WO2010134348A1 - フラックスゲートセンサおよびそれを用いた電子方位計 - Google Patents
フラックスゲートセンサおよびそれを用いた電子方位計 Download PDFInfo
- Publication number
- WO2010134348A1 WO2010134348A1 PCT/JP2010/003428 JP2010003428W WO2010134348A1 WO 2010134348 A1 WO2010134348 A1 WO 2010134348A1 JP 2010003428 W JP2010003428 W JP 2010003428W WO 2010134348 A1 WO2010134348 A1 WO 2010134348A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wiring layer
- insulating layer
- solenoid coil
- magnetic core
- central portion
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
- G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
- G01C17/02—Magnetic compasses
- G01C17/28—Electromagnetic compasses
- G01C17/30—Earth-inductor compasses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
Definitions
- the present invention relates to a small fluxgate sensor manufactured by a thin film process and an electronic azimuth meter using the same.
- the present invention relates to a fluxgate sensor having a small size and high sensitivity, high excitation efficiency, and high design flexibility, and an electronic compass using the same.
- magnetic sensors include those using the Hall effect, and those using the magnetoresistive effect (MR) or the giant magnetoresistive effect (GMR). Since these are manufactured by a thin film process, they can be miniaturized and integrated, and are widely used in portable devices and the like.
- MR magnetoresistive effect
- GMR giant magnetoresistive effect
- MI sensors magnetic azimuth sensors using amorphous wires
- orthogonal fluxgate sensors have been proposed, and the azimuth accuracy is about 2.5 degrees. High accuracy is realized.
- an electronic azimuth meter using a small flux gate sensor manufactured by a thin film process has been proposed (see, for example, Patent Documents 1 to 4).
- the MI sensor, the orthogonal fluxgate sensor, and the fluxgate sensor are said to have the same resolution.
- a large number of components that are magnetic field generation sources such as speakers, vibration motors, and magnets are mounted inside the device, and the sensor is affected by the magnetic field generated from these components. In order to operate accurately even in the presence of a magnetic field generated from such surrounding components, it is desirable to have a wide measurement magnetic field range.
- Non-Patent Document 1 a magnetic sensor having good linearity can be realized without being affected by the hysteresis of the magnetic core.
- the output of the sensor is based on the time domain, and it is possible to remove the influence of hysteresis due to the coercive force of the magnetic core constituting the sensor and to perform digital detection using a counter. , The influence of errors during A / D conversion can be removed, and a sensor with good linearity can be configured.
- Non-Patent Document 2 a linearity of 0.06% FS is realized by using the above method. Since the MI sensor using amorphous wire has a linearity error of 1 to 2%, it is possible to realize an electronic compass with higher orientation accuracy by using a fluxgate sensor with good linearity. Become.
- the fluxgate sensor requires the exciting coil and the detection coil to be wound around the magnetic core. Therefore, it is difficult to reduce the size of the fluxgate sensor as compared with the MI sensor and the orthogonal fluxgate sensor having a structure in which only the bias coil or the pickup coil is wound.
- the length of the sensor in the magnetic sensing direction needs to be about 0.5 to 0.7 mm in consideration of the thickness of the substrate and the mold resin.
- the length of the magnetic core is 1 mm or less, the influence of the demagnetizing field is increased, and the sensitivity is significantly lowered.
- Patent Document 1 and Patent Document 4 disclose an H-type magnetic core having a wide end portion of the magnetic core.
- the excitation coil and the detection coil are wound only on a thin portion at the center of the magnetic core. Therefore, if the sensor size is reduced, the number of turns of both the excitation coil and the detection coil is limited, and it is difficult to ensure a sufficient number of turns.
- the excitation coil and the detection coil are alternately wound, the number of turns of the coil is determined by the sensor size and the coil pitch. Therefore, it is difficult to set the number of turns of the detection coil and the pickup coil independently, and the degree of freedom in design is low.
- FIG. 15 is a schematic diagram showing the shape of a magnetic core of a conventional fluxgate sensor.
- the magnetic core has an end portion 1 and a central portion 2.
- the ratio B / D of the width B of the end portion 1 and the length D of the end portion 1 in the longitudinal direction in FIG. 15 exceeds 1, the magnetic core is long in the direction orthogonal to the magnetic sensing direction of the sensor. Become.
- the shape magnetic anisotropy in the end portion 1 has an easy axis in the width direction of the sensor.
- the magnetic flux density of the end portion 1 is likely to change sensitively with respect to the magnetic field in the direction orthogonal to the magnetic sensing direction of the sensor.
- the electronic azimuth meter is configured by orthogonalizing a plurality of the above fluxgate sensors, the magnetic core of the fluxgate sensor is easily affected by the magnetic field in the direction orthogonal to the detected magnetic field. Sensitivity increases. Further, since the pickup waveform is distorted by the magnetic field in the direction orthogonal to the detection magnetic field, output abnormality is likely to occur, and the orthogonality of each axis deteriorates.
- the other-axis sensitivity refers to a change in output due to an X-axis direction magnetic field in a sensor having a magnetic sensitive direction in the Y-axis direction or the Z-axis direction when detecting a magnetic field in the X-axis direction, for example.
- the orthogonality of the axes deteriorates, and the azimuth accuracy in the electronic azimuth meter also deteriorates.
- the other-axis sensitivity includes not only the time change of the pulsed pickup voltage but also the output change due to the change of the pulse waveform itself.
- the present invention provides a fluxgate sensor having a high excitation efficiency and a high degree of design freedom in addition to a small size and high sensitivity, and an electronic azimuth meter using the same.
- the fluxgate sensor of the present invention includes a first wiring layer formed on a substrate, a first insulating layer formed so as to cover the first wiring layer, and a central portion formed on the first insulating layer.
- a magnetic core having a width that is continuous with the central portion and wider than the width of the central portion, and has first and second end portions located at both ends of the central portion; and
- a fluxgate sensor that covers and includes a second insulating layer formed on the first insulating layer and a second wiring layer formed on the second insulating layer, wherein the first wiring layer and the second wiring layer
- the second wiring layer has a plurality of wirings substantially parallel to each other, and both ends of the wiring of the first wiring layer and the wiring of the second wiring layer are selective to the first insulating layer and the second insulating layer. Electrically connected through the removed portion, and the first and second The portion, which is wound spiral-shaped first solenoid coil, the central portion, may be wound around the spiral second solenoid coil.
- the first solenoid coil includes a third solenoid coil wound around the first end portion and a fourth solenoid coil wound around the second end portion, and the third solenoid coil
- the fourth solenoid coil may be connected in series and have the same number of turns. It is desirable that the third solenoid coil and the fourth solenoid coil have the same number of turns, but the number of turns does not necessarily have to be exactly the same for the convenience of routing the wiring to the electrode pad.
- the first solenoid coil may be wound around the central portion and the first and second end portions.
- the ratio B / D of the width B of the first and second end portions and the length D in the longitudinal direction of the first and second end portions may be smaller than 1.
- the electronic azimuth meter of the present invention includes a substrate, and first, second, and third fluxgate sensors disposed on the substrate and disposed along three axes, and the first, Each of the second and third fluxgate sensors includes a first wiring layer formed on the substrate, a first insulating layer formed to cover the first wiring layer, and the first insulating layer.
- a magnetic core formed and having a central portion and first and second end portions that are continuous with the central portion and have a width wider than the width of the central portion and are located at both ends of the central portion;
- a fluxgate sensor that covers the magnetic core and includes a second insulating layer formed on the first insulating layer and a second wiring layer formed on the second insulating layer, One wiring layer and the second wiring layer include a plurality of wirings substantially parallel to each other. And both ends of the wiring of the first wiring layer and the wiring of the second wiring layer are electrically connected via the selectively removed portions of the first insulating layer and the second insulating layer,
- a spiral first solenoid coil may be wound around the first and second end portions, and a spiral second solenoid coil may be wound around the center portion.
- the first solenoid coil includes a third solenoid coil wound around the first end portion and a fourth solenoid coil wound around the second end portion, and the third solenoid coil
- the fourth solenoid coil may be connected in series and have the same number of turns.
- the first solenoid coil may be wound around the central portion and the first and second end portions.
- the ratio B / D of the width B of the first and second end portions and the length D in the longitudinal direction of the first and second end portions may be smaller than 1.
- the fluxgate sensor of the present invention includes a first wiring layer, a first insulating layer formed so as to cover the first wiring layer, a detection unit formed on the first insulating layer, the detection unit, A magnetic core that includes a first and a second excitation unit that is continuous and wider than the detection unit and is located at both ends of the detection unit; and covers the magnetic core;
- a fluxgate sensor comprising at least a second insulating layer formed on a layer and a second wiring layer formed on the second insulating layer, the first wiring layer and the second wiring layer are: A plurality of wirings substantially parallel to each other, wherein both ends of the wiring of the first wiring layer and the wiring of the second wiring layer are selectively removed from the first insulating layer and the second insulating layer; Are electrically connected to each other, and the first and second exciters are spirally connected to each other. May be the exciting coil is wound of.
- the exciting coil includes a first exciting coil wound around the first exciting part and a second exciting coil wound around the second exciting part, and the first exciting coil
- the second exciting coils may be connected in series so that generated magnetic fields are in the same direction.
- the excitation coil may be wound around the excitation unit and a detection unit formed at the center of the magnetic core.
- the electronic azimuth meter of the present invention may be configured by arranging three fluxgate sensors along one of the three axes on one substrate.
- the number of turns of the exciting coil is increased by winding the exciting coil around the wide end portion of the magnetic core, and the magnetic flux generated from the exciting coil at the end portion is concentrated and applied to the central portion. Can do.
- the present invention since current can be supplied to two exciting coils simultaneously, the number of electrode pads can be reduced, and downsizing can be realized.
- stronger excitation can be performed by winding an excitation coil around the central portion.
- high azimuth accuracy can be realized by using a highly accurate fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line a-a ′ in FIG. 4.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG. 4 and shows a manufacturing process of a fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG. 4 and shows a manufacturing process of a fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG. 4 and shows a manufacturing process of a fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG. 4 and shows a manufacturing process of a fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG.
- FIG. 4 shows a manufacturing process of a fluxgate sensor.
- FIG. 5 is a cross-sectional view taken along line b-b ′ in FIG. 4 and shows a manufacturing process of a fluxgate sensor. It is a figure for demonstrating the example of the shape of the magnetic core of the fluxgate sensor which concerns on the 1st Embodiment of this invention. It is a figure for demonstrating the example of the shape of the magnetic core of the fluxgate sensor which concerns on the 1st Embodiment of this invention. It is a figure for demonstrating the example of the shape of the magnetic core of the fluxgate sensor which concerns on the 1st Embodiment of this invention.
- 1 is a schematic perspective view of an electronic azimuth meter according to a first embodiment of the present invention.
- FIGS. 1A and 1B are plan views showing an example of the shape of the magnetic core of the fluxgate sensor according to the first embodiment of the present invention.
- the magnetic core of the fluxgate sensor according to the first embodiment of the present invention has an end portion 1 and a central portion 2.
- the width B of the end portion 1 is wider than the width C of the central portion 2.
- the length A in the longitudinal direction of the magnetic core is 1 mm or less, desirably 0.5 mm or less.
- the value of the ratio B / D between the width B of the end portion 1 and the length D in the longitudinal direction of the end portion 1 is smaller than 1.
- FIG. 1A is a plan view showing an example in which the end portion of the magnetic core has a square shape.
- FIG. 1B is a plan view showing an example in which the magnetic core has a tapered shape at the boundary between the end portion 1 and the central portion 2. In order to suppress local saturation of the magnetic flux at the corner, it is desirable that the boundary between the end portion 1 and the central portion 2 is substantially tapered as shown in FIG. 1B.
- the ratio between the film thickness direction and the in-plane direction is as large as several hundred to several thousand. Accordingly, the demagnetizing factor is several hundred to several thousand times different between the film thickness direction and the in-plane direction, and the demagnetizing factor in the in-plane direction is very small.
- the demagnetizing factor is determined by the dimensional ratio between the longitudinal direction and the width direction. In this case, since the demagnetizing factor in the longitudinal direction is small and the demagnetizing factor in the width direction is large, the shape anisotropy has an easy axis in the longitudinal direction.
- the fluxgate sensor according to the first embodiment of the present invention has the end portion 1 wider than the central portion 2 in the magnetic core, and the width B of the end portion 1 is the longitudinal direction of the end portion 1. Less than the length D of The easy axis due to the shape anisotropy of the end portion 1 is the longitudinal direction of the fluxgate sensor. Therefore, the change in magnetic flux density in the core due to the magnetic field orthogonal to the magnetic sensing direction is small, and the other-axis sensitivity characteristic is good. Thereby, it is possible to constitute an electronic azimuth meter with excellent azimuth accuracy.
- FIG. 2 is a graph showing the operating principle of the fluxgate sensor according to the first embodiment of the present invention.
- A of FIG. 2 is a graph which shows the time change of the triangular wave electric current supplied with an exciting coil.
- B) of FIG. 2 is a graph which shows the time change of the magnetization state of a core.
- C of FIG. 2 is a graph which shows the time change of the output voltage which arises in a pickup coil.
- FIG. 3 is a hysteresis curve showing a change with time of the magnetization state of the magnetic core of the fluxgate sensor according to the first embodiment of the present invention.
- the output voltage Vpu of the pickup coil changes with time as shown in FIG.
- the time interval t1 in FIG. 2C includes the external magnetic field Hext, the deviation Hc of the magnetic field strength H when the magnetic flux density B of the magnetic core increases and decreases, the magnetic field Hexc generated by the exciting coil, and the triangular wave Using the period T and the delay time Td due to the inductance of the coil, it is expressed as in equation (1).
- the change t2-t1 in the time interval with respect to the external magnetic field depends on the ratio Hext / Hexc between the external magnetic field Hext and the magnetic field Hexc formed by the exciting coil and the period T of the triangular wave.
- the sensitivity S of the sensor increases as the period T of the triangular wave increases, that is, as the excitation frequency fexc decreases.
- FIG. 4 is a top view schematically showing the fluxgate sensor according to the first embodiment of the present invention.
- FIG. 5 is a cross-sectional view taken along line a-a ′ in FIG. 6A to 6E are cross-sectional views taken along the line b-b 'in FIG. 4, and are diagrams showing a process of creating a fluxgate sensor.
- the fluxgate sensor according to the first embodiment of the present invention includes a magnetic core 3, a first wiring layer 4, a first insulating layer 5, a second insulating layer 6, as shown in FIGS.
- the second wiring layer 7, the opening 8, and the substrate 100 are included.
- the magnetic core 3 includes an end portion 1 and a central portion 2.
- the first wiring layer 4 and the second wiring layer 7 constitute a first solenoid coil 9 wound around the end portion 1 and a second solenoid coil 10 wound around the central portion 2.
- the first solenoid coil 9 wound around the end portion 1 is an exciting coil.
- the second solenoid coil 10 wound around the central portion 2 is a pickup coil.
- the end part 1 is an excitation part and the central part 2 is a detection part.
- FIGS. 6A to 6E A manufacturing process of the fluxgate sensor according to the first embodiment of the present invention will be described with reference to FIGS. 6A to 6E.
- the first wiring layer 4 for forming the lower wiring of the solenoid coil is formed on the nonmagnetic substrate 100.
- FIG. 6B the magnetic core 3 and the first insulating layer 5 for insulating the solenoid coil are formed on the first wiring layer 4.
- an opening 8 is provided at a portion where the first wiring layer 4 is connected to the second wiring layer 7 which will be an upper wiring of a solenoid coil to be formed later.
- a magnetic core 3 made of a soft magnetic film is formed on the first insulating layer 5.
- the shape of the magnetic core 3 made of this soft magnetic film is such that the width at the central portion 2 is narrower than the width at the end portion 1 as shown in FIG.
- the second insulating layer 6 in which the opening 8 is provided at the connecting portion between the first wiring layer 4 and the second wiring layer 7 is formed.
- the second wiring layer 7 is formed on the second insulating layer 6 so as to connect adjacent wirings of the first wiring layer 4 at the end thereof, thereby the solenoid. A coil is formed. Since the wiring is connected to the adjacent wiring, the loop of the solenoid coil in the cross section is not closed.
- the first solenoid coil 9 and the second solenoid coil 10 formed by the first wiring layer 4 and the second wiring layer 7 are arranged at the wide end portion 1 and the narrow central portion 2 at both ends of the magnetic core 3. , Each is wound independently.
- the first solenoid coil 9 wound around the wide end portion 1 at both ends includes a third solenoid coil wound around the end portion 1 at one end and the end portion 1 at the other end. And a fourth solenoid coil wound around.
- the third solenoid coil and the fourth solenoid coil at the ends of both ends are connected in series by the first wiring layer 4 or the second wiring layer 7 so that the generated magnetic field directions are the same.
- a first solenoid coil 9 is formed as a whole.
- Electrode pads 11 for connecting to the outside are formed at both ends of the second solenoid coil 10 wound around the central portion 2 of the magnetic core 3. Electrode pads 12 for connection to the outside are formed at both ends of two series-connected first solenoid coils 9 wound around the end portions 1 at both ends of the magnetic core 3.
- the third solenoid coil and the fourth solenoid coil wound around the end portions 1 at both ends of the magnetic core 3 have the same number of turns and are symmetrical.
- FIG. 4 is schematically shown, and a part of the lower wiring of the magnetic core 3 is omitted with respect to the first solenoid coil 9 and the second solenoid coil 10. Further, the shapes of the first solenoid coil 9 and the second solenoid coil 10 are not limited to the shapes shown in FIG.
- FIG. 5 is an example of a cross-sectional view of the fluxgate sensor according to the first embodiment of the present invention cut along line aa ′ in FIG. 4, and the fluxgate according to the first embodiment of the present invention is shown.
- the positional relationship between the first wiring layer 4 and the second wiring layer 7 in the sensor is not limited to the shape shown in FIG.
- FIGS. 6A to 6E are examples of cross-sectional views of the fluxgate sensor according to the first embodiment of the present invention, taken along line bb ′ in FIG. 4, and the first embodiment of the present invention is illustrated in FIGS.
- the shape of such a fluxgate sensor is not limited to the shapes of FIGS. 6A to 6E.
- the wide end portions 1 at both ends of the magnetic core 3 are excited by energizing the first solenoid coil 9 wound around the periphery.
- an induced voltage is applied to the narrow central portion 2 of the magnetic core 3, and the induced voltage is detected by the second solenoid coil 10 wound around the central portion 2.
- the magnetic core 3 is AC-excited by energizing the first solenoid coil (excitation coil) 9 of the end portion 1 of the magnetic core 3 with an alternating current that changes over time via the electrode pad 12 from the outside. Is done.
- the magnetic flux generated at the end portion 1 is guided to the central portion 2 of the magnetic core 3.
- the central portion 2 of the magnetic core 3 is also AC-excited, and a substantially pulsed induced voltage is generated in the second solenoid coil (detection coil) 10 of the central portion 2.
- This induced voltage can be detected by an external detection circuit via the second solenoid coil 10 and the electrode pad 11.
- the alternating current supplied to the first solenoid coil 9 is desirably a triangular wave having a constant frequency.
- the timing at which the above-described substantially pulsed induced voltage is generated changes with time.
- a positive induced voltage is output.
- a negative induced voltage is output at the timing of switching from negative to positive in the triangular wave current. Therefore, a response to an external magnetic field can be obtained by measuring the timing at which the positive and negative pulsed induced voltages are generated with a counter.
- the magnetic core shown in FIG. 4 has been described.
- the shape of the magnetic core in the spirit of the present invention is not limited to this, and the width at the end portion is not limited. As long as it is wider than the width in the central portion, it may have any shape.
- 7A to 7C are diagrams for explaining an example of the shape of the magnetic core according to the fluxgate sensor of the first embodiment of the present invention. 7A to 7C schematically showing the magnetic core and the upper wirings of the first solenoid coil 9 and the second solenoid coil 10 are actually viewed from above. In this case, the magnetic core is hidden by the coil in the portion overlapping the coil.
- a sealing layer covering the second wiring layer 7 may be formed.
- a barrier metal such as Ti, Cr, or TiW is formed on the nonmagnetic substrate 100 by sputtering, and then Cu is formed by sputtering.
- a resist pattern to be the first wiring layer 4 is formed by photolithography, and a wiring pattern is formed by wet etching.
- the first wiring layer 4 may be formed by electrolytic plating using the sputtered film as a seed film.
- the thickness of the first wiring layer 4 is such that the unevenness on the surface of the insulating layer due to the wiring is sufficiently smaller than the thickness of the magnetic core. It is desirable that the thickness be such that the coil resistance is small.
- the thickness is preferably about 0.2 ⁇ m to 2 ⁇ m.
- a first resin layer 5 is formed by applying a photosensitive resin and performing exposure, development, and thermosetting treatment. At this time, a portion where the first wiring layer 4 and the second wiring layer 7 to be formed later are connected is opened, and the first wiring layer 4 and the magnetic core 3 to be formed later are insulated. At this time, it is desirable that the thickness of the first insulating layer 5 is sufficient to alleviate the unevenness of the first wiring layer 4. Specifically, the thickness is preferably about 3 to 10 times the thickness of the first wiring layer 4. In FIG. 5, such a ratio is not shown for the convenience of display of the first wiring layer 4 on the drawing.
- the photosensitive polyimide needs to prevent the magnetic core 3 from being distorted due to shrinkage or deformation due to thermal history in a later process. Therefore, the photosensitive polyimide is a resin having sufficient heat resistance that does not cause thermal shrinkage or deformation due to, for example, solder reflow during mounting or heat treatment in a magnetic field to impart induced magnetic anisotropy to the magnetic core. Is desirable. Specifically, it is desirable that the glass transition point (Tg: Glass Transition Temperature) of the photosensitive polyimide is 300 degrees Celsius or more. That is, the resin used here is preferably polyimide, polybenzoxazole having high heat resistance, or a thermosetting novolac resin.
- a soft magnetic film serving as the magnetic core 3 is formed by sputtering, and patterning is performed using photolithography and etching so as to obtain a desired shape.
- a zero magnetostrictive Co-based amorphous film typified by CoNbZr and CoTaZr, a NiFe alloy, a CoFe alloy, or the like is desirable. Since these soft magnetic films are difficult-to-etch materials, they may be formed by a lift-off method in which a desired pattern is obtained by performing sputter deposition after forming a resist and removing the resist.
- the magnetic core 3 may be formed by forming a NiFe alloy or CoFe alloy into a desired shape using an electrolytic plating method using a resist frame.
- the connecting portion between the first wiring layer 4 and the second wiring layer 7 is opened, and the photosensitive resin is exposed, developed, and developed so as to electrically insulate the magnetic core 3 and the second wiring layer 7 from each other.
- the 2nd insulating layer 6 is formed by performing a thermosetting process.
- a barrier metal such as Ti, Cr, or TiW is formed on the substrate including the second insulating layer 6 and the opening of the second insulating layer 6 by sputtering, and then Cu is formed by sputtering to form a seed film. Form. Then, a resist frame is formed, a desired wiring pattern is formed by electrolytic plating of Cu, and the second wiring layer 7 is formed by etching the seed layer.
- the flux gate sensor according to the first embodiment of the present invention is configured by forming electrode pads, terminals, and a protective film for external connection as necessary.
- a terminal to be connected to the outside methods used for general semiconductor devices and thin film devices such as solder bumps and gold bumps, and wire bonding can be applied.
- Cu by sputtering and electrolytic plating is used as the first wiring layer 4 and the second wiring layer 7, but they may be formed by electroless Cu, electrolytic Au plating, or the like.
- a good conductive film made of Cu, Al, Au, or the like may be used.
- resin materials are used as the first insulating layer 5 and the second insulating layer 6, an insulating film such as SiO2, SiN, Al2O3 is formed by sputtering or chemical vapor deposition (CVD), and the above-mentioned
- the opening may be formed by dry etching.
- FIG. 8 is a schematic perspective view of the electronic azimuth meter according to the first embodiment of the present invention.
- the electronic compass shown in FIG. 8 includes a first fluxgate (X-axis) sensor 20, a second fluxgate (Y-axis) sensor 30, a third fluxgate (Z-axis) sensor 40, and a signal processing IC 50. It is comprised by arrange
- the third fluxgate sensor 40 is disposed so as to be substantially perpendicular to the substrate surface constituting the electronic azimuth meter.
- the 1st fluxgate sensor 20, the 2nd fluxgate sensor 30, and the 3rd fluxgate sensor 40 are the fields except the connection terminal with the outside, ie, the shape of the portion which forms magnetic core 3 and coils 61 and 71 Are preferably the same. This is because the characteristics of each of the first fluxgate sensor 20, the second fluxgate sensor 30, and the third fluxgate sensor 40 are aligned, so that it is not necessary to correct variations in the characteristics of each sensor, and the electronic circuit is simplified. This is to make it possible.
- the length in the magnetic sensing direction is preferably 1 mm or less, more preferably, in order to reduce the thickness of the electronic azimuth meter. Is preferably about 0.5 mm.
- the signal processing IC 50 counts the circuit for energizing the excitation coil 61 in each fluxgate sensor with a triangular wave current having a constant frequency, the detection circuit for detecting the induced voltage appearing in the detection coil 71, and the timing at which the induced voltage is generated. And a selector for switching connection between the first fluxgate sensor 20, the second fluxgate sensor 30, and the third fluxgate sensor 40 with respect to each of the two circuits. With this configuration, the first fluxgate sensor 20, the second fluxgate sensor 30, and the third fluxgate sensor 40 sequentially measure the magnetic field in each of the three axial directions and perform an operation to realize an electronic compass with a small azimuth error. can do.
- FIG. 9 is a graph showing output waveforms of positive and negative pulsed pickup voltages when a triangular wave current having an amplitude of 100 mA and a frequency of 30 kHz is passed through the flux gate sensor of the above embodiment.
- FIG. 10 is a graph showing the external magnetic field dependence of the time interval t at which the positive and negative pulse pickup voltages of FIG. 9 exceed the respective reference voltages Vth, that is, the output of the fluxgate sensor with respect to the external magnetic field.
- the number of turns of the exciting coil can be increased. Thereby, even if the sensor size is reduced to 0.5 mm or less, a pickup waveform having a good SN ratio can be obtained.
- the output of the fluxgate sensor of the above example had good linearity with respect to the external magnetic field, and the deviation from the ideal straight line was 0.5% in the range of ⁇ 14 Oe.
- the flux gate sensor had an excitation efficiency ⁇ of 0.29 Oe / mA.
- the excitation efficiency was 0.20 Oe / mA. Therefore, it turns out that the fluxgate sensor which concerns on the Example of this invention has high excitation efficiency.
- the fluxgate sensor according to the first embodiment of the present invention has a structure in which the solenoid coil is wound up to the end of the end portion 1, the number of turns of the solenoid coil is large, and the width of the end portion 1 is the central portion 2. Therefore, the magnetic flux generated at the end portion 1 is concentrated at the central portion 2. Accordingly, the magnetic flux density of the central portion 2 is higher than the magnetic flux density of the end portion 1, and the value of the magnetic field Hexc formed by the apparent excitation coil in the central portion 2 is increased. Thereby, the fluxgate sensor according to the first embodiment of the present invention has high excitation efficiency.
- FIG. 11 shows the result of calculating the magnetic flux density in the cross section aa ′ inside the core when energizing the flux gate sensor according to the first embodiment of the present invention shown in FIG. 4 by the three-dimensional finite element method. It is a graph.
- the magnetic core of the fluxgate sensor since the width B of the end portion 1 is wide and the width C of the central portion 2 is narrow, the magnetic flux density in the central portion 2 is higher than the magnetic flux density in the end portion 1. 11 that the magnetic flux density in the central portion 2 is saturated with a smaller current value. This indicates that, in the fluxgate sensor according to the first embodiment of the present invention, the apparent magnetic field Hexc created by the exciting coil is increased and the excitation efficiency is increased.
- an H-type magnetic core is used to compensate for the decrease in sensitivity due to the demagnetizing field when the fluxgate sensor is downsized. By doing so, the demagnetizing field of the detection part can be reduced. Thereby, even if it is small, excitation efficiency increases and a highly sensitive fluxgate sensor can be constituted.
- a flux gate sensor having a high sensitivity and a wide measurement magnetic field range can be configured with a smaller current.
- the excitation coil is wound around the wide end portion 1 of both ends of the H-type magnetic core.
- the magnetic flux generated in the magnetic core by the exciting coil is expressed by the cross-sectional area of the wide end portion 1 at both ends of the magnetic core ⁇ the magnetic flux density.
- the magnetic flux generated in the magnetic core by the exciting coil is guided to the central portion 2 of the narrow magnetic core that is continuous with the end portion of the magnetic core.
- the cross-sectional area of the central portion 1 of the magnetic core is C / B times the cross-sectional area of the wide end portion 1 at both ends. It becomes.
- the excitation coil and the detection coil are wound independently. Thereby, the number of turns of the exciting coil and the detection coil, the wiring width, and the space between the wirings can be arbitrarily set. Therefore, the excitation coil and the detection coil can be freely designed according to the specifications required for the sensor.
- the solenoid coil is wound over the entire area of the magnetic core. Therefore, compared with the structure currently disclosed by patent document 1 and patent document 4, the winding number of a solenoid coil increases and the magnetic flux which generate
- the magnetic flux is locally saturated at the corner portion. This may cause a loss of magnetic flux.
- a tapered shape is provided at the boundary between the end portion 1 and the central portion 2 of the magnetic core as shown in FIG. 1B, local magnetic flux saturation can be suppressed, and the magnetic flux density of the central portion 2 of the magnetic core can be suppressed. Can be improved.
- FIG. 13 is a graph showing a pick-up voltage waveform with respect to a magnetic field perpendicular to the magnetic sensing direction when a magnetic field perpendicular to the film surface is applied from 0 Oe to 10 Oe in the flux gate sensor of the comparative example. It can be seen from FIG. 13 that the timing at which the pickup voltage is generated and the peak height of the pickup voltage are changed by the application of a magnetic field orthogonal to the direction of magnetic sensitivity, and that other-axis sensitivity is obtained. It can be seen that the change due to the external magnetic field of about 4 Oe to 6 Oe is particularly remarkable.
- the offset magnetic field is superimposed when the offset magnetic field is superimposed in the direction orthogonal to the sensor.
- the output changes due to the superposition of the offset magnetic field, so that the detection accuracy of the geomagnetism decreases.
- FIG. 14 shows the pick-up voltage waveform for the magnetic field orthogonal to the magnetosensitive direction when the magnetic field in the direction orthogonal to the film surface is applied in the same manner from 0 Oe to 10 Oe in the fluxgate sensor of the above embodiment of the present invention. It is a graph. It can be seen that by applying a magnetic field orthogonal to the magnetic sensing direction, there is almost no change in the timing at which the pickup voltage is generated and the peak height of the pickup voltage, and the other-axis sensitivity is very small. This is because the wide end portions at both ends of the core are designed so that the shape anisotropy due to the demagnetizing field coincides with the longitudinal direction of the core, that is, the magnetic sensing direction of the sensor. This is because it is in the state of being excited in the magnetic sensitive direction and is not easily affected by the magnetic field from the orthogonal direction.
- the measurement magnetic field range of the sensor can be expanded by the excitation current, and as shown in FIG. 10, it is possible to ensure a wide measurement magnetic field range of ⁇ 10 Oe or more while maintaining good linearity. Is possible. By having such a wide measurement magnetic field range, the calibration range of the offset magnetic field can be widened.
- FIG. 12 is a diagram for explaining how to wind the excitation coil and the detection coil in the fluxgate sensor according to the second embodiment of the present invention.
- the exciting coil is wound only on the wide end portions 1 at both ends of the magnetic core.
- the first solenoid coil 9 which is an exciting coil is wound not only on the wide end portion 1 at both ends but also on the narrow central portion 2. That is, the exciting coil was wound around the entire magnetic core, and the second solenoid coil 10 serving as the detection coil was wound only around the central portion 2 of the magnetic core. Even with this winding method, the same effect as the first embodiment can be obtained.
- the magnetic core of the fluxgate sensor according to the third embodiment of the present invention has the same configuration as that of the fluxgate sensor according to the first embodiment of the present invention, but the operation of the solenoid coil is different. That is, the magnetic core of the fluxgate sensor according to the third embodiment of the present invention has an H shape as shown in FIGS. 1A to 1B, as in the first embodiment of the present invention.
- the magnetic core of the fluxgate sensor according to the third embodiment of the present invention has an end portion 1 and a central portion 2.
- the width B of the end portion 1 is wider than the width C of the central portion 2.
- the first solenoid coil wound around the end portion 1 is a pickup coil.
- the second solenoid coil wound around the central portion 2 is an exciting coil.
- the top view of the fluxgate sensor according to the third embodiment of the present invention is as shown in FIG.
- the first solenoid coil 9 is a pickup coil and the second solenoid coil 10 is an exciting coil.
- the narrow central portion 2 of the magnetic core 3 is excited by energizing the second solenoid coil 10 wound around it.
- an induced voltage is applied to the wide end portion 1 of the magnetic core 3, and the induced voltage is detected by the first solenoid coil 9 wound around the end portion 1.
- the manufacturing method of the fluxgate sensor according to the third embodiment of the present invention is the same as that of the first embodiment of the present invention. Also in the fluxgate sensor according to the third embodiment of the present invention, the same effects as those of the first embodiment can be obtained.
- the fluxgate sensor of the present invention can be used as a small magnetic sensor, and the magnetic sensor is widely used as an electronic azimuth meter for mobile phones, portable navigation devices, game controllers, and the like.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Electromagnetism (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
Description
本願は、2009年5月21日に、日本に出願された特願2009-123110号に基づき優先権を主張し、その内容をここに援用する。
以下、本発明の第1の実施形態について、図面を参照して詳細に説明する。
図1A及び図1Bは、本発明の第1の実施形態に係るフラックスゲートセンサの磁気コアの形状の一例を示す平面図である。図1A及び図1Bに示すように、本発明の第1の実施形態のフラックスゲートセンサの磁気コアは、端部分1と、中央部分2を有する。端部分1の幅Bは、中央部分2の幅Cよりも広い。磁気コアの長手方向の長さAは、1mm以下、望ましくは0.5mm以下である。端部分1の幅Bと端部分1の長手方向の長さDの比B/Dの値は1よりも小さい。フラックスゲートセンサの磁気コアの長手方向は、フラックスゲートセンサの感磁方向と一致している。図1A及び図1Bでは図示していないが、端部分1の周囲には、励磁コイルが巻き回され、中央部分2の周囲には、ピックアップコイルが巻き回される。図1Aは、磁気コアの端部分の形状が角型の場合の例を示す平面図である。図1Bは、磁気コアが端部分1と中央部分2との境界にテーパー形状を有する場合の例を示す平面図である。角部での磁束の局所的な飽和を抑えるためには、図1Bに示すように、端部分1と中央部分2の境界が略テーパー状になっていることが望ましい。この場合、端部分1の長手方向の長さDは略テーパー状の部分を含む長さを表わすこととすると、端部分1の幅Bと端部分1の長手方向の長さDの比B/Dの値が、1よりも小さいことが望ましい。
図2は、本発明の第1の実施形態に係るフラックスゲートセンサの動作原理を示すグラフである。図2の(a)は、励磁コイルに通電する三角波電流の時間変化を示すグラフである。図2の(b)は、コアの磁化状態の時間変化を示すグラフである。図2の(c)は、ピックアップコイルに生じる出力電圧の時間変化を示すグラフである。図3は、本発明の第1の実施形態に係るフラックスゲートセンサの磁気コアの磁化状態の時間による変化を示すヒステリシス曲線である。励磁コイルに図2の(a)に示すような三角波電流を通電すると、励磁コイルの作る磁界Hexcにより磁気コアが励磁され、磁気コア内部の磁束密度B、すなわち磁気コアの磁化状態は、飽和特性を有するため、図2の(b)に示すような時間変化をする。ピックアップコイルには、磁気コアの磁束密度Bの時間微分すなわち時間変化dB/dtが存在する領域において、磁気コアの断面積S、ピックアップコイルの巻き数Nに比例した出力電圧Vpu=NS×dB/dtが生じる。ピックアップコイルの出力電圧Vpuは、図2の(c)に示すような時間変化をする。磁気コアの磁束密度Bの時間変化dB/dtが大きいほど、ピックアップ電圧波の高値は高く、パルス幅は狭くなり、より急峻なパルス電圧が得られる。図2の(c)における時間間隔t1は、外部磁界Hext、磁気コアの磁束密度Bが増加する時と減少する時との磁場の強さHのずれHc、励磁コイルの作る磁界Hexc、三角波の周期T及びコイルのインダクタンスによる遅延時間Tdを用いて、式(1)のように表される。
フラックスゲートセンサの構成としては、前述の構成に加えて、第2配線層7を覆う封止層が形成されていてもよい。
まず、非磁性の基板100上にTi、Cr、TiWなどのバリアメタルをスパッタ成膜した後にCuをスパッタにより成膜する。次に、フォトリソグラフィにより第1配線層4となるレジストパターンを形成し、ウェットエッチングにより配線パターンを形成する。あるいは上記のスパッタ膜をシード膜として電解めっきにより第1配線層4を形成してもよい。このとき、後に形成される絶縁層上に磁気コア3を形成するため、第1配線層4の厚さは、その配線による絶縁層表面の凹凸が磁気コアの厚さに比べて十分小さくなるような厚さであって、かつコイルの抵抗が小さくなるような厚さであることが望ましい。具体的には、その厚さは、0.2μm~2μm程度が好ましい。
また、レジストフレームを用いた電解めっき法を利用して、NiFe合金やCoFe合金を所望の形状に成形することにより、磁気コア3を形成してもよい。
図8に示した電子方位計は、第1フラックスゲート(X軸)センサ20、第2フラックスゲート(Y軸)センサ30、第3フラックスゲート(Z軸)センサ40、および信号処理用IC50を、1つの基板上に配置することにより構成される。具体的には、第1フラックスゲートセンサ20および第2フラックスゲートセンサ30は、電子方位計を構成する基板面に対して、その形成された面が略平行となるように、かつ感磁方向が互いに直交するように配置される。また、第3フラックスゲートセンサ40は、電子方位計を構成する基板面に対して略垂直となるように配置される。このとき、第1フラックスゲートセンサ20、第2フラックスゲートセンサ30および第3フラックスゲートセンサ40は、外部との接続端子を除いた領域、すなわち磁気コア3およびコイル61、71を形成する部分の形状が同一であることが望ましい。これは、第1フラックスゲートセンサ20、第2フラックスゲートセンサ30および第3フラックスゲートセンサ40のそれぞれの特性を揃えることにより、各センサの特性のばらつきを補正する必要がなく、電子回路を簡略化できるようにするためである。また、第3フラックスゲートセンサ40は、基板面に対して略垂直に実装されるので、電子方位計の厚さを薄くするためには、その感磁方向の長さが、1mm以下、さらに好ましくは0.5mm程度であることが望ましい。
実施例として、上記のようにしてフラックスゲートセンサを作製した。フラックスゲートセンサの磁気コアの形状は、磁気コアの長手方向の長さA=480μm、端部分1の幅B=80μm、中央部分2の幅C=20μm、端部分1の長手方向の長さD=140μm、励磁コイルの巻き数は16.5、ピックアップコイルの巻き数は6.5とした。
図9は、上記実施例のフラックスゲートセンサに、振幅100mA、周波数30kHzの三角波電流を通電したときの、正負のパルス状ピックアップ電圧の出力波形を示すグラフである。図10は、図9の正負のパルス状ピックアップ電圧がそれぞれの基準電圧Vthを超える時間間隔tの外部磁界依存性、すなわち外部磁界に対するフラックスゲートセンサの出力を示すグラフである。
図12は、本発明の第2の実施形態に係るフラックスゲートセンサにおける励磁コイルおよび検出コイルの巻き回し方を説明するための図である。
第1の実施形態においては、磁気コアの両端の幅の広い端部分1のみに励磁コイルを巻き回した。これに対して、第2の実施形態においては、両端部の幅の広い端部分1のみならず、幅の狭い中央部分2にも、励磁コイルである第1のソレノイドコイル9を巻き回した。すなわち、励磁コイルは磁気コアの全体の周囲に巻き回し、検出コイルである第2のソレノイドコイル10は磁気コアの中央部分2のみに巻き回した。かかる巻き回し方でも、前述の第1の実施形態と同様の作用効果が得られる。
本発明の第3の実施形態について、説明する。
本発明の第3の実施形態に係るフラックスゲートセンサの磁気コアは、本発明の第1の実施形態に係るフラックスゲートセンサと同じ構成であるが、ソレノイドコイルの動作が異なる。すなわち、本発明の第3の実施形態に係るフラックスゲートセンサの磁気コアは、本発明の第1の実施形態と同様に、図1A-図1BのようなH型の形状をしている。本発明の第3の実施形態のフラックスゲートセンサの磁気コアは、端部分1と、中央部分2を有する。端部分1の幅Bは、中央部分2の幅Cよりも広い。本発明の第1の実施形態とは異なり、本発明の第3の実施形態では、端部分1の周囲に巻き回されている第1のソレノイドコイルは、ピックアップコイルである。中央部分2の周囲に巻き回されている第2のソレノイドコイルは、励磁コイルである。
2 磁気コアの中央部分
3 磁気コア
4 第1配線層
5 第1絶縁層
6 第2絶縁層
7 第2配線層
8 開口部
9 第1のソレノイドコイル
10 第2のソレノイドコイル
11 電極パッド
12 電極パッド
20 第1フラックスゲート(X軸)センサ
30 第2フラックスゲート(Y軸)センサ
40 第3フラックスゲート(Z軸)センサ
50 信号処理用IC
100 基板
A 磁気コアの長手方向の長さ
B 端部分1の幅
C 中央部分2の幅
D 端部分1の長手方向の長さ
Claims (12)
- 基板上に形成された第1配線層と、
前記第1配線層を覆うように形成された第1絶縁層と、
前記第1絶縁層上に形成され、中央部分と、前記中央部分と連続してかつ前記中央部分の幅よりも広い幅を持ち、前記中央部分の両端に位置する第1および第2の端部分と、を有する磁気コアと、
前記磁気コアを覆い、前記第1絶縁層上に形成された第2絶縁層と、
前記第2絶縁層上に形成された第2配線層と、
を含むフラックスゲートセンサであって、
前記第1配線層および前記第2配線層は、複数の互いに略平行な配線を有し、
前記第1配線層の配線および前記第2配線層の配線の両端が、前記第1絶縁層および前記第2絶縁層の選択的に除去された部分を介して電気的に接続され、
前記第1および第2の端部分に、螺旋状の第1のソレノイドコイルが巻き回されており、
前記中央部分に、螺旋状の第2のソレノイドコイルが巻き回されていることを特徴とする、フラックスゲートセンサ。 - 前記第1および第2の端部分の幅Bと、前記第1および第2の端部分の長手方向の長さDの比B/Dの値が1よりも小さいことを特徴とする、請求項1に記載のフラックスゲートセンサ。
- 前記第1のソレノイドコイルは、前記第1の端部分に巻き回された第3のソレノイドコイルおよび前記第2の端部分に巻き回された第4のソレノイドコイルを含み、前記第3のソレノイドコイルおよび前記第4のソレノイドコイルは、直列に接続され、かつ巻き数が略同一であることを特徴とする、請求項1または2のいずれかに記載のフラックスゲートセンサ。
- 前記第1のソレノイドコイルは、前記中央部分、前記第1および第2の端部分に巻き回されていることを特徴とする、請求項1または2のいずれかに記載のフラックスゲートセンサ。
- 基板と、
前記基板上に配置され、3軸のそれぞれに沿うように配置された第1、第2および第3のフラックスゲートセンサと、
を含み、
前記第1、第2および第3のフラックスゲートセンサの各々は、
基板上に形成された第1配線層と、
前記第1配線層を覆うように形成された第1絶縁層と、
前記第1絶縁層上に形成され、中央部分と、前記中央部分と連続してかつ前記中央部分の幅よりも広い幅を持ち、前記中央部分の両端に位置する第1および第2の端部分と、を有する磁気コアと、
前記磁気コアを覆い、前記第1絶縁層上に形成された第2絶縁層と、
前記第2絶縁層上に形成された第2配線層と、
を含み、
前記第1配線層および前記第2配線層は、複数の互いに略平行な配線を有し、
前記第1配線層の配線および前記第2配線層の配線の両端が、前記第1絶縁層および前記第2絶縁層の選択的に除去された部分を介して電気的に接続され、
前記第1および第2の端部分に、螺旋状の第1のソレノイドコイルが巻き回されており、
前記中央部分に、螺旋状の第2のソレノイドコイルが巻き回されていることを特徴とする、電子方位計。 - 前記第1および第2の端部分の幅Bと、前記第1および第2の端部分の長手方向の長さDの比B/Dの値が1よりも小さいことを特徴とする、請求項5に記載の電子方位計。
- 前記第1のソレノイドコイルは、前記第1の端部分に巻き回された第3のソレノイドコイルおよび前記第2の端部分に巻き回された第4のソレノイドコイルを含み、前記第3のソレノイドコイルおよび前記第4のソレノイドコイルは、直列に接続され、かつ巻き数が同一であることを特徴とする、請求項5または6のいずれかに記載の電子方位計。
- 前記第1のソレノイドコイルは、前記中央部分、前記第1および第2の端部分に巻き回されていることを特徴とする、請求項5または6のいずれかに記載の電子方位計。
- 第1配線層と、
前記第1配線層を覆うように形成された第1絶縁層と、
前記第1絶縁層上に形成され、検出部と、前記検出部と連続してかつ前記検出部の幅よりも広い幅を持ち、前記検出部の両端に位置する第1および第2の励磁部と、を備える磁気コアと、
前記磁気コアを覆い、前記第一絶縁層上に形成された第2絶縁層と、
前記第2絶縁層上に形成された第2配線層と、
を少なくとも備えたフラックスゲートセンサにおいて、
前記第1配線層および前記第2配線層は、複数の互いに略平行な配線を有し、
前記第1配線層の配線および前記第2配線層の配線の両端が、前記第1絶縁層および前記第2絶縁層の選択的に除去された部分を介して電気的に接続され、
前記第1および第2の励磁部に、螺旋状の励磁コイルが巻き回されていることを特徴とするフラックスゲートセンサ。 - 前記励磁コイルは、前記第1の励磁部に巻き回された第1の励磁コイルと、前記第2の励磁部に巻き回された第2の励磁コイルとを含み、前記第1の励磁コイルと前記第2の励磁コイルは、発生する磁界が同一方向となるように直列に接続されていることを特徴とする請求項9に記載のフラックスゲートセンサ。
- 前記励磁コイルは、前記励磁部と、前記磁気コアの中央部に形成された検出部とに巻き回されていることを特徴とする請求項9に記載のフラックスゲートセンサ。
- 1つの基板上において、3軸のそれぞれに沿うように、3つの請求項9乃至11のいずれかに記載のフラックスゲートセンサを配置することにより構成されたことを特徴とする電子方位計。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020117026808A KR101267246B1 (ko) | 2009-05-21 | 2010-05-21 | 플럭스 게이트 센서 및 이것을 사용한 전자 방위계 |
EP10777584.3A EP2434305A4 (en) | 2009-05-21 | 2010-05-21 | MAGNETOMETRIC PROBE SENSOR AND AZIMUT ELECTRONIC INDICATOR USING THE SAME |
JP2011503276A JP4774472B2 (ja) | 2009-05-21 | 2010-05-21 | フラックスゲートセンサおよびそれを用いた電子方位計 |
CN2010800213718A CN102428380A (zh) | 2009-05-21 | 2010-05-21 | 磁通门传感器及使用其的电子方位计 |
US13/300,036 US8713809B2 (en) | 2009-05-21 | 2011-11-18 | Fluxgate sensor and electronic compass making use thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-123110 | 2009-05-21 | ||
JP2009123110 | 2009-05-21 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/300,036 Continuation US8713809B2 (en) | 2009-05-21 | 2011-11-18 | Fluxgate sensor and electronic compass making use thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010134348A1 true WO2010134348A1 (ja) | 2010-11-25 |
Family
ID=43126039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/003428 WO2010134348A1 (ja) | 2009-05-21 | 2010-05-21 | フラックスゲートセンサおよびそれを用いた電子方位計 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8713809B2 (ja) |
EP (1) | EP2434305A4 (ja) |
JP (1) | JP4774472B2 (ja) |
KR (1) | KR101267246B1 (ja) |
CN (1) | CN102428380A (ja) |
TW (1) | TWI438460B (ja) |
WO (1) | WO2010134348A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120133386A1 (en) * | 2010-11-29 | 2012-05-31 | Raimondo Sessego | Magnetic field simulator for testing singulated or multi-site strip semiconductor device and method therefor |
US20130064991A1 (en) * | 2010-05-12 | 2013-03-14 | Kenichi Ohmori | Manufacturing method of flux gate sensor |
WO2013147207A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社フジクラ | 磁界強度の測定方法、フラックスゲート型磁気素子および磁気センサ |
JP2013246005A (ja) * | 2012-05-24 | 2013-12-09 | Fujikura Ltd | 電流センサ |
JP2014081293A (ja) * | 2012-10-17 | 2014-05-08 | Japan Atomic Energy Agency | 耐熱磁気センサ |
US10418169B2 (en) | 2016-11-16 | 2019-09-17 | Tdk Corporation | Inductance element for magnetic sensor and current sensor including the same |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013212830A1 (de) * | 2013-07-02 | 2015-01-08 | Robert Bosch Gmbh | Mikrotechnisches Bauteil für eine magnetische Sensorvorrichtung oder einen magnetischen Aktor und Herstellungsverfahren für ein mikrotechnisches Bauteil für eine magnetische Sensorvorrichtung oder einen magnetischen Aktor |
US9583247B2 (en) * | 2014-05-27 | 2017-02-28 | Allegro Microsystems, Llc | Systems and methods for a magnet with uniform magnetic flux |
US9778324B2 (en) * | 2015-04-17 | 2017-10-03 | Apple Inc. | Yoke configuration to reduce high offset in X-, Y-, and Z-magnetic sensors |
CN106145023B (zh) * | 2015-06-01 | 2018-05-25 | 安康学院 | 一种微型无线圈磁通门传感器及其制备方法 |
JP6021238B1 (ja) * | 2015-10-11 | 2016-11-09 | マグネデザイン株式会社 | グラジオセンサ素子およびグラジオセンサ |
JP6332307B2 (ja) * | 2015-11-10 | 2018-05-30 | 愛知製鋼株式会社 | ボール回転方向検出システム |
US10914796B2 (en) * | 2016-02-05 | 2021-02-09 | Texas Instruments Incorporated | Integrated fluxgate device with three-dimensional sensing |
JP6240994B1 (ja) * | 2016-12-15 | 2017-12-06 | 朝日インテック株式会社 | 3次元磁界検出素子および3次元磁界検出装置 |
CN108107382A (zh) * | 2017-12-15 | 2018-06-01 | 鲁东大学 | 一种压磁材料磁感应强度准确测量装置 |
JP7028234B2 (ja) | 2019-11-27 | 2022-03-02 | Tdk株式会社 | 磁気センサ |
CN111123178B (zh) * | 2020-01-20 | 2022-03-25 | 河南理工大学 | 一种竹节形结构低功耗磁通门传感器 |
CN113639732A (zh) * | 2021-06-29 | 2021-11-12 | 西安交通大学 | 一种基于层状磁电复合材料的磁电罗盘及其应用 |
CN114123535B (zh) * | 2021-11-24 | 2024-02-23 | 国网江苏省电力有限公司检修分公司 | 特高压输电线路上在线监测设备用无线电能传输耦合机构 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08179023A (ja) * | 1994-12-27 | 1996-07-12 | Res Dev Corp Of Japan | 半導体基板に集積される磁気検出素子及び磁気検出モジュール |
FR2802650A1 (fr) * | 1999-12-17 | 2001-06-22 | Commissariat Energie Atomique | Micromagnetometre a porte de flux a saturation magnetique homogene |
JP2004184098A (ja) | 2002-11-29 | 2004-07-02 | Sumitomo Special Metals Co Ltd | 磁気センサ素子及びその製造方法 |
JP2006234615A (ja) | 2005-02-25 | 2006-09-07 | Citizen Watch Co Ltd | 磁気センサ素子とその製造方法及び電子方位計 |
JP2007279029A (ja) | 2006-03-17 | 2007-10-25 | Citizen Holdings Co Ltd | 磁気センサ素子および電子方位計 |
WO2007126164A1 (en) | 2006-04-28 | 2007-11-08 | Microgate, Inc. | Thin film 3 axis fluxgate and the implementation method thereof |
JP2009123110A (ja) | 2007-11-16 | 2009-06-04 | Panasonic Electric Works Co Ltd | ソフトウェア開発支援システム |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4267640A (en) * | 1979-04-30 | 1981-05-19 | Rca Corporation | System for ascertaining magnetic field direction |
JP3096413B2 (ja) * | 1995-11-02 | 2000-10-10 | キヤノン電子株式会社 | 磁気検出素子、磁気センサー、地磁気検出型方位センサー、及び姿勢制御用センサー |
US5850624A (en) | 1995-10-18 | 1998-12-15 | The Charles Machine Works, Inc. | Electronic compass |
US6380735B1 (en) * | 1999-04-30 | 2002-04-30 | Sumitomo Special Metals Co., Ltd. | Orthogonal flux-gate type magnetic sensor |
US6536123B2 (en) * | 2000-10-16 | 2003-03-25 | Sensation, Inc. | Three-axis magnetic sensor, an omnidirectional magnetic sensor and an azimuth measuring method using the same |
KR100464098B1 (ko) | 2002-03-14 | 2005-01-03 | 삼성전기주식회사 | 인쇄회로기판에 집적된 자계검출소자 및 그 제조방법 |
KR100544475B1 (ko) * | 2003-01-25 | 2006-01-24 | 삼성전자주식회사 | 반도체기판에 집적된 자계검출소자 및 그 제조방법 |
CN2781394Y (zh) * | 2004-11-18 | 2006-05-17 | 刘芭 | 磁通门传感器和磁方位传感器 |
US7535221B2 (en) | 2006-03-17 | 2009-05-19 | Citizen Holdings Co., Ltd. | Magnetic sensor element and electronic directional measuring device |
CN200941115Y (zh) * | 2006-05-25 | 2007-08-29 | 刘芭 | 磁通门传感器和磁方位传感器 |
-
2010
- 2010-05-19 TW TW099115942A patent/TWI438460B/zh not_active IP Right Cessation
- 2010-05-21 JP JP2011503276A patent/JP4774472B2/ja not_active Expired - Fee Related
- 2010-05-21 EP EP10777584.3A patent/EP2434305A4/en not_active Withdrawn
- 2010-05-21 KR KR1020117026808A patent/KR101267246B1/ko not_active IP Right Cessation
- 2010-05-21 CN CN2010800213718A patent/CN102428380A/zh active Pending
- 2010-05-21 WO PCT/JP2010/003428 patent/WO2010134348A1/ja active Application Filing
-
2011
- 2011-11-18 US US13/300,036 patent/US8713809B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08179023A (ja) * | 1994-12-27 | 1996-07-12 | Res Dev Corp Of Japan | 半導体基板に集積される磁気検出素子及び磁気検出モジュール |
FR2802650A1 (fr) * | 1999-12-17 | 2001-06-22 | Commissariat Energie Atomique | Micromagnetometre a porte de flux a saturation magnetique homogene |
JP2004184098A (ja) | 2002-11-29 | 2004-07-02 | Sumitomo Special Metals Co Ltd | 磁気センサ素子及びその製造方法 |
JP2006234615A (ja) | 2005-02-25 | 2006-09-07 | Citizen Watch Co Ltd | 磁気センサ素子とその製造方法及び電子方位計 |
JP2007279029A (ja) | 2006-03-17 | 2007-10-25 | Citizen Holdings Co Ltd | 磁気センサ素子および電子方位計 |
WO2007126164A1 (en) | 2006-04-28 | 2007-11-08 | Microgate, Inc. | Thin film 3 axis fluxgate and the implementation method thereof |
JP2009123110A (ja) | 2007-11-16 | 2009-06-04 | Panasonic Electric Works Co Ltd | ソフトウェア開発支援システム |
Non-Patent Citations (3)
Title |
---|
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, vol. 42, no. 2, April 1993 (1993-04-01), pages 635 |
PAVEL RIPKA: "Magnetic Sensors and Magnetometers", 2001, ARTECH HOUSE, INC, pages: 94 |
See also references of EP2434305A4 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130064991A1 (en) * | 2010-05-12 | 2013-03-14 | Kenichi Ohmori | Manufacturing method of flux gate sensor |
US20120133386A1 (en) * | 2010-11-29 | 2012-05-31 | Raimondo Sessego | Magnetic field simulator for testing singulated or multi-site strip semiconductor device and method therefor |
US8878527B2 (en) * | 2010-11-29 | 2014-11-04 | Amkor Technology, Inc. | Magnetic field simulator for testing singulated or multi-site strip semiconductor device and method therefor |
WO2013147207A1 (ja) * | 2012-03-30 | 2013-10-03 | 株式会社フジクラ | 磁界強度の測定方法、フラックスゲート型磁気素子および磁気センサ |
CN104054002A (zh) * | 2012-03-30 | 2014-09-17 | 株式会社藤仓 | 磁场强度的测量方法、磁通门型磁元件以及磁传感器 |
JP2013246005A (ja) * | 2012-05-24 | 2013-12-09 | Fujikura Ltd | 電流センサ |
JP2014081293A (ja) * | 2012-10-17 | 2014-05-08 | Japan Atomic Energy Agency | 耐熱磁気センサ |
US10418169B2 (en) | 2016-11-16 | 2019-09-17 | Tdk Corporation | Inductance element for magnetic sensor and current sensor including the same |
Also Published As
Publication number | Publication date |
---|---|
CN102428380A (zh) | 2012-04-25 |
US20120151786A1 (en) | 2012-06-21 |
EP2434305A4 (en) | 2015-02-18 |
JP4774472B2 (ja) | 2011-09-14 |
EP2434305A1 (en) | 2012-03-28 |
KR20120022910A (ko) | 2012-03-12 |
TWI438460B (zh) | 2014-05-21 |
JPWO2010134348A1 (ja) | 2012-11-08 |
US8713809B2 (en) | 2014-05-06 |
TW201105994A (en) | 2011-02-16 |
KR101267246B1 (ko) | 2013-05-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4774472B2 (ja) | フラックスゲートセンサおよびそれを用いた電子方位計 | |
WO2011155527A1 (ja) | フラックスゲートセンサおよびそれを利用した電子方位計ならびに電流計 | |
JP5518661B2 (ja) | 半導体集積回路、磁気検出装置、電子方位計 | |
JP6276190B2 (ja) | 磁場センサ | |
US20060145690A1 (en) | Current sensor | |
JP2008197089A (ja) | 磁気センサ素子及びその製造方法 | |
JP4695325B2 (ja) | 磁気検出素子とその製造方法及び該素子を用いた携帯機器 | |
JP2009535616A (ja) | 薄膜型3軸フラックスゲート及びその製造方法 | |
US6650112B2 (en) | Magnetics impedance element having a thin film magnetics core | |
JP2011047731A (ja) | 電力計測装置 | |
JP2000284030A (ja) | 磁気センサ素子 | |
JP3360168B2 (ja) | 磁気インピーダンス素子 | |
JP6064656B2 (ja) | センサ用磁気抵抗素子、およびセンサ回路 | |
JP5413866B2 (ja) | 磁気検出素子を備えた電流センサ | |
JP2010271081A (ja) | 磁気センサ素子およびそれを用いた電子方位計と磁界検出方法 | |
WO2011155526A1 (ja) | フラックスゲートセンサおよびそれを利用した電子方位計ならびに電流計 | |
JP4984962B2 (ja) | 磁気式角度センサ | |
WO2012042336A1 (ja) | 電力計測装置および電力計測方法 | |
JP2003161770A (ja) | 磁気検出素子 | |
JP5793681B2 (ja) | 電力計測装置 | |
WO2015046206A1 (ja) | 電流センサ | |
WO2013145297A1 (ja) | 薄膜フラックスゲート型磁気素子 | |
JP2014081300A (ja) | フラックスゲート型磁気素子、磁気センサ | |
JP2005147998A (ja) | 磁気インピーダンスセンサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080021371.8 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10777584 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2011503276 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20117026808 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010777584 Country of ref document: EP |