WO2010140545A1 - 湿度検出センサパッケージ及びその製造方法 - Google Patents
湿度検出センサパッケージ及びその製造方法 Download PDFInfo
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- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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- H01L2224/321—Disposition
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- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
- H01L2224/48228—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item the bond pad being disposed in a recess of the surface of the item
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
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- H01L2224/732—Location after the connecting process
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- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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Abstract
Description
図1は、本発明の実施の形態に係る湿度検出センサパッケージを示す図であり、(a)は等角投影図であり、(b)は底面等角投影図であり、(c)は平面図であり、(d)は底面図であり、(e)は側面図であり、(f)は断面図である。
基台を構成する材料をシリコンとし、仕切り部材を構成する材料をシリコンとして、上述した方法により図1に示す湿度検出センサパッケージ(実施例1)を作製した。また、比較のために、基台を構成する材料をシリコンとし、仕切り部材を構成する材料をPPS(ポリフェニルスルフィド)として、上述した方法により図1に示す湿度検出センサパッケージ(比較例1)及び基台を構成する材料をシリコンとし、仕切り部材を構成する材料を金として、上述した方法により図1に示す湿度検出センサパッケージ(比較例2)を作製した。
温度特性ばらつき(ppm)={V(t℃)-V(25℃)}/V(25℃)×106
V(t℃):任意の温度での出力、V(25℃):25℃での出力
Claims (11)
- パッケージ基板の一方の主面上に実装され、感湿領域を有する湿度検出センサと、前記湿度検出センサの外部接続部を少なくとも封止する封止樹脂と、前記感湿領域が外界に露出するように、前記封止樹脂の封止領域と前記感湿領域とを仕切る仕切り部材と、を具備し、前記湿度検出センサは、基台と、前記基台上に搭載されたセンサ素子と、を有し、前記基台と前記仕切り部材とが同じ材質で構成されていることを特徴とする湿度検出センサパッケージ。
- 前記基台と前記仕切り部材とがシリコンで構成されていることを特徴とする請求項1記載の湿度検出センサパッケージ。
- 前記基台と前記仕切り部材とが共晶接合で接合されていることを特徴とする請求項2記載の湿度検出センサパッケージ。
- 前記基台と前記仕切り部材とが感光性接着剤で接合されていることを特徴とする請求項1記載の湿度検出センサパッケージ。
- 前記仕切り部材は、フッ素系ガスの被着により薄膜が形成されていることを特徴とする請求項1記載の湿度検出センサパッケージ。
- 前記仕切り部材は、前記封止樹脂より突出した突出部を有し、前記突出部は、平面視においてR部を有することを特徴とする請求項1記載の湿度検出センサパッケージ。
- パッケージ基板の一方の主面上に湿度検出センサを実装する工程と、前記湿度検出センサの外部接続部分を少なくとも封止樹脂により封止する工程と、を具備する湿度検出センサパッケージの製造方法であって、前記湿度検出センサは、感湿領域を備えると共に、前記感湿領域が外界に露出するように前記封止樹脂の封止領域と前記感湿領域とを仕切る仕切り部材を有しており、前記湿度検出センサは、前記仕切り部材と同じ材質の基板の一方の主面に、前記感湿領域に対面する凹部を形成する工程と、前記基台上に前記センサ素子を搭載する工程と、前記凹部が前記感湿領域に対面するように、前記基板と前記基台とを接合する工程と、前記基板の他方の主面を研削して前記感湿領域を外界に露出させる開口を形成して前記仕切り部材を設ける工程と、ダイシングラインに沿ってダイシングすることにより個々の湿度検出センサに分割する工程と、により作製されることを特徴とする湿度検出センサパッケージの製造方法。
- 前記基台のみをダイシングラインに沿ってダイシングすることにより個々の湿度検出センサに分割することを特徴とする請求項7記載の湿度検出センサパッケージの製造方法。
- 前記基台と前記仕切り部材とをダイシングラインに沿ってダイシングすることにより個々の湿度検出センサに分割することを特徴とする請求項7記載の湿度検出センサパッケージの製造方法。
- 前記凹部がフォトリソグラフィ及びエッチングで形成されることを特徴とする請求項7記載の湿度検出センサパッケージの製造方法。
- 前記仕切り部材に、フッ素系ガスの被着により薄膜を形成することを特徴とする請求項7記載の湿度検出センサパッケージの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN2010800098283A CN102341698B (zh) | 2009-06-01 | 2010-05-28 | 湿度检测传感器封装件及其制造方法 |
JP2011518426A JP5269990B2 (ja) | 2009-06-01 | 2010-05-28 | 湿度検出センサパッケージの製造方法 |
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JP2009-132015 | 2009-06-01 | ||
JP2009132015 | 2009-06-01 |
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PCT/JP2010/059086 WO2010140545A1 (ja) | 2009-06-01 | 2010-05-28 | 湿度検出センサパッケージ及びその製造方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130001705U (ko) * | 2011-09-02 | 2013-03-12 | 센시리온 에이지 | 센서 모듈 |
EP2765410A1 (en) * | 2014-06-06 | 2014-08-13 | Sensirion AG | Gas sensor package |
JP2016217757A (ja) * | 2015-05-15 | 2016-12-22 | 富士通株式会社 | ガスセンサデバイス部品、ガスセンサデバイス及びその製造方法、情報処理システム |
EP3124962A1 (en) * | 2015-07-29 | 2017-02-01 | Sensirion AG | Gas sensor, array and a method for manufacturing thereof |
US9914638B2 (en) | 2015-01-14 | 2018-03-13 | Sensirion Ag | Sensor package |
WO2019021677A1 (ja) * | 2017-07-27 | 2019-01-31 | 株式会社デンソー | 粒子センサ |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11287395B2 (en) * | 2016-09-09 | 2022-03-29 | Hokuriku Electric Industry Co., Ltd. | Capacitive gas sensor |
EP3502680A4 (en) * | 2016-09-30 | 2019-09-11 | Minebea Mitsumi Inc. | MOISTURE SENSOR |
JP2019184453A (ja) * | 2018-04-12 | 2019-10-24 | セイコーエプソン株式会社 | センサーユニットおよび構造物監視装置 |
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2010
- 2010-05-28 JP JP2011518426A patent/JP5269990B2/ja not_active Expired - Fee Related
- 2010-05-28 CN CN2010800098283A patent/CN102341698B/zh not_active Expired - Fee Related
- 2010-05-28 WO PCT/JP2010/059086 patent/WO2010140545A1/ja active Application Filing
Patent Citations (10)
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JPS61214566A (ja) * | 1985-03-20 | 1986-09-24 | Toshiba Corp | 半導体光センサ装置 |
JPH0394453A (ja) * | 1989-09-06 | 1991-04-19 | Ibiden Co Ltd | 電子部品搭載用基板 |
JPH07174599A (ja) * | 1991-12-09 | 1995-07-14 | Mitsubishi Electric Corp | 半導体センサー装置およびその製造方法 |
JPH09162208A (ja) * | 1995-12-08 | 1997-06-20 | Denso Corp | ベアチップ封止方法 |
JP2001196644A (ja) * | 2000-01-11 | 2001-07-19 | Nichia Chem Ind Ltd | 光半導体装置及びその製造方法 |
JP2001210755A (ja) * | 2000-01-28 | 2001-08-03 | Nec Corp | 半導体装置用基板および半導体装置の製造方法 |
JP2003318336A (ja) * | 2002-04-25 | 2003-11-07 | Kyocera Corp | 電子部品装置及び製造方法 |
WO2004023126A1 (ja) * | 2002-09-03 | 2004-03-18 | Ngk Spark Plug Co., Ltd. | シリコン製マイクロセンサの実装方法、製造方法およびシリコン製マイクロセンサ |
JP2008064561A (ja) * | 2006-09-06 | 2008-03-21 | Denso Corp | 湿度センサ |
JP2008211124A (ja) * | 2007-02-28 | 2008-09-11 | Misuzu Kogyo:Kk | 半導体装置収納パッケージ |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130001705U (ko) * | 2011-09-02 | 2013-03-12 | 센시리온 에이지 | 센서 모듈 |
KR200481748Y1 (ko) * | 2011-09-02 | 2016-11-04 | 센시리온 에이지 | 센서 모듈 |
EP2765410A1 (en) * | 2014-06-06 | 2014-08-13 | Sensirion AG | Gas sensor package |
JP2015230315A (ja) * | 2014-06-06 | 2015-12-21 | センシリオン アクチエンゲゼルシャフト | ガスセンサパッケージ |
US9952171B2 (en) | 2014-06-06 | 2018-04-24 | Sensirion Ag | Gas sensor package |
US9914638B2 (en) | 2015-01-14 | 2018-03-13 | Sensirion Ag | Sensor package |
JP2016217757A (ja) * | 2015-05-15 | 2016-12-22 | 富士通株式会社 | ガスセンサデバイス部品、ガスセンサデバイス及びその製造方法、情報処理システム |
EP3124962A1 (en) * | 2015-07-29 | 2017-02-01 | Sensirion AG | Gas sensor, array and a method for manufacturing thereof |
WO2019021677A1 (ja) * | 2017-07-27 | 2019-01-31 | 株式会社デンソー | 粒子センサ |
Also Published As
Publication number | Publication date |
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CN102341698B (zh) | 2013-10-09 |
JPWO2010140545A1 (ja) | 2012-11-15 |
CN102341698A (zh) | 2012-02-01 |
JP5269990B2 (ja) | 2013-08-21 |
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