JP4641760B2 - シリコン単結晶引上げ用石英ガラスルツボ - Google Patents
シリコン単結晶引上げ用石英ガラスルツボ Download PDFInfo
- Publication number
- JP4641760B2 JP4641760B2 JP2004230576A JP2004230576A JP4641760B2 JP 4641760 B2 JP4641760 B2 JP 4641760B2 JP 2004230576 A JP2004230576 A JP 2004230576A JP 2004230576 A JP2004230576 A JP 2004230576A JP 4641760 B2 JP4641760 B2 JP 4641760B2
- Authority
- JP
- Japan
- Prior art keywords
- silica powder
- glass crucible
- crucible
- silicon single
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 157
- 239000013078 crystal Substances 0.000 title claims description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 34
- 229910052710 silicon Inorganic materials 0.000 title claims description 34
- 239000010703 silicon Substances 0.000 title claims description 34
- 239000000843 powder Substances 0.000 claims description 68
- 239000000377 silicon dioxide Substances 0.000 claims description 56
- 239000002390 adhesive tape Substances 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 22
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 16
- 238000005530 etching Methods 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000002994 raw material Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Glass Melting And Manufacturing (AREA)
- Surface Treatment Of Glass (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
(比較例1)
Claims (1)
- 平滑な内表面と不透明又は半透明な外層と、その外側に未溶融ないし半溶融のシリカ粉が偏在する最外層を有する石英ガラスルツボにおいて、平滑な内表面に離脱シリカ粉がなく、かつ少なくとも直胴部における未溶融ないし半溶融のシリカ粉が偏在する最外層の離脱シリカ粉が粘着テープに付着する100μm以上の石英粉の個数を目視でカウントして0.1〜1.0個/cm2であることを特徴とするシリコン単結晶引上げ用石英ガラスルツボ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004230576A JP4641760B2 (ja) | 2004-08-06 | 2004-08-06 | シリコン単結晶引上げ用石英ガラスルツボ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004230576A JP4641760B2 (ja) | 2004-08-06 | 2004-08-06 | シリコン単結晶引上げ用石英ガラスルツボ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010140335A Division JP5344767B2 (ja) | 2010-06-21 | 2010-06-21 | シリコン単結晶引上げ用石英ガラスルツボの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005239533A JP2005239533A (ja) | 2005-09-08 |
JP4641760B2 true JP4641760B2 (ja) | 2011-03-02 |
Family
ID=35021665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004230576A Active JP4641760B2 (ja) | 2004-08-06 | 2004-08-06 | シリコン単結晶引上げ用石英ガラスルツボ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4641760B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5229778B2 (ja) * | 2007-09-28 | 2013-07-03 | 株式会社Sumco | シリコン単結晶引き上げ用石英ガラスルツボの製造方法 |
JP4964274B2 (ja) * | 2009-06-02 | 2012-06-27 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボ用蓋と石英ガラスルツボおよびその取り扱い方法 |
JP5685894B2 (ja) | 2010-11-05 | 2015-03-18 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP5741163B2 (ja) | 2011-04-11 | 2015-07-01 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
JP5488519B2 (ja) * | 2011-04-11 | 2014-05-14 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0388792A (ja) * | 1989-08-30 | 1991-04-15 | Mitsubishi Materials Corp | シリコン単結晶引上げ用石英ルツボおよびその製造方法 |
JPH0692779A (ja) * | 1992-04-27 | 1994-04-05 | Shin Etsu Handotai Co Ltd | 単結晶引き上げ用石英るつぼ |
JP2004107163A (ja) * | 2002-09-20 | 2004-04-08 | Toshiba Ceramics Co Ltd | 石英ルツボとその製造方法 |
-
2004
- 2004-08-06 JP JP2004230576A patent/JP4641760B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0388792A (ja) * | 1989-08-30 | 1991-04-15 | Mitsubishi Materials Corp | シリコン単結晶引上げ用石英ルツボおよびその製造方法 |
JPH0692779A (ja) * | 1992-04-27 | 1994-04-05 | Shin Etsu Handotai Co Ltd | 単結晶引き上げ用石英るつぼ |
JP2004107163A (ja) * | 2002-09-20 | 2004-04-08 | Toshiba Ceramics Co Ltd | 石英ルツボとその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2005239533A (ja) | 2005-09-08 |
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