WO2010137072A1 - Appareil de classification - Google Patents

Appareil de classification Download PDF

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Publication number
WO2010137072A1
WO2010137072A1 PCT/JP2009/002342 JP2009002342W WO2010137072A1 WO 2010137072 A1 WO2010137072 A1 WO 2010137072A1 JP 2009002342 W JP2009002342 W JP 2009002342W WO 2010137072 A1 WO2010137072 A1 WO 2010137072A1
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WO
WIPO (PCT)
Prior art keywords
tray
drum
arm
classification
stage
Prior art date
Application number
PCT/JP2009/002342
Other languages
English (en)
Japanese (ja)
Inventor
増田高之
Original Assignee
上野精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上野精機株式会社 filed Critical 上野精機株式会社
Priority to PCT/JP2009/002342 priority Critical patent/WO2010137072A1/fr
Priority to CN200980159481.8A priority patent/CN102449751B/zh
Priority to JP2009546997A priority patent/JP4466976B1/ja
Priority to MYPI2011005687A priority patent/MY159061A/en
Publication of WO2010137072A1 publication Critical patent/WO2010137072A1/fr
Priority to HK12107688.8A priority patent/HK1167042A1/xx

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices

Definitions

  • the present invention relates to an apparatus for classifying devices such as LEDs and semiconductor devices that have been assembled in the previous process according to their characteristics.
  • LED chips and semiconductor devices go through each assembly process in the pre-process, and in the post-process, each of the test, classification, marking, appearance inspection, packing (tape packing), etc. of the electrical characteristics and optical characteristics Process processing is performed and shipped.
  • a device that is attached to a wafer sheet (UV sheet, etc.) that has adhesiveness on the wafer ring and separated by dicing is supplied.
  • the quality inspection of the device on the wafer sheet may be performed in the pre-process before reaching the post-inspection packing process.
  • an optical test such as luminous intensity, luminous flux, wavelength, and color coordinates is performed using an optical probe, or an appearance inspection is performed using a camera.
  • appearance inspection, electrical characteristic inspection, and the like are performed. Such various inspections reveal the device characteristics of each device, and the devices may be classified into a plurality of classifications before reaching the subsequent process according to such device characteristics.
  • a method for classifying devices on a wafer sheet for example, there is one shown in FIG. That is, a plurality of wafer rings for each classification are arranged for one wafer ring in which devices separated by dicing are affixed to the wafer sheet and for re-attaching the classified devices.
  • a plurality of wafer rings are classified and reattached from the single wafer ring according to the result of characteristic inspection.
  • devices are arranged, for example, in a rectangular shape for each classification.
  • the number of classifications is limited to the number of wafer rings that can be installed as the entire apparatus. That is, the number of wafer rings mounted is limited by the size of the apparatus, and a large number of classifications cannot be secured.
  • the operating range of a mechanism for re-attaching from one wafer ring is widened, and processing time per operation is increased, resulting in poor productivity. Further, the area occupied by the apparatus is relatively large.
  • the method of classifying a plurality of devices on the wafer ring can be a method for solving the above problem, but in this case, the number of classifications is limited to the wafer ring size. That is, depending on the wafer ring size, a large number of classifications cannot be obtained.
  • it is of course necessary to increase the size of the wafer ring but the larger the size, the wider the operating range of the attaching mechanism, and the longer the moving time of this mechanism. It takes time and the processing time per operation becomes long, so that the productivity is deteriorated.
  • a plurality of prepared wafer rings are arranged so as to be overlapped in the vertical direction, and the wafer ring is switched, for example, by pulling out the target wafer ring and reattaching it according to the classification.
  • the wafer ring is switched, for example, by pulling out the target wafer ring and reattaching it according to the classification.
  • the processing apparatus in (2) is not suitable because it is necessary to perform the same control process as in the previous process or to provide a special apparatus or mechanism for that purpose.
  • the present invention has been proposed to solve the above-described problems of the prior art, and its purpose is to classify devices in the previous process into multiple classifications simultaneously in a simple, high-speed and space-saving manner.
  • An object of the present invention is to provide a classification device that can perform the above.
  • the invention of claim 1 is a classification device for classifying a device composed of an LED or a semiconductor device that has been assembled in a previous process according to its characteristics, and comprising a plurality of devices.
  • a cylindrical drum having a plurality of trays with adhesive sheets to be attached on the circumference, and a drive device for rotating the drum in the axial direction, the tray being provided on the peripheral surface of the drum It is characterized in that it is detachably held by being attracted or pinched by the holding portion.
  • the invention of claim 2 is characterized in that, in the invention of claim 1, the tray is rectangular and a plurality of trays are arranged in both the axial direction and the circumferential direction of the drum.
  • the plurality of trays held on the drum are configured to be detachable, devices can be individually attached to and exchanged for each tray, for example, one classification is full. Therefore, there is no waste that affects other classifications, and productivity can be improved.
  • the holding portion on the cylindrical drum and arranging the tray here, the area occupied by the apparatus including the drive mechanism can be suppressed while securing the number of trays to be divided into many categories. . Furthermore, even if the number of device classifications is large, trays can be switched only by movement by rotation on the rotation axis. The nature is very high.
  • the driving device rotates the drum in the axial direction of the drum and reciprocates in the axial direction and a direction perpendicular to the axial direction.
  • the tray position adjustment is performed.
  • the axial direction is determined by the movement in the drum rotation axis direction, the drum axis direction, and the directions perpendicular to the axis direction (X-axis direction and Y-axis direction). Further, it is possible to switch a plurality of trays provided in the circumferential direction, and the productivity is high.
  • the number of wafer rings to be grounded is not limited, and one wafer is obtained.
  • the mechanism for re-pasting from the ring only needs to move the drum in the circumferential direction or the axial direction, and the operating range of the moving mechanism can be suppressed. As a result, the processing time per operation is greatly shortened. be able to.
  • the tray exchanging device for receiving and delivering the tray from the holding unit according to any one of the first to third aspects, wherein the tray exchanging device includes the holding unit.
  • An arm for receiving the tray held by suction, a transfer mechanism for supporting the arm and moving the arm from the tray delivery / delivery position to the tray replacement position, and a plurality of stages for storing the tray, A supply magazine for storing the received tray, a plurality of stages for storing the tray, a supply magazine that is installed with the storage magazine and the tray storage opening facing each other, and supplies a new tray, and the storage magazine and supply A tray provided between the magazine and carried to the exchange position by the arm, or the receiving by the arm.
  • An exchange mechanism for storing the tray in a predetermined stage of the storage magazine and supplying the tray, which is carried to the delivery / delivery position by the arm, from the predetermined stage of the supply magazine, and the elevator mechanism includes: The tray in the storage magazine and the supply magazine to store the tray and the tray to be supplied according to the type of tray that is transported to the exchange position by the arm or the tray that is transported to the delivery / delivery position by the arm. Is controlled to match the stage position.
  • the exchange device attaches and detaches the trays classified for each category in the drum, stores the trays in the storage magazine for each category, and supplies a new tray from the supply magazine. It can be pasted on the drum again.
  • device classification in the previous process can be performed simultaneously in multiple classifications in a simple, high speed and space saving manner.
  • the perspective view (a), the top view (b), and side view (c) which show the whole structure containing the classification
  • Side view (a) and plan view (b) of another embodiment of the present invention Image diagram showing conventional device classification method
  • the classification apparatus 1 of this embodiment is responsible for part of the device characteristic inspection performed in the previous process and the classification process based on it. As a premise for explaining the configuration of the apparatus, first, the characteristic inspection and the classification process are performed. An outline will be described.
  • the device assembly is completed, and the device attached to the wafer sheet held by the wafer ring is separated into pieces by dicing and picked up by a suction nozzle (not shown) provided on the turntable T.
  • the picked up device is mounted on a mounting table P provided at a circumferentially equidistant position on the turntable T.
  • the device is provided on the upper side of the turntable T at equal intervals with the mounting table P as the turntable T rotates intermittently at a predetermined timing while being held by suction on the mounting table P. It is sequentially transferred to various inspection devices (not shown). For example, when the device is an LED chip, an optical test such as luminous intensity, luminous flux, wavelength, and color coordinates is performed using an optical probe, or an appearance inspection is performed using a camera.
  • the devices are classified and pasted by the device delivery device 2 on the plurality of trays 12 in the classification device 1 to be described later. Then, in the classification device 1, the devices are attached to the tray 12 in a plurality of categories, and the tray 12 that has become full is sequentially replaced with an empty tray 12 by the tray replacement device.
  • the classification device 1 includes a drum 11 that rotates ⁇ around a rotation axis O.
  • the drum 11 is rotated about the rotation axis O by being given a rotational force by a motor M1 (see FIG. 1C), and on the rotation axis O by a transfer mechanism provided below the drum 11 in the drawing.
  • a drum moving mechanism 14 is provided for sliding and moving in the axial direction of the drum (Y-axis direction in the drawing) and the direction perpendicular to the axial direction of the drum (X-axis direction in the drawing).
  • the drum 11 has a substantially cylindrical shape and includes a holding portion 13 that holds a plurality of small rectangular and flat trays 12 on the peripheral surface thereof.
  • the holding unit 13 is configured to be divided into 12 in the circumferential direction of the drum 11 and further divided into 5 in the axial direction to hold a total of 60 trays 12.
  • the holding unit 13 includes a suction hole at the center, and is configured to hold the rectangular tray 12 by vacuum suction from the suction hole.
  • the trays 12 held by the holding unit 13 twelve pieces in the circumferential direction are set as one group, and five groups of these twelve trays 12 are provided by dividing into five in the axial direction. It is also possible to divide and configure as device classifications, and the one divided into five in the axial direction is made into one group, and 12 groups of these five trays 12 are provided in the circumferential direction. It is also possible to divide and configure as device classifications. Furthermore, all the trays 12 provided in 12 divisions and 5 rows can be classified as separate classifications and configured as a total of 60 classifications.
  • a 2-inch tray 12 with an adhesive sheet attached thereto for example, Gel Base (trademark) manufactured by Exeal Corporation.
  • the outer dimensions are about 51 mm ⁇ 51 mm, the thickness is about 4 mm, and the pastable range is 40 mm square.
  • the pasting interval of each workpiece is 0.1 mm, and the arrangement of 100 ⁇ 50 pieces is about 5000 pieces in total.
  • the design can be changed as appropriate according to the specifications of the device and the specifications of the apparatus.
  • the device delivery device 2 holds the device by suction, moves up and down (in the Z-axis direction in the figure), and repeats vacuum suction and vacuum break intermittently.
  • a pickup nozzle 21 for receiving and delivering a device and the pickup nozzle 21 is rotated 180 degrees by a motor M2 fixed by a support plate 22, so that a receiving position on the turntable side and a delivery sticking position on the drum 11 side are set. And a rotating arm 23 to be moved.
  • two pickup nozzles 21 are provided at both ends of the rotary arm 23, and the pickup arm 21 is rotated at a predetermined timing by driving the motor M2.
  • the motor M2 Are configured to reciprocate alternately between the receiving position of the device and the delivery pasting position.
  • a Z-axis moving mechanism 24 that moves the pickup nozzle 21 up and down moves the pickup nozzle 21 to a receiving position on the turntable side and a delivery sticking position on the drum 11 side.
  • the Z-axis moving mechanism 24 moves the pickup nozzle 21 up and down by moving the operating rod 241 provided at the tip of the Z-axis moving mechanism 24 up and down. It has become.
  • the details of the Z-axis moving mechanism 24 are the same as the matters disclosed in Japanese Patent Application Laid-Open No. 2004-182388 already proposed by the applicant, and the description thereof is omitted here.
  • the configuration of the turntable T and the configuration of the suction holding mechanism that holds the device provided on the turntable T are the same as those in the related art, and thus the description of the specific configuration is omitted.
  • the pickup nozzle 21 receives the device from the mounting table P provided on the turntable T at the receiving position on the turntable T side, rotates 180 degrees, and places the device on the adhesive sheet of the predetermined tray 12 in the drum 11. Deliver and paste.
  • a signal related to the device classification calculated based on the inspection result from the inspection step provided at the circumferentially equidistant position of the turntable T is input to the drum moving mechanism 14 of the drum 11 and the classification is performed.
  • the drum 11 is moved so that the tray 12 corresponding to is located at the delivery position of the pickup nozzle 21.
  • the tray 12 is replaced by a tray replacement device 3 provided at a position where the drum 11 is rotated 90 degrees from the above-described device attaching position, as shown in FIGS.
  • a tray replacement device 3 provided at a position where the drum 11 is rotated 90 degrees from the above-described device attaching position, as shown in FIGS.
  • FIG. 1 for convenience, only the tray replacement arm 31 is shown among the components of the tray replacement device 3, but in practice, the tray replacement arm 31 is sandwiched in the Y-axis direction.
  • a storage magazine 36a and a supply magazine 36b, a tray temporary placement stage 37, a pusher mechanism 38, and elevators 39a and 39b as shown in FIG. 3 are provided.
  • the tray replacement device 3 supports the tray replacement arm 31 that receives the tray 12 sucked and held by the holding unit 13 of the drum 11 from the drum 11 and the tray replacement arm 31, and supports this from the position where the tray 12 is received.
  • a tray transfer mechanism 32 that stores the tray 12 in the storage magazine 36b and moves the empty tray 12 to a position for delivery to the temporary tray placement stage 37 that receives the empty tray 12 from the supply magazine 36a, and temporarily places the empty tray 12 from the supply magazine 36a.
  • a pusher mechanism 38 that cuts out the stage 37 and pushes the full tray 12 mounted on the temporary placement stage 37 into the storage magazine 36b is provided.
  • the tray replacement arm 31 includes a suction hand 33 that controls vacuum suction / vacuum breakage at a predetermined timing, and the tray transfer mechanism 32 has a suction hand that holds a full tray 12.
  • a guide cylinder 34 for pulling 33 away from the drum 11 or bringing the suction hand 33 holding the empty tray 12 closer to the drum 11 and a rotary actuator 35 for rotating the suction hand 33 and the guide cylinder 34 by 90 degrees are provided. .
  • both the storage magazine 36b and the supply magazine 36a are arranged so that the tray insertion ports face each other, as shown in FIG.
  • Both the storage magazine 36b and the supply magazine 36a are configured so that a plurality of trays 12 can be stored in multiple stages.
  • both magazines are provided with elevators 39a and 39b for moving the magazines in the vertical direction.
  • the pusher mechanism 38 is inserted into the magazine in the direction of the facing magazine (the Y-axis direction in the figure), and a rod-shaped pusher 38a that moves the tray 12 in the magazine, and a ball screw 38b that moves the pusher 38a in the Y-axis direction. And a motor M3 for driving the rotation of the ball screw 38b. That is, the pusher mechanism 38 is provided on the supply magazine 36a side among the storage magazine 36b and the supply magazine 36a provided facing each other, and the rod-shaped pusher 38a is positioned parallel to the tray temporary placement stage 37 in the vertical direction. The bar-shaped pusher 38a is moved in the Y-axis direction from the back surface of the supply magazine 36a, so that an empty tray in the supply magazine 36a is transferred onto the tray temporary placement stage 37.
  • the picked-up device is mounted on a mounting table P provided at a circumferentially equidistant position on the turntable T, and intermittently rotates at a predetermined timing while being sucked and held, and is equidistant from the mounting table P. Then, the sample is sequentially transferred to various inspection devices provided on the upper side of the turntable T. For example, when the device is an LED chip, an optical test such as luminous intensity, luminous flux, wavelength, and color coordinates is performed using an optical probe, or an appearance inspection is performed using a camera.
  • a plurality of inspection results are combined based on the result of the characteristic inspection of the device by a control device (not shown) until the device that has been inspected is moved to the receiving position of the pickup nozzle 21 by the rotation of the turntable T. Then, the classification is assigned according to the characteristics, and the movement amount of the drum 11 is calculated from the position information of the tray 12 corresponding to the classification in the drum 11, and the position information is input to the drum moving mechanism 14. .
  • the drum 11 has the tray 12 corresponding to the classification of the device picked up by the pickup nozzle 21 by driving the drum moving mechanism 14 based on the movement position information of the drum 11 input from a control device (not shown).
  • Theta rotation by the central axis O and movement in the Y-axis direction are performed so as to be located immediately below the delivery and pasting position by the nozzle 21.
  • the tray 12 As described in the configuration of the tray 12, about 5000 devices are arranged on the tray 12. At this time, for example, a device is attached to the pickup nozzle 21 in the vicinity of the pickup nozzle 21. By providing images and recognizing vacant positions, rows and columns are formed on the tray 12 so that they can be pasted in order (note that it is also possible to determine whether the device is full on the tray 12 to be described later) This is done by image recognition.) At this time, by driving the drum moving mechanism 14, the tray 12 is moved in the X-axis and Y-axis directions, that is, in the vertical and horizontal directions as shown in FIG.
  • the tray 12 to be attached is moved so that the tray 11 is positioned at the top in the vertical direction of the drum 11 by rotating the drum 11 by ⁇ rotation about the central axis O.
  • the tray to be pasted is moved by sliding in the Y-axis direction by the drum moving mechanism 14 so that the tray to be attached is positioned directly below the pickup nozzle 21,
  • the drum moving mechanism 14 performs a small movement in the X axis direction and the Y axis direction.
  • the drum 11 is moved in the X-axis and Y-axis directions by the action of the drum moving mechanism 14, and the tray 12 corresponding to the classification of the devices held by the pickup nozzle 21 is located immediately below the pickup nozzle 21.
  • the pickup nozzle 21 performs a lowering operation by the action of the Z-axis moving mechanism 24 to deliver and paste the device onto the adhesive sheet of the tray 12.
  • the drum moving mechanism 14 performs O-axis rotation and Y-axis movement so that the tray 12 moves to the position of the tray replacement arm 31 of the tray replacement device 3.
  • the tray exchanging device 3 first receives and holds the tray 12 with the device fully loaded by the suction hand 33 from the holding unit 13 of the drum 11, and retracts the suction hand 33 by about 10 mm by the guide cylinder 34, thereby rotating the rotary actuator 35. Rotate 90 degrees downward in the figure (see FIGS. 1B and 1C).
  • the suction hand 33 is again moved 10 mm toward the temporary tray placement stage 37 by the guide cylinder 34, and the tray 12 is transferred to the temporary tray placement stage 37 (see FIG. 3).
  • the rod-shaped pusher 38a of the pusher mechanism 38 moves from the back surface of the supply magazine 36a in the Y-axis direction in the drawing, thereby supplying the supply magazine 36a.
  • the empty tray 12 inside is transferred onto the tray temporary placement stage 37 and the full tray is moved to the storage magazine 36b side (see FIG. 3A).
  • the suction hand 33 picks up the empty tray 12 (see FIG. 3B).
  • the pusher mechanism 38 further moves to the storage tray side, and pushes the full tray completely into the storage tray (see FIG. 3C). In this manner, the empty tray and the full tray are exchanged on one tray temporary placement stage 37, and the tray exchange operation is performed.
  • the storage magazine 36b and the supply magazine 36a can store a plurality of trays 12 in multiple stages in the vertical direction. For example, the storage position is determined in advance for each classification, such as every 10 stages, and suction is performed.
  • the elevators 39a and 39b act according to the classification picked up by the hand 33, and the storage magazine 36b and the supply magazine 36a are moved up and down so that the tray 12 corresponding to the predetermined classification can be supplied or stored. Has been.
  • the tray 12 is replaced by the tray replacement device 3 mainly when an arbitrarily set number is attached to one tray 12, in other words, when the device is full on the adhesive tape of the tray 12. Further, when the tray 12 is replaced, the classification work of the classification device 1 is temporarily stopped. In the present embodiment, the tray 12 replacement operation is performed in a time of 5 seconds or less.
  • the trays 12 with the devices fully loaded are stored in the storage magazine 36b as described above.
  • the trays 12 are not clarified as to which type of device the trays 12 have.
  • the twelve can be managed by attaching a barcode or IC tag having classification identification information in advance when they are mounted on the drum 11 or stored in the storage magazine 36b.
  • the tray replacement arm may be provided with a function of attaching identification information corresponding to the classification position in the holding unit 13 of the drum 11, or stored in the storage magazine 36b in stages for each classification. Thereafter, an operator call may be made, and the operator called by the call may carry out classification management by placing a bar code sticker or IC tag on the tray 12.
  • each tray 12 is independent for each classification held on the drum 11, it can be individually attached and replaced for each classification. When the classification is full, there is no waste that affects other classifications, and productivity can be improved.
  • the holding unit 13 is provided on the cylindrical drum 11 and the tray 12 is disposed here, so that a drive mechanism is included while ensuring a very large number of classifications (about 60 classifications in the present embodiment).
  • the area occupied by the apparatus can be reduced.
  • the tray 12 can be switched at high speed by moving in the rotation axis O direction and the Y axis direction, and productivity is very high.
  • the number of wafer rings is not limited, and reattachment is performed from one wafer ring.
  • the tray exchange device 3 attaches and detaches the trays 12 divided for each classification in the drum 11 for each tray 12, and stores the tray 12 in the storage magazine 36b for each classification, and also installs a new tray. It can be supplied from the supply magazine 36a and pasted on the drum 11 again.
  • device classification in the previous process can be performed simultaneously in multiple classifications in a simple, high speed and space saving manner.
  • the present invention is not limited to the above embodiment, and includes, for example, the following aspects.
  • the rotation axis O of the drum 11 is arranged in the horizontal direction.
  • the present invention is not limited to such an aspect, and the rotation axis O is installed in the vertical direction as shown in FIG. It is also possible.
  • the pick-up nozzle 21 in the above-described embodiment rotates the device 90 degrees after picking up the device from the turntable T, and performs a delivery pasting process to the drum 11.
  • the detailed configuration and operation of each of the other devices can be configured in the same manner as in the above embodiment, so that the same effect as in the above embodiment can be obtained.
  • the tray 12 is moved in the X-axis and Y-axis directions when the device is attached to the tray 12 in order of rows and columns.
  • the pickup nozzle 21 can be caused to move in the X-axis or Y-axis direction by the drum moving mechanism 14.
  • the drum 11 itself only rotates ⁇ , and the pickup nozzle 21 moves to the tray 12 while moving in the X-axis and Y-axis directions on the predetermined tray 12 of the drum 11 when attaching the device. It is also possible to adopt a configuration in which the above is pasted.
  • the movement range of the Y-axis direction is wide, the movement of the drum 11 by the drum moving mechanism 14 is performed together with the movement of the X-axis and the Y-axis as in the above-described embodiment.
  • the pickup nozzle 21 is assigned to the movement process in the XY direction, at least the movement in the Y-axis direction is the movement of the drum 11, and the pickup nozzle 21 has a fine adjustment in the X-axis direction.
  • a mode in which only movement is performed is preferable from the viewpoint of high-speed processing of the apparatus.
  • a full tray is stored in the storage magazine 36b, and an empty tray is supplied from the supply magazine 36a in place of the full tray.
  • a known conveyor is provided at the position of the storage magazine 36b, and the pusher mechanism 38 pushes an empty tray from the supply magazine 36a side onto the temporary tray placement stage 37.
  • the full tray placed on the temporary tray placement stage 37 is moved to the conveyor provided on the opposite side across the supply magazine 36a and the stage 37, loaded by the conveyor, and transferred to a predetermined location by the conveyor. It is good also as such a structure.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention se rapporte à un appareil de classification qui peut exécuter une pluralité de classifications simultanées sur des dispositifs d'un processus précédent, simplement et très rapidement, tout en économisant de l'espace. L'appareil de classification (1) comprend un tambour (11) qui tourne sur un axe de rotation (O). Le tambour (11) tourne sur l'axe de rotation (O), et comprend un mécanisme de déplacement de tambour (14) qui permet au tambour de se déplacer par glissement dans la direction axiale (direction de l'axe Y sur le dessin). Le tambour (11) est sensiblement cylindrique et il est pourvu sur sa surface circonférencielle d'une partie de maintien (13) pour maintenir une pluralité de petits plateaux rectangulaires et plans (12). La partie de maintien (13) est divisée en douze sections dans la direction conférencielle du tambour (11) et elle est divisée par ailleurs en cinq sections dans la direction axiale, si bien que soixante plateaux (12) au total sont maintenus. La partie de maintien (13) comporte un trou d'aspiration central et les plateaux rectangulaires (12) sont aspirés par dépression depuis le trou d'aspiration et maintenus.
PCT/JP2009/002342 2009-05-27 2009-05-27 Appareil de classification WO2010137072A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2009/002342 WO2010137072A1 (fr) 2009-05-27 2009-05-27 Appareil de classification
CN200980159481.8A CN102449751B (zh) 2009-05-27 2009-05-27 分类装置
JP2009546997A JP4466976B1 (ja) 2009-05-27 2009-05-27 分類装置
MYPI2011005687A MY159061A (en) 2009-05-27 2009-05-27 Classification apparatus
HK12107688.8A HK1167042A1 (en) 2009-05-27 2012-08-06 Classification apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/002342 WO2010137072A1 (fr) 2009-05-27 2009-05-27 Appareil de classification

Publications (1)

Publication Number Publication Date
WO2010137072A1 true WO2010137072A1 (fr) 2010-12-02

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PCT/JP2009/002342 WO2010137072A1 (fr) 2009-05-27 2009-05-27 Appareil de classification

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JP (1) JP4466976B1 (fr)
CN (1) CN102449751B (fr)
HK (1) HK1167042A1 (fr)
MY (1) MY159061A (fr)
WO (1) WO2010137072A1 (fr)

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CN109950179A (zh) * 2019-03-26 2019-06-28 深圳市奈士迪技术研发有限公司 一种用于芯片加工的防损坏的一体化分拣装置
WO2022195931A1 (fr) * 2021-03-18 2022-09-22 Ｔｏｗａ株式会社 Appareil de traitement et procédé de fabrication d'article traité

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Publication number Priority date Publication date Assignee Title
WO2012073286A1 (fr) * 2010-11-30 2012-06-07 上野精機株式会社 Dispositif de classification de composant électronique
JP5252516B2 (ja) * 2010-11-30 2013-07-31 上野精機株式会社 電子部品保持装置、及びこれを備える電子部品検査装置、電子部品分類装置
CN111014055B (zh) * 2020-03-09 2020-05-26 征图新视(江苏)科技股份有限公司 偏光片孔洞检测设备

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