the vacuum pump 150 may be provided to the plurality of adsorption holes 125 through the tube, so that the film F may be the film adsorption plate. It may be adsorbed on the front surface of 121.
  • the control valve 152 for adjusting the vacuum pressure may be installed in the tube connecting the film adsorption plate 121 and the vacuum pump 150.
  • the pressure roller 130 is installed at the upper end of the film adsorption plate 121.
  • the pressure roller 130 presses the film F toward the substrate S when the film F adsorbed on the film adsorption plate 121 is in contact with the substrate S adsorbed on the substrate adsorption plate 111. This serves to smoothly adhere to the substrate (S) without lifting.
  • the pressure roller 130 may be coupled to the film adsorption plate 121 to be rotated by a known rotation aid such as a bearing.
  • the pressure roller 130 may be made of a material having elasticity, such as rubber or silicone in order to improve adhesion.
  • the film supply device 180 includes a film supply plate 181 for adsorbing the film F and a film supply plate rotating device 182 for rotating the film supply plate 181. do.
  • the film supply plate 181 is rotatably supported by the hinge device 183, and rotates about an angle of the hinge device 183 by the film supply plate rotating device 182.
  • the film supply plate 181 is provided with a plurality of adsorption holes 184 on one surface thereof to adsorb the film (F).
  • the film supply plate 181 may be connected to the vacuum pump 150 through a tube, and the control valve 153 for adjusting the vacuum pressure may be installed in the tube connecting the film supply plate 181 and the vacuum pump 150. Can be.
  • the structure of the film supply device 180 is not limited to that shown.
  • the film supply device 180 may be changed into various structures capable of supplying the films F to the film adsorption plate 121 one by one.
  • the plurality of film adsorption plates 121 moves to the film supply position P4 and the attachment position P1 by the rotation of the film transporting rotation table 123.
  • the film supply device 180 supplies one film F to the film adsorption plate 121 so that one film F is applied to the film adsorption plate 121. Is adsorbed.
  • the film adsorption plate 121 is located in the attachment position P1, the film F of the film adsorption plate 121 moves to the board
  • the protective sheet attached to the film F and covering the adhesive surface is removed from the film F before the film F moves to the attachment position P1.
  • various known methods may be used, and thus a detailed description thereof will be omitted.
  • the substrate adsorption plate transporter 140 is disposed at the attachment position P1.
  • the substrate adsorption plate transporting device 140 slides the substrate adsorption plate 111 moved to the attachment position P1 in the vertical direction along the guide rail 116.
  • the substrate adsorption plate transfer device 140 applies an external force to the substrate adsorption plate 111 to operate the movable member 141 for moving the substrate adsorption plate 111 up and down and the movable member driving device 142 for operating the movable member 141.
  • the movable member 141 includes a pair of fingers 143. The pair of fingers 143 may catch the upper end of the substrate adsorption plate 111 by being close to each other, and may be separated from the substrate adsorption plate 111 by being far from each other.
  • the movable member driving device 142 pushes the movable member 141 downward or pulls the movable member 141 upward.
  • the movable member driving device 142 moves the movable member 141 in the upper direction while the movable member 141 holds the upper end of the substrate suction plate 111, the substrate suction plate 111 moves upward along the guide rail 116. Slide in the direction.
  • the movable member driving device 142 moves the movable member 141 in the downward direction while the substrate suction plate 111 is raised, the substrate suction plate 111 slides downward.
  • the substrate adsorption plate 111 can slide easily on the guide rail 116, even if the substrate adsorption plate conveying device 140 does not push the substrate adsorption plate 111 downward, the substrate adsorption plate 111 is lowered by its own weight. Slide in the direction.
  • the movable member driving device 142 various linear actuators capable of providing linear movement force to the movable member 141 may be used.
  • the specific structure of the movable member 141 or the structure of the substrate adsorption plate conveying device 140 is not limited to the illustrated and may be variously changed.
  • the substrate suction plate transfer device 140 may be disposed under the substrate suction plate 111.
  • the finger 143 of the movable member 141 may be omitted, and the substrate adsorption plate 111 slides upward when the substrate adsorption plate conveying device 140 pushes the substrate adsorption plate 111 upward.
  • the substrate adsorption plate transporter 140 descends, the substrate adsorption plate 111 may also slide downward.
  • the substrate adsorption plate transfer device 140 may be changed into various structures capable of linearly moving the substrate adsorption plate 111 by applying an external force to the substrate adsorption plate 111.
  • the substrate loading device 160 supplies the substrate S to one substrate adsorption plate 111 at the loading position P2, thereby providing a substrate adsorption plate 111. ), The substrate S is adsorbed. Subsequently, the substrate transport rotation table 114 is rotated at an angle to move the substrate adsorption plate 111 on which the substrate S is adsorbed to the attachment position P1.
  • one film adsorption plate 121 which is supplied with the film F by the film supply device 180 at the film supply position P4 is moved to the attachment position P1 by the rotation of the film transporting rotation table 123. Move.
  • the support member transport apparatus pushes the support member 112 toward the film adsorption plate 121, and the film adsorption plate tilting device 122 tilts the film adsorption plate 121.
  • the film adsorption plate 121 is rotated by a predetermined angle around the hinge device 124, the upper end thereof approaches the substrate adsorption plate 111, one end of the film (F) adsorbed on the substrate adsorption plate 111 is the substrate adsorption plate ( It is attached to one end of the substrate S adsorbed by 111.
  • the pressure roller 130 presses one end of the film F in contact with the substrate S toward the substrate S.
  • the substrate adsorption plate transfer device 140 operates to move the movable member 141 to catch the upper end of the substrate adsorption plate 111. Subsequently, as shown in FIG. 5, the movable member 141 is lifted by the movable member driving device 142 to move the substrate adsorption plate 111 along the guide rail 116 in an upward direction. At this time, the film F adsorbed on the film adsorption plate 121 is gradually attached to the substrate S from one end. In this process, the pressure roller 130 presses the film F attached to the substrate S toward the substrate S, so that the film F is lifted or bubbles are generated between the substrate S and the film F. The film F can be attached to the board
  • the vacuum adsorption force of the film adsorption plate 121 may gradually decrease as the film F moves to the substrate S.
  • the film attachment device 100 by gradually attaching the film (F) to the substrate (S) from one end to the other end of the film (F) without intervening bubbles or the like on the attachment surface Can be stably attached to the substrate (S).
  • a compact structure is possible by reducing the occupation space and the operating range of the components for supplying and transporting the substrate S and the film F, and one substrate adsorption plate transporting device 140 disposed at the attachment position P1. Since all the substrate adsorption plates 111 moved to the attachment position P1 can be moved, the number of parts can be reduced and the installation cost can be reduced.
  • FIG. 6 to 8 show a film attachment device according to another embodiment of the present invention.
  • the film attachment device 200 according to another embodiment of the present invention is the same as most of the film attachment device 200 according to an embodiment of the present invention described above, but provided in each of the plurality of film adsorption plate 121 Instead of a plurality of pressure rollers 130 to be provided with one film pressing device 210.
  • One film pressing device 210 disposed at the attachment position P1 serves to press the film F toward the substrate S.
  • the same reference numerals are given to the same parts as the configuration of the film applying apparatus 100 to be described above, and detailed description thereof will be omitted.
  • one film pressing device 210 is disposed at the attachment position P1.
  • the film pressing device 210 is a pressure roller for pressing the film (F) toward the substrate (S) when the film (F) adsorbed on the film adsorption plate (121) contacts the substrate (S) adsorbed on the substrate adsorption plate (111).
  • 211 and a pressure roller feeder 212 for advancing in the direction in which the film F is pressed and retracting in the direction falling from the film F.
  • the pressure roller 211 is rotatably coupled to the support bracket 213 provided in the pressure roller feeder 212.
  • various linear actuators capable of providing a linear movement force to the pressure roller 211 may be used.
  • the pressure roller 211 is advanced to the film. (F) is pressed toward the substrate S. Thereafter, the substrate adsorption plate transporting device 140 operates to move the substrate S upwards, so that the film F is gradually attached to the substrate S from one end to the other end. At this time, since the pressing roller 211 presses the film F toward the substrate S, the film F may be smoothly attached to the substrate S without lifting the substrate S.
  • the pressure roller 211 retreats to its original state and falls from the film F.
  • the film adsorption plate 121 on which the new film F is adsorbed moves to the attachment position P1
  • the film adsorbing plate 121 is advanced again to press the film F toward the substrate S.
  • the film attachment device 200 is a film F adsorbed to the plurality of film adsorption plates 121 by using one film pressing device 210 installed at the attachment position P1. ) May be sequentially pressed toward the substrate adsorption plate 111.
  • the direction in which the substrate adsorption plate 111 slides by the substrate adsorption plate transport device 140 may be left and right, not limited to the up and down direction, as shown. In this case, the direction in which the film adsorption plate 121 is tilted depends on the moving direction of the substrate adsorption plate 111.
  • the substrate adsorption unit 110 includes a substrate transport rotating table 114 for moving the substrate adsorption plate 111, and the film adsorption unit 120 moves the film adsorption plate 121.
  • a substrate transport rotating table 114 for moving the substrate adsorption plate 111
  • the film adsorption unit 120 moves the film adsorption plate 121.
  • one or more substrate adsorption plates 111 may be installed on a straight line without being installed on the rotating substrate transport rotating table 114.
  • the film adsorption plate 121 may also be installed on one or more lines on a straight line without being installed on the rotating film transport rotating table 123.
  • the substrate adsorption plate 111 or the film adsorption plate 121 may be installed to move linearly to the attachment position, or may be installed to be stopped at the attachment position.
  • the film attachment apparatus according to the embodiments of the present invention described above may be arranged to be continuously attached to attach both films to both sides of the substrate. That is, the film attachment apparatus according to the embodiments of the present invention may be arranged side by side so that the film is attached to one side of the substrate, and the film is attached to the other side of the substrate to which the film is attached to one side. In this case, the unloading apparatus moves to a part of unloading the substrate on which both films are attached.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

L'invention concerne un dispositif d'adhésion de film qui comprend: une unité d'adsorption de substrat comportant une plaque d'adsorption de substrat pour adsorber un substrat et une table rotative de transport de substrat montée mobile sur la plaque d'adsorption de substrat et conçue pour tourner tout en déplaçant la plaque d'adsorption de substrat jusqu'à une position d'adhésion, une unité d'adsorption de film comportant une plaque d'adsorption de film pour adsorber un film destiné à adhérer au substrat, une table rotative de transport de film montée sur la plaque d'adsorption de film pour déplacer la plaque d'adsorption de film de manière rotative jusqu'à une position d'adhésion afin que la plaque d'adhésion de film soit opposée à la plaque d'adsorption du substrat, et un dispositif d'inclinaison de plaque d'adsorption de film monté sur la table rotative de transport de film pour incliner la plaque d'adsorption de film en position d'adhésion, en direction de la plaque d'adsorption de substrat, un dispositif de transport de plaque d'adsorption de substrat pour déplacer la plaque d'adsorption de substrat afin que le film adhère progressivement au substrat d'une extrémité du film à l'autre, lorsque la plaque d'adsorption de film, qui est déplacée jusqu'à la position d'adhésion, est inclinée de sorte qu'une extrémité du film, qui est adsorbée sur la plaque d'adsorption de film, soit fixée au substrat qui est adsorbé sur la plaque d'adsorption de substrat, et au moins une pompe à vide permettant de créer une dépression sur la plaque d'adsorption de substrat et sur la plaque d'adsorption de film.
PCT/KR2010/006110 2009-12-08 2010-09-08 Dispositif d'adhésion de film et procédé d'adhésion WO2011071231A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012541928A JP5468142B2 (ja) 2009-12-08 2010-09-08 フィルム付着装置及び付着方法
CN201080055049.7A CN102656508B (zh) 2009-12-08 2010-09-08 薄膜贴附装置及贴附方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020090121246A KR101085585B1 (ko) 2009-12-08 2009-12-08 필름 부착장치 및 부착방법
KR10-2009-0121246 2009-12-08
KR1020100018779A KR101126685B1 (ko) 2010-03-03 2010-03-03 필름 부착장치 및 부착방법
KR10-2010-0018779 2010-03-03

Publications (2)

Publication Number Publication Date
WO2011071231A2 true WO2011071231A2 (fr) 2011-06-16
WO2011071231A3 WO2011071231A3 (fr) 2011-08-04

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JP (1) JP5468142B2 (fr)
CN (1) CN102656508B (fr)
WO (1) WO2011071231A2 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102991750A (zh) * 2011-09-18 2013-03-27 瑞世达科技(厦门)有限公司 覆膜机及覆膜方法
CN104724312A (zh) * 2015-03-23 2015-06-24 惠州Tcl移动通信有限公司 贴膜装置
CN108995200A (zh) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
CN113488671A (zh) * 2021-07-09 2021-10-08 广东胜蓝新能源科技有限公司 一种新能源电池侧板自动化覆高滤膜设备
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JP6676484B2 (ja) * 2016-06-28 2020-04-08 Ｎｉｓｓｈａ株式会社 貼合装置
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JP2013063655A (ja) * 2011-09-18 2013-04-11 Ray-Star Technology (Xiamen) Inc フィルムラミネート装置及びフィルムラミネート方法
CN104724312A (zh) * 2015-03-23 2015-06-24 惠州Tcl移动通信有限公司 贴膜装置
CN108995200A (zh) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
CN108995200B (zh) * 2018-08-28 2023-06-30 莱芜钢铁集团有限公司 气体提取式薄膜铺设装置及方法
CN113488671A (zh) * 2021-07-09 2021-10-08 广东胜蓝新能源科技有限公司 一种新能源电池侧板自动化覆高滤膜设备
CN114750423A (zh) * 2022-06-15 2022-07-15 浙江大华技术股份有限公司 薄膜包装的纸膜覆合设备
CN114750424A (zh) * 2022-06-15 2022-07-15 浙江大华技术股份有限公司 薄膜包装的纸膜覆合设备

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