WO2010140352A1 - 石英ガラスルツボ用蓋と石英ガラスルツボおよびその取り扱い方法 - Google Patents
石英ガラスルツボ用蓋と石英ガラスルツボおよびその取り扱い方法 Download PDFInfo
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- WO2010140352A1 WO2010140352A1 PCT/JP2010/003668 JP2010003668W WO2010140352A1 WO 2010140352 A1 WO2010140352 A1 WO 2010140352A1 JP 2010003668 W JP2010003668 W JP 2010003668W WO 2010140352 A1 WO2010140352 A1 WO 2010140352A1
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- WIPO (PCT)
- Prior art keywords
- lid
- crucible
- opening
- glass crucible
- quartz glass
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/02—Removable lids or covers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
- B65D77/10—Container closures formed after filling
- B65D77/20—Container closures formed after filling by applying separate lids or covers, i.e. flexible membrane or foil-like covers
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Definitions
- the present invention relates to a quartz glass crucible, and more particularly to a quartz glass crucible used in a pulling process for producing single crystal silicon, and in particular, a structure for avoiding entry of foreign matter into the inner surface of the produced crucible crucible during storage or transportation. Is to give.
- the quartz glass crucible used for melting polycrystalline silicon which is the raw material, is inspected after cleaning and manufactured, and the acceptable products are packaged and shipped. Is common.
- quartz glass crucibles By the way, with the increase in purity of semiconductor materials, it is important to suppress various types of contamination during the production of single crystal silicon, and there is a demand for minimizing contamination of quartz glass crucibles. That is, when a quartz glass crucible is used for pulling a single crystal, careful attention is paid to contamination such as cleaning the inside of the crucible with ultrapure water or the like before use. Therefore, first, it is important to prevent contamination by dust or the like during the period from shipment to use of the manufactured crucible.
- the quartz glass crucible is mechanically wrapped in a clean state after cleaning the quartz glass crucible, and the cleaned quartz glass crucible is automatically wrapped in the clean state.
- An apparatus is proposed in US Pat.
- an object of the present invention is to inexpensively prevent foreign matter from entering the quartz glass crucible until the actual use time of the crucible, and to enable the handling of the crucible without contamination.
- the gist configuration of the present invention is as follows.
- a lid for a quartz glass crucible which is a lid attached to an opening of a quartz glass crucible and has a flange portion that is in close contact with the outer peripheral end of the opening.
- a quartz glass crucible having a disc-shaped lid at an opening, wherein the lid is fixed by bringing a flange portion of the lid into close contact with an outer peripheral end of the opening.
- a waiting period from when polycrystalline silicon is charged into a quartz glass crucible until melting of the polycrystalline silicon is any one of (1) to (7).
- a method for handling a quartz glass crucible comprising mounting the lid described above on an opening of the quartz glass crucible.
- the quartz glass crucible since the intrusion of the raw material powder of the quartz glass crucible into the inner surface of the crucible, and hence the intrusion of foreign matter into the quartz glass crucible, is reliably avoided, the period from the crucible shipment to the polycrystalline silicon melting step In addition, the quartz glass crucible can be handled in a state where the inner surface is not contaminated.
- FIG. 1A shows a radial cross section of the crucible before mounting the lid of the present invention
- FIG. 1B shows a radial cross section of the crucible after mounting the lid.
- reference numeral 1 denotes a crucible made of quartz glass (hereinafter simply referred to as a crucible), and a lid 3 is attached to the opening 2 of the crucible 1.
- the lid 3 has a disk shape similar to the opening 2 and has a flange portion 4 that is in close contact with the outer peripheral end 2 a of the opening 2 of the crucible 1. That is, as shown in FIG.
- the lid 3 is attached to the opening 2 of the crucible 1 when the flange portion 4 is in close contact with the outer peripheral end 2a.
- the diameter of the flange portion 4 is equal to or slightly smaller than the outer diameter of the crucible 1 in order to close the opening portion 2 without a gap.
- the lid 3 is made of a flexible material such as ABS resin, urethane resin, polyethylene, polypropylene, vinyl chloride, acrylic resin, polycarbonate, etc., so that the lid 3 can be entirely or the flange portion 4 of the lid 3 when mounted. As shown in FIG. 2 (b), it is possible to press the flange portion 4 against the outer peripheral end 2a by using the restoring force as shown in FIG. Is preferable.
- the lid 3 having such a configuration When the lid 3 having such a configuration is attached to the opening 2 of the crucible 1, the lid 3 is in close contact with the outer peripheral end 2 a and the peripheral end surface 2 b of the opening 2, and the opening 2 is reliably closed, and the crucible 1
- the lid 3 it is possible to prevent the foreign material from entering the crucible because the adhering raw material powder or the like is prevented from being introduced into the crucible, for example, by wrapping.
- the adhesive member 5 in an area in contact with the peripheral end surface 2 b of the opening 2 on the inner side of the lid 3. This is because when the lid 3 having the adhesive member 5 is used to attach the lid 3 to the opening 2 of the crucible 1, the crucible 1 and the lid 3 are more closely attached, and the sealing performance of the crucible 1 as a container is further improved. This is because it is effective for preventing intrusion of foreign matter such as moisture that penetrates from between the lid 3 and the crucible 1. In addition, the moisture contained in the outside air may be dissolved with a metal element that lowers the crucible performance, and it is preferable to maintain the crucible performance. Further, as shown in FIG.
- the “adhesive member” as used herein refers to an adhesive itself or an adhesive sheet in which an adhesive is provided on an arbitrary substrate, and is detachable from the attachment target. It is desirable from the viewpoints of reliability of adhesion and fixing, ease of peeling, etc. Moreover, it is preferable that the adhesive member 5 has elasticity from a viewpoint of improving the adhesiveness between the crucible 1 and the lid 3.
- the elastic member preferably has the above-described adhesiveness.
- the pressure-sensitive adhesive member and the elastic member used in the present invention are not particularly limited as long as the above characteristics are satisfied.
- examples thereof include acrylic and rubber-based materials. Particularly, acrylic-based emulsion type, rubber-based natural rubber-based, and styrene-based materials.
- Synthetic block polymers for example, SIS, SBS, SEBS (hydrogenated type of SBS), SIPS (hydrogenated type of SIS), etc. are used.
- the material of the adhesive member and the elastic member is silicon rubber that is less affected by the penetration. It is preferable.
- the flange portion 4 described above can be bent in two steps toward the crucible side to have a step shape extending radially outward.
- the bent portion is composed of a first bent portion 4a on the radially inner side and a second bent portion 4b on the radially outer side with respect to the first bent portion 4a.
- FIG. 3B when the lid 3 having such a configuration is attached to the opening 2 of the crucible 1, the lid 3 is partially in close contact with the outer peripheral end 2a and the peripheral end surface 2b of the opening 2. However, the opening 2 is reliably closed, and the area where the lid 3 contacts the crucible 1 is reduced.
- the flange portion 4 can be pressed against the outer peripheral end 2a by utilizing the restoring force in order to securely attach and detach the lid 3.
- the lid 3 shown in FIG. 3 is provided with an adhesive member 5 from the viewpoint of suppressing the entry of foreign matter into the crucible, similarly to the lid shown in FIG.
- the peripheral end surface 2 b of the opening 2 is covered with the flange portion 4, so that contamination to the peripheral end surface 2 b can also be avoided. It is effective in avoiding contamination of impurities.
- the diameter of the flange portion 4 before being attached to the crucible 1 is equal to or smaller than the outer diameter of the crucible 1 in order to reliably cover the peripheral end surface 2b and avoid contamination.
- a belt-like adhesive member 6 is attached to the outer peripheral end 2 a of the opening 2 of the crucible 1.
- a lid 3 having an adhesive member 6 shown in FIG. 4 (b) is prepared, and as shown in FIG. 4 (c), the first bent portion 4a is in contact with the peripheral end surface 2b of the opening 2, and The lid 3 is attached to the crucible 1 so that the second bent portion 4b comes into contact with the belt-like adhesive member 6.
- the lid 3 having such a configuration When the lid 3 having such a configuration is attached to the opening 2 of the crucible 1, the opening 2 is reliably closed, and the raw material powder or the like adhering to the crucible 1 is guided to, for example, lapping and guided inside. Such a situation can be prevented in advance, so that the entry of foreign matter into the crucible can be more reliably avoided. Further, since the sealing performance of the crucible 1 as a container is further improved by attaching the lid 3 with the belt-like adhesive member 6 interposed therebetween, for example, moisture that permeates through the gap between the lid 3 and the crucible 1. It is effective in preventing the intrusion of foreign matter such as.
- the lid 3 is attached via the adhesive member 6, the frictional force between the lid 3 and the crucible 1 is improved, and the attachment of the lid 3 becomes more rigid. Therefore, the contamination of the crucible 1 due to the removal of the lid due to vibration during transportation and the movement of the lid 3 relative to the crucible 1 are suppressed, and the generation of wear powder due to that is prevented. It is possible to avoid such wear powder from entering the crucible 1. Further, as shown in FIGS. 5A to 5C, a belt-like adhesive member 6 is interposed between the crucible 1 and the lid 3, and the lid 3 is attached to the crucible 1, and then the outer surface of the crucible 1 is attached.
- the cup-shaped elastic member 7 is attached to the crucible 1, and the end of the cup-shaped elastic member 7 is locked and attached to the second bent portion 4 b of the flange portion 4 of the lid 3. Is also possible.
- the sealing performance of the crucible 1 as a container is further improved, the lid 3 is more firmly attached, and the lid 3 is less likely to come off due to vibration or the like.
- the lid 7 has a cup shape protruding outward, and a bead 9 for reinforcing the lid 3 is provided on the inner surface thereof.
- the bead 9 is provided by bead processing (also called stringing processing).
- bead processing also called stringing processing
- an identifier such as a barcode or QR code to the lid 3 described above.
- an identifier such as a barcode or QR code
- by attaching a barcode to the lid it is possible to move the crucible alone.
- a bar code sticker is attached to a conventional wrapping sheet, it can be moved alone, but for example, since polycrystalline Si is put in a crucible, once the wrap is peeled off, there is a disadvantage that it cannot be reused.
- an identifier capable of storing electronic data such as an IC tag, which is rapidly spreading recently, to the lid 3.
- an identifier capable of storing electronic data such as an IC tag
- an identifier that can contain electronic data such as an IC tag can be reused many times, which is preferable from the viewpoint of reducing manufacturing costs.
- the lid 3 attached to the opening 2 of the crucible 1 and using the crucible 1 for use for example, when removing the lid 3 attached when putting polycrystalline Si into the crucible 1, the crucible 1 is once removed. It is preferable that the lid 3 is removed after the opening is turned vertically downward. Thus, by making the opening of the crucible 1 when the cover 3 is removed downward, intrusion of foreign matter such as raw material powder or dust attached to the surface of the cover 3 can be avoided.
- the lid can be used repeatedly by washing. Since current sheets are difficult to clean, they are usually disposable. And since a lid
- the cleanliness of the lid it is preferable that the adhesion amount of the metal component on at least the inner surface of the lid is 0.05 ng / cm 2 or less in order to increase the cleanness of the inner surface of the crucible.
- the cleanliness of the lid can be measured by applying a hydrogen chloride (HCL) aqueous solution to the surface to be measured such as the inner surface of the lid, collecting the coating solution, and inductively coupled plasma mass spectrometry (ICP-MS).
- HCL hydrogen chloride
- ICP-MS inductively coupled plasma mass spectrometry
- the metal elements to be measured are Na, K, Li, Al, Ca, Co, Cr, Cu, Fe, Mg, Mn, Ni, Ti, Zn, Zr, Ba, and P.
- the following crucible can be handled. That is, as shown in FIG. 8, when manufacturing single crystal silicon, first, as shown in FIG. 8A, the crucible 1 shipped with the lid 3 attached is as shown in FIG. 8B. After removing the lid 3, as shown in FIG. 8 (c), the polycrystalline silicon 10 is charged into the crucible 1, and immediately, as shown in FIG. 8 (d), the opening 2 of the crucible 1 is inserted. The lid 3 is attached. Thereafter, the inside of the crucible 1 is shut off from the outside by the attachment of the lid 3 and stored in the state shown in FIG. The raw material silicon can be kept in a state not contaminated.
- the lid 3 is made transparent so that the raw silicon is inserted into the crucible 1 when the lid 3 is attached, and this is used as a viewing window.
- the entire lid 3 can be made of a transparent material.
- PE polyethylene
- PP polypropylene
- the like are suitable as the material for the transparency.
- Table 1 shows the results of a similar investigation on the case where the crucible is covered with a wrapping sheet and the case where the crucible opening is opened as it is.
- the number of quartz powder mixed in the inner surface of the crucible was transferred to the pulling process of single crystal silicon production, and the quartz powder that had adhered to the inner surface of the crucible by removing the lid before filling with polycrystalline silicon. And the number of quartz pieces was measured. The unit of the number is “pieces”. Further, the crystal yield indicates the ratio of the crystal weight obtained as a single crystal to the raw material weight.
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Abstract
Description
ところで、半導体材料の高純度化に伴い、単結晶シリコンの製造中における各種汚染を抑えることが重要であり、石英ガラスルツボについても汚染を最小限に抑えることが希求されている。すなわち、石英ガラスルツボを単結晶引き上げに使用する際には、使用に先立ちルツボ内を超純水等で洗浄する等、汚染に対しては細心の注意が払われている。そのため、まずは、製造したルツボの出荷から使用までの期間においても、粉塵などによる汚染を防ぐことが重要である。
とりわけ、近年は、単結晶シリコンの製造効率を高めるために石英ガラスルツボのサイズが次第に大きくなる傾向にあり、このような大径のルツボの取扱いが容易ではなく、例えば、ルツボ製造後の検査や袋詰めなどの作業中にも汚染され易い。
(1)石英ガラスルツボの開口部に装着する蓋であって、前記開口部の外周端に密着するフランジ部を有することを特徴とする石英ガラスルツボ用蓋。
同図において、符号1は石英ガラス製のルツボ(以下、単にルツボと示す)であって、該ルツボ1の開口部2に蓋3を装着する。この蓋3は、前記開口部2と相似の円盤状であり、ルツボ1の開口部2の外周端2aと密着するフランジ部4を有する。すなわち、蓋3は、図1(b)に示すように、フランジ部4が外周端2aに密着することによってルツボ1の開口部2に取り付けられる。ここで、フランジ部4の径を、ルツボ1の外径と同等またはやや小さくすることが、開口部2を隙間なく塞ぐために好ましい。
また、図5(a)~(c)に示すように、ルツボ1と蓋3との間に帯状の粘着部材6を介在させて、ルツボ1に蓋3を取り付けた後に、ルツボ1の外面に沿ったカップ状の弾性部材7をルツボ1に装着し、かかるカップ状弾性部材7の端部を蓋3のフランジ部4の第二の屈曲部4bに係止して取り付けるような構成とすることも可能である。かかる構成を採用することにより、ルツボ1の容器として密封性が更に向上するとともに、蓋3の取り付けが更に堅固なものとなり、振動等により蓋3が外れにくくなる。
また、昨今急速に普及しつつある、ICタグ等の電子データを内蔵し得る識別子を蓋3に取り付けることも製造上大変に有効である。なぜなら、ICタグ等の電子データを内蔵し得る識別子を蓋3に取り付けて、外部から電気信号を送り込むだけで、ICタグ内に電子データを書き込むことができ、かかる電子データに基づき、ルツボ内に装入する材料を容易に識別することが可能となるからである。これにより、ルツボ1の管理も容易となり、所望されるルツボ1の取り扱いが容易となる。また、ICタグ等の電子データを内蔵し得る識別子は、何度も使いまわすことができることから、製造コスト削減の観点からも好ましい。
なお、蓋の清浄度は、蓋の内面などの測定対象面に塩化水素(HCL)水溶液を塗布し、該塗布液を回収し、誘導結合プラズマ質量分析(ICP-MS)により測定することができる。ここで、測定対象となる金属元素は、Na,K,Li,Al,Ca,Co,Cr,Cu,Fe,Mg,Mn,Ni,Ti,Zn,Zr,BaおよびP等である。
すなわち、図8に示すように、単結晶シリコンを製造するに際し、まず図8(a)に示すように、蓋3を装着して出荷されてきたルツボ1は、図8(b)に示すように蓋3を外してから、図8(c)に示すように、ルツボ1内に多結晶シリコン10を装入し、直ちに、図8(d)に示すように、ルツボ1の開口部2に蓋3を装着する。その後は、蓋3の装着によってルツボ1の内部を外界と遮断した、図8(e)に示す状態のまま保管することによって、多結晶シリコン10の溶融を行うまでの待機期間を、ルツボ1内の原料シリコンが汚染されない状態に保持することができる。
2 開口部
2a 開口部の外周端
2b 開口部の周端面
3 蓋
3a ルツボ内の空間
4 フランジ部
4a 第一の屈曲部
4b 第二の屈曲部
5 粘着部材
6 帯状の粘着部材
7 カップ状の弾性部材
8 蓋の上面
9 ビード
10 多結晶シリコン
Claims (9)
- 石英ガラスルツボの開口部に装着する蓋であって、前記開口部の外周端に密着するフランジ部を有することを特徴とする石英ガラスルツボ用蓋。
- 請求項1に記載の蓋において、前記開口部の周端面に接する領域に粘着部材を配設してなることを特徴とする石英ガラスルツボ用蓋。
- 請求項1に記載の蓋において、前記開口部の周端面に接する領域に弾性部材を配設してなることを特徴とする石英ガラスルツボ用蓋。
- 請求項1~3のいずれか一項に記載の蓋において、少なくとも内面の金属成分の付着量が0.05ng/cm2以下であることを特徴とする石英ガラスルツボ用蓋。
- 請求項1~4のいずれか一項に記載の蓋において、可撓性を有することを特徴とする石英ガラスルツボ用蓋。
- 請求項1~5のいずれか一項に記載の蓋において、識別子を有することを特徴とする石英ガラスルツボ用蓋。
- 請求項1~6のいずれか一項に記載の蓋において、少なくとも一部が透明であることを特徴とする石英ガラスルツボ用蓋。
- 開口部に円盤状の蓋を有する石英ガラスルツボであって、該蓋のフランジ部を前記開口部の外周端に密着させて蓋を固定してなることを特徴とする石英ガラスルツボ。
- 単結晶シリコンを製造するに際し、石英ガラスルツボ内に多結晶シリコンを装入後、該多結晶シリコンの溶融を行うまでの待機期間は、請求項1~7のいずれか一項に記載の蓋を、前記石英ガラスルツボの開口部に装着することを特徴とする石英ガラスルツボの取り扱い方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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KR1020117014874A KR101325637B1 (ko) | 2009-06-02 | 2010-06-01 | 석영 유리 도가니용 덮개와 석영 유리 도가니 및 그 취급 방법 |
EP10783140.6A EP2420597A4 (en) | 2009-06-02 | 2010-06-01 | QUARTZ GLASS CUP COVER, QUARTZ GLASS CUP AND PROCESS FOR HANDLING |
CN2010800027714A CN102171388B (zh) | 2009-06-02 | 2010-06-01 | 石英玻璃坩埚用盖、石英玻璃坩埚及其使用处理方法 |
US13/145,274 US20120270167A1 (en) | 2009-06-02 | 2010-06-01 | Cover for vitreous silica crucible and vitreous silica crucible and method of handling the same |
SG2011056363A SG173550A1 (en) | 2009-06-02 | 2010-06-01 | Lid for fused quartz crucible, fused quartz crucible and method for handling same |
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JP2009133253A JP4964274B2 (ja) | 2009-06-02 | 2009-06-02 | 石英ガラスルツボ用蓋と石英ガラスルツボおよびその取り扱い方法 |
JP2009-133253 | 2009-06-02 |
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WO2010140352A1 true WO2010140352A1 (ja) | 2010-12-09 |
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US (1) | US20120270167A1 (ja) |
EP (1) | EP2420597A4 (ja) |
JP (1) | JP4964274B2 (ja) |
KR (1) | KR101325637B1 (ja) |
CN (1) | CN102171388B (ja) |
SG (1) | SG173550A1 (ja) |
TW (1) | TWI398384B (ja) |
WO (1) | WO2010140352A1 (ja) |
Cited By (1)
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CN110064454A (zh) * | 2019-05-24 | 2019-07-30 | 郑州轻工业学院 | 同步辐射状态下镁合金凝固过程实验用坩埚及封装方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5287677B2 (ja) * | 2009-11-13 | 2013-09-11 | 株式会社Sumco | 石英ガラスルツボ用蓋及びこれを用いた石英ガラスルツボの取り扱い方法 |
TW201202454A (en) * | 2010-07-07 | 2012-01-16 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
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WO2013006858A1 (en) | 2011-07-07 | 2013-01-10 | Berry Plastics Corporation | Canister |
CN103420345B (zh) * | 2012-05-22 | 2015-04-22 | 广东先导稀材股份有限公司 | 石墨坩埚、加热炉以及碲化镉的制备方法 |
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WO2016014825A1 (en) | 2014-07-23 | 2016-01-28 | Berry Plastics Corporation | Package with peelable closure |
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JP6681568B2 (ja) * | 2015-04-01 | 2020-04-15 | パナソニックIpマネジメント株式会社 | 加熱反応容器および反応方法 |
CN108456855A (zh) | 2017-02-17 | 2018-08-28 | 京东方科技集团股份有限公司 | 坩埚、蒸镀准备装置、蒸镀设备及蒸镀方法 |
CN113287005A (zh) * | 2018-11-22 | 2021-08-20 | 株式会社理学 | 单晶x射线结构解析装置和方法、用于此的试样保持架以及敷料器 |
WO2020105722A1 (ja) * | 2018-11-22 | 2020-05-28 | 株式会社リガク | 単結晶x線構造解析装置とそのための方法 |
KR102074893B1 (ko) * | 2019-01-15 | 2020-02-07 | 주식회사 에스지엠 | 용기 덮개 |
KR102661939B1 (ko) * | 2019-01-23 | 2024-04-29 | 에스케이실트론 주식회사 | 실리콘 단결정 성장 장치 |
KR102670968B1 (ko) * | 2019-04-24 | 2024-05-30 | 에스케이실트론 주식회사 | 분진 제거장치 및 그를 구비한 단결정 성장장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58223609A (ja) * | 1982-06-18 | 1983-12-26 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体結晶合成方法 |
JPH07172975A (ja) * | 1993-12-20 | 1995-07-11 | Mitsubishi Materials Corp | 単結晶引上装置用原料組み込み方法及び装置 |
JPH0967188A (ja) * | 1995-08-25 | 1997-03-11 | Komatsu Electron Metals Co Ltd | 石英ルツボ移載装置 |
JPH09183685A (ja) * | 1995-12-28 | 1997-07-15 | Mitsubishi Materials Shilicon Corp | 二重ルツボの炉内への組み込み方法 |
JP2000169282A (ja) * | 1998-12-08 | 2000-06-20 | Mitsubishi Materials Silicon Corp | るつぼ用蓋 |
JP2000219207A (ja) | 1999-01-28 | 2000-08-08 | Mitsubishi Material Quartz Kk | 石英ルツボのラッピング装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1455894A (en) * | 1921-11-03 | 1923-05-22 | Aluminum Seal Company | Hermetic seal |
US2551937A (en) * | 1947-06-26 | 1951-05-08 | Knox Glass Associates Inc | Vacuum seal finish and closure for jars |
FR1029591A (fr) * | 1958-01-10 | 1953-06-03 | Obturateur creux pour l'occlusion de tous orifices | |
NL7300382A (ja) * | 1973-01-11 | 1974-07-15 | ||
DE3017392C2 (de) * | 1980-05-07 | 1982-09-23 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verfahren und Vorrichtung zur Herstellung von flachen, transparenten, blasenarmen Körpern aus Quarzglas |
US4303615A (en) * | 1980-06-02 | 1981-12-01 | Fisher Scientific Company | Crucible with lid |
GB8817219D0 (en) * | 1988-07-20 | 1988-08-24 | Ici Plc | Thermal transfer printing |
JPH02160687A (ja) * | 1988-12-14 | 1990-06-20 | Mitsui Mining Co Ltd | 単結晶製造方法 |
US5102002A (en) * | 1991-01-16 | 1992-04-07 | Whitley Charlie D | Beverage cup lid |
US7299941B2 (en) * | 2003-04-15 | 2007-11-27 | Dart Industries Inc. | Container seal with flexible central panel |
CN2659828Y (zh) * | 2003-12-06 | 2004-12-01 | 饶建军 | 可识别饮料瓶或杯 |
JP4641760B2 (ja) * | 2004-08-06 | 2011-03-02 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボ |
US8361227B2 (en) * | 2006-09-26 | 2013-01-29 | Ii-Vi Incorporated | Silicon carbide single crystals with low boron content |
CN201027028Y (zh) * | 2007-04-18 | 2008-02-27 | 惠阳区昌发实业发展有限公司 | 一种密封盖 |
JP5032523B2 (ja) * | 2009-03-09 | 2012-09-26 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボ用栓と石英ガラスルツボおよびその取り扱い方法 |
US8535441B2 (en) * | 2010-08-03 | 2013-09-17 | Siemens Medical Solutions Usa, Inc. | Crystal growth crucible lid |
-
2009
- 2009-06-02 JP JP2009133253A patent/JP4964274B2/ja active Active
-
2010
- 2010-06-01 EP EP10783140.6A patent/EP2420597A4/en not_active Withdrawn
- 2010-06-01 SG SG2011056363A patent/SG173550A1/en unknown
- 2010-06-01 CN CN2010800027714A patent/CN102171388B/zh active Active
- 2010-06-01 KR KR1020117014874A patent/KR101325637B1/ko active IP Right Grant
- 2010-06-01 US US13/145,274 patent/US20120270167A1/en not_active Abandoned
- 2010-06-01 WO PCT/JP2010/003668 patent/WO2010140352A1/ja active Application Filing
- 2010-06-02 TW TW099117747A patent/TWI398384B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58223609A (ja) * | 1982-06-18 | 1983-12-26 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体結晶合成方法 |
JPH07172975A (ja) * | 1993-12-20 | 1995-07-11 | Mitsubishi Materials Corp | 単結晶引上装置用原料組み込み方法及び装置 |
JPH0967188A (ja) * | 1995-08-25 | 1997-03-11 | Komatsu Electron Metals Co Ltd | 石英ルツボ移載装置 |
JPH09183685A (ja) * | 1995-12-28 | 1997-07-15 | Mitsubishi Materials Shilicon Corp | 二重ルツボの炉内への組み込み方法 |
JP2000169282A (ja) * | 1998-12-08 | 2000-06-20 | Mitsubishi Materials Silicon Corp | るつぼ用蓋 |
JP2000219207A (ja) | 1999-01-28 | 2000-08-08 | Mitsubishi Material Quartz Kk | 石英ルツボのラッピング装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2420597A4 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110064454A (zh) * | 2019-05-24 | 2019-07-30 | 郑州轻工业学院 | 同步辐射状态下镁合金凝固过程实验用坩埚及封装方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2420597A4 (en) | 2013-08-14 |
CN102171388A (zh) | 2011-08-31 |
SG173550A1 (en) | 2011-09-29 |
TWI398384B (zh) | 2013-06-11 |
KR20110099282A (ko) | 2011-09-07 |
TW201107197A (en) | 2011-03-01 |
KR101325637B1 (ko) | 2013-11-07 |
CN102171388B (zh) | 2013-07-10 |
US20120270167A1 (en) | 2012-10-25 |
JP2010280518A (ja) | 2010-12-16 |
EP2420597A1 (en) | 2012-02-22 |
JP4964274B2 (ja) | 2012-06-27 |
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