WO2010140325A1 - 搬送車システム - Google Patents
搬送車システム Download PDFInfo
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- WO2010140325A1 WO2010140325A1 PCT/JP2010/003586 JP2010003586W WO2010140325A1 WO 2010140325 A1 WO2010140325 A1 WO 2010140325A1 JP 2010003586 W JP2010003586 W JP 2010003586W WO 2010140325 A1 WO2010140325 A1 WO 2010140325A1
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- controller
- transport
- article
- command
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- 238000000034 method Methods 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000032258 transport Effects 0.000 description 166
- 238000009826 distribution Methods 0.000 description 25
- 238000002360 preparation method Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000004891 communication Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- the present invention relates to a transport vehicle system including an automatic warehouse having an automatic warehouse controller, and a transport vehicle in which goods are transferred between the automatic warehouse.
- a transport vehicle system that includes a circular track, a plurality of stations provided on the path of the circular track, and a plurality of transport vehicles that travel in one direction along the circular track to transport articles. . Between the station and the transport vehicle, cargo grasping (loading of articles from the station to the transport vehicle) and unloading (loading of articles from the transport vehicle to the station) is performed.
- a stocker that stores FOUP (Front Opening Unified Pod) in a semiconductor factory is known.
- the stocker is an automatic warehouse and has a plurality of shelves and a stacker crane that travels along the shelves.
- the overhead transportation vehicle carries the FOUP into the warehousing port, and then the stacker crane conveys the FOUP to a predetermined shelf.
- the stacker crane transports the FOUP from a predetermined shelf to the delivery port, and then the overhead transport vehicle carries the FOUP from the delivery port.
- an automatic warehouse in which an advance transportation instruction is created only for limited express goods in advance, and an article placed at the warehousing port is directly conveyed to the warehousing port (see, for example, Patent Document 1).
- the crane port is located at the back of the stocker warehousing port, and the warehousing conveyor is located between the two ports.
- the warehousing conveyor conveys the FOUP to the crane port.
- the crane then transports the FOUP to a predetermined shelf.
- the same structure as the entry port is provided, and the opposite operation is performed.
- the ID reader reads the FOUP ID information and sends it to the stocker controller. Then, based on the ID information, the stocker controller sends the ID information to the physical distribution controller and inquires whether the conveyance is possible. Then, the physical distribution controller transmits a conveyance command to the stocker controller. After receiving the conveyance command, the stocker controller moves the article from the warehousing port to the crane port by the warehousing conveyor, and further moves the article from the crane port to the shelf by the stacker crane.
- the carry-in of the article from the transport vehicle starts, the carry-in may be continuously carried into the warehousing port. Therefore, it is required that articles carried into the warehousing port are quickly transported to the shelf of the automatic warehouse.
- An object of the present invention is to improve the efficiency of the operation of carrying an article from a transport vehicle into a storage port of an automatic warehouse in the transport vehicle system.
- the transport vehicle system includes an automatic warehouse, a transport vehicle, and a transport vehicle controller.
- the automatic warehouse has a shelf, a warehouse, and an automatic warehouse controller.
- the transport vehicle carries the article into the warehousing port.
- the conveyance vehicle controller assigns an article conveyance command to the automatic warehouse to the conveyance vehicle.
- the automatic warehouse controller receives the predicted conveyance command before the article is carried into the automatic warehouse from the conveyance vehicle.
- the predicted transport command includes the ID information of the article and the presence / absence information of the article on the shelf.
- the automatic warehouse controller receives a predicted conveyance command before an article is carried from the conveyance vehicle to the automatic warehouse.
- the automatic warehouse controller can execute the transport preparation work before receiving the goods. Therefore, it is possible to quickly convey the article to the shelf after receiving the article.
- the automatic warehouse has a warehousing port, so that even when the transport vehicle continuously carries articles into the warehousing port, the transport efficiency is unlikely to decrease.
- the automatic warehouse controller can quickly determine whether or not the article placed at the warehousing port is stored in the shelf. Therefore, the transport preparation work to be performed before receiving the articles becomes more accurate.
- the automatic warehouse controller may create position information in the shelf on which the article is transported based on the predicted transport command. In this case, the conveyance preparation work performed before receiving an article becomes more accurate.
- the automatic warehouse controller receives the predicted conveyance command after the conveyance vehicle has loaded the articles to be conveyed to the automatic warehouse.
- the automatic warehouse controller since the automatic warehouse controller receives the predicted transfer command when it is finally confirmed that the transport vehicle carries the article into the automatic warehouse, there is a probability that the automatic warehouse controller receives the useless predicted transfer command. Less.
- the automated warehouse controller can receive a reliable command earliest. As a result, the automatic warehouse controller can start the transport preparation work early.
- the transport vehicle system may further include a system controller that manages the automatic warehouse controller and the transport vehicle controller.
- the system controller transmits a transport command to the transport vehicle controller, and further receives information on completion of grasping by the transport vehicle from the transport vehicle controller, and then transmits a predicted transport command to the automatic warehouse controller.
- the system controller since the system controller transmits the predicted conveyance command to the automatic warehouse controller, efficient transmission is possible. This is because the system controller receives the grasping completion information by the transport vehicle from the transport vehicle controller, and does not require any special work for grasping the situation. Moreover, it is not necessary to have a special communication environment.
- the automatic warehouse may further include a stacker crane and an ID reader that reads ID information of articles that have been carried into the warehousing port.
- the automatic warehouse controller stores the predicted conveyance command in the list, and when receiving the ID information from the ID reader, checks whether the ID information of the article matches the predicted conveyance command in the list. If the ID information of the article matches the predicted conveyance command in the list, the article is moved to the stacker crane in the automatic warehouse based on the predicted conveyance command. In this system, the predicted transport command stored in the list can be reliably processed.
- the automatic warehouse controller may store the predicted conveyance command together with the position information, and may move the article to a position in the shelf indicated by the position information.
- the conveyance vehicle system control method includes the following steps in a conveyance vehicle system including an automatic warehouse having a shelf and a warehousing port, and a conveyance vehicle that loads an article into the warehousing port. . ⁇ Conveyance command allocation step for allocating goods transportation command to automatic warehouse for transportation vehicle
- the predicted transport command is transmitted before the article is carried from the transport vehicle to the automatic warehouse. Therefore, it is possible to execute the transport preparation work before receiving the article. Therefore, it is possible to quickly convey the article to the shelf after receiving the article.
- the automatic warehouse has a warehousing port, so that even when the transport vehicle continuously carries articles into the warehousing port, the transport efficiency is unlikely to decrease.
- the predicted conveyance command includes the presence / absence information on whether or not an article has been carried into the shelf, it can be quickly determined whether or not the article placed at the warehousing port is stored in the shelf. Therefore, the transport preparation work to be performed before receiving the articles becomes more accurate.
- a shelf position information creating step for creating position information of a shelf on which an article is transported may be further provided based on the predicted transport command. In this case, the conveyance preparation work performed before receiving an article becomes more accurate.
- the predicted conveyance command transmission step may be executed after the conveyance vehicle has loaded the articles to be conveyed to the automatic warehouse.
- the predicted transport command since it is finally confirmed that the transport vehicle carries the article into the automatic warehouse, the probability that a useless predicted transport command is transmitted is reduced. In other words, a reliable command is transmitted earliest. As a result, the transport preparation work can be started early.
- Step of storing the predicted transport command ⁇ Step of reading the ID information of the article carried into the warehousing port ⁇ Step of checking whether the ID information of the product matches the stored predicted transport command ⁇ ID information of the product If the stored predicted transport command matches the predicted transport command, the article is moved in the automatic warehouse based on the predicted transport command.
- the predicted transport command stored in the list can be reliably processed.
- the predicted conveyance command may be stored together with the position information, and further, the article may be moved to a position in the shelf indicated by the position information.
- the partial top view which shows the layout of the carrier system which concerns on one Embodiment of this invention.
- the schematic diagram which shows the relationship between a stocker and a conveyance vehicle system.
- the block diagram which shows the control system of a conveyance vehicle system.
- the block diagram which shows the structure of a conveyance vehicle controller.
- the schematic diagram which shows the relationship between a stocker controller and a stocker.
- the figure which shows the conveyance process of the articles
- the flowchart which shows the control operation of a stocker controller.
- Transport vehicle system as one embodiment of the present invention is a system for running a plurality of transport vehicles on a defined transport track.
- the transport vehicle travels in one direction on the transport track, loads articles from the target location according to the transport command assigned by the host controller, then travels to the transport destination location and loads the articles at the transport destination location. put out.
- the transport vehicle system is arranged using, for example, a ceiling space in a clean room, and transports articles such as FOUP containing semiconductor wafers between load ports such as processing apparatuses and inspection apparatuses.
- the transport track is composed of two types, a U-shaped intra bay route in a bay in which processing devices are arranged, and an inter bay route that interconnects the intra bay routes.
- FIG. 1 is a partial plan view showing a layout of a transport vehicle system according to an embodiment of the present invention.
- the transport vehicle system 1 includes a plurality of circuit travel paths 5 and a main travel path 7 that connects the plurality of circuit travel paths 5.
- the trunk travel path 7 is a single circuit route as a whole.
- a plurality of processing devices 9 are provided along the circumferential traveling path 5, and a plurality of stockers 11 are provided along the backbone traveling path 7. The stocker 11 realizes a buffer function between the processing device 9 groups in the circuit travel path 5.
- the equipment such as the processing device 9 and the stocker 11 is provided with a warehousing port 13 for carrying the article W into the equipment and a warehousing port 15 for picking up the article W from the equipment to the transport vehicle 3.
- the warehousing port 13 and the warehousing port 15 may be shared.
- the stocker 11 may be provided with a plurality of warehousing ports.
- the stocker 11 will be further described with reference to FIG.
- the stocker 11 has a plurality of shelves 38 and a stacker crane 39.
- the stacker crane 39 can travel along the shelf 38 and can convey the article W.
- a crane port 43 and a warehousing conveyor 45 are provided in the vicinity of the warehousing port 13 of the stocker 11.
- the warehousing port 13 is disposed outside the stocker 11, and the crane port 43 is disposed inside the stocker 11.
- the article W placed in the warehousing port 13 is conveyed to the crane port 43 by the warehousing conveyor 45 and further conveyed to the shelf 38 by the stacker crane 39.
- a stock sensor 31 is arranged in the warehousing port 13.
- the in-stock sensor 31 is a sensor for detecting that the article W is placed in the warehousing port 13.
- the in-stock sensor 31 is a transmissive photoelectric sensor, but may be another sensor.
- an ID reader 33 for reading an ID attached to the article W is provided in the vicinity of the warehousing port 13.
- the ID may be a barcode or an RFID tag, and the ID reader 33 may be a barcode reader or an RFID reader.
- FIG. 3 is a block diagram showing a control system of the transport vehicle system.
- FIG. 4 is a block diagram illustrating a transport vehicle controller and a transport vehicle control system.
- FIG. 5 is a schematic diagram showing the relationship between the stocker controller and the stocker.
- the control system 20 includes a manufacturing controller 21, a distribution controller 23 (system controller), a stocker controller 25 (automatic warehouse controller), and a transport vehicle controller 27.
- the logistics controller 23 is a higher order controller than the stocker controller 25 and the transport vehicle controller 27.
- the transport vehicle controller 27 has a function of managing a plurality of transport vehicles 3 and assigning transport commands to these.
- the “conveyance command” includes a command related to traveling and a command related to the load holding position and the unloading position.
- the manufacturing controller 21 can communicate with the processing device 9.
- the processing device 9 transmits a conveyance request (loading request / unloading request) of the article W that has been processed to the manufacturing controller 21.
- the manufacturing controller 21 transmits a transport request from the processing device 9 to the physical distribution controller 23, and the physical distribution controller 23 transmits a report to the manufacturing controller 21.
- the logistics controller 23 When the logistics controller 23 receives a transport request from the manufacturing controller 21, when the stocker 11 is accompanied or unloaded, the logistics controller 23 transmits a stock command or a stock command to the stocker controller 25 at a predetermined timing. Then, the stocker controller 25 transmits an incoming / outgoing command to the stocker 11 accordingly. Further, when the distribution controller 23 receives a conveyance request from the manufacturing controller 21, it converts it into a conveyance command, and performs an operation for assigning the conveyance command to the conveyance vehicle 3.
- the transport vehicle controller 27 continuously communicates with each transport vehicle 3 to create a transport command, and obtains position information based on the position data transmitted from each transport vehicle 3. Examples of acquiring position information include the following methods. A plurality of points are set on the transport path, and a transport signal is transmitted to the transport vehicle controller 27 when the transport vehicle 3 passes the points. Then, the transport vehicle controller 27 stores the point at which the transport vehicle 3 has passed most recently and the time at which the point has passed. And the position of the conveyance vehicle 3 is calculated and calculated
- FIG. 4 is a block diagram showing the configuration of the transport vehicle controller 27.
- the transport vehicle controller 27 is a computer that includes a CPU, a RAM, a ROM, and the like and executes a program, and includes a control unit 47 and a memory 48.
- the control unit 47 communicates with the transport vehicle 3 and also communicates with the physical distribution controller 23.
- the memory 48 stores a route map.
- the route map is a map that describes the arrangement of the travel route, the position of the origin, the reference position based on the origin, and the coordinates of the transfer position. The coordinates are obtained by converting the travel distance from the origin into the number of output pulses of the encoder of the transport vehicle 3.
- the control unit 47 can read the route map from the memory 48.
- the transport vehicle 3 includes a control unit 51 and a memory 53 as shown in FIG.
- the control unit 51 is a computer that includes a CPU, a RAM, a ROM, and the like and executes a program.
- the control unit 51 can communicate with the transport vehicle controller 27.
- the transport vehicle 3 has a route map in the memory 53, and continues traveling while comparing the coordinates described in the route map with the internal coordinates of the own machine (coordinates obtained by the encoder).
- FIG. 5 is a schematic diagram showing the relationship between the stocker controller and the stocker.
- the stocker controller 25 is a computer that includes a CPU, a RAM, a ROM, and the like and executes a program, and includes a control unit 29 and a memory 30.
- the stocker controller 25 is connected to the stock sensor 31 and the ID reader 33 and can receive detection signals from them.
- the stocker controller 25 is connected to the warehousing conveyor 45 and can transmit a control signal to the warehousing conveyor 45.
- the stocker controller 25 is communicably connected to the crane controller 37.
- the crane controller 37 is connected to the stacker crane 39 and can transmit a control signal to the stacker crane 39. Although only one stocker 11 is shown in FIG. 5, the stocker controller 25 can control a plurality of stockers 11 in this embodiment.
- FIG. 6 is a diagram illustrating an article conveyance process through communication among a conveyance vehicle controller, a distribution controller, and a stocker controller.
- FIG. 7 is a flowchart showing the control operation of the stocker controller.
- the conveyance vehicle 3 loaded with the articles W lowers the articles to the warehousing port 13 of the stocker 11 will be described.
- the distribution controller 23 transmits a conveyance command to the conveyance vehicle controller 27. Then, the transport vehicle controller 27 assigns a transport command to the transport vehicle 3.
- the transport vehicle 3 travels to the processing device 9 that is the transport source, and loads the article W from the delivery port 15 of the processing device 9.
- the conveyance vehicle 3 transmits a grasping completion report to the conveyance vehicle controller 27, the conveyance vehicle controller 27 transmits the grasping report to the distribution controller 23, and the distribution controller 23 transmits an estimated conveyance instruction to the stocker controller 25 (FIG. 7).
- the predicted transport command includes various information such as the scheduled arrival time of the transport vehicle 3 or the time it takes to arrive after picking up the goods, article ID information, transport destination information (stocker number), and information on whether or not there is storage on the shelf 38. Contains.
- the kind of these information is not specifically limited, It can combine suitably as needed.
- the control unit 29 of the stocker controller 25 stores the predicted transport command in the memory 30 (step S2 in FIG. 7).
- the stocker controller 25 receives the predicted transport command and creates in advance position information (shelf number) of the shelf 38 on which the article W is transported.
- the predicted conveyance command is stored in a list format as shown in FIG.
- control unit 29 of the stocker controller 25 prepares for conveyance in preparation for carrying-in indicated by the predicted conveyance command (step S3 in FIG. 7). Specifically, when there is an article W in the warehousing port 13 of the warehousing port 13, the control unit 29 drives the warehousing conveyor 45 to move the article W to the crane port 43. Further, the control unit 29 of the stocker controller 25 drives the stacker crane 39 to move the article W to the shelf 38. In addition, the control unit 29 may drive the stacker crane 39 to transfer the articles W in the shelf 38.
- control unit 29 of the stocker controller 25 totals the number of predicted conveyance commands for the warehousing port 13 of each stocker 11, and when the total number exceeds a threshold value, etc., congestion is expected, so The warehousing process of the upper article W is preferentially performed with respect to other warehousing ports and other operations.
- the transport vehicle 3 When the transport vehicle 3 arrives at the warehousing port 13, the transport vehicle 3 lowers the article W to the warehousing port 13 (step S4 in FIG. 7). The transport vehicle 3 transmits an unloading report to the transport vehicle controller 27, and then the transport vehicle controller 27 transmits an unloading report to the physical distribution controller 23.
- control unit 29 of the stocker controller 25 receives the detection signal from the stock sensor 31 (Yes in step S4 in FIG. 7). Since the stocker controller 25 can carry a predicted conveyance command without receiving a command from the host, there is no need for a Wait In signal.
- the ID reader 33 reads the ID information of the article W (step S5 in FIG. 7) and transmits it to the stocker controller 25.
- the stocker controller 25 determines whether the ID information and the predicted transport command can be linked (step S6 in FIG. 7). If the association is possible, the stocker controller 25 executes the association between the ID information and the predicted conveyance command (step S7 in FIG. 7). If the association is impossible, the stocker controller 25 inquires of the transport destination (for example, shelf number) to the physical distribution controller 23 based on the ID information (step S9), and the physical distribution controller 23 sends a transport command to the stocker controller 25 ( (Yes in step S10 in FIG. 7).
- the transport destination for example, shelf number
- control unit 29 of the stocker controller 25 drives the warehousing conveyor 45 to move the article W from the warehousing port 13 to the crane port 43 (step S8 in FIG. 7).
- the stocker controller 25 performs ID communication with the physical distribution controller 23 after the start of conveyance. This ID communication is used to confirm that the predicted conveyance command is correct and to update management data at a higher level. Conventionally, a conveyance command is determined by the physical distribution controller by this ID communication, and further a command to the stocker controller is performed.
- the crane controller 37 transmits a control signal to the stacker crane 39 to cause the stacker crane 39 to convey the article W to the shelf 38.
- the stacker crane 39 moves to the crane port of the exit port 15 without storing the article W on the shelf 38.
- the stocker 11 cannot start the operation of storing the articles W in the shelf 38 until the conveyance command is transmitted from the distribution controller 23 to the stocker controller 25. It was.
- the storage operation start time of the present embodiment is earlier than the conventional storage operation start time by a shortened time T (for example, 2 seconds).
- the transport vehicle system 1 includes a stocker 11, a transport vehicle 3, and a transport vehicle controller 27.
- the stocker 11 has a shelf 38, a warehousing port 13, and a stocker controller 25.
- the transport vehicle 3 carries the article W into the warehousing port 13.
- the transport vehicle controller 27 assigns an article transport command to the stocker 11 to the transport vehicle 3.
- the stocker controller 25 receives the predicted conveyance command before the article W is carried into the stocker 11 from the conveyance vehicle 3.
- the predicted conveyance command includes the ID information of the article W and the presence / absence information on whether or not the article W is carried into the shelf 38.
- the stocker controller 25 receives the predicted transport command before the article W is carried into the stocker 11 from the transport vehicle 3. Therefore, the stocker controller 25 can execute the transport preparation work before receiving the article W. Therefore, the article W can be quickly conveyed to the shelf 38 after receiving the article W. As a result, the stocking port 13 of the stocker 11 is often vacant. Therefore, even when the transport vehicle 3 continuously carries the articles W into the stocking port 13, the transport efficiency is unlikely to decrease.
- the predicted conveyance command includes the presence / absence information on whether or not the article W is carried into the shelf 38
- the stocker controller 25 quickly determines whether or not the article W placed in the warehousing port 13 is stored in the shelf 38. I can judge. Therefore, the conveyance preparation work performed before receiving the article W becomes more accurate.
- the stocker controller 25 creates position information of the shelf 38 on which the article W is transported based on the predicted transport command. Therefore, the conveyance preparation work performed before receiving the article W becomes more accurate.
- the stocker controller 25 receives the predicted transport command after the transport vehicle 3 has loaded the articles W to be transported to the stocker 11. In this system, since the stocker controller 25 receives the predicted transport command when it is finally confirmed that the transport vehicle 3 carries the article W into the stocker 11, the stocker controller 25 receives the useless predicted transport command. Probability decreases. In other words, the stocker controller 25 can receive a reliable command earliest. As a result, the stocker controller 25 can start the transport preparation work early.
- the transport vehicle system 1 further includes a physical distribution controller 23 that manages the stocker controller 25 and the transport vehicle controller 27.
- the distribution controller 23 transmits a transport command to the transport vehicle controller 27 and further receives the grasping completion information by the transport vehicle 3 from the transport vehicle controller 27, and then transmits a predicted transport command to the stocker controller 25.
- the physical distribution controller 23 since the physical distribution controller 23 transmits the predicted conveyance command to the stocker controller 25, efficient transmission is possible. This is because the distribution controller 23 receives the grasping completion information by the transport vehicle 3 from the transport vehicle controller 27 and does not require special work for grasping the situation. Moreover, it is not necessary to have a special communication environment.
- the stocker 11 further includes a stacker crane 39 and an ID reader 33 that reads the ID information of the article W carried into the warehousing port 13.
- the stocker controller 25 stores the predicted conveyance command in the list.
- the stocker controller 25 receives the ID information from the ID reader 33, the stocker controller 25 checks whether the ID information of the item W matches the predicted conveyance command in the list. If the ID information matches the predicted transport command in the list, the article W is moved in the stocker 11 to the stacker crane 39 based on the predicted transport command. In this system, the predicted transport command stored in the list can be reliably processed.
- the combination of information included in the predicted transport command is not limited to the above embodiment.
- the shelf number may not be included in the predicted transport command.
- the logistics controller 23 transmits the predicted transportation command, but the creation of the predicted transportation command is not limited to the logistics controller 23.
- the transport vehicle controller 27 may create a predicted transport command and send it directly to the stocker controller 25.
- the stocker controller 25 does not make an inquiry to the physical distribution controller 23 when the stocker controller 25 reads the ID of the article W.
- the inquiry may be made.
- the physical distribution controller 23 transmits a conveyance command (override) to the stocker controller 25.
- the stocker controller 25 can convey the article W to the shelf 38 based on a more reliable conveyance command. For example, even if there is a change after the predicted conveyance command is transmitted, the changed content can be used.
- the stocker controller 25 waits indefinitely for the article W to be detected after the predicted conveyance command is transmitted (step S4 in FIG. 7).
- the stocker controller 25 may transmit a conveyance cancel request signal to the physical distribution controller 23, and then delete the predicted conveyance command from the list and wait for a new predicted conveyance command.
- the predicted transport command may include information on a specific warehousing port of a transport destination among a plurality of warehousing ports.
- a stocker having a plurality of warehousing ports has been described as an example, but the present invention can also be applied to an automatic warehouse having a single warehousing port.
- a single stocker controller controls a plurality of stockers, but a controller may be prepared for each stocker.
- the present invention can be widely applied to a transport vehicle system including an automatic warehouse having an automatic warehouse controller and a transport vehicle in which articles are transferred between the automatic warehouse.
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Abstract
Description
特急品のみ予め先行搬送指令を作成しておき、入庫ポートに置かれた物品を出庫ポートに直接搬送する自動倉庫も知られている(例えば、特許文献1を参照。)。
搬送車システムは、自動倉庫と、搬送車と、搬送車コントローラとを備えている。自動倉庫は、棚と、入庫口と、自動倉庫コントローラとを有している。搬送車は、入庫口に物品を搬入する。搬送車コントローラは、搬送車に自動倉庫への物品搬送指令を割り付ける。自動倉庫コントローラは、搬送車から自動倉庫に物品が搬入される前に予測搬送指令を受信する。予測搬送指令は、物品のID情報と、物品の棚への搬入の有無情報とを含んでいる。
このシステムでは、自動倉庫コントローラが搬送車から自動倉庫に物品が搬入される前に予測搬送指令を受信する。したがって、自動倉庫コントローラは、物品を受け取る前の搬送準備作業を実行できる。したがって、物品を受け取ってから迅速に物品を棚まで搬送することができる。
この結果、自動倉庫の入庫口が空いている状態が多くなり、そのため搬送車が連続的に物品を入庫口に搬入する場合でも、搬送効率が低下しにくい。
特に、予測搬送指令が物品の棚への搬入の有無情報を含んでいるので、自動倉庫コントローラは、入庫口に置かれた物品が棚に収納されるのか否かを迅速に判断できる。したがって、物品を受け取る前に実行する搬送準備作業がより正確になる。
このシステムでは、搬送車が物品を自動倉庫に搬入することが最終的に確認された時点で自動倉庫コントローラが予測搬送指令を受信するので、自動倉庫コントローラが無駄な予測搬送指令を受信する確率が少なくなる。言い換えると、自動倉庫コントローラは確実な指令を最も早く受信することができる。この結果、自動倉庫コントローラは搬送準備作業を早く開始することができる。
このシステムでは、システムコントローラが自動倉庫コントローラに予測搬送指令を送信するので、効率よく送信が可能である。なぜなら、システムコントローラは搬送車コントローラから搬送車による荷つかみ完了情報を受け取っており、状況を把握するための特別な作業が不要だからである。また、特別な通信環境を持つ必要もない。
このシステムでは、リストに保存された予測搬送指令を確実に処理することができる。
自動倉庫コントローラは、予測搬送指令を位置情報とともに保存してもよく、さらには物品を位置情報が示す棚内の位置に移動させてもよい。
◎搬送車に自動倉庫への物品搬送指令を割り付ける搬送指令割り付けステップ
◎搬送車から自動倉庫に物品が搬入される前に、物品のID情報と物品の棚への搬入の有無情報とを含んでいる予測搬送指令を自動倉庫に送信する予測搬送指令送信ステップ
この場合、搬送車から自動倉庫に物品が搬入される前に予測搬送指令が送信される。したがって、物品を受け取る前の搬送準備作業を実行できる。したがって、物品を受け取ってから迅速に物品を棚まで搬送することができる。
この結果、自動倉庫の入庫口が空いている状態が多くなり、そのため搬送車が連続的に物品を入庫口に搬入する場合でも、搬送効率が低下しにくい。
特に、予測搬送指令が物品の棚への搬入の有無情報を含んでいるので、入庫口に置かれた物品が棚に収納されるのか否かを迅速に判断できる。したがって、物品を受け取る前に実行する搬送準備作業がより正確になる。
この場合、搬送車が物品を自動倉庫に搬入することが最終的に確認された時点で予測搬送指令が送信されるので、無駄な予測搬送指令が送信される確率が少なくなる。言い換えると、確実な指令が最も早く送信されることになる。この結果、搬送準備作業が早く開始されることができる。
◎予測搬送指令を保存するステップ
◎入庫口に搬入された物品のID情報を読み取るステップ
◎物品のID情報と保存された予測搬送指令とが一致するか否かをチェックするステップ
◎物品のID情報と保存された予測搬送指令とが一致すれば予測搬送指令に基づいて物品を自動倉庫内で移動させるステップ
このシステムでは、リストに保存された予測搬送指令を確実に処理することができる。
予測搬送指令を位置情報とともに保存してもよく、さらには物品を位置情報が示す棚内の位置に移動させてもよい。
本発明の一実施形態としての搬送車システムは、定められた搬送軌道上に複数の搬送車を走行させるためのシステムである。搬送車は、搬送軌道上を一方向に走行し、上位のコントローラによって割り付けられる搬送指令に従い、目的の場所から物品を積み込み、次に搬送先の場所まで走行して物品を搬送先の場所に積み出す。
図1を用いて、搬送車システム1のレイアウトを説明する。図1は、本発明の一実施形態に係る搬送車システムのレイアウトを示す部分平面図である。
図では示していないが、ストッカ11には複数の入庫ポートを設けてもよい。
図3~図5を用いて、搬送車システム1の制御系20を説明する。図3は、搬送車システムの制御系を示すブロック図である。図4は、搬送車コントローラおよび搬送車の制御系を示すブロック図である。図5は、ストッカコントローラとストッカの関係を示す模式図である。
制御系20は、製造コントローラ21と、物流コントローラ23(システムコントローラ)と、ストッカコントローラ25(自動倉庫コントローラ)と、搬送車コントローラ27とを有している。
図4を用いて、搬送車コントローラ27について説明する。図4は、搬送車コントローラ27の構成を示すブロック図である。
図5を用いて、ストッカコントローラ25とストッカ11について説明する。図5は、ストッカコントローラとストッカの関係を示す模式図である。
ストッカコントローラ25は、在荷センサ31およびIDリーダ33に接続され、それらからの検出信号を受信可能である。ストッカコントローラ25は、入庫コンベア45に接続され、入庫コンベア45に対して制御信号を送信可能である。
図5では、ストッカ11は1つしか示されていないが、この実施形態ではストッカコントローラ25は複数のストッカ11を制御可能である。
図6および図7を用いて、搬送車システム1の制御動作を説明する。図6は、搬送車コントローラ、物流コントローラ、ストッカコントローラ間の通信による物品の搬送過程を示す図である。図7は、ストッカコントローラの制御動作を示すフローチャートである。
ここでは、物品Wを積んだ搬送車3がストッカ11の入庫ポート13に物品を下ろす場合を説明する。
さらに、ストッカコントローラ25の制御部29は、入庫コンベア45を駆動して、物品Wを入庫ポート13からクレーンポート43に移動させる(図7のステップS8)。
なお、搬送開始後に、ストッカコントローラ25は、物流コントローラ23に対してID連絡を行う。このID連絡は、予測搬送指令が正しかったことの確認と、上位での管理データの更新に用いられる。なお、従来であれば、このID連絡によって、搬送指令が物流コントローラで決定されて、さらにストッカコントローラへの指令が行われていた。
上記実施形態は、下記のように表現できる。
搬送車システム1は、ストッカ11と、搬送車3と、搬送車コントローラ27とを備えている。ストッカ11は、棚38と、入庫ポート13と、ストッカコントローラ25とを有している。搬送車3は、入庫ポート13に物品Wを搬入する。搬送車コントローラ27は、搬送車3にストッカ11への物品搬送指令を割り付ける。ストッカコントローラ25は、搬送車3からストッカ11に物品Wが搬入される前に予測搬送指令を受信する。予測搬送指令は、物品WのID情報と、物品Wの棚38への搬入の有無情報とを含んでいる。
このシステムでは、ストッカコントローラ25が、搬送車3からストッカ11に物品Wが搬入される前に、予測搬送指令を受信する。したがって、ストッカコントローラ25は、物品Wを受け取る前に搬送準備作業を実行できる。したがって、物品Wを受け取ってから迅速に物品Wを棚38まで搬送することができる。
この結果、ストッカ11の入庫ポート13が空いている状態が多くなり、そのため搬送車3が連続的に物品Wを入庫ポート13に搬入する場合でも、搬送効率が低下しにくい。
特に、予測搬送指令が物品Wの棚38への搬入の有無情報を含んでいるので、ストッカコントローラ25は、入庫ポート13に置かれた物品Wが棚38に収納されるのか否かを迅速に判断できる。したがって、物品Wを受け取る前に実行する搬送準備作業がより正確になる。
このシステムでは、搬送車3が物品Wをストッカ11に搬入することが最終的に確認された時点でストッカコントローラ25が予測搬送指令を受信するので、ストッカコントローラ25が無駄な予測搬送指令を受信する確率が少なくなる。言い換えると、ストッカコントローラ25は確実な指令を最も早く受信することができる。この結果、ストッカコントローラ25は搬送準備作業を早く開始することができる。
このシステムでは、物流コントローラ23がストッカコントローラ25に予測搬送指令を送信するので、効率よく送信が可能である。なぜなら、物流コントローラ23は搬送車コントローラ27から搬送車3による荷つかみ完了情報を受け取っており、状況を把握するための特別な作業が不要だからである。また、特別な通信環境を持つ必要もない。
このシステムでは、リストに保存された予測搬送指令を確実に処理することができる。
以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、発明の要旨を逸脱しない範囲で種々の変更が可能である。特に、本明細書に書かれた複数の実施形態および変形例は必要に応じて任意に組合せ可能である。
3 搬送車
5 周回走行路
7 基幹走行路
9 処理装置
11 ストッカ(自動倉庫)
13 入庫ポート
15 出庫ポート
20 制御系
21 製造コントローラ
23 物流コントローラ(システムコントローラ)
25 ストッカコントローラ(自動倉庫コントローラ)
27 搬送車コントローラ
29 制御部
30 メモリ
31 在荷センサ
33 IDリーダ
37 クレーンコントローラ
38 棚
39 スタッカクレーン
43 クレーンポート
45 入庫コンベア
47 制御部
48 メモリ
51 制御部
53 メモリ
T 短縮時間
W 物品
Claims (14)
- 棚と、入庫口と、自動倉庫コントローラとを有する自動倉庫と、
前記入庫口に物品を搬入する搬送車と、
前記搬送車に前記自動倉庫への物品搬送指令を割り付ける搬送車コントローラとを備え、
前記自動倉庫コントローラは、前記搬送車から前記自動倉庫に物品が搬入される前に予測搬送指令を受信し、
前記予測搬送指令は、前記物品のID情報と、前記物品の前記棚への搬入の有無情報とを含んでいる、
搬送車システム。 - 前記自動倉庫コントローラは、前記予測搬送指令に基づいて、前記物品が搬送される前記棚内の位置情報を作成する、請求項1に記載の搬送車システム。
- 前記自動倉庫コントローラは、前記搬送車が前記自動倉庫へ搬送される物品を積み込んだ後に、前記予測搬送指令を受信する、請求項1に記載の搬送車システム。
- 前記自動倉庫コントローラは、前記搬送車が前記自動倉庫へ搬送される物品を積み込んだ後に、前記予測搬送指令を受信する、請求項2に記載の搬送車システム。
- 前記自動倉庫コントローラと前記搬送車コントローラとを管理するシステムコントローラをさらに備え、
前記システムコントローラは、前記搬送車コントローラに搬送指令を送信してさらに搬送車コントローラから搬送車による荷つかみ完了情報を受信した後に、前記自動倉庫コントローラに予測搬送指令を送信する、請求項1に記載の搬送車システム。 - 前記自動倉庫コントローラと前記搬送車コントローラとを管理するシステムコントローラをさらに備え、
前記システムコントローラは、前記搬送車コントローラに搬送指令を送信した後に、前記自動倉庫コントローラに予測搬送指令を送信する、請求項2に記載の搬送車システム。 - 前記自動倉庫は、スタッカクレーンと、前記入庫口に搬入されてきた物品のID情報を読み取るIDリーダとをさらに有し、
前記自動倉庫コントローラは、前記予測搬送指令をリストに保存しており、前記IDリーダから前記ID情報を受信すると、前記物品の前記ID情報と前記リスト内の前記予測搬送指令が一致するか否かをチェックして、前記物品の前記ID情報と前記リスト内の前記予測搬送指令が一致すれば前記予測搬送指令に基づいて前記スタッカクレーンに前記物品を前記自動倉庫内で移動させる、請求項1に記載の搬送車システム。 - 前記自動倉庫は、スタッカクレーンと、前記入庫口に搬入されてきた物品のID情報を読み取るIDリーダとをさらに有し、
前記自動倉庫コントローラは、前記予測搬送指令を前記位置情報とともにリストに保存しており、前記IDリーダから前記ID情報を受信すると、前記物品の前記ID情報と前記リスト内の前記予測搬送指令が一致するか否かをチェックして、前記物品の前記ID情報と前記リスト内の前記予測搬送指令が一致すれば前記スタッカクレーンに前記物品を前記位置情報が示す前記棚内の位置に移動させる、請求項2に記載の搬送車システム。 - 棚と入庫口を有する自動倉庫と、前記入庫口に物品を搬入する搬送車とを備えた搬送車システムにおいて、
前記搬送車に前記自動倉庫への物品搬送指令を割り付ける搬送指令割り付けステップと、
前記搬送車から前記自動倉庫に物品が搬入される前に、前記物品のID情報と前記物品の前記棚への搬入の有無情報とを含んでいる予測搬送指令を前記自動倉庫に送信する予測搬送指令送信ステップと、
を備えた搬送車システム制御方法。 - 前記予測搬送指令に基づいて、前記物品が搬送される前記棚内の位置情報を作成する棚位置情報作成ステップをさらに備えている、請求項9に記載の搬送車システム制御方法。
- 前記予測搬送指令送信ステップは、前記搬送車が前記自動倉庫へ搬送される物品を積み込んだ後に、実行される、請求項9に記載の搬送車システム制御方法。
- 前記予測搬送指令送信ステップは、前記搬送車が前記自動倉庫へ搬送される物品を積み込んだ後に、実行される、請求項10に記載の搬送車システム制御方法。
- 前記予測搬送指令を保存するステップと、
前記入庫口に搬入された物品のID情報を読み取るステップと、
前記物品の前記ID情報と保存された予測搬送指令が一致するか否かをチェックするステップと、
前記物品の前記ID情報と前記保存された予測搬送指令が一致すれば前記予測搬送指令に基づいて前記物品を前記自動倉庫内で移動させるステップとをさらに備えている、請求項9に記載の搬送車システム制御方法。 - 前記予測搬送指令を前記位置情報とともに保存するステップと、
前記入庫口に搬入された物品のID情報を読み取るステップと、
前記物品の前記ID情報と保存された予測搬送指令が一致するか否かをチェックするステップと、
前記物品の前記ID情報と前記保存された予測搬送指令が一致すれば前記物品を前記位置情報が示す前記棚内の位置に移動させるステップとをさらに備えている、請求項10に記載の搬送車システム制御方法。
Priority Applications (6)
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EP10783113.3A EP2439154A4 (en) | 2009-06-02 | 2010-05-28 | FUNDING VEHICLE SYSTEM |
KR1020117030470A KR101358928B1 (ko) | 2009-06-02 | 2010-05-28 | 반송차 시스템 |
CN201080023920.5A CN102448854B (zh) | 2009-06-02 | 2010-05-28 | 输送车系统 |
SG2011086139A SG176198A1 (en) | 2009-06-02 | 2010-05-28 | Conveyance vehicle system |
US13/375,488 US8855805B2 (en) | 2009-06-02 | 2010-05-28 | Conveyance vehicle system |
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JP2009132747 | 2009-06-02 |
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EP (1) | EP2439154A4 (ja) |
JP (1) | JP5472297B2 (ja) |
KR (1) | KR101358928B1 (ja) |
CN (1) | CN102448854B (ja) |
SG (1) | SG176198A1 (ja) |
TW (1) | TWI503268B (ja) |
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Cited By (1)
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JP2017011318A (ja) * | 2014-02-24 | 2017-01-12 | エルジー エレクトロニクス インコーポレイティド | 太陽電池モジュール及びその製造方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US20110178657A1 (en) * | 2008-09-26 | 2011-07-21 | Murata Machinery, Ltd. | Guided vehicle system |
MX349168B (es) * | 2012-02-17 | 2017-07-17 | Columbus Mckinnon Corp | Método y sistema de levantamiento de materiales. |
JP6052132B2 (ja) * | 2013-10-22 | 2016-12-27 | 村田機械株式会社 | 通信デバイス及びその制御方法 |
JP6515892B2 (ja) * | 2016-08-09 | 2019-05-22 | 村田機械株式会社 | 走行車システム、及び走行車システムの制御方法 |
JP6589847B2 (ja) * | 2016-12-26 | 2019-10-16 | 株式会社ダイフク | 物品積載設備 |
CN107390689B (zh) * | 2017-07-21 | 2019-05-14 | 北京图森未来科技有限公司 | 实现车辆自动运输的系统及方法、相关设备 |
KR101862025B1 (ko) * | 2017-12-22 | 2018-05-29 | 임창범 | 반도체 웨이퍼용 이송장치 |
JP7184453B2 (ja) * | 2018-05-17 | 2022-12-06 | 株式会社ディスコ | 搬送システム |
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- 2010-05-28 KR KR1020117030470A patent/KR101358928B1/ko active IP Right Grant
- 2010-05-28 JP JP2011518245A patent/JP5472297B2/ja active Active
- 2010-05-28 EP EP10783113.3A patent/EP2439154A4/en not_active Withdrawn
- 2010-05-28 WO PCT/JP2010/003586 patent/WO2010140325A1/ja active Application Filing
- 2010-05-28 SG SG2011086139A patent/SG176198A1/en unknown
- 2010-05-28 US US13/375,488 patent/US8855805B2/en active Active
- 2010-05-28 CN CN201080023920.5A patent/CN102448854B/zh not_active Expired - Fee Related
- 2010-06-01 TW TW099117597A patent/TWI503268B/zh active
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US10475944B2 (en) | 2014-02-24 | 2019-11-12 | Lg Electronics Inc. | Solar cell module and method for manufacturing the same |
US11538952B2 (en) | 2014-02-24 | 2022-12-27 | Shangrao Jinko Solar Technology Development Co., Ltd. | Solar cell module and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US8855805B2 (en) | 2014-10-07 |
KR20120023816A (ko) | 2012-03-13 |
CN102448854B (zh) | 2014-10-15 |
JP5472297B2 (ja) | 2014-04-16 |
US20120078411A1 (en) | 2012-03-29 |
TW201100315A (en) | 2011-01-01 |
SG176198A1 (en) | 2011-12-29 |
EP2439154A1 (en) | 2012-04-11 |
CN102448854A (zh) | 2012-05-09 |
JPWO2010140325A1 (ja) | 2012-11-15 |
KR101358928B1 (ko) | 2014-02-06 |
TWI503268B (zh) | 2015-10-11 |
EP2439154A4 (en) | 2016-12-14 |
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